CN107003506B - 具有低畸变像差的显微镜 - Google Patents

具有低畸变像差的显微镜 Download PDF

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Publication number
CN107003506B
CN107003506B CN201580061544.1A CN201580061544A CN107003506B CN 107003506 B CN107003506 B CN 107003506B CN 201580061544 A CN201580061544 A CN 201580061544A CN 107003506 B CN107003506 B CN 107003506B
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CN
China
Prior art keywords
beam deflection
deflection unit
concave mirror
microscope
optics
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CN201580061544.1A
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English (en)
Chinese (zh)
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CN107003506A (zh
Inventor
D.施韦特
T.安胡特
M.沃尔德
B.贝姆
T.考夫霍尔德
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Carl Zeiss Microscopy GmbH
Carl Zeiss AG
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Carl Zeiss Microscopy GmbH
Carl Zeiss AG
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Publication of CN107003506A publication Critical patent/CN107003506A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0048—Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0068—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration having means for controlling the degree of correction, e.g. using phase modulators, movable elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CN201580061544.1A 2014-11-12 2015-11-11 具有低畸变像差的显微镜 Active CN107003506B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014017001.2 2014-11-12
DE102014017001.2A DE102014017001A1 (de) 2014-11-12 2014-11-12 Mikroskop mit geringem Verzeichnungsfehler
PCT/EP2015/076338 WO2016075195A1 (de) 2014-11-12 2015-11-11 Mikroskop mit geringem verzeichnungsfehler

Publications (2)

Publication Number Publication Date
CN107003506A CN107003506A (zh) 2017-08-01
CN107003506B true CN107003506B (zh) 2020-05-05

Family

ID=54540089

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580061544.1A Active CN107003506B (zh) 2014-11-12 2015-11-11 具有低畸变像差的显微镜

Country Status (6)

