CN213061017U

CN213061017U - Automatic loading and unloading device for graphite boat stuck point

Info

Publication number: CN213061017U
Application number: CN202021746713.XU
Authority: CN
Inventors: 余永雄; 陈必雄; 杨建生; 孙雪平; 张朝阳; 张彬庭
Original assignee: Hunan Huaxin Jingzao Electrical Technology Co ltd
Current assignee: Hunan Huaxin Jingzao Electrical Technology Co ltd
Priority date: 2020-08-20
Filing date: 2020-08-20
Publication date: 2021-04-27
Anticipated expiration: 2030-08-20

Abstract

The utility model discloses an automatic loading and unloading device for graphite boat clamping points, which comprises a graphite boat piece and a clamping point template; the graphite boat piece is provided with a clamping point hole, and the clamping point template is provided with a clamping point sleeve corresponding to the clamping point hole; the device also comprises a rack main body, a moving frame, a grabbing module, a pressure rod module and a push rod module; the upper end of the rack main body is fixedly provided with a movable rack, and the rack main body is provided with a point loading station and a point unloading station corresponding to the movable rack; the ejector rod module is arranged in the frame main body and corresponds to the point mounting station; the moving frame is provided with a sliding connection moving frame corresponding to the point loading station and the point unloading station; the grabbing module is fixedly connected to the upper end of the movable frame, and the pressure bar module is fixedly connected to the lower end of the movable frame; the utility model has the advantages of high automation degree, simple operation, high replacement quality and high work efficiency.

Description

Automatic loading and unloading device for graphite boat stuck point

Technical Field

The utility model belongs to the solar cell field of making, concretely relates to graphite boat stuck point auto-control handling device.

Background

In the production process of solar cells, a PECVD (plasma enhanced chemical vapor deposition) coating process is an important link in the production flow and plays a role in playing a role. PECVD is a process in which a gas containing atoms constituting a thin film is ionized by means of microwave or radio frequency to locally form plasma, which is chemically very reactive and is easily reacted to deposit a desired thin film on a substrate. When the silicon wafer is subjected to the surface coating process, the silicon wafer which is not coated needs to be inserted into a wafer carrier of PECVD coating equipment. At present, a graphite boat is generally adopted by a slide glass device, and the specific operation process is as follows: and inserting the silicon wafer into the graphite boat, positioning the silicon wafer on the graphite boat through the graphite boat clamping point, then placing the graphite boat loaded with the silicon wafer into PECVD (plasma enhanced chemical vapor deposition) coating equipment, and coating the silicon wafer by adopting a PECVD process. In order to fix the silicon wafer in the graphite boat, the graphite boat piece of the graphite boat is provided with a clamping point for fixing the silicon wafer, and the clamping point is required to be periodically replaced because the silicon wafer can be subjected to certain abrasion and scorching in the process of inserting and taking so as to ensure the good state of the graphite boat and further ensure the film coating quality of the silicon wafer.

The traditional graphite boat stuck point replacing method adopts manual operation, the steps are complex and tedious, meanwhile, the requirement on the skill of an operator is higher, if the skill operation is not in place, the graphite boat sheet and the graphite boat stuck point are damaged or not in place assembled in the replacing process, and the traditional graphite boat stuck point replacing operation method is as follows: the graphite boat clamping point needs to use a simple manual press, an operator sits in front of the press surface to place the graphite boat sheet on the manual press platform, then sequentially detaching a plurality of 20 clamping points on the graphite sheet by using a manual press, placing the clamping points to be replaced by new clamping points on the corresponding clamping holes by an operator after the graphite boat clamping points are detached, holding the right hand by the left hand of the small-heart wing, downwards rotating the press by the right hand to ensure that the force of the hand is well held, if the force is too large, the graphite boat and the clamping points can be crushed, if the force is too small, the graphite boat and the clamping points can not be pressed in place, after the clamping points of a graphite sheet are pressed, the next graphite boat piece clamping point is continuously replaced, generally, the graphite boat piece is damaged due to the progress, or the clamping point is not pressed in place, so that the damage or falling-off condition of the silicon wafer in the manufacturing process is caused, the efficiency is low, the production progress is slow, and the product quality is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model is directed at above not enough, provide a graphite boat stuck point auto-control handling device that degree of automation is high, easy and simple to handle, change high quality, work efficiency is high.

In order to achieve the above object, the utility model provides a following technical scheme: the automatic loading and unloading device for the clamping point of the graphite boat comprises a graphite boat sheet and a clamping point template; the graphite boat piece is provided with a clamping point hole, and the clamping point template is provided with a clamping point sleeve corresponding to the clamping point hole; the device also comprises a rack main body, a moving frame, a grabbing module, a pressure rod module and a push rod module; the upper end of the rack main body is fixedly provided with a movable rack, and the rack main body is provided with a point loading station and a point unloading station corresponding to the movable rack; the ejector rod module is arranged in the frame main body and corresponds to the point mounting station; the moving frame is provided with a sliding connection moving frame corresponding to the point loading station and the point unloading station; the grabbing module is fixedly connected to the upper end of the movable frame, and the pressing rod module is fixedly connected to the lower end of the movable frame.

Preferably, the movable frame further comprises a guide optical axis, a movable screw rod, a plurality of brackets and a driving device; the plurality of brackets are fixedly connected to the rack main body, and two ends of the guide optical axis are fixedly connected to the brackets; two ends of the movable screw rod are fixedly connected to the bracket through bearings; the movable frame is arranged on the movable screw rod and the guide optical axis in a sliding manner; the driving device is fixedly connected with one end of the movable screw rod and drives the movable screw rod to rotate so as to drive the movable frame to slide along the guide optical axis; the grabbing module is installed on the movable frame.

Preferably, the grabbing module comprises a grabbing fixing frame, a supporting plate, a grabbing frame, a lifting device and a translation device; the grabbing fixing frame is fixedly connected to the movable frame; the two grabbing frames are respectively and correspondingly arranged on two sides of the grabbing fixing frame; the lifting device comprises a lifting motor and a ball screw; the lifting motor is fixed on the grabbing fixing frame, and a driving shaft of the lifting motor is fixedly connected with one end of the ball screw; the ball screw penetrates through the supporting plate, and the movable end of the ball screw is fixed on the supporting plate; the number of the translation devices is at least two, the translation devices are respectively arranged corresponding to the grabbing frames, and each translation device comprises a translation motor and a coupler; the translation motor is fixed on the supporting plate, and a driving shaft of the translation motor penetrates through the coupler and is in threaded connection with the coupler; the coupler is fixedly connected to the upper end of the grabbing frame; and the lower end of the grabbing frame is provided with a grabbing block.

Preferably, the lifting device further comprises a lifting guide rod; one end of the lifting guide rod is fixed on the grabbing fixing frame, and the other end of the lifting guide rod penetrates through the supporting plate and is connected with the supporting plate in a sliding manner; the translation device further comprises a translation guide rod; one end of the translation guide rod is fixed on the supporting plate, and the other end of the translation guide rod penetrates through the grabbing frame and is connected with the grabbing frame in a sliding mode.

Preferably, the compression bar module comprises a plurality of compression bar assemblies, a compression plate guide rod and a compression bar motor; the plurality of pressure lever components are fixed on the pressure plate and are arranged corresponding to the clamping points in a sleeved mode; the pressing rod motor is fixed on the movable frame, and a driving shaft of the pressing rod motor is of a screw rod structure, penetrates through the pressing plate and is in threaded connection with the pressing plate; one end of the pressure plate guide rod is fixed on the pressure plate, and the other end of the pressure plate guide rod penetrates through the moving frame and is connected with the moving frame in a sliding mode.

Preferably, the ejector rod module comprises a plurality of ejector rod assemblies, a top plate guide rod, an ejector rod motor and an ejector rod fixing plate; the ejector rod assemblies are fixed on the top plate and are arranged corresponding to the clamping point sleeves; the ejector rod fixing plate is arranged corresponding to the bottom of the point mounting station and fixedly connected to the rack main body; the ejector rod motor is fixed on the ejector rod fixing plate, and a driving shaft of the ejector rod motor is of a screw rod structure, penetrates through the top plate and is in threaded connection with the top plate; one end of the top plate guide rod is fixed on the top plate, and the other end of the top plate guide rod penetrates through the ejector rod fixing plate and is connected with the ejector rod fixing plate in a sliding mode.

Preferably, the ejector rod assembly comprises a piston sleeve, a positioning pin and an ejector rod spring; the piston sleeve is fixedly arranged on the top plate, the positioning pin penetrates through the piston sleeve, and the ejector rod spring is arranged in the piston sleeve and connected to the positioning pin; the compression bar assembly comprises a compression bar, a movable sleeve and a compression bar spring; the pressure lever is fixedly arranged on the pressure plate, and the pressure plate penetrates through the pressure lever spring and the movable sleeve; one end of the compression bar spring is fixed on the pressure plate, and the other end of the compression bar spring is fixedly connected with the movable sleeve.

Preferably, the rack main body further comprises a graphite sheet to-be-loaded/unloaded clamping point position, a graphite sheet position with a clamping point, a clamping point template position and an empty clamping point template position.

Compared with the prior art, the utility model, following beneficial effect has:

the utility model discloses a frame main part, removal frame, snatch the cooperation work of module, depression bar module and ejector pin module, set up a plurality of depression bar subassemblies on the depression bar module, realize once only uninstalling the old stuck point on the graphite boat, set up a plurality of ejector pin subassemblies and a plurality of depression bar subassembly cooperation on the ejector pin module, realize once only installing the new stuck point on the stuck point template, improved production efficiency greatly, labour saving and time saving has improved the degree of automation of device;

through the matching of a pressure lever spring and a movable sleeve in the pressure lever assembly, when an old clamping point on the graphite boat is dismounted by a pressure lever, the movable sleeve can level the old clamping point, so that the graphite boat cannot be damaged in the dismounting process of the old clamping point; meanwhile, the positioning pin in the ejector rod assembly is matched with the ejector rod spring, so that the positioning pin has a certain free movement space, the position error of a clamping point hole in the graphite boat piece can be eliminated, automatic positioning is realized, the accuracy of the pressure rod assembly when a new clamping point on the clamping point template is installed in the clamping point hole is further realized, the damage to the graphite boat and the new clamping point in the new clamping point installing process is effectively avoided, the replacement quality is ensured, and the product percent of pass is improved; the service life of the graphite boat and the yield of silicon wafers are greatly improved;

the lifting guide rod is arranged on the lifting device of the grabbing module, and the translation guide rod is arranged on the translation device, so that the accuracy of the grabbing frame in the process of grabbing the graphite boat piece is guaranteed; meanwhile, the compression bar guide rod in the compression bar module and the ejector rod guide rod in the ejector rod module realize the precision when the clamping point on the graphite boat piece is assembled and disassembled, ensure the replacement quality and improve the product percent of pass.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic structural diagram of the present invention in another state.

Fig. 3 is an enlarged view of region a in fig. 2.

Fig. 4 is an enlarged view of region B in fig. 2.

Fig. 5 is a schematic structural view of the middle moving frame of the present invention.

Fig. 6 is a schematic structural view of the middle grabbing module of the present invention.

Fig. 7 is a schematic structural diagram of the middle press rod module of the present invention.

Fig. 8 is an enlarged view of region C in fig. 7.

Fig. 9 is a schematic structural diagram of the middle post rod module of the present invention.

Fig. 10 is an enlarged view of region D in fig. 9.

Fig. 11 is a schematic structural diagram of the middle post rod assembly of the present invention.

Fig. 12 is a schematic structural diagram of the middle stuck point template of the present invention.

In the figure: 10. a rack main body; 11. assembling stations; 12. a point unloading station; 13. the graphite flake is to be assembled and disassembled to the clamping point; 14. installing a graphite sheet position of a clamping point; 15. a stuck point template position; 16. an empty stuck point template position; 20. A movable frame; 21. moving the frame; 22. guiding the optical axis; 23. moving the screw rod; 24. a support; 25. a drive device; 30. a grabbing module; 31. grabbing the fixed frame; 32. a support plate; 33. a grabbing frame; 34. a lifting device; 35. a translation device; 40. a compression bar module; 41. a compression bar assembly; 42. pressing a plate; 43. a pressure plate guide rod; 44. a compression bar motor; 50. a mandril module; 51. a push rod assembly; 52. a top plate; 53. a top plate guide; 54. a push rod motor; 55. a mandril fixing plate; 60. a control unit; 100. a graphite boat piece; 101. A click hole; 200. a stuck point template; 201. a click sleeve; 311. grabbing blocks; 341. a lifting guide rod; 351. A translation motor; 352. a coupling; 353. a translation guide rod; 511. a piston sleeve; 512. positioning pins; 513. A push rod spring; 411. a pressure lever; 412. moving the sleeve; 413. a compression bar spring.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model discloses the technical scheme of well each embodiment can make up, and technical feature in the embodiment does to make up and forms new technical scheme.

Referring to fig. 1 to 12, the present invention provides the following technical solutions: the automatic loading and unloading device for the graphite boat stuck point comprises a graphite boat sheet 100 and a stuck point template 200; a clamping point hole 101 is formed in the graphite boat 100, and a clamping point sleeve 201 is arranged on the clamping point template 200 corresponding to the clamping point hole 101; the device further comprises a rack main body 10, a moving frame 20, a grabbing module 30, a pressure bar module 40 and a push rod module 50. Wherein: the rack main body 10 is used for bearing other modules arranged thereon; and the grabbing die set 30 is used for grabbing the graphite boat 100 to the loading station 11 and the unloading station 12, grabbing the clamping point template 200 to the loading station 11 and reloading the graphite boat 100. The mandril module 50 is used for automatically positioning the clamping point holes 101 in the graphite boat piece 100 and automatically guiding when new clamping points are loaded. And the compression bar module 40 is used for removing the old clamping point, loading the new clamping point and leveling the graphite boat piece 100. The clamping point template 200 is used for positioning a new clamping point, the new clamping point is arranged in the clamping point sleeve 201, the clamping point sleeve 201 is arranged in the clamping point template 200, and the positions of the clamping point sleeve 201 correspond to the clamping point holes 101 of the graphite boat piece 100 one by one; and the movable frame 21 is used for installing the grabbing module 30 and the compression bar module 40 and replacing different stations to complete fixing action.

A moving frame 20 is fixedly installed at the upper end of the frame main body 10, and the frame main body 10 is provided with a point loading station 11 and a point unloading station 12 corresponding to the moving frame 20; the ejector rod module 50 is arranged in the rack main body 10 and corresponds to the point installing station 11; the moving frame 20 is provided with a moving frame 21 in sliding connection corresponding to the point loading station 11 and the point unloading station 12; the grabbing module 30 is fixedly connected to the upper end of the movable frame 21, and the pressing rod module 40 is fixedly connected to the lower end of the movable frame 21. The graphite boat 100 and the clamping point template 200 are moved and new clamping points and old clamping points on the graphite boat sheet 100 are assembled and disassembled by the sliding and matching of the grabbing module 30 and the compression bar module 40 on the movable frame 21.

The moving frame 20 further comprises a guide optical axis 22, a moving screw 23, a plurality of brackets 24 and a driving device 25; the plurality of brackets 24 are fixedly connected to the rack main body 10, and two ends of the guide optical axis 22 are fixedly connected to the brackets 24; two ends of the movable screw rod 23 are fixedly connected to the bracket 24 through bearings; the moving frame 21 is slidably arranged on the moving screw rod 23 and the guide optical axis 22; the driving device 25 is fixedly connected with one end of the movable screw rod 23, drives the movable screw rod 23 to rotate, and drives the movable frame 21 to slide along the guide optical axis 22, so that the movable frame 21 stays in the regions of the point loading station 11, the point unloading station 12 and the like, and the movable screw rod 23 is matched with the guide optical axis 22 to ensure that the movable frame 21 is fixed on the guide optical axis 22; the grasping module 30 is mounted on the moving frame 21.

The grabbing module 30 comprises a grabbing fixed frame 31, a supporting plate 32, a grabbing frame 33, a lifting device 34 and a translation device 35; the grabbing fixing frame 31 is fixedly connected to the moving frame 21; the two grabbing frames 33 are respectively and correspondingly arranged on two sides of the grabbing fixing frame 31; the lifting device 34 comprises a lifting motor and a ball screw; the lifting motor is fixed on the grabbing fixing frame 31, and a driving shaft of the lifting motor is fixedly connected with one end of the ball screw; the ball screw penetrates through the supporting plate 32, and the movable end of the ball screw is fixed on the supporting plate 32; at least two translation devices 35 are arranged corresponding to the gripping rack 33, respectively, and each translation device 35 includes a translation motor 351 and a coupling 352; the translation motor 351 is fixed on the support plate 32, a drive shaft of the translation motor 351 penetrates through the coupling 352 and is in threaded connection with the coupling 352, and the coupling 352 is fixedly connected to the upper end of the grabbing frame 33; the lower end of the grabbing frame 33 is provided with a grabbing block 311. The operation of the ball screw is driven by the operation of the lifting motor, so that the lifting of the support plate 32 is realized, and the lifting of the grabbing frame 33 is further realized; through the operation of the translation motor 351, the coupling 352 is driven to move back and forth along the driving shaft of the translation motor 351, so that the graphite boat piece 100 can be grabbed by the grabbing frame 33. Two sides of the grabbing frame 33 are respectively provided with 8 grabbing blocks 311, which can effectively prevent the graphite boat piece 100 from deforming in the moving process.

The lifting device 34 further comprises a lifting guide 341; one end of the lifting guide rod 341 is fixed on the grabbing fixing frame 31, and the other end of the lifting guide rod 341 penetrates through the supporting plate 32 and is connected with the supporting plate 32 in a sliding manner; the translation device 35 further comprises a translation guide 353; one end of the translation guide rod 353 is fixed on the support plate 32, and the other end of the translation guide rod 353 penetrates through the grabbing frame 33 and is connected with the grabbing frame 33 in a sliding manner. By providing the elevation guide 341 and the translation guide 353, the elevation of the elevation device 34 and the translation of the translation device 35 are more accurate.

The pressure lever module 40 comprises a plurality of pressure lever components 41, a pressure plate 42, a pressure plate guide rod 43 and a pressure lever motor 44; the plurality of pressure lever assemblies 41 are fixed on the pressure plate 42 and arranged corresponding to the clamping point sleeve 201; the compression bar motor 44 is fixed on the moving frame 21, and a driving shaft of the compression bar motor 44 is of a screw rod structure, penetrates through the compression plate 42 and is in threaded connection with the compression plate 42; one end of the pressure plate guide rod 43 is fixed on the pressure plate 42, and the other end thereof penetrates through the moving frame 21 and is slidably connected with the moving frame 21.

The ejector rod module 50 comprises a plurality of ejector rod assemblies 51, an ejector plate 52, an ejector rod guide rod 53, an ejector rod motor 54 and an ejector rod fixing plate 55; the ejector rod assemblies 51 are fixed on the top plate 52 and arranged corresponding to the clamping point sleeves 201; the ejector rod fixing plate 55 is arranged corresponding to the bottom of the point installing station 11 and fixedly connected to the rack main body 10; the ejector rod motor 54 is fixed on the ejector rod fixing plate 55, and a driving shaft of the ejector rod motor 54 is of a screw rod structure, penetrates through the top plate 52 and is in threaded connection with the top plate 52; one end of the top plate guide rod 53 is fixed on the top plate 52, and the other end thereof penetrates through the top rod fixing plate 55 and is slidably connected with the top rod fixing plate 55.

The ejector rod assembly 51 comprises a piston sleeve 511, a positioning pin 512 and an ejector rod spring 513; the piston sleeve 511 is fixedly mounted on the top plate 52, the positioning pin 512 penetrates through the piston sleeve 511, and the ejector spring 513 is arranged in the piston sleeve 511 and connected to the positioning pin 512; the pressure lever assembly 41 comprises a pressure lever 411, a moving sleeve 412 and a pressure lever spring 413; the pressing rod 411 is fixedly installed on the pressing plate 42, and the pressing plate 42 penetrates through the pressing rod spring 413 and the moving sleeve 412; one end of the compression bar spring 413 is fixed on the pressure plate 42, and the other end is fixedly connected with the movable sleeve 412. The number of the ejector rod assemblies 51 is 24, and specific data can be adjusted according to the use condition; the ejector rod assemblies 51 further comprise limit screws, fixing nuts and the like, and the 24 ejector rod assemblies 51 are fixed on the top plate 52 corresponding to the 24 clamping point holes 101 in the graphite boat piece 100. The number of the plurality of pressure lever assemblies 41 is the same as that of the plurality of ejector rod assemblies 51; the number of the pressure lever assemblies 41 is 24, each pressure lever assembly 41 further comprises a loop bar, a fixing nut and the like, and the 24 pressure lever assemblies 41 are fixed on the pressure plate 42 corresponding to the positions of the 24 clamping point holes 100 on the graphite boat sheet 100.

