CN219066782U

CN219066782U - Handling device

Info

Publication number: CN219066782U
Application number: CN202223438627.4U
Authority: CN
Inventors: 钮成杰; 马强
Original assignee: Suzhou Mega Technology Co Ltd
Current assignee: Suzhou Mega Technology Co Ltd
Priority date: 2022-12-20
Filing date: 2022-12-20
Publication date: 2023-05-23
Anticipated expiration: 2032-12-20

Abstract

The application discloses handling device, handling device includes actuating mechanism and transport subassembly, actuating mechanism is used for the drive transport subassembly removes along predetermined direction, actuating mechanism includes first connecting block, the spacing hole has been seted up on the first connecting block, transport subassembly includes second connecting block and floating joint, floating joint's one end with second connecting block fixed connection or integrative setting, floating joint's the other end at least part inserts on the first connecting block spacing hole, floating joint is relative spacing hole can be in predetermined direction activity. The carrying device can allow certain deviation to exist when the carrying assembly moves, and accordingly adaptability of the carrying device is improved.

Description

Handling device

Technical Field

The utility model relates to the technical field of workpiece cleaning, in particular to a carrying device.

Background

Currently, the main processing mode of a wafer is a mode of wafer processing, and when the wafer is processed, the wafer needs to be clamped or absorbed to carry and transfer the wafer, so that the wafer is subjected to different operations at different stations.

However, when the existing conveying device is used, the moving precision cannot be guaranteed, so that the position of the wafer at the transfer station is not accurate enough, the workpiece transferring process cannot be performed normally, or the wafer is damaged easily in the transferring process.

Disclosure of Invention

For solving above-mentioned technical problem, the handling device that this application provided can improve the transport precision, has certain deviation when allowing the transport subassembly to remove, promotes handling device's suitability.

The application provides a handling device, handling device includes actuating mechanism and transport subassembly, actuating mechanism is used for the drive transport subassembly removes along predetermined direction, actuating mechanism includes first connecting block, the spacing hole has been seted up on the first connecting block, transport subassembly includes second connecting block and floating joint, floating joint's one end with second connecting block fixed connection or integrative setting, floating joint's the other end at least part inserts on the first connecting block spacing hole, floating joint is relative spacing hole can be in predetermined direction activity.

In one specific embodiment, the floating joint is provided with a limiting part, and the limiting part is used for limiting the floating joint to slide out of the limiting hole; the cross section of the part of the floating joint in the limiting hole is smaller than that of the limiting hole.

In a specific embodiment, the limiting portion is disposed at an upper end of the floating joint, and the limiting portion can abut against an upper surface of the first connecting block.

In a specific embodiment, the first connecting block comprises a first plate body and a second plate body, the extending direction of the first plate body and the extending direction of the second plate body form a certain angle, the limiting hole is formed in the second plate body, the second plate body is located on the upper surface of the second connecting block, one end of the floating joint is fixedly connected with the upper surface of the second connecting block, and the other end of the floating joint penetrates through the limiting hole in the second plate body.

In one embodiment, the extending direction of the first plate body and the second plate body is 90 degrees.

In a specific embodiment, the driving mechanism further comprises a guide rod and a rodless cylinder, the rodless cylinder is arranged outside the guide rod, and the rodless cylinder is fixedly connected with the first connecting block.

In a specific embodiment, the handling assembly comprises a lifting cylinder and an adsorption mechanism connected with the lifting cylinder, the lifting cylinder is used for driving the adsorption mechanism to lift, the adsorption mechanism is used for adsorbing a workpiece, and the adsorption mechanism comprises a sucker frame and at least one sucker arranged on the sucker frame.

In a specific embodiment, the handling assembly further comprises a third connecting block, one end of the third connecting block is fixedly connected with the second connecting block, and the other end of the third connecting block is fixedly connected with the lifting cylinder.

In a specific embodiment, the third connecting block is an L-shaped sheet metal part.

In a specific embodiment, the handling device further comprises a fixing plate and a sliding mechanism, the driving mechanism and the sliding mechanism are both arranged on the fixing plate, the sliding mechanism is located below the driving mechanism, the sliding mechanism comprises a sliding rail and a sliding block which is slidably connected with the sliding rail, the sliding block is fixedly connected with the second connecting block, and the driving mechanism can drive the sliding block to move on the sliding rail.

In one embodiment, the floating joint is bolted to the second connection block.

According to the carrying device, the limiting hole of the first connecting block of the floating joint relative to the driving mechanism can move in the preset direction, when the driving mechanism drives, the hole wall of the first connecting hole can be abutted to the floating joint in the preset direction, so that the floating joint is driven to move in the preset direction, the floating joint then drives the second connecting block to move, and the carrying assembly can be driven to move in the preset direction to finish the movement of a workpiece. In this way, when the driving mechanism drives the carrying assembly to move, even if the first connecting block of the driving mechanism is not accurate in position, the carrying assembly can reach the corresponding position to carry the workpiece due to a certain moving range between the first connecting block and the floating joint of the carrying assembly in the moving preset direction. It follows that the handling device can allow certain deviations in the movement of the handling assembly, which in turn promotes the suitability of the handling device.

Drawings

FIG. 1 is a schematic view of a handling device according to an embodiment of the present disclosure;

FIG. 2 is an enlarged view of the first and second connection blocks of FIG. 1;

FIG. 3 is a schematic view of the first connection block of FIG. 2;

FIG. 4 is a schematic view of the floating joint of FIG. 2;

fig. 5 is a partial vertical sectional view of the first connection block and floating joint connection location of fig. 2.

The reference numerals in fig. 1-5 are illustrated as follows:

1-a driving mechanism; 11-a guide rod; 12-a rodless cylinder; 13-a first connection block; 131-a first plate; 132-a second plate; 132 a-a limiting hole;

2-a handling assembly; 21-a third connection block; 22-a second connection block; 22 a-a second mounting hole; 23-floating joint 231-mating portion; 232-a limiting part; 23 a-a first mounting hole; 24-lifting air cylinders; 25-an adsorption mechanism; 251-a suction cup holder; 252-suction cup;

3-a sliding mechanism; 31-sliding rails; 32-a slider;

4-fixing bolts;

100-fixing plate.

Detailed Description

In order to better understand the aspects of the present utility model, the present utility model will be described in further detail with reference to the accompanying drawings and detailed description.

Referring to fig. 1 and 2, fig. 1 is a schematic diagram of a handling device according to an embodiment of the present application; fig. 2 is an enlarged view of the positions of the first and

second connection blocks

13 and 22 in fig. 1.

This embodiment provides a handling device, and the handling device includes actuating mechanism 1 and handling subassembly 2, and actuating mechanism 1 is used for driving handling subassembly 2 to remove. The carrying assembly 2 may include a suction mechanism 25 as shown in fig. 1, where the suction mechanism 25 is used to suck the workpiece to be carried, and the workpiece may be, for example, a wafer, or any other workpiece that needs to be carried, and is not limited to carrying the workpiece by the suction mechanism 25.

Turning to fig. 2, and as will be appreciated in conjunction with fig. 3-5, fig. 3 is a schematic illustration of the first connector block 13 of fig. 2; FIG. 4 is a schematic view of the floating joint 23 of FIG. 2; fig. 5 is a partial vertical sectional view of the connection position of the first connection block 13 and the floating joint 23 in fig. 2.

The driving mechanism 1 in this embodiment may include a first connecting block 13, where the first connecting block 13 is provided with a limiting hole 132a, the handling component 2 includes a second connecting block 22 and a floating joint 23, one end of the floating joint 23 is fixedly connected with the second connecting block 22, and the other end of the floating joint 23 is at least partially inserted into the limiting hole 132a on the first connecting block 13. Defining the direction in which the driving mechanism 1 drives the carrying assembly 2 to move as a predetermined direction, referring to fig. 1, in the predetermined direction, the floating joint 23 is located at a peripheral wall of the inner portion of the limiting hole 132a, and has a distance from the wall of the limiting hole 132a in the predetermined direction, so that the floating joint 23 has a certain movement range in the predetermined direction, that is, in the predetermined direction, the floating joint 23 is movable relative to the limiting hole 132a.

Therefore, in the carrying device in this embodiment, when the driving mechanism 1 drives the carrying assembly 2, the hole wall of the limiting hole 132a of the first connecting block 13 of the driving mechanism 1 can abut against the floating joint 23 in a predetermined direction, so as to drive the floating joint 23 to move in the predetermined direction, in fig. 1, the predetermined direction is a horizontal direction, that is, the floating joint 23 can drive the second connecting block 22 to move, that is, the whole carrying assembly 2 can be driven to move in the predetermined direction, and finally the carrying of the workpiece is completed.

