DE102016112867B4 - Transport arrangement and processing arrangement and method for operating them - Google Patents

Abstract

Transport arrangement (1100a, 1200a), comprising: • a transport area (111b); • a plurality of rotatably mounted winding sleeve couplings (112a, 112b, 112c, 112d) for coupling each winding sleeve; • at least one rotatably mounted guide roller (122), which is in the transport area (111b) is arranged for guiding a flexible substrate along a curved transport path (111), which runs between the plurality of winding sleeve couplings (112a, 112b, 112c, 112d) • a guide roller carrier (702), which is located within the transport region (111b ) has a plurality of fastening structures (712a, 712b, 722a, 722b) which are arranged in a predefined regular pattern and of which each fastening structure defines a mounting position (701a, 701b); and • at least one bearing arrangement (1221), by means of which the at least one guide roller (122) is mounted; • wherein the bearing arrangement (1221) has a mounting base (1102) which is complementary to each fastening structure of the plurality of fastening structures (712a, 712b, 722a, 722b) is set up so that the bearing arrangement (1221) can optionally be attached in each of the assembly positions (701a, 701b).

Description

The invention relates to a transport arrangement and a processing arrangement and a method for operating them.

In general, a substrate, e.g. a glass substrate, a metal substrate and / or a polymer substrate, can be treated (processed), e.g. are coated so that the chemical and / or physical properties of the substrate can be changed. Various coating methods can be used to coat a substrate, such as vapor deposition, e.g. chemical vapor deposition (CVD) or physical vapor deposition (PVD).

In general, flexible substrates in the form of a tape (e.g. metal tape, foil tape or glass tape) can be processed in a continuous system, e.g. coated (and / or otherwise treated) in a film coating system. In this case, for example, a tape substrate can be transported through a coating area by means of a transport arrangement. The transport arrangement can, for example, be set up in such a way that the tape substrate is processed from roll-to-roll (also referred to as R2R), the tape substrate being unwound from a first substrate roll, transported through the coating area, and after coating a second substrate wrap is rewound (also referred to as wrapping). The coating system can have a vacuum chamber, so that the strip substrate can be coated in a vacuum. The substrate roll can, for example, be introduced into or removed from the vacuum chamber, so that the vacuum chamber has to be ventilated cyclically in order to replace the tape substrate.

For example, a vacuum coating system can be used to deposit one or more layers on a strip substrate by means of chemical and / or physical vapor deposition. In order to efficiently implement large-area deposition on appropriately large-area strip substrates, the strip substrate can be wound through several coating areas by means of guide rollers, a coating process being able to be carried out in each coating area of the coating system while the substrate is being transported through the system.

Traditionally, an R2R vacuum coating system (also known as a vacuum coater) is individually designed for the intended purpose. In a first step, a concept for the wrapping system is configured that meets the requirements of the application. For example, certain requirements may be placed on the maximum bending radius, the maximum overall height, the space required for large substrate windings or procedural peculiarities. Subsequently, a vacuum chamber is configured which accommodates the wrapping system and the components required for coating, several operations in the vacuum chamber being taken into account for operating the wrapping system and the components. Then the interfaces for all additional equipment, such as gas supply, pump access, sensors etc., are arranged in the vacant spaces. This configuration process leads to a compact R2R vacuum coating system, the wrapping system of which cannot be changed or can hardly be changed easily. For example, the preconfigured wrapping system can determine the assembly position of the guide rollers and the substrate wrap, so that the course of the transport path can hardly be adjusted afterwards or not at all. If the system is subsequently changed, it must often be accepted that the subsequent changes can often only be carried out with greater inaccuracy, which can result in the guide rollers no longer being exactly parallel to the axis, so that the substrate guided over them drifts , curls or in the worst case is damaged.

In addition, different approaches are considered for each application, such as how the corresponding wrapping of the substrate is to be implemented constructively, so that even the wrapping systems, whose concept is aimed at the same application, are rarely compatible with one another. It may therefore be the case that newer systems cannot be easily combined with the existing systems.

DE 10 2014 113 036 A1 describes an arrangement for coating a band-shaped substrate, in which front-side contact with the band-shaped sensitive material such as a flexible glass substrate is to be avoided. For this purpose, the substrate guiding line of a substrate guiding means should run at least partially back from the outlet opening of the winding space to the outer wall along the outer wall of the winding space and into the winding space.

DE 37 38 722 A1 describes an arrangement which is intended to prevent the layers from sticking to the reel after the coating process. For this purpose, a channel or a pipe opening into the coating chamber for the introduction of a gas, preferably oxygen or nitrogen, should be provided.

EP 1 849 888 B1 describes an arrangement which is intended to suppress thermal deformation of a material film such as plastic and is to be able to form a metal layer at high speed. For this purpose, a high contact force between the insulating material film and the cooling roller should be provided both before and after the formation of the metal layer, which should prevent the thermal deformation of the material film.

Compared to the conventional concepts described above, the object is achieved according to the subject matter of claims 1 to 12 to enable the greatest possible flexibility.

According to various embodiments, it was recognized that the associated constructive variety of possible concepts for wrapping a substrate has synergetic similarities for a wide range of possible uses. These synergetic commonalities can be used to find the configuration of the wrapping system for each individual application that has the least design differences compared to the other applications. On the basis of the intersection of the configurations selected in this way, those structural peculiarities can ultimately be identified which would have to be variable in order to cover the possible uses.

According to various embodiments, a transport arrangement, a processing arrangement and a method for operating them are provided, which combine the synergetic commonalities and thus enable the greatest possible flexibility. Due to the great flexibility, it is possible to avoid having to replace a system that is already in stock or, if this is possible at all, to have to be converted at great expense in order to meet the requirements of a new application. For example, especially in test plants, laboratory machines, or other plants for research and development (also referred to as R&D plants), it is difficult to predict which processes and coating materials could play a role in the future and / or which specifications could be required for this.

Clearly, according to various embodiments, it is possible to change the position of individual guide rollers, to exchange them for other types of guide rollers and / or to change their number. This makes it easier to change and adapt the configuration of a system, which saves costs and effort on the economic side and extends the spectrum for possible applications, processes and materials for which the system can be used on the process technology side. Furthermore, the preconfigured mounting positions allow a large axis parallelism to be achieved, which reduces the risk of a substrate breakage, particularly with a sensitive substrate (e.g. a glass foil).

According to various embodiments, a transport arrangement, a processing arrangement and a method for operating these are provided, which are designed in such a way that the plant operator (e.g. of test plants) has the possibility of realizing variable path guides and thus increasing the process variety that can be carried out. This also enables future, previously unknown applications to be implemented in an existing system.

According to various embodiments, a transport arrangement can have the following: a plurality of rotatably mounted winding tube couplings, of which two winding tube couplings are set up for coupling winding tubes, between which a flexible substrate is to be wound, and of which at least one additional winding tube coupling for coupling at least one additional winding tube, by means of which an intermediate layer is to be taken up and / or kept available; at least one rotatably mounted guide roller, which defines a curved transport path along which the wrapping takes place (also referred to as web run); wherein the plurality of winding tube couplings are configured essentially in the same way, so that the winding tubes are interchangeable.

According to various embodiments, a transport arrangement can have the following: at least three rotatably mounted winding tube couplings for coupling two winding tubes, between which a flexible substrate is to be wrapped, and for coupling at least one additional winding tube, by means of which an intermediate layer is to be taken up and / or kept available; at least one rotatably mounted guide roller which defines a curved transport path along which the wrapping takes place; wherein the three winding tube couplings are set up essentially the same, so that the winding tubes are interchangeable.

According to various embodiments, the transport arrangement can further comprise: a plurality (for example at least three) drives, each drive of which is coupled to exactly one winding sleeve coupling of the plurality of winding sleeve couplings; the plurality of drives being configured essentially in the same way, so that when the control is of the same type, they rotate the plurality of winding tube couplings synchronously (for example bidirectionally). For example, synchronous (eg tape run synchronous) be understood as that the several winding tube couplings perform a similar movement, for example with the same sense of rotation (direction of rotation), in synchronism, with a simultaneous movement change and / or with the same speed.

According to various embodiments, the transport arrangement may further comprise: a controller for controlling each drive of the plurality of drives according to a wrapping configuration, which comprises: a winding configuration for driving the winding sleeve coupling by means of which the substrate is wound up; and / or an unwinding configuration for driving the winding tube coupling by means of which the substrate is unwound; wherein the controller is set up to selectively drive each drive of the plurality of drives according to the winding configuration and / or according to the winding configuration.

According to various embodiments, the controller can be set up to adapt a rotational speed of at least one of the winding tube couplings between which the substrate is wrapped to a size that represents a transport characteristic (e.g. a transport progress).

According to various embodiments, the controller can be set up to adapt a rotational speed of the at least one guide roller to a variable that represents a transport characteristic (e.g. a transport progress).

According to various embodiments, each winding sleeve coupling of the plurality of winding sleeve couplings can have a tensioning device (e.g. comprising a sleeve tensioning mandrel, a tensioning mandrel, a cone tensioning element, an expanding mandrel and / or a segmented mandrel) for clamping the respective winding sleeve.

According to various embodiments, the transport area can have at least one processing section, in which the transport path runs in a straight line along a length of more than a quarter of the circumference of the at least one guide roller or has a constant curvature.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings can be set up to wrap a substrate between a first winding sleeve coupling of the plurality of winding sleeve couplings and a second winding sleeve coupling of the plurality of winding sleeve couplings in a first winding configuration; in a second wrapping configuration, to wrap a substrate between a first winding sleeve coupling of the plurality of winding sleeve couplings and a third winding sleeve coupling of the plurality of winding sleeve couplings.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings can be set up to wrap a substrate between the third winding sleeve coupling and the second winding sleeve coupling in a third winding configuration.

Optionally, the first wrapping configuration, the second wrapping configuration and / or the third wrapping configuration can include: unwrapping an intermediate layer with the substrate (ie unwrapping from a substrate wrap) and / or wrapping an intermediate layer with the substrate (ie wrapping in the substrate wrap) .

According to various embodiments, the transport arrangement can further comprise: a guide roller carrier, which provides a first mounting position in which the at least one guide roller is mounted in the first wrapping configuration; and which provides a second mounting position in which the at least one guide roller is mounted in the second wrapping configuration.

According to various embodiments, a vacuum assembly may include: a vacuum chamber; and a transport arrangement according to one or more embodiments, the plurality of winding tube couplings of which are arranged in the vacuum chamber.

According to various embodiments, the vacuum chamber can have a plurality of rotary unions, each of which is aligned with exactly one winding sleeve coupling of the plurality of winding sleeve couplings.

According to various embodiments, the vacuum chamber can have a chamber wall with a plurality of rotary unions, each of which rotary unions is coupled to exactly one winding sleeve coupling of the plurality of winding sleeve couplings for transmitting a torque to the winding sleeve coupling by means of the rotating unions from outside the vacuum chamber.

According to various embodiments, a method for operating a transport arrangement, which has at least a first winding tube coupling, a second winding tube coupling and a third winding tube coupling, can comprise the following: processing of a substrate in a first winding configuration, in which the substrate is wound between two winding tubes, which is by means of the first winding sleeve coupling and the second winding sleeve coupling is mounted; and processing a substrate in a second wrapping configuration in which the substrate is wrapped between two winding tubes which are supported by means of the third winding tube coupling and the first winding tube coupling.

According to various embodiments, the method can further comprise: reconfiguring the transport arrangement between the first wrapping configuration and the second wrapping configuration.

According to various embodiments, a transport arrangement can have the following: a transport area; several rotatably mounted winding tube couplings for coupling one winding tube each (e.g. a substrate winding tube); at least one rotatably mounted guide roller, which is arranged in the transport region, for guiding a flexible substrate along a curved transport path which runs between the plurality of winding tube couplings; a guide roller carrier, which has a plurality of fastening structures within the transport area, which are arranged in a predefined regular pattern and of which each fastening structure defines a mounting position; at least one bearing arrangement, by means of which the at least one guide roller is mounted; wherein the bearing arrangement has a mounting base, which is complementary to each fastening structure of the plurality of fastening structures, so that the bearing arrangement can optionally be fastened in each of the mounting positions.

The mounting base does not necessarily have to be complementary to all fastening structures of the guide roller carrier. In other words, the guide roller carrier can optionally have a plurality of additional fastening structures (e.g. arranged in a predefined regular additional pattern), each of which differentiates from the plurality of fastening structures. For example, the guide roller carrier has several groups of fastening structures which differ from one another. For example, the guide roller carrier can have several columns and / or rows of fastening structures which differ from one another.

Alternatively or additionally, it is not necessary for all of the fastening structures of the plurality of fastening structures to be set up identically. The plurality of fastening structures can clearly be set up in such a way that the mounting base is intended to be fastened to each fastening structure of the plurality of fastening structures.

For example, the transport arrangement can have at least one additional bearing arrangement, by means of which the at least one guide roller is mounted; wherein the additional bearing arrangement has an additional mounting base, which is complementary to each fastening structure of the plurality of additional fastening structures. For example, the plurality of additional fastening structures and the plurality of fastening structures can provide a different permissible maximum load or a different grid.

A spatially one-dimensional or spatially two-dimensional periodic repetition can be understood as a regular pattern, for example a common property of all fastening structures. The periodic repetition can be generated by means of at least one of the following symmetry operations: rotation, point mirroring, sliding mirroring, translation, and / or plane mirroring. In other words, the pattern can have at least one of the following symmetries: rotational symmetry; Sliding mirror symmetry; Translation symmetry; and / or plane mirror symmetry. The plurality of fastening structures can or can be arranged in a common plane.

According to various embodiments, the winding tube couplings (also referred to as a rotary sleeve bearing) can be set up to rotatably support the winding tubes.

According to various embodiments, the transport arrangement can further comprise: a drive system for driving the plurality of winding tube couplings.

According to various embodiments, the plurality of winding tube couplings can each have a clamping device for clamping the respective substrate winding tube.

According to various embodiments, the transport region can have at least one section in which the transport path runs in a straight line or has a constant curvature, the section having a length of more than a quarter of the circumference of the at least one guide roller.

In other words, the transport path can have at least one constantly curved or rectilinear section which has a length of more than a quarter of the circumference of the at least one guide roller.

According to various embodiments, the transport arrangement can further comprise: a Processing roll, which is arranged in the processing section of the transport area and has a temperature control device.

According to various embodiments, at least some of the plurality of fastening structures can be arranged in the processing section of the transport area.

According to various embodiments, the transport area can have at least one feed section and one discharge section, which are arranged between the processing section and the plurality of winding tube couplings; wherein the plurality of fastening structures are arranged in a plurality of groups, of which a first group is arranged in the feed section and a second group is arranged in the discharge section.

According to various embodiments, the fastening structures of the first group and the fastening structures of the second group can be arranged mirror-symmetrically with respect to a mirror plane which runs between the plurality of winding tube couplings.

According to various embodiments, each fastening structure of the plurality of fastening structures can have a plurality of form-fitting elements, a diagram in which the plurality of form-fitting elements of each fastening structure of the plurality of fastening structures is arranged is the same. For example, a distance between mutually adjacent positive locking elements can be the same.

Each fastening structure of the guide roller carrier can be assigned to exactly one mounting position (i.e. clearly).

According to various embodiments, at least two fastening structures of the plurality of fastening structures can have at least one common positive-locking element. The form-fitting elements of each fastening structure can be used to assemble the guide roller in the assembly position, which is assigned to the fastening structure. At least some form-locking elements can be used for fastening in the guide roller in several assembly positions.

According to various embodiments, at least some of the plurality of form-fitting elements of each fastening structure can be provided by means of a through opening in the carrier plate. In other words, at least some of the plurality of fastening structures can be provided in the carrier plate by means of a plurality of through openings.

According to various embodiments, the guide roller carrier can have at least one group of the plurality of fastening structures; wherein each fastening structure of the group is provided by means of a plurality of through openings in the guide roller carrier.

According to various embodiments, the guide roller carrier may have a carrier plate which has the at least one group of the plurality of fastening structures (i.e. one group or several groups). For example, each fastening structure of the group can be provided in the carrier plate by means of a plurality of through openings.

According to various embodiments, the plurality of fastening structures can have a plurality of fastening structure pairs, of which each fastening structure pair has two fastening structures which lie opposite one another, so that the bearing arrangement can be mounted between them.

The mounting structures of each pair of mounting structures can be part of the same group of mounting structures.

The fastening structures of each pair of fastening structures (also referred to as fastening structure and counter-fastening structure) can be assigned to the same assembly position.

According to various embodiments, the guide roller carrier can have a plurality of counter-fastening structures, of which each counter-fastening structure forms a fastening structure pair with a fastening structure of the plurality of fastening structures, between which the bearing arrangement can be mounted.

According to various embodiments, the guide roller carrier can have two carrier plates, each of which carrier plate has a fastening structure of each fastening structure pair.

According to various embodiments, the guide roller carrier can have an additional carrier plate which has at least one group of the plurality of counter-fastening structures; wherein each counter-fastening structure of the additional carrier plate is provided by means of a plurality of through openings in the additional carrier plate.

According to various embodiments, the bearing arrangement can have an alignment device which is used to adjust a Alignment of an axis of rotation of the bearing arrangement is set up.

According to various embodiments, at least one winding sleeve coupling of the plurality of winding sleeve couplings can be set up for rotatably supporting an intermediate layer winding sleeve.

According to various embodiments, a vacuum assembly may include: a vacuum chamber; and a transport arrangement according to one or more embodiments, the transport region of which is arranged in the vacuum chamber.

According to various embodiments, a method for operating a transport arrangement can be set up, which comprises: a guide roller carrier which has a plurality of fastening structures which are arranged in a predefined regular pattern and each of which fastening structure defines an assembly position; at least one bearing arrangement, by means of which the at least one guide roller is mounted. The method can include: deflecting a substrate by means of the guide roller in a first wrapping configuration, in which the bearing arrangement is brought into a first assembly position, and deflecting a substrate by means of the guide roller in a second wrapping configuration, in which the bearing arrangement is in a second assembly position different from that first installation position is brought.

According to various embodiments, the at least one guide roller can be at least one of the following guide roller types: a deflection roller; a spreader roll; a measuring roller; and / or a pull roller. At least the pull roller can be a driven (i.e. active) guide roller. Alternatively or additionally, the deflection roller; the spreader roller and / or the measuring roller can be a non-driven (i.e. passive) guide roller.

According to various embodiments, the plurality of winding tube couplings can be configured essentially in the same way, so that the winding tubes are interchangeable. Essentially the same can be understood as identical or at least so similar that the differences between the several winding tube couplings are so small or few that the interchangeability of the winding tubes is preserved. In other words, there may optionally be slight differences between the several winding tube couplings, which, however, does not impair their functionality compared to the winding tubes. For example, the winding sleeves can be configured essentially in the same way.

For example, the winding sleeve couplings can have the same outer diameter or can be adjustable on this. This can provide that a winding tube with the appropriate inner diameter fits on each winding tube coupling of the multiple winding tube couplings, e.g. if several winding cores with a uniform inner diameter are used.

If, on the other hand, winding sleeves are used that differ in their inner diameter, winding sleeve couplings with an adjustable outer diameter can be used, e.g. in that the outside diameter is adjustable by means of a clamping device. Even if winding tubes with a uniform inner diameter are used, winding tube couplings with an adjustable outer diameter can be used, which clearly facilitates the insertion of the winding tubes.

If the several winding sleeve couplings have an adjustable outer diameter (e.g. adjustable by means of a clamping device), the adjustment ranges in which the outer diameter of each winding sleeve coupling of the several winding sleeve couplings can be overlapped can overlap. In other words, each winding sleeve coupling of the multiple winding sleeve couplings can have an adjustment range in which its outer diameter can be adjusted, the adjustment ranges of all winding sleeve couplings of the plurality of winding sleeve couplings overlapping (i.e. that their intersection is not zero). The inner diameter of each winding tube can lie in the overlap of the adjustment areas so that they are interchangeable.

For example, the winding sleeve couplings can have at least similar clamping devices.

Analogously, the multiple drives can be set up in such a way that they can mutually take over their functionality. For example, the multiple drives can have similar operating points, e.g. the same torque, the same drive power and / or the same speed, e.g. based on a supplied electrical power and / or its frequency. Alternatively or additionally, the multiple drives can match in their approved electrical power.

According to various embodiments, a transport arrangement can have a wrapping area in which the winding and / or unwinding of the substrate and / or the intermediate layer takes place, and can also have an adjacent transport area through which the substrate is transported. The several Winding sleeve couplings can be arranged in the winding area.

According to various embodiments, a processing arrangement may include: a vacuum arrangement; a processing source for processing a substrate in a processing section of the vacuum arrangement.

According to various embodiments, the spacing between adjacent winding tube couplings of the plurality of winding tube couplings can be in a range from approximately 1 m to approximately 2 m.

Exemplary embodiments of the invention are shown in the figures and are explained in more detail below.

• 1A eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 1B, 2A und 2B jeweils die Transportanordnung aus 1A in verschiedenen Konfigurationen;
• 3A eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 3B, 4A und 4B jeweils die Transportanordnung aus 3A in verschiedenen Konfigurationen;
• 5A, 5B und 5C jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Detailansicht;
• 6A und 6B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 7A und 7B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 8A und 8B jeweils eine Vakuumanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 9A und 9B jeweils eine Vakuumanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 10 ein Verfahren gemäß verschiedenen Ausführungsformen in einem schematischen Ablaufdiagram;
• 11A und 11B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 12A und 12B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 13A und 13B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 14A und 14B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 15A, 15B und 15C jeweils eine Befestigungsstruktur gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 16A, 16B und 16C jeweils eine Befestigungsstruktur gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 17A und 17B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 18A eine Lageranordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 18B eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 19 ein Verfahren gemäß verschiedenen Ausführungsformen in einem schematischen Ablaufdiagram;
• 20 und 21 jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Perspektivansicht;
• 22A und 22B jeweils eine Prozessieranordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 23 eine Prozessieranordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 24 einen Führungsrolle-Träger gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 25 und 26 jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 27 und 28 jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 29A und 29B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen;
• 30A und 30B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen;
• 31A und 31B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen;
• 32A und 32B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen; und
• 33A und 33B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen.

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• 1A a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 1B , 2A and 2 B each of the transport arrangement 1A in different configurations;
• 3A a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 3B , 4A and 4B each of the transport arrangement 3A in different configurations;
• 5A , 5B and 5C each a transport arrangement according to various embodiments in a schematic detailed view;
• 6A and 6B each a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 7A and 7B each a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 8A and 8B each a vacuum arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 9A and 9B each a vacuum arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 10th a method according to various embodiments in a schematic flow diagram;
• 11A and 11B each a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 12A and 12B each a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 13A and 13B each a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 14A and 14B each a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 15A , 15B and 15C each a fastening structure according to various embodiments in a schematic side view or cross-sectional view;
• 16A , 16B and 16C each a fastening structure according to various embodiments in a schematic side view or cross-sectional view;
• 17A and 17B each a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 18A a bearing arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 18B a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 19th a method according to various embodiments in a schematic flow diagram;
• 20 and 21 each a transport arrangement according to various embodiments in a schematic perspective view;
• 22A and 22B each a processing arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 23 a processing arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 24th a guide roller carrier according to various embodiments in a schematic side view or cross-sectional view;
• 25th and 26 each a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 27 and 28 each a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 29A and 29B a transport arrangement according to different embodiments, each in different wrapping configurations;
• 30A and 30B a transport arrangement according to different embodiments, each in different wrapping configurations;
• 31A and 31B a transport arrangement according to different embodiments, each in different wrapping configurations;
• 32A and 32B a transport arrangement according to different embodiments, each in different wrapping configurations; and
• 33A and 33B a transport arrangement according to different embodiments in different wrapping configurations.

In the following detailed description, reference is made to the accompanying drawings, which form a part hereof and in which specific embodiments are shown by way of illustration in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "front", "back", "front", "back", etc. is used with reference to the orientation of the figure (s) described. Because components of embodiments can be positioned in a number of different orientations, the directional terminology is illustrative and is in no way limiting. It is understood that other embodiments may be used and structural or logical changes may be made without departing from the scope of the present invention. It is understood that the features of the various exemplary embodiments described herein may be combined with one another unless specifically stated otherwise. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

In the context of this description, the terms “connected”, “connected” and “coupled” are used to describe both a direct and an indirect connection (for example ohmic and / or electrically conductive, for example an electrically conductive connection), a direct or indirect connection as well as a direct or indirect coupling. Identical or similar elements are provided with identical reference symbols in the figures, insofar as this is expedient.

According to various embodiments, the term “coupled” or “coupling” in the sense of a (e.g. mechanical, hydrostatic, thermal and / or electrical), e.g. direct or indirect, connection and / or interaction can be understood. For example, several elements can be coupled to one another along an interaction chain. According to various embodiments, "coupled" can be understood in the sense of a mechanical (e.g. physical or physical) coupling, e.g. through direct physical contact. A clutch can be set up to transmit a mechanical interaction (e.g. force, torque, etc.).

In connection with vacuum generating or maintaining vacuum components (e.g. a pump, a chamber, a line, a valve, etc.) the term "coupled" or "coupling" can be understood in the sense of a connection to a common vacuum system. The components of the vacuum system can be set up to exchange gas with one another by means of the coupling, wherein the coupling can be gas-separated from an exterior of the vacuum system.

According to various embodiments, a controller can have a forward control section and can thus clearly implement a sequence controller which converts an input variable into an output variable. The control path can also be part of a control loop, so that a control system is implemented. In contrast to the pure forward control, the control has a continuous influence of the output variable on the input variable, which is brought about by the control loop (feedback). In other words, a regulation can be used as an alternative or in addition to the control, or a regulation can take place as an alternative or in addition to the control.

According to various embodiments, the substrate can be coated with a coating material. The coating material can be at least one of the following Having or being made of materials: a metal; a transition metal, an oxide (e.g. a metal oxide or a transition metal oxide); a dielectric; a polymer (e.g. a carbon-based polymer or a silicon-based polymer); an oxynitride; a nitride; a carbide; a ceramic; a semi-metal (eg carbon); a perovskite; a glass or vitreous material (e.g. a sulfidic glass); a semiconductor; a semiconductor oxide; a semi-organic material, and / or an organic material. The coating material for coating the substrate can be provided by means of a coating material source.

The coating material source may, according to various embodiments, be configured to coat at least one substrate (i.e. one or more substrates), which e.g. is transported through the processing section. For example, the coating material source can be configured to provide a gaseous coating material (e.g. a material vapor) and / or liquid coating material, which e.g. can be deposited on the at least one substrate to form a layer. A source of coating material may include at least one of the following: a sputtering device, a thermal evaporation device (e.g., a laser beam evaporator, an arc evaporator, an electron beam evaporator and / or a thermal evaporator), a precursor gas source, a liquid phase atomizer. A sputtering device can be set up to atomize the coating material by means of a plasma. A thermal evaporation device can be set up to convert the coating material into a gaseous aggregate state by means of thermal energy. Depending on the nature of the coating material, sublimation and / or evaporation of the coating material can take place. In other words, the thermal evaporation device can also sublimate the coating material. A liquid phase atomizer can be set up to apply a coating material from the liquid phase, e.g. having or formed from a dye.

According to various embodiments, the substrate can have or be formed from at least one of the following: a ceramic, a glass, a semiconductor (for example an amorphous, polycrystalline or single-crystal semiconductor, for example silicon), a metal (for example aluminum, copper, iron, steel, Platinum, gold, etc.) a polymer (e.g. plastic) and / or a mixture of different materials such as a composite material (e.g. carbon fiber reinforced carbon, or carbon fiber reinforced plastic).

According to various embodiments, the substrate can have or be formed from a plastic film, a semiconductor film, a metal film and / or a glass film, and can optionally be or be coated. Optionally, the substrate can have fibers, e.g. Glass fibers, carbon fibers, metal fibers and / or plastic fibers, e.g. in the form of a fabric, a net, a knitted fabric, knitted fabric, or as a felt or fleece.

According to various embodiments, a substrate can be transported from roll to roll as a belt (also referred to as a belt substrate). The tape substrate can have a width (extension transverse to the direction of transport) in a range from approximately 30 cm to approximately 500 cm, or a width of more than approximately 500 cm. Furthermore, the tape substrate can be flexible. Clearly, a strip substrate can be any substrate that can be wound onto a roll and / or can be processed, for example, from roll to roll. Depending on the elasticity of the material used, the tape substrate can have a material thickness (also referred to as substrate thickness) in a range from about a few micrometers (e.g. from about 1 µm) to about a few millimeters (e.g. up to about 10 mm), e.g. in a range from about 0.01 mm to about 3 mm. The guide rollers can be longer than the substrate is wide.

According to various embodiments, the transport arrangement described herein can be configured in such a way, e.g. have one or more concave guide rollers (or rollers) that the tape substrate is transported smoothly (evenly) and the tape substrate is clearly not curled or warped, e.g. using so-called spreader rolls. Furthermore, the transport arrangement described here can be set up in such a way that a predefined tensile stress is applied to the belt substrate, e.g. at least in the processing section. For example, a guide roller of the transport arrangement can generate a predefined tension due to the predefined mass of the roller and / or its speed can be controlled and / or regulated.

According to various embodiments, processing (also referred to as treating) a tape substrate may include at least one of the following: cleaning the tape substrate, coating the tape substrate, irradiation (e.g., by means of light, coherent light, UV light, particles, electrons, ions, etc.) the tape substrate, modifying the surface of the tape substrate, heating the tape substrate, etching the tape substrate and glowing the tape substrate.

In the context of this description, a metal (also referred to as a metallic material) have (or be formed from) at least one metallic element (ie one or more metallic elements), for example at least one element from the following group of elements: copper (Cu), iron (Fe), titanium (Ti), nickel (Ni) , Silver (Ag), chrome (Cr), platinum (Pt), gold (Au), magnesium (Mg), aluminum ( A1 ), Zirconium (Zr), tantalum (Ta), molybdenum (Mo), tungsten (W), vanadium (V), barium (Ba), indium (In), calcium (Ca), hafnium (Hf), samarium (Sm ), Silver (Ag), and / or lithium (Li). Furthermore, a metal can have or be formed from a metallic compound (for example an intermetallic compound or an alloy), for example a compound of at least two metallic elements (for example from the group of elements), such as bronze or brass, or for example a compound at least one metallic element (eg from the group of elements) and at least one non-metallic element (eg carbon), such as steel.

According to various embodiments, a chamber housing can have one or more chambers. The chamber housing can, for example, be used to provide a vacuum or a vacuum (i.e. set up as a vacuum chamber housing) with a pump arrangement, e.g. a vacuum pump arrangement (e.g. gas-conducting) and be set up in such a stable manner that it withstands the effects of air pressure in the pumped out state. The pump arrangement (comprising at least one vacuum pump, e.g. a high vacuum pump, e.g. a turbomolecular pump) can make it possible to remove a part of the gas from the interior of the processing chamber, e.g. to pump out from the vacuum area. Accordingly, one or more vacuum chambers can be provided in one chamber housing. In other words, the chamber housing can be set up as a vacuum chamber housing.

According to various embodiments, a chamber housing, for example a vacuum chamber provided therein, can be set up such that a pressure in a range from approximately 10 mbar to approximately 1 mbar (in other words rough vacuum) and / or a pressure in a range can be provided from about 1 mbar to about 10 ^-3 mbar (in other words, fine vacuum), and / or a pressure in a range from about 10 ^-3 mbar to about 10 ^-7 mbar (in other words, high vacuum) and / or a pressure of less as a high vacuum, for example less than approximately 10 ^-7 mbar.

According to various embodiments, a transport arrangement and a processing arrangement and a method for operating them are provided which are economically attractive for the operator, since they offer great possible flexibility.

According to various embodiments, a transport arrangement and a processing arrangement or a machine concept are provided for this, which at least three, e.g. has four identical winding drives. These can be used as substrate winder or interleaf winder (also referred to as interlayer winder). The winding drives can be set up to drive the respective winders (also referred to as winding sleeve couplings) in both directions of rotation.

The storage of the winder can vary depending on the wrapping configuration (clearly the system configuration). With a small substrate width, single-sided cantilever winders can be used, e.g. with a substrate width up to approximately 400 mm. With a larger substrate width, e.g. from 300 mm or more (e.g. about 600 mm), a front board can be provided which enables the winders to be supported on both sides.

A guide roller (also referred to as a guide roller) can, depending on the application and configuration, be designed or configured differently. For example, a guide role can be set up as a passive guide for the transport path. Such a passive guide roller can, for example, be without drive and its rotation can be caused by the movement of the substrate, e.g. in the case of a pulley. The passive guide roller can, for example, have a metal surface (e.g. a steel roller) and / or be ground or polished. Mechanical stress on the substrate due to the guide roller and / or slippage can thus be minimized.

Alternatively, a guide roller can be set up as a pull roller (also referred to as a pull roller). A pull roller can have a rubberized surface, e.g. can this be or be coated with a rubber.

Optionally, a guide role can be set up as a measuring role. The measuring roller can have at least one sensor which can be set up to detect a mechanical variable, the mechanical variable representing a mechanical tension in the substrate. The mechanical quantity can, for example, have a mechanical interaction with the substrate, for example a mechanical force to or from the substrate (for example a torque). Alternatively or additionally, the mechanical variable can have a rotational speed of the measuring roller. In other words, the measuring roller can be set up to detect a mechanical variable which is a mechanical tensile stress in the substrate and / or their gradients and / or transients.

The transport arrangement can optionally have one or more train control sections (for train decoupling). The or each tension control path can have at least one measuring roller, a tension roller and a control. The controller can be set up to control and / or regulate a rotational speed and / or a torque of the pull roller based on the mechanical variable, e.g. according to a requirement. The controller can also be used to control and / or regulate several train control systems together. With a sensitive substrate, the or each tension control path can be used to control and / or regulate the mechanical tension (also referred to as web tension) which is transmitted from the guide rollers and / or winders to the substrate.

After reconfiguring the transport arrangement (i.e. reconfiguring the web run), it may be necessary to set the new web run precisely and to check it using measurement technology. In particular, if the substrate has flexible glass or is formed therefrom, there are high demands on the axis parallelism of the corresponding guide rollers and winding sleeve couplings.

Optionally, the transport arrangement can have a substrate position sensor, which can be set up to detect a measured variable which represents a position of the substrate transverse to the transport direction. For example, the substrate position sensor can have a web edge sensor system which is set up to detect an edge of the substrate. A positional deviation of the substrate in the axial direction can be detected by means of the substrate position sensor and / or it can be detected when the substrate breaks (also referred to as a web break).

The position and / or orientation of a processing source (also referred to as a process component) or a plurality of processing sources can be set up in such a way that as few disruptive particles (parasitic particles, i.e. clearly undesirable particles) as possible are deposited on the substrate. For example, the or each processing source can have a processing direction (e.g. a coating direction), wherein a first directional component of the processing direction can be directed against the direction of gravity and can be smaller than a second directional component of the processing direction transverse to the direction of gravitation.

According to various embodiments, the substrate can be freely suspended (also referred to as free chip). In general, a freespan arrangement can offer the possibility of varying the freely suspended path length and its orientation relative to the direction of gravity (also referred to as orientation) and adapting it to the respective conditions. Alternatively, the substrate can be processed lying on a processing roll.

In conventional system concepts, driven winders can be pre-configured modules which typically limit the variability of possible web runs. In other words, possible variants can already be defined in the machine design and cannot be changed later. According to various embodiments, four identical winders can be provided, which, due to the optionally assigned functionality, enable a large number of possible web guiding variants and can therefore be the basis for great process flexibility.

1A illustrates a transport arrangement 100 according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along an axis of rotation direction 101 the transport arrangement 100 ) and 1B the transport arrangement 100 with inlaid substrate 102 in a first wrapping configuration 100b .

According to various embodiments, the transport arrangement 100 several rotating sleeve couplings 112a , 112b , 112c have, for example at least three winding sleeve couplings 112a , 112b , 112c . Every winding tube coupling 112a , 112b , 112c of the several winding sleeve couplings 112a , 112b , 112c can be set up for receiving and storing (coupling) a winding tube. Each winding tube coupling of the multiple winding tube couplings 112a , 112b , 112c can about an axis of rotation 101a be rotatably mounted.

A winding tube (also referred to as a coil) can be understood as a tubular support, by means of which a flexible material in the form of a winding can be stored or wound, that is to say wound into a winding or unwound from a winding. The flexible material can, for example, be a substrate 102 form or at least be part of what can be processed later. For example, a substrate can be made using a winding tube 102 are wrapped, for example wound on or unwound from it (also referred to as substrate winding tube). The flexible substrate 102 can be between two winding sleeve couplings 112a , 112b of the several winding sleeve couplings 112a , 112b , 112c be wrapped, for example from a first substrate winding tube to a second substrate winding tube.

Alternatively or additionally, a flexible material can have an optional intermediate layer 104 form or at least be part of it. The intermediate layer can be between individual layers of a winding 102w of the substrate 102 (also as substrate winding 102w referred to) be arranged or will be. In other words, the substrate 102 and the intermediate layer 104 be or become wrapped in one another. By means of the intermediate layer 104 can be physical contact of individual layers of the substrate winding 102w prevent what the substrate 102 and / or its coating is gentle.

According to various embodiments, the optional intermediate layer can be made using an additional winding tube 104 wrapped, for example wound on or unwound from it (also referred to as an interlayer winding tube). An additional winding sleeve coupling 112c of the several winding sleeve couplings 112a , 112b , 112c can be provided the optional intermediate layer 104 to wrap, ie from a substrate winding 102w to wrap out and / or in a substrate winding 102w to wrap in it. The intermediate layer 104 can, for example, to an interlayer winding 104w wound up and / or unwound from this. Alternatively, the intermediate layer 104 between the two substrate coils 102w be wrapped.

Furthermore, the transport arrangement 100 at least one rotatably mounted guide roller 122 exhibit. The at least a leadership role 122 can about an axis of rotation 101a be rotatably mounted.

The leading role 122 can have a curved transport path 111 define (various options shown in dashed lines), along which the wrapping 111w can be done. The substrate 102 can by means of the at least one rotatably mounted guide roller 122 redirected, guided and / or pulled. The transport path 111 can in a transportation area 111b be arranged.

Redirecting the transport path 111 by means of each guide roller of the at least one rotatably mounted guide roller 122 can have an angle (clearly the difference between the incoming transport path and the outgoing transport path). The angle can also be called the minimum wrap. The angle can be greater than approximately 10 °, eg greater than approximately 20 °, eg greater than approximately 30 °.

According to various embodiments, the plurality of winding sleeve couplings 112a , 112b , 112c be set up essentially the same, so that the winding tubes are interchangeable. In other words, a winding tube, for example a substrate winding tube or an intermediate layer winding tube, can be placed on each winding tube coupling of the plurality of winding tube couplings 112a , 112b , 112c fit.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a , 112b , 112c be set up in the first wrapping configuration the substrate 102 between a first winding sleeve coupling 112a of the several winding sleeve couplings 112a , 112b , 112c and a second winding sleeve coupling 112b of the several winding sleeve couplings.

Optionally, in the first wrapping configuration 100b the intermediate layer 104 by means of a third winding sleeve coupling 112c of the several winding sleeve couplings 112a , 112b , 112c be wrapped, for example by the first winding sleeve coupling 112a and / or to the second winding sleeve coupling 112b . For example, the intermediate layer 104 by means of the third winding sleeve coupling 112c between the first winding sleeve coupling 112a and the second winding sleeve coupling 112b be wrapped (also referred to as rewind).

The third winding sleeve coupling 112c can between the second sleeve coupling 112b and the first winding sleeve coupling 112a be or will be arranged. Alternatively or additionally, the third winding sleeve coupling 112c a greater distance from the at least one guide roller 122 have than the second winding sleeve coupling 112b and / or as the first winding sleeve coupling 112a .

The axes of rotation 101a the winding sleeve couplings 112a , 112b , 112c can be axially parallel to each other, for example parallel to the direction of the axis of rotation 101 . The axis of rotation 101a of at least one leadership role 122 can be parallel to the axes of rotation 101a the winding sleeve couplings 112a , 112b , 112c be, for example, parallel to the direction of the axis of rotation 101 .

2A illustrates the transport arrangement 100 in a second exemplary wrap configuration 200a and 2 B the transport arrangement 100 in a third exemplary wrap configuration 200b .

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a , 112b , 112c be set up in the second wrap configuration 200a the substrate 102 between the first winding sleeve coupling 112a and the third winding sleeve coupling 112c to wrap around. Optionally, in the second wrapping configuration 200a the intermediate layer 104 by means of the second winding sleeve coupling 112b be wrapped.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a , 112b , 112c be set up in the third wrap configuration 200b the substrate 102 between the second winding sleeve coupling 112b and the third winding sleeve coupling 112c to wrap around. Optionally, in the third wrapping configuration 200b the intermediate layer 104 by means of the first winding sleeve coupling 112a be wrapped.

3A illustrates a transport arrangement 300 according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement 300 ) which four winding sleeve coupling 112a , 112b , 112c , 112d having; and 3B , 4A such as 4B the transport arrangement 300 in different wrapping configurations 300b , 400a , 400b .

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a , 112b , 112c , 112d be set up in the first wrap configuration 300b the substrate 102 between the first winding sleeve coupling 112a and the second winding sleeve coupling 112b to wrap around. Optionally, in the first wrapping configuration 300b a first intermediate layer 104 by means of the third winding sleeve coupling 112c and / or a second intermediate layer 104 by means of a fourth winding sleeve coupling 112d of the several winding sleeve couplings 112a , 112b , 112c , 112d be or will be wrapped.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a , 112b , 112c , 112d be set up in the second wrapping configuration (not shown) the substrate 102 between the first winding sleeve coupling 112a and the third winding sleeve coupling 112c to wrap around. The first intermediate layer can optionally be used in the second wrapping configuration 104 by means of the second winding sleeve coupling 112b be or will be wrapped.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a , 112b , 112c , 112d be set up in the third wrap configuration 400a the substrate 102 between the second winding sleeve coupling 112b and the third winding sleeve coupling 112c to wrap around. Optionally, in the third wrapping configuration 400a the first intermediate layer 104 by means of the first winding sleeve coupling 112a and / or the second intermediate layer 104 by means of the fourth winding sleeve coupling 112d be or will be wrapped.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a , 112b , 112c , 112d be set up in a fourth wrap configuration 400b the substrate 102 between the first winding sleeve coupling 112a and the fourth winding sleeve coupling 112d to wrap around. Optional in the fourth wrap configuration 400b the first intermediate layer 104 by means of the second winding sleeve coupling 112b and the second intermediate layer 104 by means of the third winding sleeve coupling 112c be or will be wrapped.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a , 112b , 112c , 112d be set up in a fifth wrapping configuration (not shown) the substrate 102 between the third winding sleeve coupling 112c and the fourth winding sleeve coupling 112d to wrap around. Optionally, the first intermediate layer can be used in the fifth wrapping configuration 104 by means of the first winding sleeve coupling 112a and / or a second intermediate layer 104 by means of the second winding sleeve coupling 112b of the several winding sleeve couplings 112a , 112b , 112c , 112d be or will be wrapped.

The first intermediate layer 104 can, for example, from a first substrate winding 102w be or will be unwrapped and / or the second intermediate layer 104 can, for example, in a second substrate winding 102w be or will be wrapped up.

Alternatively to that in 300b , 400a , 400b illustrate the spatial arrangement of the several winding sleeve couplings 112a , 112b , 112c , 112d can the first winding sleeve coupling 112a and the third sleeve coupling 112c The second winding tube coupling can be arranged and / or can be interchanged 112b and the fourth winding sleeve coupling 112d to be or be interchanged.

5A illustrates a transport arrangement according to various embodiments in a schematic detailed view 500a (with viewing direction transverse to the axis of rotation 101a ).

According to various embodiments, a winding tube can 502 , for example a substrate winding tube 502 and / or an interlayer winding tube 502 on a winding sleeve coupling 112a , 112b , 112c , 112d attached 501 be or become. It can be plugged along the axis of rotation 101a respectively. The winding tube 502 can have an inside diameter 502w have the same or greater as an outside diameter 112r the winding sleeve coupling 112a , 112b , 112c , 112d .

5B illustrates a transport arrangement according to various embodiments in a schematic detailed view 500b (with viewing direction transverse to the axis of rotation 101a ).

According to various embodiments, one or each winding tube coupling can 112a , 112b , 112c , 112d a jig 504 have for clamping the respective winding tube. The jig 504 may have or be formed from at least one mandrel (for example a sleeve mandrel and / or a segment mandrel) and / or at least one expanding mandrel. By means of the clamping device 504 can the outside diameter 112r or outer circumference of the winding sleeve coupling 112a , 112b , 112c , 112d be adjustable.

For example, the tensioning device 504 in a tensioned state against an attached winding tube 502 press (also as clamping the winding tube 502 designated).

The jig 504 can be set up, a rotational movement and / or torque on or from a (s) clamped winding sleeve (s) 502 forward. Clamping using the clamping device 504 (by actuating this) can optionally be done manually (manually operated clamping device 504 ), for example using a clamping nut or clamping screw. Alternatively, clamping using the clamping device 504 (mechanical clamping device 504 ) mechanically (for example, automatically), for example hydraulically or pneumatically, for example by means of a clamping cylinder. Optionally, the clamping device 504 be or will be centered over a cylindrical or conical receptacle.

The winding sleeve coupling 112a , 112b , 112c , 112d can be a rotatable shaft 112w (e.g. a machine spindle 112w ) by means of which the tensioning device 504 is stored. The rotatable shaft 112w can the minimum outside diameter 112r the winding sleeve coupling 112a , 112b , 112c , 112d define. The adjustment range of the clamping device 504 can the maximum outer diameter 112r the winding sleeve coupling 112a , 112b , 112c , 112d define.

According to various embodiments, the outer diameter 112r the winding sleeve coupling 112a , 112b , 112c , 112d are in a range from approximately 30 mm to approximately 150 mm, for example approximately 100 mm. For example, the clamping area of the winding sleeve coupling 112a , 112b , 112c , 112d range from about 30 mm to about 150 mm.

5C illustrates a transport arrangement according to various embodiments in a schematic detailed view 500c (with viewing direction transverse to the axis of rotation 101a ).

According to various embodiments, the transport arrangement can have multiple drives 506 (also as winding drives 506 designated), each of which drive with exactly one winding sleeve coupling of the plurality of winding sleeve couplings 112a , 112b , 112c , 112d is coupled. The or each drive of the multiple drives 506 can be set up to generate a rotary movement and / or a torque which is directed to the respective winding tube coupling of the plurality of winding tube couplings 112a , 112b , 112c , 112d is transmitted. The or each drive of the multiple drives 506 can be an electric drive 506 exhibit or be formed therefrom.

One pair each from drive 506 and coupled to this winding sleeve coupling 112a can use a winder 506 , 112a (vividly a driven winding sleeve couplings 506 , 112a ) form or at least be part of it.

The or each drive of the multiple drives 506 can be controlled 508 can be controlled or regulated, for example by means of a control 508 generated control signal. The control signal can be, for example, a rotational behavior of the or each drive of the multiple drives 506 represent, for example a direction of rotation, a speed and / or a generated torque. The control signal may, for example, have one of the following electrical characteristics of the or each drive of the multiple drives 506 exhibit or define: an electrical power consumption, an electrical current consumption, an applied electrical voltage and / or its frequency.

Each drive of the multiple drives 506 can be set up essentially the same. This can be understood to mean that each drive of the multiple drives 506 with the same control has the same turning behavior. For example, each drive of the multiple drives 506 with the same type of control, rotate synchronously, ie in the same direction of rotation with the same speed and / or with a simultaneous movement change. Alternatively or additionally, each drive of the multiple drives can 506 generate the same torque (eg with the same sense of direction) with the same type of control. The similar control can be understood, for example, as that of the or each drive of the plurality of drives 506 the same control signal is injected. This can be used to control the multiple drives 506 be relieved.

Alternatively or additionally, a control system can be used 508 , by means of which the multiple drives 506 are controlled, have a control loop which is set up, a deviation in the rotational behavior of the or each drive of the plurality of drives 506 of a specification and / or to be recorded with each other. The controller can also 508 be set up, the or each drive of the multiple drives 506 to control on the basis of the deviation, for example in such a way that the deviation is reduced and / or that each drive of the plurality of drives 506 has the same turning behavior. This means that tolerance-related or constructive differences in the drives can be achieved 506 and / or the storage of the winding sleeve couplings 112a , 112b , 112c , 112d can be compensated. Alternatively, drives that are different from one another can thus be used 506 be operated, which means a later replacement of a drive 506 relieved when, for example, his model has expired. This increases the maintenance compatibility of the transport arrangement.

The or each drive of the multiple drives 506 can optionally be set up for bidirectional operation, for example by inverting the control signal. This allows greater flexibility to be achieved.

Optionally, the control 508 to control each drive of the multiple drives 506 be set up according to a wrap configuration. The wrap configuration may have a wrap configuration and / or an unwind configuration.

The winding configuration can have at least one parameter which is used to drive that winding sleeve coupling 112a , 112b , 112c , 112d (or the drive coupled to it 506 ) is used by means of which the substrate 102 is wound up. Optionally, the winding configuration can have at least one additional parameter, which is used to drive that winding sleeve coupling 112a , 112b , 112c , 112d (or the drive coupled to it 506 ) is used by means of which the second intermediate layer is unwound.

The unwinding configuration can have at least one parameter which is used to drive that winding sleeve coupling 112a , 112b , 112c , 112d (or the drive coupled to it 506 ) is used by means of which the substrate 102 is handled. Optionally, the unwinding configuration can have at least one additional parameter, which is used to drive that winding sleeve coupling 112a , 112b , 112c , 112d (or the drive coupled to it 506 ) is used, by means of which the first intermediate layer is wound up.

The at least one parameter can determine the rotational behavior of the corresponding winding sleeve coupling 112a when unwinding or winding up the substrate 102 represent, for example the torque, the speed, the direction of rotation and / or their time dependence. The at least one additional parameter can determine the rotational behavior of the corresponding winding sleeve coupling 112a represent when unwinding or winding up the intermediate layer, for example the torque, the speed, the direction of rotation and / or their time dependence. According to the at least one parameter and / or the at least one additional parameter, the controller can 508 provide the control signal, for example that in the or each drive of the multiple drives 506 coupled electrical power.

According to various embodiments, the controller 508 be set up, each drive of the multiple drives 506 to be controlled either according to the rewind configuration or according to the unwind configuration. For example, the controller 508 a first driven winding sleeve couplings 506 , 112a assign to the rewinder configuration and control it according to the rewinder configuration. Alternatively or additionally, the control can 508 a second driven winding sleeve couplings 506 , 112b assign to the unwinding configuration and control it according to the unwinding configuration. Optionally, the control 508 be set up to interchange the assignment of the unwind configuration and the assignment of the take-up configuration.

According to various embodiments, the controller 508 be set up, a rotational behavior (for example a speed) of one or each winding sleeve coupling 112a , 112b , 112c , 112d to adapt to a size which is a transport characteristic of the substrate 102 represents. The transport characteristic can indicate a transport progress and / or a mechanical tensile stress caused thereby in the substrate 102 have, for example, their time dependency. The transport progress can have a transport speed and / or a transport route already covered.

For example, when unwinding the substrate 102 the diameter of the substrate winding 102w decrease, which is achieved by turning the corresponding winding sleeve coupling faster 112a , 112b , 112c , 112d can be compensated. Alternatively or additionally, mechanical tensile stress can be present in the substrate 102 generated and / or maintained to prevent the substrate 102 sagging or undulating. Alternatively or additionally, a mechanical tensile stress can be applied in the substrate 102 be generated and / or maintained, which is smaller than a predetermined threshold value, which clearly represents the mechanical load at which a substrate breakage threatens.

6A illustrates a transport arrangement 600a according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement 600a ).

According to various embodiments, the transportation area 111b at least one processing section 601 in which the transport path 111 (ie its section 111k ) has a constant curvature, for example along a length of more than a quarter of the circumference, for example more than half a circumference, of the at least one guide roller 122 by means of which the transport path 111 is curved. Along the constant curved section 111k (Transport path section 111k ) the substrate 102 on a processing roll 122p lie on. The processing role 122p can be an active (e.g. driven and / or tempered) guide role 122 be.

According to various embodiments, the processing role 122p have a diameter in a range from approximately 0.5 m (meters) to approximately 1 m, for example in a range from approximately 0.7 m to approximately 0.8 m.

6B illustrates a transport arrangement 600b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement 600b ).

According to various embodiments, the transportation area 111b at least one processing section 601 in which the transport path 111 (ie its section 111g ) runs straight along a length of more than half the circumference of the at least one guide roller 122 . For example, the at least one leadership role 122 two passive leadership roles 122 have between which the transport path 111 (ie its section 111g ) runs in a straight line. Along the straight section 111g (Transport path section 111g ) the substrate 102 be or are transported without contact (eg free hanging).

Each of the two passive leadership roles 122 may have a diameter in a range from approximately 50 mm to approximately 0.3 m, for example in a range from approximately 80 mm to approximately 0.2 m.

7A illustrates a transport arrangement 700a according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction transverse to the direction of the axis of rotation 101 the transport arrangement 700a ).

According to various embodiments, the transport arrangement 700a a leader role carrier 702 have which a first mounting position 701a and a second mounting position 701b for at least a leadership role 122 provides. The at least a leadership role 122 can optionally in the first mounting position 701a and the second mounting position 701b be mountable, as described in more detail below.

According to various embodiments, a method can be used to reconfigure the transport arrangement 700a which is at least a leader 122 in the first assembly position 701a or in the second mounting position 701b bring to 701 (e.g. to be reassembled 701 ), as will be described in more detail below.

7B illustrates a transport arrangement 700b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction transverse to the direction of the axis of rotation 101 the transport arrangement 700b ).

The leader role bearer 702 can be used for each winding sleeve coupling of the several rotatably mounted winding sleeve couplings 112a , 112b , 112c , 112d have exactly one mounting position W1, W2, W3, W4 (also referred to as a winding sleeve coupling mounting position W1, W2, W3, W4), which is assigned to this. The leader role bearer 702 can be set up in such a way that the plurality of rotatably mounted winding sleeve couplings 112a , 112b , 112c , 112d can be interchanged, which means that their assignment to the winding sleeve coupling mounting positions W1, W2, W3, W4 can be interchanged. The or each drive of the multiple drives 506 can by means of a wave 112w with the respective winding tube coupling of the several winding tube couplings 112a , 112b , 112c , 112d be coupled. At each winding sleeve coupling mounting position W1, W2, W3, W4 there can be a through opening 702o be arranged, through which there is a shaft 112w of the multiple waves 112w extends through.

8A and 8B each illustrate a vacuum arrangement 800a , 800b according to various embodiments in a schematic side view or cross-sectional view (with viewing direction along the axis of rotation 101a ).

Processing (eg coating) the substrate 102 can according to various Embodiments are carried out in a vacuum, for example in a vacuum arrangement 800a , 800b .

According to various embodiments, the vacuum arrangement 800a , 800b a vacuum chamber housing 802 have, in which a vacuum can be generated and / or maintained. The vacuum chamber housing 802 can, for example, be or be set up to be airtight, dustproof and / or vacuumtight. The vacuum chamber housing 802 can have one or more vacuum chambers. The or each vacuum chamber can have one or more vacuum areas 306b , 308b provide. The multiple vacuum chambers and / or the multiple vacuum areas 306b , 308b of the vacuum chamber housing 802 can optionally be at least partially gas-separated from one another.

Furthermore, the vacuum chamber housing 802 with a pump system 804 (Having at least one rough vacuum pump and optionally at least one high vacuum pump). The pump system 804 can be set up the vacuum chamber housing 802 to withdraw a gas (eg the process gas) so that inside the vacuum chamber housing 802 a vacuum (ie a pressure less than 0.3 bar) and / or a pressure in a range from approximately 1 mbar to approximately 10 ^-3 mbar (in other words fine vacuum) and / or a pressure in a range from approximately 10 ^-3 mbar to about 10 ^-7 mbar (in other words high vacuum) or a pressure of less than high vacuum, for example less than about 10 ^-7 mbar (in other words ultra-high vacuum) can be provided.

According to various embodiments, the vacuum arrangement 800a , 800b a gas supply 1716 exhibit. By means of the gas supply 1716 can the vacuum chamber housing 802 a process gas is supplied to form a process atmosphere in the vacuum chamber housing 802 . The process gas can, for example, have an inert gas or be formed therefrom. Alternatively or additionally, the process gas can have or be formed from a reactive gas, for example oxygen, nitrogen, hydrogen, argon and / or carbon. The process pressure can form from an equilibrium of process gas, which is achieved by means of the gas supply 1716 fed and by means of the pump system 804 is withdrawn.

Furthermore, the vacuum chamber housing 802 be set up such that the vacuum conditions (the process conditions) within the vacuum chamber housing 802 (eg process pressure, process temperature, chemical process gas composition, etc.) can be set or regulated (eg locally), eg by means of a controller 508 . For example, by means of the vacuum chamber housing 802 several vacuum areas 306b , 308b can be provided with different vacuum conditions. For example, the controller 508 for controlling and / or regulating the gas supply 1716 and / or the pump system 804 be set up so that a process pressure and / or a process gas composition can be controlled and / or regulated. For example, the controller 508 be set up to control and / or regulate a standard volume flow of process gas, which by means of the gas supply 1716 supplied and / or by means of the pump system 804 is withdrawn.

According to various embodiments, the controller 508 for controlling and / or regulating an optional substrate temperature control device 1124 (for example having a heating device and / or a cooling device), so that a process temperature (for example the substrate 102 and / or the process gas), for example during processing (for example during coating), can be controlled and / or regulated. For example, the controller 508 be set up to control and / or regulate a thermal output, which by means of the substrate temperature control device 1124 is supplied and / or withdrawn by means of this.

Optionally, the vacuum arrangement 800a , 800b a supply device for supplying the temperature control device 1124 have, for example for supplying with a tempered fluid or with electrical energy. For example, the supply device can be outside the processing chamber 802 be arranged. For example, a heating or a cooling medium to the temperature control device 1124 (e.g. the processing role 122p ) are fed in and discharged again.

In the vacuum chamber housing 802 (eg in a first vacuum chamber) can have at least one vacuum area 306b , eg a first vacuum area 306b , be arranged. Furthermore, in the vacuum chamber housing 802 (eg in the first vacuum chamber) a first processing source 306 , for example a coating material source 306 , be arranged. The coating material source 306 can for emitting a gaseous coating material in the first vacuum region 306b be set up inside. With the coating material, the substrate 102 be or will be coated. In other words, coating the substrate 102 done in a vacuum. The first vacuum area 306b can be a coating area 306b be.

In the vacuum chamber housing 802 (eg in a second vacuum chamber or in the first vacuum chamber) can at least a second vacuum area 308b be arranged. Furthermore, in the Vacuum chamber housing 802 (eg in the second vacuum chamber) a second processing source 308 , for example an exposure device 308 , be arranged. The second processing source 308 can be set up to process the coating material with which the substrate 102 is or is coated, for example by means of light. For example, the processing source 308 be structured for structuring or chemical conversion of the coating material with which the substrate 102 is or will be coated. The second vacuum area 308b can be an editing area 308b be.

According to various embodiments, the vacuum chamber housing 802 a chamber opening to expose the inside of the vacuum chamber housing 802 exhibit. The chamber opening can be the inside of the vacuum chamber housing 802 for example in the direction of the axis of rotation 101 uncover. The vacuum chamber housing can be used to close the chamber opening 802 have a chamber cover.

For example, the second processing source 308 have at least one exposure device, for example a light source (for example a laser, a lamp, a flash lamp or an X-ray source), a heat radiation source or a particle source (for example an electron source or a proton source or an ion source).

The second processing source 308 can be a pulsed or a continuously operated second processing source 308 be.

For example, by means of the second processing source 308 a (eg pulsed or continuous) radiation 402 (eg electromagnetic radiation, such as light, heat radiation and / or particle radiation, such as electron radiation and / or ion radiation) are generated, for example a continuous electron beam 402 by means of an electron beam gun (eg using a linear source) or a pulsed light flash using a flash lamp (eg a gas discharge lamp or a light-emitting diode).

The second processing source 308 can, for example, have or be formed from one or more flash lamps. The or each flash lamp can have a gas discharge lamp which can be operated or operated in a pulsed manner, for example by means of the controller 508 . A current pulse can be discharged through the gas discharge lamp for pulsed operation of the or each gas discharge lamp.

According to various embodiments, the controller 508 to control and / or regulate the first processing source 306 and / or the second second processing source 308 be set up, for example by controlling a quantity of material and / or thermal energy (for example radiation energy) and / or regulating which per time in the direction 105 of the substrate 102 is emitted.

Furthermore, the vacuum arrangement 800a , 800b a winding sleeve coupling 112a , 112b for unwinding a substrate 102 have (also referred to as unwinding roller) so that the substrate 102 in the at least one vacuum area 306b , 308b is brought in. Furthermore, the vacuum arrangement 800a , 800b a winding sleeve coupling 112c , 112d for winding up the substrate 102 have (also as a take-up roller 112c , 112d designated), which from the at least one vacuum region 306b , 308b is brought out. In other words, the substrate 102 be processed from roll to roll.

Furthermore, the vacuum arrangement 800a , 800b multiple leadership roles 122 which have a transport path 111 define along which the substrate 102 (eg a ribbon-shaped substrate) between the unwinding roller 112a , 112b and the take-up roller 112c , 112d through the at least one vacuum area 306b , 308b is transported through, for example in a transport direction 111w (which is perpendicular to the axis of rotation direction 101 can be).

The vacuum arrangement 800a can have at least two leadership roles 122 have between which a rectilinear section 111g of the transport path 111 is spanned. The straight section 111g of the transport path 111 can in the at least one vacuum range 306b , 308b be arranged in which the substrate 102 is processed. The at least one vacuum area 306b , 308b can within the processing section 601 be or will be arranged.

The vacuum arrangement 800b can exactly be a leader 122p which have the temperature control device 1124 has, ie which as a processing role 122p is set up by means of which the substrate 102 can be tempered, for example heated and / or cooled. By means of the processing roller 122p can be the constantly curved section 111k of the transport path 111 (also as a transport path section 111k referred to) be provided. The constantly curved section of the transport path 111k can in the at least one vacuum range 306b , 308b be arranged in which the substrate 102 is processed. The at least one vacuum area 306b , 308b can within the processing section 601 be or will be arranged.

Furthermore, the vacuum arrangement 800a , 800b a drive system 518 have, which at least with part of the plurality of roles 112a , 112b , 112c , 112d , 122 coupled 518k is, for example, at least with a part of the multiple guide roles 122 and with each winding sleeve coupling of the plurality of winding sleeve couplings 112a , 112b , 112c , 112d . The drive system 518 can the multiple drives 506 exhibit. For example, the drive system 518 by means of waves, 518k Chains 518k , Straps 518k or gears 518k with part of the variety of roles 112a , 112b , 112c , 112d , 122 be coupled, which are driven. The drive system 518 and part of the variety of roles 112a , 112b , 112c , 112d , 122 can be part of a positioning device which is used to position the substrate 102 is set up.

The control 508 can to control 518k and / or rules 518k of the drive system 518 be set up, for example for controlling 518k and / or rules 518k a transport characteristic, for example a transport speed, a mechanical tensile stress on the substrate 102 , and / or a position of the substrate 102 . The steering 518k and / or rules 518k of the drive system 518 can during the processing of the substrate 102 take place, for example during coating and / or irradiation, for example on the basis of a processing progress (for example a coating progress and / or a structuring progress) and / or on the basis of a transport characteristic.

According to various embodiments, the vacuum arrangement 800a , 800b optionally at least one substrate pretreatment device 310 (ie one or more substrate pretreatment devices 310 ) for pretreating the substrate 102 , eg for the chemical activation of the substrate 102 . For example, the at least one substrate pretreatment device 310 be set up the substrate 102 to chemically activate the substrate, for example to chemically activate its surface 102 to clean and / or the substrate 102 to etch. For example, the at least one substrate pretreatment device 310 have or be formed from an etching device for etching the substrate 102 . Alternatively or additionally, the at least one substrate pretreatment device 310 have or be formed from at least one sputter etching source, at least one plasma source, at least one glow device and / or at least one etching gas source. For example, the pretreatment of the substrate 102 have the substrate 102 using sputter etching; Treat ion etching and / or glowing.

Optionally, by means of the at least one substrate pretreatment device 310 a film of water from the substrate 102 be removed. Alternatively or additionally by means of the substrate pretreatment device 310 a number of open chemical bonds to the substrate 102 (also known as chemical activation) can be enlarged, for example, the adhesion and the formation of the coating on the substrate 102 can improve.

Alternatively or additionally, a substrate aftertreatment device can be used 310 used to the substrate 102 which is coated with the coating material, for example similar to the pretreatment. For example, the substrate 102 comprising the coating with the coating material being selectively heated (eg annealed) and / or etched.

9A and 9B each illustrate a vacuum arrangement 900a , 900b according to various embodiments in a schematic side view or cross-sectional view (with viewing direction transverse to the axis of rotation 101a ).

According to various embodiments, the vacuum chamber 802 a chamber wall 902 which are at a distance from the guide roller carrier 702 is arranged.

Alternatively or additionally, the vacuum chamber 802 a chamber wall 902 with several rotary unions 902o have, each of which is a rotating union 902o with exactly one winding sleeve coupling of the several winding sleeve couplings 112a , 112b , 112c , 112d is coupled. By means of the or each rotary union 902o can be a rotational movement and / or a torque to the multiple winding sleeve couplings 112a , 112b , 112c , 112d be transmitted. The rotational movement and / or the torque can be outside the vacuum chamber 802 be or will be generated, for example by means of the multiple drives 506 .

According to various embodiments, the chamber wall 902 a smaller thickness (extension along the direction of the axis of rotation 101 ) have as the guide roller carrier 702 , or its carrier plate 702p . For example, the guide roller carrier 702 (e.g. its carrier plate 702 ) have a thickness in a range from about 40 mm to about 50 mm. Alternatively or additionally, the chamber wall 902 have a thickness in a range from about 20 mm to about 40 mm. Optionally, the chamber wall 902 have additional stiffening rib.

10th illustrates a process 1000 for operating a transport arrangement according to various embodiments in a schematic flow diagram.

The procedure 1000 can in 1001 comprise: processing a substrate in a first wrapping configuration in which the substrate is between two Is wound winding sleeves, which are mounted by means of the first winding sleeve coupling and the second winding sleeve coupling.

The procedure 1000 can also in 1003 have: processing of a substrate in a second wrapping configuration, in which the substrate is wrapped between two winding tubes which are supported by means of the third winding tube coupling and the first winding tube coupling.

Processing can be done in 1001 have at least one of the following processing types: coating of the substrate, etching of the substrate, and / or irradiation of the substrate. Processing can be done in 1003 have at least one of the following processing types: coating of the substrate, etching of the substrate and / or irradiation of the substrate.

The procedure 1000 can optionally in 1005 comprise: reconfiguring the transport arrangement between the first wrapping configuration and the second wrapping configuration.

The reconfiguration of the transport arrangement can optionally include bringing a guide roller from a first assembly position into a second assembly position or vice versa.

Processing in 1001 and processing in 1003 can optionally differ from each other, for example in at least one processing type. The reconfiguration can then optionally have: exchange and / or reconfiguration of a processing source.

The procedure 1000 can optionally in 1007 have: processing of a substrate in a third wrapping configuration, in which the substrate is wrapped between two winding tubes which are supported by means of the third winding tube coupling and the second winding tube coupling. The procedure 1000 can optionally in 1007 comprise: reconfiguring the transport arrangement between the first wrapping configuration and the third wrapping configuration. The reconfiguration of the transport arrangement can be done in 1007 optionally have a guide roller from the first mounting position to a third mounting position or vice versa.

The procedure 1000 can optionally in 1009 have: processing of a substrate in a fourth wrapping configuration, in which the substrate is wrapped between two winding tubes which are supported by means of the fourth winding tube coupling and the first winding tube coupling. The procedure 1000 can optionally in 1009 comprise: reconfiguring the transport arrangement between the first wrapping configuration and the fourth wrapping configuration. The reconfiguration of the transport arrangement can be done in 1009 optionally have a guide roller from the first mounting position to a fourth mounting position or vice versa.

Processing can be done in 1007 have at least one of the following processing types: coating of the substrate, etching of the substrate, and / or irradiation of the substrate. Processing can be done in 1009 have at least one of the following processing types: coating of the substrate, etching of the substrate and / or irradiation of the substrate.

Processing in 1007 and processing in 1009 can optionally differ from each other or from processing in 1001 distinguish, for example in at least one processing type. The reconfiguration can then optionally have: exchange and / or reconfiguration of a processing source.

The reconfiguration can comprise bringing the transport arrangement into the first wrapping configuration, into the second wrapping configuration, into the third wrapping configuration or into the fourth wrapping configuration.

11A illustrates a transport arrangement 1100a in accordance with various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction transverse to the axis of rotation direction 101 the transport arrangement 1100a ) and 11B the transport arrangement 1100a in a transverse side view extending transversely thereto 1100b or cross-sectional view 1100b (For example, looking in the direction of the axis of rotation 101 the transport arrangement 1100a ).

The transport arrangement 1100a can the transportation area 111b have and several rotatably mounted winding sleeve couplings 112a , 112b , 112c , 112d for coupling one winding tube (e.g. two substrate winding tubes).

Furthermore, the transport arrangement 1100a at least one rotatably mounted guide roller 122 have which in the transport area 111b is arranged. The at least a leadership role 122 can have a curved transport path depending on the position 111 define along which a flexible substrate 102 can be performed. The transport path 111 can be between the several sleeve couplings 112a , 112b , 112c , 112d run, ie from one to the other (from role-to-role configuration).

