CN217230932U - Base body supporting device of chemical vapor deposition equipment - Google Patents
Base body supporting device of chemical vapor deposition equipment Download PDFInfo
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- CN217230932U CN217230932U CN202221132399.5U CN202221132399U CN217230932U CN 217230932 U CN217230932 U CN 217230932U CN 202221132399 U CN202221132399 U CN 202221132399U CN 217230932 U CN217230932 U CN 217230932U
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Abstract
The utility model relates to a chemical vapor deposition equipment's base member strutting arrangement, including equipment casing, first drive roll, second drive roll and driven voller, the equal level of first drive roll, second drive roll and driven voller sets up in the equipment casing, fixedly connected with insulating layer on the inside wall of equipment casing, first drive roll, second drive roll and driven voller all run through the insulating layer and rotate with the insulating layer and be connected, the driven voller is located the central top of first drive roll and second drive roll. The utility model discloses, actuating mechanism is simple, and transmission reliability is high, and the base member is vertical to be placed and to carry out rotatory deposit, can eliminate the not in place problem of base member face deposit granule impurity and contact position deposit, has guaranteed the deposition quality of base member.
Description
Technical Field
The utility model relates to the technical field of mechanical equipment, especially, relate to a base member strutting arrangement of chemical vapor deposition equipment.
Background
The matrix supporting device of the existing Chemical Vapor Deposition (CVD) equipment adopts a planetary gear mechanism for transmission, each planetary gear drives a stack of matrixes to horizontally rotate in a cavity of the equipment, and a deposition process is carried out in the rotating process. The existing supporting device has the following disadvantages:
in the deposition process, the surface of the base body is in a horizontal state, particle impurities are easily deposited on the upper surface of the base body, the bottom surface of the base body is always in a contact state with a support rod of the rotary table, and the contact position cannot be deposited in place due to the fact that no reaction gas permeates, so that a gap without a coating is formed on the base body, and the quality or the service life of the base body is influenced.
SUMMERY OF THE UTILITY MODEL
The utility model provides a chemical vapor deposition equipment's base member strutting arrangement has solved the technical problem among the prior art.
The utility model provides a scheme as follows of above-mentioned technical problem:
the utility model provides a base member strutting arrangement of chemical vapor deposition equipment, includes equipment casing, first drive roll, second drive roll and driven voller are the level setting in the equipment casing, fixedly connected with insulating layer on the inside wall of equipment casing, first drive roll, second drive roll and driven voller all run through the insulating layer and are connected with the insulating layer rotation, the driven voller is located the center top of first drive roll and second drive roll.
Furthermore, a plurality of fixed sleeves and base body locating sleeves are sleeved on the outer surfaces of the first driving roller, the second driving roller and the driven roller in a staggered mode, notches are formed in the outer sides of the base body locating sleeves, a plurality of groove-shaped areas are formed by the notches of the base body locating sleeves on the first driving roller, the second driving roller and the driven roller in an enclosing mode, and a base body is vertically placed in each groove-shaped area.
Further, the equal fixedly connected with keysets in both ends of first drive roll, second drive roll and driven voller, every keyset fixedly connected with pivot, every rotate in the pivot and be connected with the mount pad, every the pivot runs through the axle center of mount pad, every the mount pad runs through equipment casing and with equipment casing fixed connection.
Furthermore, the outer side end of each rotating shaft is provided with a water inlet and a water outlet of cooling water.
Further, first drive roll is connected through the mutual transmission of rotary driving mechanism with the second drive roll, rotary driving mechanism includes motor, motor cabinet, first drive wheel, second drive wheel, third drive wheel and drive belt, motor cabinet and equipment casing fixed connection, the top and the motor fixed connection of motor cabinet, third drive wheel fixed connection is at the output of motor, the pivot outside end fixed connection of first drive wheel and first drive roll one end, the pivot outside end fixed connection of second drive wheel and second drive roll one end, first drive wheel, second drive wheel and third drive wheel pass through drive belt mutual transmission connects and does synchronous rotation.
Further, the motor is a speed-adjustable motor.
The utility model has the advantages that: the utility model provides a chemical vapor deposition equipment's base member strutting arrangement has following advantage:
the driving mechanism is simple, the transmission reliability is high, when the substrate surface is vertically placed, the problem of particle impurities deposited on the upper surface of the substrate can be solved, when the substrate is rotationally deposited in the groove-shaped area of the positioning sleeve, the contact position of the substrate and the positioning sleeve is continuously changed, the problem that the deposition of the contact position is not in place does not exist, and the deposition quality of the substrate is ensured.
The above description is only an outline of the technical solution of the present invention, and in order to make the technical means of the present invention more clearly understood and to be implemented in accordance with the content of the specification, the following detailed description will be given of preferred embodiments of the present invention in conjunction with the accompanying drawings. The detailed description of the present invention is given by the following examples and the accompanying drawings.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention and do not constitute a limitation on the invention. In the drawings:
FIG. 1 is a cross-sectional view of a substrate support apparatus of a chemical vapor deposition apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a substrate supporting device of the chemical vapor deposition apparatus provided in FIG. 1;
FIG. 3 is a left perspective sectional view of a substrate supporting apparatus of the chemical vapor deposition apparatus shown in FIG. 1.
In the drawings, the components represented by the respective reference numerals are listed below:
1. a first drive roll; 2. a second drive roll; 3. a driven roller; 4. a rotation driving mechanism; 5. a substrate; 6. an apparatus housing; 7. a thermal insulation layer; 11. fixing a sleeve; 12. a substrate positioning sleeve; 13. a patch panel; 14. a rotating shaft; 41. a motor; 42. a motor base; 43. a first drive pulley; 44. a second transmission wheel; 45. a third transmission wheel; 46. a transmission belt; 141. a water inlet; 142. and (4) a water outlet.
Detailed Description
The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are intended to illustrate the present invention and are not intended to limit the scope of the invention. The invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more fully apparent from the following description and appended claims. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1-3, the utility model provides a chemical vapor deposition equipment's base member strutting arrangement, including equipment casing 6, first drive roll 1, second drive roll 2 and driven voller 3, first drive roll 1, the equal level setting of second drive roll 2 and driven voller 3 is in equipment casing 6, fixedly connected with insulating layer 7 on the inside wall of equipment casing 6, first drive roll 1, second drive roll 2 and driven voller 3 all run through insulating layer 7 and rotate with insulating layer 7 and be connected, driven voller 3 is located the central top of first drive roll 1 and second drive roll 2. The outer surfaces of the first driving roller 1, the second driving roller 2 and the driven roller 3 are respectively sleeved with a plurality of fixing sleeves 11 and a plurality of base body positioning sleeves 12 in a staggered mode, notches are formed in the outer sides of the base body positioning sleeves 12, notches of the base body positioning sleeves 12 on the first driving roller 1, the second driving roller 2 and the driven roller 3 are enclosed to form a plurality of groove-shaped areas, and a base body 5 is vertically placed in each groove-shaped area. The size of the groove-shaped area is matched with that of the base body 5, so that the base body 5 cannot be extruded in the rotating process and the base body 5 is conveniently taken and placed from the groove-shaped area.
Preferably, the equal fixedly connected with keysets 13 in both ends of first drive roll 1, second drive roll 2 and driven voller 3, every keysets 13 fixedly connected with pivot 14, it is connected with mount pad 15 to rotate on every pivot 14, every pivot 14 runs through the axle center of mount pad 15, every mount pad 15 runs through equipment casing 6 and with equipment casing 6 fixed connection, pivot 14 can be rotatory in mount pad 15, and transmit rotary motion to first drive roll 1 through keysets 13, keysets 13 has thermal-insulated and the effect of the dismouting of being convenient for. The outer end of each rotating shaft 14 is provided with a cooling water inlet 141 and a cooling water outlet 142, so that high-temperature overflow in the equipment shell 6 is avoided.
Preferably, the first driving roller 1 and the second driving roller 2 are in transmission connection with each other through a rotation driving mechanism 4, the rotation driving mechanism 4 comprises a motor 41, a motor seat 42 and a first transmission wheel 43, the second driving wheel 44, the third driving wheel 45 and the transmission belt 46, the motor base 42 is fixedly connected with the equipment shell 6, the top end of the motor base 42 is fixedly connected with the motor 41, the third driving wheel 45 is fixedly connected with the output end of the motor 41, the first driving wheel 43 is fixedly connected with the outer side end of the rotating shaft 14 at one end of the first driving roller 1, the second driving wheel 44 is fixedly connected with the outer side end of the rotating shaft 14 at one end of the second driving roller 2, the first driving wheel 43, the second driving wheel 44 and the third driving wheel 45 are mutually connected in a transmission mode through the transmission belt 46 to rotate synchronously, the motor drives the third driving wheel 45 to rotate, and the third driving wheel 45 drives the first driving wheel 43 and the second driving wheel 44 to move synchronously through the transmission belt 46.
Preferably, the motor 41 is a speed-adjustable motor, which facilitates adjusting the rotation speed of the substrate 5 when the process parameters are changed.
The utility model discloses a concrete theory of operation and application method do:
according to the size of a base body 5 to be processed, a matched fixed sleeve 11 and a matched base body positioning sleeve 12 are manufactured, the fixed sleeve 11 and the base body positioning sleeve 12 are sleeved on a first driving roller 1, a second driving roller 2 and a driven roller 3 in a staggered mode, notches of the three base body positioning sleeves 12 on the same vertical surface are surrounded to form a vertical groove-shaped area, each groove-shaped area is placed into one base body 5, and particle impurities cannot be accumulated on two surfaces of the base body 5 in the deposition process due to the fact that the base body 5 is in the vertical state.
The motor 41 is adopted to drive the third driving wheel 45 to rotate, the third driving wheel 45 drives the first driving wheel 43 and the second driving wheel 44 to synchronously rotate through the driving belt 46, the first driving wheel 43 drives the first driving roller 1 to synchronously rotate through being fixedly connected with the rotating shaft 14 and the adapter plate 13 at one end of the first driving roller 1, and the second driving wheel 44 drives the second driving roller 2 to synchronously rotate through being fixedly connected with the rotating shaft 14 and the adapter plate 13 at one end of the second driving roller 2. The matrix 5 is contacted with the notches of the matrix positioning sleeve 12 on the first driving roller 1 and the matrix positioning sleeve 12 on the second driving roller 2 under the action of gravity, when the first driving roller 1 and the second driving roller 2 synchronously rotate, the matrix 5 also performs autorotation motion, and the contact position is continuously changed in the rotating process, so that the matrix 5 cannot be deposited in place because the contact position is unchanged in the deposition process. The notch of the base body positioning sleeve 12 on the driven roller 3 can ensure that the base body 5 cannot be damaged or fall off in the rotation process, and the driven roller 3 can rotate freely, so that the friction between the base body 5 and the base body positioning sleeve 12 on the driven roller 3 in the rotation process is reduced.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. The electrical components presented in this document are electrically connected to an external master controller and a mains supply, and the master controller may be a conventional known device such as a computer. Those not described in detail in this specification are well within the skill of the art.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way; the present invention can be smoothly implemented by those skilled in the art according to the drawings and the above description; however, those skilled in the art should understand that the equivalent embodiments of the present invention are equivalent embodiments of the present invention, and that the changes, modifications and evolutions made by the above-disclosed technical contents are not departed from the technical scope of the present invention; meanwhile, any changes, modifications, evolutions, etc. of the above embodiments, which are equivalent to the actual techniques of the present invention, still belong to the protection scope of the technical solution of the present invention.
Claims (6)
1. The utility model provides a chemical vapor deposition equipment's base member strutting arrangement, includes equipment casing (6), first drive roll (1), second drive roll (2) and driven voller (3), its characterized in that, first drive roll (1), second drive roll (2) and the equal level of driven voller (3) set up in equipment casing (6), fixedly connected with insulating layer (7) on the inside wall of equipment casing (6), insulating layer (7) are all run through and are connected with insulating layer (7) rotation in first drive roll (1), second drive roll (2) and driven voller (3), driven voller (3) are located the central top of first drive roll (1) and second drive roll (2).
2. The substrate supporting device of the chemical vapor deposition equipment as claimed in claim 1, wherein the outer surfaces of the first driving roll (1), the second driving roll (2) and the driven roll (3) are respectively sleeved with a plurality of fixing sleeves (11) and substrate positioning sleeves (12) in a staggered manner, the outer sides of the substrate positioning sleeves (12) are provided with notches, the notches of the plurality of substrate positioning sleeves (12) on the first driving roll (1), the second driving roll (2) and the driven roll (3) are enclosed to form a plurality of groove-shaped areas, and a substrate (5) is vertically placed in each groove-shaped area.
3. The substrate supporting device of the chemical vapor deposition equipment according to claim 2, wherein adapter plates (13) are fixedly connected to two ends of the first driving roller (1), the second driving roller (2) and the driven roller (3), each adapter plate (13) is fixedly connected with a rotating shaft (14), each rotating shaft (14) is rotatably connected with a mounting seat (15), each rotating shaft (14) penetrates through the axis of the mounting seat (15), and each mounting seat (15) penetrates through the equipment shell (6) and is fixedly connected with the equipment shell (6).
4. The substrate supporting device of a chemical vapor deposition apparatus according to claim 3, wherein the outer end of each of the rotating shafts (14) is provided with a water inlet (141) and a water outlet (142) for cooling water.
5. The substrate supporting device of the chemical vapor deposition apparatus according to claim 4, wherein the first driving roll (1) and the second driving roll (2) are in transmission connection with each other through a rotation driving mechanism (4), the rotation driving mechanism (4) comprises a motor (41), a motor base (42), a first driving wheel (43), a second driving wheel (44), a third driving wheel (45) and a transmission belt (46), the motor base (42) is fixedly connected with the apparatus housing (6), the top end of the motor base (42) is fixedly connected with the motor (41), the third driving wheel (45) is fixedly connected with the output end of the motor (41), the first driving wheel (43) is fixedly connected with the outer end of the rotating shaft (14) at one end of the first driving roll (1), the second driving wheel (44) is fixedly connected with the outer end of the rotating shaft (14) at one end of the second driving roll (2), the first transmission wheel (43), the second transmission wheel (44) and the third transmission wheel (45) are mutually connected in a transmission way through the transmission belt (46) to synchronously rotate.
6. The substrate support apparatus of chemical vapor deposition equipment as claimed in claim 5, wherein the motor (41) is a speed-adjustable motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221132399.5U CN217230932U (en) | 2022-05-12 | 2022-05-12 | Base body supporting device of chemical vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221132399.5U CN217230932U (en) | 2022-05-12 | 2022-05-12 | Base body supporting device of chemical vapor deposition equipment |
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| Publication Number | Publication Date |
|---|---|
| CN217230932U true CN217230932U (en) | 2022-08-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221132399.5U Active CN217230932U (en) | 2022-05-12 | 2022-05-12 | Base body supporting device of chemical vapor deposition equipment |
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| CN (1) | CN217230932U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116083873A (en) * | 2023-04-07 | 2023-05-09 | 宁波招宝磁业有限公司 | Neodymium iron boron cast sheet sputtering device |
-
2022
- 2022-05-12 CN CN202221132399.5U patent/CN217230932U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116083873A (en) * | 2023-04-07 | 2023-05-09 | 宁波招宝磁业有限公司 | Neodymium iron boron cast sheet sputtering device |
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