CN107024730B - A method of rectangular grating is made using lift-off principle - Google Patents
A method of rectangular grating is made using lift-off principle Download PDFInfo
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- CN107024730B CN107024730B CN201710472796.4A CN201710472796A CN107024730B CN 107024730 B CN107024730 B CN 107024730B CN 201710472796 A CN201710472796 A CN 201710472796A CN 107024730 B CN107024730 B CN 107024730B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
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Abstract
The present invention relates to a kind of method for making rectangular grating using lift-off principle, include the steps that following sequentially carrying out: 1. square shaped substrate is cleaned；2. vacuum rotating gluing carries out gluing using vacuum glue spreader square shaped substrate, glue is applied to square substrate surface by the way that rotary centrifugal force is evenly dispersed；3. hot plate translation drying under vacuum conditions dries the glue for completing the square substrate of step 2. using the hot plate of parallel substrate；4. carrying out holographic exposure and development to the substrate of step 3. is completed；5. ICP is etched, performed etching to the substrate of step 4. is completed；6. plated film clamps square substrate using coating clamp, plated film is carried out to the substrate of completion step 5. in coating machine；7. it is glued, ultraviolet glue glued adhesion is carried out to the substrate after completing step 6.；8. separating, after ultra-violet curing, prototype grating and sub-gratings substrate are separated using primary and secondary grating separator.
Description
Technical field
The present invention relates to a kind of methods for making rectangular grating using lift-off principle, belong to grating manufacture field.
Background technique
Grating is as a kind of excellent dispersion element, and in optical communication field, spectrum analysis field has obtained extensive utilization.
In recent years, the especially appearance of photoetching process holographic grating technique and perfect, substantially increases the producing efficiency and grating matter of grating
Amount.Grating is set to play a role in wider field.
Photoetching process production holographic grating technique obtains development energetically in recent years, and photoetching process and grating duplication technology all exist
It is continuous perfect, but certain limitation is still remained at present.Using the substantially process flow of photoetching process production holographic grating are as follows:
Gluing --- exposure --- development --- etching.Using this holographic technique, at least two class problems are still remained, one kind is to use
The method of ion beam etching performs etching, and etch rate is very low, and production efficiency is low.Another kind of problem is the stability of the technique
It is poor, cause the stability of product poor.
Patent " Blazed holographic grating, the method for of U.S. Patent Office bulletin
Producingthe same and replica grating " (" method of Production of blazed holographic grating and replica ", patent
Number: a kind of method of replica US7455957 B2) is disclosed, reproduction process is: first spraying upper one on prototype grating surface
Layer release agent, then plates layer of metal film on release layer again；Use a kind of thermoplastic adhesive by replica substrate later
It is bonded together with metallic diaphragm；Finally on releasing agent layer, prototype grating and replica are separated, obtain replicated light
Grid.
The method of this replica is mainly used in the duplication on balzed grating, but the method for this replica needs
One layer of remover, the use of remover are first sprayed on prototype grating, the film layer for being easy pollution template grating and being plated can be led for a long time
Cause the decline of grating mother matrix quality.And according to this clone method, grating after needing to replicate according to actual use ruler
The cutting of little progress row, for the grating demand of smallest number, according to the technique cut again after this duplication, not will cause too big
Time waste, but for large batch of grating demand, the cutting process occupied time, for the production efficiency of grating
For, it influences obvious.
Summary of the invention
In order to solve the above technical problem, the present invention provides a kind of sides that rectangular grating is made of lift-off principle
Method.This can effectively improve the machining accuracy of square substrate grating using the method that lift-off principle makes rectangular grating and adds
Working medium amount improves production qualification rate.The present invention proposes a kind of method using Lift-Off principle production grating, is suitable for complete
The duplication for ceasing grating is conducive to control diffraction efficiency of grating and production efficiency.
A method of rectangular grating is made using lift-off principle, includes the steps that following sequentially carrying out:
1. square shaped substrate is cleaned；
2. vacuum rotating gluing carries out gluing using vacuum glue spreader square shaped substrate, glue is equal by rotary centrifugal force
Even dispersion is applied to square substrate surface；
3. hot plate translation drying uses the square substrate of the hot plate of parallel substrate 2. to completion step under vacuum conditions
Glue is dried；
4. carrying out holographic exposure and development to the substrate of step 3. is completed；
5. ICP is etched, performed etching to the substrate of step 4. is completed；
6. plated film clamps square substrate using coating clamp, plated film is carried out to the substrate of completion step 5. in coating machine；
7. it is glued, ultraviolet glue glued adhesion is carried out to the substrate after completing step 6.；
8. separating, after ultra-violet curing, prototype grating and sub-gratings substrate are divided using primary and secondary grating separator
From.
Wherein, the primary and secondary grating separator includes freezing chamber and is set to the indoor elastic separating plier of freezing, and described point
The sub-gratings objective table and prototype grating objective table for including main hoistable platform from pincers and being mounted on main hoistable platform, the sub-light
Grid objective table includes sub-gratings Two-dimensional Position moving stage, the sub-gratings lifting platform connecting with sub-gratings Two-dimensional Position moving stage, a sub-light grid base
Piece clamper is set on sub-gratings objective table, and the prototype grating objective table includes six degree of freedom PI parallel micromotion platform and with six
The prototype grating Two-dimensional Position moving stage of freedom degree PI parallel micromotion platform connection, a prototype grating clamper are set to prototype grating objective table
On, six degree of freedom PI parallel micromotion platform can realize the precise fine-adjustment to the six direction of prototype grating.
Wherein, the separation of the prototype grating and sub-gratings substrate includes the steps that following sequentially carrying out:
S-1: a certain amount of coolant liquid is injected into freezing chamber；
S-2: the position of grating substrate holder is adjusted by sub-gratings Two-dimensional Position moving stage and sub-gratings lifting platform and is passed through
Six degree of freedom PI parallel micromotion platform and prototype grating Two-dimensional Position moving stage adjust the position of prototype grating clamper, and ultra-violet curing is terminated
Ultraviolet glue grating afterwards clamps the side of sub-gratings substrate using sub-gratings substrate holder, using prototype grating gripper
The firmly side of prototype grating；
S-3: adjusting main hoistable platform height, immerses the ultraviolet glue grating after ultra-violet curing integrally in coolant liquid；
S-4: the position of grating substrate holder is adjusted by sub-gratings Two-dimensional Position moving stage and sub-gratings lifting platform and is passed through
Six degree of freedom PI parallel micromotion platform and prototype grating Two-dimensional Position moving stage adjust the position of prototype grating clamper, press from both sides sub-gratings substrate
Holder is separated with prototype grating clamper, drives the separation of prototype grating and sub-gratings substrate.
Wherein, the method for the ultraviolet glue glued adhesion are as follows: the depositing metal membrane layer on prototype grating, adjustment plated film rate are
0.5ml uv-curable glue after plated film, is then uniformly coated on the mother after plated film by 15nm/min, plated film time 6min
Ultra-violet curing glue-line is formed on grating, is taken the sub-gratings substrate of a piece of clean 6mm, is covered on ultra-violet curing glue-line, and
It presses lightly on, extra uv-curable glue is discharged, when ultraviolet glue is not then exhausted from, carry out ultra-violet curing, adjust ultraviolet
The power in source is 1mW, and control curing time is 2 hours.
Wherein, using ultraviolet glue solidification equipment on prototype grating coated film deposition metallic diaphragm, the ultraviolet glue solidification equipment
Curing mechanism including ultraviolet light source and below ultraviolet light source；The curing mechanism includes being installed in transmission belt
Article carrying platform and gib block, the article carrying platform is slidably arranged on gib block；It is flat that loading is close in the gib block two sides
Flexible frictioning bar is fixedly installed in platform two sides.
Wherein, the vacuum glue spreader includes pedestal, cover, glue stations and vacuum evacuation device；The pedestal includes branch
Support platform, lifting platform and the turntable that adsorbable substrate on lifting platform is set；First turntable is rotated by a motor driven；The cover
It is driven and is gone up and down by one first fluid pressure drive device, cover bottom can be sealed with supporting table to be cooperated；Intake valve is provided on cover；Institute
Stating glue stations includes glue inlet tube and the gum outlet that glue inlet tube one end is arranged in；The gum outlet is arranged in cover and is located at the
Above one center of turntable；Glue inlet tube one end sealing sliding penetrates in cover, and the other end is connected to one into adhesive dispenser；It is described to take out very
Empty device includes the vacuum pumping pump and vacuum-pumping tube being arranged in outside cover；Vacuum-pumping tube one end connects vacuum pumping pump, and the other end is solid
It is scheduled on cover and is connected to space in cover.
Wherein, the groove of one with lifting platform cooperation are provided in the supporting table；Lifting platform is arranged by one in bottom portion of groove
The second fluid pressure drive device drive lifting, switch the position of lifting platform can inside and outside groove；The groove top is provided with
Opening-closing plate；Opening-closing plate and groove sealing cooperate, be provided on opening-closing plate can slowly into groove gas leakage unidirectional pressure maintaining valve.
