DE102005038914B8 - Sensor für eine physikalische Grösse, der einen beweglichen Abschnitt aufweist - Google Patents

Sensor für eine physikalische Grösse, der einen beweglichen Abschnitt aufweist Download PDF

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Publication number
DE102005038914B8
DE102005038914B8 DE102005038914A DE102005038914A DE102005038914B8 DE 102005038914 B8 DE102005038914 B8 DE 102005038914B8 DE 102005038914 A DE102005038914 A DE 102005038914A DE 102005038914 A DE102005038914 A DE 102005038914A DE 102005038914 B8 DE102005038914 B8 DE 102005038914B8
Authority
DE
Germany
Prior art keywords
movable portion
physical quantity
quantity sensor
sensor
physical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102005038914A
Other languages
English (en)
Other versions
DE102005038914B4 (de
DE102005038914A1 (de
Inventor
Takeshi Nishio Ito
Minoru Kariya Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Denso Corp
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004237229A external-priority patent/JP4590976B2/ja
Priority claimed from JP2004237230A external-priority patent/JP4438561B2/ja
Application filed by Denso Corp, Nippon Soken Inc filed Critical Denso Corp
Publication of DE102005038914A1 publication Critical patent/DE102005038914A1/de
Publication of DE102005038914B4 publication Critical patent/DE102005038914B4/de
Application granted granted Critical
Publication of DE102005038914B8 publication Critical patent/DE102005038914B8/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE102005038914A 2004-08-17 2005-08-17 Sensor für eine physikalische Grösse, der einen beweglichen Abschnitt aufweist Expired - Fee Related DE102005038914B8 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004-237229 2004-08-17
JP2004237229A JP4590976B2 (ja) 2004-08-17 2004-08-17 力学量センサ
JP2004237230A JP4438561B2 (ja) 2004-08-17 2004-08-17 角速度センサ
JP2004-237230 2004-08-17

Publications (3)

Publication Number Publication Date
DE102005038914A1 DE102005038914A1 (de) 2006-02-23
DE102005038914B4 DE102005038914B4 (de) 2008-09-11
DE102005038914B8 true DE102005038914B8 (de) 2009-01-22

Family

ID=35721782

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102005038914A Expired - Fee Related DE102005038914B8 (de) 2004-08-17 2005-08-17 Sensor für eine physikalische Grösse, der einen beweglichen Abschnitt aufweist

Country Status (2)

Country Link
US (1) US7302847B2 (de)
DE (1) DE102005038914B8 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5070778B2 (ja) * 2006-09-20 2012-11-14 株式会社デンソー 力学量センサ
JP2008216118A (ja) * 2007-03-06 2008-09-18 Denso Corp 力学量センサ
US20100126270A1 (en) * 2007-04-13 2010-05-27 Panasonic Corporation Inertia force sensor
GB0720412D0 (en) * 2007-10-18 2007-11-28 Melexis Nv Combined mems accelerometer and gyroscope
EP2060871A3 (de) * 2007-11-19 2012-12-26 Hitachi Ltd. Trägheitssensor
JP4561820B2 (ja) * 2007-12-21 2010-10-13 株式会社豊田中央研究所 角速度センサ
DE102010038461B4 (de) * 2010-07-27 2018-05-30 Robert Bosch Gmbh Drehratensensor und Verfahren zur Herstellung eines Masseelements
US8539832B2 (en) * 2010-10-25 2013-09-24 Rosemount Aerospace Inc. MEMS gyros with quadrature reducing springs
DE102013206414A1 (de) * 2013-04-11 2014-10-16 Robert Bosch Gmbh Drehratensensor
KR101540154B1 (ko) * 2013-10-04 2015-07-28 삼성전기주식회사 각속도 센서 및 그의 제조방법
JP2019007855A (ja) 2017-06-26 2019-01-17 セイコーエプソン株式会社 振動デバイス、振動デバイスモジュール、電子機器および移動体
JP2019215269A (ja) * 2018-06-13 2019-12-19 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、移動体測位装置、携帯型電子機器、電子機器、移動体、走行支援システム、および表示装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3507820C2 (de) * 1984-05-18 1987-10-22 Becton, Dickinson And Co., Paramus, N.J., Us
JP2001091265A (ja) * 1999-07-22 2001-04-06 Nippon Soken Inc 半導体力学量センサ
JP2001099861A (ja) * 1999-09-30 2001-04-13 Denso Corp 容量式物理量検出装置
DE10130237A1 (de) * 2000-06-26 2002-01-24 Denso Corp Kapazitiver Sensor für dynamische Größen mit Verschiebungsabschnitt, hergestellt durch Drahtbonden
US6450033B1 (en) * 1999-07-22 2002-09-17 Denso Corporation Semiconductor physical quantity sensor
US6450029B1 (en) * 1999-09-27 2002-09-17 Denso Corporation Capacitive physical quantity detection device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
KR200191265Y1 (ko) * 1998-05-11 2000-09-01 고종태 엑스-레이 필름 현상장치
JP4126826B2 (ja) 1999-11-05 2008-07-30 株式会社デンソー 角速度センサ
KR200199861Y1 (ko) * 2000-05-15 2000-10-16 정관영 높이조절 가능한 발판이 구비된 의자
KR100431004B1 (ko) * 2002-02-08 2004-05-12 삼성전자주식회사 회전형 비연성 멤스 자이로스코프
JP2004361115A (ja) * 2003-06-02 2004-12-24 Denso Corp 半導体力学量センサ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3507820C2 (de) * 1984-05-18 1987-10-22 Becton, Dickinson And Co., Paramus, N.J., Us
JP2001091265A (ja) * 1999-07-22 2001-04-06 Nippon Soken Inc 半導体力学量センサ
US6450033B1 (en) * 1999-07-22 2002-09-17 Denso Corporation Semiconductor physical quantity sensor
US6450029B1 (en) * 1999-09-27 2002-09-17 Denso Corporation Capacitive physical quantity detection device
JP2001099861A (ja) * 1999-09-30 2001-04-13 Denso Corp 容量式物理量検出装置
DE10130237A1 (de) * 2000-06-26 2002-01-24 Denso Corp Kapazitiver Sensor für dynamische Größen mit Verschiebungsabschnitt, hergestellt durch Drahtbonden

Also Published As

Publication number Publication date
DE102005038914B4 (de) 2008-09-11
US20060055096A1 (en) 2006-03-16
US7302847B2 (en) 2007-12-04
DE102005038914A1 (de) 2006-02-23

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Legal Events

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OP8 Request for examination as to paragraph 44 patent law
8396 Reprint of erroneous front page
8364 No opposition during term of opposition
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee