CN216838274U - Silicon carbide growing device with double-rotation heat insulator and crucible - Google Patents
Silicon carbide growing device with double-rotation heat insulator and crucible Download PDFInfo
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- CN216838274U CN216838274U CN202220332089.1U CN202220332089U CN216838274U CN 216838274 U CN216838274 U CN 216838274U CN 202220332089 U CN202220332089 U CN 202220332089U CN 216838274 U CN216838274 U CN 216838274U
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Abstract
The utility model relates to a silicon carbide growth device with a heat insulator and a crucible which rotate in double directions, belonging to the technical field of silicon carbide growth; the crucible rotating mechanism comprises a crucible rotating mechanism and a heat insulator rotating mechanism, wherein the crucible rotating mechanism comprises an upper cover which is fixedly arranged, a first driving motor is fixedly arranged on the upper cover, the first driving motor drives a vertical crucible lifting rod to rotate through belt transmission, and a crucible is fixedly arranged at the lower end of the crucible lifting rod; the heat insulator rotating mechanism comprises a heat insulator, the crucible is arranged in the heat insulator, the lower end of the heat insulator is fixed in the heat insulator tray, the lower end of the heat insulator tray is provided with a second driving motor, the second driving motor is fixed on the upper end surface of the base, and the second driving motor drives the heat insulator tray to rotate through gear transmission; the problem of uneven heating of the existing crystal in the growth process is solved.
Description
Technical Field
The utility model belongs to the technical field of carborundum grows, concretely relates to carborundum growth device of heat-insulating body and crucible dual rotation.
Background
The silicon carbide as the third generation semiconductor material has the characteristics of wide band gap, high breakdown electric field, high thermal conductivity and the like, and is suitable for high-frequency electric appliances, high-power electric appliances and high-grade electronic devices. At present, the most common silicon carbide single crystal growth method is the PVT method, which is a process method of sublimating raw materials under a high-temperature and low-pressure growth environment and then sublimating the raw materials on seed crystals into silicon carbide single crystals according to corresponding temperature gradients. The period of growing the silicon carbide crystal by using the method is about one week, and the environmental temperature meeting the growth requirement is 2200 to 2400 ℃; under the long-time low-pressure high-temperature environment, the heat-insulating material and the graphite crucible can generate mass loss due to continuous graphitization; meanwhile, due to the fact that the thermal insulation material and the graphite crucible are asymmetric in geometric position in the assembling process, the distribution of a thermal field is not uniform. The produced crystal is asymmetric due to nonuniform heating of the crystal in the growth process; meanwhile, as the size of the crystal increases, the nonuniformity of the thermal field can cause the problems of larger thermal stress of the crystal along the radial direction, uneven distribution of impurities and defects and the like. The problems of cracking and the like of crystals in the processing process are easily caused by large thermal stress; the non-uniform distribution of impurities and defects also limits the uniformity of resistivity of the substrate in the radial direction.
SUMMERY OF THE UTILITY MODEL
The utility model overcomes the defects of the prior art and provides a silicon carbide growth device with a double-rotation heat insulator and a crucible; the problem of uneven heating of the crystal in the growth process at present is solved.
In order to achieve the above purpose, the present invention is achieved by the following technical solutions.
A silicon carbide growth device with a double-rotation heat insulator and a crucible comprises a crucible rotating mechanism and a heat insulator rotating mechanism, wherein the crucible rotating mechanism comprises an upper cover which is fixedly arranged, a first driving motor is fixedly arranged on the upper cover, the first driving motor drives a vertical crucible hanging rod to rotate through belt transmission, and a crucible is fixedly arranged at the lower end of the crucible hanging rod; the heat preservation body rotary mechanism includes the heat preservation body, and the crucible sets up in the heat preservation body inside, and inside the lower extreme of heat preservation body was fixed in the heat preservation body tray, heat preservation body tray lower extreme was provided with second driving motor, and second driving motor is fixed in the base up end, and second driving motor passes through gear drive and drives the heat preservation body tray and rotate.
Furthermore, the upper cover is of a horizontally arranged plate-shaped structure, a through hole which is through from top to bottom is formed in the center of the upper cover, the first driving motor is arranged on the upper end face of the upper cover and located on one side of the through hole, the output shaft of the first driving motor is vertically arranged upwards, a magnetic fluid is arranged at the through hole of the upper end face of the upper cover, a driven belt pulley is fixedly arranged at the upper end of the magnetic fluid, a driving belt pulley is fixedly arranged on the output shaft of the first driving motor, and the driving belt pulley is connected with the driven belt pulley through a belt.
Furthermore, the upper end of the crucible hanging rod penetrates through the through hole of the upper cover and is detachably connected with the magnetic fluid, and the lower end of the crucible hanging rod is detachably connected with the crucible.
Furthermore, the crucible suspender is rotatably connected with the via hole of the upper cover through a bearing.
Further, the heat insulator is a hollow cylindrical structure and comprises a cylinder body and a cylinder cover which are detachably connected together; the center of the cylinder cover is provided with an inserting hole which is communicated up and down, and the lower end of the crucible suspender extends into the heat insulator through the inserting hole.
Further, the crucible is arranged inside the heat insulation body and is not in contact with the inner wall of the heat insulation body.
Further, the heat insulator tray is of a horizontally arranged disc-shaped structure, and the circumferential edge of the upper end surface is provided with an annular upper bulge; the heat insulator joint is in the inside of heat insulator tray, and the lateral surface lower extreme of the heat insulator is closely the joint mutually with the last protruding medial surface of heat insulator tray.
Further, an internal gear is horizontally arranged right below the heat insulator tray, and the inner side surface of the internal gear is provided with a circle of internal gear teeth; the periphery edge of the lower end face of the inner gear is provided with an annular lower bulge, the lower end face of the lower bulge is rotatably connected with a plurality of uniformly distributed guide wheels along the periphery, and the upper end face of the base is in contact with the lower ends of all the guide wheels.
Furthermore, an output shaft of the second driving motor is kept vertically upward, a driving gear is fixedly arranged on the output shaft, and the driving gear is meshed with the internal gear.
Furthermore, a support rod is arranged between the heat insulator tray and the internal gear, the support rod is of a vertically arranged cylindrical structure, and the upper end and the lower end of the support rod are kept in an open structure; the inner diameter of the supporting rod is equal to the outer diameter of the internal gear; the upper end of the supporting rod is fixedly connected with the lower end face of the heat insulator tray, and the lower end of the inner side face of the supporting rod is fixedly connected with the outer side face of the internal gear, so that the heat insulator tray is fixed with the internal gear.
The utility model discloses produced beneficial effect for prior art does:
(1) the device can effectively improve the negative influence caused by the non-uniformity of the thermal field in the growth process of the silicon carbide crystal through the double rotation of the crucible and the thermal field, improve the growth rate and the qualification rate of the crystal, and reduce the input cost of a silicon carbide growth unit to a great extent.
(2) The device adopts a double-rotation structure of heat preservation and a crucible, the two rotation structures are mutually independent, and the two independent rotation structures have various collocation modes in use, such as heat preservation and different speeds in the same direction and different directions of the crucible, and the like. The various combination modes are convenient for users to adjust the rotation direction and speed of the heat preservation crucible and the crucible according to the state of the thermal field and the growth condition of the crystal.
Drawings
The invention will be described in further detail with reference to the accompanying drawings:
fig. 1 is a schematic structural view of the whole of the present invention;
wherein, 1 is an upper cover, 2 is a first driving motor, 3 is a belt, 4 is magnetic fluid, 5 is a crucible suspender, 6 is a crucible, 7 is a heat insulator, 8 is a heat insulator tray, 9 is a base, 10 is a second driving motor, 11 is an inner gear, 12 is a guide wheel, and 13 is a support rod.
Detailed Description
In order to make the technical problem, technical scheme and beneficial effect that the utility model will solve more clearly understand, combine embodiment and attached drawing, it is right to go on further detailed description the utility model discloses. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. The technical solution of the present invention is described in detail below with reference to the embodiments and the drawings, but the scope of protection is not limited thereto.
As shown in figure 1, the utility model provides a silicon carbide growth device with double rotation of a heat insulator and a crucible, which comprises a crucible rotating mechanism and a heat insulator rotating mechanism.
The crucible rotating mechanism comprises an upper cover 1, a first driving motor 2, a magnetic fluid 4, a crucible suspender 5 and a crucible 6.
The upper cover 1 is of a horizontally arranged plate-shaped structure, a through hole which is penetrated up and down is formed in the center of the upper cover 1, and the upper cover 1 is fixedly arranged. First driving motor 2 sets up on the up end of upper cover 1 and is located one side of via hole, and first driving motor 2's output shaft sets up vertically upwards. The magnetic fluid 4 is arranged at the through hole of the upper end face of the upper cover 1, the upper end of the magnetic fluid 4 is fixedly provided with a driven belt pulley, the driven belt pulley rotates along with the magnetic fluid 4, the output shaft of the first driving motor 2 is fixedly provided with a driving belt pulley, the driving belt pulley is connected with the driven belt pulley through a belt 3, and therefore the first driving motor 2 drives the magnetic fluid 4 to synchronously rotate through belt transmission.
