CN219449919U

CN219449919U - Device for carrying out horizontal convection circulation on electroplating liquid medicine

Info

Publication number: CN219449919U
Application number: CN202320974760.7U
Authority: CN
Inventors: 杨毅; 林琼辉
Original assignee: Dongguan Youwei Intelligent Equipment Co ltd
Current assignee: Dongguan Youwei Intelligent Equipment Co ltd
Priority date: 2023-04-25
Filing date: 2023-04-25
Publication date: 2023-08-01
Anticipated expiration: 2033-04-25

Abstract

The utility model discloses a device for carrying out horizontal convection circulation on electroplating liquid, which comprises an electroplating bath, at least one anode net arranged in the electroplating bath, a workpiece which is arranged in the electroplating bath and is opposite to the anode net, a circulating pump arranged outside the electroplating bath, a water outlet pipe connected with a water outlet of the circulating pump and the upper end of the electroplating bath, a water inlet pipe connected with a water inlet of the circulating pump and the lower end of the electroplating bath, and at least one spray pipe which is arranged on the side wall of the upper end of the electroplating bath and is opposite to a gap between the workpiece and the anode net. According to the device for carrying out horizontal convection circulation on the electroplating solution, the fluidity of the electroplating solution is ensured by means of flushing foam through horizontal convection, so that metal elements in the electroplating bath are uniformly distributed, and the distance between the anode and the cathode is shortened by means of horizontally arranging the spray pipe, so that the uniformity of the metal elements in the electroplating solution in the electroplating bath is further ensured.

Description

Device for carrying out horizontal convection circulation on electroplating liquid medicine

Technical Field

The utility model relates to the technical field of circuit boards and photovoltaic silicon wafers, in particular to a device for carrying out horizontal convection circulation on electroplating liquid medicine.

Background

Currently, electroplating processes are widely used in various fields of national production, which are a surface processing method for forming a plating layer on a surface of a workpiece by electrolysis. The electrolyte solution in the electroplating process is usually required to be stored in an electrolytic tank; however, the metal elements in the electrolytic solution are easy to deposit at the bottom of the electrolytic tank, so that the metal elements in the electrolytic tank are unevenly distributed; in order to make the metal element in the plating bath distribute evenly, the plating bath on the market is also added with a device for up-down convection stirring, for example, the patent number is: 201520448544.4, the patent name is a novel electrolyte up-down convection stirring device. The device adopts a rotary guiding device to precipitate and dredge the upper end of electrolysis at the bottom of the electrolyte to form convection of the electrolyte at the upper layer and the lower layer, thereby realizing uniform distribution of the electrolyte in the electrolyte.

However, when the workpiece is ionized and decomposed in the electroplating bath, foam is generated between the anode net and the workpiece, and the foam which should float is attached to the workpiece by using an up-and-down convection mode, so that the effect of electroplating the workpiece is poor and the yield of the workpiece is affected. Furthermore, in order to set up convection current device between the negative pole and positive pole, lead to the distance between negative pole and positive pole big, electroplating liquid interior metal element's homogeneity also can correspondingly receive the influence, and the homogeneity is not good.

Disclosure of Invention

In view of the above-mentioned shortcomings, the present utility model aims to provide a device for circulating electroplating solution by horizontal convection, which ensures fluidity of the electroplating solution by means of flushing foam by horizontal convection, ensures uniform distribution of metal elements in an electroplating bath, shortens the distance between a cathode and an anode by means of horizontally arranging a spray pipe, and further ensures uniformity of metal elements in the electroplating solution in the electroplating bath.

The technical scheme adopted by the utility model for achieving the purpose is as follows:

the device for carrying out horizontal convection circulation on the electroplating liquid comprises an electroplating bath, at least one anode net arranged in the electroplating bath, a workpiece which is arranged in the electroplating bath and is opposite to the anode net, a circulating pump arranged outside the electroplating bath, a water outlet pipe connected with the water outlet of the circulating pump and the upper end of the electroplating bath, a water inlet pipe connected with the water inlet of the circulating pump and the lower end of the electroplating bath, and at least one spray pipe which is arranged on the side wall of the upper end of the electroplating bath and is opposite to a gap between the workpiece and the anode net.

Further, the plating bath further comprises an overflow port which is arranged at the upper end of the plating bath and is opposite to the spray pipe, and an overflow guide groove which is arranged on the same side of the plating bath as the overflow port.

Furthermore, a plurality of guide plates which incline downwards are uniformly arranged on two sides of the inside of the overflow guide groove.

Further, the lowest end of the overflow guide groove is provided with a guide inclined surface which is inclined from top left to bottom right.

Further, the electroplating bath comprises an upper bath body used for carrying out electroplating processing on the workpiece and a pair of grooves which are arranged below the upper bath body and are communicated with the upper bath body; the overflow guide groove is communicated with the upper groove body and the auxiliary groove; the water inlet pipe is arranged at one side of the auxiliary groove; the water inlet pipe penetrates through the upper groove body and is connected with the spray pipe.

Further, the number of the anode nets is two, and the anode nets are respectively an upper anode net arranged at the upper end of the workpiece and a lower anode net arranged at the lower end of the workpiece.

Further, the number of the spray pipes is two, and the spray pipes are respectively a first spray pipe arranged between the workpiece and the upper anode net and a second spray pipe arranged between the workpiece and the lower anode net.

Further, the number of the overflow ports is two, and the overflow ports are respectively a first overflow port which is arranged on the other side of the upper end of the electroplating bath and is opposite to the first spray pipe, and a second overflow port which is arranged on the other side of the upper end of the electroplating bath and is opposite to the second spray pipe.

Further, the overflow guide groove is communicated with the upper groove body through the first overflow port and the second overflow port, and the lower end of the overflow guide groove is connected with the auxiliary groove.

The beneficial effects of the utility model are as follows:

the device comprises an electroplating bath, at least one anode net arranged in the electroplating bath, a workpiece which is arranged in the electroplating bath and is opposite to the anode net, a circulating pump arranged outside the electroplating bath, a water outlet pipe connected with a water outlet of the circulating pump and the upper end of the electroplating bath, a water inlet pipe connected with a water inlet of the circulating pump and the lower end of the electroplating bath, and at least one spray pipe which is arranged on the side wall of the upper end of the electroplating bath and is opposite to a gap between the workpiece and the anode net. When the workpiece is electroplated, the circulating pump is started, electroplating liquid medicine below the electroplating tank is pumped into the water outlet pipe from the water inlet pipe, and is conveyed onto the spray pipe through the water outlet pipe, and then sprayed out by the spray pipe against a gap between the workpiece and the anode net, and the sprayed liquid medicine washes and takes away foam floating on the workpiece and the anode net, so that the electroplating of the workpiece is more uniform. And the sprayed liquid medicine can bring new metal elements, so that the metal elements consumed by electroplating in the electroplating bath are supplemented, and the efficiency and uniformity of workpiece electroplating are further improved. And the convection device is arranged in a horizontal convection mode, so that the position of the convection device is not required to be reserved between the anode and the cathode, the distance between the anode and the cathode is reduced, and the uniformity of metal elements of electroplating liquid medicine in the electroplating bath is further ensured.

The foregoing is a summary of the utility model and is further defined by the following detailed description of the utility model when read in conjunction with the accompanying drawings.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

fig. 2 is an enlarged view of a portion a in fig. 1;

in the figure: 1. plating bath; 11. an upper tank body; 12. a secondary groove; 2. an anode mesh; 21. an anode screen is arranged; 22. a lower anode mesh; 3. a workpiece; 4. a circulation pump; 5. a water outlet pipe; 6. a water inlet pipe; 7. a spray pipe; 71. a first nozzle; 72. a second nozzle; 8. an overflow port; 81. a first overflow port; 82. a second overflow port; 9. an overflow guide groove; 91. a deflector; 92. and a guide inclined surface.

Detailed Description

In order to further describe the technical means and effects adopted by the present utility model for achieving the intended purpose, the following detailed description of the specific embodiments of the present utility model is given with reference to the accompanying drawings and preferred embodiments.

In the description of the present utility model, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

Referring to fig. 1 and 2, an apparatus for circulating a plating solution in a horizontal convection manner is provided in an embodiment of the present utility model, which includes a plating tank 1, at least one anode net 2 disposed in the plating tank 1, a workpiece 3 disposed in the plating tank 1 and opposite to the anode net 2, a circulation pump 4 disposed outside the plating tank 1, a water outlet pipe 5 connected to a water outlet of the circulation pump 4 and an upper end of the plating tank 1, a water inlet pipe 6 connected to a water inlet of the circulation pump 4 and a lower end of the plating tank 1, and at least one nozzle 7 disposed on a sidewall of an upper end of the plating tank 1 and opposite to a gap between the workpiece 3 and the anode net 2. When the workpiece 3 is electroplated, the circulating pump 4 is started, electroplating liquid medicine below the electroplating tank 1 is pumped into the water outlet pipe 5 from the water inlet pipe 6, and is conveyed to the spray pipe 7 through the water outlet pipe 5, and then sprayed out by the spray pipe 7 to the gap between the workpiece 3 and the anode screen 2, the sprayed liquid medicine washes and takes away foam floating on the workpiece 3 and the anode screen 2, so that the foam is prevented from being attached to the workpiece 3, and the electroplating of the workpiece 3 is more uniform. And the sprayed liquid medicine can bring new metal elements, so that the metal elements consumed by electroplating in the electroplating bath 1 are supplemented, and the electroplating efficiency and uniformity of the workpiece 3 are further improved. And the convection device is arranged in a horizontal convection mode, so that the position of the convection device is not required to be reserved between the anode and the cathode, the distance between the anode and the cathode is reduced, and the uniformity of metal elements of electroplating liquid in the electroplating bath 1 is further ensured.

As shown in fig. 1, the specific mode of circulating the liquid medicine sprayed from the spray pipe 7 in the electroplating tank 1 further comprises an overflow port 8 arranged at the upper end of the electroplating tank 1 and opposite to the spray pipe 7, and an overflow guide slot 9 arranged on the same side of the electroplating tank 1 as the overflow port 8. The liquid medicine sprayed out of the spray pipe 7 takes foam away through a gap between the workpiece 3 and the anode net 2, enters the overflow port 8, enters the lower end of the electroplating bath 1 through the overflow guide slot 9 connected to the overflow port 8, is fused with the liquid medicine at the lower end of the electroplating bath 1, and is pumped away by the water inlet pipe 6, so that the purpose of recycling is achieved, and the uniformity of metal elements of the electroplating liquid medicine in the electroplating bath 1 is ensured. Wherein, the plating bath 1 or the overflow guide groove 9 can be externally connected with other machines for defoaming or use defoaming agents and the like, thereby eliminating foam and ensuring better electroplating effect of workpieces.

In order to make the liquid medicine in the overflow guiding groove 9 flow better, as shown in fig. 1, a plurality of guiding plates 91 inclined downwards are uniformly arranged on two sides of the inside of the overflow guiding groove 9. The guide plates 91 are arranged on two sides of the inside of the overflow guide groove 9 in a staggered manner, so that the liquid medicine flowing down from the overflow port 8 sequentially passes through the guide plates 91, is guided by the guide plates 91 to flow downwards, and finally enters the lower end of the electroplating tank 1, thereby achieving the purpose of circulating the liquid medicine.

In order to make the liquid medicine in the overflow guiding groove 9 easier to flow into the lower end of the plating tank 1, as shown in fig. 1, the lowest end of the overflow guiding groove 9 is provided with a guiding inclined surface 92 inclined from the upper left to the lower right, and by providing the guiding inclined surface 92, the liquid medicine flowing to the guiding inclined surface 92 is accelerated to enter into the lower end of the plating tank 1 by the guiding action of the guiding inclined surface 92, and the circulation efficiency of the liquid medicine in the plating tank 1 is further improved.

As shown in fig. 1, the plating tank 1 includes an upper tank 11 for performing plating processing on the workpiece 3, and a sub-tank 12 disposed below the upper tank 11 and in communication with the upper tank 11; the overflow guide groove 9 is communicated with the upper groove body 11 and the auxiliary groove 12; the water inlet pipe 6 is arranged at one side of the auxiliary groove 12; the water inlet pipe 6 penetrates through the upper groove body 11 and is connected with the spray pipe 7. The anode mesh 2 is disposed in the upper tank 11 to electroplate the workpiece 3. The spray pipe 7 is arranged on one side of the upper groove body 11, and the water inlet pipe 6 penetrates through the side wall of the upper groove body 11 and is connected with the spray pipe 7. The liquid medicine part sprayed out of the spray pipe 7 enters the upper groove body 11 and supplements metal elements by fusing with the liquid medicine between the anode net 2 and the workpiece 3, part of the liquid medicine takes away foam between the anode net 2 and the workpiece 3, the liquid medicine enters the overflow port 8, flows into the auxiliary groove 12 through the overflow guide groove 9 and fuses with the liquid medicine in the auxiliary groove 12, then enters the water inlet pipe 6 to be recycled, and the purpose of recycling the liquid medicine is achieved. Other mechanisms for supplementing the liquid medicine can be externally connected in the auxiliary tank 12, so that the sufficiency of metal elements in the liquid medicine in the auxiliary tank 12 is ensured.

As shown in fig. 1, the anode grids 2 are two groups, namely an upper anode grid 21 disposed at the upper end of the workpiece 3 and a lower anode grid 22 disposed at the lower end of the workpiece 3. The two groups of anode nets 2 are respectively arranged at the upper end and the lower end of the workpiece 3, so that the electroplating efficiency of the workpiece 3 is improved.

As shown in fig. 1, the number of the nozzles 7 is two, and the nozzles 7 are a first nozzle 71 disposed between the workpiece 3 and the upper anode mesh 21 and a second nozzle 72 disposed between the workpiece 3 and the lower anode mesh 22. The first nozzle 71 and the second nozzle 72 are connected to the water inlet pipe 6 together, and the liquid medicine is split from the water inlet pipe 6 into the first nozzle 71 and the second nozzle 72. The first spray pipe 71 is aligned between the workpiece 3 and the upper anode mesh 21 for spraying, so that the liquid medicine between the workpiece 3 and the upper anode mesh 21 is supplemented with metal elements and foam between the workpiece 3 and the upper anode mesh 21 is taken away, the foam is prevented from being attached to the workpiece 3, and the workpiece 3 is plated more uniformly. The second spray pipe 72 is aligned between the workpiece 3 and the lower anode mesh 22 for spraying, so that the liquid medicine between the workpiece 3 and the lower anode mesh 22 is supplemented with metal elements and foam between the workpiece 3 and the lower anode mesh 22 is taken away, the foam is prevented from adhering to the workpiece 3, and the workpiece 3 is plated more uniformly.

For the specific connection mode of the overflow guide groove 9 and the electroplating tank 1, as shown in fig. 1 and 2, the overflow guide groove 9 is communicated with the upper tank body 11 through the first overflow port 81 and the second overflow port 82, and the lower end of the overflow guide groove 9 is connected with the auxiliary tank 12, so that the liquid medicine enters the auxiliary tank 12 from the upper tank body 11, the circulation of the liquid medicine is completed, and the utilization rate of the liquid medicine is improved.

It should be noted that, the device for carrying out horizontal convection circulation on the electroplating liquid disclosed by the utility model is an improvement on a specific structure, and is not an innovation point of the utility model for a specific control mode. The circulating pump, the water pipe, the spray pipe and other components related to the utility model can be general standard components or components known to the person skilled in the art, and the structure, the principle and the control mode of the circulating pump, the water pipe, the spray pipe and other components are all known to the person skilled in the art through technical manuals or are known through routine experimental methods.

The foregoing is merely a preferred embodiment of the present utility model, and the technical scope of the present utility model is not limited to the above embodiments, so that other structures using the same or similar technical features as those of the above embodiments of the present utility model are all within the scope of the present utility model.

Claims

1. The utility model provides a device with electroplating liquid medicine carries out horizontal convection circulation, includes an electroplating bath, set up in at least one anode net in the electroplating bath, place in the electroplating bath just to a work piece of anode net, its characterized in that: the electroplating device further comprises a circulating pump arranged outside the electroplating bath, a water outlet pipe connected with the water outlet of the circulating pump and the upper end of the electroplating bath, a water inlet pipe connected with the water inlet of the circulating pump and the lower end of the electroplating bath, and at least one spray pipe arranged on the side wall of the upper end of the electroplating bath and opposite to a gap between the workpiece and the anode net.

2. The apparatus for horizontal convection circulation of electroplating bath according to claim 1, wherein: the device also comprises an overflow port which is arranged at the upper end of the electroplating bath and is opposite to the spray pipe, and an overflow guide groove which is arranged on the same side of the electroplating bath and the overflow port.

3. The apparatus for horizontal convection circulation of electroplating bath according to claim 2, wherein: and a plurality of guide plates which incline downwards are uniformly arranged on two sides of the inside of the overflow guide groove.

4. The apparatus for horizontal convection circulation of electroplating bath according to claim 2, wherein: the lowest end of the overflow guide groove is provided with a guide inclined surface which is inclined from top left to bottom right.

5. The apparatus for horizontal convection circulation of electroplating bath according to claim 2, wherein: the electroplating bath comprises an upper bath body used for carrying out electroplating processing on a workpiece and a pair of grooves which are arranged below the upper bath body and are communicated with the upper bath body; the overflow guide groove is communicated with the upper groove body and the auxiliary groove; the water inlet pipe is arranged at one side of the auxiliary groove; the water inlet pipe penetrates through the upper groove body and is connected with the spray pipe.

6. The apparatus for horizontal convection circulation of electroplating liquid according to claim 5, wherein: the number of the anode nets is two, and the anode nets are respectively an upper anode net arranged at the upper end of the workpiece and a lower anode net arranged at the lower end of the workpiece.

7. The apparatus for horizontal convection circulation of electroplating bath according to claim 6, wherein: the number of the spray pipes is two, and the spray pipes are respectively a first spray pipe arranged between the workpiece and the upper anode net and a second spray pipe arranged between the workpiece and the lower anode net.

8. The apparatus for horizontal convection circulation of electroplating bath according to claim 7, wherein: the number of the overflow ports is two, and the overflow ports are respectively a first overflow port which is arranged on the other side of the upper end of the electroplating bath and is opposite to the first spray pipe, and a second overflow port which is arranged on the other side of the upper end of the electroplating bath and is opposite to the second spray pipe.

9. The apparatus for horizontal convection circulation of electroplating bath according to claim 8, wherein: the overflow guide groove is communicated with the upper groove body through the first overflow port and the second overflow port, and the lower end of the overflow guide groove is connected with the auxiliary groove.