CN108866512B - Automatic change machine for clamping points of graphite boats - Google Patents
Automatic change machine for clamping points of graphite boats Download PDFInfo
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- CN108866512B CN108866512B CN201811070361.8A CN201811070361A CN108866512B CN 108866512 B CN108866512 B CN 108866512B CN 201811070361 A CN201811070361 A CN 201811070361A CN 108866512 B CN108866512 B CN 108866512B
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- point
- stuck point
- driving mechanism
- die
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 57
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 57
- 239000010439 graphite Substances 0.000 title claims abstract description 57
- 230000008859 change Effects 0.000 title description 2
- 238000003860 storage Methods 0.000 claims abstract description 29
- 238000006073 displacement reaction Methods 0.000 claims description 55
- 230000007246 mechanism Effects 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 12
- 238000011084 recovery Methods 0.000 claims description 4
- 239000000428 dust Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000012797 qualification Methods 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 6
- 238000000576 coating method Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
Abstract
The invention belongs to the field of solar cell manufacturing, and particularly relates to an automatic graphite boat stuck point replacing machine which comprises a frame main body, a new stuck point storage box, an upper die module, a middle die module, a stuck point storage box and a control module. The invention has the advantages of high degree of automation, simple and convenient operation, high replacement quality, improved product qualification rate, time and labor saving, high working efficiency and wide application prospect.
Description
Technical Field
The invention belongs to the field of solar cell manufacturing, and particularly relates to an automatic graphite boat stuck point replacing machine.
Background
With the rapid development of solar cells, more and more solar cells are entering the civil field. In the production process of the solar cell, a PECVD (plasma enhanced chemical vapor deposition) film coating process is an important link in the production flow and plays a role in importance. PECVD ionizes a gas containing atoms constituting a thin film by means of microwaves or radio frequency, etc., locally forms plasma, and the plasma has strong chemical activity and is easily reacted to deposit a desired thin film on a substrate. When the silicon wafer is subjected to the surface coating process, the uncoated silicon wafer is required to be inserted into a carrier of PECVD vacuum coating equipment. Currently, a graphite boat is generally adopted for a slide loader, and the specific operation process is as follows: and inserting the silicon wafer into a graphite boat and positioning the silicon wafer on the graphite boat through a clamping point of the graphite boat, then placing the graphite boat carrying the silicon wafer in PECVD vacuum coating equipment, and coating the silicon wafer by adopting a PECVD process. In order to fix the silicon chip in the graphite boat, a clamping point for fixing the silicon chip is arranged on the graphite boat sheet of the graphite boat, and the clamping point is required to be replaced regularly because the silicon chip can be worn out to a certain extent in the inserting and taking process, so that the good state of the graphite boat is ensured, and the coating quality of the silicon chip is further ensured.
The traditional graphite boat stuck point replacement method has complex and tedious operation steps, and higher skill requirements for assembly staff, and if the skill operation is not in place, the graphite boat sheets and the graphite boat stuck points are damaged or assembled in place in the replacement process, and the traditional graphite boat stuck point replacement operation method comprises the following steps: a simple manual press is needed for clamping points of a graphite boat, foam plates or rubber gaskets are needed for the two sides of the press to be at the same height as a manual press platform, an operator sits on the front of the press to place graphite boat sheets horizontally on the manual press platform, then the manual press is sequentially used for disassembling 24 clamping points of the graphite boat, after the graphite boat clamping points are disassembled, the operator places new clamping points on corresponding clamping holes, the press is rotated downwards by holding the left hand and the right hand with care of wings, the force of the hand is needed to be held well, if the force is too large, the graphite boat and the clamping points are crushed, if the force is too small, the replacement of the clamping point of the next graphite boat sheet is continued after the clamping point of one graphite boat sheet is pressed, one graphite boat is formed in one day, a plurality of such graphite boat clamping points are needed to be replaced, the operation of the operator is complex and is often complicated because of the fact that the clamping points are not needed to be replaced, the production progress is slow, the graphite boat is damaged, the quality of the silicon wafer is damaged, and the quality of the silicon wafer is not damaged in the process.
Disclosure of Invention
The invention aims to solve the defects of the prior art and provide an automatic graphite boat stuck point replacing machine which has the advantages of high automation degree, simple and convenient operation, high replacement quality, no damage to stuck points and high working efficiency.
The invention solves the defects of the prior art, adopts the following technical proposal:
an automated graphite boat stuck point changer, comprising:
a frame body for carrying other modules arranged thereon;
the new stuck point storage box is arranged on one side of the frame main body and provides a new stuck point for the graphite boat;
the upper die module comprises an upper die and an upper die displacement driving mechanism, the upper die displacement driving mechanism is connected with the upper die, the upper die is driven by the upper die displacement driving mechanism to perform up-down displacement, and a plurality of upper die unloading point columns for unloading old clamping points are arranged on the upper die;
the middle die module comprises a middle die and a middle die displacement driving mechanism, wherein the middle die displacement driving mechanism is connected with the middle die, the middle die is driven by the middle die displacement driving mechanism to perform left-right displacement between an origin position and a loading point position, and the middle die is used for placing a graphite boat with a clamping point to be unloaded;
the dotting module comprises at least one dotting device and a dotting device displacement driving mechanism, wherein the dotting device is arranged below the new stuck point storage box, the dotting device displacement driving mechanism is connected with the dotting device, and the dotting device is driven by the dotting device displacement driving mechanism to carry out XYZ shaft displacement;
the control module is electrically connected with the new stuck point storage box, the upper die module, the middle die module and the point loading module respectively and is used for controlling the working processes of the new stuck point storage box, the upper die module, the middle die module and the point loading module.
Preferably, the replacing machine further comprises a lower die module arranged below the middle die module, wherein the lower die module comprises a lower die and a lower die displacement driving mechanism, and the lower die is driven by the lower die displacement driving mechanism to vertically displace.
Preferably, the new stuck point storage box comprises a box body, a stuck point slideway, a sliding block connecting rod and a cylinder, wherein a feed opening is formed in the lower side of the box body, the stuck point slideway is connected with the box body through the feed opening, a valve column for controlling the feeding of the stuck point is arranged at the position where the feed opening is communicated with the stuck point slideway, the cylinder is connected with the valve column through the sliding block connecting rod, and a valve plug is arranged at the lower end of the valve column.
Preferably, the dotting device comprises a hopper, a vibration pump, a cylinder, a stuck point falling pipeline and a pressure point opening, wherein the hopper is arranged below the new stuck point storage box, the vibration pump is arranged on one side of the hopper, the stuck point falling pipeline is arranged below the hopper, and a piston rod of the cylinder is connected with the pressure point opening.
Preferably, the replacing machine further comprises an old stuck point recovery box, wherein the old stuck point recovery box is arranged below the middle die set and is used for recovering the unloaded old stuck point.
Preferably, the displacement driving mechanism of the dotting device is characterized in that an X-axis track and an X-axis screw rod are arranged on the frame main body, an X-axis sliding seat capable of freely sliding along the X-axis track is arranged on the X-axis sliding seat, a Z-axis track and a Z-axis screw rod are arranged on the X-axis sliding seat, the Z-axis track is connected with the X-axis screw rod, the X-axis screw rod is connected with an X-axis driving motor, a Z-axis sliding seat capable of freely sliding along the Z-axis track is arranged on the Z-axis track, the dotting device is connected with the Z-axis screw rod, the Z-axis screw rod is connected with the Z-axis driving motor, a Y-axis track and a Y-axis screw rod are arranged above the X-axis track, the Y-axis sliding seat capable of freely sliding along the Y-axis track is arranged on the Y-axis track, and the X-axis track is connected with the Y-axis sliding seat and the Y-axis screw rod, and the Y-axis screw rod is connected with the Y-axis driving motor.
Preferably, a dust cover is arranged above the Y-axis track.
The automatic graphite boat stuck point replacing machine has the advantages that as the automatic graphite boat stuck point replacing machine comprises the frame main body, the new stuck point storage box, the upper die module, the middle die module, the stuck point storage box and the control module, when the automatic graphite boat stuck point replacing machine is used, firstly, the graphite boat with stuck points to be replaced is placed on the middle die module, then under the control of the control module, the old stuck points are unloaded by utilizing a plurality of stuck point unloading columns in the upper die module, then the middle die module is moved to a stuck point position, the new stuck points are installed on the graphite boat by the stuck point device, after the stuck points in the stuck point device are completely loaded, the stuck point device is moved to the position below the new stuck point storage box under the driving of the stuck point device displacement driving mechanism, the new stuck point storage box automatically loads the stored new stuck points into a hopper in the stuck point device, the feeding speed is high, the follow-up working flow can be effectively ensured to be smooth, and the working efficiency is improved. The invention has high degree of automation, simple operation and high working efficiency, the clamping points on the previous manual graphite boat sheet unloading are pressed by a manual press under 24, the 24 clamping points can be unloaded at one time only by one time in the prior use, and the working efficiency is improved by more than 24 times; the replacement quality is high, when the manual press is used for operation in the past, graphite boat sheets and stuck points are frequently crushed or are not pressed in place, so that the fragment rate and the reject ratio of products are increased; the labor intensity of operators is relieved, and the operation of 3 persons is needed to stop before, so that the work of replacing the clamping point of the graphite boat can be easily finished by one person by using the invention; the working space is improved, the occupied area of the previous 3 persons sitting on a row is 4.5 square meters, and the working space of 2.2104 square meters is saved only by 2.2896 square meters when the invention is used at present; the invention improves the working environment, and the work of manually replacing the clamping point of the graphite boat is finished in the past, and the invention can be automatically finished at present, so that the field can be well maintained for 6s.
Drawings
Fig. 1 and 2 are schematic structural views of an embodiment of an automatic graphite boat stuck point changer according to the present invention, and are also schematic views of a preferred embodiment.
Fig. 3 is a front view of fig. 1.
Fig. 4 is a partial enlarged view at a of fig. 2.
FIG. 5 is a schematic diagram of an embodiment of a dotting module.
Fig. 6 is a partial enlarged view at B of fig. 5.
Detailed Description
The following description is presented to enable one of ordinary skill in the art to make and use the invention. The preferred embodiments in the following description are by way of example only and other obvious variations will occur to those skilled in the art. The basic principles of the invention defined in the following description may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
In the description of the present invention, it should be noted that the azimuth or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or element referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present invention.
FIGS. 1-6 are schematic structural views of an embodiment of an automated graphite boat stuck point changer of the present invention, also shown as a preferred embodiment. As shown in fig. 1 to 6, the automatic graphite boat stuck point replacing machine according to the present embodiment includes: the machine frame comprises a machine frame body 10, a new stuck point storage box 20, an upper die module 30, a middle die module 40, a loading point module 50 and a control module 60, wherein the machine frame body 10 is used for bearing other modules arranged on the machine frame body; the new stuck point storage box 20 is arranged on one side of the frame main body 10 and provides a new stuck point for the graphite boat; the upper die set 30 comprises an upper die 31 and an upper die displacement driving mechanism 32, the upper die displacement driving mechanism 32 is connected with the upper die 31, the upper die is driven by the upper die displacement driving mechanism to perform up-down displacement, and a plurality of upper die unloading point columns for unloading old clamping points are arranged on the upper die; the middle die set 40 comprises a middle die 41 and a middle die displacement driving mechanism 42, the middle die displacement driving mechanism 42 is connected with the middle die 41, the middle die 41 is driven by the middle die displacement driving mechanism 42 to perform left-right displacement between an origin position and a loading position, and the middle die 41 is used for placing a graphite boat with a clamping point to be unloaded; the dotting module 50 comprises at least one dotter 51 and a dotter displacement driving mechanism 52, the dotter 51 is arranged below the new stuck point storage box 20, the dotter displacement driving mechanism 52 is connected with the dotter 51, and the dotter is driven by the dotter displacement driving mechanism to carry out XYZ shaft displacement; the control module 60 is electrically connected to the new stuck point storage box 20, the upper die module 30, the middle die module 40, and the point loading module 50, respectively, and is configured to control the working processes of the new stuck point storage box, the upper die module, the middle die module, and the point loading module.
As a preferred embodiment, as shown in fig. 1 to 3, the replacing machine further includes a lower die set 70 disposed below the middle die set, the lower die set 70 includes a lower die 71 and a lower die displacement driving mechanism 72, and the lower die 71 is driven by the lower die displacement driving mechanism 72 to perform up-down displacement.
