CN108831956A - Flexible solar battery copper indium gallium selenide manufacturing equipment - Google Patents
Flexible solar battery copper indium gallium selenide manufacturing equipment Download PDFInfo
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- CN108831956A CN108831956A CN201810615111.1A CN201810615111A CN108831956A CN 108831956 A CN108831956 A CN 108831956A CN 201810615111 A CN201810615111 A CN 201810615111A CN 108831956 A CN108831956 A CN 108831956A
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- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 238000009792 diffusion process Methods 0.000 claims abstract description 13
- 238000012544 monitoring process Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 8
- 239000002775 capsule Substances 0.000 claims description 19
- 238000012546 transfer Methods 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 12
- 239000000523 sample Substances 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000000498 cooling water Substances 0.000 claims description 6
- 230000009347 mechanical transmission Effects 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000009833 condensation Methods 0.000 claims description 3
- 230000005494 condensation Effects 0.000 claims description 3
- 238000012937 correction Methods 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 13
- 239000011669 selenium Substances 0.000 description 4
- 238000010025 steaming Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005662 electromechanics Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a kind of flexible solar battery copper indium gallium selenide manufacturing equipments.The flexible solar battery copper indium gallium selenide manufacturing equipment is in real time monitored mechanical driven; roll-to-roll speed tension is corrected automatically; linear sources heating unit is separately protected; heating temperature on-line monitoring; real-time control; it can be vacuumized step by step by diffusion pump and mechanical pump group simultaneously, guarantee the stability of process environments.
Description
Technical field
The present invention relates to technical field of solar batteries more particularly to a kind of manufacture of flexible solar battery copper indium gallium selenide to set
It is standby.
Background technique
With the shortage of global warming, the deterioration of the ecological environment and conventional energy resource, it is sustainable that solar energy has become various countries
The grand strategy decision of development.Solar battery is exactly a kind of device for converting solar energy into electric energy, is had more than electric energy, wind
The energy of the resources such as energy, and promise to be the mainstay of future electrical energy industry.Solar battery is broadly divided into silicon solar
Battery, compound semiconductor film battery, organic polymer battery, organic thin film cells etc..Wherein, copper indium gallium selenide（CIGS）It is thin
Film solar cell belongs to semiconductor film film battery, since copper indium gallium selenide has direct band gap structure, and suction with higher
Receive coefficient, film layer need to only reach micron order can whole absorbabilities be greater than the incident light of CIGS thin-film bandwidth, therefore
Copper-indium-galliun-selenium film solar cell can save a large amount of raw material, and by rare element price increase and there is lack of raw materials is influenced
It is relatively small, have many advantages, such as that light absorpting ability is strong, discharge stability is good, high conversion efficiency, thus before having a vast market
Scape.
CIGS thin-film manufactures on flexible solar battery, and the prior art is manufactured at a high temperature of roll-to-roll total steaming,
When steaming method altogether using three steps, can not partition protecting and real time monitoring to linear sources, not can guarantee high temperature underdrive stability, nothing
Method does not have partition protecting and on-line monitoring to tension, the real time monitoring of transmission and automatic correction, the linear array in each individually source,
When using total steaming, cavity not can guarantee the vacuum of entire environment while being full of metallic vapour.
Summary of the invention
In order to solve the above technical problems, the present invention devises a kind of flexible solar battery copper indium gallium selenide manufacturing equipment.
The present invention adopts the following technical scheme that：
A kind of flexible solar battery copper indium gallium selenide manufacturing equipment, including cavity and control unit, control unit connect in control
The heart, cavity include upper cavity and lower chamber, and upper cavity and lower chamber pressing are closed, and mechanical transmission unit, true is provided in cavity
Dummy cell, heating unit, cooling unit and film deposit source unit, and mechanical transmission unit includes let off roll, wind-up roll and several
Live-roller, the interior rotation connection let off roll of upper cavity, wind-up roll and several live-rollers, let off roll are fixedly connected with wind-up roll end and watch
Motor is taken, several live-rollers are linked to be transfer passage between let off roll and wind-up roll, and it includes linear source capsule and XRF that film, which deposits source unit,
Detection device corresponds to transfer passage in lower chamber and is respectively arranged with multiple linear source capsules, the middle position and end of transfer passage
It respectively corresponds and is provided with XRF detection device, heating unit includes heater and temperature sensor, is located at linear sources on transfer passage
Box corresponding position is respectively arranged with temperature sensor, each linear source capsule upper end opening, and setting is linear in each linear source capsule
Having heaters is arranged in source, each linear sources bottom, and control unit is connected to servo motor, XRF detection device, temperature by conducting wire and passes
Sensor, heater, vacuum unit and cooling unit.