Wherein, card slot is provided in the supporting table；Gasket seal is provided in card slot；Card slot is matched with cover body lower end sealing
It closes；The coating clamp includes disk clamp and hollow annulus fixture；The disk clamp upper surface is uniformly set around the center of circle
Set four square three-way grooves for running through disk clamp；Square three-way groove inner wall is provided with protrusion；The square three-way groove side is provided with arc
Shape slot；It is connected to positioned at two ipsilateral square three-way grooves by a rectangular channel；The disk clamp is removably connected on annulus fixture；
The open circles of the annulus fixture are opposite with square three-way groove；The annulus fixture is threadedly coupled by screw with enclosure top.
Wherein, annulus fixture upper surface is uniformly arranged multiple screw binding grooves through annulus fixture around the center of circle；One
Screw sequentially passes through the screw hole of disk clamp and the screw binding groove is clamped disk clamp and annulus fixture.
Wherein, the coating clamp further includes cannibalized equipment；The cannibalized equipment includes the hydraulic drive of sequentially connected third
The connection frame and fixed block of dynamic device, " L-type "；The upper end of fixing block face is provided with first motor；The first motor
Shaft is connect with a four paws carriage center；The claw end of the four paws bracket is provided with the 4th fluid pressure drive device；It is described
Disk clamp outer wall is uniformly arranged there are four card slot；The setting corresponding with card slot of the hydraulic stem of 4th fluid pressure drive device；It is described
Cannibalized equipment further includes the second motor and the workbench for fixing the second motor；The shaft of second motor is connected with fixation
Stake；The spud pile side is connect with third fluid pressure drive device.
The invention has the following beneficial effects:
1, the present invention dries base wafer glue coating using hot plate, can ensure the uniform quick of drying.
2, vacuum glue spreader square shaped substrate of the invention carries out gluing, can exclude influence of the air to base wafer glue coating,
Make square substrate gluing more evenly.
3, vacuum glue spreader of the invention is provided with liftable cover, it may be convenient to form the space of substrate position
Confined space conveniently vacuumizes.
4, the lifting platform of vacuum glue spreader of the invention can avoid restoring inner and outer air pressure after the completion of gluing flat in retraction groove
Air inlet has an adverse effect to not dry glue when weighing apparatus.
5, coating clamp of the invention, conveniently removes exposure mask, it is not easy to cause exposure mask damaged, improve work efficiency.
6, this practical coating clamp realizes that annulus fixture and disk press from both sides by the way that screw binding groove is arranged on annulus fixture
Have dismountable function, conveniently removes exposure mask.
7, coating clamp of the invention is equipped with, by disk with cannibalized equipment by opening up card slot on disk clamp
Fixture retracts out automatically from annulus fixture, solve the problems, such as contamination of substrates or, improve work efficiency.
8, article carrying platform of the invention is slidably arranged on gib block；Stability when article carrying platform movement can be enhanced.
9, the flexible frictioning bar of article carrying platform two sides fixed setting is close in gib block two sides of the invention, when article carrying platform is sliding
When dynamic, flexible frictioning bar carries out scraping to the uv-curable glue accumulated at grating chamfering and edge, can be more thoroughly clear
Except remaining glue.
10, the binding force of metallic diaphragm of the invention and ultra-violet curing glue-line is than the prototype grating binding force with substrate of glass
Greatly, moreover, in the state of cryogenic freezing prototype grating separated with metallic diaphragm it is more thorough, it is not easy to generate metal fragment or
The phenomenon that being adhered, the quality for forming the sub-gratings substrate of superposition metallic diaphragm and ultra-violet curing glue-line are higher.
Detailed description of the invention
Fig. 1 is process flow chart of the invention；
Schematic diagram when Fig. 2 is vacuum glue spreader gluing in the present invention；
Fig. 3 is the schematic diagram in the present invention after vacuum glue spreader gluing；
Fig. 4 is the annulus fixture of the coating clamp in the present invention and the installation diagram of enclosure top；
Fig. 5 is the top view of the disk clamp of the coating clamp in the present invention；
Fig. 6 is the side view of the disk clamp of the coating clamp in the present invention；
Fig. 7 is the cannibalized equipment side view of the coating clamp in the present invention；
Fig. 8 is the schematic diagram of freezing chamber of the present invention and elastic separating plier；
Fig. 9 is the structural schematic diagram of elastic separating plier；
Figure 10 is the structural schematic diagram of ultraviolet glue solidification equipment；
Figure 11 is the side view cutaway drawing of the curing mechanism of ultraviolet glue solidification equipment.
