CN211170961U - Rotating device - Google Patents
Rotating device Download PDFInfo
- Publication number
- CN211170961U CN211170961U CN201922334757.5U CN201922334757U CN211170961U CN 211170961 U CN211170961 U CN 211170961U CN 201922334757 U CN201922334757 U CN 201922334757U CN 211170961 U CN211170961 U CN 211170961U
- Authority
- CN
- China
- Prior art keywords
- hollow shaft
- fixed end
- heater
- graphite tray
- reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The utility model discloses a rotating device, include: a reactor comprising a reaction chamber; the graphite tray is arranged in the reaction cavity; one end of the supporting cylinder is connected with the graphite tray, the other end of the supporting cylinder is connected with the rotating disc, and the supporting cylinder, the graphite tray and the rotating disc enclose a heating cavity; the magnetic fluid component comprises a fixed end and a hollow shaft, wherein one end of the fixed end is connected with the bottom wall of the reactor, the other end of the fixed end is connected with the sealing plate, the hollow shaft is rotatably arranged in the fixed end through a bearing, and the hollow shaft is connected with the rotating disc; the heater is arranged in the heating cavity, the heater is fixed on the electrode plate, the electrode plate is connected with one end of the electrode, and the other end of the electrode sequentially penetrates through the central hole of the rotating disk and the inner cavity of the hollow shaft to be connected with the sealing plate. The utility model discloses rotatory levelness is better, stability is high, has improved graphite tray's life, and heating uniformity is good, and the epitaxial material thickness homogeneity of preparation is good.
Description
Technical Field
The utility model relates to a carborundum epitaxial growth technical field especially relates to a rotary device for carborundum epitaxial equipment.
Background
The silicon carbide epitaxial equipment is used in preparing silicon carbide monocrystal film material and belongs to the field of chemical vapor deposition technology. The reaction principle is that reaction gas flows through the surface of a substrate (namely a substrate) heated to the reaction temperature, and chemical reaction is carried out to generate the silicon carbide single crystal film. The substrate is placed on a graphite tray in the reaction process, and in order to ensure the uniformity of the thickness of the film and the components of the material, the uniformity of the temperature and the airflow field of the substrate must be ensured, and the substrate is usually realized by adopting a mode of rapidly rotating the graphite tray in the implementation.
Currently, there are mainly two types of rotating devices in the prior art: one is an air-flow driven, levitated rotary device (as shown in fig. 1) and the other is a central shaft supported rotary device (as shown in fig. 2).
Among them, the suspension type rotating device has the following disadvantages: (1) the rotation stability is poor; (2) the height of the graphite tray fluctuates up and down along with the change of the airflow; (3) the temperature of the graphite tray is unstable; (4) it cannot rotate at high speed.
The central shaft supporting type rotating device has the following disadvantages: (1) when the graphite tray rotates, the stability of the graphite tray in the horizontal direction is poor; (2) the center of the graphite tray is easy to wear, and the service life is short; (3) the temperature of the center of the graphite tray can be reduced, and the center of the graphite tray is not suitable for placing a substrate; (4) the graphite tray is easy to crack; (5) a large gap exists between the graphite tray and the heater, and the heater is easily corroded by reaction gas.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a rotating device to solve the technical problem who exists among the prior art.
In order to solve the above technical problem, the utility model discloses a technical scheme provide a rotating device, include: a reactor comprising a reaction chamber; the graphite tray is arranged in the reaction cavity; one end of the supporting cylinder is connected with the graphite tray, the other end of the supporting cylinder is connected with the rotating disc, and the supporting cylinder, the graphite tray and the rotating disc enclose a heating cavity; the magnetic fluid component comprises a fixed end and a hollow shaft, one end of the fixed end is connected with the bottom wall of the reactor, the other end of the fixed end is connected with a sealing plate, the hollow shaft is rotatably arranged in the fixed end through a bearing, and the hollow shaft is connected with the rotating disc; the heater is arranged in the heating cavity and fixed on the electrode plate, the electrode plate is connected with one end of the electrode, and the other end of the electrode sequentially penetrates through the central hole of the rotating disc and the inner cavity of the hollow shaft to be connected with the sealing plate.
In a specific embodiment of the present invention, the side wall and the bottom wall of the reactor are both provided with a cold water cavity, and the cooling liquid circulates in the cold water cavity for cooling the reactor.
In a specific embodiment of the present invention, a magnetic fluid is filled between the fixed end and the hollow shaft, and the magnetic fluid is used for sealing the reaction chamber and the heating chamber.
