CN216351470U - Focusing device - Google Patents
Focusing device Download PDFInfo
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- CN216351470U CN216351470U CN202121688887.XU CN202121688887U CN216351470U CN 216351470 U CN216351470 U CN 216351470U CN 202121688887 U CN202121688887 U CN 202121688887U CN 216351470 U CN216351470 U CN 216351470U
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- prism
- focusing apparatus
- supporting seat
- driving mechanism
- seat
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Abstract
The utility model provides a focusing device, includes first prism, second prism, first prism supporting seat and second prism supporting seat, first prism install in first prism supporting seat, the second prism install in second prism supporting seat, first prism and second prism are wedge prism, first prism seat and/or second prism seat is including propping up supporting bench, actuating mechanism, connecting piece, the connecting piece is connected drive structure and wedge prism, it includes the slope mesa to prop up supporting bench, actuating mechanism is fixed in the slope mesa. The driving mechanism is integrally fixed by utilizing the inclined table top of the supporting table, so that the angle of the driving mechanism can be integrally adjusted conveniently, and the mounting precision is improved.
Description
Technical Field
The utility model relates to a focusing device, in particular to a focusing device applied to the field of laser direct writing.
Background
In the conventional laser direct writing imaging exposure system, one or more groups of lenses are used for exposure on a substrate, and in order to ensure that exposure lines or images of the plurality of groups of lenses have high resolution and consistency, the focal plane of each lens needs to be manually adjusted, so that the one or more groups of lenses are all in the best focal plane position. The operation mode is complicated, the focal plane precision is difficult to guarantee, and the resolution of the exposure system is directly limited. Especially for a high-precision photoetching lens, the focal depth is small, the flatness of the substrate cannot meet the high-precision photoetching condition, and the calibration of the focal plane needs to be realized by focusing the lens.
The existing lens focusing mode is that a focusing device is arranged below a lens, an upper wedge prism and a lower wedge prism are adopted to form a parallel flat plate, the distance of the parallel flat plate in the up-down direction is changed by moving one of the wedge prisms to move left and right relative to the other wedge prism, or the distance of the two wedge prisms in the up-down direction is changed by moving the two wedge prisms to move left and right. Chinese patent CN103488062B discloses a bidirectional sliding wedge prism focusing device, which comprises a prism and a power mechanism, wherein the prism comprises a wedge upper prism and a wedge lower prism, an inclined plane of the upper prism contacts with an inclined plane of the lower prism, the power mechanism is connected with the upper prism and the lower prism to drive the upper prism and the lower prism to synchronously and relatively slide along the inclined plane direction, the power mechanism comprises a stepping motor and a left-right rotating lead screw, the stepping motor is connected with the left-right rotating lead screw through a coupler, and the left-right rotating lead screw is fixed on a lead screw mounting bottom plate through a lead screw fixing end and a lead screw supporting end; the upper prism is fixedly connected with the lower end of the upper prism mounting plate through an upper prism mounting frame, the lower prism is fixedly connected with the lower end of the lower prism mounting plate through a lower prism mounting frame, the upper end of the upper prism mounting plate is slidably connected with the upper prism crossed roller slide rail, and the upper end of the lower prism mounting plate is slidably connected with the lower prism crossed roller slide rail; and a screw nut is arranged on the left-handed screw, and the upper prism mounting plate and the lower prism mounting plate are fixedly connected with the screw nut respectively. The upper end of the upper prism mounting plate is connected with the upper prism crossed roller slide rail in a sliding manner, and the upper end of the lower prism mounting plate is connected with the lower prism crossed roller slide rail in a sliding manner; and a screw nut is arranged on the left right-handed screw, the upper prism mounting plate and the lower prism mounting plate are fixedly connected with the screw nut respectively, and the inclination angles of the upper prism crossed roller slide rail, the lower prism crossed roller and the screw rod need to be adjusted respectively, so that the mounting precision of the focusing device is reduced.
Disclosure of Invention
The utility model aims to provide a high-precision focusing device.
In order to solve the above problems, the present invention provides a focusing apparatus, which includes a first prism, a second prism, a first prism support seat and a second prism support seat, wherein the first prism is mounted on the first prism support seat, the second prism is mounted on the second prism support seat, the first prism and the second prism are wedge prisms, the first prism seat and/or the second prism seat includes a support platform, a driving mechanism, and a connecting member, the connecting member connects the driving mechanism and the wedge prism, the support platform includes an inclined platform surface, and the driving mechanism is fixed on the inclined platform surface.
Further, the driving mechanism is fixed on the inclined table top through an adjusting bolt.
Further, the adjusting bolts are located at four opposite corners of the inclined table top.
Furthermore, the first prism supporting seat and the second prism supporting seat both comprise fixing pieces, the fixing pieces are used for fixing the first prism and the second prism, the fixing pieces comprise accommodating grooves, and a plurality of grooves are formed in the bottom surfaces, in the accommodating grooves, of the accommodating grooves, which are in contact with the prisms.
Further, the side wall of the containing groove is provided with a communicating groove, and the communicating groove is connected with the groove.
Further, the communication groove is located at a corner position of the accommodating groove.
Further, the first prism support seat and the second prism support seat are mounted on the bottom plate.
Furthermore, the bottom plate is integrally installed on the lens base through an adjusting bolt.
Further, the support table is connected to the base plate by an adjusting bolt.
Further, the adjusting bolt is an optical bolt.
Compared with the prior art, the technical scheme of the utility model utilizes the inclined table top of the supporting table to integrally fix the driving mechanism, so that the angle of the driving mechanism can be integrally adjusted, the mounting precision is improved, the driving mechanism is connected with the wedge-shaped prism through the connecting piece, the angle of the second prism can be adjusted by adjusting the driving mechanism, the inclined planes of the first prism and the second prism are parallel, and the driving mechanism drives the wedge-shaped prism to move in a direction parallel to the inclined plane of the wedge-shaped prism. The driving mechanism is integrally fixed on the inclined table top of the supporting table through the adjusting bolt, so that the angle of the driving mechanism is more conveniently and accurately adjusted to be consistent with the inclined angle of the wedge-shaped prism.
Drawings
Fig. 1 is a schematic view of a focusing apparatus mounted to a lens mount.
Fig. 2 is a perspective view of the focusing apparatus.
FIG. 3 is a schematic view of a focus mount.
Fig. 4 is a schematic view of a second prism support base and drive mechanism.
Fig. 5 is a schematic plan view of a focusing apparatus in one state.
Fig. 6 is a schematic plan view of the focusing apparatus in another state.
FIG. 7 is a schematic view of another embodiment of a focusing apparatus.
Detailed Description
In order that the objects, aspects and advantages of the utility model will become more apparent, the utility model will be described by way of example only, and in connection with the accompanying drawings.
As shown in fig. 1 to 6, the focusing apparatus 1 is integrally mounted on the lens base 2, and includes a base plate 10, a first prism 11, a second prism 12, a first prism support base 13, and a second prism support base 14. The first prism support base 13 and the second prism support base 14 are mounted on the bottom plate 10, the first prism 11 is mounted on the first prism support base 13, the second prism 12 is mounted on the second prism support base 14, the first prism 11 and the second prism 12 are wedge-shaped prisms and have an inclined surface 110, the inclined surfaces of the first prism 11 and the second prism 12 are parallel and opposite and have a gap, and the rest planes of the first prism 11 and the second prism 12 are parallel and opposite.
The first prism support base 13 is L-shaped, one end of which is connected to the bottom plate 10, and the other end of which is provided with a fixing member 130 for fixing the first prism 13. The fixing member 130 includes a receiving groove 131, a plurality of grooves 133 are disposed on a bottom surface 132 of the receiving groove 131, which is in contact with the first prism 11, a communicating groove 134 is disposed on a side wall of the receiving groove 131, the communicating groove 134 is connected to the grooves 133, optical cement is added from the communicating groove 134, the optical cement flows to the grooves 133, and the first prism 11 is fixed by the optical cement. Preferably, the communication groove 134 is located at a corner position of the receiving groove 131.
The second prism support base 14 includes a support base 140, a driving mechanism 141, and a connecting member 142, wherein one end of the support base 140 is connected to the bottom plate 10, the other end is connected to the driving mechanism 141, and the connecting member 142 is connected to the driving mechanism 141 and the second prism 12.
The support platform 140 includes an inclined platform 1400, the inclined platform 1400 is connected to the driving mechanism 141 through a first adjusting bolt 1401, and the angle of the driving mechanism 141 relative to the base plate 10 is adjusted through the first adjusting bolt 1401, so that the inclination angles of the driving mechanism 141 and the second prism slope are consistent. Preferably, the first adjusting bolts 1401 are located at the opposite four corners of the inclined table top. The support table 140 is connected to the base plate 10 by a second adjusting bolt 1402, and the distance between the inclined surfaces of the first prism 11 and the second prism 12 is adjusted by the second adjusting bolt 1402. The first adjusting bolt 1401 and the second adjusting bolt 1402 may be selected from bolts or screws, preferably, optical bolts, with high precision adjustment. The first adjusting bolt and the second adjusting bolt can select the same type of elements and can also select different types of elements.
The linear driving module selected by the driving mechanism 141 preferably includes a sliding portion 1410 and a driving portion 1411, the driving portion 1411 drives the sliding portion 1410 to move linearly, the sliding portion 1410 is connected to the connecting member, and the driving portion 1411 is connected to the inclined table 1400.
The connecting member 142 and the first prism support seat adopt the same fixing member structure to fix the second prism 12.
The driving mechanism 141 is integrally fixed on the inclined table 1400 of the supporting table 140, so that the angle of the driving mechanism 141 can be integrally adjusted, the installation accuracy is improved, the driving mechanism is connected with the second prism through a connecting piece, the installation angle of the driving mechanism 141 is adjusted, the inclination angle of the second prism 12 can be adjusted, the inclined planes of the first prism 11 and the second prism 12 are parallel, and the driving mechanism drives the wedge-shaped prism to move in a direction parallel to the inclined plane of the wedge-shaped prism. The driving mechanism 141 is integrally fixed on the inclined table top of the supporting table through the first adjusting bolt 1401, and the mounting angle of the driving mechanism is adjusted by the first adjusting bolt, so that the mounting angle of the driving mechanism 141 can be adjusted more conveniently and accurately to be consistent with the inclined angle of the wedge prism. The distance between the first prism 11 and the second prism 12 is conveniently adjusted by the second adjusting bolt 1402. And the relation between each part is adjusted by the overall design of the focusing device so that the first prism and the second prism reach a specified interval, and the moving direction of the second prism is parallel to the inclined planes of the first prism and the second prism. And after the installation is finished, if displacement occurs among all the parts in the using process, the adjustment is also convenient.
As shown in fig. 7, the focusing apparatus further includes a photosensor 15, and the photosensor 15 is mounted to the base plate 10. The photoelectric sensor can also be directly mounted on the base of the lens, the photoelectric sensor 15 detects height information of the detection light facet and transmits the height information to the driving mechanism 141, and the driving mechanism 141 drives the second prism 12 to move forward or backward along the slope direction according to the height information, so as to change the distance between the lower surface of the first prism 11 and the upper surface of the second prism 12 and compensate the focal plane of the lens.
In the above embodiment, the driving mechanism is provided only on the second prism side to drive the second prism to move. The first prism can also be provided with a driving mechanism in the same way, and the driving mechanism is utilized to drive the first prism to move along the inclined plane direction of the second prism.
The first prism 11, the second prism 12, the first prism support 13 and the second prism support 14 are assembled to the lens base 2 after the bottom plate 10 is assembled and debugged, so that the parts of the focusing device can be debugged conveniently, the bottom plate 10 is integrally mounted on the lens base through a third adjusting bolt, so that the focusing device can be integrally adjusted conveniently, and the third adjusting bolt, the first adjusting bolt and the second adjusting bolt select the same type of elements or can select different types of elements.
Claims (10)
1. A focusing apparatus, characterized by: it includes first prism, second prism, first prism supporting seat and second prism supporting seat, first prism install in first prism supporting seat, the second prism install in second prism supporting seat, first prism and second prism are wedge prism, first prism seat and/or the second prism seat is including propping up supporting bench, actuating mechanism, connecting piece, the connecting piece is connected actuating mechanism and wedge prism, it includes the slope mesa to prop up supporting bench, actuating mechanism is fixed in the slope mesa.
2. The focusing apparatus of claim 1, wherein: the driving mechanism is fixed on the inclined table top through an adjusting bolt.
3. The focusing apparatus of claim 2, wherein: the adjusting bolts are positioned at the opposite four corners of the inclined table-board.
4. The focusing apparatus of claim 1, wherein: the first prism supporting seat and the second prism supporting seat both comprise fixing pieces, the fixing pieces are used for fixing the first prism and the second prism, the fixing pieces comprise accommodating grooves, and a plurality of grooves are formed in the bottom surfaces, in the accommodating grooves, of the accommodating grooves, which are in contact with the prisms.
5. The focusing apparatus of claim 4, wherein: the side wall of the containing groove is provided with a communicating groove, and the communicating groove is connected with the groove.
6. The focusing apparatus of claim 5, wherein: the communicating groove is positioned at the corner position of the accommodating groove.
7. The focusing apparatus of claim 1, wherein: the first prism supporting seat and the second prism supporting seat are arranged on the bottom plate.
8. The focusing apparatus of claim 7, wherein: the bottom plate is integrally arranged on the lens base through an adjusting bolt.
9. The focusing apparatus of claim 7, wherein: the support table is connected to the base plate through an adjusting bolt.
10. A focusing apparatus according to any of claims 2, 3, 8 or 9, wherein: the adjusting bolt is an optical bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121688887.XU CN216351470U (en) | 2021-07-23 | 2021-07-23 | Focusing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121688887.XU CN216351470U (en) | 2021-07-23 | 2021-07-23 | Focusing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216351470U true CN216351470U (en) | 2022-04-19 |
Family
ID=81159695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121688887.XU Active CN216351470U (en) | 2021-07-23 | 2021-07-23 | Focusing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216351470U (en) |
-
2021
- 2021-07-23 CN CN202121688887.XU patent/CN216351470U/en active Active
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