Appended drawing reference indicates in figure are as follows:
11- pedestal, 111- supporting table, 1111- groove, 1112- opening-closing plate, 1113- card slot, the unidirectional pressure maintaining valve of 1114-,
112- lifting platform, the first turntable of 113-, 12- cover, 121- intake valve, 13- glue stations, 131- glue inlet tube, 132- gum outlet,
135- is into adhesive dispenser, 14- vacuum evacuation device, 141- vacuum pumping pump, 142- vacuum-pumping tube, the first fluid pressure drive device of 15-, 16-
Second fluid pressure drive device, 21- disk clamp, 211- square three-way groove, 2111- protrusion, 212- arc groove, 213- rectangular channel, 22-
Annulus fixture, 221- screw binding groove, 222- card slot, 23- cabinet, 24- cannibalized equipment, 241- third fluid pressure drive device,
242- connection frame, 243- fixed block, 244- first motor, 245- four paws bracket, the 4th fluid pressure drive device of 246-, 25- work
Platform, the second motor of 251-, 252- spud pile, 31- freezing chamber, 32- elastic separating plier, the main hoistable platform of 320-, 321- sub-gratings two dimension
Displacement platform, 322- sub-gratings lifting platform, 323- sub-gratings substrate holder, 324- six degree of freedom PI parallel micromotion platform, 325-
Prototype grating Two-dimensional Position moving stage, 326- prototype grating clamper, 7- prototype grating, 9- sub-gratings substrate, 7- prototype grating, 8- metallic diaphragm,
9- sub-gratings substrate, 101- ultraviolet light source, 102- curing mechanism, 103- transmission belt, 104- article carrying platform, 105- gib block,
106- flexibility frictioning bar, 107- ultra-violet curing glue-line, 108- motor, 109- protrusion, 110- groove.
Specific embodiment
It is next in the following with reference to the drawings and specific embodiments that the present invention will be described in detail.
Referring to Fig. 1, a method of rectangular grating being made using lift-off principle, including the following step sequentially carried out
It is rapid:
1. square shaped substrate is cleaned；
2. vacuum rotating gluing carries out gluing using vacuum glue spreader square shaped substrate, glue is equal by rotary centrifugal force
Even dispersion is applied to square substrate surface；
3. hot plate translation drying uses the square substrate of the hot plate of parallel substrate 2. to completion step under vacuum conditions
Glue is dried；
4. carrying out holographic exposure and development to the substrate of step 3. is completed；
5. ICP is etched, performed etching to the substrate of step 4. is completed；
6. plated film clamps square substrate using coating clamp, plated film is carried out to the substrate of completion step 5. in coating machine；
7. it is glued, ultraviolet glue glued adhesion is carried out to the substrate after completing step 6.；
8. separating, after ultra-violet curing, prototype grating 7 and sub-gratings substrate 9 are carried out using primary and secondary grating separator 3
Separation.
Further, referring to Fig. 8, Fig. 9, the primary and secondary grating separator 3 is including freezing chamber 31 and is set to freezing
Elastic separating plier 32 in room 31, the elastic separating plier 32 include main hoistable platform 320 and the sub-light being mounted on main hoistable platform 320
Grid objective table and prototype grating objective table, the sub-gratings objective table include sub-gratings Two-dimensional Position moving stage 321 and sub-gratings Two-dimensional Position
Sub-gratings lifting platform 322, a sub-gratings substrate holder 323 for the connection of moving stage 321 is set on sub-gratings objective table, the mother
Grating objective table includes six degree of freedom PI parallel micromotion platform 324 and the mother that connect with six degree of freedom PI parallel micromotion platform 324
Grating Two-dimensional Position moving stage 325, a prototype grating clamper 326 are set on prototype grating objective table, and six degree of freedom PI parallel micromotion is flat
Platform 324 can realize the precise fine-adjustment of the six direction to prototype grating 7.
Further, the separation of the prototype grating 7 and sub-gratings substrate 9 includes the steps that following sequentially carrying out:
S3-1: the 31 a certain amount of coolant liquid of injection into freezing chamber；
S3-2: grating substrate holder 323 is adjusted by sub-gratings Two-dimensional Position moving stage 321 and sub-gratings lifting platform 322
Position simultaneously adjusts prototype grating clamper 326 by six degree of freedom PI parallel micromotion platform 324 and prototype grating Two-dimensional Position moving stage 325
Ultraviolet glue grating after ultra-violet curing is clamped the one of sub-gratings substrate 9 using sub-gratings substrate holder 323 by position
Side clamps the side of prototype grating 7 using prototype grating clamper 326；
S3-3: adjusting 320 height of main hoistable platform, and the ultraviolet glue grating after ultra-violet curing is made integrally to immerse coolant liquid
In；
S3-4: grating substrate holder 323 is adjusted by sub-gratings Two-dimensional Position moving stage 321 and sub-gratings lifting platform 322
Position simultaneously adjusts prototype grating clamper 326 by six degree of freedom PI parallel micromotion platform 324 and prototype grating Two-dimensional Position moving stage 325
Position separates sub-gratings substrate holder 323 with prototype grating clamper 326, drives point of prototype grating 7 and sub-gratings substrate 9
From.