In a specific embodiment of the present invention, a portion of the magnetic fluid is filled in a first space enclosed by the bottom wall of the reactor, the fixed end, the hollow shaft and the bearing, for isolating the reaction chamber from the atmosphere; the other part of the magnetic fluid is filled in a second space enclosed by the sealing plate, the fixed end, the hollow shaft and the bearing and is used for isolating the heating cavity from the atmosphere.
The utility model discloses an in a concrete embodiment, still include the motor, the drive end of motor is provided with the action wheel, the cover is equipped with from the driving wheel on the hollow shaft, it is located two from the driving wheel between the bearing, the lateral wall of stiff end is provided with the transmission breach, the action wheel passes through the drive belt the transmission breach with connect from the driving wheel.
In a specific embodiment of the present invention, the junction of the sealing plate and the electrode is provided with an insulating material.
In a specific embodiment of the present invention, the graphite tray includes a cylindrical body, the heater is cylindrical, and the body and the heater are coaxial and are parallel to each other.
In a specific embodiment of the present invention, the edge of the bottom of the body extends vertically downwards to form a connecting portion, the connecting portion and the body enclose a groove, the heater is disposed in the groove, the lower end of the connecting portion and the supporting cylinder are connected.
In a specific embodiment of the present invention, the inner side of the connecting portion is provided with an annular groove, and the edge of the heater extends into the annular groove.
In a specific embodiment of the present invention, a cold water chamber is provided in the electrode plate, and the cooling liquid circulates in the cold water chamber and is used for cooling the electrode plate.
The utility model discloses an useful part lies in:
be different from prior art, use the technical scheme of the utility model, through setting up the graphite tray on supporting a section of thick bamboo, will support a section of thick bamboo setting on the rotary disk, connect rotary disk and hollow shaft, pass through the bearing with the hollow shaft and the stiff end rotates the connection, connects the diapire of stiff end and reactor, from this, as long as drive hollow shaft rotation can realize the rotation of graphite tray, rotatory levelness is better, stability is high, the level beat is less than 0.1 mm. Because the graphite tray and the supporting cylinder are relatively static and have no dynamic friction, the service life of the graphite tray is prolonged. The heater is arranged in a heating cavity formed by the support cylinder, the graphite tray and the rotating disc in a surrounding mode, so that no heating dead zone is formed below the graphite tray, the heating uniformity is good, and the thickness uniformity of the prepared epitaxial material is good.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic cross-sectional view of a prior art suspension type rotary device;
FIG. 2 is a schematic cross-sectional view of a prior art center shaft supported rotary device;
fig. 3 is a schematic cross-sectional view of the rotating device of the present invention.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 3, the embodiment of the rotating device of the present invention includes: the reactor, graphite tray 2, heater 3, support cylinder 5, magnetic fluid part. The reactor comprises a reaction chamber 1. The graphite tray 2 is disposed in the reaction chamber 1. One end of the supporting cylinder 5 is connected with the graphite tray 2, the other end of the supporting cylinder 5 is connected with the rotating disk 7, and the supporting cylinder 5, the graphite tray 2 and the rotating disk 7 enclose to form a heating cavity. The magnetic fluid component comprises a fixed end 13 and a hollow shaft 8, one end of the fixed end 13 is connected with the bottom wall 11 of the reactor, the other end of the fixed end 13 is connected with a sealing plate 10, the hollow shaft 8 is rotatably arranged in the fixed end 13 through a bearing 12, and the hollow shaft 8 is connected with the rotating disk 7. The heater 3 is arranged in the heating cavity, the heater 3 is fixed on the electrode plate 6, the electrode plate 6 is connected with one end of the electrode 9, and the other end of the electrode 9 sequentially penetrates through the central hole of the rotating disk 7 and the inner cavity of the hollow shaft 8 to be connected with the sealing plate 10. Specifically, the reaction chamber 1 is substantially cylindrical, the graphite tray 2 is substantially cylindrical, the heater 3 is substantially cylindrical, the support cylinder 5 is substantially cylindrical, the rotating disk 7 is substantially cylindrical, the hollow shaft 8 is substantially cylindrical, and the fixed end 13 is substantially cylindrical, and the reaction chamber 1, the graphite tray 2, the heater 3, the support cylinder 5, the rotating disk 7, the hollow shaft 8, and the fixed end 13 may be coaxially disposed.
