DE102010033373A1 - Lecksuchgerät - Google Patents

Lecksuchgerät Download PDF

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Publication number
DE102010033373A1
DE102010033373A1 DE102010033373A DE102010033373A DE102010033373A1 DE 102010033373 A1 DE102010033373 A1 DE 102010033373A1 DE 102010033373 A DE102010033373 A DE 102010033373A DE 102010033373 A DE102010033373 A DE 102010033373A DE 102010033373 A1 DE102010033373 A1 DE 102010033373A1
Authority
DE
Germany
Prior art keywords
pumping
pump
test
leak detector
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102010033373A
Other languages
German (de)
English (en)
Inventor
Ulrich Döbler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Priority to DE102010033373A priority Critical patent/DE102010033373A1/de
Priority to PCT/EP2011/062472 priority patent/WO2012016838A1/de
Priority to JP2013522188A priority patent/JP2013532833A/ja
Priority to EP11736343.2A priority patent/EP2601498B1/de
Priority to BR112013002706-1A priority patent/BR112013002706B1/pt
Priority to US13/813,575 priority patent/US9316559B2/en
Priority to CN201180038350.1A priority patent/CN103119413B/zh
Priority to RU2013109133/28A priority patent/RU2567403C2/ru
Publication of DE102010033373A1 publication Critical patent/DE102010033373A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0269—Surge control by changing flow path between different stages or between a plurality of compressors; load distribution between compressors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
DE102010033373A 2010-08-04 2010-08-04 Lecksuchgerät Withdrawn DE102010033373A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE102010033373A DE102010033373A1 (de) 2010-08-04 2010-08-04 Lecksuchgerät
PCT/EP2011/062472 WO2012016838A1 (de) 2010-08-04 2011-07-20 Lecksuchgerät
JP2013522188A JP2013532833A (ja) 2010-08-04 2011-07-20 漏れ検出装置
EP11736343.2A EP2601498B1 (de) 2010-08-04 2011-07-20 Lecksuchgerät
BR112013002706-1A BR112013002706B1 (pt) 2010-08-04 2011-07-20 Aparelho de detecção de vazamentos
US13/813,575 US9316559B2 (en) 2010-08-04 2011-07-20 Leak detection appliance
CN201180038350.1A CN103119413B (zh) 2010-08-04 2011-07-20 渗漏检测装置
RU2013109133/28A RU2567403C2 (ru) 2010-08-04 2011-07-20 Течеискатель

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010033373A DE102010033373A1 (de) 2010-08-04 2010-08-04 Lecksuchgerät

Publications (1)

Publication Number Publication Date
DE102010033373A1 true DE102010033373A1 (de) 2012-02-09

Family

ID=44543198

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102010033373A Withdrawn DE102010033373A1 (de) 2010-08-04 2010-08-04 Lecksuchgerät

Country Status (8)

Country Link
US (1) US9316559B2 (zh)
EP (1) EP2601498B1 (zh)
JP (1) JP2013532833A (zh)
CN (1) CN103119413B (zh)
BR (1) BR112013002706B1 (zh)
DE (1) DE102010033373A1 (zh)
RU (1) RU2567403C2 (zh)
WO (1) WO2012016838A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140123732A1 (en) * 2011-07-14 2014-05-08 Oerlikon Leybold Vaccuum GmbH Leak detection device and method for checking objects for fluid tightness by means of a leak detection device
FR3070489A1 (fr) * 2017-08-29 2019-03-01 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
RU2644024C1 (ru) * 2017-01-11 2018-02-07 Анатолий Константинович Дриндрожик Установка для контроля герметичности с вакуумной рамкой
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
GB2581799B (en) * 2019-02-26 2021-08-11 Edwards Ltd Determining pressure of gas pumped by a turbomolecular pump
US20220316978A1 (en) * 2021-03-31 2022-10-06 Packaging Technologies and Inspection, LLC System and method for dynamic signal processing for vacuum decay leak detection
FR3121749B1 (fr) * 2021-04-13 2023-10-13 Pfeiffer Vacuum Système de détection de fuites perfectionné par reniflage
FR3121750B1 (fr) * 2021-04-13 2023-10-13 Pfeiffer Vacuum Système de détection de fuites perfectionné par aspersion
WO2024094566A1 (en) 2022-10-31 2024-05-10 Credoxys GmbH Indacene and azaindacene compounds and higher homologues and the use thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919599A (en) * 1988-06-01 1990-04-24 Leybold Aktiengesellschaft Pumping system for a leak detecting device
DE4228313A1 (de) 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
EP1008841B1 (fr) 1998-12-10 2007-04-25 Alcatel Lucent Vitesse variable sur le pompage primaire d'un détecteur de fuites par gaz traceur

