CN219928332U - Multi-station mask temporary storage device - Google Patents
Multi-station mask temporary storage device Download PDFInfo
- Publication number
- CN219928332U CN219928332U CN202321275774.6U CN202321275774U CN219928332U CN 219928332 U CN219928332 U CN 219928332U CN 202321275774 U CN202321275774 U CN 202321275774U CN 219928332 U CN219928332 U CN 219928332U
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- mounting plate
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- 238000003860 storage Methods 0.000 title claims abstract description 48
- 230000007246 mechanism Effects 0.000 claims abstract description 69
- 230000017105 transposition Effects 0.000 claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 16
- 238000007599 discharging Methods 0.000 abstract description 4
- 210000001503 joint Anatomy 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The utility model discloses a multi-station mask temporary storage device which comprises a plurality of mask storage mechanisms, wherein each mask storage mechanism comprises two mask storage stations which are oppositely arranged, and a transposition mechanism is connected between the two mask storage stations which are oppositely arranged; the transposition mechanism comprises a rotating shaft, and one end of the rotating shaft is connected with a transposition driving assembly; the plate storage station is provided with an upper clamping plate mechanism and a lower clamping plate mechanism, the upper clamping plate mechanism and the lower clamping plate mechanism are oppositely arranged, the upper clamping plate mechanism comprises an upper lifting assembly and an upper clamping assembly driven by the upper lifting assembly, the lower clamping plate mechanism comprises a lower lifting assembly and a lower clamping assembly driven by the lower lifting assembly, and the upper clamping assembly and the lower clamping assembly are oppositely arranged; the multi-station mask temporary storage device can be in butt joint with a mechanical arm, realizes automatic feeding and discharging, occupies small space, has a plurality of placing stations, and can be suitable for two procedures with large procedure time difference.
Description
Technical Field
The utility model belongs to the field of mask processing auxiliary equipment, and particularly relates to a multi-station mask temporary storage device.
Background
The mask is also called a mask, is an important product used for manufacturing patterns in the chip and panel display industries, the patterns on the mask are transferred onto a substrate through exposure by photoetching designed patterns on the surface of the mask, and thousands of chips or panels are produced by one mask.
At present, a mask production line generally comprises working procedures such as photoetching, developing, etching, cleaning, measuring and the like, the time of each working procedure is inconsistent, if one measuring working procedure is completed, about 20 minutes are needed, and 1-2 hours are needed for one cleaning working procedure, thus the operation process of the production line is caused, the working procedures with longer partial use time can be blocked, the circulation of the production line is unsmooth, and the product cannot reach the unprocessed working procedures. In order to solve the problem, the current practice is to place the blocked mask plate in a material waiting area after blanking and packing, and to reload the mask plate in the material waiting area when the working procedure is idle. The processes of blanking, boxing, turnover and reloading generally need to consume at least 1h, and in addition, the condition that personnel contact a mask plate to cause layout pollution exists in the blanking process. Along with the higher and higher requirements on the quality of the mask, the turnover mode is not suitable for a modern automatic mask factory, so that a temporary storage mechanism capable of being matched with an automatic mechanical arm and the like to operate the upper and lower masks is needed to temporarily store the mask to be processed, the mask is placed near processing equipment, temporary storage of the mask is realized, and meanwhile, the problems that manual feeding and discharging of personnel influence the operation of a production line and cause product pollution can be avoided.
Disclosure of Invention
The utility model aims to provide a multi-station mask temporary storage device, which solves the problems in the background art, obtains the mask temporary storage device which can be in butt joint with a mechanical arm and realize automatic feeding and discharging, and has small occupied space and a plurality of placing stations, and can be suitable for two procedures with larger procedure time difference.
The utility model relates to a multi-station mask temporary storage device, which comprises a plurality of mask storage mechanisms, wherein each mask storage mechanism comprises two mask storage stations which are oppositely arranged, and a transposition mechanism is connected between the two mask storage stations which are oppositely arranged; the transposition mechanism comprises a rotating shaft, and one end of the rotating shaft is connected with a transposition driving assembly;
the plate storing station is provided with an upper clamping plate mechanism and a lower clamping plate mechanism, the upper clamping plate mechanism and the lower clamping plate mechanism are oppositely arranged, the upper clamping plate mechanism comprises an upper lifting assembly and an upper clamping assembly driven by the upper lifting assembly, the lower clamping plate mechanism comprises a lower lifting assembly and a lower clamping assembly driven by the lower lifting assembly, and the upper clamping assembly and the lower clamping assembly are oppositely arranged.
Preferably, an upper fixing plate and a lower fixing plate which are oppositely and symmetrically arranged are fixed on the rotating shaft, and the upper clamping plate mechanism and the lower clamping plate mechanism are respectively fixed on the upper fixing plate and the lower fixing plate.
Preferably, the upper lifting assembly and the lower lifting assembly include, but are not limited to, a linear motor, a cylinder, an oil cylinder, and a crank-link assembly or a drive screw with a power source.
Preferably, the upper clamping assembly and the lower clamping assembly comprise a mounting plate, a first limiting block and a second limiting block which are fixed on the mounting plate, a plate accommodating area is formed between the first limiting block and the second limiting block, and the edge of the mask plate is arranged in the plate accommodating area.
Preferably, the two ends of the rotating shaft are respectively connected with an upper mounting plate and a lower mounting plate, the upper mounting plate and the lower mounting plate are symmetrically arranged, the length of the upper mounting plate is larger than the dimension of the mask plate to be placed along the length direction of the upper mounting plate, and the rotating shaft penetrates through the centers of the upper mounting plate and the lower mounting plate.
Preferably, the plate storing mechanisms comprise four groups, the four groups of plate storing mechanisms are arranged into a rectangle, the upper mounting plates between two adjacent plate storing mechanisms are fixedly connected, and the lower mounting plates between two adjacent plate storing mechanisms are fixedly connected.
The technical scheme of the utility model has the beneficial effects that the multi-station mask temporary storage device is as follows:
through the pivot and with the setting of two version stations that deposit of pivot symmetry setting for two concrete station of depositing on the version mechanism are deposited to one, increase can put version position quantity, simultaneously because of deposit the design of version mechanism structure, make two masks of placing compact, the effectual low space requirement of depositing of a lot of that has realized.
Drawings
Fig. 1 is a schematic structural diagram of a multi-station mask temporary storage device according to the technical scheme of the utility model.
Fig. 2 is a schematic structural diagram of a plate storing mechanism in the technical scheme of the utility model.
Fig. 3 is a front view of fig. 2.
Detailed Description
In order to facilitate the understanding of the technical scheme of the present utility model by those skilled in the art, the technical scheme of the present utility model will be further described with reference to specific embodiments and drawings attached to the specification.
The technical scheme of the utility model relates to a multi-station mask temporary storage device, which comprises a plurality of mask storage mechanisms 1, wherein the mask storage mechanisms 1 comprise two mask storage stations 20 which are oppositely arranged. A transposition mechanism is connected between the two oppositely arranged plate storage stations 20; the transposition mechanism comprises a rotating shaft 11, and one end of the rotating shaft 11 is connected with a transposition driving assembly 12. The transposition driving assembly 12 drives the rotating shaft 11 to rotate, so that two plate storage stations 20 fixed on the rotating shaft are exchanged, and the purpose of placing the mask plates on the plate storage stations 20 far away from the operator side or discharging the mask plates on the plate storage stations 20 far away from the operator side can be achieved, and the plate storage quantity of the plate storage mechanism 1 is effectively increased.
In this scheme, use pivot 11 as two version stations 20 that the axisymmetric set up structure unanimous. The plate storing station 20 is provided with an upper clamping plate mechanism and a lower clamping plate mechanism. The upper clamping plate mechanism and the lower clamping plate mechanism are arranged oppositely. The upper clamping plate mechanism comprises an upper lifting assembly 21 and an upper clamping assembly driven by the upper lifting assembly 21. The lower clamping plate mechanism comprises a lower lifting assembly 25 and a lower clamping assembly driven by the lower lifting assembly 25. The upper clamping assembly and the lower clamping assembly are disposed opposite one another. The mask is clamped by the opposite action of the upper clamping assembly and the lower clamping assembly. In operation, the upper lifting assembly 21 and the lower lifting assembly 25 respectively drive the upper clamping assembly and the lower clamping assembly to descend or ascend, so as to clamp the mask plate arranged between the upper clamping assembly and the lower clamping assembly.
In the scheme, through the arrangement of the upper clamping assembly and the lower clamping assembly, the mask plate is in a vertical state when being clamped and stored, the mask plate is placed in the vertical state, the mask plate is beneficial to being in butt joint with an external robot arm, the automatic plate taking and placing of the robot is realized, and the problem of mask plate pollution caused by manual mask plate moving is avoided. And the plate is taken and placed by the robot, so that the labor intensity is reduced on one hand, and meanwhile, the problems of plate falling and the like during manual plate taking and placing are avoided. In addition, in a dust-free workshop in time, a small amount of dust still can exist, so the mask is stored in a vertical mode, dust in air can be prevented from being stopped on the mask, and cleanliness of the mask is ensured.
In the technical scheme, an upper fixing plate 15 and a lower fixing plate 16 which are oppositely and symmetrically arranged are fixed on a rotating shaft 11, and an upper clamping plate mechanism and a lower clamping plate mechanism are respectively fixed on the upper fixing plate 15 and the lower fixing plate 16. The upper clamping plate mechanism and the lower clamping plate mechanism on the two plate storing stations 20 are respectively fixed on the upper fixing plate 15 and the lower fixing plate 16, so that the two plate storing stations 20 are convenient to fix with the rotating shaft 11, and the rotating shaft can smoothly realize transposition of the two plate storing stations 20 when rotating. Through the setting of last fixed plate and lower fixed plate, realized the installation and the fixed of punch holder mechanism and lower clamping mechanism, simple structure is compact, and the mask version of being convenient for is placed, and the pivot work of also being convenient for drives two and deposits version station 20 transposition simultaneously.
In this solution, the upper lifting assembly 21 and the lower lifting assembly 25 include, but are not limited to, a linear motor, an air cylinder, an oil cylinder, a crank-connecting rod assembly driven by a power source or a transmission screw rod, and other structures capable of realizing linear motion, so as to drive the upper clamping assembly and the lower clamping assembly to lift. In this scheme, in order to ensure upper portion clamping assembly and lower part clamping assembly at the steady of clamping process, and multistation mask temporary storage device keeps steady easy control, upper portion lifting assembly 21 and lower part lifting assembly 25 all adopt linear electric motor.
In the scheme, the transposition driving assembly 12 adopts a stepping motor, the stepping motor drives the rotating shaft to rotate for 180 degrees each time, 360 degrees of rotation of the rotating shaft is realized, and meanwhile, the rotating angle of the rotating shaft is precisely controlled, so that a plate placing station on the multi-station mask temporary storage device is precisely abutted with an external robot and the like.
In this scheme, upper portion clamp assembly and lower part clamp assembly all include mounting panel 22, 26 and fix first stopper 23, 27 and second stopper 24, 28 on mounting panel 22, 26, form between first stopper 23, 27 and second stopper 24, 28 and hold version district 30, mask 10 border is arranged in holding version district 30. The mounting plates 22 and 26 are fixedly connected with the upper lifting assembly 21 and the lower lifting assembly 25 respectively, and driven by the upper lifting assembly 21 and the lower lifting assembly 25 to lift respectively, namely lifting of the first limiting blocks 23 and 27 and the second limiting blocks 24 and 28 is realized. Clamping is achieved through the mask containing area 30 formed by the first limiting blocks 23 and 27 and the second limiting blocks 24 and 28, clamping operation is simple, clamping is achieved only through linear lifting of the first limiting blocks 23 and 27 and the second limiting blocks 24 and 28, meanwhile, the first limiting blocks 23 and 27 and the second limiting blocks 24 and 28 form the structural design of the mask containing area 30, limiting of the mask can be achieved, the problem that sliding or falling of the stored mask is avoided, and the fact that sliding of the mask cannot occur in the rotating transposition process of the rotating shaft is guaranteed.
In the scheme, a rotating shaft, an upper clamping assembly, a lower clamping assembly and the like with proper sizes are selected according to the needs, and the upper clamping assembly and the lower clamping assembly are driven to lift through an upper lifting assembly 21 and a lower lifting assembly 25, so that the mask plate with the most sizes in the prior art can be placed basically, and the mask plate with the sizes of 520mm multiplied by 800mm to 1220mm multiplied by 1400mm in the manufacturing line of the present department is placed, and the adaptability is strong.
In this scheme, pivot 11 both ends are connected with mounting panel 13 and lower mounting panel 14 respectively, and mounting panel 13 and lower mounting panel 14 realize the installation of pivot 11. The upper mounting plate 13 and the lower mounting plate 14 are symmetrically arranged, the length of the upper mounting plate is larger than the dimension of the placed mask plate 10 along the length direction of the upper mounting plate 13, and the rotating shaft 11 passes through the centers of the upper mounting plate 13 and the lower mounting plate 14, so that the stored mask plate cannot interfere with the multi-station mask plate temporary storage device when the plate placing station is used for transposition.
In this scheme, in order to realize the purpose of low space big storage volume, deposit version mechanism 1 and be provided with four groups, four groups deposit version mechanism 1 and arrange into the rectangle, the rigid coupling between the upper mounting panel between the two adjacent deposit version mechanism 1, the rigid coupling between the lower mounting panel between the two adjacent deposit version mechanism 1, i.e. between the adjacent upper mounting panel and the rigid coupling between the adjacent lower mounting panel for four groups deposit version mechanism 1 and connect as a whole, make many station mask version temporary storage device stable in structure, as shown in fig. 1. The four groups of storage mechanisms in the scheme are used, so that 8 masks can be stored at most once by the multi-station mask temporary storage device, and the utilization rate is high.
In this scheme, transposition drive assembly 12, upper portion lifting assembly 21 and lower part lifting assembly 25 all pass through PLC control, can carry out signal interaction with production line transfer robot, automatic get and put the version.
While the present utility model has been described above by way of example with reference to the embodiments and the accompanying drawings, it is apparent that the specific implementation of the present utility model is not limited by the foregoing, and it is within the scope of the present utility model to apply the inventive concept and technical solution to other situations without any substantial improvement or improvement.
Claims (6)
1. The multi-station mask temporary storage device is characterized by comprising a plurality of mask storage mechanisms, wherein each mask storage mechanism comprises two mask storage stations which are arranged oppositely, and a transposition mechanism is connected between the two mask storage stations which are arranged oppositely; the transposition mechanism comprises a rotating shaft, and one end of the rotating shaft is connected with a transposition driving assembly;
the plate storing station is provided with an upper clamping plate mechanism and a lower clamping plate mechanism, the upper clamping plate mechanism and the lower clamping plate mechanism are oppositely arranged, the upper clamping plate mechanism comprises an upper lifting assembly and an upper clamping assembly driven by the upper lifting assembly, the lower clamping plate mechanism comprises a lower lifting assembly and a lower clamping assembly driven by the lower lifting assembly, and the upper clamping assembly and the lower clamping assembly are oppositely arranged.
2. The multi-station reticle temporary storage device according to claim 1, wherein an upper fixing plate and a lower fixing plate which are opposite and symmetrically arranged are fixed on the rotating shaft, and the upper clamping plate mechanism and the lower clamping plate mechanism are respectively fixed on the upper fixing plate and the lower fixing plate.
3. The multi-station reticle temporary storage of claim 1, wherein the upper lifting assembly and the lower lifting assembly comprise a linear motor, a cylinder, an oil cylinder and a crank-link assembly or a transmission screw driven by a power source.
4. The multi-station reticle temporary storage device of claim 1, wherein the upper clamping assembly and the lower clamping assembly each comprise a mounting plate, a first limiting block and a second limiting block fixed on the mounting plate, a reticle accommodating area is formed between the first limiting block and the second limiting block, and a reticle edge is arranged in the reticle accommodating area.
5. The multi-station mask temporary storage device according to claim 1, wherein two ends of the rotating shaft are respectively connected with an upper mounting plate and a lower mounting plate, the upper mounting plate and the lower mounting plate are symmetrically arranged and have a length larger than the dimension of the placed mask along the length direction of the upper mounting plate, and the rotating shaft passes through the centers of the upper mounting plate and the lower mounting plate.
6. The multi-station mask temporary storage device according to claim 5, wherein the mask storing mechanism comprises four groups, the four groups of mask storing mechanisms are arranged in a rectangle, an upper mounting plate between two adjacent mask storing mechanisms is fixedly connected, and a lower mounting plate between two adjacent mask storing mechanisms is fixedly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321275774.6U CN219928332U (en) | 2023-05-24 | 2023-05-24 | Multi-station mask temporary storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321275774.6U CN219928332U (en) | 2023-05-24 | 2023-05-24 | Multi-station mask temporary storage device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219928332U true CN219928332U (en) | 2023-10-31 |
Family
ID=88495787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321275774.6U Active CN219928332U (en) | 2023-05-24 | 2023-05-24 | Multi-station mask temporary storage device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219928332U (en) |
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2023
- 2023-05-24 CN CN202321275774.6U patent/CN219928332U/en active Active
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