CN101066543A - 联机式涂敷装置 - Google Patents
联机式涂敷装置 Download PDFInfo
- Publication number
- CN101066543A CN101066543A CNA2007100873953A CN200710087395A CN101066543A CN 101066543 A CN101066543 A CN 101066543A CN A2007100873953 A CNA2007100873953 A CN A2007100873953A CN 200710087395 A CN200710087395 A CN 200710087395A CN 101066543 A CN101066543 A CN 101066543A
- Authority
- CN
- China
- Prior art keywords
- substrate
- photoresist
- discharge opening
- coating apparatus
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060040541A KR100727001B1 (ko) | 2006-05-04 | 2006-05-04 | 인라인 타입 코팅장치 |
KR1020060040541 | 2006-05-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101066543A true CN101066543A (zh) | 2007-11-07 |
CN100496765C CN100496765C (zh) | 2009-06-10 |
Family
ID=38358995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2007100873953A Active CN100496765C (zh) | 2006-05-04 | 2007-04-03 | 联机式涂敷装置 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100727001B1 (zh) |
CN (1) | CN100496765C (zh) |
TW (1) | TWI349837B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102873052A (zh) * | 2011-07-12 | 2013-01-16 | 东丽株式会社 | 金属件清洗方法及涂敷装置 |
CN106735705A (zh) * | 2016-12-30 | 2017-05-31 | 中国电子科技集团公司第四十三研究所 | 一种电路基板装载装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100897241B1 (ko) * | 2007-09-28 | 2009-05-14 | 주식회사 디엠에스 | 약액 채움장치를 구비한 슬릿코터 |
US20100118153A1 (en) | 2008-11-12 | 2010-05-13 | Xiaoguang Yu | Apparatus and methods for controlling image sensors |
CN106475265A (zh) * | 2016-12-13 | 2017-03-08 | 苏州德亨节能环保科技有限公司 | 一种聚氨酯节能彩钢复合板涂胶装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4938994A (en) | 1987-11-23 | 1990-07-03 | Epicor Technology, Inc. | Method and apparatus for patch coating printed circuit boards |
KR100951355B1 (ko) * | 2003-07-02 | 2010-04-08 | 삼성전자주식회사 | 도포 장치 |
JP2005247516A (ja) | 2004-03-05 | 2005-09-15 | Tokyo Electron Ltd | 浮上式基板搬送処理装置 |
-
2006
- 2006-05-04 KR KR1020060040541A patent/KR100727001B1/ko active IP Right Grant
-
2007
- 2007-03-22 TW TW096109858A patent/TWI349837B/zh active
- 2007-04-03 CN CNB2007100873953A patent/CN100496765C/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102873052A (zh) * | 2011-07-12 | 2013-01-16 | 东丽株式会社 | 金属件清洗方法及涂敷装置 |
CN102873052B (zh) * | 2011-07-12 | 2016-08-24 | 东丽株式会社 | 金属件清洗方法及涂敷装置 |
CN106735705A (zh) * | 2016-12-30 | 2017-05-31 | 中国电子科技集团公司第四十三研究所 | 一种电路基板装载装置 |
Also Published As
Publication number | Publication date |
---|---|
TW200804992A (en) | 2008-01-16 |
TWI349837B (en) | 2011-10-01 |
CN100496765C (zh) | 2009-06-10 |
KR100727001B1 (ko) | 2007-06-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
|
TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do, South Korea Patentee after: Display Production Service Co., Ltd. Patentee after: Weihai dianmei Shiguang electromechanical Co Ltd Address before: Gyeonggi Do, South Korea Patentee before: Display Production Service Co., Ltd. |
|
TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |
|
CP03 | Change of name, title or address |