A vertical crucible suspension rod 5 is inserted at the via hole of the upper cover 1, the upper end of the crucible suspension rod 5 penetrates through the via hole of the upper cover 1 and is detachably connected with the magnetic fluid 4, and the lower end of the crucible suspension rod 5 is detachably connected with the crucible 6. The crucible suspender 5 is rotatably connected with the via hole of the upper cover 1 through a bearing. The magnetic fluid 4 rotates and simultaneously drives the crucible 6 to rotate together through the crucible suspender 5.
The heat insulator rotating mechanism comprises a heat insulator 7, a heat insulator tray 8, an internal gear 11, a support rod 13, a second driving motor 10, a guide wheel 12 and a base 9.
The heat insulator 7 is a hollow cylindrical structure and comprises a cylinder body and a cylinder cover which are detachably connected together. The center of the cylinder cover is provided with an inserting hole which is communicated up and down, and the lower end of the crucible suspender 5 extends into the heat insulator 7 through the inserting hole. The crucible 6 is disposed inside the heat insulator 7 without contacting the inner wall of the heat insulator 7.
The heat insulator tray 8 is a horizontally arranged disc-shaped structure, and the circumferential edge of the upper end surface is provided with an annular upper bulge. The heat insulator 7 is connected with the inside of the heat insulator tray 8 in a clamping way, and the lower end of the outer side surface of the heat insulator 7 is connected with the inner side surface of the upper bulge of the heat insulator tray 8 in a clamping way.
The internal gear 11 is horizontally arranged right below the heat insulator tray 8, and the inner side surface of the internal gear is provided with a circle of internal gear teeth. The lower end face of the inner gear 11 is provided with an annular lower bulge at the periphery, and the lower end face of the lower bulge is rotatably connected with a plurality of uniformly distributed guide wheels 12 along the periphery. The lower end of the internal gear 11 is fixedly provided with a base 9, the upper end surface of the base 9 is kept horizontal, and the upper end surface of the base 9 is kept in contact with the lower ends of all guide wheels 12.
The second driving motor 10 is fixedly arranged on the upper end face of the base 9, an output shaft of the second driving motor keeps vertical and upward, a driving gear is fixedly arranged on the output shaft, and the driving gear is meshed with the internal gear 11.
The support rod 13 is a vertically arranged cylindrical structure, and the upper end and the lower end of the support rod 13 are kept in an open structure. The inner diameter of the support rod 13 is equal to the outer diameter of the internal gear 11. The upper end of the supporting rod 13 is fixedly connected with the lower end face of the heat insulator tray 8, and the lower end of the inner side face of the supporting rod 13 is fixedly connected with the outer side face of the internal gear 11, so that the heat insulator tray 8 is fixed with the internal gear 11.
The utility model discloses a theory of operation does:
the first driving motor 2 rotates through the belt 3 to drive the magnetic fluid 4 to rotate, and the magnetic fluid 4 drives the crucible 6 to rotate inside the heat preservation body 7 through the crucible suspender 5. Clockwise rotation, counterclockwise rotation, and rotation at different rotational speeds of the crucible 6 can be achieved by controlling the first driving motor 2.
The second driving motor 10 drives the internal gear 11 to rotate through gear transmission, the internal gear 11 drives the heat insulator tray 8 to rotate through the supporting rod 13, and finally drives the heat insulator 7 to rotate together. Clockwise rotation, counterclockwise rotation, and rotation at different rotational speeds of the heat insulator 7 can be achieved by controlling the second driving motor 10.
The device can effectively improve the negative influence caused by the non-uniformity of the thermal field in the growth process of the silicon carbide crystal through the double rotation of the crucible 6 and the thermal field, improve the growth rate and the qualification rate of the crystal, and reduce the input cost of a silicon carbide growth unit to a great extent.
The device adopts a double-rotation structure of the heat preservation and the crucible 6, the two rotation structures are mutually independent, and the two independent rotation structures have various collocation modes in use, such as different speeds in the same direction and different directions of the heat preservation and the crucible 6, and the like. The various combination modes are convenient for users to adjust the rotation direction and speed of the heat preservation crucible 6 according to the state of the thermal field and the growth condition of the crystal.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (10)
1. The utility model provides a carborundum growth device of heat insulator and crucible dual rotation which characterized in that: the crucible rotating mechanism comprises a crucible rotating mechanism and a heat insulator rotating mechanism, wherein the crucible rotating mechanism comprises an upper cover (1) which is fixedly arranged, a first driving motor (2) is fixedly arranged on the upper cover (1), the first driving motor (2) drives a vertical crucible hanging rod (5) to rotate through belt transmission, and a crucible (6) is fixedly arranged at the lower end of the crucible hanging rod (5); the heat preservation body rotary mechanism comprises a heat preservation body (7), the crucible (6) is arranged inside the heat preservation body (7), the lower end of the heat preservation body (7) is fixed inside a heat preservation body tray (8), a second driving motor (10) is arranged at the lower end of the heat preservation body tray (8), the second driving motor (10) is fixed on the upper end face of the base (9), and the second driving motor (10) drives the heat preservation body tray (8) to rotate through gear transmission.
2. The apparatus of claim 1, wherein the heat retaining body and crucible are rotated together, and wherein: the upper cover (1) is a plate-shaped structure horizontally arranged, a through hole which is vertically communicated with the upper cover (1) is formed in the center of the upper cover (1), the first driving motor (2) is arranged on the upper end face of the upper cover (1) and located on one side of the through hole, the output shaft of the first driving motor (2) is vertically arranged upwards, a magnetic fluid (4) is arranged at the position of the through hole in the upper end face of the upper cover (1), a driven belt pulley is fixedly arranged at the upper end of the magnetic fluid (4), a driving belt pulley is fixedly arranged on the output shaft of the first driving motor (2), and the driving belt pulley is connected with the driven belt pulley through a belt (3).
3. An apparatus as claimed in claim 2, wherein the heat retaining body and crucible are rotated together, the apparatus comprising: the upper end of the crucible suspender (5) penetrates through the via hole of the upper cover (1) and is detachably connected with the magnetic fluid (4), and the lower end of the crucible suspender (5) is detachably connected with the crucible (6).
4. An apparatus according to claim 3, wherein the heat retaining body and crucible are rotated together, and wherein: the crucible suspender (5) is rotatably connected with the via hole of the upper cover (1) through a bearing.
5. The apparatus of claim 1, wherein the heat retaining body and crucible are rotated together, and wherein: the heat insulator (7) is a hollow cylindrical structure and comprises a cylinder body and a cylinder cover which are detachably connected together; the center of the cylinder cover is provided with an inserting hole which is communicated up and down, and the lower end of the crucible suspender (5) extends into the heat insulator (7) through the inserting hole.
6. An apparatus according to claim 5, wherein the heat retaining body and crucible are rotated together, and wherein: the crucible (6) is arranged inside the heat preservation body (7) and is not contacted with the inner wall of the heat preservation body (7).
7. The apparatus of claim 1, wherein the heat retaining body and crucible are rotated together, and wherein: the heat insulator tray (8) is of a horizontally arranged disc-shaped structure, and the circumferential edge of the upper end surface is provided with an annular upper bulge; the heat insulator (7) is connected with the inside of the heat insulator tray (8) in a clamping manner, and the lower end of the outer side surface of the heat insulator (7) is connected with the inner side surface of the upper bulge of the heat insulator tray (8) in a clamping manner.
8. The apparatus of claim 1, wherein the heat retaining body and crucible are rotated together, and wherein: an internal gear (11) is horizontally arranged right below the heat retainer tray (8), and the inner side surface of the internal gear (11) is provided with a circle of internal gear teeth; the periphery of the lower end face of the inner gear (11) is provided with an annular lower bulge, the lower end face of the lower bulge is rotatably connected with a plurality of uniformly distributed guide wheels (12) along the periphery, and the upper end face of the base (9) is in contact with the lower ends of all the guide wheels (12).
9. The apparatus of claim 8, wherein the heat retaining body and crucible are rotated together, and wherein: an output shaft of the second driving motor (10) is kept vertically upward, a driving gear is fixedly arranged on the output shaft, and the driving gear is meshed with the internal gear (11).
10. An apparatus for growing silicon carbide according to claim 9, wherein the apparatus further comprises: a supporting rod (13) is arranged between the heat insulator tray (8) and the internal gear (11), the supporting rod (13) is of a vertically arranged cylindrical structure, and the upper end and the lower end of the supporting rod (13) keep an opening structure; the inner diameter of the supporting rod (13) is equal to the outer diameter of the internal gear (11); the upper end of the supporting rod (13) is fixedly connected with the lower end face of the heat insulator tray (8), and the lower end of the inner side face of the supporting rod (13) is fixedly connected with the outer side face of the internal gear (11), so that the heat insulator tray (8) is fixed with the internal gear (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220332089.1U CN216838274U (en) | 2022-02-18 | 2022-02-18 | Silicon carbide growing device with double-rotation heat insulator and crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220332089.1U CN216838274U (en) | 2022-02-18 | 2022-02-18 | Silicon carbide growing device with double-rotation heat insulator and crucible |
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| Publication Number | Publication Date |
|---|---|
| CN216838274U true CN216838274U (en) | 2022-06-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220332089.1U Active CN216838274U (en) | 2022-02-18 | 2022-02-18 | Silicon carbide growing device with double-rotation heat insulator and crucible |
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| CN (1) | CN216838274U (en) |
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- 2022-02-18 CN CN202220332089.1U patent/CN216838274U/en active Active
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