DE102016112869B4 - Transport arrangement and processing arrangement and method for operating this - Google Patents

Abstract

Transport arrangement (100, 300), comprising:
• several rotatably mounted winding sleeve couplings (112a, 112b, 112c, 112d), of which two winding sleeve couplings are set up for coupling winding sleeves between which a flexible substrate (102) is to be wound, and of which at least one additional winding sleeve coupling for coupling at least one additional winding sleeve, by means of which an intermediate layer (104) is to be accommodated and/or held available;
• at least one rotatably mounted guide roller (122) which defines a curved transport path (111) along which the wrapping takes place;
• the plurality of winding sleeve couplings (112a, 112b, 112c, 112d) being set up essentially in the same way, so that the winding sleeves can be interchanged with one another.

Description

The invention relates to a transport arrangement and a processing arrangement and a method for operating these.

In general, a substrate, for example a glass substrate, a metal substrate and/or a polymer substrate, can be treated (processed), e.g. coated, so that the chemical and/or physical properties of the substrate can be changed. Various coating methods can be used to coat a substrate, such as vapor deposition, e.g., chemical vapor deposition (CVD) or physical vapor deposition (PVD).

In general, flexible substrates in the form of a strip (e.g. metal strip, film strip or glass strip) can be processed in a continuous system, e.g. coated (and/or otherwise treated) in a film coating system. In this case, for example, a strip substrate can be transported through a coating area by means of a transport arrangement. The transport arrangement can be set up, for example, in such a way that the tape substrate is processed from roll-to-roll (also referred to as R2R), the tape substrate being unwound from a first substrate roll, being transported through the coating area and, after coating, on a second substrate roll is wound up again (also referred to as wrapping). The coating system can have a vacuum chamber so that the strip substrate can be coated in a vacuum. The substrate roll can, for example, be introduced into the vacuum chamber or ejected from it, so that the vacuum chamber has to be ventilated cyclically in order to exchange the belt substrate.

For example, a vacuum deposition system may be used to deposit one or more layers onto a tape substrate using chemical and/or physical vapor deposition. In order to efficiently implement a large-area deposition on correspondingly large-area strip substrates, the strip substrate can be wound around by means of guide rollers through a number of coating areas, it being possible for a coating process to be carried out in each coating area of the coating system while the substrate is being transported through the system.

Conventionally, an R2R vacuum coating system (also referred to as a vacuum coater) is designed individually for the intended application. In a first step, a concept for the wrapping system is configured that meets the requirements of the intended use. For example, certain requirements can be placed on the maximum bending radius, the maximum overall height, the space required for large substrate coils or on process-related peculiarities. A vacuum chamber is then configured, which accommodates the wrapping system and the components required for coating, with several passages in the vacuum chamber being taken into account for operating the wrapping system and the components. The interfaces for all additional equipment, such as gas supply, pump access, sensors, etc., are then arranged in the free spaces that are still unoccupied. This configuration process results in a compact R2R vacuum coating system whose wrapping system cannot or can hardly be changed easily. For example, the pre-configured wrapping system can determine the mounting position of the guide rollers and the substrate roll, so that the course of the transport path can hardly be adjusted afterwards, if at all. However, if the system is subsequently changed, it often has to be accepted that the subsequent changes can often only be carried out with greater inaccuracy, which can result in the guide rollers no longer being exactly parallel to the axis, so that the substrate guided over them drifts off . curls or, in the worst case, gets damaged.

In addition, different approaches can be considered for each application as to how the appropriate wrapping of the substrate is to be implemented constructively, so that even the wrapping systems whose concept is geared towards the same application are only rarely compatible with one another. It may therefore be the case that newer systems cannot easily be combined with the existing systems.

In DE 10 2014 105 747 A1 a wrapping system for wrapping flexible, strip-shaped substrates is described, the wrapping system having two substrate winders (each unwinder and substrate), two intermediate layer winders and two carrier tape winders as well as several deflection rollers for deflecting the flexible substrate from the unwinder to the winder, which Functionally divided into two winder housings.

In DE 11 2013 006 112 T5 describes a wrapping system for wrapping flexible, strip-shaped substrates, the wrapping system having exactly two substrate rewinders (substrate unwinder and substrate winder).

In DE 77 12 649 U describes a winding system for winding a paper web, the winding system having exactly two paper winders carried by a rotatable frame so that the winding system can be brought into different configurations by interchanging the position of the winders.

According to various embodiments, it was recognized that for a large spectrum of possible applications, the associated constructive variety of possible concepts for wrapping a substrate has synergetic commonalities. These synergetic similarities can be exploited in order to find that configuration of the wrapping system for each individual application that has the fewest structural differences compared to the other applications. Based on the intersection of the configurations selected in this way, those design features can ultimately be identified which would have to be variable to cover the possible applications.

According to various embodiments, a transport arrangement, a processing arrangement and a method for operating these are provided which combine the synergetic similarities and thus enable the greatest possible flexibility. Due to the great flexibility, it can be avoided that an existing system would have to be replaced or, if this is at all possible, would have to be converted at great expense in order to meet the requirements of a new application. For example, especially with test systems, laboratory machines, or other systems for research and development (also known as R&D systems), it is difficult to predict which processes and coating materials could play a role in the future and/or which specifications could be required for them.

According to various embodiments, it is clearly possible to change the position of individual guide rollers, to exchange them for other types of guide rollers and/or to change their number. This makes it easier to change and adapt the configuration of a system, which saves costs and effort on the economic side, and expands the range of possible applications, processes and materials for which the system can be used on the process technology side. Furthermore, the pre-configured mounting positions enable a high level of axial parallelism to be achieved, which reduces the risk of substrate breakage, especially with a sensitive substrate (e.g. a glass film).

According to various embodiments, a transport arrangement, a processing arrangement and a method for operating these are provided, which are structurally designed in such a way that the system operator (e.g. of test systems) has the option of realizing variable web guides and thus increasing the variety of processes that can be carried out. This also enables future, previously unknown applications to be implemented in an existing system.

According to various embodiments, a transport arrangement can have the following: a plurality of rotatably mounted winding sleeve couplings, two of which are set up for coupling winding sleeves between which a flexible substrate is to be wound, and at least one additional winding sleeve coupling for coupling at least one additional winding sleeve by means of which an intermediate layer is to be accommodated and/or kept available; at least one rotatably mounted guide roller, which defines a curved transport path along which the wrapping takes place (also referred to as web travel); wherein the plurality of winding sleeve couplings are set up essentially in the same way, so that the winding sleeves can be interchanged with one another.

According to various embodiments, a transport arrangement can have the following: at least three rotatably mounted winding sleeve couplings for coupling two winding sleeves between which a flexible substrate is to be wrapped, and for coupling at least one additional winding sleeve by means of which an intermediate layer is to be received and/or held; at least one rotatably mounted guide roller which defines a curved transport path along which the wrapping takes place; wherein the three winding sleeve couplings are essentially set up in the same way, so that the winding sleeves can be interchanged with one another.

According to various embodiments, the transport arrangement can also have: several (eg at least three) drives, of which each drive is coupled to exactly one winding tube coupling of the several winding tube couplings; wherein the multiple drives are essentially set up in the same way, so that they rotate the multiple winding tube clutches synchronously (eg, bidirectionally) with the same type of activation. Synchronous (e.g. tape run-synchronously) can be understood, for example, as the several winding tube couplings performing a similar movement, for example with the same sense of rotation (direction of rotation), synchronously, with movement taking place simultaneously change of direction and/or with the same speed.

According to various embodiments, the transport arrangement may further comprise: a controller for driving each drive of the plurality of drives according to a winding configuration, which has: a winding configuration for driving that winding sleeve clutch by means of which the substrate is wound; and/or an unwind configuration for driving that core clutch which unwinds the substrate; wherein the controller is set up to control each drive of the plurality of drives selectively according to the winding configuration and/or according to the unwinding configuration.

According to various embodiments, the controller can be set up to adapt a speed of at least one of the winding tube couplings between which the substrate is wound to a variable which represents a transport characteristic (e.g. a transport progress).

According to various embodiments, the controller can be set up to adjust a speed of the at least one guide roller to a variable that represents a transport characteristic (e.g. transport progress).

According to various embodiments, each winding tube coupling of the plurality of winding tube couplings can have a clamping device (e.g. having a tube mandrel, a mandrel, an expanding mandrel, a cone clamping element, and/or a segmented mandrel) for clamping the respective winding tube.

According to various embodiments, the transport area can have at least one processing section, in which the transport path runs in a straight line or has a constant curvature along a length of more than a quarter of the circumference of the at least one guide roller.

According to various embodiments, the plurality of rotatably mounted core couplings can be configured to wrap a substrate between a first core coupling of the plurality of core couplings and a second core coupling of the plurality of core couplings in a first wrapping configuration; in a second wrapping configuration, wrap a substrate between a first winding sleeve clutch of the plurality of winding sleeve clutches and a third winding sleeve clutch of the plurality of winding sleeve clutches.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings can be configured to wrap around a substrate between the third winding sleeve coupling and the second winding sleeve coupling in a third wrapping configuration.

Optionally, the first wrap configuration, the second wrap configuration, and/or the third wrap configuration may include: unwrapping an intermediate layer with the substrate (i.e., unwrap from a substrate wrapper) and/or wrapping an intermediate layer with the substrate (i.e., wrap within the substrate wrapper). .

According to various embodiments, the transport assembly may further include: a guide roll support providing a first mounting position in which the at least one guide roll is mounted in the first wraparound configuration; and which provides a second mounting position in which the at least one guide roller is mounted in the second wraparound configuration.

According to various embodiments, a vacuum assembly may include: a vacuum chamber; and a transport arrangement according to one or more embodiments, the plurality of winding tube clutches of which are arranged in the vacuum chamber.

According to various embodiments, the vacuum chamber can have a plurality of rotary feedthroughs, of which each rotary feedthrough is aligned with exactly one winding sleeve coupling of the plurality of winding sleeve couplings.

According to various embodiments, the vacuum chamber can have a chamber wall with a plurality of rotary unions, each rotary union being coupled to exactly one winding sleeve clutch of the plurality of winding sleeve clutches for transmitting a torque to the winding sleeve clutch by means of the rotary union from outside the vacuum chamber.

According to various embodiments, a method for operating a transport arrangement, which has at least a first winding sleeve clutch, a second winding sleeve clutch and a third winding sleeve clutch, can have the following: processing a substrate in a first wrapping configuration, in which the substrate is wrapped between two winding sleeves, which are first winding sleeve clutch and the second winding sleeve clutch are mounted; and processing a substrate in a second wraparound configuration in which the substrate is sandwiched between two winding tubes is wound around, which are stored by means of the third winding tube clutch and the first winding tube clutch.

According to various embodiments, the method may further include: reconfiguring the transport assembly between the first wrap configuration and the second wrap configuration.

According to various embodiments, a transport arrangement may include: a transport area; a plurality of rotatably mounted winding tube couplings for coupling one winding tube (e.g. a substrate winding tube) each; at least one rotatably mounted guide roller disposed in the transport area for guiding a flexible substrate along a curved transport path extending between the plurality of core clutches; a guide roller carrier having within the transport area a plurality of mounting structures arranged in a predefined regular pattern and each mounting structure defining a mounting position; at least one bearing arrangement, by means of which the at least one guide roller is mounted; wherein the bearing assembly includes a mounting base configured to complement each mounting structure of the plurality of mounting structures such that the bearing assembly can be selectively mounted in each of the mounting positions.

The mounting base does not necessarily have to be set up to complement all of the attachment structures of the guide roller carrier. In other words, the head pulley carrier may optionally include a plurality of additional attachment structures (e.g., arranged in a predefined regular additional pattern), each attachment structure being different from the plurality of attachment structures. For example, the guide roller supporter has multiple sets of attachment structures that are different from each other. For example, the guide roller support may have multiple columns and/or rows of mounting structures that differ from each other.

Alternatively or additionally, not all of the attachment structures of the multiple attachment structures need to be set up identically. Clearly, the multiple attachment structures can be set up in the same way in such a way that the mounting base can be attached to each attachment structure of the multiple attachment structures. For example, the transport arrangement can have at least one additional bearing arrangement, by means of which the at least one guide roller is mounted; wherein the additional bearing assembly includes an additional mounting base configured to complement each attachment structure of the plurality of additional attachment structures. For example, the multiple additional attachment structures and the multiple attachment structures may provide a different allowable maximum load or a different grid.

A spatially one-dimensional or spatially two-dimensional periodic repetition can be understood as a regular pattern, for example a common property of all attachment structures. The periodic repetition can be generated by means of at least one of the following symmetry operations: rotation, point reflection, glide reflection, translation, and/or plane reflection. In other words, the pattern can have at least one of the following symmetries: rotational symmetry; glide symmetry; translational symmetry; and/or plane mirror symmetry. The multiple attachment structures may be or will be arranged in a common plane.

According to various embodiments, the winding sleeve couplings (also referred to as sleeve pivot bearings) can be set up for the rotatable mounting of the winding sleeves.

According to various embodiments, the transport assembly may further include: a drive system for driving the plurality of core clutches.

According to various embodiments, the plurality of winding tube couplings can each have a clamping device for clamping the respective substrate winding tube.

According to various embodiments, the transport area can have at least one section in which the transport path runs in a straight line or has a constant curvature, the section having a length of more than a quarter of the circumference of the at least one guide roller.

In other words, the transport path can have at least one constantly curved or straight section which has a length of more than a quarter of the circumference of the at least one guide roller.

According to various embodiments, the transport arrangement can also have: a processing roller, which is arranged in the processing section of the transport area and has a temperature control device.

According to various embodiments, at least some of the plurality of attachment structures may be arranged in the processing section of the transport area.

According to various embodiments, the transport area can have at least one infeed section and one outfeed section, which are arranged between the processing section and the plurality of winding tube couplings; wherein the plurality of attachment structures are arranged in a plurality of groups, of which a first group is arranged in the feed section and a second group is arranged in the discharge section.

According to various embodiments, the fastening structures of the first group and the fastening structures of the second group can be arranged mirror-symmetrically with respect to a mirror plane which runs between the plurality of winding sleeve couplings.

According to various embodiments, each fastening structure of the plurality of fastening structures can have a plurality of form-fitting elements, wherein a scheme in which the plurality of form-fitting elements of each fastening structure of the plurality of fastening structures are arranged is the same. For example, a distance between adjacent positive-locking elements can be the same.

Each guide roller carrier mounting structure can be associated with exactly one mounting position (i.e., unique).

According to various embodiments, at least two fastening structures of the plurality of fastening structures can have at least one common positive-locking element. The positive-locking elements of each fastening structure can be used to mount the guide roller in the mounting position that is assigned to the fastening structure. At least some positive-locking elements can be used for fastening in the guide roller in a number of assembly positions.

According to various embodiments, at least some of the multiple form-fitting elements of each fastening structure can be provided by means of a through-opening in the carrier plate. In other words, at least some of the multiple fastening structures can be provided by means of multiple through openings in the carrier plate.

According to various embodiments, the guide roller supporter may include at least one set of the plurality of attachment structures; each attachment structure of the group being provided by means of a plurality of through holes in the guide roller support.

According to various embodiments, the guide roller support may include a support plate that includes the at least one group of the plurality of attachment structures (i.e., one or more groups). For example, each attachment structure of the group can be provided by means of a plurality of through openings in the carrier plate.

According to various embodiments, the plurality of fastening structures can have a plurality of fastening structure pairs, of which each fastening structure pair has two fastening structures which are opposite one another, so that the bearing arrangement can be mounted between them.

The attachment structures of each attachment structure pair may be part of the same group of attachment structures.

The fastening structures of each fastening structure pair (also referred to as fastening structure and counter-fastening structure) can be associated with the same mounting position.

According to various embodiments, the guide roller carrier may have a plurality of counter-mounting structures, each of which counter-mounting structures forms a pair of mounting structures with a mounting structure of the plurality of mounting structures, between which the bearing assembly is mountable.

According to various embodiments, the guide roller carrier can have two carrier plates, each carrier plate having a fastening structure of each fastening structure pair.

According to various embodiments, the guide roller support may include an additional support plate including at least one group of the plurality of counter-mounting structures; each counter-fastening structure of the additional support plate being provided by means of a plurality of through openings in the additional support plate.

In accordance with various embodiments, the bearing arrangement can have an alignment device which is set up to adjust an alignment of an axis of rotation of the bearing arrangement.

According to various embodiments, at least one core coupling of the plurality of core couplings may be configured to rotatably support an interlayer core.

According to various embodiments, a vacuum assembly may include: a vacuum chamber; and a transport arrangement according to one or more embodiments, the transport area of which is arranged in the vacuum chamber.

According to various embodiments, a method of operating a transport assembly may be configured, comprising: a guide roller carrier having a plurality of attachment structures arranged in a predefined regular pattern, each attachment structure defining a mounting position; at least one bearing arrangement, by means of which the at least one guide roller is mounted. The method may include: redirecting a substrate by means of the guide roller in a first wraparound configuration in which the bearing assembly is placed in a first mounting position, and redirecting a substrate by means of the guide roller in a second wraparound configuration in which the bearing assembly is placed in a second mounting position different from the first mounting position is brought.

According to various embodiments, the at least one guide roller can be at least one of the following types of guide rollers: a deflection roller; a spreader roll; a measuring roller; and/or a pull roller. At least the traction roller may be a powered (i.e. active) idler roller. Alternatively or additionally, the deflection roller; the spreader roller and/or the measuring roller can be a non-driven (i.e. passive) guide roller.

According to various embodiments, the several winding sleeve couplings can essentially be set up in the same way, so that the winding sleeves can be interchanged with one another. Substantially similar can be understood as identical or at least so similar that the differences between the several winding sleeve couplings are so small or few that the interchangeability of the winding sleeves is retained. In other words, there can optionally be small differences between the several winding sleeve couplings, which, however, do not impair their functionality in relation to the winding sleeves. For example, the winding sleeves can be set up essentially in the same way.

For example, the winding sleeve couplings can have the same outer diameter or can be adjusted to this. This can provide for a core of the appropriate inner diameter to fit onto each core coupling of the multiple core couplings, e.g., when multiple cores of uniform internal diameter are used.

If, on the other hand, winding sleeves are used which differ in their inner diameter, winding sleeve couplings with an adjustable outer diameter can be used, e.g. by having their outer diameter adjustable using a clamping device. Even if winding sleeves with a uniform inner diameter are used, winding sleeve couplings with an adjustable outer diameter can be used, which clearly makes it easier to attach the winding sleeves.

If the multiple winding sleeve couplings have an adjustable outer diameter (e.g. adjustable by means of a clamping device), the adjustment ranges in which the outer diameter of each winding sleeve coupling of the multiple winding sleeve couplings is adjustable can overlap. In other words, each core coupling of the plurality of core couplings may have a range of adjustment within which its outer diameter is adjustable, with the ranges of adjustment of all core couplings of the plurality of core couplings overlapping (i.e., their intersection is non-zero). The inside diameter of each winding sleeve can lie in the overlap of the adjustment areas so that they can be interchanged.

For example, the winding tube couplings can have at least the same type of clamping devices.

By analogy, the multiple drives can be set up in such a way that they can take over each other's functionality. For example, the multiple drives can have operating points of the same type, e.g. the same torque, the same drive power and/or the same speed, e.g. in relation to an electrical power supplied and/or its frequency. Alternatively or additionally, the multiple drives can match in their permitted electrical power.

According to various embodiments, a transport arrangement can have a wrapping area in which the winding and/or unwinding of the substrate and/or the intermediate layer takes place, and can also have an adjoining transport area through which the substrate is transported. The multiple Winding sleeve couplings can be arranged in the wrapping area.

According to various embodiments, a processing assembly may include: a vacuum assembly; a processing source for processing a substrate in a processing section of the vacuum assembly.

According to various embodiments, the distance between adjacent winding sleeve couplings of the plurality of winding sleeve couplings can be in a range from approximately 1 m to approximately 2 m.

Exemplary embodiments of the invention are shown in the figures and are explained in more detail below.

• 1A eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 1B, 2A und 2B jeweils die Transportanordnung aus 1A in verschiedenen Konfigurationen;
• 3A eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 3B, 4A und 4B jeweils die Transportanordnung aus 3A in verschiedenen Konfigurationen;
• 5A, 5B und 5C jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Detailansicht;
• 6A und 6B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 7A und 7B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 8A und 8B jeweils eine Vakuumanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 9A und 9B jeweils eine Vakuumanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 10 ein Verfahren gemäß verschiedenen Ausführungsformen in einem schematischen Ablaufdiagram;
• 11A und 11B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 12A und 12B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 13A und 13B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 14A und 14B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 15A, 15B und 15C jeweils eine Befestigungsstruktur gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 16A, 16B und 16C jeweils eine Befestigungsstruktur gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 17A und 17B jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 18A eine Lageranordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 18B eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 19 ein Verfahren gemäß verschiedenen Ausführungsformen in einem schematischen Ablaufdiagram;
• 20 und 21 jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Perspektivansicht;
• 22A und 22B jeweils eine Prozessieranordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 23 eine Prozessieranordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 24 einen Führungsrolle-Träger gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 25 und 26 jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 27 und 28 jeweils eine Transportanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 29A und 29B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen;
• 30A und 30B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen;
• 31A und 31B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen;
• 32A und 32B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen; und
• 33A und 33B eine Transportanordnung gemäß verschiedenen Ausführungsformen in jeweils voneinander verschiedenen Umwickelkonfigurationen.

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• 1A a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 1B , 2A and 2 B the transport arrangement 1A in different configurations;
• 3A a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 3B , 4A and 4B the transport arrangement 3A in different configurations;
• 5A , 5B and 5C each a transport arrangement according to different embodiments in a schematic detailed view;
• 6A and 6B each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 7A and 7B each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 8A and 8B each a vacuum arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 9A and 9B each a vacuum arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 10 a method according to various embodiments in a schematic flowchart;
• 11A and 11B each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 12A and 12B each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 13A and 13B each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 14A and 14B each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 15A , 15B and 15C each a fastening structure according to different embodiments in a schematic side view or cross-sectional view;
• 16A , 16B and 16C each a fastening structure according to different embodiments in a schematic side view or cross-sectional view;
• 17A and 17B each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 18A a bearing arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 18B a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 19 a method according to various embodiments in a schematic flowchart;
• 20 and 21 each a transport arrangement according to different embodiments in a schematic perspective view;
• 22A and 22B each a processing arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 23 a processing arrangement according to various embodiments in a schematic side view or cross-sectional view;
• 24 a guide roller carrier according to various embodiments in a schematic side view or cross-sectional view;
• 25 and 26 each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 27 and 28 each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view;
• 29A and 29B a transport arrangement according to various embodiments in mutually different wrapping configurations;
• 30A and 30B a transport arrangement according to various embodiments in mutually different wrapping configurations;
• 31A and 31B a transport arrangement according to various embodiments in mutually different wrapping configurations;
• 32A and 32B a transport arrangement according to various embodiments in mutually different wrapping configurations; and
• 33A and 33B a transport arrangement according to various embodiments in mutually different wrapping configurations.

In the following detailed description, reference is made to the accompanying drawings that form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "front", "back", "front", "rear", etc. is used with reference to the orientation of the figure(s) being described. Because components of embodiments can be positioned in a number of different orientations, the directional terminology is used for purposes of illustration and is in no way limiting. It is understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It is understood that the features of the various exemplary embodiments described herein can be combined with one another unless specifically stated otherwise. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

Within the scope of this description, the terms "connected", "connected" and "coupled" are used to describe both a direct and an indirect connection (e.g. ohmic and/or electrically conductive, e.g. an electrically conductive connection), a direct or indirect connection and a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference symbols, insofar as this is appropriate.

According to various embodiments, the term "coupled" or "coupling" can be understood in the sense of a (e.g. mechanical, hydrostatic, thermal and/or electrical), e.g. direct or indirect, connection and/or interaction. Several elements can be coupled to one another along an interaction chain, for example. According to various embodiments, "coupled" may be understood to mean a mechanical (e.g., physical) coupling, such as by means of direct physical contact. A clutch may be configured to transmit mechanical interaction (e.g., force, torque, etc.).

In the context of vacuum-generating or vacuum-maintaining vacuum components (e.g. a pump, a chamber, a line, a valve, etc.), the term "coupled" or "coupling" can be understood in the sense of a connection to a common vacuum system. The components of the vacuum system can be set up to exchange a gas with one another by means of the coupling, wherein the coupling can be gas-separated from an exterior of the vacuum system.

According to various embodiments, a controller can have a forward-directed control path and can thus clearly implement a sequence controller that converts an input variable into an output variable. However, the controlled system can also be part of a control circuit, so that a control is implemented. In contrast to pure forward control, the regulation has a continuous influence of the output variable on the input variable, which is brought about by the control loop (feedback). In other words, regulation can be used as an alternative or in addition to the control, or regulation can take place as an alternative or in addition to the control.

According to various embodiments, the substrate may be or will be coated with a coating material. The coating material may include or be formed from at least one of the following materials: a metal; a transition metal, an oxide (eg, a metal oxide or a transition metal oxide); a dielectric; a polymer (eg, a carbon-based polymer or a silicon-based polymer); an oxynitride; a nitride; a carbide; a ceramic; a semimetal (eg, carbon); a perovskite; a glass or vitreous material (eg, a sulfidic glass); a semiconductor; a semiconductor oxide; a semi-organic material, and/or an organic material. The coating material for coating the substrate may be provided by a coating material source.

According to various embodiments, the coating material source can be set up for coating at least one substrate (i.e. one substrate or several substrates), which is transported through the processing section, for example. For example, the coating material source can be set up to provide a gaseous coating material (e.g. a material vapor) and/or liquid coating material which can be deposited, for example, on the at least one substrate to form a layer. A coating material source may include at least one of the following: a sputtering device, a thermal evaporation device (e.g., a laser beam evaporator, an arc evaporator, an electron beam evaporator, and/or a thermal evaporator), a precursor gas source, a liquid phase atomizer. A sputtering device can be set up to atomize the coating material by means of a plasma. A thermal evaporation device can be set up to convert the coating material into a gaseous state of aggregation by means of thermal energy. Depending on the nature of the coating material, sublimation and/or evaporation of the coating material can take place. In other words, the thermal evaporation device can also sublimate the coating material. A liquid phase atomizer can be set up for applying a coating material from the liquid phase, e.g., comprising or formed from a dye.

According to various embodiments, the substrate may include or be formed from at least one of the following: a ceramic, a glass, a semiconductor (e.g., an amorphous, polycrystalline, or single-crystal semiconductor, e.g., silicon), a metal (e.g., aluminum, copper, iron, steel, platinum, gold, etc.) a polymer (e.g. plastic) and/or a mixture of different materials, such as a composite material (e.g. carbon-fiber-reinforced-carbon, or carbon-fiber-reinforced-plastic).

According to various embodiments, the substrate may include or be formed from a plastic film, a semiconductor film, a metal film and/or a glass film, and optionally be or become coated. The substrate can optionally have fibers, for example glass fibers, carbon fibers, metal fibers and/or plastic fibers, for example in the form of a woven fabric, a net, a knitted fabric, a knitted fabric, or as a felt or fleece.

According to various embodiments, a substrate may be transported as a tape (also referred to as a tape substrate) from reel-to-reel. The tape substrate may have a width (cross-transport dimension) in a range from about 30 cm to about 500 cm, or a width greater than about 500 cm. Furthermore, the tape substrate can be flexible. Clearly, a tape substrate can be any substrate that can be wound onto a roll and/or processed from roll-to-roll, for example. Depending on the elasticity of the material used, the tape substrate can have a material thickness (also referred to as substrate thickness) in a range from approximately a few micrometers (e.g. from approximately 1 µm) to approximately a few millimeters (e.g. up to approximately 10 mm), e.g. in a range from approximately 0.01mm to about 3mm. The guide rollers can be longer than the substrate is wide.

According to various embodiments, the transport arrangement described herein can be set up in such a way, e.g. have one or more concave guide rollers (or rollers), that the tape substrate is transported smoothly (flat) and the tape substrate does not wavy or distort, e.g. by means of so-called spreader rolls . Furthermore, the transport arrangement described herein can be set up in such a way that a predefined tensile stress is applied to the belt substrate, e.g. at least in the processing section. For example, a guide roller of the transport arrangement can generate a predefined tension due to the predefined mass of the roller and/or its speed can be controlled and/or regulated.