Furthermore, the transport arrangement 1100a a leader role carrier 702 exhibit. The leader role bearer 702 can be several Fortification structures 712a , 712b , 722a , 722b which are within the transport area 111b are arranged, for example at least four, five, six, seven, eight, nine, ten fastening structures 712a , 712b , 722a , 722b or more than ten attachment structures 712a , 712b , 722a , 722b , for example twenty, for example thirty fastening structures 712a , 712b , 722a , 722b or more attachment structures 712a , 712b , 722a , 722b . The multiple attachment structures 712a , 712b , 722a , 722b can be arranged in a predefined regular pattern. Furthermore, each fastening structure of the plurality of fastening structures can 712a , 712b , 722a , 722b an assembly position 701a , 701b define. For example, the guide roller carrier 702 at least a first assembly position 701a , a second 701b , provide a third mounting position and a fourth mounting position.

Furthermore, the transport arrangement 1100a at least one bearing arrangement 1221 have, by means of which the at least one guide role 122 is stored. The bearing arrangement 122w can for example have a rotatably mounted shaft, by means of which the guide roller 122 be or can be supported. Alternatively or additionally, the bearing arrangement 122w have one or more rolling bearings, which have the guide role 122 support rotatably, at least by means of the shaft.

The bearing arrangement 122w can have a mounting base 1102 which is complementary (for example, opposing and / or matching) to each fastening structure of the plurality of fastening structures 712a , 712b , 722a , 722b is set up. In other words, the mounting base 1102 on each attachment structure of the plurality of attachment structures 712a , 712b , 722a , 722b to be assembled. It can thus be achieved that the bearing arrangement 122w optionally in each of the mounting positions 701a , 701b can be fastened (e.g. hung, inserted, screwed, clamped, etc.).

For example, each fastening structure of the plurality of fastening structures 712a , 712b , 722a , 722b have at least one form-fit element (for example a bore), ie one form-fit element or several form-fit elements. The mounting base can have at least one complementary form-locking element, ie one complementary form-locking element or several complementary form-locking elements. The at least one form-fit element and the at least one complementary form-fit element can form a form-fit pair which is set up for form-fitting connection with one another. For example, several form-fitting elements can be arranged in the same pattern (for example the same pattern) as the several complementary form-fitting elements. Alternatively or additionally, the at least one form-fit element can have the same contour and / or the same profile as the at least one complementary form-fit element. A form-fitting pair can, for example, have at least one of the following complementary elements: a depression and a projection (ie depression and complementary projection), a through opening and a pin, an internal thread and an external thread, a threaded bore and a screw, a threaded bore and a spindle, a nut and a screw, a nut and a spindle, a groove and a spring.

According to various embodiments, the mounting base 1102 have or be formed from a flange. Alternatively or additionally, the mounting base 1102 have four positive locking elements or more, for example four through openings or more.

According to various embodiments, the mounting base can be used to reconfigure the transport arrangement 1102 by means of the respective fastening structure 712a in the mounting position on the guide roller carrier 702 be or will be assembled. Then the guide roller on the bearing assembly 1221 be or will be plugged on, for example on their shaft.

According to various embodiments, each winding sleeve coupling can include the plurality of winding sleeve couplings 112a , 112b , 112c , 112d (also referred to as a rotary sleeve bearing), a winding tube can be set up for rotatable mounting, for example a substrate winding tube and / or an intermediate layer winding tube.

12A illustrates a transport arrangement 1200a according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction transverse to the direction of the axis of rotation 101 the transport arrangement 1200a ).

According to various embodiments, the transport arrangement can further comprise: a drive system 518 which is used to drive the several winding sleeve couplings 112a , 112b , 112c , 112d is set up. The drive system 518 can have multiple drives 506 have, each of which drive 506 with exactly one winding sleeve coupling of the several winding sleeve couplings 112a , 112b , 112c , 112d is coupled.

12B illustrates a transport arrangement 1200b according to various embodiments in a schematic side view or cross-sectional view (for example looking along the axis of rotation direction 101 the transport arrangement 1200b ).

According to various embodiments, the transport arrangement may include at least some of the multiple attachment structures 712a , 712b , 722a , 722b be arranged in the processing section, for example at least a first group 1402a Fortification structures 712a , 712b , 722a , 722b and / or a second group 1402b Fortification structures 712a , 712b , 722a , 722b .

13A illustrates a transport arrangement 1300a according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction transverse to the direction of the axis of rotation 101 the transport arrangement 1300a ).

According to various embodiments, the guide roller carrier can 702 at least one rotary union 902o have, which between two fastening structures 712a , 712b of the several attachment structures 712a , 712b , 722a , 722b is arranged. This means that a passive (eg a non-driven) guide roller can be used 122 in at least one of the two assembly positions 701a , 701b brought or will be brought or an active (eg a driven) leadership role 122 (e.g. a processing role 122p ) which by means of the rotating union 902o can be supplied, for example by means of drive energy or with a medium.

13B illustrates a transport arrangement 1300b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction transverse to the direction of the axis of rotation 101 the transport arrangement 1300b ).

According to various embodiments, the transport arrangement 1300a a processing role 122p have which in the processing section 601 is arranged and a temperature control device 1124 having. The processing role 122p can be a lateral surface 1302 over which the substrate 102 around the processing role 122p is led around.

The temperature control device 1124 can have a heat source for supplying thermal energy to the lateral surface. Alternatively or additionally, the temperature control device 1124 have a heat sink for extracting thermal energy from the lateral surface. By means of the temperature control device 1124 can be a heat flow from the substrate 102 can be set away or towards this, for example controlled and / or regulated by means of the controller 508 .

According to various embodiments, a medium supply device can also be used 1312 have, which with the temperature control device 1124 is coupled. The medium supply device 1312 can be used to supply the temperature control device 1124 with, for example, a fluid, such as a cooling fluid and / or a heating fluid.

14A and 14B each illustrate a transport arrangement 1400a , 1400b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement 1400a ).

According to various embodiments, the transportation area 111b at least one feed section 1401z have, which between the processing section 601 and the unwinding sleeve couplings 112a (ie the winding sleeve coupling 112a in unwind configuration) is arranged. Furthermore, the transport area 111b at least one discharge section 1401a have, which between the processing section 601 and the winding sleeve couplings that wind up 112b (ie the winding sleeve coupling 112a in the take-up configuration). The transport path 111 can through the laxative section 1401a and the feed section 1401z lead through.

According to various embodiments, the multiple attachment structures 722a , 722b , 712a , 712b in several groups 1402a , 1402b be arranged, of which a first group 1402a in the feed section 1401z is arranged and a second group 1402b in the discharge section 1401a is arranged. The first group 1402a and / or the second group 1402b can have more than three attachment structures 712a , 712b , 722a , 722b have, for example at least four, five, six, seven, eight, nine, ten fastening structures 712a , 712b , 722a , 722b or more than ten attachment structures 712a , 712b , 722a , 722b , for example twenty, for example thirty fastening structures 712a , 712b , 722a , 722b or more attachment structures 712a , 712b , 722a , 722b .

Optionally, the mounting structures 722a , 722b , 712a , 712b the first group 1402a and the attachment structures 722a , 722b , 712a , 712b the second group 1402b mirror-symmetrical with respect to a mirror plane 1411 be arranged. This allows symmetrically arranged mounting positions 701a , 701b be provided so that a tape run with high precision is facilitated. The mirror plane 1411 can be parallel to the axis of rotation 101a stand.

15A , 15B and 15C each illustrate a spatial arrangement 1500a , 1500b , 1500c of fastening structures according to various embodiments as well 16A , 16B and 16C each illustrate a spatial arrangement 1600a , 1600b , 1600c of fastening structures according to various embodiments, each in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement).

According to various embodiments, each attachment structure may include the plurality of attachment structures 712a , 712b several positive locking elements 1502 , 1502g exhibit. The multiple positive locking elements 1502 , 1502g each attachment structure of the plurality of attachment structures 712a , 712b can be or are arranged according to a geometric figure, for example on its contour and / or corner points, for example a triangle, a square (for example a square), a hexagon, etc.

According to various embodiments, at least two fastening structures of the plurality of fastening structures can 712a , 712b at least one common positive locking element 1502g exhibit. This allows a smaller grid of the mounting positions 701a , 701b (ie a smaller distance between them).

One or each form-locking element 1502 , 1502g of the several attachment structures 712a , 712b can at least one of the following positive locking elements 1502 , 1502g have: a recess, a projection, a through opening, a pin, an internal thread, an external thread, a threaded bore, a screw, a spindle, a nut, a groove and / or a spring.

According to various embodiments, the guide roller carrier can 702 a carrier plate 702p have at least one group 1402a , 1402b which has several fastening structures.

For example, any form-fit element 1502 , 1502g the group 1402a , 1402b a recess (e.g. a through opening or a groove) in the carrier plate 702p exhibit. Alternatively, each form-locking element 1502 , 1502g the group 1402a , 1402b a projection (e.g. a pin or a spring) of the carrier plate 702p exhibit. Each form-locking element can optionally be used 1502 , 1502g the group 1402a , 1402b have a thread.

17A and 17B each illustrate a transport arrangement 1700a , 1700b in accordance with various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction transverse to the axis of rotation direction 101 the transport arrangement).

According to various embodiments, the guide roller carrier can 702 a first carrier plate 702p and a second carrier plate 1702p (also as additional carrier plate 1702p designated), which are opposite to each other. The first carrier plate 1702p can the multiple attachment structures 712a , 712b exhibit. The second carrier plate 1702p can have multiple counter-attachment structures 1712a , 1712b exhibit. Each attachment structure of the multiple attachment structures 712a , 712b can be exactly one counter-fastening structure of the several counter-fastening structures 1712a , 1712b assigned, which is opposite this.

Each attachment structure of the multiple attachment structures 712a , 712b can with the associated counter-fastening structure of the plurality of counter-fastening structures 1712a , 1712b a pair of mounting structures 712a , 1712a form between which the bearing arrangement 1221 is mountable. For example, the bearing arrangement 1221 two mounting bases 1102 , 1102 ' have a first mounting base 1102 with the multiple attachment structures 712a , 712b is mountable and a second mounting base 1102 ' with the multiple counter-attachment structures 1712a , 1712b is mountable.

The multiple attachment structures 712a , 712b and the multiple counter-attachment structures 1712a , 1712b can be mirror-symmetrical with respect to a mirror plane 1711 be arranged, which between the first carrier plate 702p and the second carrier plate 1702p is arranged. The mirror plane 1711 can be perpendicular to the axis of rotation 101a the leadership role 122 stand. For example, the multiple attachment structures 712a , 712b one group and the several counter-fastening structures 1712a , 1712b form an additional group, which are arranged mirror-symmetrically to each other.

Optionally, the processing role 122p and / or each winding sleeve coupling of the plurality of winding sleeve couplings 112a , 112b , 112c , 112d between the first carrier plate 702p and the second carrier plate 1702p be stored, for example in a predefined assembly position W1, W2, W3, W4, CD (cf. 24th ).

By means of the first carrier plate 702p and the second carrier plate 1702p can a bilateral storage (also referred to as a bilateral configuration) of the at least one guide roller 122 , 112p and optionally the multiple winding tube coupling 112a , 112b , 112c , 112d respectively.

A role (e.g. a leadership role 122 , 112p and / or a winding sleeve coupling 112a , 112b , 112c , 112d) which is mounted on exactly one side can also be referred to as a cantilever roll, ie it can be or will be stored in a cantilever configuration.

The or each roll can be up to a length (extension along the axis of rotation 101a ) of 0.3 m in the cantilever configuration. The or each roll can have a length (extension along the axis of rotation 101a ) of 0.3 m in double-sided configuration.

18A illustrates a bearing arrangement 1221 in accordance with various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction transverse to the axis of rotation direction 101 the transport arrangement).

According to various embodiments, the bearing arrangement 1221 an alignment device 1802 have, which for adjusting an orientation of an axis of rotation 101a the bearing arrangement 1221 is set up. The alignment device 1802 can, for example, have a joint which acts as the guide roller 122 with the mounting base 1102 couples, eg displaceable and / or rotatable. The alignment device 1802 can, for example, have or be formed from at least one of the following joints: a sliding joint, a rotating joint, a screw joint, a rotating sliding joint and / or a ball joint. Optionally, the alignment device 1802 have a fixing device, which is set up the axis of rotation 101a to fix in the adjusted orientation. The fixing device can, for example, have one or more set screws or be formed therefrom.

18B illustrates a transport arrangement 1800b in accordance with various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction transverse to the axis of rotation direction 101 the transport arrangement).

Analogous to the bearing arrangement 1221 can the processing role 122p and / or one or each winding tube coupling of the plurality of winding tube couplings 112a , 112b , 112c , 112d by means of an alignment device 1802 be stored.

19th illustrates a process 1900 for operating a transport arrangement according to various embodiments in a schematic flow diagram.

The procedure 1900 can in 1901 have: deflecting a substrate by means of a guide roller in a first wrapping configuration in which the bearing arrangement is brought into a first assembly position.

The procedure 1900 can also in 1903 have: deflecting a substrate by means of a guide roller in a second wrapping configuration, in which the bearing arrangement is brought into a second mounting position.

The procedure 1900 can optionally in 1905 comprise: reconfiguring the transport arrangement between the first wrapping configuration and the second wrapping configuration.

The procedure 1900 can optionally have in 1907: processing the substrate before or after the deflection. The processing of the first winding configuration can have at least one of the following processing types: coating of the substrate, etching of the substrate and / or irradiation of the substrate. The processing of the second wrapping configuration can have at least one of the following processing types: coating of the substrate, etching of the substrate and / or irradiation of the substrate.

Processing in the first wrap configuration and processing in the second wrap configuration may optionally differ from each other, e.g. in at least one processing type. Then the reconfiguration can optionally include: replacing a processing source

The substrate in the first wrap configuration and the substrate in the second wrap configuration may differ, e.g. in breaking strength, chemical composition, mechanical hardness and / or in a modulus of elasticity.

According to various embodiments, the deflection can take place in a transport area, for example in its discharge section and / or in its feed section 1401z . Processing can take place in the transport area, for example in its processing section.

20 illustrates a transport arrangement 2000 according to various embodiments in a schematic perspective view and 21 illustrates a transport arrangement 2100 according to various embodiments in a schematic perspective view, in which the second carrier plate 1702p is hidden or omitted.