As shown in fig. 2 and 4, in this embodiment, the new stuck point storage box 20 includes a box 21, a stuck point slideway 22, a slider connecting rod 23, and a cylinder 24, where a feed opening is disposed at the lower side of the box 21, the stuck point slideway 22 is connected with the box through the feed opening, a valve column for controlling the feeding of the stuck point is disposed at a position where the feed opening is communicated with the stuck point slideway, the cylinder is connected with the valve column through the slider connecting rod, and a valve plug is disposed at the lower end of the valve column.
As a preferred embodiment, as shown in fig. 5 and 6, the dotter 51 in this embodiment includes a hopper 510, a vibration pump 511, a cylinder 512, a stuck point dropping pipe, and a pressure point opening 513, the hopper 510 is disposed below the new stuck point storage box, the vibration pump 511 is disposed on one side of the hopper 510, the stuck point dropping pipe is disposed below the hopper, and a piston rod of the cylinder is connected to the pressure point opening 513. Preferably, as shown in fig. 5, in this embodiment, two dot-filling devices 51 are provided, and the two dot-filling devices are respectively disposed on two sides of the vibration pump 511, so that the two dot-filling devices can perform dot-filling operation at the same time, thereby greatly improving the working efficiency.
As shown in fig. 5, in this embodiment, the positioning device displacement driving mechanism 52 is provided with an X-axis rail 520 and an X-axis screw 521 on the frame body, an X-axis slide seat capable of sliding freely along the X-axis rail is provided with a Z-axis rail 522 and a Z-axis screw 523 on the X-axis slide seat, the Z-axis rail is connected with the X-axis screw, the X-axis screw is connected with an X-axis driving motor, the Z-axis rail is provided with a Z-axis slide seat capable of sliding freely along the Z-axis rail, the positioning device 51 is provided on the Z-axis slide seat, the positioning device is connected with the Z-axis screw, the Z-axis screw is connected with the Z-axis driving motor, a Y-axis slide seat capable of sliding freely along the Y-axis rail 524 and the Y-axis screw 525 are provided above the X-axis rail, the X-axis rail is connected with the Y-axis slide seat and the Y-axis screw, and the Y-axis screw is connected with the Y-axis driving motor. Preferably, as shown in fig. 1-3, a dust cover 80 is disposed above the Y-axis track in this embodiment.
As a preferred embodiment, as shown in fig. 1-3, the replacing machine further includes an old stuck point recycling bin 90, which is disposed below the middle mold set, and is used for recycling the unloaded old stuck point.
As a preferred embodiment, as shown in fig. 1, the control module 60 in this embodiment includes a human interaction terminal 61 disposed at one side of the frame main body, and a controller, where the controller is a programmable controller PLC (Programmable Logic Controller), and the PLC controller is electrically connected to the new stuck point storage box, the upper die module, the middle die module, the lower die module, and the point filling module, respectively, and is configured to control the working processes of the new stuck point storage box, the upper die module, the middle die module, the lower die module, and the point filling module.
When the replacing machine is used, firstly, the graphite boat with the clamping points to be replaced is placed on the middle die set, then under the control of the control die set, the upper die is driven by the upper die displacement driving mechanism to downwards displace and is downwards pressed on the graphite boat on the middle die, and the old clamping points on the graphite boat are unloaded by utilizing a plurality of unloading point columns on the upper die, so that all the old clamping points can be unloaded at one time, and the working efficiency is high. And old stuck point can drop into old stuck point recovery box that well mould module below set up, retrieves old stuck point, prevents to cause confusion to the job site, keeps operational environment clean and tidy. After unloading of the old clamping points, the upper die moves upwards under the drive of the upper die displacement driving mechanism, returns to the original position, waits for the next pressing action, and the middle die moves leftwards under the drive of the middle die displacement driving mechanism and moves to the loading point position above the lower die assembly, the lower die moves upwards under the drive of the lower die displacement driving mechanism, the loading point device reaches the loading point to mount a new clamping point on the graphite boat under the drive of the loading point displacement driving mechanism, the lower die assembly plays a supporting and positioning role in the loading point process, the clamping point of the graphite boat is prevented from being mounted in place or directly falling, the process requirements can be met, and the loading point quality is high. After the new stuck point is installed, the point loader is lifted to return to the original position, the lower die is driven by the lower die assembly to downwards displace to return to the original position, meanwhile, the middle die is driven by the middle die displacement driving mechanism to rightwards displace to return to the original position, and next task is carried out, so that the work is sequentially circulated. The automatic degree is high, the operation is simple and convenient, and the working efficiency is high. After the stuck point in the point loader is completely loaded, the point loader is driven by the point loader displacement driving mechanism to move below the new stuck point storage box, the new stuck point storage box automatically loads the stored new stuck point into the hopper in the point loader, the feeding speed is high, the follow-up working flow can be effectively guaranteed to be smooth, and the working efficiency is further improved.
It will be appreciated by persons skilled in the art that the embodiments of the invention described above and shown in the drawings are by way of example only and are not limiting. The objects of the present invention have been fully and effectively achieved. The functional and structural principles of the present invention have been shown and described in the examples and embodiments of the invention may be modified or practiced without departing from the principles described.
Claims (5)
1. An automated graphite boat stuck point changer, comprising:
a frame body for carrying other modules arranged thereon;
the new stuck point storage box is arranged on one side of the frame main body and provides a new stuck point for the graphite boat; the novel clamping point storage box comprises a box body, a clamping point slideway, a sliding block connecting rod and a cylinder, wherein a blanking opening is formed in the lower side of the box body, the clamping point slideway is connected with the box body through the blanking opening, a valve column for controlling clamping point blanking is arranged at the position, communicated with the clamping point slideway, of the blanking opening, the cylinder is connected with the valve column through the sliding block connecting rod, and a valve plug is arranged at the lower end of the valve column;
the upper die module comprises an upper die and an upper die displacement driving mechanism, the upper die displacement driving mechanism is connected with the upper die, the upper die is driven by the upper die displacement driving mechanism to perform up-down displacement, and a plurality of upper die unloading point columns for unloading old clamping points are arranged on the upper die;
the middle die module comprises a middle die and a middle die displacement driving mechanism, wherein the middle die displacement driving mechanism is connected with the middle die, the middle die is driven by the middle die displacement driving mechanism to perform left-right displacement between an origin position and a loading point position, and the middle die is used for placing a graphite boat with a clamping point to be unloaded;
the dotting module comprises at least one dotting device and a dotting device displacement driving mechanism, wherein the dotting device is arranged below the new stuck point storage box, the dotting device displacement driving mechanism is connected with the dotting device, and the dotting device is driven by the dotting device displacement driving mechanism to carry out XYZ shaft displacement;
the control module is electrically connected with the new stuck point storage box, the upper die module, the middle die module and the point loading module respectively and used for controlling the working processes of the new stuck point storage box, the upper die module, the middle die module and the point loading module;
the lower die module comprises a lower die and a lower die displacement driving mechanism, and the lower die is driven by the lower die displacement driving mechanism to perform up-and-down displacement.
2. The automated graphite boat stuck point changing machine according to claim 1, wherein the dotter comprises a hopper, a vibration pump, a cylinder, a stuck point dropping pipeline and a pressure point port, the hopper is arranged below the new stuck point storage box, the vibration pump is arranged on one side of the hopper, the stuck point dropping pipeline is arranged below the hopper, and a piston rod of the cylinder is connected with the pressure point port.
3. The automated graphite boat stuck point changer of claim 1, further comprising an old stuck point recovery tank disposed below the middle die set for recovering unloaded old stuck points.
4. The automatic graphite boat stuck point replacing machine according to claim 1, wherein the point loader displacement driving mechanism is provided with an X-axis rail and an X-axis screw rod on the frame main body, an X-axis sliding seat capable of freely sliding along the X-axis rail is provided with a Z-axis rail and a Z-axis screw rod on the X-axis sliding seat, the Z-axis rail is connected with the X-axis screw rod, the X-axis screw rod is connected with an X-axis driving motor, the Z-axis rail is provided with a Z-axis sliding seat capable of freely sliding along the Z-axis rail, the point loader is arranged on the Z-axis sliding seat, the point loader is connected with the Z-axis screw rod, the Z-axis screw rod is connected with a Z-axis driving motor, a Y-axis sliding seat capable of freely sliding along the Y-axis rail is provided with a Y-axis rail above the X-axis rail, the Y-axis sliding seat is connected with the Y-axis screw rod, and the Y-axis screw rod is connected with the Y-axis driving motor.
5. The automated graphite boat stuck point changer of claim 4, wherein a dust cover is positioned above the Y-axis track.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811070361.8A CN108866512B (en) | 2018-09-13 | 2018-09-13 | Automatic change machine for clamping points of graphite boats |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811070361.8A CN108866512B (en) | 2018-09-13 | 2018-09-13 | Automatic change machine for clamping points of graphite boats |
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| Publication Number | Publication Date |
|---|---|
| CN108866512A CN108866512A (en) | 2018-11-23 |
| CN108866512B true CN108866512B (en) | 2024-04-05 |
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| CN201811070361.8A Active CN108866512B (en) | 2018-09-13 | 2018-09-13 | Automatic change machine for clamping points of graphite boats |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109411568A (en) * | 2018-11-30 | 2019-03-01 | 江苏润阳悦达光伏科技有限公司 | The manual changing machine of slide rail type graphite boat stuck point |
| CN111005008A (en) * | 2019-11-28 | 2020-04-14 | 江苏润阳悦达光伏科技有限公司 | Automatic clap boat device |
| CN112030142B (en) * | 2020-08-20 | 2022-06-28 | 湖南华鑫晶造电气科技有限公司 | Automatic loading and unloading device for graphite boat stuck points |
| CN113061874B (en) * | 2021-03-16 | 2023-01-31 | 湖南华鑫晶造电气科技有限公司 | Automatic loading and unloading device for graphite boat stuck points |
| CN113118763A (en) * | 2021-05-08 | 2021-07-16 | 常州市杰洋精密机械有限公司 | Full-automatic graphite boat stuck point automatic assembly machine |
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| CN106736408A (en) * | 2017-02-13 | 2017-05-31 | 揭阳中诚集团有限公司 | Graphite boat process point automatic loader and unloader |
| CN207021249U (en) * | 2017-05-15 | 2018-02-16 | 通威太阳能（成都）有限公司 | A kind of practical solar battery sheet graphite boat stuck point positioning installation apparatus |
| CN207183244U (en) * | 2017-09-11 | 2018-04-03 | 上海亿横精密机械有限公司 | Stuck point, graphite boat piece and graphite boat |
| CN208965034U (en) * | 2018-09-13 | 2019-06-11 | 江苏润阳悦达光伏科技有限公司 | Automate graphite boat stuck point changing machine |
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| CN203774265U (en) * | 2014-03-18 | 2014-08-13 | 衡水英利新能源有限公司 | Graphite-boat-piece clamping point replacement tooling table |
| CN105932112A (en) * | 2016-06-27 | 2016-09-07 | 常州亿晶光电科技有限公司 | Tubular PECVD graphite boat process point installation device |
| CN105951060A (en) * | 2016-06-27 | 2016-09-21 | 常州亿晶光电科技有限公司 | Demounting device for process points of tube type PECVD graphite boat |
| CN105951059A (en) * | 2016-06-27 | 2016-09-21 | 常州亿晶光电科技有限公司 | Fully-automatic tubular PECVD graphite boat process point installation device |
| CN106736408A (en) * | 2017-02-13 | 2017-05-31 | 揭阳中诚集团有限公司 | Graphite boat process point automatic loader and unloader |
| CN207021249U (en) * | 2017-05-15 | 2018-02-16 | 通威太阳能（成都）有限公司 | A kind of practical solar battery sheet graphite boat stuck point positioning installation apparatus |
| CN207183244U (en) * | 2017-09-11 | 2018-04-03 | 上海亿横精密机械有限公司 | Stuck point, graphite boat piece and graphite boat |
| CN208965034U (en) * | 2018-09-13 | 2019-06-11 | 江苏润阳悦达光伏科技有限公司 | Automate graphite boat stuck point changing machine |
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| Publication number | Publication date |
|---|---|
| CN108866512A (en) | 2018-11-23 |
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