GB202215355D0 - Turbomolecular pump - Google Patents

Turbomolecular pump

Info

Publication number
GB202215355D0
GB202215355D0 GBGB2215355.5A GB202215355A GB202215355D0 GB 202215355 D0 GB202215355 D0 GB 202215355D0 GB 202215355 A GB202215355 A GB 202215355A GB 202215355 D0 GB202215355 D0 GB 202215355D0
Authority
GB
United Kingdom
Prior art keywords
turbomolecular pump
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB2215355.5A
Other versions
GB2623527A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB2215355.5A priority Critical patent/GB2623527A/en
Publication of GB202215355D0 publication Critical patent/GB202215355D0/en
Priority to PCT/GB2023/052702 priority patent/WO2024084206A1/en
Publication of GB2623527A publication Critical patent/GB2623527A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB2215355.5A 2022-10-18 2022-10-18 Turbomolecular pump Pending GB2623527A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2215355.5A GB2623527A (en) 2022-10-18 2022-10-18 Turbomolecular pump
PCT/GB2023/052702 WO2024084206A1 (en) 2022-10-18 2023-10-18 Turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2215355.5A GB2623527A (en) 2022-10-18 2022-10-18 Turbomolecular pump

Publications (2)

Publication Number Publication Date
GB202215355D0 true GB202215355D0 (en) 2022-11-30
GB2623527A GB2623527A (en) 2024-04-24

Family

ID=84818325

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2215355.5A Pending GB2623527A (en) 2022-10-18 2022-10-18 Turbomolecular pump

Country Status (2)

Country Link
GB (1) GB2623527A (en)
WO (1) WO2024084206A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006037187A1 (en) * 2006-08-09 2008-02-21 Pfeiffer Vacuum Gmbh Arrangement for supporting a shaft of a vacuum pump
JP6295773B2 (en) * 2014-03-27 2018-03-20 株式会社島津製作所 Vacuum pump
GB2545423B (en) * 2015-12-14 2019-06-26 Edwards Ltd Vacuum pump
GB2556913B (en) * 2016-11-25 2019-09-25 Edwards Ltd Vacuum pump bearing holders
EP3617523A1 (en) * 2019-02-12 2020-03-04 Pfeiffer Vacuum Gmbh Vacuum device and vacuum system

Also Published As

Publication number Publication date
WO2024084206A1 (en) 2024-04-25
GB2623527A (en) 2024-04-24

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