According to various embodiments, the plurality of guide roles 122 and the multiple bobbin couplings 112a , 112b , 112c , 112d on both sides by means of the guide roller carrier 702 be stored.

The transport arrangement 2100 can enable a variable and compact design, which is inexpensive and easy to maintain. By means of storage on both sides, wider substrates can be created 102 be managed more easily.

According to various embodiments, the plurality of guide roles 122 and optionally the several winding tube couplings 112a , 112b , 112c , 112d on both sides by means of the guide roller carrier 702 be stored.

Will the second carrier plate 1702p (also as a front board 1702p referred to) omitted, one-sided mounting of the plurality of guide rollers 122 and optionally the several winding tube couplings 112a , 112b , 112c , 112d be or will be provided (ie, a cantilever configuration). The cantilever configuration can be easier to adjust and align than double-sided storage.

The transport arrangement 2000 , 2100 can be inside a chamber housing 802 be or will be arranged. For example, the guide roller carrier 702 by means of the chamber housing 802 be or will be supported.

The transport arrangement 2000 , 2100 can enable a variable and compact design, which is inexpensive and easy to maintain.

22A and 22B each illustrate a processing arrangement 2200a , 2200b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the processing arrangement).

According to various embodiments, the processing arrangement 2200a , 2200b a processing chamber 802 which have several gas-separated sections 2202a , 2202b has (also referred to as compartments). The sections 2202a , 2202b can by means of a surface element 106 (eg a partition). The processing chamber 802 can, for example, by means of a vacuum chamber housing 802 be or will be provided. In the or each section 2202a , 2202b can be a vacuum area 306b , 308b be or will be provided.

The processing arrangement 2200a , 2200b can also have at least one transport arrangement with at least one rotatably mounted guide roller 122 , 122p exhibit. The leading role 122 , 122p can about an axis of rotation 101a be rotatably mounted. The leading role 122 , 122p can be used to transport a substrate (not shown) in and / or through the processing chamber 802 through it, for example along a transport path 111 . The direction of transport 111w can along the transport path 111 run. The transport arrangement can optionally be used for the bidirectional transport of the substrate 102 be set up.

According to various embodiments, the multiple sections 2202a , 2202b (also referred to as compartments) to a curved section of the transport path 111 adjoin. The curved section 111k of the transport path 111 can, for example, along an outer surface of the guide roller 122 , 122p run.

According to various embodiments, the multiple sections 2202a , 2202b be or be gas-separated from each other. Processing the substrate 102 can be used in an externally shielded and gas-separated vacuum area 306b , 308b take place so that a disturbance of the processing, for example due to an interaction between different vacuum areas, is as small as possible. Complex processes can require effective gas separation (gas separation). For example, coating substrates with layers of different compositions (e.g. different materials) may require different process conditions (e.g. metallic versus reactive / oxidic or different reactive gas compositions such as Ar / N ₂ versus Ar / O ₂ ) and, as a result, effective gas-technical separation of the process conditions from one another, which reduces mixing of the different process conditions (gas separation).

The surface element 2206 can be a crack 2206s provide through which the transport path 111 leads through. For example, the gap between the surface element 2206 and the leadership role 122 , 122p or their lateral surface 1302 be educated. Alternatively, the gap 2206s by means of a through opening in the surface element 2206 be educated. The gap 2206s can clearly be set up so large that one by means of the guide role 122 , 122p transported substrate 102 through the gap 2206s fits through. The expansion of the gap 2206s can, for example, be less than 10 cm, for example less than 5 cm, for example less than 1 cm.

The gas separation clearly describes a difference in the gas pressure or in the gas composition between vacuum areas that are interconnected by vacuum technology 306b , 308b (eg gas-separated areas), ie clearly a vacuum separation. The components (for example the parts of a gas separation structure) which contribute to the gas separation can be set up in such a way that the difference in gas pressure or in the gas composition between vacuum areas connected to one another by vacuum technology 306b , 308b can be maintained (eg stable). In other words, gas can be exchanged between vacuum areas that are connected to one another in terms of vacuum technology and gas-separated from one another 306b , 308b can be reduced, for example the larger the gas separation between the areas.

The processing arrangement 2200a , 2200b can also be a first processing source 306 (eg a first coating material source 306 ), which in a first 2202a of the multiple sections 2202a , 2202b can be arranged or can be. The first processing source 306 can have, for example, one or more magnetron cathodes.

Optionally, the processing arrangement 2200a , 2200b a second processing source 308 (eg a second coating material source 308 ) which, in a second 2202b of the multiple sections 2202a , 2202b can be arranged or can be

According to various embodiments, in the processing chamber 802 by means of a coating material source 306 , 308 a coating process is carried out such that a substrate transported by means of the transport arrangement can be coated with at least one coating material (for example at least two coating materials, for example at least three coating materials). For example, any coating material source 306 , 308 have a coating material which is used to coat the substrate 102 evaporates and in the direction of the substrate (ie in the direction of the transport path 111 ) is emitted. On the substrate 102 the emitted coating material can accumulate and form a layer. That towards the substrate 102 emitted coating material from each coating material source 306 , 308 can be a layer or a stack of layers on the substrate 102 form. For example, there can be so many different layers on the substrate 102 such as coating material sources 306 , 308 be used.

According to various embodiments, the substrate 102 have or be formed from a foil, for example a plastic foil, a glass foil (also referred to as flexible glass) and / or a metal foil. Alternatively or additionally, the substrate 102 have a fabric or be formed therefrom. The substrate 102 can about the leadership role 122 , 122p be or will be excited.

Optionally, the substrate 102 can be transported by means of a conveyor belt. The conveyor belt can over the guide roller 122 , 122p be or will be excited. The conveyor belt can, for example, have a fabric or be formed therefrom.

By means of the processing roller 122p can be a constantly curved section 111k of the transport path 111 be or will be provided along which the substrate 102 is processed. Using adjacent leadership roles 122 can be a straight section 111g of the transport path 111 (also as a transport path section 111g referred to) be provided along which the substrate 102 is processed.

23 illustrates a processing arrangement 2300 according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the processing arrangement).

According to various embodiments, at least one substrate 102 by means of the processing arrangement 2300 (also referred to as a vacuum arrangement) are processed (treated). The processing arrangement can 2300 be set up in such a way that the substrate can, for example, be coated, heated, cooled, etched, exposed, structured and / or treated in some other way. The treatment (processing) of the at least one substrate 102 can take place, for example, in a vacuum (in a vacuum process chamber), at normal pressure (standard pressure or atmospheric pressure in an atmospheric pressure process chamber) or under positive pressure (in a positive pressure process chamber).

For processing a substrate 102 in the processing chamber 802 the processing arrangement 2300 can in the processing chamber 802 the processing arrangement 2300 multiple processing sources 306 , 308 , 2306 , 2308 , 2310 be arranged. In each section of the several sections 2202a , 2202b , 2202c , 2202d , 2202e can be at least one processing source of the multiple processing sources 306 , 308 , 2306 , 2308 , 2310 be arranged. The multiple sections 2202a , 2202b , 2202c , 2202d , 2202e can be or be gas-separated from one another.

A processing source 306 , 308 , 2306 , 2308 , 2310 can, for example, be a source of coating material (a magnetron, a tube magnetron or a double tube magnetron, a planar magnetron or a double planar magnetron), an exposure device (a light source, a laser, a flash lamp or a flash lamp arrangement), a heat source (e.g. a heater), an etching device (e.g. an etching gas source or etching plasma source), a radiation source (for example an electron beam source or ion beam source), or the like.

For coating (vapor deposition) of the at least one substrate 102 For example, a coating material source can be used which is set up in such a way that a sputtering process (sputtering process) can be carried out by means of the coating material source. Sputtering processes can be carried out in various ways, for example as direct voltage (DC) sputtering, medium frequency (MF) sputtering, high frequency (HF) sputtering, each using one or more cathodes (targets), using a magnet system ( Magnetron sputtering) using a reactive gas as reactive sputtering, high-power pulse sputtering, and / or the like. Optionally, for coating (vapor deposition) of the at least one substrate 102 For example, at least one of the following types of coating can be used: chemical vapor deposition, physical vapor deposition, thermal evaporation, and / or electron beam evaporation.

24th illustrates a leader role carrier 702 according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement 2400 ), for example its first carrier plate 702p and / or its second carrier plate 1702p (also as circuit boards 702p , 1702p designated).

According to various embodiments, the plurality of fastening structures or their positive locking elements 1502 in several groups 1402a , 1402b , 1402c , 1402d be arranged, which are arranged at a distance from each other.

According to various embodiments, the plurality of fastening structures or their positive locking elements 1502 in several groups 1402a , 1402b , 1402c , 1402d be arranged, of which a first group 1402a in the feed section 1401z can be arranged, a second group 1402b in the discharge section 1401a be arranged and two optional third groups 1402c , 1402d in the processing section 601 can be arranged. The first group 1402a and the second group (e.g. their positive locking elements 1502 ) can be mirror-symmetrical with respect to the mirror plane 1411 be arranged and furnished. Alternatively or additionally, the two optional third groups 1402c , 1402d (e.g. their positive locking elements 1502 ) mirror-symmetrical with respect to the mirror plane 1411 be arranged.

According to various embodiments, the guide roller carrier can 702 several through openings 1902o have to accommodate rotary unions 902o or at least rotatable shafts 112w . By means of the rotating unions 902o or at least rotatably mounted (and driven) shafts 112w can each generate outside of a vacuum chamber drive energy to that of each winding tube coupling of the plurality of winding tube couplings 112a , 112b , 112c , 112d be or will be transferred.

By means of several through openings 1902o can the mounting positions W1, W2, W3, W4 each winding sleeve coupling of the multiple winding sleeve couplings 112a , 112b , 112c , 112d be or become predefined. The through openings 1902o can be aligned with the corresponding through opening of the chamber housing, so that the rotating union 902o can be led out of the chamber housing.

According to various embodiments, the guide roller carrier can 702 an additional through opening 1922o have to accommodate an additional rotary union 902o or at least one additional rotatably mounted (and driven) shaft 112w . By means of the additional rotating union 902o or at least the additional wave 112w can drive energy generated outside of a vacuum chamber to the processing roller 122p be or will be transferred. Optionally, the processing role 122p by means of the rotating union 902o be supplied with a temperature control medium. By means of the additional through opening 1922o can the assembly position CD of the processing roller 122p be or become predefined.

The through openings 1902o , 1922o can, for example, have a larger extent (transverse to the direction of the axis of rotation 101 ) have as the positive locking elements 1502 . Alternatively or additionally, through openings 1902o , 1922o a greater distance apart (transverse to the direction of the axis of rotation 101 ) have as the positive locking elements 1502 , for example more than twice the distance between the form-locking elements 1502 from each other, for example more than three times the spacing of the form-locking elements 1502 from each other. Each group of the several groups 1402a , 1402b , 1402c , 1402d can have more positive locking elements 1502 have as the guide roller carrier 702 at through openings 1902o , 1922o having.

According to various embodiments, the distance between mutually adjacent positive locking elements 1502 (e.g. mounting holes 1502 ) are in a range from approximately 10 mm to approximately 100 mm, for example approximately 50 mm. The mounting holes are optional 1502 have a thread, e.g. M8 or M10. As an alternative or in addition, a spacing between adjacent mounting positions can be used 701a , 701b , 701c , 701d range from about 10 mm to about 100 mm.

The mounting positions 7x1y (compare detailed view 2400 ) can, for example, with a first index "x" (exemplified x = 1 to 4) along a first direction 103 be or will be referenced (clearly in columns) and / or with a second index "y" (exemplified y = a to d) along a second direction 105 (across the first direction 103 ) be or will be referenced (clearly line by line). In this way, for example, a two-dimensional grid (x, y) can be spanned, according to which the assembly positions 7x1y are arranged.

25th and 26 each illustrate a transport arrangement in different wrapping configurations 2500 , 2600 according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement).

The substrate 102 can from the third winding sleeve coupling 112c to the fourth winding sleeve coupling 112d be wrapped. An optional first intermediate layer 104 can from that of the third sleeve coupling 112c (or from the substrate wrap stored on it 102w ) on the first winding sleeve coupling 112a be wrapped. An optional second intermediate layer 104 can from the second winding sleeve coupling 112b (or from the interlayer wrap stored on it 104w ) on the fourth winding sleeve coupling 112d be wrapped.

In the feed section 1401z can have several (e.g. two, three, four or more) leadership roles 122 be set up by means of which the transport path 111 can be or become curved several times. Alternatively or additionally, in the discharge section 1401a several (e.g. two, three, four or more) leadership roles 122 be set up by means of which the transport path 111 can be or become curved several times.

The transport arrangement can be in 2500 a processing role 122p have which in the processing section 601 is arranged and therein a constantly curved transport path section 111k provide. The transport arrangement in 2600 can have at least two leadership roles 112 have which in the processing section 601 are arranged and therein a plurality of straight transport path sections 111g provide.

According to various embodiments, the guide rollers can be attached 122 (also called rollers) on a base plate 702p (clearly a circuit board). With one-sided storage (cantilever configuration) exactly one board can be used 702p be used. An additional circuit board can be used for roller bearings on both sides 1702p be used. Using a predefined position grid of mounting holes 1502 it can be made possible to use non-stationary guide roles 122 (eg guide rollers, measuring rollers, spreader rollers, etc.), which can be arranged variably, for example in the predefined grid at assembly positions. Due to the predefined position grid of mounting holes 1502 in the board 702p (or the boards 702p , 1702p ) can be made possible according to various embodiments, non-stationary guide rollers 122 to arrange in an alternative way (ie to reconfigure).

According to various embodiments, the distance between the mounting holes 1502 are in a range from approximately 10 mm to approximately 100 mm, for example approximately 50 mm. The mounting holes are optional 1502 have a thread, e.g. M10 or M8. The position grid can extend over a defined area, which is determined as a variable field after the format examination of the transport arrangement with regard to possible web runs. With one-sided storage (cantilever configuration), repositioning can be carried out relatively easily. The respective mounting base screwed on one side 1102 can be re-attached at the desired position. In the case of storage on both sides, an opposite board can be used 1702p to be necessary. This can have an identical drilling pattern and can be or are arranged congruently on the connecting cross members by means of a centering element. This allows the drilling patterns of the two boards 1702p , 702p cursed with each other.

When repositioning guide rollers 122 , it may be necessary to check the angular position or to readjust it using the alignment device 1802 (For example, by providing elongated holes, adjusting screws XY at the bearing points). Cantilever leadership roles 122 (also known as cantilever rollers) can have an internal bearing or a console with integrated bearing. Rollers mounted on both sides can be attached or can be attached with half-shells, or more conveniently with Folding bearings. Depending on the respective web running geometry, roller diameters (extension transverse to the axis of rotation 101a ) can be used in a range from about 80 mm (millimeters) to about 220 mm. For example, if a larger roll diameter is necessary for a conversion (for example to flexible glass), these rolls can optionally be rearranged (reconfigured).

The possibility of a variable roller arrangement can be a prerequisite for high flexibility with regard to the implementation of new production technologies and processes.

• • in den Bahnlauf soll zumindest eine zusätzliche Führungsrolle 122 (z.B. eine Breitstreckwalze) hinzugefügt sein oder werden kann;
• • aufgrund technologischer Vorgaben, beispielsweise wenn eine Seite des Substrats 102 berührungsfrei prozessiert werden soll (auch als „No Fronttouch“ bezeichnet);
• • wechselndes Substrat 102 oder wechselnder Substrattyp, beispielsweise wenn ein Umrüsten der Transportanordnung von Folie auf flexibles Glas erfolgen soll;
• • Wegfall der Prozesswalze 122p, d.h. wenn eine Umstellung auf Freespann erfolgen soll.

For example, an adjustment of the web run may be required or take place in at least the following scenarios:

• • At least one additional leadership role should be in the web run 122 (eg a spreader roller) can be added or can be added;
• • due to technological requirements, for example if one side of the substrate 102 should be processed without contact (also referred to as "No Fronttouch");
• • changing substrate 102 or changing substrate type, for example if the transport arrangement is to be converted from film to flexible glass;
• • Elimination of the process roller 122p , ie if you want to switch to Free Span.

The constantly curved section of the transport path 111k which by means of the processing roller 122p is provided, an angle w111 with respect to the axis of rotation 101a the processing role 122p have which is greater than 90 °. In other words, a length of the constantly curved transport path section 111k be greater than one-half (50%) of the size of the processing roll 122p . For example, the length of the constantly curved transport path section 111k in a range from about 50% to about 90% of the circumference of the processing roll 122p be, for example, in a range from about 66% to about 83% of the circumference of the processing roll 122p .

The several straight-line transport path sections 111g which by means of the multiple guide roles 122 can be provided in the processing section, a length 11 , 12th (corresponds to the distance between the axes of rotation 101a the corresponding leadership roles 122 from each other), which is greater than a quarter (25%) of the circumference of the guide rollers 122 . For example, the length of the straight-line transport path sections 111g in a range from about 25 %% to about 75% of the circumference of the guide rollers 122 be, for example, in a range from about 25% to about 50% of the circumference of the guide rollers 122 .

The leadership roles 122 the transport arrangement in 2500 can have a small diameter (expansion transverse to the axis of rotation 101a ) than the guide rollers 122 the transport arrangement in 2600 (also as big leadership roles 122 designated). For example, the diameter of the guide rollers 122 the transport arrangement in 2500 be less than about 200 mm, for example less than about 150 mm. Alternatively or additionally, the diameter of the guide rollers can be 122 the transport arrangement in 2600 be greater than about 200 mm, for example less than about 250 mm. The larger the diameter, the smaller the risk that the substrate 102 breaks, especially if the substrate is very brittle (such as flexible glass).

The transport path 111 can by any leadership role 122 the transport arrangement 2500 , 2600 be deflected, for example by an angle w112 (vividly the difference from the incoming transport path 111 and expiring transport path 111 ). The angle w122 can also be referred to as a minimum wrap. The angle w122 the drive-less guide rollers 122 can be greater than approximately 10 °, eg greater than approximately 20 °, eg greater than approximately 30 °.

27 illustrates a transport arrangement 2700 according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement 2700 ) in yet another wrapping configuration in the four large guide rolls 122 and a processing role 122p the transport path 111 define. Such a wrapping configuration can be used, for example, for processing flexible glass substrates.

The constantly curved section of the transport path 111k of the transport path 111 which by means of the processing roller 122p is provided, an angle can with respect to the axis of rotation 101a the processing role 122p have which is greater than 90 °. In other words, a length of the constantly curved transport path section 111k greater than a quarter (25%) of the size of the processing roll 122p . For example, the length of the constantly curved transport path section 111k in a range from about 25% to about 75% of the circumference of the processing roll 122p be, for example, in a range from about 33% to about 66% of the size of the processing roll 122p .

28 illustrates a transport arrangement 2800 according to various embodiments in a schematic side view or Cross-sectional view (e.g. with a viewing direction along the axis of rotation 101 the transport arrangement 2800 ) in yet another wrapping configuration, in which six large guide rolls 122 the transport path 111 define. Such a wrapping configuration can be used, for example, to process a flexible glass substrate.

The transport arrangement 2800 is similar to the transport arrangement 2700 , with the difference that instead of the driven processing roller 122p two driveless guide rollers 122 are used, of which, for example, at least one guide roller MR has a sensor (for example a strain gauge). Analogous to this reconfiguration, the processing role can be carried out in the wrapping configurations described above 122p and two leadership roles 122 be understood as interchangeable. Using the two guide rollers 122 a free-span configuration (also referred to as "free span") can be provided or in which the transport path 111 several straight sections 111g in the processing section 601 along which the substrate 102 is managed and / or processed.

The transport arrangement 2700 and the transport arrangement 2800 can be set up such that the transport path 111 is curved in exactly one direction. It can be achieved that a main processing side 102t of the substrate 102 which is processed (eg coated) by means of the guide rollers 122 non-contact along the transport path 111 is carried out (a so-called "No Fronttouch" configuration).

One-sided, non-contact transport of the substrate 102 can be used, for example, to process flexible glass.

In the following, more specific wrapping configurations are to be described which can be combined with the above wrapping configurations.

29A and 29B each illustrate a transport arrangement in different wrapping configurations 2900a , 2900b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement).

UW denotes one for unwinding the substrate 102 Winding sleeve coupling used (ie the winding sleeve coupling controlled according to the unwinding configuration).

RW denotes one for winding the substrate 102 winding sleeve coupling used (ie the winding sleeve coupling controlled according to the winding configuration).

I-UW denotes one for unwinding the intermediate layer 104 Winding sleeve coupling used (e.g. winding sleeve coupling controlled according to the winding configuration). I-RW denotes one for winding up the intermediate layer 104 Winding sleeve coupling used (eg winding sleeve coupling controlled according to the unwinding configuration). The winding sleeve coupling I-UW and / or the winding sleeve coupling I-RW can be optional.

GR denotes a leadership role 122 which are used to redirect the transport path 111 is set up (also as a deflection roller 122 or pulley 122 designated). The pulley 122 can be stored without a drive.

SR denotes a leadership role 122 , which is set up for spreading (also as spreading roller 122 or spreader roll 122 designated). The spreader roll 122 can be mounted without a drive and have a lateral surface curved in the axial direction (for example a concave outer surface or a convex outer surface). For example, the spreader roll 122 a curvature along the axis of rotation 101a have or a bulbous shape.

MR denotes a leadership role 122 , which is set up for measuring (also as measuring roller 122 or measuring roller 122 designated). The measuring roller 122 can be set up to detect a mechanical variable, which is a mechanical tensile stress in the substrate 102 represents. The measuring roller 122 can be stored without a drive.

TI denotes a leadership role 122 , which is set up for train decoupling (also as a pull roller 122 or pull roller 122 designated). The traction roller can be driven, for example by means of a belt or by means of a shaft. A drive energy transferred to the pull roller (eg torque or rotary motion transferred to it) can be controlled 508 can be controlled and / or regulated, for example on the basis of the measuring roller 122 recorded mechanical size.

A pull roller 122 and this two adjacent measuring rollers 122 between which the pull roller 122 is arranged, can form a unit (clearly a decoupling roller arrangement) which the transport path in two train control lines (clearly before and after the pull roller 122 ) divided between which the web train by means of the pull roller 122 is adjusted (ie a difference before and after the draw roller 122 is reduced).

The circulation of the processing roller can be done by means of additional rollers 102p be or become enlarged.

30A and 30B each illustrate a transport arrangement in different wrapping configurations 3000a , 3000b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement), which differ in the direction in which the plurality of winding tube couplings are rotated (ie the direction of rotation or winding direction).

In the wrap configurations 3000a , 3000b can the transport path 111 can be or will be defined by means of large measuring rollers MR and deflection rollers GR.

31A and 31B each illustrate a transport arrangement in different wrapping configurations 3100a , 3100b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement), the wrapping of the intermediate layer being omitted. This can be the case, for example, with a polymer substrate 102 be the case.

32A and 32B each illustrate a transport arrangement in different wrapping configurations 3200a , 3200b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement 3200a ).

33A and 33B each illustrate a transport arrangement in different wrapping configurations 3300a , 3300b according to various embodiments in a schematic side view or cross-sectional view (for example with a viewing direction along the axis of rotation direction 101 the transport arrangement 3300a ), the transport path 111 is set up such that the substrate 102 is curved in only one direction. In other words, a first side of the substrate 102 which is processed (eg coated), contact-free along the transport path 111 to be led. The first side of the substrate 102 can use it along the transport path 111 none of the leadership roles 122 touch (ie in "No Fronttouch" configuration). A side opposite the first side can be on the guide rollers 112 lie on.

One-sided, non-contact transport of the substrate 102 can be used, for example, to process flexible glass.

The "No Fronttouch" configuration can be done in 3300a using small guide rollers 122 be or will be provided and in 3300b using large leadership roles 122 be or will be provided.

Claims (12)

Transport arrangement (1100a, 1200a), comprising: • a transport area (111b); • a plurality of rotatably mounted winding tube couplings (112a, 112b, 112c, 112d) for coupling one winding tube each; • at least one rotatably mounted guide roller (122), which is arranged in the transport region (111b), for guiding a flexible substrate along a curved transport path (111) which runs between the plurality of winding tube couplings (112a, 112b, 112c, 112d); A guide roller carrier (702) which has a plurality of fastening structures (712a, 712b, 722a, 722b) within the transport region (111b), which are arranged in a predefined regular pattern and each of which fastening structure defines an assembly position (701a, 701b) ; and • at least one bearing arrangement (1221), by means of which the at least one guide roller (122) is mounted; • wherein the bearing arrangement (1221) has a mounting base (1102) which is complementary to each fastening structure of the plurality of fastening structures (712a, 712b, 722a, 722b), so that the bearing arrangement (1221) is optionally in each of the mounting positions (701a, 701b ) can be attached. Transport arrangement (1100a, 1200a) according to Claim 1 further comprising: a drive system (518) for driving the plurality of bobbin clutches (112a, 112b, 112c, 112d). Transport arrangement (1100a, 1200a) according to Claim 1 or 2nd , wherein each winding tube coupling of the plurality of winding tube couplings (112a, 112b, 112c, 112d) has a tensioning device (504) for clamping the respective winding tube. Transport arrangement (1100a, 1200a) according to one of the Claims 1 to 3rd , wherein the transport region (111b) has at least one processing section (601), in which the transport path (111) runs in a straight line or has a constant curvature, along a length of more than a quarter of the circumference of the at least one guide roller (122). Transport arrangement (1100a, 1200a) according to Claim 4 , wherein at least some of the plurality of fastening structures (712a, 712b, 722a, 722b) are arranged in the processing section (601). Transport arrangement (1100a, 1200a) according to one of the Claims 4 to 5 , wherein the transport area (111b) has at least one feed section (1401z) and one discharge section (1401a), which are arranged between the processing section (601) and the plurality of winding sleeve couplings (112a, 112b, 112c, 112d); wherein the plurality of attachment structures (712a, 712b, 722a, 722b) are arranged in a plurality of groups, a first group of which is arranged in the feed section (1401z) and a second group is arranged in the discharge section (1401a). Transport arrangement (1100a, 1200a) according to Claim 6 , wherein the fastening structures (712a, 712b, 722a, 722b) of the first group and the fastening structures (712a, 712b, 722a, 722b) of the second group are arranged mirror-symmetrically with respect to a mirror plane which is between the plurality of winding tube couplings (112a, 112b, 112c, 112d). Transport arrangement (1100a, 1200a) according to one of the Claims 1 to 7 , wherein at least two fastening structures (712a, 712b, 722a, 722b) of the plurality of fastening structures (712a, 712b, 722a, 722b) have at least one common positive locking element. Transport arrangement (1100a, 1200a) according to one of the Claims 1 to 8th , wherein the plurality of fastening structures (712a, 712b, 722a, 722b) have a plurality of fastening structure pairs, of which each fastening structure pair has two fastening structures which lie opposite one another, so that the bearing arrangement (1221) can be mounted between them. Transport arrangement (1100a, 1200a) according to Claim 9 , wherein the guide roller carrier (702) comprises two carrier plates (702p, 1702p), each of which carrier plate has a fastening structure of each fastening structure pair. Vacuum arrangement (800a, 800b), comprising: • a vacuum chamber (802); and • a transport arrangement (1100a, 1200a) according to one of the Claims 1 to 10th whose transport area (111b) is arranged in the vacuum chamber (802). Method for operating a transport arrangement (1100a, 1200a), which comprises: A guide roller carrier (702) which has a plurality of fastening structures (712a, 712b, 722a, 722b) which are arranged in a predefined regular pattern and of which each fastening structure defines a mounting position (701a, 701b); and • at least one bearing arrangement (1221), by means of which the at least one guide roller (122) is mounted; comprising the method: • deflecting a substrate (102) by means of the guide roller (122) in a first wrapping configuration, in which the bearing arrangement (1221) is brought into a first mounting position (701a); and • Deflecting a substrate (102) by means of the guide roller (122) in a second wrapping configuration, in which the bearing arrangement (1221) is brought into a second mounting position (701b) different from the first mounting position (701a).

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