BR112013002706A2 - aparelho de detecção de vazamentos - Google Patents

aparelho de detecção de vazamentos

Info

Publication number
BR112013002706A2
BR112013002706A2 BR112013002706A BR112013002706A BR112013002706A2 BR 112013002706 A2 BR112013002706 A2 BR 112013002706A2 BR 112013002706 A BR112013002706 A BR 112013002706A BR 112013002706 A BR112013002706 A BR 112013002706A BR 112013002706 A2 BR112013002706 A2 BR 112013002706A2
Authority
BR
Brazil
Prior art keywords
test
leak detection
pump
high vacuum
vacuum
Prior art date
Application number
BR112013002706A
Other languages
English (en)
Other versions
BR112013002706B1 (pt
Inventor
Ulrich Döbler
Original Assignee
Inficon Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Gmbh filed Critical Inficon Gmbh
Publication of BR112013002706A2 publication Critical patent/BR112013002706A2/pt
Publication of BR112013002706B1 publication Critical patent/BR112013002706B1/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0269—Surge control by changing flow path between different stages or between a plurality of compressors; load distribution between compressors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

aparelho de detecção de vazamentos. a presente invenção referee-se ao aparelho de detecção de vazamentos que possui uma entrada de teste (10), na qual pode ser ligada uma câmara de teste, que contém o espécime de teste. uma bomba de vácuo alto (12) gera um vácuo alto em um detector de gás de teste (11). uma bomba de vácuo preliminar (20) contém pelo menos dois estágios de bomba (22, 23). para evacuação da câmara de teste, os estágios de bomba (22, 23) são operados em operação em paralelo, sendo que sendo que as capacidades de sucção dos mesmos são somadas. depois de ser atingido o vácuo necessário, os estágios de bomba (22, 23) são operados em série, para gerar o alto vácuo necessário - que é exigido para uma alta sensibilidade de detecção - no detector de gás de teste (11).
BR112013002706-1A 2010-08-04 2011-07-20 Aparelho de detecção de vazamentos BR112013002706B1 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010033373A DE102010033373A1 (de) 2010-08-04 2010-08-04 Lecksuchgerät
DE102010033373.5 2010-08-04
PCT/EP2011/062472 WO2012016838A1 (de) 2010-08-04 2011-07-20 Lecksuchgerät

Publications (2)

Publication Number Publication Date
BR112013002706A2 true BR112013002706A2 (pt) 2016-05-31
BR112013002706B1 BR112013002706B1 (pt) 2020-02-18

Family

ID=44543198

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112013002706-1A BR112013002706B1 (pt) 2010-08-04 2011-07-20 Aparelho de detecção de vazamentos

Country Status (8)

Country Link
US (1) US9316559B2 (pt)
EP (1) EP2601498B1 (pt)
JP (1) JP2013532833A (pt)
CN (1) CN103119413B (pt)
BR (1) BR112013002706B1 (pt)
DE (1) DE102010033373A1 (pt)
RU (1) RU2567403C2 (pt)
WO (1) WO2012016838A1 (pt)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011107334B4 (de) * 2011-07-14 2023-03-16 Leybold Gmbh Lecksucheinrichtung sowie Verfahren zum Überprüfen von Gegenständen auf Dichtigkeit mittels einer Lecksucheinrichtung
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
RU2644024C1 (ru) * 2017-01-11 2018-02-07 Анатолий Константинович Дриндрожик Установка для контроля герметичности с вакуумной рамкой
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
GB2581799B (en) * 2019-02-26 2021-08-11 Edwards Ltd Determining pressure of gas pumped by a turbomolecular pump
US20220316978A1 (en) * 2021-03-31 2022-10-06 Packaging Technologies and Inspection, LLC System and method for dynamic signal processing for vacuum decay leak detection
FR3121750B1 (fr) * 2021-04-13 2023-10-13 Pfeiffer Vacuum Système de détection de fuites perfectionné par aspersion
FR3121749B1 (fr) * 2021-04-13 2023-10-13 Pfeiffer Vacuum Système de détection de fuites perfectionné par reniflage
WO2024094566A1 (en) 2022-10-31 2024-05-10 Credoxys GmbH Indacene and azaindacene compounds and higher homologues and the use thereof

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH025107Y2 (pt) * 1985-09-19 1990-02-07
US4735084A (en) * 1985-10-01 1988-04-05 Varian Associates, Inc. Method and apparatus for gross leak detection
EP0344345B1 (de) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
DE4228313A1 (de) 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
DE4229313A1 (de) 1992-09-02 1994-03-03 Betr Forsch Inst Angew Forsch Verfahren und Vorrichtung zur hochgenauen Abstandsmessung von Oberflächen
US5870199A (en) 1992-09-02 1999-02-09 Betriebsforschungsinstitut Vdeh Institut Fur Angewandte Forschung Gmbh Method and apparatus for highly accurate distance measurement with respect to surfaces
JP3390506B2 (ja) * 1993-12-24 2003-03-24 株式会社アルバック ガス漏れ検査装置
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE19522466A1 (de) * 1995-06-21 1997-01-02 Leybold Ag Lecksuchgerät mit Vorvakuumpumpe
DE19638506A1 (de) * 1996-09-20 1998-03-26 Leybold Vakuum Gmbh Verfahren zur Untersuchung einer Mehrzahl ähnlicher Prüflinge auf Lecks sowie für die Durchführung dieses Verfahrens geeigneter Lecksucher
JPH11326108A (ja) * 1998-05-07 1999-11-26 Shimadzu Corp ヘリウムリークディテクタ
FR2787192B1 (fr) * 1998-12-10 2001-01-05 Cit Alcatel Vitesse variable sur le pompage primaire d'un detecteur de fuites par gaz traceur
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
DE10319633A1 (de) * 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
GB0411426D0 (en) * 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement
DE102005008887A1 (de) * 2005-02-26 2006-08-31 Leybold Vacuum Gmbh Einwellige Vakuum-Verdränderpumpe
DE102006047856A1 (de) * 2006-10-10 2008-04-17 Inficon Gmbh Schnüffellecksucher
DE102006056215A1 (de) 2006-11-29 2008-06-05 Inficon Gmbh Schnüffellecksuchgerät
CN103380358B (zh) * 2011-02-03 2017-03-08 莱宝有限责任公司 检漏装置

Also Published As

Publication number Publication date
RU2567403C2 (ru) 2015-11-10
WO2012016838A1 (de) 2012-02-09
RU2013109133A (ru) 2014-09-10
CN103119413B (zh) 2015-05-27
US20130186183A1 (en) 2013-07-25
JP2013532833A (ja) 2013-08-19
DE102010033373A1 (de) 2012-02-09
US9316559B2 (en) 2016-04-19
EP2601498B1 (de) 2015-09-23
BR112013002706B1 (pt) 2020-02-18
EP2601498A1 (de) 2013-06-12
CN103119413A (zh) 2013-05-22

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according art. 34 industrial property law
B06U Preliminary requirement: requests with searches performed by other patent offices: suspension of the patent application procedure
B09A Decision: intention to grant
B16A Patent or certificate of addition of invention granted

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 20/07/2011, OBSERVADAS AS CONDICOES LEGAIS.