DE102012210309A1 - Positionsmesseinrichtung - Google Patents

Positionsmesseinrichtung Download PDF

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Publication number
DE102012210309A1
DE102012210309A1 DE102012210309A DE102012210309A DE102012210309A1 DE 102012210309 A1 DE102012210309 A1 DE 102012210309A1 DE 102012210309 A DE102012210309 A DE 102012210309A DE 102012210309 A DE102012210309 A DE 102012210309A DE 102012210309 A1 DE102012210309 A1 DE 102012210309A1
Authority
DE
Germany
Prior art keywords
scanning units
machine component
measuring device
measuring
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102012210309A
Other languages
German (de)
English (en)
Inventor
Ralf Bihr
Jörg Drescher
Wolfgang Holzapfel
Markus Meissner
Bernhard Musch
Bernhard Pletschacher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE102012210309A priority Critical patent/DE102012210309A1/de
Priority to EP13169683.3A priority patent/EP2679962B1/de
Priority to US13/919,780 priority patent/US8988691B2/en
Priority to CN201310240064.4A priority patent/CN103512493B/zh
Priority to JP2013128269A priority patent/JP6250310B2/ja
Publication of DE102012210309A1 publication Critical patent/DE102012210309A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
DE102012210309A 2012-06-19 2012-06-19 Positionsmesseinrichtung Withdrawn DE102012210309A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE102012210309A DE102012210309A1 (de) 2012-06-19 2012-06-19 Positionsmesseinrichtung
EP13169683.3A EP2679962B1 (de) 2012-06-19 2013-05-29 Positionsmesseinrichtung
US13/919,780 US8988691B2 (en) 2012-06-19 2013-06-17 Position-measuring device
CN201310240064.4A CN103512493B (zh) 2012-06-19 2013-06-17 位置测量装置
JP2013128269A JP6250310B2 (ja) 2012-06-19 2013-06-19 位置測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012210309A DE102012210309A1 (de) 2012-06-19 2012-06-19 Positionsmesseinrichtung

Publications (1)

Publication Number Publication Date
DE102012210309A1 true DE102012210309A1 (de) 2013-12-19

Family

ID=48534246

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102012210309A Withdrawn DE102012210309A1 (de) 2012-06-19 2012-06-19 Positionsmesseinrichtung

Country Status (5)

Country Link
US (1) US8988691B2 (enExample)
EP (1) EP2679962B1 (enExample)
JP (1) JP6250310B2 (enExample)
CN (1) CN103512493B (enExample)
DE (1) DE102012210309A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015065395A (ja) 2013-08-28 2015-04-09 矢崎総業株式会社 ジャンパモジュール搭載回路基板および回路基板組立体
DE102015219810A1 (de) * 2015-10-13 2017-04-13 Dr. Johannes Heidenhain Gmbh X-Y-Tisch mit einer Positionsmesseinrichtung
DE102016206144A1 (de) 2016-04-13 2017-10-19 Dr. Johannes Heidenhain Gmbh Positionsmessanordnung und Verfahren zum Betrieb einer Positionsmessanordnung
JP6266144B1 (ja) * 2017-01-27 2018-01-24 Dmg森精機株式会社 振動状態検出装置及び振動状態検出装置を備えた工作機械
CN108613647B (zh) * 2018-07-02 2020-02-25 燕山大学 三自由度平面并联机构动平台位姿检测装置
CN115307724B (zh) * 2022-08-15 2025-07-04 重庆医科大学 一种自动化测量声场方法
WO2025219040A1 (en) * 2024-04-15 2025-10-23 Asml Netherlands B.V. Positioning measurement correction

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5573581A (en) 1995-10-10 1996-11-12 Samsung Display Devices Co., Ltd. Coating composition for treating color sensitivity of a color picture tube
US20070195296A1 (en) 2006-02-22 2007-08-23 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7573581B2 (en) 2005-09-12 2009-08-11 Dr. Johannes Heidenhain Gmbh Position-measuring device
US20110317142A1 (en) 2010-06-24 2011-12-29 Asml Netherlands B.V. Measurement system, method and litographic apparatus

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239108A1 (de) * 1982-10-22 1984-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmessverfahren und einrichtungen zur durchfuehrung des verfahrens
EP0896206B1 (de) * 1997-08-07 2002-12-11 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine optische Positionsmesseinrichtung
US7515281B2 (en) * 2005-04-08 2009-04-07 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7542863B2 (en) * 2005-11-09 2009-06-02 Dr. Johannes Heidenhain Gmbh Position measuring system
EP1983555B1 (en) * 2006-01-19 2014-05-28 Nikon Corporation Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus and device manufacturing method
DE102006048628A1 (de) * 2006-10-13 2008-04-17 Siemens Ag Messelement mit einer als Maßverkörperung fungierenden Spur und korrespondierendes, mit einem solchen Messelement ausführbares Messverfahren
US8237916B2 (en) * 2007-12-28 2012-08-07 Nikon Corporation Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method
DE102008022027A1 (de) * 2008-05-02 2009-11-05 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US8786829B2 (en) * 2008-05-13 2014-07-22 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
US8314941B2 (en) * 2008-12-05 2012-11-20 Micronic Mydata AB Cartesian coordinate measurement for rotating system
CN101566800B (zh) * 2009-02-27 2011-05-11 上海微电子装备有限公司 一种用于光刻设备的对准系统和对准方法
US8493547B2 (en) * 2009-08-25 2013-07-23 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
DE102010029211A1 (de) * 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN103246172B (zh) * 2012-02-10 2016-12-28 约翰内斯﹒海德汉博士有限公司 具有位置测量装置的多个扫描单元的装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5573581A (en) 1995-10-10 1996-11-12 Samsung Display Devices Co., Ltd. Coating composition for treating color sensitivity of a color picture tube
US7573581B2 (en) 2005-09-12 2009-08-11 Dr. Johannes Heidenhain Gmbh Position-measuring device
US20070195296A1 (en) 2006-02-22 2007-08-23 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US20110317142A1 (en) 2010-06-24 2011-12-29 Asml Netherlands B.V. Measurement system, method and litographic apparatus

Also Published As

Publication number Publication date
JP6250310B2 (ja) 2017-12-20
CN103512493B (zh) 2017-07-04
CN103512493A (zh) 2014-01-15
US8988691B2 (en) 2015-03-24
US20130335750A1 (en) 2013-12-19
EP2679962A1 (de) 2014-01-01
EP2679962B1 (de) 2016-11-23
JP2014002152A (ja) 2014-01-09

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Legal Events

Date Code Title Description
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee