CN218445223U - Multi-sample loading combined device for scanning electron microscope - Google Patents
Multi-sample loading combined device for scanning electron microscope Download PDFInfo
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- CN218445223U CN218445223U CN202222120301.0U CN202222120301U CN218445223U CN 218445223 U CN218445223 U CN 218445223U CN 202222120301 U CN202222120301 U CN 202222120301U CN 218445223 U CN218445223 U CN 218445223U
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- 239000002131 composite material Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- -1 metallurgy Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007431 microscopic evaluation Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
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- 238000002360 preparation method Methods 0.000 description 1
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Abstract
The utility model relates to the field of detection equipment, in particular to a multi-sample loading combination device of a scanning electron microscope, which comprises a sample base and a sample table inserted on the sample base, wherein a plurality of sample supports are inserted along the edge of the sample table; the inner of sample support inserts the sample platform, and vertical recess has been seted up to the upper surface of sample support, and the outer end of sample support is worn out to the one end of vertical recess, and the outer wall of sample support is equipped with first inclined plane and second inclined plane, and first inclined plane and second inclined plane are located the both sides of vertical recess respectively, and the last edge on first inclined plane and second inclined plane extends to the notch of vertical recess respectively. Compared with the prior art, the utility model discloses rational in infrastructure can load multiple sample simultaneously through a plurality of sample platforms and observe, and vertical recess, first inclined plane and second inclined plane on the same sample support can be used for observing inclined plane, plane and the section sample appearance of sample, have improved observation efficiency.
Description
Technical Field
The utility model relates to a check out test set field, in particular to many samples of scanning electron microscope load composite set.
Background
The scanning electron microscope has large observation scale span, the micro-area capable of being analyzed can reach the magnitude of square millimeter and the magnitude of square micrometer, and the geometric resolution of the image can reach or be superior to the nanometer. The sample preparation is relatively simple, and accessories and other functions are abundant. At present, a scanning electron microscope is widely applied to the fields of physics, chemistry, materials, metallurgy, minerals, geology, biology and the like, is one of the most widely applied microscopic analysis instruments in the fields of scientific research, production and the like, and is an essential analysis means at present. The sample stage is one of the key components of the SEM, and is used to carry a sample and to image local features characterizing the sample by an electron beam scanning system. However, the current sample stage commonly used for SEM has certain limitation on observation of a section slope of a loaded sample, is only suitable for observation of a plane or a section, and cannot observe the appearance of the sample of the slope, the plane and the section on one sample stage; when the plane, the section and the inclined plane of a sample need to be observed, a plurality of sample stages of different types need to be selected and sample introduction is carried out successively, so that the observation time of the scanning electron microscope is prolonged, and the observation efficiency is influenced.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the utility model provides a many samples of scanning electron microscope load composite set.
The utility model adopts the technical scheme as follows: the scanning electron microscope multi-sample loading combined device is characterized in that: the device comprises a sample base and a sample table inserted on the sample base, wherein a plurality of sample supports are inserted along the edge of the sample table;
the inner of sample support inserts sample platform, vertical recess has been seted up to the upper surface of sample support, the one end of vertical recess is worn out the outer end of sample support, the outer wall of sample support is equipped with first inclined plane and second inclined plane, and first inclined plane and second inclined plane are located respectively the both sides of vertical recess, the last edge on first inclined plane and second inclined plane extends to respectively the notch of vertical recess.
Preferably, the sample platform is the rectangle, the type of falling T type groove has all been seted up to the lateral wall of sample platform, the sample support is the type of falling T seat, the type of falling T seat with the type of falling T groove sliding fit.
Preferably, the device also comprises a locking bolt and a positioning plate, wherein the locking bolt movably penetrates through the center of the positioning plate and then is in threaded connection with the center of the sample table.
Preferably, the inclination angles of the first inclined surface and the second inclined surface are different.
Preferably, the bottom of the sample table is provided with a support column, the sample base is provided with a fixing hole, and the fixing holes correspond to the support columns one to one.
Has the advantages that: compared with the prior art, the utility model provides a many samples of scanning electron microscope load composite set, rational in infrastructure can load multiple sample simultaneously through a plurality of sample stages and observe, and vertical recess, first inclined plane and the second inclined plane on the same sample support can be used for observing inclined plane, plane and the section sample appearance of sample, need not to select the different sample stages of a plurality of types and successively advance the appearance, have reduced scanning electron microscope's observation time, have improved observation efficiency.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a top view of FIG. 1;
fig. 3 is a schematic structural view of the sample holder.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention will be described in detail with reference to the accompanying drawings and the detailed description.
As shown in fig. 1-3, the scanning electron microscope multi-sample loading assembly includes a sample base 1 and a sample stage 2 inserted on the sample base 1, wherein a plurality of sample holders 3 are inserted along the edge of the sample stage 2;
insert the inner of sample support 3 sample platform 2, vertical recess 31 has been seted up to the upper surface of sample support 3, the one end of vertical recess 31 is worn out the outer end of sample support 3, the outer wall of sample support 3 is equipped with first inclined plane 32 and second inclined plane 33, and first inclined plane 32 and second inclined plane 33 are located respectively the both sides of vertical recess 31, the last edge on first inclined plane 32 and second inclined plane 33 extends to respectively the notch of vertical recess 31. Different samples are loaded on each sample support respectively for observation, the bottom of a vertical groove on the same sample support can be used for sample plane observation, the side wall of the vertical groove can be used for end face observation, and the first inclined plane and the second inclined plane can be used for inclined plane observation of the samples.
In this embodiment, sample platform 2 is the rectangle, the type of falling T type groove has all been seted up to sample platform 2's lateral wall, sample support 3 is the type of falling T seat, the type of falling T seat with the type of falling T groove sliding fit. The sample support is in sliding fit with the sample table, so that the sample can be replaced conveniently and quickly.
In the embodiment, the device further comprises a locking bolt 4 and a positioning plate 5, wherein the locking bolt 4 is movably connected with the center of the sample table 2 through threads after penetrating through the center of the positioning plate 5. And the positioning plate is tightly pressed with each sample support by screwing the locking bolt, so that the sample support is fixed with the sample.
In this embodiment, the first inclined surface 32 and the second inclined surface 33 have different inclination angles. The appearance of the sample inclined plane can be observed from different inclined angles, and preferably, the inclined angle of the first inclined plane ranges from 55 degrees to 65 degrees, and the inclined angle of the second inclined table top ranges from 25 degrees to 35 degrees.
In this embodiment, the bottom of the sample stage 2 is provided with a pillar 6, the sample base 1 is provided with a fixing hole 7, and the fixing hole 7 corresponds to the pillar 6 one by one. The sample stage can be effectively fixed, the sample is prevented from drifting in the testing process, preferably, 5-11 fixing holes are arranged, one fixing hole is located in the center of the sample base, the rest fixing holes are uniformly distributed around the center fixing hole, and the supporting columns correspond to the fixing holes one to one.
Finally, it should be noted that the above description is only a preferred embodiment of the present invention, and that those skilled in the art can make various similar representations without departing from the spirit and scope of the present invention.
Claims (5)
1. Scanning electron microscope many samples loads composite set, its characterized in that: the device comprises a sample base (1) and a sample table (2) inserted on the sample base (1), wherein a plurality of sample supports (3) are inserted along the edge of the sample table (2);
insert the inner of sample support (3) sample platform (2), vertical recess (31) have been seted up to the upper surface of sample support (3), the one end of vertical recess (31) is worn out the outer end of sample support (3), the outer wall of sample support (3) is equipped with first inclined plane (32) and second inclined plane (33), and first inclined plane (32) and second inclined plane (33) are located respectively the both sides of vertical recess (31), the last edge on first inclined plane (32) and second inclined plane (33) extends to respectively the notch of vertical recess (31).
2. A scanning electron microscope multi-sample loading assembly according to claim 1 wherein: the sample platform (2) is rectangular, the side wall of the sample platform (2) is provided with an inverted T-shaped groove, the sample support (3) is an inverted T-shaped seat, and the inverted T-shaped seat is in sliding fit with the inverted T-shaped groove.
3. A scanning electron microscope multi-sample loading assembly according to claim 1 wherein: the device is characterized by further comprising a locking bolt (4) and a positioning plate (5), wherein the locking bolt (4) movably penetrates through the center of the positioning plate (5) and then is in threaded connection with the center of the sample table (2).
4. A scanning electron microscope multi-sample loading assembly according to claim 1 wherein: the inclination angles of the first inclined surface (32) and the second inclined surface (33) are different.
5. A scanning electron microscope multi-sample loading assembly according to claim 1 wherein: the sample platform (2) bottom is equipped with pillar (6), fixed orifices (7) have been seted up on sample base (1), fixed orifices (7) with pillar (6) one-to-one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222120301.0U CN218445223U (en) | 2022-08-12 | 2022-08-12 | Multi-sample loading combined device for scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222120301.0U CN218445223U (en) | 2022-08-12 | 2022-08-12 | Multi-sample loading combined device for scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218445223U true CN218445223U (en) | 2023-02-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222120301.0U Active CN218445223U (en) | 2022-08-12 | 2022-08-12 | Multi-sample loading combined device for scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218445223U (en) |
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2022
- 2022-08-12 CN CN202222120301.0U patent/CN218445223U/en active Active
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