DD154584A5 - Duese zum kontinuierlichen ablagern einer schicht aus einem feststoff auf einem substrat - Google Patents
Duese zum kontinuierlichen ablagern einer schicht aus einem feststoff auf einem substrat Download PDFInfo
- Publication number
- DD154584A5 DD154584A5 DD80225360A DD22536080A DD154584A5 DD 154584 A5 DD154584 A5 DD 154584A5 DD 80225360 A DD80225360 A DD 80225360A DD 22536080 A DD22536080 A DD 22536080A DD 154584 A5 DD154584 A5 DD 154584A5
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- bands
- nozzle
- prismatic
- item
- space
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 15
- 239000007787 solid Substances 0.000 title claims description 7
- 238000009826 distribution Methods 0.000 claims abstract description 9
- 239000007789 gas Substances 0.000 claims description 13
- 239000000376 reactant Substances 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 8
- 230000006835 compression Effects 0.000 claims description 6
- 238000007906 compression Methods 0.000 claims description 6
- 230000001154 acute effect Effects 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
- 239000006260 foam Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 210000000056 organ Anatomy 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 2
- 238000009827 uniform distribution Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 8
- 238000000576 coating method Methods 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract description 2
- 239000002184 metal Substances 0.000 description 15
- 238000000638 solvent extraction Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 241000826860 Trapezium Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/211—SnO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/212—TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Nozzles (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1037779 | 1979-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD154584A5 true DD154584A5 (de) | 1982-04-07 |
Family
ID=4362579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD80225360A DD154584A5 (de) | 1979-11-21 | 1980-11-20 | Duese zum kontinuierlichen ablagern einer schicht aus einem feststoff auf einem substrat |
Country Status (16)
| Country | Link |
|---|---|
| US (1) | US4361284A (cs) |
| EP (1) | EP0029809B1 (cs) |
| JP (1) | JPS5687451A (cs) |
| KR (2) | KR830004448A (cs) |
| AU (1) | AU544964B2 (cs) |
| CA (1) | CA1150749A (cs) |
| CS (1) | CS274255B2 (cs) |
| DD (1) | DD154584A5 (cs) |
| DE (1) | DE3066643D1 (cs) |
| ES (1) | ES8107052A1 (cs) |
| IT (1) | IT1134153B (cs) |
| MX (1) | MX153336A (cs) |
| PL (1) | PL129254B1 (cs) |
| SU (1) | SU1187705A3 (cs) |
| TR (1) | TR21534A (cs) |
| ZA (1) | ZA807242B (cs) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH643469A5 (fr) * | 1981-12-22 | 1984-06-15 | Siv Soc Italiana Vetro | Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide. |
| US4524718A (en) * | 1982-11-22 | 1985-06-25 | Gordon Roy G | Reactor for continuous coating of glass |
| WO1985002418A1 (en) * | 1983-12-01 | 1985-06-06 | Shatterproof Glass Corporation | Gas distribution system for sputtering cathodes |
| US4928627A (en) * | 1985-12-23 | 1990-05-29 | Atochem North America, Inc. | Apparatus for coating a substrate |
| DE3869793D1 (de) * | 1987-01-27 | 1992-05-14 | Asahi Glass Co Ltd | Gaszufuehrungsrohr fuer die reaktive abscheidung aus der gasphase. |
| US4793282A (en) * | 1987-05-18 | 1988-12-27 | Libbey-Owens-Ford Co. | Distributor beam for chemical vapor deposition on glass |
| US5136975A (en) * | 1990-06-21 | 1992-08-11 | Watkins-Johnson Company | Injector and method for delivering gaseous chemicals to a surface |
| DE4103413C1 (cs) * | 1991-02-05 | 1992-11-12 | Gunter M. 8918 Diessen De Voss | |
| US6379466B1 (en) * | 1992-01-17 | 2002-04-30 | Applied Materials, Inc. | Temperature controlled gas distribution plate |
| FR2724923B1 (fr) * | 1994-09-27 | 1996-12-20 | Saint Gobain Vitrage | Technique de depot de revetements par pyrolyse de composition de gaz precurseur(s) |
| JP3836217B2 (ja) * | 1997-05-21 | 2006-10-25 | 株式会社ベルデックス | 封止液供給器具および方法 |
