CN219010503U

CN219010503U - Horizontal electroplating device

Info

Publication number: CN219010503U
Application number: CN202320055477.4U
Authority: CN
Inventors: 黄建; 余丞博; 卞和平; 胥勇; 冉强
Original assignee: KUNSHAN HULI MICROELECTRONICS CO Ltd; Kunshan Dongwei Technology Co Ltd
Current assignee: KUNSHAN HULI MICROELECTRONICS CO Ltd; Kunshan Dongwei Technology Co Ltd
Priority date: 2023-01-09
Filing date: 2023-01-09
Publication date: 2023-05-12
Anticipated expiration: 2033-01-09

Abstract

The utility model relates to the technical field of electroplating devices, in particular to a horizontal electroplating device. Mainly comprises an electrolytic tank, an upper anode box, a lower anode box and a plate material. Wherein, the upper anode box and the lower anode box are both arranged in the electrolytic tank, and the electrolytic tank is internally filled with liquid medicine. The upper anode box comprises a coaming, and the coaming encloses a first accommodating chamber for accommodating the first anode assembly; along the height direction of the horizontal electroplating device, the height of the coaming is higher than the liquid level of the liquid medicine and is H. The liquid level detection alarm sets up in the inboard of bounding wall, and the liquid level detection alarm is set up to H apart from the top interval of bounding wall, and H is less than H. The horizontal electroplating device has a simple structure, can avoid bubbles in the upper anode box from overflowing to the cathode region, and improves the uniformity of electroplating products.

Description

Horizontal electroplating device

Technical Field

The utility model relates to the technical field of electroplating devices, in particular to a horizontal electroplating device.

Background

At present, an anode of an electroplating device is set as an insoluble anode under most conditions, and in the electroplating process, because the insoluble anode is used, electrolyte in an anode region is electrolyzed to separate out oxygen, oxygen bubbles are formed in the electroplating liquid, the bubbles slowly grow along with the time, the oxygen bubbles can move to a cathode region, the surface coating of a piece to be plated in the cathode region is easy to cause cavities, and then the phenomenon of uneven electroplating is caused, so that the quality and the yield of a product to be electroplated are influenced.

In the prior art, in order to simplify the processing procedure and improve the manufacturing efficiency, the upper anode box and the lower anode box are generally consistent in size and shape, so that when the upper anode box and the lower anode box are immersed in the liquid medicine, during the electroplating process, air bubbles generated by the upper anode box overflow the upper anode box and flow to a cathode region where a workpiece to be plated is located, so that a cavity appears on a surface coating of the workpiece to be plated, uniformity of a plating film layer is affected, and product quality and yield are reduced.

Therefore, there is a need to design a horizontal electroplating device to solve the above technical problems.

Disclosure of Invention

The utility model aims to provide a horizontal electroplating device which is simple in structure, can prevent bubbles in an upper anode box from overflowing to a cathode region, and improves the uniformity of electroplating products.

To achieve the purpose, the utility model adopts the following technical scheme:

the present utility model provides a horizontal electroplating device, comprising:

the upper anode box and the lower anode box are arranged in the electrolytic tank, and the electrolytic tank is internally filled with liquid medicine; the upper anode box comprises a coaming, and the coaming is enclosed to form a first accommodating chamber for accommodating the first anode assembly; the height of the coaming is higher than the liquid level of the liquid medicine by H along the height direction of the horizontal electroplating device;

the liquid level detection alarm, the liquid level detection alarm sets up the inboard of bounding wall, just the liquid level detection alarm is apart from the top interval of bounding wall sets up to H, just H is less than H.

As an alternative technical scheme of the horizontal electroplating device, two sides of the upper anode box are provided with a liquid inlet and a liquid outlet for circulating the liquid medicine.

As an alternative technical scheme of the horizontal electroplating device, the liquid inlet and the liquid outlet are arranged at equal heights.

As an alternative technical scheme of the horizontal electroplating device, the horizontal electroplating device comprises a liquid inlet pipe, a liquid outlet pipe and a water pump, wherein one end of the liquid inlet pipe is communicated with the liquid inlet, and the other end of the liquid inlet pipe is communicated with the outlet end of the water pump; one end of the liquid outlet pipe is communicated with the liquid outlet, and the other end of the liquid outlet pipe is communicated with the inlet end of the water pump.

As an alternative technical scheme of the horizontal electroplating device, the liquid inlet pipe is communicated with a defoaming device, and the defoaming device is used for eliminating bubbles in the liquid medicine.

As an alternative solution of the horizontal electroplating device, the first anode assembly includes a first ionic membrane and a first insoluble anode, the first ionic membrane is disposed directly below the first insoluble anode, and the first ionic membrane is used for penetrating metal ions.

As an alternative technical scheme of the horizontal electroplating device, the first anode assembly further comprises a first shielding plate, a plurality of first through holes are formed in the first shielding plate, and the first shielding plate is arranged right below the first ion membrane.

As an alternative solution of the horizontal electroplating device, at least one of the upper anode box and the lower anode box is provided with an inclined plane, a second anode assembly is arranged in the lower anode box, and at least one of a part of the first anode assembly or a part of the second anode assembly is arranged along the inclined plane in an inclined manner.

As an alternative technical scheme of the horizontal electroplating device, the horizontal electroplating device further comprises a first spray pipe and a second spray pipe, wherein the first spray pipe and the second spray pipe are respectively arranged on two sides of a plate material, and the first spray pipe and the second spray pipe are symmetrically arranged relative to the plate material.

As an alternative technical scheme of the horizontal electroplating device, a plurality of first branch pipes are arranged on the first spray pipe at equal intervals, a plurality of second branch pipes are arranged on the second spray pipe at equal intervals, and the first branch pipes and the second branch pipes are all arranged towards the plate material.

The beneficial effects of the utility model at least comprise:

the utility model provides a horizontal electroplating device which mainly comprises an electrolytic tank, an upper anode box, a lower anode box and a plate. Wherein, the upper anode box and the lower anode box are both arranged in the electrolytic tank, and the electrolytic tank is internally filled with liquid medicine. The upper anode box comprises a coaming, and the coaming encloses a first accommodating chamber for accommodating the first anode assembly; along the height direction of the horizontal electroplating device, the height of the coaming is higher than the liquid level of the liquid medicine and is H. The liquid level detection alarm sets up in the inboard of bounding wall, and the liquid level detection alarm is set up to H apart from the top interval of bounding wall, and H is less than H. Through setting up the bounding wall of going up the positive pole box height, and then increased the volume of first holding cavity, can make like this when electroplating process, first holding cavity can hold more and go up the bubble that produces in the positive pole box, the liquid level H of liquid medicine is exceeded to the height of bounding wall simultaneously, can avoid going up the bubble in the positive pole box and spill over and flow to the negative pole area that the sheet material is located like this for the surface coating of sheet material appears the cavity and influences electroplating product's homogeneity. Compared with the prior art, in order to improve the processing efficiency in the prior art, the upper anode box and the lower anode box are arranged in the same batch, in the same shape and at the same height, and the utility model adopts the method of increasing the height of the coaming plate of the upper anode boxThe technical prejudice in the traditional technology is overcome, on one hand, the accommodating space and defoaming time of bubbles in the upper anode box are increased, and the bubbles are prevented from overflowing to the cathode region; on the other hand, through the height of heightening the positive pole box bounding wall, can increase the degree of depth of liquid medicine, according to liquid pressure formula: p=ρgh ₁ It should be noted that here h ₁ Refers to the total depth of the liquid medicine, and h can be increased by increasing the height of the coaming plate of the upper anode box ₁ And then increases the pressure intensity of the bubbles, so that the pressure intensity of the bubbles in the lower anode box and the upper anode box is increased, and the bubbles are easier to break, thereby improving the electroplating uniformity of the product and improving the product quality and yield.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings needed in the description of the embodiments of the present utility model, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the contents of the embodiments of the present utility model and these drawings without inventive effort for those skilled in the art.

Fig. 1 is a schematic structural diagram of a horizontal electroplating apparatus according to an embodiment of the present utility model.

Reference numerals

100. An upper anode box; 110. a first anode assembly; 130. a first insoluble anode; 140. a first ionic membrane; 150. a first shutter; 1501. a first through hole; 160. coaming plate;

200. a lower anode box; 210. a second anode assembly; 230. a second insoluble anode; 240. a second ionic membrane; 250. a second shutter; 2501. a second through hole; 260. an inclined surface;

300. plate material; 400. a first nozzle; 410. a first branch pipe; 500. a second nozzle; 510. a second branch pipe; 600. a clamp;

700. a liquid medicine; 710. air bubbles; 800. a liquid level detection alarm.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

As shown in fig. 1, the present embodiment provides a horizontal electroplating apparatus, which mainly includes an electrolytic cell, an upper anode box 100, a lower anode box 200, and a plate 300. Wherein, the upper anode box 100 and the lower anode box 200 are both arranged in the electrolytic cell, and the electrolytic cell is internally provided with the liquid medicine 700. The upper anode box 100 includes a shroud 160, the shroud 160 encloses a first accommodating chamber for accommodating the first anode assembly 110, and the height of the shroud 160 is higher than the liquid level of the chemical solution 700 by H along the height direction of the horizontal plating apparatus. The liquid level detection alarm 800 is disposed on the inner side of the coaming 160, and the distance between the liquid level detection alarm 800 and the top of the coaming 160 is set to H, where H is smaller than H, so that the liquid level detection alarm 800 can be prevented from being submerged by the liquid medicine 700 to fail.

Specifically, the distance H may be set to be between 20mm and 50mm in this embodiment, and for example, values of 20mm, 30mm, 35mm, 50mm, and the like may be set; the distance h may be set to a value of 5mm to 10mm, for example, 5mm, 7mm, 8mm, 10mm, etc.

Based on the above design, in this embodiment, by heightening the enclosure plate 160 of the upper anode box 100, the volume of the first accommodating chamber is further increased, so that in the electroplating process, the first accommodating chamber can accommodate more bubbles 710 generated in the upper anode box 100, and meanwhile, the height of the enclosure plate 160 is higher than the liquid level H of the liquid medicine 700, so that the bubbles 710 in the upper anode box 100 can be prevented from overflowing and flowing into the cathode region where the plate 300 is located, and the surface plating of the plate 300 has voids to affect the uniformity of the electroplated product. Compared with the prior art, in order to improve the processing efficiency in the conventional technology, the upper anode box 100 and the lower anode box 200 are arranged in the same batch, in the same shape and at the same height, in this embodiment, the technical bias in the conventional technology is overcome by heightening the height of the coaming 160 of the upper anode box 100, on one hand, the accommodating space and defoaming time of the bubbles 710 in the upper anode box 100 are increased, and the bubbles 710 are prevented from overflowing to the cathode region; on the other hand, by heightening the height of the shroud 160 of the upper anode cartridge 100, the depth of the chemical solution 700 can be increased, according to the liquid pressure formula: p=ρgh ₁ It should be noted that here h ₁ Refers to the total depth of the liquid medicine 700, and h can be increased by heightening the height of the coaming 160 of the upper anode box 100 ₁ Thereby increasing the pressure of the bubbles 710The pressure intensity of the bubbles 710 in the lower anode box 200 and the upper anode box 100 is increased, and the bubbles are more easily broken, so that the electroplating uniformity of the product is improved, and the product quality and yield are improved.

In addition, the height of the coaming 160 of the upper anode box 100 is also beneficial to the setting of the liquid level detection alarm 800 in this embodiment, that is, the liquid level detection alarm 800 is located above the liquid level of the liquid medicine 700, when the bubbles 710 generated in the liquid medicine 700 are too much, the bubbles 710 suspend above the liquid medicine 700, once the bubbles 710 touch the liquid level detection alarm 800, the liquid level detection alarm 800 will generate an alarm to alert the operator, so as to avoid other production accidents. The liquid level detection alarm 800 in this embodiment is a common device in the market, belongs to a standard component, and the specific structure of the liquid level detection alarm 800 will not be described here.

As shown in fig. 1, both sides of the upper anode box 100 in this embodiment are provided with a liquid inlet and a liquid outlet for circulating the chemical solution 700, and the liquid inlet and the liquid outlet are disposed at equal heights. This can prevent the liquid medicine 700 from being stirred up to generate bubbles 710 or foam due to the height difference between the liquid inlet and the liquid outlet when it enters and exits the upper anode cartridge 100.

Further, the horizontal electroplating device in the embodiment comprises a liquid inlet pipe, a liquid outlet pipe and a water pump, wherein one end of the liquid inlet pipe is communicated with the liquid inlet, and the other end of the liquid inlet pipe is communicated with the outlet end of the water pump; one end of the liquid outlet pipe is communicated with the liquid outlet, and the other end is communicated with the inlet end of the water pump through the Venturi flowmeter. Meanwhile, a defoaming device is communicated with the liquid inlet pipe and is used for eliminating bubbles 710 in the liquid medicine 700. The liquid medicine 700 in the upper anode box 100 is extracted by the water pump and defoamed by the defoamer, so that the content of bubbles 710 in the liquid medicine 700 entering the upper anode box 100 again is below 0.5%, thereby improving the uniformity of electroplating products.

Optionally, the defoaming device in this embodiment is selected from common defoaming machines in the market.

Alternatively, the plate 300 in the present embodiment may be provided as a semiconductor silicon wafer, or may be provided as a PCB board, a ceramic board, or the like.

As shown in fig. 1, in the present embodiment, the first anode assembly 110 further includes a first ion membrane 140 and a first insoluble anode 130, the first ion membrane 140 is disposed directly under the first insoluble anode 130, the second anode assembly 210 includes a second ion membrane 240, the second ion membrane 240 is disposed above the second insoluble anode 230, and both the first ion membrane 140 and the second ion membrane 240 are used for penetrating metal ions, so that the metal ions can reach the cathode region where the plate 300 is located, and are attached to the surface of the plate 300 by electroplating.

Further, the first anode assembly 110 further includes a first shielding plate 150, a plurality of first through holes 1501 are formed in the first shielding plate 150, and the first shielding plate 150 is disposed directly under the first ion membrane 140. The second anode assembly 210 further includes a second shielding plate 250, wherein a plurality of second through holes 2501 are formed in the second shielding plate 250, and the second shielding plate 250 is disposed directly under the second ion membrane 240. The metal ions in the liquid medicine 700 can penetrate through the first ionic membrane 140 and pass through the first through hole 1501 to reach the cathode region and be electroplated on the upper surface of the plate 300; the metal ions in the chemical solution 700 can also pass through the second ion membrane 240 and pass through the second through hole 2501 to reach the cathode region and be electroplated to the lower surface of the sheet material 300. The arrangement of the first shutter 150 and the second shutter 250 may prevent the bubbles 710 in the upper anode cassette 100 and the lower anode cassette 200 from moving to the cathode region.

As shown in fig. 1, in the present embodiment, at least one of the upper anode cartridge 100 and the lower anode cartridge 200 is provided with an inclined surface 260, and at least one of a portion of the first anode assembly 110 or a portion of the second anode assembly 210 is disposed obliquely along the inclined surface 260. For example, in the present embodiment, the lower anode case 200 is provided with the inclined surface 260, and the second ion membrane 240 and the second shutter 250 are provided obliquely as an example, so that the bubbles 710 generated in the lower anode case 200 can float and collect on one side of the inclined surface 260, i.e., the upper left corner of the inclined surface 260 in fig. 1, and thus the phenomenon that the bubbles 710 clog the second ion membrane 240 can be prevented from occurring.

With continued reference to fig. 1, in the present embodiment, the horizontal plating apparatus further includes a first nozzle 400 and a second nozzle 500, where the first nozzle 400 and the second nozzle 500 are disposed on two sides of the sheet 300, respectively, and the first nozzle 400 and the second nozzle 500 are symmetrically disposed with respect to the sheet 300. The above arrangement can realize that when the plate 300 is electroplated, the spray pipes are continuously arranged on two surfaces of the plate to spray the liquid medicine 700, the spraying of the liquid medicine 700 also improves the circulation replacement of the liquid medicine 700 in the cathode area, the situation that the liquid medicine 700 near the plate 300 has fewer metal cations is avoided, and then the electroplating quality and efficiency can be improved.

Specifically, in the present embodiment, the first nozzles 400 are equally spaced apart from each other with a plurality of first branch pipes 410, the second nozzles 500 are equally spaced apart from each other with a plurality of second branch pipes 510, and the first branch pipes 410 and the second branch pipes 510 are disposed toward the slab 300. Thereby enabling the medical fluid 700 in the first nozzle 400 to be sprayed toward the upper surface of the slab 300 by the plurality of first branch pipes 410, and the medical fluid 700 in the second nozzle 500 to be sprayed toward the lower surface of the slab 300 by the plurality of second branch pipes 510.

As shown in fig. 1, the horizontal plating apparatus further includes a clamp 600, and the clamp 600 is used to clamp the plate 300. The clamp 600 clamps the plate 300 and can drive the plate 300 to penetrate through the cathode region, namely, the plate 300 is clamped by the clamp 600 and then placed in the cathode region along with the clamp 600, and can be taken out along with the clamp 600 after electroplating is completed, so that convenience and rapidness are realized.

Specifically, the horizontal electroplating device further includes a driving member, and the driving member is in driving connection with the fixture 600, so that the plate 300 can enter the horizontal electroplating device and reach the corresponding cathode region for electroplating, and then come out of the horizontal electroplating device, thereby completing electroplating and realizing automation of electroplating by the horizontal electroplating device.

Optionally, the fixture 600 and the driving member are respectively provided with a plurality of corresponding devices, so that the horizontal electroplating device can electroplate a plurality of plates 300 at one time, thereby saving electroplating time and improving the working efficiency of the horizontal electroplating device.

Alternatively, the driving member in this embodiment may be provided by a motor-driven steel belt.

It is to be understood that the foregoing is only illustrative of the presently preferred embodiments of the utility model and the technical principles that have been developed. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.

Note that in the description of this specification, a description of reference to the terms "some embodiments," "other embodiments," and the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Claims

1. A horizontal plating apparatus, comprising:

the upper anode box (100) and the lower anode box (200) are arranged in an electrolytic cell, and the electrolytic cell is internally provided with a liquid medicine (700); the upper anode box (100) comprises a coaming (160), wherein the coaming (160) is enclosed into a first accommodating chamber for accommodating the first anode assembly (110); the height of the coaming (160) is higher than the liquid level of the liquid medicine (700) along the height direction of the horizontal electroplating device and is H;

the liquid level detection alarm (800), liquid level detection alarm (800) set up the inboard of bounding wall (160), just liquid level detection alarm (800) distance bounding wall (160) top interval sets up to H, just H is less than H.

2. The horizontal plating device according to claim 1, wherein both sides of the upper anode box (100) are provided with a liquid inlet and a liquid outlet for circulation of the chemical liquid (700).

3. The horizontal plating apparatus according to claim 2, wherein the liquid inlet and the liquid outlet are provided at equal heights.

4. A horizontal plating apparatus according to claim 3, wherein said horizontal plating apparatus comprises a liquid inlet pipe, a liquid outlet pipe and a water pump, one end of said liquid inlet pipe being communicated with said liquid inlet, the other end being communicated with an outlet end of said water pump; one end of the liquid outlet pipe is communicated with the liquid outlet, and the other end of the liquid outlet pipe is communicated with the inlet end of the water pump.

5. The horizontal plating apparatus according to claim 4, wherein the liquid inlet pipe is communicated with a defoaming device for eliminating bubbles (710) in the chemical liquid (700).

6. The horizontal electroplating device according to claim 1, wherein the first anode assembly (110) comprises a first ionic membrane (140) and a first insoluble anode (130), the first ionic membrane (140) being disposed directly below the first insoluble anode (130), the first ionic membrane (140) being for permeation of metal ions.

7. The horizontal plating apparatus according to claim 6, wherein the first anode assembly (110) further comprises a first shielding plate (150), a plurality of first through holes (1501) are formed in the first shielding plate (150), and the first shielding plate (150) is disposed directly under the first ion membrane (140).

8. The horizontal plating apparatus according to claim 1, wherein an inclined surface (260) is provided on at least one of the upper anode cartridge (100) and the lower anode cartridge (200), a second anode assembly (210) is provided in the lower anode cartridge (200), and at least one of a part of the first anode assembly (110) or a part of the second anode assembly (210) is arranged obliquely along the inclined surface (260).

9. The horizontal plating apparatus according to claim 1, further comprising a first nozzle (400) and a second nozzle (500), the first nozzle (400) and the second nozzle (500) being disposed on both sides of a sheet metal (300), respectively, and the first nozzle (400) and the second nozzle (500) being disposed symmetrically with respect to the sheet metal (300).

10. The horizontal plating apparatus according to claim 9, wherein a plurality of first branch pipes (410) are provided on the first nozzle (400) at equal intervals, a plurality of second branch pipes (510) are provided on the second nozzle (500) at equal intervals, and both the first branch pipes (410) and the second branch pipes (510) are provided toward the slab (300).