Country Link
US (1) US10254524B2 (enExample)
EP (1) EP3218757B1 (enExample)
JP (1) JP6637976B2 (enExample)
CN (1) CN107003506B (enExample)
DE (1) DE102014017001A1 (enExample)
WO (1) WO2016075195A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014005880A1 (de) * 2014-04-17 2015-11-05 Carl Zeiss Ag Lichtrastermikroskop mit vereinfachter Optik, insbesondere mit veränderlicher Pupillenlage
DE102016011227C5 (de) * 2016-09-19 2020-04-09 Leica Microsystems Cms Gmbh Mikroskopsystem und Verfahren zur Abbildung einer Probe unter Verwendung eines Mikroskopsystems
WO2018089839A1 (en) 2016-11-10 2018-05-17 The Trustees Of Columbia University In The City Of New York Rapid high-resolution imaging methods for large samples
DE102017119479A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische Anordnung zum Scannen von Anregungsstrahlung und/oder Manipulationsstrahlung in einem Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskop
DE102017119478A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische Anordnung zum Scannen von Anregungsstrahlung und/oder Manipulationsstrahlung in einem Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskop
DE102017119480A1 (de) 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Optische Anordnung zum Scannen von Anregungsstrahlung und/oder Manipulationsstrahlung in einem Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskop
EP3788427B1 (en) * 2018-05-03 2024-10-23 Thorlabs, Inc. Laser scan head design for three scanning mirrors with optics
JP7344281B2 (ja) 2019-03-28 2023-09-13 浜松ホトニクス株式会社 共焦点顕微鏡ユニット及び共焦点顕微鏡
CN113631981B (zh) * 2019-03-28 2023-10-27 浜松光子学株式会社 扫描型显微镜单元
DE102020206537A1 (de) 2020-05-26 2021-12-02 Osram Gmbh Lidar-MEMS-Winkel-Anpassung
DE102020006975A1 (de) * 2020-11-11 2022-05-12 Carl Zeiss Microscopy Gmbh Laser-Scanning-Mikroskop und Verfahren zum Justieren eines Laser-Scanning-Mikroskops
CN115844323B (zh) * 2022-12-09 2024-02-27 视微影像(河南)科技有限公司 适用于彩色眼底影像系统的光学镜组、视度补偿方法及驱动方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101116023A (zh) * 2005-01-27 2008-01-30 伦斯勒理工学院 可适应性扫描光学显微镜
WO2008037346A1 (de) * 2006-09-27 2008-04-03 Carl Zeiss Microlmaging Gmbh Laserscanningmikroskop mit element zur pupillenmanipulation
CN101614872A (zh) * 2008-06-25 2009-12-30 富士施乐株式会社 光学扫描装置和图像形成装置
CN103890633A (zh) * 2011-09-29 2014-06-25 Fei公司 显微镜装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH472037A (de) * 1966-07-13 1969-04-30 Vision Eng Mikroskop zur Tiefenabbildung eines Objektes
DE3033758A1 (de) * 1980-09-08 1982-04-29 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Koehlersche auflicht-hellfeld-beleuchtungseinrichtung
JP2594470B2 (ja) 1988-07-06 1997-03-26 メディカル リサーチ カウンシル 無彩色走査装置
EP0527043B1 (en) * 1991-08-05 1997-01-22 Nikon Corporation Catadioptric reduction projection optical system
JP3343276B2 (ja) * 1993-04-15 2002-11-11 興和株式会社 レーザー走査型光学顕微鏡
US6888148B2 (en) 2001-12-10 2005-05-03 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and /or back scattered light beam in a sample
DE10227120A1 (de) * 2002-06-15 2004-03-04 Carl Zeiss Jena Gmbh Mikroskop, insbesondere Laserscanningmikroskop mit adaptiver optischer Einrichtung
US7295726B1 (en) 2003-12-02 2007-11-13 Adriatic Research Institute Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same
DE102007015063B4 (de) 2007-03-29 2019-10-17 Carl Zeiss Microscopy Gmbh Optische Anordnung zum Erzeugen eines Lichtblattes
US8274720B2 (en) 2009-02-15 2012-09-25 Kessler Optics and Photonics Solutions, Ltd. Concentric afocal beam relay
JP5554965B2 (ja) * 2009-11-06 2014-07-23 オリンパス株式会社 位相変調型空間光変調器を用いたレーザ顕微鏡
DE102010026571B4 (de) 2010-07-07 2022-05-12 Carl Zeiss Microscopy Gmbh Optische Scan-Einrichtung
DE102013005927B4 (de) * 2013-03-28 2025-02-20 Friedrich-Schiller-Universität Jena Verfahren zum optisch hochaufgelösten Rasterscanning eines Objekts und Verwendung des Verfahrens
DE102014005880A1 (de) * 2014-04-17 2015-11-05 Carl Zeiss Ag Lichtrastermikroskop mit vereinfachter Optik, insbesondere mit veränderlicher Pupillenlage

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101116023A (zh) * 2005-01-27 2008-01-30 伦斯勒理工学院 可适应性扫描光学显微镜
WO2008037346A1 (de) * 2006-09-27 2008-04-03 Carl Zeiss Microlmaging Gmbh Laserscanningmikroskop mit element zur pupillenmanipulation
CN101614872A (zh) * 2008-06-25 2009-12-30 富士施乐株式会社 光学扫描装置和图像形成装置
CN103890633A (zh) * 2011-09-29 2014-06-25 Fei公司 显微镜装置

Also Published As

Publication number Publication date
JP2017535816A (ja) 2017-11-30
EP3218757A1 (de) 2017-09-20
CN107003506A (zh) 2017-08-01
US10254524B2 (en) 2019-04-09
WO2016075195A1 (de) 2016-05-19
DE102014017001A1 (de) 2016-05-12
EP3218757B1 (de) 2021-03-31
US20170315339A1 (en) 2017-11-02
JP6637976B2 (ja) 2020-01-29

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