DE102007024902B8 - Vorrichtung mit Membranstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung - Google Patents

Vorrichtung mit Membranstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung Download PDF

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Publication number
DE102007024902B8
DE102007024902B8 DE200710024902 DE102007024902A DE102007024902B8 DE 102007024902 B8 DE102007024902 B8 DE 102007024902B8 DE 200710024902 DE200710024902 DE 200710024902 DE 102007024902 A DE102007024902 A DE 102007024902A DE 102007024902 B8 DE102007024902 B8 DE 102007024902B8
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Germany
Prior art keywords
producing
detection
thermal radiation
membrane structure
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE200710024902
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German (de)
English (en)
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DE102007024902A1 (de
DE102007024902B4 (de
Inventor
Matthias Schreiter
Christian Paulus
Carsten Giebeler
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Pyreos Ltd
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Pyreos Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE200710024902 priority Critical patent/DE102007024902B8/de
Application filed by Pyreos Ltd filed Critical Pyreos Ltd
Priority to KR1020097027210A priority patent/KR101612400B1/ko
Priority to RU2009144001/28A priority patent/RU2468346C2/ru
Priority to BRPI0812099-4A priority patent/BRPI0812099B1/pt
Priority to JP2010509728A priority patent/JP2010528300A/ja
Priority to US12/601,556 priority patent/US9279730B2/en
Priority to CN2008800235048A priority patent/CN101688810B/zh
Priority to AU2008256413A priority patent/AU2008256413B2/en
Priority to EP20080758829 priority patent/EP2153187B1/de
Priority to PCT/EP2008/004246 priority patent/WO2008145353A1/de
Publication of DE102007024902A1 publication Critical patent/DE102007024902A1/de
Application granted granted Critical
Publication of DE102007024902B4 publication Critical patent/DE102007024902B4/de
Publication of DE102007024902B8 publication Critical patent/DE102007024902B8/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0205—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G01J5/14—Electrical features thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J5/22—Electrical features thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
    • G01J2005/204—Arrays prepared by semiconductor processing, e.g. VLSI
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Micromachines (AREA)
DE200710024902 2007-05-29 2007-05-29 Vorrichtung mit Membranstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung Expired - Fee Related DE102007024902B8 (de)

Priority Applications (10)

Application Number Priority Date Filing Date Title
DE200710024902 DE102007024902B8 (de) 2007-05-29 2007-05-29 Vorrichtung mit Membranstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung
EP20080758829 EP2153187B1 (de) 2007-05-29 2008-05-28 Vorrichtung mit membranstruktur zur detektion von wärmestrahlung, verfahren zum herstellen und verwendung der vorrichtung
BRPI0812099-4A BRPI0812099B1 (pt) 2007-05-29 2008-05-28 Dispositivo apresentado uma estrutura em membrana para detecção de radiação térmica, método de produção e uso do dispositivo.
JP2010509728A JP2010528300A (ja) 2007-05-29 2008-05-28 膜構造体を有する熱放射検出用デバイス、このデバイスの製造方法および使用方法
US12/601,556 US9279730B2 (en) 2007-05-29 2008-05-28 Device having a membrane structure for detecting thermal radiation, and method for production thereof
CN2008800235048A CN101688810B (zh) 2007-05-29 2008-05-28 具有用于检测热辐射的膜结构的装置、所述装置的制造和使用方法
KR1020097027210A KR101612400B1 (ko) 2007-05-29 2008-05-28 막 구조물을 갖춘 열 복사 검출 장치, 그 장치의 제조 방법 및 용도
RU2009144001/28A RU2468346C2 (ru) 2007-05-29 2008-05-28 Устройство с мембранной конструкцией для обнаружения теплового излучения, способ его изготовления и использования
PCT/EP2008/004246 WO2008145353A1 (de) 2007-05-29 2008-05-28 Vorrichtung mit membranstruktur zur detektion von wärmestrahlung, verfahren zum herstellen und verwendung der vorrichtung
AU2008256413A AU2008256413B2 (en) 2007-05-29 2008-05-28 Device having a membrane structure for detecting thermal radiation, method of production and use of the device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200710024902 DE102007024902B8 (de) 2007-05-29 2007-05-29 Vorrichtung mit Membranstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung

Publications (3)

Publication Number Publication Date
DE102007024902A1 DE102007024902A1 (de) 2008-12-11
DE102007024902B4 DE102007024902B4 (de) 2010-08-26
DE102007024902B8 true DE102007024902B8 (de) 2010-12-30

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Family Applications (1)

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DE200710024902 Expired - Fee Related DE102007024902B8 (de) 2007-05-29 2007-05-29 Vorrichtung mit Membranstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung

Country Status (10)

Country Link
US (1) US9279730B2 (https=)
EP (1) EP2153187B1 (https=)
JP (1) JP2010528300A (https=)
KR (1) KR101612400B1 (https=)
CN (1) CN101688810B (https=)
AU (1) AU2008256413B2 (https=)
BR (1) BRPI0812099B1 (https=)
DE (1) DE102007024902B8 (https=)
RU (1) RU2468346C2 (https=)
WO (1) WO2008145353A1 (https=)

Families Citing this family (8)

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Publication number Priority date Publication date Assignee Title
DE102009017845B4 (de) 2009-04-17 2011-07-21 Pyreos Ltd. Infrarotlichtsensor mit hoher Signalspannung und hohem Signal-Rausch-Verhältnis, sowie Infrarotlichtdetektor mit dem Infrarotlichtsensor
DE102009060217B3 (de) 2009-12-23 2011-06-22 Pyreos Ltd. Verfahren zum Herstellen eines Infrarotlichtdetektors
DE102010012701B4 (de) 2010-03-24 2013-10-17 Bundesrepublik Deutschland, vertr.d.d. Bundesministerium für Wirtschaft und Technologie, d.vertr.d.d. Präsidenten der Physikalisch-Technischen Bundesanstalt Mikrokraftsensor
DE102012216618A1 (de) 2012-09-18 2014-03-20 Robert Bosch Gmbh Anordnung von mindestens zwei Wafern zum Detektieren von elektromagnetischer Strahlung und Verfahren zum Herstellen der Anordnung
DE102012217881A1 (de) * 2012-10-01 2014-04-03 Siemens Aktiengesellschaft Sensoranordnung und Herstellungsverfahren
DE102013204763A1 (de) * 2013-03-19 2014-09-25 Robert Bosch Gmbh Mikromechanische Sensorvorrichtung und entsprechendes Herstellungsverfahren
CN107771272B (zh) * 2015-06-01 2021-04-27 首尔伟傲世有限公司 光检测元件以及电子装置
CN108827676B (zh) * 2018-04-25 2020-12-11 合肥美的电冰箱有限公司 散热测量系统及其方法、控制装置

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DE19525071A1 (de) * 1995-07-10 1997-01-16 Siemens Ag Pyroelektrisches Bauelement und Verfahren zur Herstellung
DE19932308A1 (de) * 1999-07-10 2001-01-18 Bosch Gmbh Robert Sensor, insbesondere Thermosensor, und Verfahren zur Herstellung einer weitgehend freitragenden Membran
DE10004216A1 (de) * 2000-02-01 2001-08-09 Siemens Ag Vorrichtung zur Detektion von Wärmestrahlung und Verwendung der Vorrichtung
US6551853B2 (en) * 2000-05-12 2003-04-22 Denso Corporation Sensor having membrane structure and method for manufacturing the same
DE10042945A1 (de) * 2000-08-31 2002-03-28 Siemens Ag Bauelement für Sensoren mit integrierter Elektronik und Verfahren zu seiner Herstellung, sowie Sensor mit integrierter Elektronik
DE10058861A1 (de) * 2000-11-27 2002-06-13 Siemens Ag Infrarotsensor für hochauflösende Infrarot-Detektoranordnungen und Verfahren zu seiner Herstellung
US20050274892A1 (en) * 2004-06-10 2005-12-15 Nec Corporation Bolometer infrared detector and afterimage reduction method
DE202006010085U1 (de) * 2005-06-27 2006-12-28 Hl-Planar Technik Gmbh Vorrichtung zur Detektion elektromagnetischer Wellen
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WO2007054111A1 (de) * 2005-11-10 2007-05-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensor zum erfassen einer elektromagnetischen strahlung

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Publication number Publication date
CN101688810B (zh) 2013-09-18
WO2008145353A1 (de) 2008-12-04
KR101612400B1 (ko) 2016-04-14
KR20100023007A (ko) 2010-03-03
RU2468346C2 (ru) 2012-11-27
US20110006211A1 (en) 2011-01-13
DE102007024902A1 (de) 2008-12-11
EP2153187A1 (de) 2010-02-17
US9279730B2 (en) 2016-03-08
CN101688810A (zh) 2010-03-31
EP2153187B1 (de) 2013-01-16
AU2008256413A1 (en) 2008-12-04
BRPI0812099B1 (pt) 2018-06-19
JP2010528300A (ja) 2010-08-19
BRPI0812099A2 (pt) 2014-11-25
AU2008256413B2 (en) 2013-09-12
DE102007024902B4 (de) 2010-08-26
RU2009144001A (ru) 2011-07-10

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