With this arrangement, when the driving mechanism 1 drives the carrying module 2 to move in the predetermined direction, even if the first connecting block 13 of the driving mechanism 1 is not in place, the carrying module 2 can reach the corresponding position to carry the workpiece by adjusting, for example, the process such as suction and unloading can be performed on the workpiece due to a certain movable range between the first connecting block 13 and the floating joint 23 of the carrying module 2 in the predetermined direction of movement. It follows that the handling device may allow for a certain deviation in the movement of the handling assembly 2, which in turn improves the suitability of the handling device.

As shown in fig. 4, the floating joint 23 in this embodiment includes a mating portion 231 and a limiting portion 232, the mating portion 231 is inserted into the limiting hole 132a, and the limiting portion 232 is disposed at the upper end of the floating joint 23, which can be understood as a step structure of the floating joint 23, and a major portion is the limiting portion 232 and a minor portion is the mating portion 231. At this time, the cross section of the portion of the floating joint 23 located in the limiting hole 132a is smaller than the cross section of the limiting hole 132a, i.e. the cross section of the mating portion 231 may be set smaller than the cross section of the limiting hole 132a, while the limiting portion 232 is located at the upper end of the limiting hole 132a, the limiting portion 232 is clamped on the upper side of the limiting hole 132a, and cannot pass through the limiting hole 132a, so that the limiting portion 232 may limit the floating joint 23 from sliding out of the limiting hole 132a, specifically in fig. 1 and 2, limit the floating joint 23 from sliding down out of the limiting hole 132a, so as to ensure that the hole wall of the limiting hole 132a can abut against the mating portion 231 in the driving process of the driving mechanism 1, so as to drive the floating joint 23 to move. It is known that the structure of the limiting portion for limiting the sliding out of the floating connector 23 is not limited thereto, for example, the outer periphery of the floating connector 23 may be clamped with a circlip, the hole wall of the limiting hole 132a may be provided with an annular clamping groove, and the circlip after the floating connector 23 is inserted may be clamped into the annular clamping groove and have a certain movement allowance in a predetermined direction.

The floating joint 23 in this embodiment is further provided with first mounting holes 23a, two first mounting holes 23a are illustrated in fig. 4, and referring to fig. 5, the second connecting block 22 is provided with second mounting holes 22a corresponding to the first mounting holes 23a, the handling device further includes a fixing bolt 4, and after passing through the limiting hole 132a of the first connecting block 13, the fixing bolt 4 is inserted into the second mounting holes 22a of the second connecting block 22 to be fixed, thereby achieving the purpose of fixing with the second connecting block 22, the second mounting holes 22a are threaded holes, and the first mounting holes 22a may be threaded holes, but are not limited to threaded holes. It can be known that when the limiting portion 232 is not provided, the second connecting block 22 and the floating joint 23 may be integrally formed, and may be directly assembled from bottom to top and inserted into the limiting hole 132 a; when the floating joint 23 is provided with the limiting part 232, the floating joint 23 can be inserted into the limiting hole 132a from top to bottom, and the fixing bolt 4 is also inserted from top to bottom to achieve the purpose of fixing.

It is known that the first mounting hole 23a may be a stepped hole, including a large hole and a small hole connected up and down, as shown in fig. 5, the bolt head of the fixing bolt 4 is located in the large hole of the stepped hole, and the rod portion of the fixing bolt 4 passes through the small hole, the limiting hole 132a and the second mounting hole 22a. So set up, the bolt head of fixing bolt 4 is arranged in the shoulder hole, easily protects fixing bolt 4, improves the reliability of connection.

With continued reference to fig. 2 and 3, the first connecting block 13 in this embodiment includes a first plate 131 and a second plate 132, where the extending directions of the first plate 131 and the second plate 132 form a certain angle, the limiting hole 132a is formed on the second plate 132, the second plate 132 is located on the upper surface of the second connecting block 22, one end of the floating joint 23 is fixedly connected with the upper surface of the second connecting block 22, and the other end of the floating joint 23 passes through the limiting hole 132a on the second plate 132. So set up, the first plate 131 of first linkage block 13 is convenient for be connected with other components of actuating mechanism 1, and in this embodiment, actuating mechanism 1 includes the cylinder, and the cylinder is rodless cylinder 12, then first plate 131 is used for being connected with actuating mechanism 1's rodless cylinder 12, and the second plate 132 is convenient for set up spacing hole 132a, and in this way, floating joint 23's installation is comparatively convenient, is difficult for taking place to interfere with other parts. The first plate body 131 and the second plate body 132 may be of an integral structure to increase strength, but may be separately provided.

It can be seen that the first connecting block 13 may be, for example, a rectangular block structure, but in order to ensure the connection with the side wall of the rodless cylinder 12, the plate structure needs to be thicker, the height of the limiting hole 132a is also higher, and the structural forms of the first plate 131 and the second plate 132 in this embodiment are obviously more beneficial to the simplification and the weight reduction of the structure. Alternatively, the first connecting block 13 may be a plate structure, a part of which is connected to the bottom of the rodless cylinder 12, and a part of which is provided with the limiting hole 132a, so that the arrangement in this embodiment is more reliable in terms of force transmission and stress.

Further, the extending direction of the first plate 131 and the second plate 132 is 90 degrees, that is, the first connecting block 13 and the second connecting block 22 are L-shaped, so that when the rodless cylinder 12 is installed, the first plate 131 is connected with the side wall of the rodless cylinder 12, and the second plate 132 is horizontally arranged, so that the first plate and the second plate are reliably and fixedly connected with the top of the second connecting block 22.

As described above, in this embodiment, the cylinder of the driving mechanism 1 is a rodless cylinder 12, the driving mechanism 1 further includes a guide rod 11, the rodless cylinder 12 may be sleeved outside the guide rod 11, and the rodless cylinder 12 is fixedly connected with the first connecting block 13. When the rodless cylinder 12 moves along the axial direction of the guide rod 11, the first connecting block 13 can be driven to move, and then the carrying assembly 2 which is in floating connection with the first connecting block 13 is driven to move. The rodless cylinder 12 can greatly save installation space, but the motion precision is relatively low, and the carrying assembly 2 can still be better moved to the corresponding position by matching with the floating connection mode in the embodiment, so that the normal operation of various work piece carrying processes is ensured. It is understood that the driving mechanism 1 is not limited to include the rodless cylinder 12, but may include a rod cylinder, or the driving mechanism 1 may include a conventional driving source such as a motor.

In addition, as shown in fig. 1, the carrying assembly 2 in this embodiment further includes a lifting cylinder 24, the lifting cylinder 24 is used for driving the aforesaid suction mechanism 25 to lift, the suction mechanism 25 is used for sucking the workpiece, and the suction mechanism 25 includes a suction cup frame 251 and at least one suction cup 252 disposed on the suction cup frame 251. Wherein, the driving mechanism 1 drives the carrying assembly 2 to move horizontally, and the lifting cylinder 24 is used for driving the adsorption mechanism 25 to do lifting motion in the vertical direction, and the adsorption mechanism 25 is used for directly adsorbing the workpiece. The suction mechanism 25 specifically can suck the workpiece by vacuum suction, and when the vacuum is removed, the workpiece can be released. Therefore, after the lifting cylinder 24 drives the adsorption mechanism 25 to descend to the surface of the workpiece to be conveyed, the adsorption mechanism 25 adsorbs and fixes the workpiece, then the lifting cylinder 24 drives the adsorption mechanism 25 to move up to the target height position, and then the driving mechanism 1 drives the conveying assembly 2 to horizontally move along the preset direction, so that station switching is realized.

The suction cup holder 251 in this embodiment is i-shaped, the number of suction cups 252 is specifically four, and four suction cups 252 are respectively disposed at four ends of the i-shaped suction cup holder 251. The suction cup 252 can suction and fix the workpiece by vacuum suction.

As a specific embodiment, the carrying assembly 2 is used for carrying a wafer, and the wafer is required to be cut on a cutting table and then enters a cleaning table for cleaning. At this time, the driving mechanism 1 can drive the carrying unit 2 to move between immediately above the cleaning table and immediately above the dicing table of the dicing machine, whereby the workpiece on the dicing table can be carried onto the cleaning table.

With continued reference to fig. 1, the handling assembly 2 further includes a third connecting block 21, one end of the third connecting block 21 is fixedly connected with the second connecting block 22, and the other end of the third connecting block 21 is fixedly connected with the lifting cylinder 24. Thus, the second connecting block 22 drives the lifting cylinder 24 to move conveniently, and the third connecting block 21 can increase the longitudinal height of the whole carrying device so as to be beneficial to adsorbing workpieces. Specifically, in fig. 1, the third connecting block 21 may be an L-shaped sheet metal part, where the L-shaped sheet metal part includes two plate bodies, one plate body is fixed with the second connecting block 22, the other plate body is fixedly connected with the top end of the lifting cylinder 24, the L-shaped sheet metal part has high structural strength, and other components can be arranged in a certain space below the third connecting block 21, so that interference with other components is avoided when the lifting cylinder 24 moves.

As will be understood with continued reference to fig. 1, the carrying device in this embodiment further includes a fixed plate 100 and a sliding mechanism 3, and the driving mechanism 1 and the sliding mechanism 3 are disposed on the fixed plate 100, i.e. the fixed plate 100 serves as a base of the carrying device. The sliding mechanism 3 is specifically located below the driving mechanism 1, the sliding mechanism 3 includes a sliding rail 31 and a sliding block 32 slidably connected with the sliding rail 31, the sliding block 32 is fixedly connected with the second connecting block 22, and the driving mechanism 1 can drive the sliding block 32 to move on the sliding rail 31. So set up, slide rail 31 can be as support, the guide component that transport subassembly 2 removed to guarantee that the removal of transport subassembly 2 is more stable and smooth and easy. It will be appreciated that when the sliding mechanism 3 is provided, the carrying assembly 2 may be supported by the slide rail 31, and even if the floating joint 23 is not provided with the large-sized limiting portion 232, the floating joint 23 will not slide out of the limiting hole 132a, so that the limiting portion 232 may not be provided, and of course, the sliding mechanism 3 may not need to be supported or reduced to support the carrying assembly 2, so that the guiding is smoother.

The principles and embodiments of the present utility model have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the method of the present utility model and its core ideas. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the utility model can be made without departing from the principles of the utility model and these modifications and adaptations are intended to be within the scope of the utility model as defined in the following claims.

Claims

1. The utility model provides a handling device, handling device includes actuating mechanism and transport subassembly, actuating mechanism is used for the drive transport subassembly removes along predetermined direction, a serial communication port, actuating mechanism includes first connecting block, the spacing hole has been seted up on the first connecting block, transport subassembly includes second connecting block and floating joint, floating joint's one end with second connecting block fixed connection or integrative setting, floating joint's the other end at least part inserts spacing hole on the first connecting block, floating joint is relative spacing hole can be in predetermined direction activity.

2. The handling device of claim 1, wherein the floating joint is provided with a limit portion for limiting the sliding out of the floating joint from within the limit aperture; the cross section of the part of the floating joint in the limiting hole is smaller than that of the limiting hole.

3. The carrying device according to claim 2, wherein the stopper portion is provided at an upper end of the floating joint, and the stopper portion is capable of abutting against an upper surface of the first connecting block.

4. The carrying device according to claim 2, wherein the first connecting block includes a first plate body and a second plate body, the extending directions of the first plate body and the second plate body form a certain angle, the limiting hole is formed in the second plate body, the second plate body is located on the upper surface of the second connecting block, one end of the floating joint is fixedly connected with the upper surface of the second connecting block, and the other end of the floating joint penetrates through the limiting hole in the second plate body.

5. The carrier of claim 4, wherein the first and second plates extend in a direction of 90 degrees.

6. The handling device of any of claims 1-4, wherein the drive mechanism further comprises a guide rod and a rodless cylinder, the rodless cylinder is disposed outside the guide rod, and the rodless cylinder is fixedly connected to the first connecting block.

7. The handling device of claim 6, wherein the handling assembly comprises a lift cylinder and an adsorption mechanism connected to the lift cylinder, the lift cylinder is configured to drive the adsorption mechanism to lift, the adsorption mechanism is configured to adsorb a workpiece, and the adsorption mechanism comprises a suction cup frame and at least one suction cup disposed on the suction cup frame.

8. The handling device of claim 7, wherein the handling assembly further comprises a third connection block, one end of the third connection block being fixedly connected to the second connection block, and the other end of the third connection block being fixedly connected to the lifting cylinder.

9. The handling device of claim 8, wherein the third connection block is an L-shaped sheet metal part.

10. The handling device of any of claims 1-5, further comprising a fixed plate and a sliding mechanism, wherein the driving mechanism and the sliding mechanism are both disposed on the fixed plate, the sliding mechanism is disposed below the driving mechanism, the sliding mechanism comprises a sliding rail and a sliding block slidably connected with the sliding rail, the sliding block is fixedly connected with the second connecting block, and the driving mechanism can drive the sliding block to move on the sliding rail.

11. Handling device according to any of claims 1-5, wherein the floating joint is bolted to the second connection block.