According to various embodiments, processing (also referred to as treating) a tape substrate may include at least one of the following: cleaning the tape substrate, coating the tape substrate, irradiating (e.g., using light, coherent light, UV light, particles, electrons, ions, etc.) the tape substrate, modifying the surface of the tape substrate, heating the ribbon substrate, etching the ribbon substrate, and annealing the ribbon substrate.

In the context of this description, a metal (also referred to as a metallic material) can include (or be formed from) at least one metallic element (i.e. one or more metallic elements), e.g. at least one element from the following group of elements: copper (Cu), Iron (Fe), Titanium (Ti), Nickel (Ni), Silver (Ag), Chromium (Cr), Platinum (Pt), Gold (Au), Magnesium (Mg), Aluminum (Al), Zirconium (Zr), Tantalum (Ta), Molybdenum (Mo), Tungsten (W), Vanadium (V), Barium (Ba), Indium (In), Calcium (Ca), Hafnium (Hf), Samarium (Sm), Silver (Ag), and/or lithium (Li). Furthermore, a metal may include or be formed from a metallic compound (e.g. an intermetallic compound or an alloy), e.g. a compound of at least two metallic elements (e.g. from the group of elements), such as bronze or brass, or e.g. a compound of at least one metallic element (e.g. from the group of elements) and at least one non-metallic element (e.g. carbon), such as steel.

According to various embodiments, a chamber housing may have one chamber or multiple chambers. The chamber housing can, for example, be coupled to a pump arrangement, e.g. a vacuum pump arrangement, (e.g. gas-conducting) in order to provide a negative pressure or a vacuum (i.e. set up as a vacuum chamber housing) and be set up in such a stable manner that it withstands the effects of the air pressure in the pumped-out state. The pump arrangement (comprising at least one vacuum pump, e.g. a high-vacuum pump, e.g. a turbomolecular pump) can make it possible to pump off part of the gas from inside the processing chamber, e.g. from the vacuum region. Accordingly, one or more vacuum chambers can be provided in a chamber housing. In other words, the chamber housing can be set up as a vacuum chamber housing.

According to various embodiments, a chamber housing, eg a vacuum chamber provided therein, can be set up in such a way that a pressure in a range from approximately 10 mbar to approximately 1 mbar (in other words rough vacuum) can be provided therein, and/or a pressure in a range from about 1 mbar to about 10 ^-3 mbar (in other words fine vacuum), and/or a pressure in a range from about 10 ^-3 mbar to about 10 ^-7 mbar (in other words high vacuum) and/or a pressure of less as a high vacuum, eg less than about 10 ^-7 mbar.

According to various embodiments, a transport arrangement and a processing arrangement and a method for operating them are provided, which are economically attractive for the operators because they offer a large possible flexibility.

According to various embodiments, a transport arrangement and a processing arrangement or a machine concept for this are provided, which has at least three, e.g. four, identical winding drives. These can be used either as substrate winders or interleaf winders (also referred to as interlayer winders). The winding drives can be set up to drive the respective winders (also referred to as winding tube couplings) in both directions of rotation.

The storage of the winders can vary depending on the winding configuration (illustrative system configuration). With a small substrate width, cantilever winders mounted on one side can be used, e.g. with a substrate width of up to about 400 mm. With a larger substrate width, e.g. from 300 mm or more (e.g. approximately 600 mm), a front circuit board can be or will be provided, which enables the winders to be stored on both sides.

A guide roller (also referred to as a guide roller) can be designed differently, depending on the intended use and configuration. For example, a guide roller can be set up as a passive guide for the transport path. Such a passive guide roller can, for example, be non-driven and its rotation can be caused by the movement of the substrate, e.g. in the case of a deflection roller. The passive guide roller can, for example, have a metal surface (e.g. a steel roller) and/or be ground or polished. A mechanical load on the substrate due to the guide roller and/or due to slippage can thus be or will be minimized.

Alternatively, a guide roller can be set up as a pull roller (also referred to as a pull roller). A pull roller may have a rubberized surface, e.g., it may be or will be coated with a rubber.

Optionally, a guide roller can be set up as a measuring roller. The measuring roller can have at least one sensor which can be set up to detect a mechanical variable, the mechanical variable representing a mechanical stress in the substrate. The mechanical variable can, for example, have a mechanical interaction with the substrate, for example a mechanical force to or from the substrate (e.g. a torque). As an alternative or in addition, the mechanical variable can have a rotational speed of the measuring roller. In other words, the measuring roller can be set up to detect a mechanical variable which represents a mechanical tensile stress in the substrate and/or its gradient and/or transient.

Optionally, the transport arrangement can have one or more train control routes (for train decoupling). The or each tension control draw frame can have at least one measuring roller, one tension roller and a controller. The controller can be set up to control and/or regulate a rotational speed and/or a torque of the tension roller on the basis of the mechanical variable, e.g. according to a specification. The controller can also be used to control and/or regulate multiple train control paths together. In the case of a sensitive substrate, the mechanical tensile stress (also referred to as web tension), which is transferred from the guide rollers and/or winders to the substrate, can be controlled and/or regulated by means of the or each tension control system.

After the transport arrangement has been reconfigured (i.e. the web run has been reconfigured), it may be necessary to precisely set the new web run and check it using measurements. In particular, if the substrate has flexible glass or is formed from it, there are high demands on the axial parallelism of the corresponding guide rollers and winding sleeve couplings.

Optionally, the transport arrangement can have a substrate position sensor, which can be set up to detect a measured variable that represents a position of the substrate transverse to the transport direction. For example, the substrate position sensor can have a web edge sensor system that is set up to detect an edge of the substrate. A positional deviation of the substrate in the axial direction can be detected by means of the substrate position sensor and/or it can be detected when the substrate breaks (also referred to as web break).

The position and/or orientation of a processing source (also referred to as a process component) or a plurality of processing sources can be set up in such a way that clearly as few interfering particles as possible (parasitic particles, i.e. clearly undesired particles) are deposited on the substrate. For example, the or each processing source may have a processing direction (e.g., a coating direction), wherein a first directional component of the processing direction may be counter to the direction of gravity and smaller than a second directional component of the processing direction transverse to the direction of gravity.

According to various embodiments, a freely suspended (also referred to as freespan) processing of the substrate can take place. In general, a freespan arrangement can offer the possibility to vary the free-hanging path length and its orientation relative to the direction of gravity (also known as orientation) and to adapt it to the respective conditions. Alternatively, the substrate can be processed lying on a processing roller.

With conventional system concepts, driven winders can be pre-configured positioned assemblies, which typically limit the variability of possible web runs. In other words, possible variants can already be defined during the machine conception and can no longer be changed later. According to various embodiments, four identical winders can be or will be provided, which, due to the optionally assigned functionality, enable a multiplicity of possible path guidance variants and can thus be the basis for great process flexibility.

1A 10 illustrates a transport arrangement 100 according to various embodiments in a schematic side view or cross-sectional view (eg looking along a direction of the axis of rotation 101 of the transport arrangement 100) and 1B the transport arrangement 100 with the inserted substrate 102 in a first wrapping configuration 100b.

According to various embodiments, the transport arrangement 100 can have a plurality of rotatably mounted winding tube couplings 112a, 112b, 112c, e.g. at least three winding tube couplings 112a, 112b, 112c. Each core coupling 112a, 112b, 112c of the plurality of core couplings 112a, 112b, 112c may be configured to receive and support (couple) a core. Each winding sleeve coupling of the plurality of winding sleeve couplings 112a, 112b, 112c can be mounted so as to be rotatable about an axis of rotation 101a.

A winding sleeve (also referred to as a coil) can be understood as a tubular support by means of which a flexible material can be stored or wound in the form of a coil, ie wound into a coil or unwound from a coil. The flexible material can, for example, form a substrate 102 or at least be part of it, which can later be processed. For example, a substrate 102 can be wrapped by means of a winding sleeve, e.g wound thereon or unwound therefrom (also referred to as substrate winding core). The flexible substrate 102 can be wrapped between two winding sleeve couplings 112a, 112b of the plurality of winding sleeve couplings 112a, 112b, 112c, eg from a first substrate winding sleeve to a second substrate winding sleeve.

Alternatively or additionally, a flexible material can form an optional intermediate layer 104 or at least be part of it. The intermediate layer can be or will be arranged between individual layers of a winding 102w of the substrate 102 (also referred to as substrate winding 102w). In other words, the substrate 102 and the intermediate layer 104 can be or will be wrapped in one another. Physical contact between individual layers of the substrate winding 102w can be prevented by means of the intermediate layer 104, which protects the substrate 102 and/or its coating.

According to various embodiments, an additional mandrel may be used to wrap, e.g., wound onto or unwound from, the optional intermediate layer 104 (also referred to as an intermediate layer mandrel). An additional winding sleeve coupling 112c of the plurality of winding sleeve couplings 112a, 112b, 112c may be provided for winding the optional intermediate layer 104, i.e. winding from out of a substrate winding 102w and/or winding into a substrate winding 102w. The interlayer 104 may be wound into and/or unwound from an interlayer coil 104w, for example. Alternatively, the intermediate layer 104 can be wrapped between the two substrate wraps 102w.

Furthermore, the transport arrangement 100 can have at least one rotatably mounted guide roller 122 . The at least one guide roller 122 can be mounted so as to be rotatable about an axis of rotation 101a.

The guide roller 122 can define a curved transport path 111 (various possibilities illustrated in phantom) along which the wrapping 111w can take place. The substrate 102 can be deflected, guided and/or pulled by means of the at least one rotatably mounted guide roller 122. The transport path 111 can be arranged in a transport area 111b.

The deflection of the transport path 111 by means of each guide roller of the at least one rotatably mounted guide roller 122 can have an angle (clearly the difference between the incoming transport path and the outgoing transport path). The angle can also be referred to as the minimum wrap. The angle may be greater than about 10°, such as greater than about 20°, such as greater than about 30°.

According to various embodiments, the plurality of winding sleeve couplings 112a, 112b, 112c can be set up essentially in the same way, so that the winding sleeves can be interchanged with one another. In other words, a mandrel, e.g., a substrate mandrel or an interlayer mandrel, may fit on each mandrel coupler of the plurality of mandrel couplers 112a, 112b, 112c.

According to various embodiments, the plurality of rotatably mounted core couplings 112a, 112b, 112c can be set up to wrap the substrate 102 between a first core coupling 112a of the plurality of core couplings 112a, 112b, 112c and a second core coupling 112b of the plurality of core couplings in the first wrapping configuration.

Optionally, in the first wrap configuration 100b, the intermediate layer 104 may be wrapped by a third core clutch 112c of the plurality of core clutches 112a, 112b, 112c, e.g. from the first core clutch 112a and/or to the second core clutch 112b. For example, the intermediate layer 104 can be wrapped around (also referred to as winding around) by means of the third winding sleeve clutch 112c between the first winding sleeve clutch 112a and the second winding sleeve clutch 112b.

The third winding sleeve clutch 112c can be arranged between the second winding sleeve clutch 112b and the first winding sleeve clutch 112a. Alternatively or additionally, the third winding sleeve clutch 112c can be at a greater distance from the at least one guide roller 122 than the second winding sleeve clutch 112b and/or than the first winding sleeve clutch 112a.

The axes of rotation 101a of the winding sleeve couplings 112a, 112b, 112c can be axis-parallel to one another, e.g. parallel to the direction of the axis of rotation 101. The axis of rotation 101a of the at least one guide roller 122 can be axis-parallel to the axes of rotation 101a of the winding sleeve couplings 112a, 112b, 112c, e.g. parallel to the direction of the axis of rotation 101

2A 12 illustrates the transport assembly 100 in a second exemplary wraparound configuration 200a and 200a 2 B the transport assembly 100 in a third exemplary wraparound configuration 200b.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a, 112b, 112c can be set up to wrap the substrate 102 between the first winding sleeve coupling 112a and the third winding sleeve coupling 112c in the second wrapping configuration 200a. Optionally, in the second wrap-around configuration 200a, the intermediate layer 104 may be wrapped using the second wrap-around coupling 112b.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a, 112b, 112c can be set up to wrap the substrate 102 between the second winding sleeve coupling 112b and the third winding sleeve coupling 112c in the third wrapping configuration 200b. Optionally, in the third wrap-around configuration 200b, the intermediate layer 104 may be wrapped using the first wrap-around coupling 112a.

3A 12 illustrates a transport arrangement 300 according to various embodiments in a schematic side view or cross-sectional view (eg looking along the axis of rotation direction 101 of the transport arrangement 300), which has four winding core clutches 112a, 112b, 112c, 112d; and 3B , 4A as well as 4B the transport arrangement 300 in different wrapping configurations 300b, 400a, 400b.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a, 112b, 112c, 112d can be configured to wrap around the substrate 102 between the first winding sleeve coupling 112a and the second winding sleeve coupling 112b in the first wrapping configuration 300b. Optionally, in the first wrapping configuration 300b, a first intermediate layer 104 can be wrapped by means of the third winding sleeve clutch 112c and/or a second intermediate layer 104 by means of a fourth winding sleeve clutch 112d of the plurality of winding sleeve clutches 112a, 112b, 112c, 112d.

According to various embodiments, the plurality of rotatably mounted winding sleeve clutches 112a, 112b, 112c, 112d can be set up to wrap the substrate 102 between the first winding sleeve clutch 112a and the third winding sleeve clutch 112c in the second wrapping configuration (not shown). Optionally, in the second wrap-around configuration, the first intermediate layer 104 may be wrapped by the second wrap-around coupling 112b.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a, 112b, 112c, 112d can be set up to wrap the substrate 102 between the second winding sleeve coupling 112b and the third winding sleeve coupling 112c in the third wrapping configuration 400a. Optionally, in the third wrapping configuration 400a, the first intermediate layer 104 can be wrapped by means of the first winding sleeve coupling 112a and/or the second intermediate layer 104 by means of the fourth winding sleeve coupling 112d.

According to various embodiments, the plurality of rotatably mounted winding sleeve couplings 112a, 112b, 112c, 112d can be configured to wrap around the substrate 102 between the first winding sleeve coupling 112a and the fourth winding sleeve coupling 112d in a fourth wrapping configuration 400b. Optionally, in the fourth wrapping configuration 400b, the first intermediate layer 104 can be wrapped by means of the second sleeve coupling 112b and the second intermediate layer 104 by means of the third sleeve coupling 112c.

According to various embodiments, the plurality of rotatably mounted winding sleeve clutches 112a, 112b, 112c, 112d can be set up to wrap the substrate 102 between the third winding sleeve clutch 112c and the fourth winding sleeve clutch 112d in a fifth wrapping configuration (not shown). Optionally, in the fifth wrap-around configuration, the first intermediate layer 104 may be wrapped by the first core coupler 112a and/or a second intermediate layer 104 by the second core coupler 112b of the plurality of core couplers 112a, 112b, 112c, 112d.

The first intermediate layer 104 can be or will be unwound from a first substrate roll 102w, for example, and/or the second intermediate layer 104 can be or will be wrapped, for example, in a second substrate roll 102w.

As an alternative to the spatial arrangement of the plurality of winding sleeve clutches 112a, 112b, 112c, 112d illustrated in 300b, 400a, 400b, the first winding sleeve clutch 112a and the third winding sleeve clutch 112c can be or become reversed and/or the second winding sleeve clutch 112b and the fourth winding sleeve clutch 112d be or will be arranged interchanged.

5A 10 illustrates a transport arrangement according to various embodiments in a schematic detailed view 500a (viewing direction transverse to the axis of rotation 101a).

According to various embodiments, a winding sleeve 502, for example a substrate winding sleeve 502 and/or an intermediate layer winding sleeve 502, can be or will be plugged 501 onto a winding sleeve coupling 112a, 112b, 112c, 112d. It can be attached along the axis of rotation 101a. The winding sleeve 502 can have an inner diameter 502w which is equal to or larger than an outer diameter 112r of the winding sleeve coupling 112a, 112b, 112c, 112d.

5B 10 illustrates a transport arrangement according to various embodiments in a schematic detailed view 500b (viewing direction transverse to the axis of rotation 101a).

According to various embodiments, one or each winding sleeve coupling 112a, 112b, 112c, 112d can have a clamping device 504 for clamping the respective winding sleeve. The clamping device 504 can have or be formed from at least one mandrel (e.g. a sleeve mandrel and/or a segmented mandrel) and/or at least one expanding mandrel. The outer diameter 112r or outer circumference of the winding sleeve coupling 112a, 112b, 112c, 112d can be adjustable by means of the clamping device 504.

For example, in a tensioned state, the tensioning device 504 can press against an attached winding sleeve 502 (also referred to as clamping the winding sleeve 502).

The clamping device 504 can be set up to transmit a rotational movement and/or torque to or from a clamped winding sleeve 502 . Clamping by means of the clamping device 504 (by actuating it) can optionally be carried out manually (manually operated clamping device 504), e.g. via a clamping nut or clamping screw. Alternatively, clamping by means of the clamping device 504 (mechanical clamping device 504) can be carried out mechanically (e.g. automated), e.g. hydraulically or pneumatically, e.g. by means of a clamping cylinder. Optionally, the clamping device 504 can be centered via a cylindrical or conical mount.

The winding sleeve coupling 112a, 112b, 112c, 112d can have a rotatably mounted shaft 112w (e.g. a machine spindle 112w), by means of which the clamping device 504 is mounted. The rotatably mounted shaft 112w can define the minimum outside diameter 112r of the winding sleeve coupling 112a, 112b, 112c, 112d. The adjustment range of the tensioning device 504 can define the maximum outer diameter 112r of the winding sleeve coupling 112a, 112b, 112c, 112d.

According to various embodiments, the outer diameter 112r of the winding sleeve coupling 112a, 112b, 112c, 112d can be in a range from about 30 mm to about 150 mm, for example about 100 mm. For example, the clamping range of the winding sleeve coupling 112a, 112b, 112c, 112d can be in a range from approximately 30 mm to approximately 150 mm.

5C 10 illustrates a transport arrangement according to various embodiments in a schematic detailed view 500c (viewing direction transverse to the axis of rotation 101a).

According to various embodiments, the transport arrangement can have a plurality of drives 506 (also referred to as winding drives 506), of which each drive is coupled to exactly one winding sleeve clutch of the plurality of winding sleeve clutches 112a, 112b, 112c, 112d. The or each drive of the plurality of drives 506 can be set up to generate a rotational movement and/or a torque, which is transmitted to the respective winding sleeve coupling of the plurality of winding sleeve couplings 112a, 112b, 112c, 112d. The or each drive of the plurality of drives 506 may include or be formed from an electric drive 506 .

Each pair of drive 506 and winding tube clutch 112a coupled to it can form a winder 506, 112a (illustratively a driven winding tube clutch 506, 112a) or at least be part of it.

• eine elektrische Leistungsaufnahme, eine elektrische Stromaufnahme, eine angelegte elektrische Spannung und/oder deren Frequenz.

The or each drive of the plurality of drives 506 can be controlled or regulated by means of a controller 508, for example by means of a control signal generated by the controller 508. The control signal can represent, for example, a rotational behavior of the or each drive of the plurality of drives 506, eg a direction of rotation, a speed and/or a torque generated. The control signal can have or define, for example, one of the following electrical characteristics of the or each drive of the plurality of drives 506:

• an electrical power consumption, an electrical current consumption, an applied electrical voltage and/or its frequency.

Each drive of the plurality of drives 506 can be set up essentially in the same way. This can be understood to mean that each drive of the plurality of drives 506 has the same rotational behavior when controlled in the same way. For example, each drive of the plurality of drives 506 can rotate synchronously when controlled in the same way, ie in the same direction of rotation at the same speed and/or with a change in movement taking place at the same time. Alternatively or in addition each drive of the plurality of drives 506 can generate the same torque (eg with the same sense of direction) when controlled in the same way. The control of the same type can be understood, for example, as the same control signal being coupled into the or each drive of the plurality of drives 506 . This makes it easier to control the multiple drives 506 .

Alternatively or additionally, a controller 508, by means of which the multiple drives 506 are controlled, can have a control circuit which is set up to detect a deviation in the rotational behavior of the or each drive of the multiple drives 506 from a specification and/or from one another. Furthermore, the controller 508 can be set up to control the or each drive of the plurality of drives 506 based on the deviation, e.g. such that the deviation is reduced and/or that each drive of the plurality of drives 506 has the same rotational behavior. It can thus be achieved that tolerance-related or structural differences in the drives 506 and/or the mounting of the winding tube couplings 112a, 112b, 112c, 112d can be compensated for. Alternatively, different drives 506 can be operated, which makes it easier to replace a drive 506 later, for example if its model has been discontinued. This increases the maintenance compatibility of the transport arrangement.

The or each drive of the plurality of drives 506 can optionally be set up for bidirectional operation, e.g. by inverting the control signal. Greater flexibility can thus be achieved.

Optionally, the controller 508 may be configured to drive each drive of the plurality of drives 506 according to a wraparound configuration. The wrap-around configuration may include a wind-up configuration and/or an unwind configuration.

The winding configuration can have at least one parameter which is used to drive that winding sleeve clutch 112a, 112b, 112c, 112d (or the drive 506 coupled to it) by means of which the substrate 102 is wound up. Optionally, the winding configuration can have at least one additional parameter, which is used to drive that winding tube clutch 112a, 112b, 112c, 112d (or the drive 506 coupled to it) by means of which the second intermediate layer is unwound.

The unwinding configuration can have at least one parameter which is used to drive that winding tube clutch 112a, 112b, 112c, 112d (or the drive 506 coupled to it) by means of which the substrate 102 is unwound. Optionally, the unwinding configuration can have at least one additional parameter which is used to drive that winding sleeve clutch 112a, 112b, 112c, 112d (or the drive 506 coupled to it) by means of which the first intermediate layer is wound up.

The at least one parameter can represent the rotational behavior of the corresponding winding sleeve coupling 112a when the substrate 102 is being unwound or wound up, e.g. the torque, the rotational speed, the direction of rotation and/or their time dependence. The at least one additional parameter can represent the rotational behavior of the corresponding winding sleeve coupling 112a when the intermediate layer is being unwound or wound up, e.g. the torque, the rotational speed, the direction of rotation and/or their time dependence. According to the at least one parameter and/or the at least one additional parameter, the controller 508 can provide the control signal, for example the electrical power coupled into the or each drive of the plurality of drives 506.

According to various embodiments, the controller 508 can be set up to control each drive of the plurality of drives 506 selectively according to the winding configuration or according to the unwinding configuration. For example, the controller 508 can assign a first driven winding tube clutch 506, 112a to the winding configuration and control it according to the winding configuration. Alternatively or additionally, the controller 508 can assign a second driven winding tube clutch 506, 112b to the unwinding configuration and control it according to the unwinding configuration. Optionally, the controller 508 may be configured to swap the unwind configuration assignment and the wind configuration assignment.

According to various embodiments, the controller 508 can be set up to adapt a rotational behavior (e.g. a speed) of one or each winding sleeve clutch 112a, 112b, 112c, 112d to a variable which represents a transport characteristic of the substrate 102. The transport characteristic can have a transport progress and/or a mechanical tensile stress caused thereby in the substrate 102, e.g. its time dependence. The transport progress can have a transport speed and/or a transport route that has already been covered.

For example, when the substrate 102 is unwound, the diameter of the substrate winding 102w can decrease, which is caused by a faster Rotating the corresponding winding sleeve clutch 112a, 112b, 112c, 112d can be compensated. Alternatively or additionally, a mechanical tensile stress can be generated and/or maintained in the substrate 102 in order to prevent the substrate 102 from sagging or buckling. Alternatively or additionally, a mechanical tensile stress can be generated and/or maintained in the substrate 102, which is smaller than a predetermined threshold value, which clearly represents the mechanical load at which there is a risk of substrate breakage.

6A FIG. 6 illustrates a transport arrangement 600a according to various embodiments in a schematic side view or cross-sectional view (eg looking along the axis of rotation direction 101 of the transport arrangement 600a).

According to various embodiments, the transport area 111b can have at least one processing section 601, in which the transport path 111 (i.e. its section 111k) has a constant curvature, e.g. along a length of more than a quarter of the circumference, e.g. more than half the circumference, of at least a guide roller 122 by means of which the transport path 111 is curved. The substrate 102 can rest on a processing roller 122p along the constant curved section 111k (transport path section 111k). The processing roller 122p may be an active (e.g., driven and/or tempered) guide roller 122.

According to various embodiments, the processing roller 122p may have a diameter in a range from about 0.5 m (meter) to about 1 m, e.g., in a range from about 0.7 m (meter) to about 0.8 m.

6B FIG. 6 illustrates a transport arrangement 600b according to various embodiments in a schematic side view or cross-sectional view (eg looking along the axis of rotation direction 101 of the transport arrangement 600b).

According to various embodiments, the transport area 111b can have at least one processing section 601, in which the transport path 111 (i.e. its section 111g) runs in a straight line along a length of more than half the circumference of the at least one guide roller 122. For example, the at least one guide roller 122 can have two have passive guide rollers 122 between which the transport path 111 (i.e. its section 111g) runs in a straight line. The substrate 102 can be transported in a non-contact manner (e.g. freely suspended) along the rectilinear section 111g (transport path section 111g).

Each of the two passive guide rollers 122 may have a diameter in a range from about 50 mm to about 0.3 m, for example in a range from about 80 mm to about 0.2 m.

7A FIG. 7 illustrates a transport arrangement 700a according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction transverse to the direction of the axis of rotation 101 of the transport arrangement 700a).

According to various embodiments, the transport arrangement 700a can have a guide roller carrier 702 which provides a first mounting position 701a and a second mounting position 701b for the at least one guide roller 122 . The at least one guide roller 122 can be selectively mountable in the first mounting position 701a and the second mounting position 701b, as will be described in more detail below.

According to various embodiments, a method for reconfiguring the transport arrangement 700a can include bringing the at least one guide roller 122 into the first mounting position 701a or into the second mounting position 701b 701 (e.g. remounting 701), as will be described in more detail below.

7B FIG. 7 illustrates a transport arrangement 700b according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction transverse to the direction of the axis of rotation 101 of the transport arrangement 700b).

The guide roller carrier 702 can have exactly one mounting position W1, W2, W3, W4 (also referred to as the winding sleeve coupling mounting position W1, W2, W3, W4) for each winding sleeve coupling of the plurality of rotatably mounted winding sleeve couplings 112a, 112b, 112c, 112d, which assigned. The guide roller carrier 702 can be set up in such a way that the several rotatably mounted winding tube couplings 112a, 112b, 112c, 112d can be installed interchangeably, ie their assignment to the winding tube coupling installation positions W1, W2, W3, W4 can be interchanged. The or each drive of the plurality of drives 506 can be coupled by means of a shaft 112w to the respective core coupling of the plurality of core couplings 112a, 112b, 112c, 112d. A through-opening 702o can be provided at each winding sleeve coupling assembly position W1, W2, W3, W4 be arranged, through which one shaft 112w of the plurality of shafts 112w extends.

8A and 8B each illustrate a vacuum arrangement 800a, 800b according to various embodiments in a schematic side view or cross-sectional view (looking along the axis of rotation 101a).

According to various embodiments, the processing (e.g. coating) of the substrate 102 can take place in a vacuum, e.g. in a vacuum arrangement 800a, 800b.

According to various embodiments, the vacuum arrangement 800a, 800b can have a vacuum chamber housing 802 in which a vacuum can be generated and/or maintained. For this purpose, the vacuum chamber housing 802 can be designed to be airtight, dust-tight and/or vacuum-tight, for example. The vacuum chamber housing 802 may include one or more vacuum chambers. The or each vacuum chamber may provide one or more vacuum regions 306b, 308b. The plurality of vacuum chambers and/or the plurality of vacuum areas 306b, 308b of the vacuum chamber housing 802 can optionally be at least partially gas-separated from one another.

Furthermore, the vacuum chamber housing 802 can be coupled to a pump system 804 (comprising at least one rough vacuum pump and optionally at least one high vacuum pump). The pump system 804 can be set up to extract a gas (e.g. the process gas) from the vacuum chamber housing 802 so that a vacuum (ie a pressure of less than 0.3 bar) and/or a pressure in a range of approximately 1 mbar to about 10 ^-3 mbar (in other words fine vacuum) and/or a pressure in a range from about 10 ^-3 mbar to about 10 ^-7 mbar (in other words high vacuum) or a pressure of less than high vacuum, eg less than about 10 ^-7 mbar (in other words ultra-high vacuum) can be or can be provided.

According to various embodiments, the vacuum arrangement 800a, 800b can have a gas supply line 1716. A process gas can be supplied to the vacuum chamber housing 802 by means of the gas supply line 1716 in order to form a process atmosphere in the vacuum chamber housing 802. The process gas can, for example, include an inert gas or be formed from it. Alternatively or additionally, the process gas can include or be formed from a reactive gas, e.g. oxygen, nitrogen, hydrogen, argon and/or carbon. The process pressure can form from an equilibrium of process gas, which is supplied by means of the gas supply 1716 and withdrawn by means of the pump system 804 .

