DE10008691B4 - Gasreibungspumpe - Google Patents

Gasreibungspumpe Download PDF

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Publication number
DE10008691B4
DE10008691B4 DE10008691.8A DE10008691A DE10008691B4 DE 10008691 B4 DE10008691 B4 DE 10008691B4 DE 10008691 A DE10008691 A DE 10008691A DE 10008691 B4 DE10008691 B4 DE 10008691B4
Authority
DE
Germany
Prior art keywords
pump
gas
rotor
components
pump unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10008691.8A
Other languages
German (de)
English (en)
Other versions
DE10008691A1 (de
Inventor
Armin Conrad
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to DE10008691.8A priority Critical patent/DE10008691B4/de
Priority to EP01102552.5A priority patent/EP1128069B1/de
Priority to JP2001036787A priority patent/JP4907774B2/ja
Priority to US09/792,454 priority patent/US6524060B2/en
Publication of DE10008691A1 publication Critical patent/DE10008691A1/de
Application granted granted Critical
Publication of DE10008691B4 publication Critical patent/DE10008691B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE10008691.8A 2000-02-24 2000-02-24 Gasreibungspumpe Expired - Fee Related DE10008691B4 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE10008691.8A DE10008691B4 (de) 2000-02-24 2000-02-24 Gasreibungspumpe
EP01102552.5A EP1128069B1 (de) 2000-02-24 2001-02-06 Gasreibungspumpe
JP2001036787A JP4907774B2 (ja) 2000-02-24 2001-02-14 ガス摩擦ポンプ
US09/792,454 US6524060B2 (en) 2000-02-24 2001-02-23 Gas friction pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10008691.8A DE10008691B4 (de) 2000-02-24 2000-02-24 Gasreibungspumpe

Publications (2)

Publication Number Publication Date
DE10008691A1 DE10008691A1 (de) 2001-08-30
DE10008691B4 true DE10008691B4 (de) 2017-10-26

Family

ID=7632258

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10008691.8A Expired - Fee Related DE10008691B4 (de) 2000-02-24 2000-02-24 Gasreibungspumpe

Country Status (4)

Country Link
US (1) US6524060B2 (ja)
EP (1) EP1128069B1 (ja)
JP (1) JP4907774B2 (ja)
DE (1) DE10008691B4 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
US20100266426A1 (en) * 2009-04-16 2010-10-21 Marsbed Hablanian Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
DE102009035812A1 (de) * 2009-08-01 2011-02-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpenrotor
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4668160A (en) * 1985-04-26 1987-05-26 Hitachi, Ltd. Vacuum pump
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
DE19634095A1 (de) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1810083A (en) * 1927-11-30 1931-06-16 Norinder Ernst Harald High vacuum molecular pump
US3734640A (en) * 1971-06-23 1973-05-22 W Daniel Airfoil vacuum pump with tapered rotor
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
EP0363503B1 (de) * 1988-10-10 1993-11-24 Leybold Aktiengesellschaft Pumpenstufe für eine Hochvakuumpumpe
JPH0313495A (ja) * 1989-06-12 1991-01-22 Natl House Ind Co Ltd 吊上げ金具
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
DE29516599U1 (de) 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4668160A (en) * 1985-04-26 1987-05-26 Hitachi, Ltd. Vacuum pump
DE19634095A1 (de) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe

Also Published As

Publication number Publication date
JP2001280289A (ja) 2001-10-10
US20010018018A1 (en) 2001-08-30
EP1128069A3 (de) 2002-11-06
JP4907774B2 (ja) 2012-04-04
DE10008691A1 (de) 2001-08-30
EP1128069A2 (de) 2001-08-29
US6524060B2 (en) 2003-02-25
EP1128069B1 (de) 2016-03-30

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee