CN216938985U

CN216938985U - Device for realizing integral blue film transfer by laser cutting device

Info

Publication number: CN216938985U
Application number: CN202123337093.1U
Authority: CN
Inventors: 邰凯平; 徐�明; 赵洋; 孙东明; 成会明
Original assignee: Liaoning Cold Core Semiconductor Technology Co ltd
Current assignee: Liaoning Cold Core Semiconductor Technology Co ltd
Priority date: 2021-12-28
Filing date: 2021-12-28
Publication date: 2022-07-12
Anticipated expiration: 2031-12-28

Abstract

The utility model discloses a device for realizing integral blue film transfer of a laser cutting device, which comprises a vacuum pump, an adsorption pipeline joint, a vacuum chamber, an adsorption mould positioning groove and an adsorption mould. The beneficial effects of the utility model are: the adopted technical scheme is that the sample piece is fixed by shape positioning and vacuum adsorption, the position of the sample piece is accurately positioned, a product cannot move in the cutting process, a sample is easy to take after vacuum pressure release, continuous and accurate positioning can be performed in actual production, and the production efficiency and quality of the product are obviously improved. The blue film integral transfer technology adopted after the sample is cut is beneficial to integral transfer of the sample, the method is unique, the production efficiency is high, and basic guarantee is provided for subsequent sample testing and batch supply.

Description

Device for realizing integral blue film transfer by laser cutting device

Technical Field

The utility model relates to the field of micro device segmentation technology and micro device analysis test research, in particular to a device for realizing integral blue film transfer by a laser segmentation device.

Background

At present, due to the unique functionality, strong integration capability and low energy consumption friendliness of various microelectronic devices and chips, the research and application of the microelectronic devices and chips are rapidly developed in recent years, and the microelectronic devices and chips particularly have wide application prospects in the fields of aerospace, 5G communication and big data. In actual production, when the micro device integrated by the whole plate arrangement is divided, the die is often adopted for mechanical positioning and cutting, the integral positioning precision of the device is insufficient, the cutting precision is low, and the requirement of the micro device on high precision size can not be met generally. In addition, the device cut by the method has insufficient subsequent overall transfer and test positioning accuracy, poor stability and low efficiency, can not meet the production requirements of modern enterprises, and has no universality.

Disclosure of Invention

In order to solve the technical defects, the utility model of the micro device integral cutting positioning and integral transferring device is particularly important.

The device for realizing the integral blue film transfer of the laser dividing device can accurately position, cut and transfer micro devices with millimeter to submicron sizes in a lossless manner. The device has the characteristics of simplicity, effectiveness, easy popularization and the like.

Technical scheme

In order to realize the above purpose, this device that whole blue membrane shifted is realized to device is cut apart to laser, the technical scheme that utility model adopted as follows:

the utility model provides a device that device realization whole blue membrane shifted is cut apart to laser, includes the vacuum pump, adsorbs pipeline joint, vacuum chamber, adsorption mold constant head tank, adsorption mold, and the bolt is connected with adsorption mold constant head tank for the vacuum adsorption system, and adsorption mold installs inside adsorption mold constant head tank, adsorbs on the adsorption mold and fixes a position whole board device.

The vacuum adsorption system comprises a vacuum pump, an adsorption pipeline and a vacuum chamber with a vacuum pool.

The adsorption mould positioning groove is connected with the vacuum adsorption cavity by a bolt.

The adsorption mould on open location and adsorb hole, sample constant head tank and sample groove, adsorption mould is last can open a plurality of sample groove according to sample size.

The utility model has the following advantages and beneficial effects:

in addition, the device carries out shape positioning and vacuum adsorption position fixing on the whole board micro device and the single device with various sizes, the cutting effect is good, the cutting precision is high, the product cannot move in the cutting process, the sample is easy to take after vacuum pressure release, continuous and accurate positioning can be carried out in actual production, and the production efficiency and the quality of the product are obviously improved. The blue film integral transfer technology adopted after the sample is cut is beneficial to integral transfer of the sample, the method is unique, the production efficiency is high, and basic guarantee is provided for subsequent sample testing and batch supply.

Drawings

FIG. 1 is a schematic diagram of the general structure of the present invention;

FIG. 2 is a schematic diagram of the present invention with parts separated;

FIG. 3 is a view showing the structure of the adsorption mold of the present invention;

in the figure: 1. a vacuum pump; 2. an adsorption pipeline; 3. adsorbing a pipeline joint; 4. a vacuum chamber; 5. adsorbing a mold positioning groove; 6. adsorbing the mold;

wherein, 31, a circular pipeline; 32. a trapezoidal base; 41. a vacuum pool; 42. an air suction passage; 51. a bottom supporting mechanism; 52. a mold sampling groove; 61. a sample positioning groove; 62. A sample sampling groove; 63. a handle 611 is extracted, and the adsorption hole is positioned.

Detailed Description

In order to make the objects, features and advantages of the present invention more apparent and understandable, the embodiments of the present invention will be described in detail and completely with reference to the accompanying drawings, and it is to be understood that the embodiments described below are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The technical scheme of the utility model is further explained by the specific implementation mode in combination with the attached drawings.

As shown in FIGS. 1-3, an apparatus for transferring blue film of laser cutting device comprises a vacuum pump 1, an adsorption pipeline 2, an adsorption pipeline joint 3, a vacuum chamber 4, an adsorption mold positioning groove 5, an adsorption mold 6,

The device comprises a circular pipeline 31, a trapezoidal base 32, a vacuum pool 41, an air suction channel 42, a bottom supporting mechanism 51, a mold sampling groove 52, a sample positioning groove 61, a sample sampling groove 62, an extraction handle 63 and a positioning adsorption hole 611.

The vacuum adsorption system is connected with the adsorption mould positioning groove 5 through a bolt, the adsorption mould 6 is installed inside the adsorption mould positioning groove 5, and the adsorption mould 6 is adsorbed and positioned on the whole plate device.

As shown in fig. 2 and 3, the adsorption pipe joint 3 includes a circular pipe 31 and a trapezoidal base 32, which are integrally connected to the vacuum chamber 4. The vacuum chamber 4 has a set of parallel vacuum cells 41 on its upper surface for vacuum adsorption and a gas passage 42 on its side wall, which is connected to the adsorption pipe joint 3. The center of the adsorption mould positioning groove 5 is of a hollow structure, a bottom supporting mechanism 51 is arranged on the periphery of the adsorption mould positioning groove, a group of mould sampling grooves 52 are respectively arranged on the left side and the right side of the adsorption mould positioning groove 5, and the adsorption mould positioning groove 5 is fixedly connected with the vacuum chamber 4. The adsorption mould 6 comprises a sample positioning groove 61, a positioning adsorption hole 611 is arranged in the groove, a sample sampling groove 62 is arranged, the adsorption mould 6 is provided with a group of extraction handles 63, the adsorption mould 6 is arranged in the adsorption mould positioning groove 5, and the extraction handles 63 are fixedly connected with the adsorption mould 6.

The utility model is further explained or illustrated by the following examples.

Example 1 laser cutting of a full panel device, blue film bulk transfer of the sample.

When the device is used, firstly, the laser equipment is ready, the vacuum pump 1 is started, the whole plate sample is placed in the sample piece positioning groove 61 of the adsorption mould 6, the sample is enabled to completely enter the positioning groove 61 and be adsorbed and fixed, the laser equipment is started to carry out cutting, after the cutting is finished, the vacuum pump 1 is closed, the whole viscous blue film is covered on the whole plate sample, the blue film is lightly scraped by a scraper, all devices are enabled to be stuck by the blue film, and the next sequence of operation is carried out after the blue film is lifted.

The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims

1. A device for realizing integral blue film transfer of a laser cutting device is characterized by comprising a vacuum pump (1), an adsorption pipeline (2), an adsorption pipeline joint (3), a vacuum chamber (4), an adsorption mould positioning groove (5) and an adsorption mould (6);

a vacuum pump (1) is connected with an adsorption pipeline (2), the adsorption pipeline (2) is connected with an adsorption pipeline joint (3), the adsorption pipeline joint (3) is connected with a vacuum chamber (4), an adsorption mould positioning groove (5) is fixed on an upper plate of the vacuum chamber (4), an adsorption mould (6) is installed in the adsorption mould positioning groove (5), and a sample piece is placed in the positioning groove of the adsorption mould (6).

2. The apparatus for blue film transfer of laser cutting device according to claim 1, wherein said suction pipe joint (3) comprises a circular pipe (31) and a trapezoid base (32).

3. The apparatus for blue film transfer of mass transfer of laser diode according to claim 1, wherein the vacuum chamber (4) is hollow, and has a set of parallel vacuum cells (41) on its top surface for vacuum suction and a suction channel (42) on its side wall.

4. The apparatus for transferring blue film integrally for laser separation device according to claim 1, wherein the center of the bottom surface of the positioning groove (5) of the absorption mold is hollow, the bottom supporting mechanism (51) is arranged around the bottom surface, and the left and right sides are respectively provided with a set of mold sampling grooves (52).

5. The apparatus for blue film transfer of the whole body of a laser separation device according to claim 1, wherein the suction mold (6) comprises a sample positioning groove (61) having a positioning suction hole (611) therein and a sample sampling groove (62), and the suction mold (6) has a set of extraction handles (63).