Preferably, the vacuum system includes diffusion pump and mechanical pump group, diffusion pump and mechanical pump group are connected by conducting wire
Logical control unit.
Preferably, being provided with high pressure valve between the diffusion pump and cavity.
Preferably, the transfer passage end is provided with the detector of mechanical driven, the detector of mechanical driven includes
Semicircle fixed block, probe, sender unit and the signal receiver of live-roller end fixed setting, the fixed connection high frequency of probe
Power supply, probe end overlap semicircle fixed block, and signal receiver is connected to semicircle fixed block, and signal receiver is connected by conducting wire
Logical control unit.With the rotation of live-roller, the semicircle fixed block of the intermittent contact of probe, control unit passes through signal receiver
To monitor slave drive roller, whether normal frequency rotates the signal frequency of receiving.
Preferably, being provided with ion gauge at each linear source capsule in the cavity, ion gauge is connected to by conducting wire and is controlled
Unit.
Preferably, the transfer passage front end is provided with velocity sensor and tension sensor, velocity sensor and
Force snesor is connected to control unit by conducting wire.By the data monitoring of velocity sensor and tension sensor, control unit is anti-
Feedback adjusts let off roll and wind-up roll private takes the velocity of rotation of motor, adjusts tension to correct automatically.
Preferably, the cooling unit includes cooling water filtering device, cooling water filtering device is set to two in cavity
At the vacuum orifice of side, condensation filtering Se steam.
It is provided with heating plate preferably, being located in the transfer passage of solar panel backside of substrate, heating plate is kept
Solar panel bases reaction temperature is uniform.
Compared with prior art, the beneficial effect of the flexible solar battery copper indium gallium selenide manufacturing equipment is：
1, while Serve Motor Control electromechanics are driven, using velocity sensor and tension sensor, to speed and tension
On-line monitoring and Real-time Feedback are carried out, roll-to-roll tension and speed are adjusted in real time using double closed-loop control system, is increased
The stability of servomechanism control；
2, it is added to the detector of mechanical driven, real-time mechanical driven on-line monitoring utilizes the variation of low and high level, detection transmission
Duration, accomplished the diversification monitoring to closed environment, and roll-to-roll tension and correction can have been corrected automatically, accomplish
The stability of entire high-temperature machinery transmission；
3, in total steaming, the linear array sequence of each source metal of copper indium gallium selenide is improved, linear sources heating unit is separately protected, single
Solely heating, makes sufficiently reflect between each source and not interfere with each other, promotes the growth of crystal grain, and it is big and fine and close to have obtained crystallite dimension
Film layer；
4, when source metal heats, heating feedback is monitored online by temperature sensor, real-time control is detected in XRF
While each source thickness, it can also be fed back by control unit in computer, it, can be according to process set value after computer is calculated
Every feedback data calculate and PID is adjusted, realizes the automatic control of source metal thickness and temperature；
5, in entire vacuum system, equipment is vacuumized step by step, when being in high vacuum state, to the vacuum degree in each area
It is monitored, using ion gauge and its control unit, the Se vapour pressure and vacuum degree in each area is monitored, electricity is fed back to
Brain is in setting value using the vapour pressure that PID adjusts each area, ensure that the sufficient selenylation reaction ring of each area's source metal
Border；
6, in whole operation Interface Control, only needing a computer is each system that can control whole equipment, facilitates operation,
And interlock protection is carried out to each operation, corresponding operation could be opened when meeting unlocking condition, whole equipment has been carried out
Operational protection avoids the loss of maloperation bring.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the invention；
In figure：1, upper cavity, 2, lower chamber, 3, let off roll, 4, wind-up roll, 5, live-roller, 6, flexible solar battery volume, 7, line
Property source capsule, 8, XRF detection device, 9, temperature sensor, 10, high pressure valve, 11, diffusion pump, 12, mechanical pump group.
Specific embodiment
Below by specific embodiment, and in conjunction with attached drawing, technical scheme of the present invention is further described：
Embodiment：As shown in Fig. 1, a kind of flexible solar battery copper indium gallium selenide manufacturing equipment, including cavity and control unit,
Control unit connects control centre, and cavity includes upper cavity 1 and lower chamber 2, and upper cavity and lower chamber pressing are closed, set in cavity
Being equipped with mechanical transmission unit, vacuum unit, heating unit, cooling unit and film deposition source unit, mechanical transmission unit includes
Let off roll 3, wind-up roll 4 and several live-rollers 5, the interior rotation connection let off roll of upper cavity, wind-up roll and several live-rollers, let off roll
It is fixedly connected with servo motor with wind-up roll end, several live-rollers are linked to be transfer passage, film deposition between let off roll and wind-up roll
Source unit includes linear source capsule 7 and XRF detection device 8, and transfer passage is corresponded in lower chamber and is respectively arranged with multiple linear source capsules,
The middle position and end of transfer passage, which respectively correspond, is provided with XRF detection device, and heating unit includes that heater and temperature pass
Sensor 9 is located at linear sources box corresponding position on transfer passage and is respectively arranged with temperature sensor, and each linear source capsule upper end is opened
Mouthful, linear sources are provided in each linear source capsule, having heaters is arranged in each linear sources bottom, and control unit is connected to by conducting wire
Servo motor, XRF detection device, temperature sensor, heater, vacuum unit and cooling unit, vacuum system include diffusion pump
11 are connected to control unit by conducting wire with mechanical pump group, high pressure are provided between diffusion pump and cavity with mechanical pump group 12, diffusion pump
Valve 10, transfer passage end are provided with the detector of mechanical driven, and the detector of mechanical driven includes that live-roller end is fixed
Semicircle fixed block, probe, sender unit and the signal receiver of setting, the fixed connection high frequency electric source of probe, probe end
Semicircle fixed block is overlapped, signal receiver is connected to semicircle fixed block, and signal receiver is connected to control unit by conducting wire.With
The rotation of live-roller, the semicircle fixed block of the intermittent contact of probe, the signal that control unit is received by signal receiver is frequently
To monitor slave drive roller, whether normal frequency rotates rate, is provided with ion gauge at each linear source capsule in cavity, ion gauge is logical
Conducting wire connection control unit is crossed, transfer passage front end is provided with velocity sensor and tension sensor, velocity sensor and tension
Sensor is connected to control unit by conducting wire.Pass through the data monitoring of velocity sensor and tension sensor, control unit feedback
It adjusts let off roll and wind-up roll private takes the velocity of rotation of motor, adjust tension to correct automatically, cooling unit includes cooling water
Filter device, cooling water filtering device are set in cavity at the vacuum orifice of both sides, condensation filtering Se steam, preferably, institute
It states.
The flexible solar battery copper indium gallium selenide manufacturing equipment is in use, be put into let off roll for flexible solar battery volume 6
It is unreeled, is transmitted along live-roller, finally enter wind-up roll winding, flexible solar battery rolls up each line in transmit process
Property source capsule linear sources are corresponding carries out heating film-coated, while by temperature sensor senses temperature to control unit, XRF detection device
The thickness for detecting linear sources film, if the thickness detected is excessive, control unit is corresponding to adjust adding for corresponding linear source capsule bottom
Hot device reduces heating temperature, if the thickness low LCL detected, the corresponding heating for adjusting corresponding linear source capsule bottom of control unit
Device promotes heating temperature, until reaching required coating film thickness.
The flexible solar battery copper indium gallium selenide manufacturing equipment is by being in real time monitored mechanical driven, roll-to-roll speed
Tension is corrected automatically, and linear sources heating unit is separately protected, heating temperature on-line monitoring, real-time control, while can pass through diffusion
Pump and mechanical pump group vacuumize step by step, guarantee the stability of process environments.
Above-mentioned embodiment is only a preferred solution of the present invention, not the present invention is made in any form
Limitation, there are also other variations and modifications on the premise of not exceeding the technical scheme recorded in the claims.
Claims (9)
1. a kind of flexible solar battery copper indium gallium selenide manufacturing equipment, including cavity and control unit, control unit connection control
Center, cavity include upper cavity and lower chamber, and upper cavity and lower chamber pressing are closed, characterized in that are provided in the cavity
Mechanical transmission unit, vacuum unit, heating unit, cooling unit and film deposit source unit, and mechanical transmission unit includes unreeling
Roller, wind-up roll and several live-rollers, the interior rotation connection let off roll of upper cavity, wind-up roll and several live-rollers, let off roll and winding
Roller end is fixedly connected with servo motor, and several live-rollers are linked to be transfer passage between let off roll and wind-up roll, and film deposits source unit
Including linear source capsule and XRF detection device, transfer passage is corresponded in lower chamber and is respectively arranged with multiple linear source capsules, transfer passage
Middle position and end respectively correspond and be provided with XRF detection device, heating unit includes heater and temperature sensor, conveying
It is located at linear sources box corresponding position on channel and is respectively arranged with temperature sensor, each linear source capsule upper end opening is each linear
Be provided with linear sources in source capsule, each linear sources bottom is arranged having heaters, control unit by conducting wire connection servo motor,
XRF detection device, temperature sensor, heater, vacuum unit and cooling unit.
2. flexible solar battery copper indium gallium selenide manufacturing equipment according to claim 1, characterized in that the vacuum list
Member includes diffusion pump and mechanical pump group, and vacuum orifice is arranged in cavity, and diffusion pump is connected to vacuum orifice, diffusion pump with mechanical pump group
Control unit is connected to by conducting wire with mechanical pump group, in entire vacuum unit, equipment is vacuumized step by step, in height
When vacuum state, the vacuum degree in each area is monitored.
3. flexible solar battery copper indium gallium selenide manufacturing equipment according to claim 1, characterized in that the diffusion pump with
High pressure valve is provided between cavity.
4. flexible solar battery copper indium gallium selenide manufacturing equipment according to claim 1, characterized in that the transfer passage
End is provided with the detector of mechanical driven, and the detector of mechanical driven includes that the semicircle of live-roller end fixed setting is fixed
Block, probe, sender unit and signal receiver, the fixed connection high frequency electric source of probe, probe end overlap semicircle fixed block,
Signal receiver is connected to semicircle fixed block, and signal receiver is connected to control unit by conducting wire, is added to the inspection of mechanical driven
Device is surveyed, real-time mechanical driven on-line monitoring using the variation of low and high level, detects the duration of transmission, accomplished to closed loop
The diversification monitoring in border, and roll-to-roll tension and correction can be corrected automatically, accomplish the steady of entire high-temperature machinery transmission
It is qualitative.
5. flexible solar battery copper indium gallium selenide manufacturing equipment according to claim 1, characterized in that the transfer passage
Front end is provided with velocity sensor and tension sensor, and velocity sensor is connected to control unit by conducting wire with tension sensor,
Using velocity sensor and tension sensor, on-line monitoring and Real-time Feedback are carried out to speed and tension, use double-closed-loop control
System is in real time adjusted roll-to-roll tension and speed, increases the stability of servomechanism control.
6. flexible solar battery copper indium gallium selenide manufacturing equipment according to claim 1, characterized in that the temperature sensing
Device is when source metal heats, by the way that temperature feedback is monitored online, real-time control, and while XRF detects each source thickness,
Also it can be fed back by control unit in computer, it, can be according to process set value to every feedback data after computer is calculated
Calculate and PID is adjusted, realizes the automatic control of source metal thickness and temperature.
7. flexible solar battery copper indium gallium selenide manufacturing equipment according to claim 1, characterized in that every in the cavity
It is provided with ion gauge at a linear source capsule, ion gauge is connected to control unit by conducting wire, using ion gauge and its control unit,
The Se vapour pressure and vacuum degree in each area are monitored, computer is fed back to, is in and is set using the vapour pressure that PID adjusts each area
Definite value ensure that the sufficient selenylation reaction environment of each area's source metal.
8. flexible solar battery copper indium gallium selenide manufacturing equipment according to claim 2, characterized in that the cooling unit
Including cooling water filtering device, cooling water filtering device is set in cavity at the vacuum orifice of both sides, condensation filtering Se steam.
9. flexible solar battery copper indium gallium selenide manufacturing equipment according to claim 1, characterized in that be located at solar-electricity
Heating plate is provided in the transfer passage of pond plate backside of substrate, heating plate keeps solar panel bases reaction temperature equal
It is even.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810615111.1A CN108831956B (en) | 2018-06-14 | 2018-06-14 | Flexible solar cell copper indium gallium diselenide manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810615111.1A CN108831956B (en) | 2018-06-14 | 2018-06-14 | Flexible solar cell copper indium gallium diselenide manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108831956A true CN108831956A (en) | 2018-11-16 |
| CN108831956B CN108831956B (en) | 2023-12-15 |
Family
ID=64141924
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810615111.1A Active CN108831956B (en) | 2018-06-14 | 2018-06-14 | Flexible solar cell copper indium gallium diselenide manufacturing equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110344019A (en) * | 2019-06-25 | 2019-10-18 | 北京汉能薄膜发电技术有限公司 | A kind of vacuum chamber of copper indium gallium selenide filming equipment |
| CN114686836A (en) * | 2022-03-28 | 2022-07-01 | 尚越光电科技股份有限公司 | XRF detection structure of volume to volume copper indium gallium selenide coating by vaporization |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101599515A (en) * | 2004-03-05 | 2009-12-09 | 索里布罗研究公司 | CIGS technology is carried out the method and apparatus of in-line arrangement process control |
| CN102443779A (en) * | 2011-12-08 | 2012-05-09 | 尚越光电科技有限公司 | Plasma assisted selenylation technology and device for preparing copper-indium-gallium-selenium film |
| CN102492923A (en) * | 2011-12-23 | 2012-06-13 | 中国电子科技集团公司第十八研究所 | Method for roll-to-roll online controlled deposition of absorption layer on flexible substrate |
| CN106319473A (en) * | 2016-08-31 | 2017-01-11 | 湘潭宏大真空技术股份有限公司 | CIGS solar cell film production line |
| CN106783667A (en) * | 2017-02-23 | 2017-05-31 | 浙江尚越新能源开发有限公司 | Ensure the production system and its manufacture method of uniformity and the alkali doped of stability in flexible copper indium gallium selenide thin-film solar cell |
| CN206872938U (en) * | 2017-06-28 | 2018-01-12 | 深圳市天星达真空镀膜设备有限公司 | Fexible film gap winds magnetic control sputtering vacuum coating machine |
| DE102016112869A1 (en) * | 2016-07-13 | 2018-01-18 | Von Ardenne Gmbh | Transport arrangement and processing arrangement and method for operating this |
| WO2018016947A1 (en) * | 2016-07-18 | 2018-01-25 | Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno | Deposition arrangement and method for depositing |
-
2018
- 2018-06-14 CN CN201810615111.1A patent/CN108831956B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101599515A (en) * | 2004-03-05 | 2009-12-09 | 索里布罗研究公司 | CIGS technology is carried out the method and apparatus of in-line arrangement process control |
| CN102443779A (en) * | 2011-12-08 | 2012-05-09 | 尚越光电科技有限公司 | Plasma assisted selenylation technology and device for preparing copper-indium-gallium-selenium film |
| CN102492923A (en) * | 2011-12-23 | 2012-06-13 | 中国电子科技集团公司第十八研究所 | Method for roll-to-roll online controlled deposition of absorption layer on flexible substrate |
| DE102016112869A1 (en) * | 2016-07-13 | 2018-01-18 | Von Ardenne Gmbh | Transport arrangement and processing arrangement and method for operating this |
| WO2018016947A1 (en) * | 2016-07-18 | 2018-01-25 | Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno | Deposition arrangement and method for depositing |
| CN106319473A (en) * | 2016-08-31 | 2017-01-11 | 湘潭宏大真空技术股份有限公司 | CIGS solar cell film production line |
| CN106783667A (en) * | 2017-02-23 | 2017-05-31 | 浙江尚越新能源开发有限公司 | Ensure the production system and its manufacture method of uniformity and the alkali doped of stability in flexible copper indium gallium selenide thin-film solar cell |
| CN206872938U (en) * | 2017-06-28 | 2018-01-12 | 深圳市天星达真空镀膜设备有限公司 | Fexible film gap winds magnetic control sputtering vacuum coating machine |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110344019A (en) * | 2019-06-25 | 2019-10-18 | 北京汉能薄膜发电技术有限公司 | A kind of vacuum chamber of copper indium gallium selenide filming equipment |
| CN114686836A (en) * | 2022-03-28 | 2022-07-01 | 尚越光电科技股份有限公司 | XRF detection structure of volume to volume copper indium gallium selenide coating by vaporization |
| CN114686836B (en) * | 2022-03-28 | 2023-08-22 | 尚越光电科技股份有限公司 | XRF detection structure of roll-to-roll copper indium gallium diselenide evaporation |
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