DE102014017001A1 - Mikroskop mit geringem Verzeichnungsfehler - Google Patents

Mikroskop mit geringem Verzeichnungsfehler Download PDF

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Publication number
DE102014017001A1
DE102014017001A1 DE102014017001.2A DE102014017001A DE102014017001A1 DE 102014017001 A1 DE102014017001 A1 DE 102014017001A1 DE 102014017001 A DE102014017001 A DE 102014017001A DE 102014017001 A1 DE102014017001 A1 DE 102014017001A1
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DE
Germany
Prior art keywords
beam deflection
concave mirror
deflection unit
intermediate image
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102014017001.2A
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German (de)
English (en)
Inventor
Daniel Schwedt
Tiemo Anhut
Matthias Wald
Beate Böhme
Tobias Kaufhold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Microscopy GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss Microscopy GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Microscopy GmbH, Carl Zeiss AG filed Critical Carl Zeiss Microscopy GmbH
Priority to DE102014017001.2A priority Critical patent/DE102014017001A1/de
Priority to PCT/EP2015/076338 priority patent/WO2016075195A1/de
Priority to US15/526,704 priority patent/US10254524B2/en
Priority to EP15793816.8A priority patent/EP3218757B1/de
Priority to CN201580061544.1A priority patent/CN107003506B/zh
Priority to JP2017525546A priority patent/JP6637976B2/ja
Publication of DE102014017001A1 publication Critical patent/DE102014017001A1/de
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0048—Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0068—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration having means for controlling the degree of correction, e.g. using phase modulators, movable elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE102014017001.2A 2014-11-12 2014-11-12 Mikroskop mit geringem Verzeichnungsfehler Pending DE102014017001A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102014017001.2A DE102014017001A1 (de) 2014-11-12 2014-11-12 Mikroskop mit geringem Verzeichnungsfehler
PCT/EP2015/076338 WO2016075195A1 (de) 2014-11-12 2015-11-11 Mikroskop mit geringem verzeichnungsfehler
US15/526,704 US10254524B2 (en) 2014-11-12 2015-11-11 Microscope having low distortion aberration
EP15793816.8A EP3218757B1 (de) 2014-11-12 2015-11-11 Mikroskop mit geringem verzeichnungsfehler
CN201580061544.1A CN107003506B (zh) 2014-11-12 2015-11-11 具有低畸变像差的显微镜
JP2017525546A JP6637976B2 (ja) 2014-11-12 2015-11-11 歪曲収差の少ない顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014017001.2A DE102014017001A1 (de) 2014-11-12 2014-11-12 Mikroskop mit geringem Verzeichnungsfehler

Publications (1)

Publication Number Publication Date
DE102014017001A1 true DE102014017001A1 (de) 2016-05-12

Family

ID=54540089

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102014017001.2A Pending DE102014017001A1 (de) 2014-11-12 2014-11-12 Mikroskop mit geringem Verzeichnungsfehler

Country Status (6)

Country Link
US (1) US10254524B2 (enExample)
EP (1) EP3218757B1 (enExample)
JP (1) JP6637976B2 (enExample)
CN (1) CN107003506B (enExample)
DE (1) DE102014017001A1 (enExample)
WO (1) WO2016075195A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017119480A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische Anordnung zum Scannen von Anregungsstrahlung und/oder Manipulationsstrahlung in einem Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskop
WO2019038398A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische anordnung zum scannen von anregungsstrahlung und/oder manipulationsstrahlung in einem laser-scanning-mikroskop und laser-scanning-mikroskop
DE102017119479A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische Anordnung zum Scannen von Anregungsstrahlung und/oder Manipulationsstrahlung in einem Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskop
DE102020206537A1 (de) 2020-05-26 2021-12-02 Osram Gmbh Lidar-MEMS-Winkel-Anpassung
JP2022077520A (ja) * 2020-11-11 2022-05-23 カール ツァイス マイクロスコピー ゲーエムベーハー レーザ走査型顕微鏡及びレーザ走査型顕微鏡の調整方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014005880A1 (de) * 2014-04-17 2015-11-05 Carl Zeiss Ag Lichtrastermikroskop mit vereinfachter Optik, insbesondere mit veränderlicher Pupillenlage
DE102016011227C5 (de) * 2016-09-19 2020-04-09 Leica Microsystems Cms Gmbh Mikroskopsystem und Verfahren zur Abbildung einer Probe unter Verwendung eines Mikroskopsystems
WO2018089839A1 (en) 2016-11-10 2018-05-17 The Trustees Of Columbia University In The City Of New York Rapid high-resolution imaging methods for large samples
EP3788427B1 (en) * 2018-05-03 2024-10-23 Thorlabs, Inc. Laser scan head design for three scanning mirrors with optics
JP7344281B2 (ja) 2019-03-28 2023-09-13 浜松ホトニクス株式会社 共焦点顕微鏡ユニット及び共焦点顕微鏡
CN113631981B (zh) * 2019-03-28 2023-10-27 浜松光子学株式会社 扫描型显微镜单元
CN115844323B (zh) * 2022-12-09 2024-02-27 视微影像(河南)科技有限公司 适用于彩色眼底影像系统的光学镜组、视度补偿方法及驱动方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH472037A (de) * 1966-07-13 1969-04-30 Vision Eng Mikroskop zur Tiefenabbildung eines Objektes
DE3033758A1 (de) * 1980-09-08 1982-04-29 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Koehlersche auflicht-hellfeld-beleuchtungseinrichtung
WO1990000755A1 (en) 1988-07-06 1990-01-25 Medical Research Council Achromatic scanning system
DE69216940T2 (de) * 1991-08-05 1997-09-04 Nippon Kogaku Kk Verkleinerndes katadioptrisches Projektionssystem
US20030230710A1 (en) 2002-06-15 2003-12-18 Carl Zeiss Jena Gmbh Microscope, particularly a laser scanning microscope with adaptive optical arrangement
US7295726B1 (en) 2003-12-02 2007-11-13 Adriatic Research Institute Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same
WO2008037346A1 (de) 2006-09-27 2008-04-03 Carl Zeiss Microlmaging Gmbh Laserscanningmikroskop mit element zur pupillenmanipulation
US20100208319A1 (en) 2009-02-15 2010-08-19 Kessler Optics & Photonics Solutions, Ltd. Concentric afocal beam relay
US7787179B2 (en) 2007-03-29 2010-08-31 Carl Ziess MicroImaging GmbH Optical arrangement for the production of a light-sheet
US20130107338A1 (en) 2010-07-07 2013-05-02 Stefan Richter Optical scanning device

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Publication number Priority date Publication date Assignee Title
JP3343276B2 (ja) * 1993-04-15 2002-11-11 興和株式会社 レーザー走査型光学顕微鏡
US6888148B2 (en) 2001-12-10 2005-05-03 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and /or back scattered light beam in a sample
EP1842095A4 (en) * 2005-01-27 2010-08-04 Rensselaer Polytech Inst OPTICAL MICROSCOPE WITH ADAPTIVE SENSING
JP4650526B2 (ja) * 2008-06-25 2011-03-16 富士ゼロックス株式会社 光走査装置
JP5554965B2 (ja) * 2009-11-06 2014-07-23 オリンパス株式会社 位相変調型空間光変調器を用いたレーザ顕微鏡
DE102011114500B4 (de) * 2011-09-29 2022-05-05 Fei Company Mikroskopvorrichtung
DE102013005927B4 (de) * 2013-03-28 2025-02-20 Friedrich-Schiller-Universität Jena Verfahren zum optisch hochaufgelösten Rasterscanning eines Objekts und Verwendung des Verfahrens
DE102014005880A1 (de) * 2014-04-17 2015-11-05 Carl Zeiss Ag Lichtrastermikroskop mit vereinfachter Optik, insbesondere mit veränderlicher Pupillenlage

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH472037A (de) * 1966-07-13 1969-04-30 Vision Eng Mikroskop zur Tiefenabbildung eines Objektes
DE3033758A1 (de) * 1980-09-08 1982-04-29 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Koehlersche auflicht-hellfeld-beleuchtungseinrichtung
WO1990000755A1 (en) 1988-07-06 1990-01-25 Medical Research Council Achromatic scanning system
DE69216940T2 (de) * 1991-08-05 1997-09-04 Nippon Kogaku Kk Verkleinerndes katadioptrisches Projektionssystem
US20030230710A1 (en) 2002-06-15 2003-12-18 Carl Zeiss Jena Gmbh Microscope, particularly a laser scanning microscope with adaptive optical arrangement
US7295726B1 (en) 2003-12-02 2007-11-13 Adriatic Research Institute Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same
WO2008037346A1 (de) 2006-09-27 2008-04-03 Carl Zeiss Microlmaging Gmbh Laserscanningmikroskop mit element zur pupillenmanipulation
US7787179B2 (en) 2007-03-29 2010-08-31 Carl Ziess MicroImaging GmbH Optical arrangement for the production of a light-sheet
US20100208319A1 (en) 2009-02-15 2010-08-19 Kessler Optics & Photonics Solutions, Ltd. Concentric afocal beam relay
US20130107338A1 (en) 2010-07-07 2013-05-02 Stefan Richter Optical scanning device

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
"Confocal Scanning Optical Microscopy and Related Imaging Systems" von T. R. Corle und G. S. Kino (Academic Press, 1996, S. 214)
CORLE, Timothy R.; KINO, Gordon S.: Confocal Scanning Optical Microscopy ans Related Imaging Systems. San Diego : Academic Press, 1996. Seite 214. - ISBN 0-12-408750-7 *
SMITH, Warren J.: Modern Lens Design. Boston : McGraw-Hill, 1992 (Optical and electro-optical engineering series). 411-430. - ISBN 0-07-059178-4 *
W. J. Smith: "Modern Lens design", McGraw-Hill, 1992, Kapitel 22, Seite 411

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111033350A (zh) * 2017-08-25 2020-04-17 卡尔蔡司显微镜有限责任公司 在激光扫描显微镜中扫描激发辐射和/或操纵辐射的光学组件以及激光扫描显微镜
WO2019038398A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische anordnung zum scannen von anregungsstrahlung und/oder manipulationsstrahlung in einem laser-scanning-mikroskop und laser-scanning-mikroskop
DE102017119478A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische Anordnung zum Scannen von Anregungsstrahlung und/oder Manipulationsstrahlung in einem Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskop
DE102017119479A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische Anordnung zum Scannen von Anregungsstrahlung und/oder Manipulationsstrahlung in einem Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskop
WO2019038404A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische anordnung zum scannen von anregungsstrahlung und/oder manipulationsstrahlung in einem laser-scanning-mikroskop und laser-scanning-mikroskop
WO2019038407A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische anordnung zum scannen von anregungsstrahlung und/oder manipulationsstrahlung in einem laser-scanning-mikroskop und laser-scanning-mikroskop
DE102017119480A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische Anordnung zum Scannen von Anregungsstrahlung und/oder Manipulationsstrahlung in einem Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskop
US11422347B2 (en) 2017-08-25 2022-08-23 Carl Zeiss Microscopy Gmbh Optical assembly for scanning excitation radiation and/or manipulation radiation in a laser scanning microscope, and laser scanning microscope
US11525989B2 (en) 2017-08-25 2022-12-13 Carl Zeiss Microscopy Gmbh Optical assembly for scanning excitation radiation and/or manipulation radiation in a laser scanning microscope, and laser scanning microscope
US11703670B2 (en) 2017-08-25 2023-07-18 Carl Zeiss Microscopy Gmbh Optical assembly for scanning excitation radiation and/or manipulation radiation in a laser scanning microscope, and laser scanning microscope
DE102020206537A1 (de) 2020-05-26 2021-12-02 Osram Gmbh Lidar-MEMS-Winkel-Anpassung
JP2022077520A (ja) * 2020-11-11 2022-05-23 カール ツァイス マイクロスコピー ゲーエムベーハー レーザ走査型顕微鏡及びレーザ走査型顕微鏡の調整方法
JP7747493B2 (ja) 2020-11-11 2025-10-01 カール ツァイス マイクロスコピー ゲーエムベーハー レーザ走査型顕微鏡及びレーザ走査型顕微鏡の調整方法

Also Published As

Publication number Publication date
JP2017535816A (ja) 2017-11-30
EP3218757A1 (de) 2017-09-20
CN107003506A (zh) 2017-08-01
US10254524B2 (en) 2019-04-09
WO2016075195A1 (de) 2016-05-19
CN107003506B (zh) 2020-05-05
EP3218757B1 (de) 2021-03-31
US20170315339A1 (en) 2017-11-02
JP6637976B2 (ja) 2020-01-29

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