The ejector rod spring 513 is arranged on the positioning pin 512 in the ejector rod assembly 51, so that the positioning pin 512 has a certain free movement space, the position error of the clamping point mounting hole 101 in the graphite boat piece 100 can be eliminated, and automatic positioning is realized. The moving sleeve 412 of the strut assembly 41 is provided with a strut spring 413 so that the moving sleeve 412 can move relative to the strut 411, and when the graphite boat 100 has deformation, the moving sleeve 412 firstly levels the graphite boat 100 through the clamping point sleeve 201, and then presses the clamping point into the graphite boat 100.

The clamping point is arranged in the clamping point sleeve 201, after the clamping point sleeve 201 is sleeved in the positioning pin 512, in the process that the clamping point is pressed into the graphite boat piece 100 by the pressure lever 411, the positioning pin 512 forms piston motion in the clamping point sleeve 201, and therefore the matching precision of the clamping point and the clamping point hole 101 can be well guaranteed.

The rack main body 10 further comprises a graphite sheet to-be-loaded/unloaded clamping point position 13, a clamped point graphite sheet position 14, a clamping point template position 15 and an empty clamping point template position 16. The graphite flake to-be-assembled and disassembled checkpoint position 13 is used for placing the graphite boat piece 100 of the old checkpoint to be disassembled; the graphite sheet position 14 with the clamping points is used for placing the graphite boat sheet 100 with the new clamping points; the clamping point template position 15 is used for placing a clamping point template 200 provided with a new clamping point; the empty-chuck-point template station 16 is used for placing empty chuck templates into which new chuck points have been loaded into the graphite boat sheet 100.

The driving device 25, the lifting motor, the translation motor 351 and the push rod motor 54 are servo motors or stepping motors.

Further comprises a control part 60; the control part 60 is an ARM controller or a PLC controller, and controls automatic control of the grasping module 30, the pressing rod module 40, the ejector rod module 50, and the like.

Example 1:

the utility model discloses a theory of operation:

and (3) loading the new card points into the card point sleeves 201 of the empty card point templates, and loading the card point sleeves 201 into the card point templates 200. The graphite boat 100 has 29 corresponding clamping point templates 200 and 29 corresponding clamping point templates, and the 29 corresponding clamping point templates are respectively arranged on the clamping point position 13 to be assembled and disassembled of the graphite sheet and the clamping point template position 15.

The driving device 25 on the moving frame 20 drives the moving screw rod 23 to rotate, and drives the moving frame 21 to slide along the moving screw rod 23 and the guide optical axis 22, so that the moving frame 21 can stay and be fixed at the upper ends of the loading station 11, the unloading station 12, the graphite flake to-be-loaded and unloaded clamping point position 13, the loaded clamping point graphite flake position 14, the clamping point template position 15 and the empty clamping point template position 16. When an old clamping point on a clamping point hole 101 in a graphite boat piece 100 needs to be replaced, a driving device 25 drives a moving frame 21 to drive a grabbing module 30 to a position 13 where a graphite sheet is to be clamped and disassembled, the grabbing module 30 controls the lifting of a grabbing frame 33 and the opening and closing of a grabbing block 311 on the grabbing frame 33 through a lifting device 34 and a translation device 35, the graphite boat piece 100 is grabbed from the position 13 where the graphite sheet is to be clamped and disassembled, the graphite boat piece 100 is placed at a position 12 where the point is to be disassembled, at the moment, a pressure bar module 40 downwards moves a pressure plate 42 through a pressure bar motor 44, a moving sleeve 412 in a pressure bar assembly 41 is matched with a pressure bar spring 413, the graphite boat piece 100 is corrected, a pressure bar 411 is opposite to the old clamping point, so that the pressure bar 411 accurately unloads the old clamping point, and the graphite boat piece; the pressure bar module 40 returns to the initial position after the old clamping point is completely unloaded, and the graphite boat piece 100 after the old clamping point is completely unloaded moves to the point loading station 11 through the grabbing module 30; at the moment, the ejector rod module 50 works, the ejector rod motor 54 drives the top plate 52 to be close to the point mounting station 11, the positioning pin 512 in the ejector rod assembly 51 is installed in the clamping point hole 101, and the graphite boat 100 is corrected by the matching of the positioning pin 512 and the ejector rod spring 513, so that automatic positioning is realized;

after the graphite boat 100 is placed on the loading station 11, the grabbing module 30 moves to the clamping point template position 15 through the moving frame 21, grabs the clamping point template 200 loaded with a new clamping point, and moves the clamping point template 200 to the graphite boat 100 on the loading station 11; along with the downward movement of the clamping point template 200, the clamping point sleeve 201 approaches the positioning pin 512 to perform secondary correction on the graphite boat piece 100, and is sleeved in the positioning pin 512; after the correction is finished, the pressure lever module 40 is pressed downwards, the movable sleeve 412 in the pressure lever assembly 41 is matched with the pressure lever spring 413, a positioning point of the clamping point sleeve 201 is searched, the pressure lever 411 is aligned to the clamping point sleeve 201, the pressure lever 411 moves in the clamping point sleeve 201 to press a new clamping point downwards, the new clamping point is installed in a clamping point hole 101 of the graphite boat sheet 100 under the guide of the positioning pin 512, the replacement of new and old clamping points on the graphite boat sheet 100 is realized, and the clamping point sleeve 201, the positioning pin 512 and the movable sleeve 412 are matched, so that the matching precision of the clamping points can be ensured, and the position precision of the clamping points in the vertical direction can also be ensured; after the replacement is finished, the grabbing module 30 places the empty clamping point template 200 in the empty clamping point template position 16, and places the graphite boat piece 100 with the new clamping point in the clamping point graphite piece position 14; the ram module 50 returns to the home position in preparation for the next installation of a new chuck.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The automatic loading and unloading device for the clamping point of the graphite boat comprises a graphite boat sheet (100) and a clamping point template (200); a clamping point hole (101) is arranged on the graphite boat piece (100), and a clamping point sleeve (201) is arranged on the clamping point template (200) corresponding to the clamping point hole (101); the method is characterized in that: the device also comprises a rack main body (10), a moving frame (20), a grabbing module (30), a pressure lever module (40) and a push rod module (50); a moving frame (20) is fixedly installed at the upper end of the rack main body (10), and a point loading station (11) and a point unloading station (12) are arranged on the rack main body (10) corresponding to the moving frame (20); the ejector rod module (50) is arranged in the rack main body (10) and corresponds to the point installing station (11); the moving frame (20) is provided with a moving frame (21) in sliding connection corresponding to the point loading station (11) and the point unloading station (12); the grabbing module (30) is fixedly connected to the upper end of the movable frame (21), and the pressure bar module (40) is fixedly connected to the lower end of the movable frame (21).

2. The automatic graphite boat stuck point handling device of claim 1, wherein: the moving frame (20) further comprises a guide optical axis (22), a moving screw rod (23), a plurality of brackets (24) and a driving device (25); the plurality of brackets (24) are fixedly connected to the rack main body (10), and two ends of the guide optical axis (22) are fixedly connected to the brackets (24); two ends of the movable screw rod (23) are fixedly connected to the bracket (24) through bearings; the moving frame (21) is arranged on the moving screw rod (23) and the guide optical axis (22) in a sliding manner; the driving device (25) is fixedly connected with one end of the movable screw rod (23) and drives the movable screw rod (23) to rotate so as to drive the movable frame (21) to slide along the guide optical axis (22); the grabbing module (30) is installed on the moving frame (21).

3. The automatic graphite boat stuck point handling device of claim 2, wherein: the grabbing module (30) comprises a grabbing fixing frame (31), a supporting plate (32), a grabbing frame (33), a lifting device (34) and a translation device (35); the grabbing fixing frame (31) is fixedly connected to the moving frame (21); the two grabbing frames (33) are respectively and correspondingly arranged on two sides of the grabbing fixing frame (31); the lifting device (34) comprises a lifting motor and a ball screw; the lifting motor is fixed on the grabbing fixing frame (31), and a driving shaft of the lifting motor is fixedly connected with one end of the ball screw; the ball screw penetrates through the supporting plate (32), and the movable end of the ball screw is fixed on the supporting plate (32); the number of the translation devices (35) is at least two, the translation devices are respectively arranged corresponding to the grabbing frame (33), and each translation device (35) comprises a translation motor (351) and a coupling (352); the translation motor (351) is fixed on the support plate (32), and a driving shaft of the translation motor (351) penetrates through the coupling (352) and is in threaded connection with the coupling (352); the coupler (352) is fixedly connected to the upper end of the grabbing frame (33); the lower end of the grabbing frame (33) is provided with a grabbing block (311).

4. The automatic graphite boat stuck point handling device of claim 3, wherein: the lifting device (34) further comprises a lifting guide rod (341); one end of the lifting guide rod (341) is fixed on the grabbing fixing frame (31), and the other end of the lifting guide rod (341) penetrates through the supporting plate (32) and is connected with the supporting plate (32) in a sliding manner; the translation device (35) further comprises a translation guide rod (353); one end of the translation guide rod (353) is fixed on the supporting plate (32), and the other end of the translation guide rod (353) penetrates through the grabbing frame (33) and is in sliding connection with the grabbing frame (33).

5. The automatic loading and unloading device for the clamping points of the graphite boats as claimed in claim 3 or 4, wherein: the pressure lever module (40) comprises a plurality of pressure lever components (41), a pressure plate (42), a pressure plate guide rod (43) and a pressure lever motor (44); the plurality of pressure bar components (41) are fixed on the pressure plate (42) and are arranged corresponding to the clamping point sleeves (201); the pressure lever motor (44) is fixed on the movable frame (21), and a driving shaft of the pressure lever motor (44) is of a screw rod structure, penetrates through the pressure plate (42) and is in threaded connection with the pressure plate (42); one end of the pressure plate guide rod (43) is fixed on the pressure plate (42), and the other end of the pressure plate guide rod penetrates through the moving frame (21) and is connected with the moving frame (21) in a sliding mode.

6. The automatic graphite boat stuck point handling device of claim 5, wherein: the ejector rod module (50) comprises a plurality of ejector rod assemblies (51), an ejector plate (52), an ejector rod guide rod (53), an ejector rod motor (54) and an ejector rod fixing plate (55); the ejector rod assemblies (51) are fixed on the top plate (52) and arranged corresponding to the clamping point sleeves (201); the ejector rod fixing plate (55) is arranged corresponding to the bottom of the point installing station (11) and fixedly connected to the rack main body (10); the ejector rod motor (54) is fixed on the ejector rod fixing plate (55), and a driving shaft of the ejector rod motor (54) is of a screw rod structure, penetrates through the top plate (52) and is in threaded connection with the top plate (52); one end of the top plate guide rod (53) is fixed on the top plate (52), and the other end of the top plate guide rod penetrates through the ejector rod fixing plate (55) and is in sliding connection with the ejector rod fixing plate (55).

7. The automatic graphite boat stuck point handling device of claim 6, wherein: the ejector rod assembly (51) comprises a piston sleeve (511), a positioning pin (512) and an ejector rod spring (513); the piston sleeve (511) is fixedly arranged on the top plate (52), the positioning pin (512) penetrates through the piston sleeve (511), and the ejector rod spring (513) is arranged in the piston sleeve (511) and connected to the positioning pin (512); the pressure lever assembly (41) comprises a pressure lever (411), a moving sleeve (412) and a pressure lever spring (413); the pressure lever (411) is fixedly arranged on the pressure plate (42), and the pressure plate (42) penetrates through the pressure lever spring (413) and the moving sleeve (412); one end of the compression bar spring (413) is fixed on the pressure plate (42), and the other end of the compression bar spring is fixedly connected with the movable sleeve (412).

8. The automatic graphite boat stuck point handling device of claim 1, wherein: the machine frame main body (10) further comprises a graphite sheet to-be-assembled and disassembled clamping point position (13), an assembled clamping point graphite sheet position (14), a clamping point template position (15) and an empty clamping point template position (16).