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH025107Y2 (zh) * 1985-09-19 1990-02-07
US4735084A (en) * 1985-10-01 1988-04-05 Varian Associates, Inc. Method and apparatus for gross leak detection
DE4229313A1 (de) 1992-09-02 1994-03-03 Betr Forsch Inst Angew Forsch Verfahren und Vorrichtung zur hochgenauen Abstandsmessung von Oberflächen
US5870199A (en) 1992-09-02 1999-02-09 Betriebsforschungsinstitut Vdeh Institut Fur Angewandte Forschung Gmbh Method and apparatus for highly accurate distance measurement with respect to surfaces
JP3390506B2 (ja) * 1993-12-24 2003-03-24 株式会社アルバック ガス漏れ検査装置
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE19522466A1 (de) * 1995-06-21 1997-01-02 Leybold Ag Lecksuchgerät mit Vorvakuumpumpe
DE19638506A1 (de) * 1996-09-20 1998-03-26 Leybold Vakuum Gmbh Verfahren zur Untersuchung einer Mehrzahl ähnlicher Prüflinge auf Lecks sowie für die Durchführung dieses Verfahrens geeigneter Lecksucher
JPH11326108A (ja) * 1998-05-07 1999-11-26 Shimadzu Corp ヘリウムリークディテクタ
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
DE10319633A1 (de) * 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
GB0411426D0 (en) * 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement
DE102005008887A1 (de) * 2005-02-26 2006-08-31 Leybold Vacuum Gmbh Einwellige Vakuum-Verdränderpumpe
DE102006047856A1 (de) * 2006-10-10 2008-04-17 Inficon Gmbh Schnüffellecksucher
DE102006056215A1 (de) 2006-11-29 2008-06-05 Inficon Gmbh Schnüffellecksuchgerät
WO2012104387A1 (de) * 2011-02-03 2012-08-09 Oerlikon Leybold Vacuum Gmbh Lecksucheinrichtung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919599A (en) * 1988-06-01 1990-04-24 Leybold Aktiengesellschaft Pumping system for a leak detecting device
DE4228313A1 (de) 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
EP1008841B1 (fr) 1998-12-10 2007-04-25 Alcatel Lucent Vitesse variable sur le pompage primaire d'un détecteur de fuites par gaz traceur

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140123732A1 (en) * 2011-07-14 2014-05-08 Oerlikon Leybold Vaccuum GmbH Leak detection device and method for checking objects for fluid tightness by means of a leak detection device
US9841342B2 (en) * 2011-07-14 2017-12-12 Leybold Gmbh Leak detection device and method for checking objects for fluid tightness by means of a leak detection device
FR3070489A1 (fr) * 2017-08-29 2019-03-01 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
WO2019042868A1 (fr) * 2017-08-29 2019-03-07 Pfeiffer Vacuum Détecteur de fuites et procédé de détection de fuites pour le contrôle de l'étanchéité d'objets à tester
CN111033207A (zh) * 2017-08-29 2020-04-17 普发真空公司 用于对物体进行泄漏检测的泄露检测器和泄漏检测方法
US11519811B2 (en) 2017-08-29 2022-12-06 Pfeiffer Vacuum Leak detector and leak detection method for leak-testing objects

Also Published As

Publication number Publication date
US20130186183A1 (en) 2013-07-25
EP2601498A1 (de) 2013-06-12
WO2012016838A1 (de) 2012-02-09
RU2013109133A (ru) 2014-09-10
BR112013002706B1 (pt) 2020-02-18
CN103119413B (zh) 2015-05-27
RU2567403C2 (ru) 2015-11-10
JP2013532833A (ja) 2013-08-19
US9316559B2 (en) 2016-04-19
CN103119413A (zh) 2013-05-22
BR112013002706A2 (pt) 2016-05-31
EP2601498B1 (de) 2015-09-23

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Legal Events

Date Code Title Description
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee