CN103488062A - Wedge-shaped prism focusing device capable of bidirectionally sliding - Google Patents
Wedge-shaped prism focusing device capable of bidirectionally sliding Download PDFInfo
- Publication number
- CN103488062A CN103488062A CN201310478313.3A CN201310478313A CN103488062A CN 103488062 A CN103488062 A CN 103488062A CN 201310478313 A CN201310478313 A CN 201310478313A CN 103488062 A CN103488062 A CN 103488062A
- Authority
- CN
- China
- Prior art keywords
- prism
- wedge
- installing plate
- screw rod
- right turning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a wedge-shaped prism focusing device capable of bidirectionally sliding. The wedge-shaped prism focusing device capable of bidirectionally sliding comprises prisms and a power mechanism, wherein the prisms comprise the upper wedge-shaped prism and the lower wedge-shaped prism, the inclined plane of the upper prism is in contact with the inclined plane of the lower prism; the power mechanism is connected to the upper prism and the lower prism and is used for driving the upper prism and the lower prism to synchronously and relatively slide along the directions of the inclined planes. Compared with the prior art, the wedge-shaped prism focusing device capable of bidirectionally sliding has the beneficial effects of simple and compact structure, short motor stroke, large focusing range, capability of focusing in real time according to focal planes and relatively wide application range.
Description
Technical field
The invention belongs to technical field of lithography, but especially relate to a kind of Bidirectional slide prism wedge focalizer.
Background technology
Photoetching technique is the technology for the characteristic composition of printing tool on substrate surface.Such substrate can comprise be used for producing the semiconductor devices, the chip of multiple integrated circuit, flat-panel screens (such as liquid crystal display), circuit board, biochip, micromechanics electronic chip, photoelectron circuit chip etc.In the etching system of direct-write type lithography machine, feature pattern is produced by the spatial light modulator micro mirror array, these small minute surfaces can independent addressing the controlled light beam with different vergence direction reflected illumination separately, to produce the spatial light intensity modulation, finally feature pattern is projected on pcb board by corresponding imaging optical path.
At present, the type of focusing of direct-write type lithography machine equipment is by utilizing one-way precise sliding platform Electric Machine Control prism wedge to carry out unidirectional slip, and limited because of stroke, can only reach certain focusing amount.This type of focusing can not satisfying the market on the thick product of pcb board of 0.025mm-5mm.Add the sucker backing plate to arrive the exposure position of focal plane changing the thick product needed of different pcb boards, exist and waste time and energy, expend the problems such as large.
Summary of the invention
But the purpose of this invention is to provide a kind of Bidirectional slide prism wedge focalizer, to solve the above-mentioned defect existed in prior art.
For realizing purpose of the present invention, but a kind of Bidirectional slide prism wedge focalizer, comprise prism, dynamic structure, described prism comprises on wedge shape prism under prism and wedge shape, the dip plane of described upper prism contacts with the dip plane of described lower prism, described actuating unit is connected with described lower prism with described upper prism, drives described upper prism and described lower prism along synchronous relative sliding on the direction of dip plane.
Preferably, described actuating unit comprises stepper motor, left-right turning screw rod, and described stepper motor is connected with described left-right turning screw rod by shaft coupling, and described left-right turning screw rod is fixed on the leading screw mounting base by leading screw stiff end and leading screw support end; Described upper prism is fixed on the prism erecting frame, it is fixedly connected with described upper prism installing plate lower end by described upper prism erecting frame, described lower prism is fixed on lower prism erecting frame, it is fixedly connected with described lower prism installing plate lower end by described lower prism erecting frame, described upper prism installing plate upper end and upper prism decussation roller slide rail are slidably connected, and described lower prism installing plate upper end and lower prism decussation roller slide rail are slidably connected; Described left-right turning screw rod is provided with feed screw nut, and described upper prism installing plate, lower prism installing plate are affixed with described feed screw nut respectively.
Preferably, described left-right turning screw rod, described upper prism decussation roller slide rail, described lower prism decussation roller slide rail are and tilt install and inclination angle is equal to the pitch angle of described prism wedge.
Preferably, also comprise airborne laser range finder, described airborne laser range finder is fixedly connected with described left-right turning screw rod by described feed screw nut, and described airborne laser range finder is for Real-time Focusing.
Beneficial effect of the present invention is, that structure of the present invention compared with prior art has is simple and compact for structure, motor range is little, focusing range is large, and can focus in real time according to focal plane, is applicable to wider.
The accompanying drawing explanation
Fig. 1 is structural representation a of the present invention;
Fig. 2 is structural representation b of the present invention;
Fig. 3 is prism wedge intersection schematic diagram c provided by the invention;
Fig. 4 is prism wedge intersection schematic diagram d provided by the invention;
In figure, 1-stepper motor, 2-motor fixing plate, the 3-shaft coupling, 4-leading screw stiff end, prism decussation roller slide rail under 5-, prism installing plate under 6-, 7-left-right turning screw rod, the upper prism installing plate of 8-, the upper prism decussation roller of 9-slide rail, 10-leading screw support end, the upper prism structure of 11-, prism structure under 12-, 13-leading screw mounting base, the 14-airborne laser range finder.
Embodiment
In order to make purpose of the present invention, technical scheme and beneficial effect clearer, below in conjunction with embodiment, the present invention is further elaborated.Should be understood to specific embodiment described herein only in order to explain the present invention, be not limited to protection scope of the present invention.
As shown in Figure 1, Figure 2, Figure 3, Figure 4, Fig. 1 is Facad structure schematic diagram of the present invention; Fig. 2 is structure schematic diagram of the present invention; Fig. 3 is that upper and lower prism wedge moves to the thinnest crossing part structural representation; Fig. 4 is that upper and lower prism wedge moves to the thickest crossing part structural representation.Upper prism structure 11 described in the present invention comprises prism and upper prism erecting frame, and described lower prism structure 12 comprises lower prism and lower prism erecting frame.
For realizing purpose of the present invention, but the invention provides a kind of Bidirectional slide prism wedge focalizer, comprise: comprise prism, dynamic structure, described prism comprises on wedge shape prism under prism and wedge shape, the dip plane of described upper prism contacts with the dip plane of described lower prism, described actuating unit is connected with described lower prism with described upper prism, drives described upper prism and described lower prism along synchronous relative sliding on the direction of dip plane.
On wedge shape of the present invention, prism can produce the relative motion in left and right with prism under wedge shape by upper prism installing plate and lower prism installing plate, the crossing thickness of two prism wedges is changed and finally changed the focusing amount.
Described actuating unit comprises stepper motor, left-right turning screw rod, and described stepper motor is connected with described left-right turning screw rod by shaft coupling, and described left-right turning screw rod is fixed on the leading screw mounting base by leading screw stiff end and leading screw support end; Described upper prism is fixed on the prism erecting frame, it is fixedly connected with described upper prism installing plate lower end by described upper prism erecting frame, described lower prism is fixed on lower prism erecting frame, it is fixedly connected with described lower prism installing plate lower end by described lower prism erecting frame, described upper prism installing plate upper end and upper prism decussation roller slide rail are slidably connected and horizontally slip, and described lower prism installing plate upper end and lower prism decussation roller slide rail are slidably connected and horizontally slip; Described left-right turning screw rod is provided with feed screw nut, and described upper prism installing plate, lower prism installing plate are affixed with described feed screw nut respectively; Described left-right turning screw rod, upper prism decussation roller slide rail, lower prism decussation roller slide rail are and tilt to install, the pitch angle that inclination angle is prism wedge.
Described stepper motor is fixedly connected with described leading screw mounting base by motor fixing plate.
Also comprise airborne laser range finder, described airborne laser range finder is fixedly connected with described left-right turning screw rod by described feed screw nut.
In embodiments of the invention, described left-right turning screw rod can be accurate left-right turning screw rod, described upper prism decussation roller slide rail, lower prism decussation roller slide rail and all can be accurate miniature decussation roller guide rail, airborne laser range finder is fixedly connected with the feed screw nut of left-right turning screw rod by its installing plate, thereby realize that airborne laser range finder can move together with prism, dynamic variation of measuring focal plane, realize focusing in real time.Mobile comprising and upper prism uniform movement together with prism herein, or with lower prism uniform movement.
In the present invention, the torque that stepper motor rotates sends left-right turning screw rod to by shaft coupling, upper and lower prism installing plate is separately fixed on left-handed leading screw and dextrorotation leading screw, in dependence, prism decussation roller slide rail can produce the relative motion in left and right with lower prism decussation roller slide rail, such motor just can drive two prisms and carry out relative motion, and the advantage of left-right turning screw rod is that repetitive positioning accuracy is high, swing smallly, can meet the requirement of the depth of parallelism between upper and lower prism.
Described left-right turning screw rod, upper prism decussation roller slide rail, lower prism decussation roller slide rail are and tilt to install, the pitch angle that inclination angle is prism wedge.In embodiment in the present invention, described upper prism and lower prism are wedge shape, and shape is identical.The pitch angle of described prism wedge refers to, the angle between upper prism or lower prism lozenges and surface level.Thereby this mounting means can make the interlaced motion in the inclination angle by certain of prism wedge realize the change of prism thickness in the vertical direction, has finally changed the optics position of focal plane, has realized adapting to the focusing amount on a large scale that different pcb boards are thick.
When using, described stepper motor drives accurate left-right turning screw rod by shaft coupling, make upper and lower prism wedge installing plate and upper and lower prism wedge synchronous bidirectional slide, changed the thickness at imaging optical path system middle plateform glass, thereby realized adapting to the focusing amount on a large scale that different pcb boards are thick ± 2.5mm, can better support the pcb board of 0.025mm-5mm thickness.The present invention is mainly that the mutual motion by Tp realizes that the change of focusing lens thickness has realized the variation of focusing amount ± 2.5mm.By a motor, drive left-right turning screw rod to realize the relative motion of prism, it is more accurate to control like this.And reduced installing space and weight on the basis that guarantees the space structure layout, structure is more light and handy compact, has saved cost.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (4)
1. a but Bidirectional slide prism wedge focalizer, it is characterized in that, comprise prism, dynamic structure, described prism comprises on wedge shape prism under prism and wedge shape, the dip plane of described upper prism contacts with the dip plane of described lower prism, described actuating unit is connected with described lower prism with described upper prism, drives described upper prism and described lower prism along synchronous relative sliding on the direction of dip plane.
2. but Bidirectional slide prism wedge focalizer according to claim 1, it is characterized in that, described actuating unit comprises stepper motor, left-right turning screw rod, described stepper motor is connected with described left-right turning screw rod by shaft coupling, and described left-right turning screw rod is fixed on the leading screw mounting base by leading screw stiff end and leading screw support end; Described upper prism is fixed on the prism erecting frame, it is fixedly connected with described upper prism installing plate lower end by described upper prism erecting frame, described lower prism is fixed on lower prism erecting frame, it is fixedly connected with described lower prism installing plate lower end by described lower prism erecting frame, described upper prism installing plate upper end and upper prism decussation roller slide rail are slidably connected, and described lower prism installing plate upper end and lower prism decussation roller slide rail are slidably connected; Described left-right turning screw rod is provided with feed screw nut, and described upper prism installing plate, lower prism installing plate are affixed with described feed screw nut respectively.
3. but Bidirectional slide prism wedge focalizer according to claim 2, it is characterized in that, described left-right turning screw rod, described upper prism decussation roller slide rail, described lower prism decussation roller slide rail are tilt to be installed and inclination angle is equal to the pitch angle of described prism wedge.
4., but Bidirectional slide prism wedge focalizer according to claim 3, is characterized in that, also comprises airborne laser range finder, and described airborne laser range finder is fixedly connected with described left-right turning screw rod by described feed screw nut, described airborne laser range finder is for Real-time Focusing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310478313.3A CN103488062B (en) | 2013-10-14 | 2013-10-14 | One kind can wedge-shaped prism focusing device capable of bidirectionally sliding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310478313.3A CN103488062B (en) | 2013-10-14 | 2013-10-14 | One kind can wedge-shaped prism focusing device capable of bidirectionally sliding |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103488062A true CN103488062A (en) | 2014-01-01 |
| CN103488062B CN103488062B (en) | 2017-04-05 |
Family
ID=49828388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310478313.3A Active CN103488062B (en) | 2013-10-14 | 2013-10-14 | One kind can wedge-shaped prism focusing device capable of bidirectionally sliding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103488062B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104730699A (en) * | 2015-04-02 | 2015-06-24 | 上海创司杰医疗科技有限公司 | Slide three-dimensional positioning and focusing mechanism and microscope slide reading device |
| CN104965395A (en) * | 2015-07-21 | 2015-10-07 | 合肥芯硕半导体有限公司 | Fixed focusing device for photoetching direct-writing system |
| CN105093860A (en) * | 2015-09-09 | 2015-11-25 | 合肥芯碁微电子装备有限公司 | Focusing device for maskless lithography direct writing system and focusing method of focusing device |
| CN108279470A (en) * | 2018-03-19 | 2018-07-13 | 合肥芯碁微电子装备有限公司 | A kind of high-precision focusing device encapsulated for direct-write photoetching in type |
| WO2019001412A1 (en) * | 2017-06-29 | 2019-01-03 | 上海微电子装备（集团）股份有限公司 | Optical path compensation device |
| CN116729900A (en) * | 2023-08-15 | 2023-09-12 | 山西精工天佑煤矿机械制造有限公司 | Scraper conveyor with tail coal cleaning structure |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2691341B2 (en) * | 1996-05-27 | 1997-12-17 | 株式会社ニコン | Projection exposure equipment |
| JP2007047561A (en) * | 2005-08-11 | 2007-02-22 | Fujifilm Corp | Exposure apparatus |
| EP1835527A1 (en) * | 2004-12-16 | 2007-09-19 | Nikon Corporation | Projection optical system, exposure apparatus, exposure system, and exposure method |
| CN101142534A (en) * | 2005-03-15 | 2008-03-12 | 富士胶片株式会社 | Exposure apparatus and exposure method |
| CN101156110A (en) * | 2005-03-30 | 2008-04-02 | 富士胶片株式会社 | Projection head focus position measurement method and exposure method |
| CN101551508A (en) * | 2008-03-31 | 2009-10-07 | 大日本网屏制造株式会社 | Image position adjustment device and optical device |
| CN102914870A (en) * | 2012-11-08 | 2013-02-06 | 中国电子科技集团公司第十一研究所 | Device for compensating optical focal plane based on wedge-shaped prism |
-
2013
- 2013-10-14 CN CN201310478313.3A patent/CN103488062B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2691341B2 (en) * | 1996-05-27 | 1997-12-17 | 株式会社ニコン | Projection exposure equipment |
| EP1835527A1 (en) * | 2004-12-16 | 2007-09-19 | Nikon Corporation | Projection optical system, exposure apparatus, exposure system, and exposure method |
| CN101142534A (en) * | 2005-03-15 | 2008-03-12 | 富士胶片株式会社 | Exposure apparatus and exposure method |
| CN101156110A (en) * | 2005-03-30 | 2008-04-02 | 富士胶片株式会社 | Projection head focus position measurement method and exposure method |
| JP2007047561A (en) * | 2005-08-11 | 2007-02-22 | Fujifilm Corp | Exposure apparatus |
| CN101551508A (en) * | 2008-03-31 | 2009-10-07 | 大日本网屏制造株式会社 | Image position adjustment device and optical device |
| CN102914870A (en) * | 2012-11-08 | 2013-02-06 | 中国电子科技集团公司第十一研究所 | Device for compensating optical focal plane based on wedge-shaped prism |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104730699A (en) * | 2015-04-02 | 2015-06-24 | 上海创司杰医疗科技有限公司 | Slide three-dimensional positioning and focusing mechanism and microscope slide reading device |
| CN104730699B (en) * | 2015-04-02 | 2017-07-21 | 上海创司杰医疗科技有限公司 | Slide three-dimensional localization focus adjusting mechanism and microslide reading device |
| CN104965395A (en) * | 2015-07-21 | 2015-10-07 | 合肥芯硕半导体有限公司 | Fixed focusing device for photoetching direct-writing system |
| CN105093860A (en) * | 2015-09-09 | 2015-11-25 | 合肥芯碁微电子装备有限公司 | Focusing device for maskless lithography direct writing system and focusing method of focusing device |
| CN105093860B (en) * | 2015-09-09 | 2017-06-06 | 合肥芯碁微电子装备有限公司 | A kind of focus control and its focus adjustment method for mask-free photolithography straight-writing system |
| WO2019001412A1 (en) * | 2017-06-29 | 2019-01-03 | 上海微电子装备（集团）股份有限公司 | Optical path compensation device |
| CN109188677A (en) * | 2017-06-29 | 2019-01-11 | 上海微电子装备（集团）股份有限公司 | A kind of optical path compensation device |
| JP2020525845A (en) * | 2017-06-29 | 2020-08-27 | シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド | Optical path correction device |
| US11106139B2 (en) | 2017-06-29 | 2021-08-31 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Optical path compensation device |
| CN108279470A (en) * | 2018-03-19 | 2018-07-13 | 合肥芯碁微电子装备有限公司 | A kind of high-precision focusing device encapsulated for direct-write photoetching in type |
| CN116729900A (en) * | 2023-08-15 | 2023-09-12 | 山西精工天佑煤矿机械制造有限公司 | Scraper conveyor with tail coal cleaning structure |
| CN116729900B (en) * | 2023-08-15 | 2023-10-24 | 山西精工天佑煤矿机械制造有限公司 | Scraper conveyor with tail coal cleaning structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103488062B (en) | 2017-04-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103488062A (en) | Wedge-shaped prism focusing device capable of bidirectionally sliding | |
| CN101126905B (en) | Direct-writing lithography device with focusing device | |
| CN104669625A (en) | Photo-curing three-dimensional printing method and printing device based on projection | |
| CN102122118A (en) | Laser direct-writing device | |
| CN104950587A (en) | Exposure device and exposure method | |
| CN201516538U (en) | Photo-etching system for processing with lasers of double optical heads in parallel | |
| CN102385261A (en) | Coaxial focusing device and method of photoetching machine | |
| CN106918980B (en) | Image projection device, light engine and image-display units | |
| CN111755936A (en) | High-precision light path collimating reflector adjusting mechanism and adjusting method | |
| CN102445861A (en) | Photoetching machine system with position triggered scanning mode and method thereof | |
| CN109240047A (en) | A kind of write-through exposure machine and its scaling method | |
| CN202472238U (en) | Light energy monitoring system for lithography system | |
| CN214840611U (en) | Professional stage lighting automatic focusing system | |
| CN204043631U (en) | A kind of structure of digital projectors | |
| CN108303858B (en) | A kind of maskless lithography system and its exposure method | |
| CN206387743U (en) | Glass substrate micro examination machine | |
| CN203371875U (en) | Externally-arranged shading film laminating machine of silicon-based liquid crystal screen | |
| CN100561357C (en) | Direct-write light scribing device with Focusing mechanism | |
| CN103631097A (en) | Photolithographic 3-dimensional printer | |
| CN111299088A (en) | Dispensing mechanism and display screen production line | |
| CN208969429U (en) | A kind of write-through exposure machine | |
| KR101468663B1 (en) | Displacement measuring apparatus of solar cell module | |
| CN102692826B (en) | A kind of optimized image that automatically utilizes carries out the device and method aimed at | |
| US8842359B1 (en) | Spatial light modulator with multiple linear arrays | |
| CN202306138U (en) | Maskless exposure device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: TIANJIN JINXIN MICROELECTRONICS TECHNOLOGY CO., LT Free format text: FORMER OWNER: TIANJIN XINSHUO PRECISION MACHINERY CO., LTD. Effective date: 20140703 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 300457 BINHAI NEW DISTRICT, TIANJIN TO: 300000 BINHAI NEW DISTRICT, TIANJIN |
|
| TA01 | Transfer of patent application right |
Effective date of registration: 20140703 Address after: Fifth Street 300000 Tianjin City Development Zone, Taihua Road No. 12 TEDA SME development center room 3103 Applicant after: TIANJIN JINXIN MICROELECTRONIC TECHNOLOGY CO., LTD. Address before: 300457 No. 167 Huang Hai Road, Tianjin Development Zone, Binhai New Area, Tianjin, China Applicant before: Tianjin Xinshuo Precision Machinery Co., Ltd. |
|
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 311100 room 204-5, building 3, No. 16, Longtan Road, Cangqian street, Yuhang District, Hangzhou City, Zhejiang Province Patentee after: Zhejiang Jinxin Microelectronics Technology Co.,Ltd. Address before: 300000 room 3103, TEDA SME development center, No. 12, Taihua Road, Fifth Street, TEDA Patentee before: TIANJIN JINXIN MICROELECTRONIC TECHNOLOGY Co.,Ltd. |