GB2581799B - Determining pressure of gas pumped by a turbomolecular pump - Google Patents

Determining pressure of gas pumped by a turbomolecular pump Download PDF

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Publication number
GB2581799B
GB2581799B GB1902564.2A GB201902564A GB2581799B GB 2581799 B GB2581799 B GB 2581799B GB 201902564 A GB201902564 A GB 201902564A GB 2581799 B GB2581799 B GB 2581799B
Authority
GB
United Kingdom
Prior art keywords
turbomolecular pump
determining pressure
gas pumped
pumped
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1902564.2A
Other versions
GB2581799A (en
GB201902564D0 (en
Inventor
David Chew Andrew
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1902564.2A priority Critical patent/GB2581799B/en
Publication of GB201902564D0 publication Critical patent/GB201902564D0/en
Priority to PCT/GB2020/050447 priority patent/WO2020174227A1/en
Publication of GB2581799A publication Critical patent/GB2581799A/en
Application granted granted Critical
Publication of GB2581799B publication Critical patent/GB2581799B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2270/00—Control
    • F05D2270/01—Purpose of the control system
    • F05D2270/02—Purpose of the control system to control rotational speed (n)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2270/00—Control
    • F05D2270/30—Control parameters, e.g. input parameters
    • F05D2270/301—Pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
GB1902564.2A 2019-02-26 2019-02-26 Determining pressure of gas pumped by a turbomolecular pump Expired - Fee Related GB2581799B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1902564.2A GB2581799B (en) 2019-02-26 2019-02-26 Determining pressure of gas pumped by a turbomolecular pump
PCT/GB2020/050447 WO2020174227A1 (en) 2019-02-26 2020-02-25 Determining pressure of gas pumped by a turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1902564.2A GB2581799B (en) 2019-02-26 2019-02-26 Determining pressure of gas pumped by a turbomolecular pump

Publications (3)

Publication Number Publication Date
GB201902564D0 GB201902564D0 (en) 2019-04-10
GB2581799A GB2581799A (en) 2020-09-02
GB2581799B true GB2581799B (en) 2021-08-11

Family

ID=65998999

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1902564.2A Expired - Fee Related GB2581799B (en) 2019-02-26 2019-02-26 Determining pressure of gas pumped by a turbomolecular pump

Country Status (2)

Country Link
GB (1) GB2581799B (en)
WO (1) WO2020174227A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006342681A (en) * 2005-06-07 2006-12-21 Chiyoda Corp Pressure pulsation analyzer
KR101851874B1 (en) * 2016-12-01 2018-04-25 한국생산기술연구원 Apparatus for measuring flow rate and pressure of axial fan installed in system havig the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010033373A1 (en) * 2010-08-04 2012-02-09 Inficon Gmbh Leak Detector
US9879684B2 (en) * 2012-09-13 2018-01-30 Kla-Tencor Corporation Apparatus and method for shielding a controlled pressure environment
JP6809381B2 (en) * 2017-05-30 2021-01-06 株式会社島津製作所 Controllers for vacuum pumps, vacuum exhaust systems and exhaust systems

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006342681A (en) * 2005-06-07 2006-12-21 Chiyoda Corp Pressure pulsation analyzer
KR101851874B1 (en) * 2016-12-01 2018-04-25 한국생산기술연구원 Apparatus for measuring flow rate and pressure of axial fan installed in system havig the same

Also Published As

Publication number Publication date
GB2581799A (en) 2020-09-02
GB201902564D0 (en) 2019-04-10
WO2020174227A1 (en) 2020-09-03

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20230226