CN218360981U - 一种晶圆涂胶用ebr工艺喷头改良结构 - Google Patents
一种晶圆涂胶用ebr工艺喷头改良结构 Download PDFInfo
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- CN218360981U CN218360981U CN202222889248.0U CN202222889248U CN218360981U CN 218360981 U CN218360981 U CN 218360981U CN 202222889248 U CN202222889248 U CN 202222889248U CN 218360981 U CN218360981 U CN 218360981U
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Effective date of registration: 20240409 Address after: Building 20, No. 3888 Beiqing Road, Huaxin Town, Qingpu District, Shanghai, May 2017 Patentee after: New Yidong (Shanghai) Technology Co.,Ltd. Country or region after: China Address before: No.2, Yuanqian village, Shijing Town, Nan'an City, Quanzhou City, Fujian Province Patentee before: Fujian Anxin Semiconductor Technology Co.,Ltd. Country or region before: China |
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Effective date of registration: 20240626 Address after: Building 6, No. 3888 Beiqing Road, Huaxin Town, Qingpu District, Shanghai, 201708 Patentee after: Shanghai Xinyidong Semiconductor Technology Co.,Ltd. Country or region after: China Address before: Building 20, No. 3888 Beiqing Road, Huaxin Town, Qingpu District, Shanghai, May 2017 Patentee before: New Yidong (Shanghai) Technology Co.,Ltd. Country or region before: China |