Further, referring to Figure 10,11, the method for the ultraviolet glue glued adhesion are as follows: the depositing metal membrane layer 8 on prototype grating 7,
Adjustment plated film rate is 15nm/min, plated film time 6min, after plated film, is then uniformly applied 0.5ml uv-curable glue
Cloth forms ultra-violet curing glue-line 107 on the prototype grating 7 after plated film, take the sub-gratings substrate 9 of a piece of clean 6mm, lid
It on ultra-violet curing glue-line 107, and presses lightly on, extra uv-curable glue is discharged, when ultraviolet glue is not then exhausted from, carry out
Ultra-violet curing, the power of adjustment ultraviolet light source 101 are 1mW, and control curing time is 2 hours.
Further, referring to Figure 10,11, using ultraviolet glue solidification equipment on prototype grating 7 coated film deposition metallic diaphragm 8,
The ultraviolet glue solidification equipment includes ultraviolet light source 101 and the curing mechanism 102 positioned at 101 lower section of ultraviolet light source；Institute
Stating curing mechanism 102 includes the article carrying platform 104 and gib block 105 being installed in transmission belt 103, the article carrying platform 104
It is slidably arranged on gib block 105；It is close to 104 two sides of article carrying platform and flexible frictioning is fixedly installed in 105 two sides of gib block
Item 106.
Further, ultraviolet glue solidification equipment further includes the rotation horse that at least one driving transmission belt 103 moves linearly
It up to 108, is connected between the rotation motor 108 and transmission belt 103 by gear structure, the transmission belt 103 is provided with one
Protrusion 109 is provided with one and 109 compatible grooves 110 of protrusion on the article carrying platform 104.
Further, referring to fig. 2, Fig. 3, the vacuum glue spreader includes pedestal 11, cover 12, glue stations 13 and takes out true
Empty device 14；The pedestal 11 includes supporting table 111, lifting platform 112 and the turntable that adsorbable substrate on lifting platform 112 is arranged in
113；First turntable 113 is rotated by a motor driven；The cover 12 is driven by one first fluid pressure drive device 15 and is gone up and down, cover
12 bottoms can be sealed with supporting table 111 to be cooperated；Intake valve 121 is provided on cover 12；The glue stations 13 includes glue inlet tube
131 and the gum outlet 132 of 131 one end of glue inlet tube is set；The gum outlet 132 is arranged in cover 12 and is located at the first turntable
113 overcentres；131 one end of glue inlet tube sealing sliding penetrates in cover 12, and the other end is connected to one into adhesive dispenser 135；Institute
Stating vacuum evacuation device 14 includes the vacuum pumping pump 141 and vacuum-pumping tube 142 being arranged in outside cover 12；142 one end of vacuum-pumping tube connects
Vacuum pumping pump 141 is connect, the other end is fixed on cover 12 and is connected to space in cover 12.
Further, a groove 1111 cooperated with lifting platform 112 is provided in the supporting table 111；Lifting platform 112 by
One is arranged in the second fluid pressure drive device 16 driving lifting of 1111 bottom of groove, makes the position of lifting platform 112 can be in groove
1111 inside and outside switchings；Opening-closing plate 1112 is provided at the top of the groove 1111；Opening-closing plate 1112 and the sealing of groove 1111 cooperate, and open
Be provided on plywood 1112 can slowly into groove 1111 gas leakage unidirectional pressure maintaining valve 1114.
Further, card slot 1113 is provided in the supporting table 111；Gasket seal is provided in card slot 1113；Card slot
1113 cooperate with the sealing of 12 lower end of cover.
The working principle of the vacuum glue spreader:
As shown in Fig. 2, placing the substrates on the first turntable 113, the first fluid pressure drive device 15 driving cover 12 is moved down,
12 lower end of cover, which is caught in card slot 1113, realizes sealing cooperation；Air in the work extraction cover 11 of vacuum pumping pump 141, vacuumizes
After the completion, glue is sent through glue inlet tube 131 to the heart in the substrate is dripped on gum outlet 132 into adhesive dispenser 135, the first turntable 113 drives
Substrate rotation extends to the outside the glue for dripping the heart in the substrate by centrifugal force, is uniformly applied on substrate.
Further, referring to fig. 4 to Fig. 7, the coating clamp includes disk clamp 21 and hollow annulus fixture 22；
21 upper surface of disk clamp is uniformly arranged four square three-way grooves 211 for running through disk clamp 21 around the center of circle；Square three-way groove 211
Inner wall is provided with protrusion 2111；211 side of square three-way groove is provided with arc groove 212；Positioned at two ipsilateral square three-way grooves 211
It is connected to by a rectangular channel 213；The disk clamp 21 is removably connected on annulus fixture 22；The sky of the annulus fixture 22
The heart is round opposite with square three-way groove 211；The annulus fixture 22 is connect by screw with 23 screw top of cabinet.
Further, it is tight around the center of circle to be uniformly arranged multiple screws through annulus fixture 22 for 22 upper surface of annulus fixture
Gu slot 221；One screw, which sequentially passes through the screw hole of disk clamp 21 and the screw binding groove 221, makes disk clamp 21 and annulus
Fixture 22 is clamped.
Further, the coating clamp further includes cannibalized equipment 24；The cannibalized equipment 24 includes sequentially connected the
The connection frame 242 and fixed block 243 of three fluid pressure drive devices 241, " L-type "；243 upper surface of fixed block is provided with first
Motor 244；The shaft of the first motor 244 is connect with 245 center of a four paws bracket；The claw end of the four paws bracket 245
End is provided with the 4th fluid pressure drive device 246；21 outer wall of disk clamp is uniformly arranged there are four card slot 222；4th liquid
The setting corresponding with card slot 222 of the hydraulic stem of hydraulic driver 246；The cannibalized equipment 24 further include the second motor 251 and
Fix the workbench 25 of the second motor 251；The shaft of second motor 251 is connected with spud pile 252；The spud pile 252
Side is connect with third fluid pressure drive device 241.
The working principle of the coating clamp:
When work, annulus fixture 22 is fixed and is screwed in 23 top of cabinet, it is then that the exposure mask for needing to process is embedding
Enter in square three-way groove 211, then third fluid pressure drive device 241 drives about 245 four paws bracket to operate, so that the 4th hydraulic drive
Dynamic device 246 moves to the corresponding position of card slot 222 of disk clamp 21, and then third fluid pressure drive device 241 stops operating, the
Four fluid pressure drive devices 246 start operation, and the hydraulic stem of the 4th fluid pressure drive device 246 is toward overhanging, until insertion card slot 222
Afterwards, it stops working, then the second motor 251 is started to work, by the overturning of disk clamp 21 to top, at this time in square three-way groove 211
Exposure mask upward, the second motor 251 stops working at this time, then third fluid pressure drive device 241 again start operation, disk is pressed from both sides
Tool 21 moves to the top of cabinet 23, and then close to annulus fixture 22, then by screw move down alignment disk fixture 21 screw hole and
It being inserted in after screw binding groove 221, third fluid pressure drive device 241 stops operating at this time, and first motor 244 is started to work at this time,
The shaft of first motor 244 drives four paws bracket 245 to rotate, and then drives disk clamp 21 to rotate, and then screw binding groove 221
It is blocked with screw 231, and then is fixed on disk clamp 21 on annulus fixture 22.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (9)
1. a kind of method for making rectangular grating using lift-off principle, it is characterised in that: including the following step sequentially carried out
It is rapid:
1. square shaped mother matrix substrate is cleaned；
2. vacuum rotating gluing carries out gluing using vacuum glue spreader square shaped mother matrix substrate, glue is equal by rotary centrifugal force
Even dispersion is applied to rectangular mother matrix substrate surface；
3. hot plate translation drying uses the rectangular mother matrix base of the hot plate of parallel mother matrix substrate 2. to completion step under vacuum conditions
The glue of piece is dried；
4. carrying out holographic exposure and development to the rectangular mother matrix substrate of step 3. is completed；
5. ICP is etched, perform etching to form prototype grating (7) to the rectangular mother matrix substrate of step 4. is completed；
6. plated film clamps prototype grating (7) using coating clamp, the prototype grating (7) of completion step 5. is plated in coating machine
Film；
7. it is glued, uv-curable glue is coated on the rectangular mother matrix substrate after completing step 6., is then pasted in uv-curable glue
Sub-gratings (9) substrate carries out ultraviolet glue glued adhesion；
8. separate, after ultra-violet curing, using primary and secondary grating separator (3) by prototype grating (7) and sub-gratings substrate (9) into
Row separation；
The primary and secondary grating separator (3) includes freezing chamber (31) and the elastic separating plier (32) being set in freezing chamber (31),
The elastic separating plier (32) include main hoistable platform (320) and the sub-gratings objective table being mounted on main hoistable platform (320) and
Prototype grating objective table, the sub-gratings objective table include sub-gratings Two-dimensional Position moving stage (321) and sub-gratings Two-dimensional Position moving stage
(321) sub-gratings lifting platform (322), the sub-gratings substrate holder (323) connected is set on sub-gratings objective table, described
Prototype grating objective table includes six degree of freedom PI parallel micromotion platform (324) and connects with six degree of freedom PI parallel micromotion platform (324)
The prototype grating Two-dimensional Position moving stage (325) connect, a prototype grating clamper (326) are set on prototype grating objective table, six degree of freedom PI
The precise fine-adjustment to the six direction of prototype grating (7) can be achieved in parallel micromotion platform (324).
2. the method for making rectangular grating using lift-off principle as described in claim 1, it is characterised in that: described ultraviolet
The method of glue glued adhesion are as follows:
The depositing metal membrane layer (8) on prototype grating (7), adjustment plated film rate are 15nm/min, plated film time 6min, plated film knot
Shu Hou forms ultra-violet curing glue-line (107) on the prototype grating (7) then 0.5ml uv-curable glue to be uniformly coated on to plated film after,
The sub-gratings substrate (9) for taking a piece of clean 6mm, is covered on ultra-violet curing glue-line (107), and press lightly on, will be extra
Uv-curable glue discharge, when ultraviolet glue is not then exhausted from, carry out ultra-violet curing, adjustment ultraviolet light source (101) power be
1mW, control curing time are 2 hours.
3. the method for making rectangular grating using lift-off principle as claimed in claim 2, it is characterised in that: using ultraviolet
Adhesive curing device coated film deposition metallic diaphragm (8) on prototype grating (7), the ultraviolet glue solidification equipment includes ultraviolet light source
(101) and be located at ultraviolet light source (101) below curing mechanism (102)；The curing mechanism (102) includes being installed in biography
Article carrying platform (104) and gib block (105) on defeated band (103), the article carrying platform (104) are slidably arranged in gib block
(105) on；It is close to article carrying platform (104) two sides and flexible frictioning bar (106) is fixedly installed in gib block (105) two sides.
4. the method for making rectangular grating using lift-off principle as claimed in claim 3, it is characterised in that: mother's light
The separation of grid (7) and sub-gratings substrate (9) includes the steps that following sequentially carrying out:
S3-1: into freezing chamber, (31) inject a certain amount of coolant liquid；
S3-2: grating substrate holder (323) are adjusted by sub-gratings Two-dimensional Position moving stage (321) and sub-gratings lifting platform (322)
Position and prototype grating adjusted by six degree of freedom PI parallel micromotion platform (324) and prototype grating Two-dimensional Position moving stage (325) clamp
Ultraviolet glue grating after ultra-violet curing is clamped sub-light using sub-gratings substrate holder (323) by the position of device (326)
The side of grid base piece (9) clamps the side of prototype grating (7) using prototype grating clamper (326)；
S3-3: main hoistable platform (320) height is adjusted, the ultraviolet glue grating after ultra-violet curing is made integrally to immerse coolant liquid
In；
S3-4: grating substrate holder (323) are adjusted by sub-gratings Two-dimensional Position moving stage (321) and sub-gratings lifting platform (322)
Position and prototype grating adjusted by six degree of freedom PI parallel micromotion platform (324) and prototype grating Two-dimensional Position moving stage (325) clamp
The position of device (326) separates sub-gratings substrate holder (323) with prototype grating clamper (326), drive prototype grating (7) and
The separation of sub-gratings substrate (9).
5. the method for making rectangular grating using lift-off principle as described in Claims 1-4 any claim, special
Sign is: the vacuum glue spreader includes pedestal (11), cover (12), glue stations (13) and vacuum evacuation device (14)；It is described
Pedestal (11) includes supporting table (111), lifting platform (112) and the turntable that adsorbable substrate is arranged on lifting platform (112)
(113)；First turntable (113) is rotated by a motor driven；The cover (12) is driven by one first fluid pressure drive device (15)
Lifting, cover (12) bottom can be sealed with supporting table (111) to be cooperated；Intake valve (121) are provided on cover (12)；The gluing
Device (13) includes the gum outlet (132) of glue inlet tube (131) and setting in glue inlet tube (131) one end；The gum outlet (132) sets
It sets in cover (12) and is located at the first turntable (113) overcentre；Glue inlet tube (131) one end sealing sliding penetrates cover
(12) in, the other end is connected to one into adhesive dispenser (135)；The vacuum evacuation device (14) includes that setting is true in the pumping of cover (12) outside
Sky pump (141) and vacuum-pumping tube (142)；Vacuum-pumping tube (142) one end connects vacuum pumping pump (141), and the other end is fixed on cover
(12) on and connection cover (12) interior space.
6. the method for making rectangular grating using lift-off principle as claimed in claim 5, it is characterised in that: the support
The groove (1111) of one with lifting platform (112) cooperation are provided on platform (111)；Lifting platform (112) is arranged by one in groove
(1111) the second fluid pressure drive device (16) of bottom drives lifting, makes the position of lifting platform (112) can be in groove (1111)
Outer switching；Opening-closing plate (1112) are provided at the top of the groove (1111)；Opening-closing plate (1112) and groove (1111) sealing cooperate,
Being provided on opening-closing plate (1112) can be slowly to the unidirectional pressure maintaining valve (1114) of groove (1111) interior gas leakage；The supporting table
(111) card slot (1113) are provided on；Gasket seal is provided in card slot (1113)；Card slot (1113) and cover (12) lower end are close
Envelope cooperation.
7. the method for making rectangular grating using lift-off principle as described in Claims 1-4 any claim, special
Sign is: the coating clamp includes disk clamp (21) and hollow annulus fixture (22)；On the disk clamp (21)
End face is uniformly arranged four square three-way grooves (211) for running through disk clamp (21) around the center of circle；Square three-way groove (211) inner wall is provided with
Raised (2111)；Square three-way groove (211) side is provided with arc groove (212)；It is logical positioned at ipsilateral two square three-way grooves (211)
Cross a rectangular channel (213) connection；The disk clamp (21) is removably connected on annulus fixture (22)；The annulus fixture
(22) open circles and square three-way groove (211) are opposite；The annulus fixture (22) is connected by screw and cabinet (23) screw top
It connects.
8. a kind of method for making rectangular grating using lift-off principle as claimed in claim 7, it is characterised in that: described
Annulus fixture (22) upper surface is uniformly arranged multiple screw binding grooves (221) through annulus fixture (22) around the center of circle；One screw
The screw hole and the screw binding groove (221) for sequentially passing through disk clamp (21) make disk clamp (21) and annulus fixture (22)
Clamping.
9. the method for making rectangular grating using lift-off principle as claimed in claim 8, it is characterised in that: the plated film
Fixture further includes cannibalized equipment (24)；The cannibalized equipment (24) includes sequentially connected third fluid pressure drive device (241), " L
The connection frame (242) and fixed block (243) of type "；Fixed block (243) upper surface is provided with first motor (244)；It is described
The shaft of first motor (244) is connect with four paws bracket (245) center；The claw end of the four paws bracket (245) is all provided with
It is equipped with the 4th fluid pressure drive device (246)；Disk clamp (21) outer wall is uniformly arranged there are four card slot (222)；4th liquid
The setting corresponding with card slot (222) of the hydraulic stem of hydraulic driver (246)；The cannibalized equipment (24) further includes the second motor
(251) and the workbench (25) of the second motor (251) is fixed；The shaft of second motor (251) is connected with spud pile
(252)；Spud pile (252) side is connect with third fluid pressure drive device (241).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710472796.4A CN107024730B (en) | 2017-06-21 | 2017-06-21 | A method of rectangular grating is made using lift-off principle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710472796.4A CN107024730B (en) | 2017-06-21 | 2017-06-21 | A method of rectangular grating is made using lift-off principle |
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| Publication Number | Publication Date |
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| CN107024730B true CN107024730B (en) | 2019-03-12 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106680922B (en) * | 2017-03-08 | 2019-03-12 | 福建中科晶创光电科技有限公司 | A kind of production method of ultraviolet glue grating |
| CN108873134A (en) * | 2018-07-06 | 2018-11-23 | 福建中科晶创光电科技有限公司 | A kind of more godmothers version preparing grating method based on glue curing |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3675314B2 (en) * | 2000-07-26 | 2005-07-27 | 株式会社島津製作所 | Diffraction grating |
| JP4266732B2 (en) * | 2002-08-30 | 2009-05-20 | キヤノン株式会社 | Multilayer diffractive optical element |
| CN101082769A (en) * | 2007-06-15 | 2007-12-05 | 中国科学院上海光学精密机械研究所 | Method for copying surface basso-relievo microstructure based on Darman raster |
| CN103076645B (en) * | 2013-01-21 | 2015-01-14 | 清华大学 | Manufacturing method of surface-mounted type cloudy grating |
| CN205282457U (en) * | 2015-12-28 | 2016-06-01 | 福建中科晶创光电科技有限公司 | Be applied to substrate slide holder of ion beam milling |
| CN106680922B (en) * | 2017-03-08 | 2019-03-12 | 福建中科晶创光电科技有限公司 | A kind of production method of ultraviolet glue grating |
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