DE102013206236A1 - Gasverteiler für Siemens-Reaktor - Google Patents

Gasverteiler für Siemens-Reaktor Download PDF

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Publication number
DE102013206236A1
DE102013206236A1 DE102013206236.2A DE102013206236A DE102013206236A1 DE 102013206236 A1 DE102013206236 A1 DE 102013206236A1 DE 102013206236 A DE102013206236 A DE 102013206236A DE 102013206236 A1 DE102013206236 A1 DE 102013206236A1
Authority
DE
Germany
Prior art keywords
gas
reactor
gas distributor
exhaust
distributor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102013206236.2A
Other languages
German (de)
English (en)
Inventor
Friedrich Popp
Christian Kutza
Martin Röckl
Tobias Weiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacker Chemie AG
Original Assignee
Wacker Chemie AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=50424198&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE102013206236(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Wacker Chemie AG filed Critical Wacker Chemie AG
Priority to DE102013206236.2A priority Critical patent/DE102013206236A1/de
Priority to CN201480013844.8A priority patent/CN105189351A/zh
Priority to CA2901262A priority patent/CA2901262C/en
Priority to JP2016506830A priority patent/JP6165965B2/ja
Priority to US14/782,855 priority patent/US10525426B2/en
Priority to MYPI2015001954A priority patent/MY177669A/en
Priority to PCT/EP2014/055472 priority patent/WO2014166711A1/de
Priority to KR1020157024193A priority patent/KR101812759B1/ko
Priority to CN201811529257.0A priority patent/CN109928396A/zh
Priority to EP14714617.9A priority patent/EP2984035B1/de
Priority to TW103111431A priority patent/TWI516445B/zh
Publication of DE102013206236A1 publication Critical patent/DE102013206236A1/de
Priority to SA515361267A priority patent/SA515361267B1/ar
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B01J4/002—Nozzle-type elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/20—Arrangements of several outlets along elongated bodies, e.g. perforated pipes or troughs, e.g. spray booms; Outlet elements therefor
    • B05B1/205—Arrangements of several outlets along elongated bodies, e.g. perforated pipes or troughs, e.g. spray booms; Outlet elements therefor characterised by the longitudinal shape of the elongated body
    • B05B1/207—Arrangements of several outlets along elongated bodies, e.g. perforated pipes or troughs, e.g. spray booms; Outlet elements therefor characterised by the longitudinal shape of the elongated body the elongated body being a closed loop
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
DE102013206236.2A 2013-04-09 2013-04-09 Gasverteiler für Siemens-Reaktor Withdrawn DE102013206236A1 (de)

Priority Applications (12)

Application Number Priority Date Filing Date Title
DE102013206236.2A DE102013206236A1 (de) 2013-04-09 2013-04-09 Gasverteiler für Siemens-Reaktor
EP14714617.9A EP2984035B1 (de) 2013-04-09 2014-03-19 Gasverteiler für siemens-reaktor
PCT/EP2014/055472 WO2014166711A1 (de) 2013-04-09 2014-03-19 Gasverteiler für siemens-reaktor
CA2901262A CA2901262C (en) 2013-04-09 2014-03-19 Gas distributor for a siemens reactor
JP2016506830A JP6165965B2 (ja) 2013-04-09 2014-03-19 シーメンス炉用のガス分配器
US14/782,855 US10525426B2 (en) 2013-04-09 2014-03-19 Gas distributor for a Siemens reactor
MYPI2015001954A MY177669A (en) 2013-04-09 2014-03-19 Gas distributor for a siemens reactor
CN201480013844.8A CN105189351A (zh) 2013-04-09 2014-03-19 西门子反应器的气体分配器
KR1020157024193A KR101812759B1 (ko) 2013-04-09 2014-03-19 지멘스 반응기용 가스 분배 장치
CN201811529257.0A CN109928396A (zh) 2013-04-09 2014-03-19 气体分配器及包括它的用于多晶体硅沉积的反应器
TW103111431A TWI516445B (zh) 2013-04-09 2014-03-27 供西門子反應器（Ｓｉｅｍｅｎｓ ｒｅａｃｔｏｒ）用之氣體分配器
SA515361267A SA515361267B1 (ar) 2013-04-09 2015-10-05 موزع غاز لمفاعل سيمنز

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013206236.2A DE102013206236A1 (de) 2013-04-09 2013-04-09 Gasverteiler für Siemens-Reaktor

Publications (1)

Publication Number Publication Date
DE102013206236A1 true DE102013206236A1 (de) 2014-10-09

Family

ID=50424198

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013206236.2A Withdrawn DE102013206236A1 (de) 2013-04-09 2013-04-09 Gasverteiler für Siemens-Reaktor

Country Status (11)

Country Link
US (1) US10525426B2 (ja)
EP (1) EP2984035B1 (ja)
JP (1) JP6165965B2 (ja)
KR (1) KR101812759B1 (ja)
CN (2) CN105189351A (ja)
CA (1) CA2901262C (ja)
DE (1) DE102013206236A1 (ja)
MY (1) MY177669A (ja)
SA (1) SA515361267B1 (ja)
TW (1) TWI516445B (ja)
WO (1) WO2014166711A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015219925A1 (de) 2015-10-14 2017-04-20 Wacker Chemie Ag Reaktor zur Abscheidung von polykristallinem Silicium
US11512001B2 (en) 2017-06-16 2022-11-29 Tokuyama Corporation Method for producing polysilicon

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4805556A (en) 1988-01-15 1989-02-21 Union Carbide Corporation Reactor system and method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane
US20110058988A1 (en) 2009-09-04 2011-03-10 G+R Technology Group Ag Reactor for the Production of Polycrystalline Silicon
US20110305604A1 (en) 2009-01-22 2011-12-15 Schmid Silicon Technology Gmbh Reactor for producing polycrystalline silicon using the monosilane process

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3188173A (en) * 1953-08-06 1965-06-08 British Titan Products Process for the production of oxides of al, si and ti
US3796420A (en) * 1972-03-30 1974-03-12 Pennsylvania Engineering Corp Steel conversion apparatus
FR2582540B1 (fr) 1985-06-03 1992-05-22 Charbonnages De France Dispositif de controle de l'alimentation en gaz de fluidisation des ouvertures de soufflage d'une grille de fluidisation et grille munie de ce dispositif
US5391356A (en) 1993-03-26 1995-02-21 International Paper Company Flow distributor for a fluidized bed reactor
JP2002241120A (ja) 2001-02-15 2002-08-28 Sumitomo Titanium Corp 多結晶シリコン製造用反応炉及び多結晶シリコン製造方法
US7935327B2 (en) 2006-08-30 2011-05-03 Hemlock Semiconductor Corporation Silicon production with a fluidized bed reactor integrated into a siemens-type process
CN104357807B (zh) * 2008-03-26 2019-06-28 Oci有限公司 在化学气相沉积反应器中用于配气的系统和方法
CN103058194B (zh) 2008-09-16 2015-02-25 储晞 生产高纯颗粒硅的反应器
EP2394955B1 (en) * 2009-02-04 2016-12-07 Tokuyama Corporation Process for producing polycrystalline silicon
DE102009035952A1 (de) 2009-08-03 2011-02-10 Graeber Engineering Consultants Gmbh Flansch für ein CVD-Reaktorgehäuse, Verwendung einer Kamera bei einem CVD-Verfahren sowie CVD-Verfahren zur Erzeugung von Siliziumstangen
JP5655429B2 (ja) * 2009-08-28 2015-01-21 三菱マテリアル株式会社 多結晶シリコンの製造方法、製造装置及び多結晶シリコン
DE102009043947B4 (de) * 2009-09-04 2011-07-07 G+R Technology Group AG, 93128 Anlage zur Herstellung von polykristallinem Silizium mit Vorrichtung zum Ausleiten gasförmiger Messproben
WO2011065839A1 (en) * 2009-11-25 2011-06-03 Dynatec Engineering As Reactor and method for production of silicon
US8993056B2 (en) * 2009-12-17 2015-03-31 Savi Research, Inc. Method of gas distribution and nozzle design in the improved chemical vapor deposition of polysilicon reactor
CN102686307A (zh) * 2009-12-29 2012-09-19 Memc电子材料有限公司 使用外围四氯化硅减少硅在反应器壁上的沉积的方法
WO2011116273A2 (en) * 2010-03-19 2011-09-22 Gt Solar Incorporated System and method for polycrystalline silicon deposition
CN102424387B (zh) * 2011-09-06 2012-12-19 江苏中圣高科技产业有限公司 均温型多晶硅还原炉

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4805556A (en) 1988-01-15 1989-02-21 Union Carbide Corporation Reactor system and method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane
US20110305604A1 (en) 2009-01-22 2011-12-15 Schmid Silicon Technology Gmbh Reactor for producing polycrystalline silicon using the monosilane process
US20110058988A1 (en) 2009-09-04 2011-03-10 G+R Technology Group Ag Reactor for the Production of Polycrystalline Silicon

Also Published As

Publication number Publication date
TW201438994A (zh) 2014-10-16
US10525426B2 (en) 2020-01-07
MY177669A (en) 2020-09-23
CN109928396A (zh) 2019-06-25
CA2901262C (en) 2017-12-12
KR101812759B1 (ko) 2017-12-27
EP2984035A1 (de) 2016-02-17
JP6165965B2 (ja) 2017-07-19
CN105189351A (zh) 2015-12-23
CA2901262A1 (en) 2014-10-16
US20160067663A1 (en) 2016-03-10
SA515361267B1 (ar) 2016-10-16
EP2984035B1 (de) 2017-08-30
TWI516445B (zh) 2016-01-11
JP2016521238A (ja) 2016-07-21
WO2014166711A1 (de) 2014-10-16
KR20150115920A (ko) 2015-10-14

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