| CN102154628B (zh) * | 2004-08-02 | 2014-05-07 | 维高仪器股份有限公司 | 用于化学气相沉积反应器的多气体分配喷射器 |
| DE102006043543B4 (de) * | 2006-09-12 | 2012-05-10 | Innovent E.V. | Homogenisator für der Beschichtung von Oberflächen dienende Gasströme |
| DE102006043542B4 (de) * | 2006-09-12 | 2012-05-16 | Innovent E.V. | Verfahren zum Beschichten von Oberflächen |
| EP2097153B1 (en) * | 2006-12-28 | 2017-02-22 | Korea Institute of Industrial Technology | Manufacturing method of filter media for medium and high temperature exhaust gas using foam coating technology |
| JP5116313B2 (ja) * | 2007-02-07 | 2013-01-09 | 東洋刃物株式会社 | 塗布ヘッド |
| KR20110014653A (ko) * | 2008-05-19 | 2011-02-11 | 이 아이 듀폰 디 네모아 앤드 캄파니 | 전자 소자에서 증기 코팅 장치 및 방법 |
| WO2013019285A2 (en) * | 2011-03-23 | 2013-02-07 | Pilkington Group Limited | Apparatus for depositing thin film coatings and method of deposition utilizing such apparatus |
| CN102921600B (zh) * | 2012-11-30 | 2016-04-06 | 贵州贵航汽车零部件股份有限公司 | 涂油机涂油装置 |
| KR102786474B1 (ko) * | 2022-03-31 | 2025-03-27 | 참엔지니어링(주) | 노즐형 증착장치 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3511703A (en) * | 1963-09-20 | 1970-05-12 | Motorola Inc | Method for depositing mixed oxide films containing aluminum oxide |
| GB1282866A (en) | 1968-08-16 | 1972-07-26 | Pilkington Brothers Ltd | Improvements in or relating to the production of glass having desired surface characteristics |
| CH544156A (de) | 1971-04-16 | 1973-11-15 | Bbc Brown Boveri & Cie | Verfahren zur Herstellung von oxydischen Halbleiterschichten und Vorrichtung zur Durchführung des Verfahrens |
| US3970037A (en) * | 1972-12-15 | 1976-07-20 | Ppg Industries, Inc. | Coating composition vaporizer |
| GB1516032A (en) | 1976-04-13 | 1978-06-28 | Bfg Glassgroup | Coating of glass |
| US4270702A (en) * | 1978-04-26 | 1981-06-02 | Albany International Corp. | Adjustable orifice air knife |
| CH628600A5 (fr) * | 1979-02-14 | 1982-03-15 | Siv Soc Italiana Vetro | Procede pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide et installation pour la mise en oeuvre de ce procede. |
-
1980
- 1980-11-03 IT IT25742/80A patent/IT1134153B/it active
- 1980-11-05 MX MX184627A patent/MX153336A/es unknown
- 1980-11-07 US US06/204,806 patent/US4361284A/en not_active Expired - Lifetime
- 1980-11-14 AU AU64404/80A patent/AU544964B2/en not_active Ceased
- 1980-11-18 EP EP80810354A patent/EP0029809B1/fr not_active Expired
- 1980-11-18 DE DE8080810354T patent/DE3066643D1/de not_active Expired
- 1980-11-19 TR TR21534A patent/TR21534A/xx unknown
- 1980-11-19 JP JP16212080A patent/JPS5687451A/ja active Granted
- 1980-11-20 KR KR1019800004451A patent/KR830004448A/ko not_active Withdrawn
- 1980-11-20 CA CA000365132A patent/CA1150749A/fr not_active Expired
- 1980-11-20 ES ES497005A patent/ES8107052A1/es not_active Expired
- 1980-11-20 DD DD80225360A patent/DD154584A5/de not_active IP Right Cessation
- 1980-11-20 PL PL1980227980A patent/PL129254B1/pl unknown
- 1980-11-20 ZA ZA00807242A patent/ZA807242B/xx unknown
- 1980-11-20 SU SU803210742A patent/SU1187705A3/ru active
- 1980-11-21 CS CS797580A patent/CS274255B2/cs unknown
-
1985
- 1985-07-15 KR KR2019850008862U patent/KR860000024Y1/ko not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| AU6440480A (en) | 1981-05-28 |
| EP0029809A1 (fr) | 1981-06-03 |
| CS797580A2 (en) | 1990-09-12 |
| CS274255B2 (en) | 1991-04-11 |
| MX153336A (es) | 1986-09-22 |
| CA1150749A (fr) | 1983-07-26 |
| AU544964B2 (en) | 1985-06-27 |
| US4361284A (en) | 1982-11-30 |
| PL129254B1 (en) | 1984-04-30 |
| EP0029809B1 (fr) | 1984-02-15 |
| JPS6148988B2 (cs) | 1986-10-27 |
| IT8025742A0 (it) | 1980-11-03 |
| JPS5687451A (en) | 1981-07-16 |
| PL227980A1 (cs) | 1981-09-04 |
| DE3066643D1 (en) | 1984-03-22 |
| IT1134153B (it) | 1986-07-31 |
| ES497005A0 (es) | 1981-10-01 |
| SU1187705A3 (ru) | 1985-10-23 |
| ZA807242B (en) | 1981-11-25 |
| KR860000024Y1 (ko) | 1986-01-30 |
| TR21534A (tr) | 1984-08-22 |
| KR830004448A (ko) | 1983-07-13 |
| ES8107052A1 (es) | 1981-10-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ENJ | Ceased due to non-payment of renewal fee |