CN217228460U - Wafer material transmission and storage device - Google Patents
Wafer material transmission and storage device Download PDFInfo
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- CN217228460U CN217228460U CN202220184410.6U CN202220184410U CN217228460U CN 217228460 U CN217228460 U CN 217228460U CN 202220184410 U CN202220184410 U CN 202220184410U CN 217228460 U CN217228460 U CN 217228460U
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Abstract
The utility model discloses a wafer material transmission and storage device, which comprises a storage box, wherein a clapboard is fixedly connected between the inner surfaces of one side of the storage box; the utility model discloses can follow the bottom surface central point of wafer and put and carry out the bearing to it by circular planker, and two grip blocks can be fixed the both sides outer fringe of wafer under servo motor's effect, guaranteed that the wafer can not take place to rock at the in-process of transmission and storage, the effect of protection has been played to the wafer, two grip blocks can adjust distance between the two through servo motor, make the bin can save the wafer of multiple size, the practicality of bin has been increased, the clarifier is in the state of opening all the time after the storage chamber door is opened, the cleanliness of the inside air of bin has been guaranteed, make the wafer can not receive the pollution in the inside of bin, the cleanliness of wafer has obtained the guarantee, the wafer can reach the cleanliness that uses and has improved the efficiency of wafer transmission and storage.
Description
Technical Field
The utility model relates to a storage device technical field especially relates to a wafer material transmission and storage device.
Background
Currently, integrated circuits are widely used in electronic products, such as computers, industrial control devices, consumer electronics, and the like. With the rapid development of electronic products, IC design, integrated circuit manufacturing, and other technologies have also been rapidly developed. The various devices in an integrated circuit are often fabricated on a wafer.
Most wafers are stored and transmitted in a mode of bearing by using a wafer storage frame, most wafers borne by the wafer storage frame are in an exposed state, and if the cleanliness of a factory building is not high, the wafers are very easy to be polluted in the transmission process. However, the cleanliness of a factory building is not easy to control, the quality requirement of integrated circuits is higher and higher, the cleanliness requirement of a delivery room is higher and higher, and the higher cleanliness requirement of the delivery room obviously improves the production cost; therefore, a wafer material transferring and storing device is needed to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a wafer material transmission and storage device.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a wafer material transmission and storage device comprises a storage box, wherein a partition plate is fixedly connected between the inner faces of one side of the storage box, a servo motor is fixedly installed at the top of the side face of one side of the partition plate, a guide rod is fixedly connected between the side face of the other side of the partition plate and the inner face of the storage box, a threaded rod is fixedly connected with the output end of the servo motor, one end, far away from the servo motor, of the threaded rod is rotatably connected onto the inner face of the storage box, one end of a movable plate is sleeved on the outer edges of two ends of the threaded rod in an equal threaded mode, the other end of each movable plate is sleeved on the outer edge of the guide rod in an equal sliding mode, a support frame is fixedly connected onto the central position, between the two movable plates, of the inner face of the storage box, a circular dragging plate is fixedly connected onto the side face of the support frame, two spring telescopic rods are fixedly connected onto the opposite side faces of the movable plates, the telescopic ends of the two spring telescopic rods are fixedly connected with a clamping plate together, and the lower part of one side face of the partition plate is provided with a purification mechanism.
Preferably, the purification mechanism comprises a purifier, the purifier is mounted on the side face of one side of the partition plate, a purification opening is formed in the inner bottom face of the storage box, and air holes are formed in the side face of the storage box in a penetrating mode.
Preferably, the purification opening and the air holes are communicated with the purifier through a guide pipe, and the thread directions of two ends of the threaded rod are opposite.
Preferably, the side of the storage box is rotatably provided with a storage box door, and the top surface of the storage box is fixedly provided with a control panel.
Preferably, the side surfaces of the two moving plates are attached to the inner surface of the storage box.
Preferably, the clamping plate and the circular carriage are located at the same horizontal position.
The utility model discloses following beneficial effect has:
1. by arranging the servo motor, the threaded rod, the guide rod, the movable plate, the clamping plates and the circular planker, the circular planker can bear the wafer from the center of the bottom surface of the wafer, the two clamping plates can fix the outer edges of the two sides of the wafer under the action of the servo motor, the wafer is guaranteed not to shake in the transmission and storage processes, the wafer is protected, the distance between the two clamping plates can be adjusted through the servo motor, the storage box can store wafers of various sizes, and the practicability of the storage box is improved;
2. through setting up clarifier, purification mouth, bleeder vent, the clarifier is in the state of opening all the time after storing the chamber door and opening, has guaranteed the cleanliness of the inside air of bin for the wafer can not receive the pollution in the inside of bin, and the cleanliness of wafer has obtained the guarantee, and the wafer can reach the cleanliness that uses and has improved the efficiency that wafer transmission and save.
Drawings
Fig. 1 is a schematic view of a main structure of a wafer material conveying and storing device according to the present invention;
fig. 2 is a schematic view of a cross-sectional structure of a wafer material transferring and storing device according to the present invention;
fig. 3 is a schematic structural view of a clamping mechanism of a wafer material conveying and storing device according to the present invention;
in the figure: the device comprises a storage box 1, a partition plate 2, a servo motor 3, a threaded rod 4, a guide rod 5, a movable plate 6, a support frame 7, a circular carriage 8, a spring telescopic rod 9, a clamping plate 10, a purifier 11, a purification port 12, air holes 13, a storage box door 14 and a control panel 15.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-3, a wafer material transmission and storage device, comprising a storage box 1, a partition plate 2 is fixedly connected between the inner surfaces of one side of the storage box 1, a servo motor 3 is fixedly installed at the top of the side surface of one side of the partition plate 2, a guide rod 5 is fixedly connected at the lower part between the side surface of the other side of the partition plate 2 and the inner surface of the storage box 1, a threaded rod 4 is fixedly connected at the output end of the servo motor 3, one end of the threaded rod 4, far away from the servo motor 3, is rotatably connected to the inner surface of the storage box 1, one end of a movable plate 6 is sleeved on the outer edge of each of two ends of the threaded rod 4 in a threaded manner, the other ends of the two movable plates 6 are sleeved on the outer edge of the guide rod 5 in a sliding manner, a support frame 7 is fixedly connected to the central position between the two movable plates 6 of the inner surface of the storage box 1, a circular carriage 8 is fixedly connected to the side surface of the support frame 7, two spring telescopic rods 9 are fixedly connected to the opposite sides of the two movable plates 6, the telescopic ends of the two spring telescopic rods 9 are fixedly connected with a clamping plate 10, and the lower part of one side surface of the partition plate 2 is provided with a purification mechanism.
Referring to fig. 2, the purification mechanism includes a purifier 11, the purifier 11 is installed on a side surface of the partition plate 2, a purification opening 12 is opened on an inner bottom surface of the storage box 1, and an air hole 13 is opened through a side surface of the storage box 1.
Referring to fig. 2, the purification port 12 and the ventilation hole 13 are communicated with the purifier 11 through a guide pipe, and the thread directions of both ends of the threaded rod 4 are opposite.
Referring to fig. 1, a storage box door 14 is rotatably installed at a side surface of the storage box 1, and a control panel 15 is fixedly installed at a top surface of the storage box 1.
Referring to fig. 2, both side surfaces of the two moving plates 6 are attached to the inner surface of the storage box 1.
Referring to fig. 2, the clamping plate 10 and the circular carriage 8 are located at the same horizontal position.
The utility model discloses a concrete theory of operation as follows:
when the wafer material conveying and storing device is used, firstly, a worker adjusts the distance between two clamping plates 10 in the storage box 1 according to the size of a wafer, the size of the wafer is input through the control panel 15, then the controller starts the servo motor 3 to drive the threaded rod 4 to rotate, after the threaded rod 4 rotates, because one end of each of the two moving plates 6 is slidably sleeved on the outer edge of the guide rod 5, the other end of each moving plate is in threaded sleeve connection with the outer edge of the threaded rod 4, and the thread directions of two ends of the threaded rod 4 are opposite, therefore, the threaded rod 4 can drive the two moving plates 6 to move towards or away from each other along the guide rod 5 after rotating, therefore, the distance between the two clamping plates 10 can be adjusted, after the distance sleeve joint is completed, the wafer is placed on the top surface of the circular dragging plate 8, and the outer edges of the two sides of the wafer can be clamped and fixed by the clamping plates 10;
before the wafer is placed to the completion after, clarifier 11 is in the state of opening all the time, carries out the purification of air through purifying opening 12 to bin 1's inside to take a breath through bleeder vent 13, guaranteed that bin 1 is inside to be in dustless state.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (6)
1. The utility model provides a wafer material transmission and storage device, includes bin (1), its characterized in that, fixedly connected with baffle (2) between one side inner face of bin (1), the top fixed mounting of one side of baffle (2) has servo motor (3), lower part fixedly connected with guide bar (5) between the opposite side of baffle (2) and the inner face of bin (1), the output end fixedly connected with threaded rod (4) of servo motor (3), the one end rotation of servo motor (3) is kept away from in threaded rod (4) is connected on the inner face of bin (1), the one end of movable plate (6) has been cup jointed to equal screw thread on the both ends outer fringe of threaded rod (4), two the other end of movable plate (6) all slides and cup joints in the outer fringe of guide bar (5), the inner face of bin (1) is located the central point between two movable plates (6) and puts fixedly connected with support frame (7), the side face of the support frame (7) is fixedly connected with a circular dragging plate (8), two opposite side faces of the moving plates (6) are fixedly connected with two spring telescopic rods (9), the telescopic ends of the two spring telescopic rods (9) are fixedly connected with a clamping plate (10) together, and the lower portion of the side face of one side of the partition plate (2) is provided with a purification mechanism.
2. The wafer material conveying and storing device as claimed in claim 1, wherein the purifying mechanism comprises a purifier (11), the purifier (11) is installed on one side of the partition plate (2), a purifying opening (12) is opened on the inner bottom surface of the storage box (1), and an air hole (13) is opened through the side surface of the storage box (1).
3. A device for transferring and storing a wafer material as claimed in claim 2, wherein the purge port (12) and the vent (13) are both connected to the purge unit (11) through a conduit, and the thread direction of the two ends of the threaded rod (4) is opposite.
4. The wafer material conveying and storing device as claimed in claim 1, wherein a storage box door (14) is rotatably installed at a side surface of the storage box (1), and a control panel (15) is fixedly installed at a top surface of the storage box (1).
5. The wafer material conveying and storing device as claimed in claim 1, wherein the two moving plates (6) are attached to the inner surface of the storage box (1) at the sides thereof.
6. A wafer material transfer and storage device according to claim 1, wherein the holding plate (10) and the circular carrier (8) are located at the same horizontal position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220184410.6U CN217228460U (en) | 2022-01-21 | 2022-01-21 | Wafer material transmission and storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220184410.6U CN217228460U (en) | 2022-01-21 | 2022-01-21 | Wafer material transmission and storage device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217228460U true CN217228460U (en) | 2022-08-19 |
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ID=82832669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220184410.6U Active CN217228460U (en) | 2022-01-21 | 2022-01-21 | Wafer material transmission and storage device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217228460U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116986143A (en) * | 2023-09-26 | 2023-11-03 | 无棣县兴亚生物科技有限公司 | Storage device is used in meat powder production |
| CN117775512A (en) * | 2024-02-26 | 2024-03-29 | 苏州尊恒半导体科技有限公司 | Workshop storage equipment for wafers |
-
2022
- 2022-01-21 CN CN202220184410.6U patent/CN217228460U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116986143A (en) * | 2023-09-26 | 2023-11-03 | 无棣县兴亚生物科技有限公司 | Storage device is used in meat powder production |
| CN116986143B (en) * | 2023-09-26 | 2023-12-15 | 无棣县兴亚生物科技有限公司 | Storage device is used in meat powder production |
| CN117775512A (en) * | 2024-02-26 | 2024-03-29 | 苏州尊恒半导体科技有限公司 | Workshop storage equipment for wafers |
| CN117775512B (en) * | 2024-02-26 | 2024-04-26 | 苏州尊恒半导体科技有限公司 | Workshop storage equipment for wafers |
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