Furthermore, the vacuum chamber housing 802 can be set up in such a way that the vacuum conditions (the process conditions) within the vacuum chamber housing 802 (e.g. process pressure, process temperature, chemical process gas composition, etc.) can be set or regulated (e.g. locally), e.g. by means of a controller 508. For example a plurality of vacuum regions 306b, 308b with vacuum conditions different from one another are or will be provided by means of the vacuum chamber housing 802. For example, the controller 508 can be set up to control and/or regulate the gas supply 1716 and/or the pump system 804, so that a process pressure and/or a process gas composition can be controlled and/or regulated. For example, the controller 508 can be set up to control and/or regulate a standard volume flow of process gas, which is supplied by means of the gas supply 1716 and/or withdrawn by means of the pump system 804.

According to various embodiments, the controller 508 can be set up to control and/or regulate an optional substrate temperature control device 1124 (e.g. having a heating device and/or a cooling device), so that a process temperature (e.g. of the substrate 102 and/or the process gas), for example during processing (e.g. during coating) can be controlled and/or regulated. For example, the controller 508 can be set up to control and/or regulate a thermal power which is supplied by means of the substrate temperature control device 1124 and/or withdrawn by means of this.

The vacuum arrangement 800a, 800b can optionally have a supply device for supplying the temperature control device 1124, e.g. for supplying it with a temperature-controlled fluid or with electrical energy. For example, the supply device can be arranged outside of the processing chamber 802 . For example, a heating or a cooling medium can be supplied to and removed from the temperature control device 1124 (e.g. the processing roller 122p).

At least one vacuum area 306b, for example a first vacuum area 306b, can be arranged in the vacuum chamber housing 802 (eg in a first vacuum chamber). Furthermore, a first processing source 306, for example a coating material source 306, can be arranged in the vacuum chamber housing 802 (eg in the first vacuum chamber). The coating material source 306 may be configured to emit a gaseous coating material into the first vacuum region 306b. The substrate 102 can be or will be coated with the coating material. In other words, the coating of the substrate 102 can take place in a vacuum. The first vacuum region 306b may be a coating region 306b.

At least one second vacuum region 308b can be arranged in the vacuum chamber housing 802 (e.g. in a second vacuum chamber or in the first vacuum chamber). Furthermore, a second processing source 308, e.g. an exposure device 308, can be arranged in the vacuum chamber housing 802 (e.g. in the second vacuum chamber). The second processing source 308 may be configured to process the coating material with which the substrate 102 is or will be coated, e.g., by means of light. For example, the processing source 308 can be set up for structuring or chemically converting the coating material with which the substrate 102 is or will be coated. The second vacuum area 308b can be a processing area 308b.

According to various embodiments, the vacuum chamber housing 802 may have a chamber opening to expose the interior of the vacuum chamber housing 802 . The chamber opening may expose the interior of the vacuum chamber housing 802 in the rotation axis direction 101, for example. To close the chamber opening, the vacuum chamber housing 802 can have a chamber cover.

For example, the second processing source 308 may include at least one exposure device, such as a light source (e.g., a laser, lamp, flashlamp, or x-ray source), a thermal radiation source, or a particle source (e.g., an electron source or a proton source or an ion source).

The second processing source 308 can be a pulsed or a continuously operated second processing source 308 . For example, a (e.g. pulsed or continuous) radiation 402 (e.g. electromagnetic radiation such as light, thermal radiation and/or particle radiation such as electron beams and/or ion beams) can be generated by means of the second processing source 308, for example a continuous electron beam 402 by means of an electron beam gun (e.g. using a linear source) or a pulsed light flash using a flash lamp (e.g. a gas discharge lamp or a light-emitting diode).

The second processing source 308 may include or be formed from one or more flashbulbs, for example. The or each flashlamp may comprise a gas discharge lamp which may be pulsed, e.g., by controller 508. For pulsed operation of the or each gas discharge lamp, a current pulse may be discharged through the gas discharge lamp.

According to various embodiments, the controller 508 can be set up to control and/or regulate the first processing source 306 and/or the second processing source 308, e.g. by controlling and/or regulating an amount of material and/or thermal energy (e.g. radiant energy) per time is emitted in direction 105 of substrate 102 .

Furthermore, the vacuum arrangement 800a, 800b can have a winding sleeve coupling 112a, 112b for unwinding a substrate 102 (also referred to as an unwind roller), so that the substrate 102 is brought into the at least one vacuum region 306b, 308b. Furthermore, the vacuum arrangement 800a, 800b can have a winding sleeve clutch 112c, 112d for winding up the substrate 102 (also referred to as winding roller 112c, 112d) which is brought out of the at least one vacuum region 306b, 308b. In other words, the substrate 102 can be processed from roll to roll.

Furthermore, the vacuum arrangement 800a, 800b can have a plurality of guide rollers 122, which define a transport path 111, along which the substrate 102 (e.g. a strip-shaped substrate) between the unwinding roller 112a, 112b and the winding roller 112c, 112d through the at least one vacuum region 306b, 308b is transported, e.g. in a transport direction 111w (which may be perpendicular to the rotation axis direction 101).

The vacuum arrangement 800a can have at least two guide rollers 122, between which a rectilinear section 111g of the transport path 111 is spanned. The rectilinear section 111g of the transport path 111 can be arranged in the at least one vacuum region 306b, 308b in which the substrate 102 is processed. The at least one vacuum region 306b, 308b can be or will be arranged within the processing section 601.

The vacuum arrangement 800b can have exactly one guide roller 122p, which has the tempering device 1124, ie which is set up as a processing roller 122p, by means of which the substrate 102 is tempered, eg heated and/or cooled, can be. The constantly curved section 111k of the transport path 111 (also referred to as transport path section 111k) can be provided by means of the processing roller 122p. The constantly curved transport path section 111k can be arranged in the at least one vacuum region 306b, 308b in which the substrate 102 is processed. The at least one vacuum region 306b, 308b can be or will be arranged within the processing section 601.

Further, the vacuum assembly 800a, 800b may include a drive system 518 coupled 518k to at least a portion of the plurality of rollers 112a, 112b, 112c, 112d, 122, e.g., to at least a portion of the plurality of guide rollers 122 and to each core clutch of the plurality of core clutches 112a, 112b, 112c, 112d. The drive system 518 may include the multiple drives 506 . For example, the drive system 518 may be coupled to that portion of the plurality of rollers 112a, 112b, 112c, 112d, 122 that is driven by means of shafts, 518k, chains 518k, belts 518k, or gears 518k. The drive system 518 and the part of the plurality of rollers 112a, 112b, 112c, 112d, 122 can be part of a positioning device which is set up for positioning the substrate 102.

The controller 508 can be set up to control 518k and/or regulate 518k the drive system 518, e.g. to control 518k and/or regulate 518k a transport characteristic, e.g. a transport speed, a mechanical tensile stress on the substrate 102, and/or a position of the substrate 102 The controlling 518k and/or regulating 518k of the drive system 518 can take place during the processing of the substrate 102, e.g. during the coating and/or irradiation, e.g a transport characteristic.

According to various embodiments, the vacuum arrangement 800a, 800b can optionally have at least one substrate pretreatment device 310 (i.e. one or more substrate pretreatment devices 310) for pretreating the substrate 102, e.g. for chemically activating the substrate 102. For example, the at least one substrate pretreatment device 310 be set up to chemically activate the substrate 102, e.g. to chemically activate its surface, to clean the substrate 102 and/or to etch the substrate 102. For example, the at least one substrate pretreatment device 310 can have or be formed from an etching device for etching the substrate 102. Alternatively or additionally, the at least one substrate pretreatment device 310 can have at least one sputter etching source, at least one plasma source, at least one glow device and/or at least one etching gas source have or be formed therefrom. For example, pretreating the substrate 102 may include sputter etching the substrate 102; ion etching and/or smoldering.

A water film can optionally be removed from the substrate 102 by means of the at least one substrate pretreatment device 310 . Alternatively or additionally, a number of open chemical bonds of the substrate 102 (also referred to as chemical activation) can be increased by means of the substrate pretreatment device 310, which, for example, can improve the adhesion and the formation of the coating on the substrate 102.

Alternatively or additionally, a substrate post-treatment device 310 may be used to post-treat the substrate 102 coated with the coating material, e.g., similar to the pre-treating. For example, the substrate 102 having the coating with the coating material may be selectively heated (e.g., annealed) and/or etched.

9A and 9B each illustrate a vacuum arrangement 900a, 900b according to various embodiments in a schematic side view or cross-sectional view (viewing direction transverse to the axis of rotation 101a).

According to various embodiments, the vacuum chamber 802 may include a chamber wall 902 spaced from the guide roller support 702 .

Alternatively or additionally, the vacuum chamber 802 can have a chamber wall 902 with a plurality of rotary feedthroughs 902o, of which each rotary feedthrough 902o is coupled to precisely one winding sleeve coupling of the plurality of winding sleeve couplings 112a, 112b, 112c, 112d. A rotary movement and/or a torque can be transmitted to the multiple winding tube couplings 112a, 112b, 112c, 112d by means of the or each rotary feedthrough 902o. The rotational movement and/or the torque can be generated outside of the vacuum chamber 802, e.g. by means of the plurality of drives 506.

According to various embodiments, the chamber wall 902 can have a smaller thickness (expansion along the direction of the axis of rotation 101) than the guide roller carrier 702 or its carrier plate 702p. For example, the guide roller carrier 702 (e.g. its carrier plate 702) have a thickness in a range from about 40 mm to about 50 mm. Alternatively or additionally, chamber wall 902 may have a thickness in a range from about 20 mm to about 40 mm. Optionally, the chamber wall 902 can have additional stiffening ribs.

10 FIG. 10 illustrates a method 1000 for operating a transport arrangement according to various embodiments in a schematic flow chart.

The method 1000 may include in 1001: processing a substrate in a first wrap-around configuration in which the substrate is wrapped between two mandrels supported by the first mandrel clutch and the second mandrel clutch.

The method 1000 may further include in 1003: processing a substrate in a second wrap-around configuration in which the substrate is wrapped between two mandrels supported by the third mandrel clutch and the first mandrel clutch.

The processing in 1001 can include at least one of the following processing types: coating the substrate, etching the substrate, and/or irradiating the substrate. The processing in 1003 can include at least one of the following processing types: coating the substrate, etching the substrate and/or irradiating the substrate.

The method 1000 may optionally include in 1005: reconfiguring the transport assembly between the first wrap configuration and the second wrap configuration.

The reconfiguration of the transport arrangement can optionally include bringing a guide roller from a first mounting position into a second mounting position or vice versa.

The processing in 1001 and the processing in 1003 can optionally differ from one another, e.g. in at least one type of processing. The reconfiguration can then optionally include: replacing and/or reconfiguring a processing source.

The method 1000 may optionally include in 1007: processing a substrate in a third wrap-around configuration in which the substrate is wrapped between two mandrels supported by the third mandrel clutch and the second mandrel clutch. The method 1000 may optionally include in 1007: reconfiguring the transport assembly between the first wrap configuration and the third wrap configuration. The reconfiguration of the transport arrangement can optionally include in 1007 bringing a guide roller from the first assembly position into a third assembly position or vice versa.

The method 1000 may optionally include in 1009: processing a substrate in a fourth wrap-around configuration in which the substrate is wrapped between two mandrels supported by the fourth mandrel clutch and the first mandrel clutch. The method 1000 may optionally include in 1009: reconfiguring the transport assembly between the first wraparound configuration and the fourth wraparound configuration. The reconfiguration of the transport arrangement can optionally include in 1009 bringing a guide roller from the first mounting position to a fourth mounting position or vice versa.

The processing in 1007 can include at least one of the following processing types: coating the substrate, etching the substrate, and/or irradiating the substrate. The processing in 1009 can include at least one of the following processing types: coating the substrate, etching the substrate and/or irradiating the substrate.

The processing in 1007 and the processing in 1009 can optionally differ from each other or from the processing in 1001, e.g. in at least one type of processing. The reconfiguration can then optionally include: replacing and/or reconfiguring a processing source.

Reconfiguring may include placing the transport assembly in the first wrap configuration, in the second wrap configuration, in the third wrap configuration, or in the fourth wrap configuration.

11A FIG. 11 illustrates a transport arrangement 1100a according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction transverse to the direction of the axis of rotation 101 of the transport arrangement 1100a) and 11B the transport arrangement 1100a in a schematic side view 1100b or cross-sectional view 1100b running transversely thereto (eg with a viewing direction along the direction of the axis of rotation 101 of the transport arrangement 1100a).

The transport arrangement 1100a can have the transport area 111b and a plurality of rotatably mounted winding tube couplings 112a, 112b, 112c, 112d for coupling one substrate winding sleeve each (eg two substrate winding sleeves).

Furthermore, the transport arrangement 1100a can have at least one rotatably mounted guide roller 122, which is arranged in the transport area 111b. Depending on the position, the at least one guide roller 122 can define a curved transport path 111 along which a flexible substrate 102 can be guided. The transport path 111 may pass between the plurality of core clutches 112a, 112b, 112c, 112d, i.e. from one to the other (roll-to-roll configuration).

Furthermore, the transport arrangement 1100a can have a guide roller carrier 702 . The guide roller carrier 702 can have several attachment structures 712a, 712b, 722a, 722b, which are arranged within the transport area 111b, e.g. at least four, five, six, seven, eight, nine, ten attachment structures 712a, 712b, 722a, 722b or more than ten attachment structures 712a, 712b, 722a, 722b, e.g., twenty, e.g., thirty attachment structures 712a, 712b, 722a, 722b, or more attachment structures 712a, 712b, 722a, 722b. The plurality of attachment structures 712a, 712b, 722a, 722b may be arranged in a predefined regular pattern. Furthermore, each fastening structure of the plurality of fastening structures 712a, 712b, 722a, 722b can define a mounting position 701a, 701b. For example, the guide roller carrier 702 can provide at least a first mounting position 701a, a second mounting position 701b, a third mounting position and a fourth mounting position.

Furthermore, the transport arrangement 1100a can have at least one bearing arrangement 1221, by means of which the at least one guide roller 122 is mounted. The bearing arrangement 122w can have, for example, a rotatably mounted shaft, by means of which the guide roller 122 is or can be supported. Alternatively or additionally, the bearing assembly 122w may include one or more roller bearings rotatably supporting the guide roller 122, at least by means of the shaft.

Bearing assembly 122w may include a mounting base 1102 configured to complement (e.g., oppose and/or mate with) each of the plurality of mounting structures 712a, 712b, 722a, 722b. In other words, the mounting base 1102 can be mounted on any of the plurality of mounting structures 712a, 712b, 722a, 722b. In this way it can be achieved that the bearing arrangement 122w can optionally be fastened in each of the mounting positions 701a, 701b (e.g. hooked in, plugged in, screwed, clamped, etc.).

For example, each fastening structure of the plurality of fastening structures 712a, 712b, 722a, 722b can have at least one form-fitting element (e.g. a bore), i.e. one form-fitting element or several form-fitting elements. The mounting base can have at least one complementary interlocking element, i.e. one complementary interlocking element or several complementary interlocking elements. The at least one form-fitting element and the at least one complementary form-fitting element can form a form-fitting pair, which is set up for form-fitting connection to one another. For example, multiple interlocking elements may be arranged in the same pattern (e.g., same bore pattern) as the multiple complementary interlocking elements. Alternatively or additionally, the at least one form-fitting element can have the same contour and/or the same profile as the at least one complementary form-fitting element. A form-fitting pair can, for example, have at least one of the following complements: a recess and a projection (i.e. recess and complementary projection), a through hole and a pin, an internal thread and an external thread, a threaded hole and a screw, a threaded hole and a spindle, a nut and a screw, a nut and a spindle, a tongue and a groove.

According to various embodiments, the mounting base 1102 may include or be formed from a flange. Alternatively or additionally, the mounting base 1102 can have four positive-locking elements or more, e.g. four through openings or more.

According to various embodiments, in order to reconfigure the transport arrangement, first the mounting base 1102 can be mounted in the mounting position on the guide roller carrier 702 by means of the respective fastening structure 712a. The guide roller can then be placed on the bearing arrangement 1221, e.g. on its shaft.

According to various embodiments, each core coupling of the plurality of core couplings 112a, 112b, 112c, 112d (also referred to as core pivot bearings) may be configured to rotatably support a core, e.g., a substrate core and/or an interlayer core.

12A FIG. 12 illustrates a transport arrangement 1200a according to various embodiments in a schematic side view or Cross-sectional view (for example with a viewing direction transverse to the direction of the axis of rotation 101 of the transport arrangement 1200a).

According to various embodiments, the transport arrangement can furthermore have: a drive system 518, which is set up for driving the plurality of winding sleeve clutches 112a, 112b, 112c, 112d. The drive system 518 can have a plurality of drives 506, of which each drive 506 is coupled to exactly one winding sleeve clutch of the plurality of winding sleeve clutches 112a, 112b, 112c, 112d.

12B FIG. 12 illustrates a transport arrangement 1200b according to various embodiments in a schematic side view or cross-sectional view (eg looking along the axis of rotation direction 101 of the transport arrangement 1200b).

According to various embodiments, the transport arrangement can have at least some of the plurality of fastening structures 712a, 712b, 722a, 722b arranged in the processing section, e.g. at least a first group 1402a of fastening structures 712a, 712b, 722a, 722b and/or a second group 1402b of fastening structures 712a, 712b , 722a, 722b.

13A FIG. 13 illustrates a transport arrangement 1300a according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction transverse to the direction of the axis of rotation 101 of the transport arrangement 1300a).

According to various embodiments, the guide roller carrier 702 can have at least one rotary feedthrough 902o, which is arranged between two fastening structures 712a, 712b of the plurality of fastening structures 712a, 712b, 722a, 722b. Thus, either a passive (e.g. a non-driven) guide roller 122 can be brought into at least one of the two mounting positions 701a, 701b or an active (e.g. a driven) guide roller 122 (e.g. a processing roller 122p), which can be supplied by means of the rotary feedthrough 902o e.g. by means of drive energy or with a medium.

13B FIG. 13 illustrates a transport arrangement 1300b according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction transverse to the direction of the axis of rotation 101 of the transport arrangement 1300b).

According to various embodiments, the transport arrangement 1300a can have a processing roller 122p which is arranged in the processing section 601 and has a temperature control device 1124 . The processing roller 122p can have a lateral surface 1302 over which the substrate 102 is guided around the processing roller 122p.

The temperature control device 1124 can have a heat source for supplying thermal energy to the lateral surface. Alternatively or additionally, the temperature control device 1124 can have a heat sink for extracting thermal energy from the lateral surface. A heat flow away from or towards substrate 102 can be adjusted by means of temperature control device 1124, e.g. controlled and/or regulated by means of controller 508.

According to various embodiments, it can also have a medium supply device 1312 which is coupled to the temperature control device 1124 . The medium supply device 1312 can be set up to supply the temperature control device 1124 with, for example, a fluid such as a cooling fluid and/or a heating fluid.

14A and 14B each illustrate a transport arrangement 1400a, 1400b according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction along the axis of rotation direction 101 of the transport arrangement 1400a).

According to various embodiments, the transport area 111b may include at least one infeed section 1401z, which is arranged between the processing section 601 and the unwinding core clutch 112a (i.e., the core clutch 112a in unwinding configuration). Furthermore, the transport area 111b may have at least one discharge section 1401a, which is arranged between the processing section 601 and the winding core clutch 112b (i.e. the core clutch 112a in winding configuration). The transport path 111 can pass through the discharge section 1401a and the supply section 1401z.

According to various embodiments, the multiple attachment structures 722a, 722b, 712a, 712b can be arranged in multiple groups 1402a, 1402b, of which a first group 1402a is arranged in the feed section 1401z and a second group 1402b is arranged in the discharge section 1401a. The first group 1402a and/or the second group 1402b can have more than three attachment structures 712a, 712b, 722a, 722b, eg at least four, five, six, seven, eight, nine, ten attachments structures 712a, 712b, 722a, 722b or more than ten attachment structures 712a, 712b, 722a, 722b, eg twenty, eg thirty attachment structures 712a, 712b, 722a, 722b or more attachment structures 712a, 712b, 722a, 722b.

Optionally, the attachment structures 722a, 722b, 712a, 712b of the first group 1402a and the attachment structures 722a, 722b, 712a, 712b of the second group 1402b can be arranged mirror-symmetrically with respect to a mirror plane 1411. In this way, symmetrically arranged mounting positions 701a, 701b can be provided, so that tape running with high precision is facilitated. The mirror plane 1411 can be parallel to the axis of rotation 101a.

15A , 15B and 15C each illustrate a spatial arrangement 1500a, 1500b, 1500c of attachment structures according to various embodiments and 16A , 16B and 16C each illustrate a spatial arrangement 1600a, 1600b, 1600c of fastening structures according to various embodiments, each in a schematic side view or cross-sectional view (eg with a viewing direction along the axis of rotation direction 101 of the transport arrangement).

According to various embodiments, each attachment structure of the plurality of attachment structures 712a, 712b can have a plurality of form-fitting elements 1502, 1502g. The multiple form-fitting elements 1502, 1502g of each fastening structure of the multiple fastening structures 712a, 712b can be or will be arranged according to a geometric figure, e.g. on its contour and/or corner points, e.g. a triangle, a rectangle (e.g. a square), a hexagon, etc.

According to various embodiments, at least two fastening structures of the plurality of fastening structures 712a, 712b can have at least one common positive-locking element 1502g. A smaller grid of the assembly positions 701a, 701b (i.e. a smaller distance from one another) can thus be achieved.

One or each form-fitting element 1502, 1502g of the plurality of fastening structures 712a, 712b can have at least one of the following form-fitting elements 1502, 1502g: a depression, a projection, a through-opening, a pin, an internal thread, an external thread, a threaded hole, a screw, a spindle , a nut, a groove and/or a spring.

According to various embodiments, the guide roller carrier 702 can have a carrier plate 702p, which has at least one group 1402a, 1402b of the plurality of fastening structures.

For example, each positive-locking element 1502, 1502g of the group 1402a, 1402b can have a depression (e.g. a through-opening or a groove) in the carrier plate 702p. Alternatively, each form-fitting element 1502, 1502g of the group 1402a, 1402b can have a projection (e.g. a pin or a spring) on the carrier plate 702p. Each form-fitting element 1502, 1502g of the group 1402a, 1402b can optionally have a thread.

17A and 17B each illustrate a transport arrangement 1700a, 1700b according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction transverse to the direction of the axis of rotation 101 of the transport arrangement).

According to various embodiments, the guide roller support 702 may include a first support plate 702p and a second support plate 1702p (also referred to as an additional support plate 1702p), which face each other. The first support plate 1702p can have the plurality of attachment structures 712a, 712b. The second support plate 1702p may include a plurality of mating attachment structures 1712a, 1712b. Each fastening structure of the plurality of fastening structures 712a, 712b can be associated with exactly one counter-fastening structure of the plurality of counter-fastening structures 1712a, 1712b, which is opposite to it.

Each fastening structure of the plurality of fastening structures 712a, 712b can form a fastening structure pair 712a, 1712a with the counter-fastening structure of the plurality of counter-fastening structures 1712a, 1712b assigned thereto, between which the bearing arrangement 1221 can be mounted. For example, the bearing arrangement 1221 can have two mounting bases 1102, 1102', of which a first mounting base 1102 can be mounted with the multiple fastening structures 712a, 712b and a second mounting base 1102' can be mounted with the multiple counter-fastening structures 1712a, 1712b.

The multiple fastening structures 712a, 712b and the multiple counter-fastening structures 1712a, 1712b can be arranged mirror-symmetrically with respect to a mirror plane 1711, which is arranged between the first carrier plate 702p and the second carrier plate 1702p. The mirror plane 1711 can be perpendicular to the axis of rotation 101a of the guide roller 122 . For example, the multiple attachment structures 712a, 712b form a group and the plurality of counter-fastening structures 1712a, 1712b form an additional group, which are arranged mirror-symmetrically to one another.

Optionally, the processing roller 122p and/or each winding sleeve coupling of the plurality of winding sleeve couplings 112a, 112b, 112c, 112d can be mounted between the first carrier plate 702p and the second carrier plate 1702p, e.g. in a predefined assembly position W1, W2, W3, W4, CD (cf 24 ).

The first support plate 702p and the second support plate 1702p can be used to support the at least one guide roller 122, 112p and optionally the plurality of winding tube couplings 112a, 112b, 112c, 112d on both sides (also referred to as a two-sided configuration).

A roller (e.g. a guide roller 122, 112p and/or a winding core clutch 112a, 112b, 112c, 112d) which is mounted on exactly one side can also be referred to as a cantilever roller, i.e. it is or will be mounted in a cantilever configuration.

The or each roller may be mounted in cantilever configuration up to a length (extended along axis of rotation 101a) of 0.3 m. The or each roller can be mounted in a double-sided configuration from a length (extension along the axis of rotation 101a) of 0.3 m.

18A 1221 illustrates a bearing arrangement 1221 according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction transverse to the axis of rotation direction 101 of the transport arrangement).

According to various embodiments, the bearing arrangement 1221 can have an alignment device 1802 which is set up to adjust an alignment of a rotation axis 101a of the bearing arrangement 1221 . For example, alignment device 1802 may include a joint that couples guide roller 122 to mounting base 1102, e.g., slidably and/or rotatably. For example, the alignment device 1802 may include or be formed from at least one of the following joints: a sliding joint, a rotary joint, a screw joint, a rotary sliding joint, and/or a ball and socket joint. Optionally, the alignment device 1802 can have a fixing device, which is set up to fix the axis of rotation 101a in the adjusted alignment. The fixing device can have, for example, one or more adjusting screws or be formed from them.

18B 1800b illustrates a transport arrangement 1800b according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction transverse to the axis of rotation direction 101 of the transport arrangement).

Analogously to the bearing arrangement 1221, the processing roller 122p and/or one or each winding sleeve clutch of the plurality of winding sleeve clutches 112a, 112b, 112c, 112d can be mounted by means of an alignment device 1802.

19 19 illustrates a method 1900 for operating a transport arrangement according to various embodiments in a schematic flow chart.

The method 1900 may include, in 1901, redirecting a substrate by means of a guide roller in a first wraparound configuration in which the bearing assembly is placed in a first assembly position.

The method 1900 may further include in 1903: redirecting a substrate by means of a guide roller in a second wrap-around configuration in which the bearing assembly is placed in a second mounting position.

The method 1900 may optionally include, in 1905, reconfiguring the transport assembly between the first wraparound configuration and the second wraparound configuration.

The method 1900 can optionally include in 1907: processing the substrate before or after the turning. The processing of the first wrap-around configuration may include at least one of the following processing types: coating the substrate, etching the substrate, and/or irradiating the substrate. The processing of the second wrap-around configuration can include at least one of the following processing types: coating the substrate, etching the substrate, and/or irradiating the substrate.

The processing in the first wrapping configuration and the processing in the second wrapping configuration can optionally differ from one another, e.g. in at least one type of processing. The reconfiguration can then optionally include: exchanging a processing source

The substrate in the first wrap configuration and the substrate in the second wrap configuration may differ from one another, e.g., in a breaking strength, a chemical composition, a mechanical hardness, and/or a modulus of elasticity.

According to various embodiments, the deflection can take place in a transport area, for example in its discharge section and/or in its infeed section 1401z. The processing can take place in the transport area, for example in its processing section.

20 illustrates a transport arrangement 2000 according to various embodiments in a schematic perspective view and 21 12 illustrates a transport arrangement 2100 according to various embodiments in a schematic perspective view in which the second carrier plate 1702p is hidden or omitted.

According to various embodiments, the plurality of guide rollers 122 and the plurality of winding tube couplings 112a, 112b, 112c, 112d can be supported on both sides by means of the guide roller carrier 702.

The transport arrangement 2100 can enable a variable and compact design which is inexpensive and easy to maintain. Broader substrates 102 can be guided more easily by means of the support on both sides.

According to various embodiments, the multiple guide rollers 122 and optionally the multiple winding tube couplings 112a, 112b, 112c, 112d can be supported on both sides by means of the guide roller carrier 702.

If the second support plate 1702p (also referred to as front plate 1702p) is omitted, a one-sided support of the plurality of guide rollers 122 and optionally the plurality of winding sleeve clutches 112a, 112b, 112c, 112d may be or will be provided (i.e. a cantilever configuration). The cantilever configuration can be easier to adjust and align than the two-sided bearing.

The transport arrangement 2000, 2100 can be or will be arranged within a chamber housing 802. For example, the head pulley carrier 702 may be supported by the chamber housing 802 .

The transport arrangement 2000, 2100 can enable a variable and compact design which is inexpensive and easy to maintain.

22A and 22B each illustrate a processing arrangement 2200a, 2200b according to various embodiments in a schematic side view or cross-sectional view (eg with a viewing direction along the axis of rotation direction 101 of the processing arrangement).

According to various embodiments, the processing arrangement 2200a, 2200b can have a processing chamber 802, which has a plurality of sections 2202a, 2202b that are gas-separated from one another (also referred to as compartments). The sections 2202a, 2202b can be separated from one another by means of a surface element 106 (e.g. a partition). The processing chamber 802 can be provided by means of a vacuum chamber housing 802, for example. A vacuum region 306b, 308b may be or may be provided in the or each section 2202a, 2202b.

The processing arrangement 2200a, 2200b can also have at least one transport arrangement with at least one rotatably mounted guide roller 122, 122p. The guide roller 122, 122p can be mounted so as to be rotatable about an axis of rotation 101a. The guide roller 122, 122p can be set up to transport a substrate (not shown) in and/or through the processing chamber 802, e.g. along a transport path 111. The transport direction 111w can run along the transport path 111. The transport arrangement can optionally be set up for the bidirectional transport of the substrate 102 .

According to various embodiments, the plurality of sections 2202a, 2202b (also referred to as compartments) can adjoin a curved section of the transport path 111. The curved section 111k of the transport path 111 can, for example, run along a lateral surface of the guide roller 122, 122p.

According to various embodiments, the plurality of sections 2202a, 2202b may be or will be lane separated from one another. The processing of the substrate 102 can take place in a vacuum area 306b, 308b that is shielded from the outside and separated from gases, so that a disturbance of the processing, for example due to an interaction between different vacuum areas, is clearly as small as possible. Complex processes may require effective gas separation (gas separation). For example, a coating of substrates with layers of different compositions (e.g. different materials) can require different process conditions (e.g. metallic versus reactive/oxidic or different reactive gas compositions such as Ar/N ₂ versus Ar/O ₂ ) and, associated with this, an effective gas-technical separation of the process conditions from one another. which reduces mixing of the different process conditions (gas separation).

The surface element 2206 can provide a gap 2206s through which the transport path 111 leads through. For example, the gap can be formed between the surface element 2206 and the guide roller 122, 122p or its lateral surface 1302. Alternatively, the gap 2206s can be formed by means of a through opening in the surface element 2206. Clearly, the gap 2206s can be set up so large that a substrate 102 transported by means of the guide roller 122, 122p fits through the gap 2206s. The extent of the gap 2206s can be less than 10 cm, for example less than 5 cm, for example less than 1 cm.

The gas separation clearly describes a difference in the gas pressure or in the gas composition between vacuum areas 306b, 308b (e.g. gas-separated areas) that are connected to one another by vacuum technology, i.e. clearly a vacuum separation. The components (e.g. the parts of a gas separation structure) which contribute to the gas separation can be set up in such a way that the difference in gas pressure or in the gas composition between vacuum-technically connected vacuum regions 306b, 308b can be maintained (e.g. stable). In other words, a gas exchange between vacuum areas 306b, 308b that are connected to one another in terms of vacuum technology and are gas-separated from one another can be reduced, e.g. the greater the gas separation between the areas.

The processing arrangement 2200a, 2200b can also have a first processing source 306 (e.g. a first coating material source 306), which can be arranged in a first 2202a of the plurality of sections 2202a, 2202b. The first processing source 306 can have one or more magnetron cathodes, for example. Optionally, the processing arrangement 2200a, 2200b can have a second processing source 308 (e.g. a second coating material source 308) which can be arranged in a second 2202b of the plurality of sections 2202a, 2202b

According to various embodiments, a coating process can be carried out in the processing chamber 802 by means of a coating material source 306, 308 in such a way that a substrate transported by means of the transport arrangement can be coated with at least one coating material (e.g. at least two coating materials, e.g. at least three coating materials). For example, each coating material source 306, 308 may comprise a coating material that is vaporized to coat the substrate 102 and emitted toward the substrate (i.e., toward the transport path 111). The emitted coating material can deposit on the substrate 102 and form a layer. The coating material emitted towards the substrate 102 from each coating material source 306 , 308 may form a layer or a stack of layers on the substrate 102 . For example, as many different layers can be formed on substrate 102 as coating material sources 306, 308 are used.

According to various embodiments, the substrate 102 may include or be formed from a foil, e.g., a plastic foil, a glass foil (also referred to as flexible glass), and/or a metal foil. Alternatively or additionally, the substrate 102 may include or be formed from a fabric. The substrate 102 can be stretched over the guide roller 122, 122p.

Optionally, the substrate 102 can be transported by means of a conveyor belt. The conveyor belt can be stretched over the guide roller 122, 122p. The conveyor belt can, for example, have a fabric or be formed from it.

A constantly curved section 111k of the transport path 111 can be provided by means of the processing roller 122p, along which the substrate 102 is processed. A rectilinear section 111g of the transport path 111 (also referred to as transport path section 111g) can be or will be provided by means of mutually adjacent guide rollers 122; along which the substrate 102 is processed.

23 FIG. 23 illustrates a processing arrangement 2300 according to various embodiments in a schematic side view or cross-sectional view (eg viewed along the rotational axis direction 101 of the processing arrangement).

According to various embodiments, at least one substrate 102 can be processed (treated) by means of the processing arrangement 2300 (also referred to as a vacuum arrangement). In this case, the processing arrangement 2300 can be set up in such a way that the substrate can be coated, heated, cooled, etched, exposed, structured and/or treated in some other way, for example. The treatment (processing) of the at least one substrate 102 can take place, for example, in a vacuum (in a vacuum process chamber), at normal pressure (standard pressure or atmospheric pressure in an atmospheric pressure process chamber) or under overpressure (in an overpressure process chamber).

For processing a substrate 102 in the processing chamber 802 of the processing arrangement 2300 several processing sources 306, 308, 2306, 2308, 2310 can be arranged in the processing chamber 802 of the processing arrangement 2300. At least one processing source of the plurality of processing sources 306, 308, 2306, 2308, 2310 can be arranged in each section of the plurality of sections 2202a, 2202b, 2202c, 2202d, 2202e. The multiple sections 2202a, 2202b, 2202c, 2202d, 2202e may be or will be lane separated from one another.

A processing source 306, 308, 2306, 2308, 2310 can be, for example, a coating material source (a magnetron, a tube magnetron or a double tube magnetron, a planar magnetron or double planar magnetron), an exposure device (a light source, a laser, a flashlamp or a flashlamp assembly), a heat source (e.g. a heater), an etching device (e.g. an etching gas source or etching plasma source), a radiation source (e.g. an electron beam source or ion beam source), or the like.

For coating (evaporating) the at least one substrate 102, a coating material source can be used, for example, which is set up in such a way that a sputtering method (cathode atomization method) can be carried out using the coating material source. Sputtering processes can be carried out in various ways, e.g. direct current (DC) sputtering, medium frequency (MF) sputtering, radio frequency (HF) sputtering, each using one or more cathodes (targets), using a magnet system ( magnetron sputtering), using a reactive gas as reactive sputtering, as high-power pulse sputtering, and/or the like. Optionally, at least one of the following types of coating, for example, can be used to coat (evaporate) the at least one substrate 102: chemical vapor deposition, physical vapor deposition, thermal vaporization, and/or electron beam vaporization.

24 12 illustrates a guide roller carrier 702 according to various embodiments in a schematic side view or cross-sectional view (e.g. looking along the axis of rotation direction 101 of the transport arrangement 2400), e.g.

According to various embodiments, the multiple attachment structures or their form-fitting elements 1502 can be arranged in multiple groups 1402a, 1402b, 1402c, 1402d, which are arranged at a distance from one another.

According to various embodiments, the multiple fastening structures or their form-fitting elements 1502 can be arranged in multiple groups 1402a, 1402b, 1402c, 1402d, of which a first group 1402a can be arranged in the feed section 1401z, a second group 1402b can be arranged in the discharge section 1401a and two optional third groups 1402c, 1402d can be arranged in the processing section 601. The first group 1402a and the second group (e.g. their form-fitting elements 1502) can be arranged and set up mirror-symmetrically with respect to the mirror plane 1411. Alternatively or additionally, the two optional third groups 1402c, 1402d (e.g. their form-fitting elements 1502) can be arranged mirror-symmetrically with respect to the mirror plane 1411.

According to various embodiments, the guide roller carrier 702 can have a plurality of through-openings 1902o for accommodating rotary leadthroughs 902o or at least rotatably mounted shafts 112w. By means of the rotary feedthroughs 902o or at least rotatably mounted (and driven) shafts 112w, drive energy generated outside of a vacuum chamber can be or will be transmitted to each winding sleeve clutch of the plurality of winding sleeve clutches 112a, 112b, 112c, 112d.

The assembly positions W1, W2, W3, W4 of each winding sleeve coupling of the several winding sleeve couplings 112a, 112b, 112c, 112d can be or become predefined by means of the multiple through-openings 1902o. The through-openings 1902o can align with corresponding through-openings in the chamber housing, so that the rotary feedthrough 902o can be guided out of the chamber housing.

According to various embodiments, the guide roller carrier 702 can have an additional through opening 1922o for receiving an additional rotary union 902o or at least one additional rotatably mounted (and driven) shaft 112w. By means of the additional rotary feedthrough 902o or at least the additional shaft 112w, drive energy generated outside of a vacuum chamber can be or will be transmitted to the processing roller 122p. Optionally, the processing roller 122p can be supplied with a temperature control medium by means of the rotary feedthrough 902o. The mounting position CD of the processing roller 122p can be or will be predefined by means of the additional through-opening 1922o.

The passage openings 1902o, 1922o can, for example, have a greater extent (transverse to the direction of the axis of rotation 101) than the form-fitting elements 1502. Alternatively or additionally, through-openings 1902o, 1922o can have a greater distance from one another (transverse to the direction of the axis of rotation 101) than the form-fitting elements 1502, e.g. more than twice the distance of the form-fitting elements 1502 from one another, e.g. more than three times the distance between form-fitting elements 1502. Each group of the plurality of groups 1402a, 1402b, 1402c, 1402d can have more form-fitting elements 1502 than the guide roller carrier 702 has at through-openings 1902o, 1922o.

According to various embodiments, the distance between adjacent positive-locking elements 1502 (e.g. fastening bores 1502) can be in a range from approximately 10 mm to approximately 100 mm, e.g. approximately 50 mm. Optionally, the mounting holes 1502 can have a thread, e.g. M8 or M10. Alternatively or additionally, a distance between adjacent mounting positions 701a, 701b, 701c, 701d can be in a range of approximately 10 mm to approximately 100 mm.

The assembly positions 7xly (compare detailed view 2400) can be or will be referenced (illustrated by columns) with a first index “x” (x=1 to 4 illustrated) for example and/or with a second index “y” ( y=a to d illustrated as an example) along a second direction 105 (transverse to the first direction 103) be or will be referenced (illustratively line by line). A two-dimensional grid (x,y) can thus be set up, for example, according to which the assembly positions 7xly are arranged.

25 and 26 each illustrate a transport arrangement in different wrapping configurations 2500, 2600 according to different embodiments in a schematic side view or cross-sectional view (eg looking along the axis of rotation direction 101 of the transport arrangement).

The substrate 102 may be wrapped from the third winding sleeve clutch 112c to the fourth winding sleeve clutch 112d. An optional first intermediate layer 104 can be wound onto the first winding sleeve coupling 112a from that of the third winding sleeve coupling 112c (or from the substrate winding 102w mounted thereon). An optional second intermediate layer 104 can be wound from the second core clutch 112b (or from the intermediate layer coil 104w supported thereon) onto the fourth core clutch 112d.

A plurality of (e.g. two, three, four or more) guide rollers 122 can be installed in the feeding section 1401z, by means of which the transport path 111 can be or become curved a number of times. Alternatively or additionally, a plurality (e.g. two, three, four or more) guide rollers 122 can be set up in the discharge section 1401a, by means of which the transport path 111 can be or become curved several times.

In 2500, the transport arrangement can have a processing roller 122p, which is arranged in the processing section 601 and provides therein a transport path section 111k running in a constantly curved manner. The transport arrangement in 2600 can have at least two guide rollers 112, which are arranged in the processing section 601 and provide therein a plurality of rectilinear transport path sections 111g.

According to various embodiments, the guide rollers 122 (also referred to as rollers) can be fastened to a base plate 702p (illustratively a circuit board). In the case of one-sided mounting (cantilever configuration), exactly one board 702p can be used. An additional circuit board 1702p can be used for roller bearings on both sides. Using a predefined position grid of fastening bores 1502, it can be made possible to provide non-stationary guide rollers 122 (e.g. guide rollers, measuring rollers, spreader rollers, etc.) which can be arranged variably, e.g. in the predefined grid of assembly positions. According to various embodiments, the predefined position grid of fastening bores 1502 in the circuit board 702p (or the circuit boards 702p, 1702p) can make it possible to arrange (i.e. reconfigure) non-stationary guide rollers 122 in an alternative manner.

According to various embodiments, the distance between the fastening bores 1502 can be in a range from approximately 10 mm to approximately 100 mm, for example approximately 50 mm. Optionally, the mounting holes 1502 can have a thread, eg M10 or M8. The position grid can extend over a fixed area, which is fixed as a variable field after examining the format of the transport arrangement with regard to possible web runs. With one-sided storage (cantilever configuration), repositioning can be carried out relatively easily. The respective mounting bases 1102, which are screwed on on one side, can be re-attached to the desired position. In the case of storage on both sides, an opposing circuit board 1702p may be necessary. This can have an identical drilling pattern and by means of a centering element on the connecting traverses be or will be arranged in the same way. The hole patterns of the two circuit boards 1702p, 702p can thus be aligned with one another.

When repositioning the guide rollers 122, it may be necessary to check the angular position or possibly readjust it using the alignment device 1802 (e.g. by providing slots, adjusting screws X-Y at the bearing points). Cantilever guide rollers 122 (also referred to as cantilever rollers) can have an internal bearing or a console with an integrated bearing. Rollers with bearings on both sides can be or will be fastened with half shells in an inexpensive version, or more conveniently with folding bearings. Depending on the respective web running geometry, roll diameters (extension transverse to the axis of rotation 101a) in a range from approximately 80 mm (millimeters) to approximately 220 mm can be used. For example, if a larger roller diameter is necessary for a conversion (e.g. to flexible glass), these rollers can optionally be rearranged (reconfigured).

The possibility of a variable roller arrangement can be a prerequisite for a high degree of flexibility with regard to the implementation of new production technologies and processes.

• • in den Bahnlauf soll zumindest eine zusätzliche Führungsrolle 122 (z.B. eine Breitstreckwalze) hinzugefügt sein oder werden kann;
• • aufgrund technologischer Vorgaben, beispielsweise wenn eine Seite des Substrats 102 berührungsfrei prozessiert werden soll (auch als „No Fronttouch“ bezeichnet);
• • wechselndes Substrat 102 oder wechselnder Substrattyp, beispielsweise wenn ein Umrüsten der Transportanordnung von Folie auf flexibles Glas erfolgen soll;
• • Wegfall der Prozesswalze 122p, d.h. wenn eine Umstellung auf Freespann erfolgen soll.

For example, an adjustment of the web run may be necessary or takes place in at least the following scenarios:

• • at least one additional guide roller 122 (eg a spreader roller) should be or can be added to the web run;
• • due to technological requirements, for example if one side of the substrate 102 is to be processed without contact (also referred to as “no front touch”);
• • Changing substrate 102 or changing substrate type, for example if the transport arrangement is to be converted from film to flexible glass;
• • Elimination of the 122p process roller, ie if a switch to freespann is to take place.

The constantly curved transport path section 111k, which is provided by the processing roller 122p, can have an angle θ1 with respect to the axis of rotation 101a of the processing roller 122p, which is greater than 90°. In other words, a length of the constantly curved transport path section 111k can be larger than one half (50%) of the circumference of the processing roller 122p. For example, the length of the constantly curved transport path section 111k may be in a range from about 50% to about 90% of the circumference of the processing roller 122p, e.g., in a range from about 66% to about 83% of the circumference of the processing roller 122p.

The plurality of straight transport path sections 111g, which are provided by means of the plurality of guide rollers 122 in the processing section, can have a length 11, 12 (corresponds to the distance between the axes of rotation 101a of the corresponding guide rollers 122 from one another) which is greater than a quarter (25%) of the circumference of the guide rollers 122. For example, the length of the rectilinear transport path sections 111g can be in a range from about 25% to about 75% of the circumference of the guide rollers 122, e.g. in a range from about 25% to about 50% of the circumference of the guide rollers 122.

The guide rollers 122 of the transport assembly at 2500 may have a smaller diameter (extension transverse to the axis of rotation 101a) than the guide rollers 122 of the transport assembly at 2600 (also referred to as large guide rollers 122). For example, the diameter of the guide rollers 122 of the transport arrangement in 2500 can be less than about 200 mm, e.g., less than about 150 mm. Alternatively or additionally, the diameter of the guide rollers 122 of the transport assembly in 2600 may be greater than about 200mm, e.g., less than about 250mm. The larger the diameter, the smaller the risk that the substrate 102 will break, especially if the substrate is very brittle (such as flexible glass).

The transport path 111 can be deflected by means of each guide roller 122 of the transport arrangement 2500, 2600, e.g. by an angle w112 (illustratively the difference between the incoming transport path 111 and the outgoing transport path 111). The angle w122 can also be referred to as the minimum wrap. The angle w122 of the idle guide rollers 122 may be greater than about 10°, e.g., greater than about 20°, e.g., greater than about 30°.

27 12 illustrates a transport arrangement 2700 according to various embodiments in a schematic side view or cross-sectional view (e.g. looking along the axis of rotation direction 101 of the transport arrangement 2700) in yet another wrap-around configuration in which four large guide rollers 122 and a processing roller 122p define the transport path 111. Such a wrap-around configuration can be used, for example, for processing flexible glass substrates.

The constantly curved transport path section 111k of the transport path 111, which is provided by means of the processing roller 122p, can have a Angle will have with respect to the axis of rotation 101a of the processing roller 122p, which is greater than 90 °. In other words, a length of the constantly curved transport path section 111k can be larger than a quarter (25%) of the circumference of the processing roller 122p. For example, the length of the constantly curved transport path section 111k may be in a range from about 25% to about 75% of the circumference of the processing roller 122p, eg in a range from about 33% to about 66% of the circumference of the processing roller 122p.

28 12 illustrates a transport arrangement 2800 according to various embodiments in a schematic side view or cross-sectional view (e.g. looking along the axis of rotation direction 101 of the transport arrangement 2800) in yet another wrap-around configuration in which six large guide rollers 122 define the transport path 111. Such a wrap-around configuration can be used for processing a flexible glass substrate, for example.

The transport arrangement 2800 is similar to the transport arrangement 2700, with the difference that instead of the driven processing roller 122p, two non-driven guide rollers 122 are used, of which, for example, at least one guide roller MR has a sensor (e.g. a strain gauge). Analogously to this reconfiguration, the processing roller 122p and two guide rollers 122 can be understood as interchangeable in the wrapping configurations described above. The two guide rollers 122 can be used to provide a free-clamping configuration (also referred to as "free span"), in which the transport path 111 has a plurality of straight-line sections 111g in the processing section 601, along which the substrate 102 is guided and/or processed .

The transport arrangement 2700 and the transport arrangement 2800 can be set up in such a way that the transport path 111 is curved in precisely one direction. It can thus be achieved that a main processing side 102t of the substrate 102, which is being processed (e.g. coated), is guided contact-free along the transport path 111 by means of the guide rollers 122 (a so-called “no front-touch” configuration).

A one-sided contact-free transport of the substrate 102 can be used, for example, for processing flexible glass.

In the following, more specific wrap-around configurations are to be described, which can be combined with the above wrap-around configurations.

29A and 29B each illustrate a transport arrangement in mutually different wrapping configurations 2900a, 2900b according to various embodiments in a schematic side view or cross-sectional view (eg viewed along the axis of rotation direction 101 of the transport arrangement).

UW denotes a core clutch used to unwind the substrate 102 (i.e., the core clutch driven according to the unwind configuration).

RW denotes a bobbin clutch used to wind the substrate 102 (i.e., the bobbin clutch driven according to the winding configuration).

I-UW denotes a core clutch used to unwind the intermediate layer 104 (e.g. core clutch driven according to the wind-up configuration). I-RW denotes a bobbin clutch used to wind up the intermediate layer 104 (e.g., bobbin clutch driven according to the unwind configuration). The winding sleeve coupling I-UW and/or the winding sleeve coupling I-RW can be optional.

GR designates a guide roller 122, which is set up for deflecting the transport path 111 (also referred to as deflection roller 122 or deflection roller 122). The deflection roller 122 can be mounted without a drive.

SR denotes a guide roller 122 which is set up for spreading (also referred to as spreader roller 122 or spreader roller 122). The spreader roller 122 can be mounted without a drive and have a lateral surface that is curved in the axial direction (e.g. a concave lateral surface or a convex lateral surface). For example, the spreader roller 122 can have a curvature along the axis of rotation 101a or a bulbous shape.

MR designates a guide roller 122 which is set up for measuring (also referred to as measuring roller 122 or measuring roller 122). The measuring roller 122 can be set up to record a mechanical variable which represents a mechanical tensile stress in the substrate 102 . The measuring roller 122 can be mounted without a drive.

TI denotes a guide roller 122 which is set up for decoupling tension (also referred to as tension roller 122 or tension roller 122). The The traction roller can be driven, for example by means of a belt or by means of a shaft. A drive energy transmitted to the tension roller (eg torque or rotational movement transmitted thereto) can be controlled and/or regulated by means of the controller 508 , eg on the basis of the mechanical variable detected by means of the measuring roller 122 .

A tension roller 122 and this two adjacent measuring rollers 122, between which the tension roller 122 is arranged, can form a unit (clearly a decoupling roller arrangement) which divides the transport path into two tension control paths (clearly before and after the draw roller 122), between which the web tension is equalized by the nip roller 122 (i.e., a difference before and after the nip roller 122 is reduced).

The circulation of the processing roller 102p can be or will be increased by means of additional rollers.

30A and 30B each illustrate a transport arrangement in mutually different wrapping configurations 3000a, 3000b according to various embodiments in a schematic side view or cross-sectional view (e.g. looking along the axis of rotation direction 101 of the transport arrangement), which differ in the direction in which the multiple winding sleeve couplings are rotated (i.e. the direction of rotation or winding direction).

In the wrapping configurations 3000a, 3000b, the transport path 111 can be or will be defined by means of large measuring rollers MR and deflection rollers GR.

31A and 31B each illustrate a transport arrangement in mutually different wrapping configurations 3100a, 3100b according to various embodiments in a schematic side view or cross-sectional view (e.g. viewed along the axis of rotation direction 101 of the transport arrangement), wherein the wrapping of the intermediate layer is omitted. This can be the case with a polymer substrate 102, for example.

32A and 32B each illustrate a transport arrangement in different wrapping configurations 3200a, 3200b according to various embodiments in a schematic side view or cross-sectional view (eg looking along the axis of rotation direction 101 of the transport arrangement 3200a).

33A and 33B each illustrate a transport arrangement in different wrapping configurations 3300a, 3300b according to various embodiments in a schematic side view or cross-sectional view (e.g. looking along the axis of rotation direction 101 of the transport arrangement 3300a), the transport path 111 being set up in such a way that the substrate 102 is curved in only one direction becomes. In other words, a first side of the substrate 102 which is being processed (eg coated) can be guided along the transport path 111 without contact. The first side of the substrate 102 can thus not touch any of the guide rollers 122 along the transport path 111 (ie in “no front touch” configuration). A side opposite the first side may rest on the guide rollers 112 .

A one-sided contact-free transport of the substrate 102 can be used, for example, for processing flexible glass.

The “No Fronttouch” configuration can be provided in 3300a by means of small guide rollers 122 and in 3300b by means of large guide rollers 122.

Claims (11)

Transport arrangement (100, 300), comprising: • several rotatably mounted winding sleeve couplings (112a, 112b, 112c, 112d), of which two winding sleeve couplings are set up for coupling winding sleeves between which a flexible substrate (102) is to be wound, and of which at least one additional winding sleeve coupling for coupling at least one additional winding sleeve, by means of which an intermediate layer (104) is to be accommodated and/or held available; • at least one rotatably mounted guide roller (122) which defines a curved transport path (111) along which the wrapping takes place; • the plurality of winding sleeve couplings (112a, 112b, 112c, 112d) being set up essentially in the same way, so that the winding sleeves can be interchanged with one another. Transport arrangement (100, 300) according to claim 1 , further comprising: a plurality of drives (506), each drive being coupled to exactly one core clutch of the plurality of core clutches (112a, 112b, 112c, 112d); wherein the plurality of drives (506) are essentially set up in the same way, so that they rotate the plurality of winding tube clutches (112a, 112b, 112c, 112d) synchronously when actuated in the same way. Transport arrangement (100, 300) according to claim 1 or 2 , further comprising: a controller (508) for driving each drive of the plurality of drives (506) according to a winding configuration, which has: • a winding configuration for driving the winding sleeve clutch by means of which the substrate (102) is wound; and/or • an unwind configuration for driving that winding sleeve clutch by means of which the substrate (102) is unwound; wherein the controller (508) is set up to control each drive of the plurality of drives (506) selectively according to the winding configuration and/or according to the unwinding configuration. Transport arrangement (100, 300) according to claim 3 , wherein the controller (508) is set up to adapt a speed of at least one winding sleeve clutch of the plurality of winding sleeve clutches (112a, 112b, 112c, 112d) between which the substrate (102) is wound to a value which represents a transport characteristic. Transport arrangement (100, 300) according to one of Claims 1 until 4 , wherein each winding tube coupling of the plurality of winding tube couplings (112a, 112b, 112c, 112d) has a clamping device (504) for clamping the respective winding tube. Transport arrangement (100, 300) according to one of Claims 1 until 5 , wherein the transport area has at least one processing section (601) in which the transport path (111) runs in a straight line or has a constant curvature along a length of more than a quarter of the circumference of the at least one guide roller (122). Transport arrangement (100, 300) according to one of Claims 1 until 6 , wherein the plurality of rotatably mounted winding sleeve couplings (112a, 112b, 112c, 112d) are set up • in a first wrapping configuration (100b, 300b), a substrate (102) between a first winding sleeve coupling of the plurality of winding sleeve couplings (112a, 112b, 112c, 112d) and wrapping a second winding sleeve coupling of the plurality of winding sleeve couplings (112a, 112b, 112c, 112d); • in a second wrapping configuration (200a, 400a), to wrap a substrate (102) between a first one of the plurality of former clutches (112a, 112b, 112c, 112d) and a third one of the multiple former clutches (112a, 112b, 112c, 112d). Transport arrangement (100, 300) according to claim 7 , a guide roller support (702) which • provides a first mounting position (701a) in which the at least one guide roller (122) is mounted in the first wrapping configuration (100b, 300b); • providing a second mounting position (701b) in which the at least one guide roller (122) is mounted in the second wrap-around configuration (200a). A vacuum assembly (800a, 800b) comprising: • a vacuum chamber (802); and • a transport arrangement (100, 300) according to one of Claims 1 until 8th , whose multiple winding sleeve couplings (112a, 112b, 112c, 112d) are arranged in the vacuum chamber (802). Vacuum arrangement (800a, 800b) according to claim 9 , wherein the vacuum chamber (802) has a plurality of rotary feedthroughs, of which each rotary feedthrough is aligned with exactly one winding sleeve coupling of the plurality of winding sleeve couplings (112a, 112b, 112c, 112d). Method for operating a transport arrangement (100, 300) which has at least a first winding sleeve clutch (112a), a second winding sleeve clutch (112b) and a third winding sleeve clutch (112c), the method comprising: • processing a substrate (102) in a first wrapping configuration (100b, 300b) in which the substrate (102) is wrapped between two mandrels which are supported by means of the first mandrel clutch (112a) and the second mandrel clutch (112b); and • Processing a substrate (102) in a second wrapping configuration (100c), in which the substrate (102) is wrapped between two winding sleeves, which are mounted by means of the third winding sleeve clutch (112c) and the first winding sleeve clutch (112a).

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