DE102012224005B4 - Verfahren zur Herstellung einer homogenen Lichtverteilung - Google Patents

Verfahren zur Herstellung einer homogenen Lichtverteilung Download PDF

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Publication number
DE102012224005B4
DE102012224005B4 DE102012224005.5A DE102012224005A DE102012224005B4 DE 102012224005 B4 DE102012224005 B4 DE 102012224005B4 DE 102012224005 A DE102012224005 A DE 102012224005A DE 102012224005 B4 DE102012224005 B4 DE 102012224005B4
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Prior art keywords
light
exposure field
pixels
illuminated
beamer
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DE102012224005.5A
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German (de)
English (en)
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DE102012224005A1 (de
Inventor
Christian Bauer
Marco Spatz
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Kulzer GmbH
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Heraeus Kulzer GmbH
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Priority to DE102012224005.5A priority Critical patent/DE102012224005B4/de
Application filed by Heraeus Kulzer GmbH filed Critical Heraeus Kulzer GmbH
Priority to JP2015548447A priority patent/JP6436912B2/ja
Priority to CA2888844A priority patent/CA2888844A1/en
Priority to US14/654,184 priority patent/US9914265B2/en
Priority to EP13814504.0A priority patent/EP2934858B1/de
Priority to CN201380067167.3A priority patent/CN104853902A/zh
Priority to BR112015012368A priority patent/BR112015012368A2/pt
Priority to KR1020157014504A priority patent/KR101860617B1/ko
Priority to AU2013361779A priority patent/AU2013361779B2/en
Priority to PCT/EP2013/076902 priority patent/WO2014095864A1/de
Publication of DE102012224005A1 publication Critical patent/DE102012224005A1/de
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/277—Arrangements for irradiation using multiple radiation means, e.g. micromirrors or multiple light-emitting diodes [LED]
    • B29C64/282—Arrangements for irradiation using multiple radiation means, e.g. micromirrors or multiple light-emitting diodes [LED] of the same type, e.g. using different energy levels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/286—Optical filters, e.g. masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30—Auxiliary operations or equipment
    • B29C64/386—Data acquisition or data processing for additive manufacturing
    • B29C64/393—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70416—2.5D lithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection Apparatus (AREA)
  • Micromachines (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Transforming Electric Information Into Light Information (AREA)
DE102012224005.5A 2012-12-20 2012-12-20 Verfahren zur Herstellung einer homogenen Lichtverteilung Active DE102012224005B4 (de)

Priority Applications (10)

Application Number Priority Date Filing Date Title
DE102012224005.5A DE102012224005B4 (de) 2012-12-20 2012-12-20 Verfahren zur Herstellung einer homogenen Lichtverteilung
AU2013361779A AU2013361779B2 (en) 2012-12-20 2013-12-17 Method for producing a homogeneous light distribution
US14/654,184 US9914265B2 (en) 2012-12-20 2013-12-17 Method for producing a homogeneous light distribution
EP13814504.0A EP2934858B1 (de) 2012-12-20 2013-12-17 Verfahren zur herstellung einer homogenen lichtverteilung
CN201380067167.3A CN104853902A (zh) 2012-12-20 2013-12-17 用于产生均匀的光分布的方法
BR112015012368A BR112015012368A2 (pt) 2012-12-20 2013-12-17 processos para produção de uma distribuição de luz homogênea
JP2015548447A JP6436912B2 (ja) 2012-12-20 2013-12-17 均一な光分布を形成する方法
CA2888844A CA2888844A1 (en) 2012-12-20 2013-12-17 Method for producing a homogeneous light distribution
PCT/EP2013/076902 WO2014095864A1 (de) 2012-12-20 2013-12-17 Verfahren zur herstellung einer homogenen lichtverteilung
KR1020157014504A KR101860617B1 (ko) 2012-12-20 2013-12-17 균일한 광 분포 생성 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012224005.5A DE102012224005B4 (de) 2012-12-20 2012-12-20 Verfahren zur Herstellung einer homogenen Lichtverteilung

Publications (2)

Publication Number Publication Date
DE102012224005A1 DE102012224005A1 (de) 2014-06-26
DE102012224005B4 true DE102012224005B4 (de) 2015-07-23

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DE102012224005.5A Active DE102012224005B4 (de) 2012-12-20 2012-12-20 Verfahren zur Herstellung einer homogenen Lichtverteilung

Country Status (10)

Country Link
US (1) US9914265B2 (enExample)
EP (1) EP2934858B1 (enExample)
JP (1) JP6436912B2 (enExample)
KR (1) KR101860617B1 (enExample)
CN (1) CN104853902A (enExample)
AU (1) AU2013361779B2 (enExample)
BR (1) BR112015012368A2 (enExample)
CA (1) CA2888844A1 (enExample)
DE (1) DE102012224005B4 (enExample)
WO (1) WO2014095864A1 (enExample)

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CN108698883A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 石英玻璃制备中的二氧化硅的喷雾造粒
TWI733723B (zh) 2015-12-18 2021-07-21 德商何瑞斯廓格拉斯公司 不透明石英玻璃體的製備
CN108698894A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 在多腔式烘箱中制备石英玻璃体
KR20180094087A (ko) 2015-12-18 2018-08-22 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 실리카 과립으로부터 실리카 유리 제품의 제조
WO2017103153A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt
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CN109153593A (zh) 2015-12-18 2019-01-04 贺利氏石英玻璃有限两合公司 合成石英玻璃粉粒的制备
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CN115464159B (zh) * 2017-05-11 2024-07-16 速尔特技术有限公司 用于增材制造的图案化光的开关站射束路由
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CN107891596A (zh) * 2017-12-15 2018-04-10 博纳云智（天津）科技有限公司 一种dlp光固化3d打印机的光强均匀校正方法
CN110394980A (zh) * 2018-04-24 2019-11-01 三纬国际立体列印科技股份有限公司 立体打印系统
US10503076B1 (en) * 2018-08-29 2019-12-10 Applied Materials, Inc. Reserving spatial light modulator sections to address field non-uniformities
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Also Published As

Publication number Publication date
WO2014095864A1 (de) 2014-06-26
DE102012224005A1 (de) 2014-06-26
KR20150096386A (ko) 2015-08-24
US20150328834A1 (en) 2015-11-19
AU2013361779B2 (en) 2017-01-19
JP2016508232A (ja) 2016-03-17
AU2013361779A1 (en) 2015-06-04
CN104853902A (zh) 2015-08-19
EP2934858A1 (de) 2015-10-28
JP6436912B2 (ja) 2018-12-12
CA2888844A1 (en) 2014-06-26
WO2014095864A9 (de) 2014-08-14
KR101860617B1 (ko) 2018-05-23
BR112015012368A2 (pt) 2017-07-11
EP2934858B1 (de) 2023-02-08
US9914265B2 (en) 2018-03-13

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