The technical scheme of this embodiment of application, through setting up graphite tray 2 on supporting cylinder 5, set up supporting cylinder 5 on rotary disk 7, connect rotary disk 7 and hollow shaft 8, rotate hollow shaft 8 through bearing 12 and stiff end 13 and connect, connect the diapire 11 of stiff end 13 and reactor, from this, as long as drive hollow shaft 8 is rotatory can realize graphite tray 2's rotation, rotatory levelness is better, stability is high, horizontal runout is less than 0.1 mm. Because the graphite tray 2 and the supporting cylinder 5 are relatively static and have no dynamic friction, the service life of the graphite tray 2 is prolonged. The heater 3 is arranged in a heating cavity formed by enclosing the supporting cylinder 5, the graphite tray 2 and the rotating disk 7, so that no heating dead zone is formed below the graphite tray 2, the heating uniformity is good, and the thickness uniformity of the prepared epitaxial material is good.
In one embodiment, the side wall 4 and the bottom wall 11 of the reactor are provided with a cold water cavity, and a cooling liquid circulates in the cold water cavity for cooling the reactor.
In one embodiment, a magnetic fluid 15 is filled between the fixed end 13 and the hollow shaft 8, and the magnetic fluid 15 is used for sealing the reaction chamber 1 and the heating chamber. Wherein, a part of the magnetic fluid 15 is filled in a first space enclosed by the bottom wall 11, the fixed end 13, the hollow shaft 8 and the bearing 12 of the reactor and is used for isolating the reaction chamber 1 from the atmosphere; another part of the magnetic fluid 15 is filled in a second space enclosed by the sealing plate 10, the fixed end 13, the hollow shaft 8 and the bearing 12, and is used for isolating the heating cavity from the atmosphere. By filling the magnetic fluid 15 between the fixed end 13 and the hollow shaft 8 and sealing the reaction cavity 1 and the heating cavity by using the magnetic fluid 15, the isolation between the heater 3 and the reaction gas is better, and the service life of the heater 3 is prolonged.
Further, the device also comprises a motor (not shown), a driving wheel (not shown) is arranged at the driving end of the motor, a driven wheel 14 is sleeved on the hollow shaft 8, the driven wheel 14 is positioned between the two bearings 12, a transmission notch (not shown) is arranged on the side wall of the fixed end 13, and the driving wheel passes through the transmission notch through a transmission belt and is connected with the driven wheel 14. The motor drives the driving wheel to rotate, so that the driven wheel 14 can be driven to rotate, and the hollow shaft 8 is further driven to rotate.
In one embodiment, the junction of the sealing plate 10 and the electrode 9 is provided with an insulating material.
In one embodiment, the graphite tray 2 comprises a cylindrical body, the heater 3 is cylindrical, and the body and the heater 3 are coaxial and parallel to each other. This makes it possible to make the temperature of the graphite tray 2 more uniform.
Further, the edge of body bottom extends perpendicularly downwards and is provided with connecting portion, and connecting portion and body enclose into a recess, and heater 3 sets up in the recess, and the lower extreme and the support section of thick bamboo 5 of connecting portion are connected. Therefore, the graphite tray 2 has better heat insulation performance and reduces energy consumption.
Further, an annular groove is formed on the inner side of the connecting portion, and the edge of the heater 3 can extend into the annular groove.
In one embodiment, a cold water cavity is disposed in the electrode plate 6, and a cooling liquid circulates in the cold water cavity to cool the electrode plate 6.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.
Claims (10)
1. A rotary device, comprising:
a reactor comprising a reaction chamber;
the graphite tray is arranged in the reaction cavity;
one end of the supporting cylinder is connected with the graphite tray, the other end of the supporting cylinder is connected with the rotating disc, and the supporting cylinder, the graphite tray and the rotating disc enclose a heating cavity;
the magnetic fluid component comprises a fixed end and a hollow shaft, one end of the fixed end is connected with the bottom wall of the reactor, the other end of the fixed end is connected with a sealing plate, the hollow shaft is rotatably arranged in the fixed end through a bearing, and the hollow shaft is connected with the rotating disc;
the heater is arranged in the heating cavity and fixed on the electrode plate, the electrode plate is connected with one end of the electrode, and the other end of the electrode sequentially penetrates through the central hole of the rotating disc and the inner cavity of the hollow shaft to be connected with the sealing plate.
2. The rotating device according to claim 1, wherein the side wall and the bottom wall of the reactor are provided with cold water cavities, and cooling liquid circulates in the cold water cavities and is used for cooling the reactor.
3. The rotating device according to claim 1, wherein a magnetic fluid is filled between the fixed end and the hollow shaft, and the magnetic fluid is used for sealing the reaction chamber and the heating chamber.
4. The rotating device according to claim 3, wherein a portion of the magnetic fluid is filled in a first space enclosed by the bottom wall of the reactor, the fixed end, the hollow shaft and the bearing, for isolating the reaction chamber from the atmosphere; the other part of the magnetic fluid is filled in a second space enclosed by the sealing plate, the fixed end, the hollow shaft and the bearing and is used for isolating the heating cavity from the atmosphere.
5. The rotating device according to claim 4, further comprising a motor, wherein a driving wheel is arranged at a driving end of the motor, a driven wheel is sleeved on the hollow shaft and located between the two bearings, a transmission notch is formed in a side wall of the fixed end, and the driving wheel penetrates through the transmission notch through a transmission belt and is connected with the driven wheel.
6. A rotary apparatus according to claim 1, wherein the junction of the seal plate and the electrode is provided with an insulating material.
7. The rotary device of claim 1, wherein the graphite tray includes a cylindrical body, the heater is cylindrical, and the body and the heater are coaxial and parallel to each other.
8. The rotary device as claimed in claim 7, wherein a connecting portion is provided at a bottom edge of the body to extend vertically downward, the connecting portion and the body define a recess, the heater is disposed in the recess, and a lower end of the connecting portion is connected to the support cylinder.
9. A rotary apparatus according to claim 8, wherein the inner side of the connecting portion is provided with an annular groove into which the edge of the heater projects.
10. The rotating device according to claim 1, wherein a cold water chamber is provided in the electrode plate, and a cooling liquid circulates in the cold water chamber for cooling the electrode plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922334757.5U CN211170961U (en) | 2019-12-24 | 2019-12-24 | Rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922334757.5U CN211170961U (en) | 2019-12-24 | 2019-12-24 | Rotating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211170961U true CN211170961U (en) | 2020-08-04 |
Family
ID=71804755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922334757.5U Active CN211170961U (en) | 2019-12-24 | 2019-12-24 | Rotating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211170961U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113088934A (en) * | 2020-12-14 | 2021-07-09 | 芯三代半导体科技(苏州)有限公司 | Rotating device |
| CN113088933A (en) * | 2020-12-14 | 2021-07-09 | 芯三代半导体科技(苏州)有限公司 | Rotating device |
-
2019
- 2019-12-24 CN CN201922334757.5U patent/CN211170961U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113088934A (en) * | 2020-12-14 | 2021-07-09 | 芯三代半导体科技(苏州)有限公司 | Rotating device |
| CN113088933A (en) * | 2020-12-14 | 2021-07-09 | 芯三代半导体科技(苏州)有限公司 | Rotating device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211170961U (en) | Rotating device | |
| CN213925011U (en) | Rotating device | |
| EP2876189B1 (en) | APPARATUS FOR PRODUCING SiC SINGLE CRYSTAL AND METHOD FOR PRODUCING SiC SINGLE CRYSTAL | |
| CN113088933A (en) | Rotating device | |
| EP3760767A1 (en) | Ingot furnace for directional solidification growth of crystalline silicon and application | |
| CN107802148A (en) | Magnetic blending jar can be cleaned automatically | |
| CN111334862A (en) | Non-bonded seed crystal type tantalum crucible and crystal growth method | |
| CN113026097A (en) | Rotating device | |
| CN113089090A (en) | Reaction system | |
| CN113737154A (en) | Growth chamber of epitaxial equipment | |
| CN109355706B (en) | Silicon carbide single crystal growth device | |
| CN113088934A (en) | Rotating device | |
| CN109423629B (en) | Workpiece driving device for one-time full-surface deposition of disc parts and vapor deposition furnace | |
| CN214004780U (en) | Rotating device | |
| CN209144311U (en) | A kind of PVT method silicon carbide monocrystal growth device | |
| CN217230932U (en) | Base body supporting device of chemical vapor deposition equipment | |
| CN218359602U (en) | Diamond micropowder abrasive brick | |
| JP3617860B2 (en) | Substrate processing method and substrate processing apparatus | |
| CN104046962B (en) | A kind of axially strength drives planetary rotation device | |
| CN219839791U (en) | Wafer carrying device and film forming device | |
| CN103189547A (en) | Single crystal pulling device and low heat conductive member to be used in single crystal pulling device | |
| CN213060789U (en) | Automatic temperature control equipment for ceramic wine jar | |
| CN216838274U (en) | Silicon carbide growing device with double-rotation heat insulator and crucible | |
| CN214300469U (en) | Crucible and device for growing N-type silicon carbide crystal | |
| CN114164413A (en) | Rotating system for MOCVD equipment and MOCVD equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |