CN103488062B - One kind can wedge-shaped prism focusing device capable of bidirectionally sliding - Google Patents
One kind can wedge-shaped prism focusing device capable of bidirectionally sliding Download PDFInfo
- Publication number
- CN103488062B CN103488062B CN201310478313.3A CN201310478313A CN103488062B CN 103488062 B CN103488062 B CN 103488062B CN 201310478313 A CN201310478313 A CN 201310478313A CN 103488062 B CN103488062 B CN 103488062B
- Authority
- CN
- China
- Prior art keywords
- prism
- wedge
- screw rod
- right turning
- slide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The invention discloses one kind can wedge-shaped prism focusing device capable of bidirectionally sliding, including：Including prism, actuating unit, the prism includes in wedge shape prism under prism and wedge shape, the inclined plane of the upper prism is contacted with the inclined plane of the lower prism, the actuating unit is connected with the upper prism and the lower prism, drives the upper prism and the lower prism to sync up relative slip along inclined plane side.Beneficial effects of the present invention are, present configuration has that simple and compact for structure, motor range is little, focusing range is big compared with prior art, and can be focused on according to focal plane in real time, it is adaptable to which scope is wider.
Description
Technical field
The invention belongs to technical field of lithography, can wedge-shaped prism focusing device capable of bidirectionally sliding more particularly, to one kind.
Background technology
Photoetching technique is the technology for composition of the printing with feature on the surface of the substrate.Such substrate may include to use
In manufacture semiconductor devices, various integrated circuits, flat-panel screens (such as liquid crystal display), circuit board, biochip, microcomputer
The chip of tool electronic chip, photoelectron circuit chip etc..In the etching system of direct-write type lithography machine, pattern image is by spatial light
Modulator micro mirror array is produced, and these small minute surfaces can be with separately addressed individually controlled with different incline direction reflected illuminations
Pattern image, to produce spatial light intensity modulation, is finally projected on pcb board by light beam by corresponding imaging optical path.
At present, the type of focusing of direct-write type lithography machine equipment is by using one-way precise sliding platform motor control wedge shape
Prism is unidirectionally slided, and because stroke is limited, can only achieve certain focusing amount.This type of focusing can not meet market
The pcb board thickness product of upper 0.025mm-5mm.Add sucker backing plate to reach exposure focal plane position different pcb board thickness product neededs are changed
Put, existing wastes time and energy, expend it is big the problems such as.
The content of the invention
It is an object of the invention to provide one kind can wedge-shaped prism focusing device capable of bidirectionally sliding, with solve in prior art exist
Drawbacks described above.
To realize the purpose of the present invention, one kind can wedge-shaped prism focusing device capable of bidirectionally sliding, including prism, actuating unit,
The prism includes in wedge shape prism under prism and wedge shape, and the inclined plane of the upper prism is connected with the inclined plane of the lower prism
Touch, the actuating unit is connected with the upper prism and the lower prism, drive the upper prism and the lower prism edge to incline
Synchronous relative slip on bevel direction.
Preferably, the actuating unit includes stepper motor, left-right turning screw rod, and the stepper motor passes through shaft coupling and institute
Left-right turning screw rod connection is stated, the left-right turning screw rod is fixed on leading screw mounting base by leading screw fixing end and leading screw support end
On；The upper prism is fixed on prism installing rack, and which passes through under the upper prism installing rack and the upper prism mounting plate
End is fixedly connected, and the lower prism is fixed on lower prism installing rack, and which passes through the lower prism installing rack and the lower prism
Installing plate lower end is fixedly connected, and the upper prism mounting plate upper end is slidably connected with upper prism decussation roller slide rail, the lower rib
Mirror installing plate upper end is slidably connected with lower prism decussation roller slide rail；The left-right turning screw rod is provided with feed screw nut, it is described on
Prism mounting plate, lower prism mounting plate are affixed with the feed screw nut respectively.
Preferably, the left-right turning screw rod, the upper prism decussation roller slide rail, the lower prism decussation roller slide rail are equal
Install and inclination angle is equal to the inclination angle of the prism wedge to incline.
Preferably, also including airborne laser range finder, the airborne laser range finder passes through the feed screw nut and the left-right rotary silk
Thick stick is fixedly connected, and the airborne laser range finder is used for Real-time Focusing.
Beneficial effects of the present invention are that present configuration has simple and compact for structure, motor range compared with prior art
Little, focusing range is big, and can be focused on according to focal plane in real time, it is adaptable to which scope is wider.
Description of the drawings
Fig. 1 is the structural representation a of the present invention；
Fig. 2 is the structural representation b of the present invention；
The prism wedge intersection schematic diagram c that Fig. 3 is provided for the present invention；
The prism wedge intersection schematic diagram d that Fig. 4 is provided for the present invention；
In figure, 1- stepper motors, 2- motor fixing plates, 3- shaft couplings, 4- leading screw fixing ends, under 5-, prism decussation roller is slided
Rail, prism mounting plate under 6-, 7- left-right turning screw rods, the upper prism mounting plates of 8-, the upper prism decussation roller slide rails of 9-, 10- leading screws
Support end, the upper prism structures of 11-, prism structure under 12-, 13- leading screw mounting bases, 14- airborne laser range finders.
Specific embodiment
In order that the purpose of the present invention, technical scheme and beneficial effect become more apparent, with reference to embodiments, to this
Invention is further elaborated.Should be understood to specific embodiment described herein only to explain the present invention, and
It is not used in and limits the scope of the invention.
As shown in Figure 1, Figure 2, Figure 3, Figure 4, Fig. 1 is positive structure schematic of the present invention；Fig. 2 shows for backside structure of the present invention
It is intended to；Fig. 3 is moved to for upper and lower prism wedge and is intersected most thin part structural representation；Fig. 4 moves to phase for upper and lower prism wedge
Hand over most thick part structural representation.Heretofore described upper prism structure 11 includes prism and upper prism installing rack, described
Lower prism structure 12 includes lower prism and lower prism installing rack.
To realize the purpose of the present invention, the invention provides one kind can wedge-shaped prism focusing device capable of bidirectionally sliding, including：Bag
Include prism, actuating unit, the prism includes in wedge shape prism under prism and wedge shape, the inclined plane of the upper prism with it is described under
The inclined plane of prism contacts, and the actuating unit is connected with the upper prism and the lower prism, drives the upper prism
Relative slip is synced up along inclined plane side with the lower prism.
In wedge shape of the present invention, under prism and wedge shape, prism can produce left and right by upper prism mounting plate and lower prism mounting plate
Relative motion, makes the intersecting thickness of two prism wedges change the focusing amount that finally change.
The actuating unit includes stepper motor, left-right turning screw rod, and the stepper motor is by shaft coupling and the left and right
Rotation leading screw connection, the left-right turning screw rod are fixed on leading screw mounting base by leading screw fixing end and leading screw support end；It is described
Upper prism is fixed on prism installing rack, and which passes through the upper prism installing rack and fixes company with the upper prism mounting plate lower end
Connect, the lower prism is fixed on lower prism installing rack, which passes through under the lower prism installing rack and the lower prism mounting plate
End is fixedly connected, and the upper prism mounting plate upper end is slidably connected with upper prism decussation roller slide rail and is horizontally slipped, the lower rib
Mirror installing plate upper end is slidably connected with lower prism decussation roller slide rail and is horizontally slipped；The left-right turning screw rod is provided with leading screw spiral shell
Mother, the upper prism mounting plate, lower prism mounting plate are affixed with the feed screw nut respectively；The left-right turning screw rod, upper prism
Decussation roller slide rail, lower prism decussation roller slide rail are inclination and install, inclination angle of the inclination angle for prism wedge.
The stepper motor is fixedly connected with the leading screw mounting base by motor fixing plate.
Also include airborne laser range finder, the airborne laser range finder is fixed with the left-right turning screw rod by the feed screw nut and connected
Connect.
In embodiments of the invention, the left-right turning screw rod can be accurate left-right turning screw rod, the upper prism decussation roller
Slide rail, lower prism decussation roller slide rail can be accurate miniature decussation roller guide rail, and airborne laser range finder is by its installing plate and a left side
The feed screw nut of dextrorotation leading screw is fixedly connected, and so as to realize that airborne laser range finder can be moved together with prism, dynamic measurement is burnt
The change in face, realizes focusing in real time.Movement includes and upper prism uniform movement together with prism herein, or consistent with lower prism
It is mobile.
In the present invention, the torque that stepper motor is rotated sends left-right turning screw rod, upper and lower prism mounting plate to by shaft coupling
It is separately fixed on left-handed leading screw and dextrorotation leading screw, can produces by upper prism decussation roller slide rail and lower prism decussation roller slide rail
The relative motion in raw left and right, such a motor can drive two prisms to carry out relative motion, and left-right turning screw rod is excellent
Point is that repetitive positioning accuracy is high, swings small, disclosure satisfy that the requirement of the depth of parallelism between upper and lower prism.
The left-right turning screw rod, upper prism decussation roller slide rail, lower prism decussation roller slide rail are inclination and install, inclination angle
For the inclination angle of prism wedge.In embodiment in the present invention, the upper prism and lower prism are wedge shape, and shape is identical.Institute
The inclination angle for stating prism wedge refers to, the angle between upper prism or lower prism lozenges and horizontal plane.This mounting means energy
Enough make prism wedge by the interlaced motion in certain inclination angle so as to realize, in the change of vertical direction prism thickness, finally changing
Optics position of focal plane is become, has realized and adapt to the thick focusing amount on a large scale of different pcb boards.
When use, the stepper motor drives accurate left-right turning screw rod by shaft coupling so that upper and lower prism wedge
Installing plate and upper and lower prism wedge synchronous bidirectional slide, and change the thickness in imaging optical path system middle plateform glass, so as to reality
Show and adapted to the thick amount ± 2.5mm of focusing on a large scale of different pcb boards, can preferably support the pcb board of 0.025mm-5mm thickness.
By the mutual motion of Tp, the present invention mainly realizes that the change of focusing lens thickness realizes focusing amount ± 2.5mm
Change.The relative motion of prism is realized by a Motor drive left-right turning screw rod, it is more accurate so to control.And
Installing space and weight are reduced on the basis of ensureing space structure layout, structure is more light and handy compact, has saved cost.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (3)
1. one kind can wedge-shaped prism focusing device capable of bidirectionally sliding, it is characterised in that including prism, actuating unit, the prism bag
Prism under prism and wedge shape is included in wedge shape, the inclined plane of the upper prism is contacted with the inclined plane of the lower prism, described dynamic
Force mechanisms are connected with the upper prism and the lower prism, and the drive upper prism and the lower prism are along inclined plane direction
Synchronous relative to slide, the actuating unit includes stepper motor, left-right turning screw rod, the stepper motor by shaft coupling with it is described
Left-right turning screw rod connects, and the left-right turning screw rod is fixed on leading screw mounting base by leading screw fixing end and leading screw support end；
The upper prism is fixed on prism installing rack, and it is solid with the upper prism mounting plate lower end which passes through the upper prism installing rack
Fixed to connect, the lower prism is fixed on lower prism installing rack, and which is passed through the lower prism installing rack and is installed with the lower prism
Plate lower end is fixedly connected, and the upper prism mounting plate upper end is slidably connected with upper prism decussation roller slide rail, the lower prism peace
Dress plate upper end is slidably connected with lower prism decussation roller slide rail；The left-right turning screw rod is provided with feed screw nut, the upper prism
Installing plate, lower prism mounting plate are affixed with the feed screw nut respectively.
2. according to claim 1 can wedge-shaped prism focusing device capable of bidirectionally sliding, it is characterised in that the left-right rotary silk
Thick stick, the upper prism decussation roller slide rail, the lower prism decussation roller slide rail be inclination install and inclination angle be equal to it is described
The inclination angle of prism wedge.
3. according to claim 2 can wedge-shaped prism focusing device capable of bidirectionally sliding, it is characterised in that also including laser ranging
Device, the airborne laser range finder are fixedly connected with the left-right turning screw rod by the feed screw nut, and the airborne laser range finder is used for
Real-time Focusing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310478313.3A CN103488062B (en) | 2013-10-14 | 2013-10-14 | One kind can wedge-shaped prism focusing device capable of bidirectionally sliding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310478313.3A CN103488062B (en) | 2013-10-14 | 2013-10-14 | One kind can wedge-shaped prism focusing device capable of bidirectionally sliding |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103488062A CN103488062A (en) | 2014-01-01 |
| CN103488062B true CN103488062B (en) | 2017-04-05 |
Family
ID=49828388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310478313.3A Active CN103488062B (en) | 2013-10-14 | 2013-10-14 | One kind can wedge-shaped prism focusing device capable of bidirectionally sliding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103488062B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104730699B (en) * | 2015-04-02 | 2017-07-21 | 上海创司杰医疗科技有限公司 | Slide three-dimensional localization focus adjusting mechanism and microslide reading device |
| CN104965395A (en) * | 2015-07-21 | 2015-10-07 | 合肥芯硕半导体有限公司 | Fixed focusing device for photoetching direct-writing system |
| CN105093860B (en) * | 2015-09-09 | 2017-06-06 | 合肥芯碁微电子装备有限公司 | A kind of focus control and its focus adjustment method for mask-free photolithography straight-writing system |
| CN109188677A (en) | 2017-06-29 | 2019-01-11 | 上海微电子装备（集团）股份有限公司 | A kind of optical path compensation device |
| CN108279470A (en) * | 2018-03-19 | 2018-07-13 | 合肥芯碁微电子装备有限公司 | A kind of high-precision focusing device encapsulated for direct-write photoetching in type |
| CN116729900B (en) * | 2023-08-15 | 2023-10-24 | 山西精工天佑煤矿机械制造有限公司 | Scraper conveyor with tail coal cleaning structure |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2691341B2 (en) * | 1996-05-27 | 1997-12-17 | 株式会社ニコン | Projection exposure equipment |
| EP1835527A1 (en) * | 2004-12-16 | 2007-09-19 | Nikon Corporation | Projection optical system, exposure apparatus, exposure system, and exposure method |
| CN101142534A (en) * | 2005-03-15 | 2008-03-12 | 富士胶片株式会社 | Exposure apparatus and exposure method |
| CN101156110A (en) * | 2005-03-30 | 2008-04-02 | 富士胶片株式会社 | Projection head focus position measurement method and exposure method |
| CN101551508A (en) * | 2008-03-31 | 2009-10-07 | 大日本网屏制造株式会社 | Image position adjustment device and optical device |
| CN102914870A (en) * | 2012-11-08 | 2013-02-06 | 中国电子科技集团公司第十一研究所 | Device for compensating optical focal plane based on wedge-shaped prism |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007047561A (en) * | 2005-08-11 | 2007-02-22 | Fujifilm Corp | Exposure apparatus |
-
2013
- 2013-10-14 CN CN201310478313.3A patent/CN103488062B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2691341B2 (en) * | 1996-05-27 | 1997-12-17 | 株式会社ニコン | Projection exposure equipment |
| EP1835527A1 (en) * | 2004-12-16 | 2007-09-19 | Nikon Corporation | Projection optical system, exposure apparatus, exposure system, and exposure method |
| CN101142534A (en) * | 2005-03-15 | 2008-03-12 | 富士胶片株式会社 | Exposure apparatus and exposure method |
| CN101156110A (en) * | 2005-03-30 | 2008-04-02 | 富士胶片株式会社 | Projection head focus position measurement method and exposure method |
| CN101551508A (en) * | 2008-03-31 | 2009-10-07 | 大日本网屏制造株式会社 | Image position adjustment device and optical device |
| CN102914870A (en) * | 2012-11-08 | 2013-02-06 | 中国电子科技集团公司第十一研究所 | Device for compensating optical focal plane based on wedge-shaped prism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103488062A (en) | 2014-01-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103488062B (en) | One kind can wedge-shaped prism focusing device capable of bidirectionally sliding | |
| CN207858053U (en) | Auto-focusing mark all-in-one machine | |
| CN204649386U (en) | A kind of high precision multiband dynamic goal simulator device | |
| CN105388707B (en) | Drawing apparatus | |
| CN105049840A (en) | Device for detecting camera module along horizontal direction, and camera module detecting method | |
| CN208255626U (en) | A kind of raising exposure production capacity direct-write photoetching mechanism | |
| US11828674B2 (en) | Device and method for calibrating lens distortion center | |
| US8823949B2 (en) | Measurement apparatus | |
| CN108681024A (en) | A kind of moving-target face focus adjusting mechanism and its target surface tilt quantity and optical axis glitch detection method | |
| CN102385261A (en) | Coaxial focusing device and method of photoetching machine | |
| CN104950587A (en) | Exposure device and exposure method | |
| CN205005199U (en) | Device of make a video recording module is detected along horizontal direction | |
| CN101976021B (en) | Installation and adjustment device and method for alignment system reference board and detection optical fiber | |
| CN111220350A (en) | Multifunctional water attack experiment device based on PIV system | |
| CN109240047A (en) | A kind of write-through exposure machine and its scaling method | |
| CN102445861A (en) | Photoetching machine system with position triggered scanning mode and method thereof | |
| CN203854207U (en) | Touch display screen installation equipment | |
| CN113281339A (en) | Detection device | |
| CN106647178A (en) | Light direct-writing imaging equipment and system | |
| CN108303858B (en) | A kind of maskless lithography system and its exposure method | |
| CN204043631U (en) | A kind of structure of digital projectors | |
| WO2015029819A1 (en) | Exposure apparatus | |
| CN201716023U (en) | Infinite distance target scenery simulator suitable for dynamic push-scanning and static imaging cameras | |
| JP7356667B2 (en) | alignment device | |
| CN104050861A (en) | Multi-view shooting teaching instrument |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: TIANJIN JINXIN MICROELECTRONICS TECHNOLOGY CO., LT Free format text: FORMER OWNER: TIANJIN XINSHUO PRECISION MACHINERY CO., LTD. Effective date: 20140703 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 300457 BINHAI NEW DISTRICT, TIANJIN TO: 300000 BINHAI NEW DISTRICT, TIANJIN |
|
| TA01 | Transfer of patent application right |
Effective date of registration: 20140703 Address after: Fifth Street 300000 Tianjin City Development Zone, Taihua Road No. 12 TEDA SME development center room 3103 Applicant after: TIANJIN JINXIN MICROELECTRONIC TECHNOLOGY CO., LTD. Address before: 300457 No. 167 Huang Hai Road, Tianjin Development Zone, Binhai New Area, Tianjin, China Applicant before: Tianjin Xinshuo Precision Machinery Co., Ltd. |
|
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 311100 room 204-5, building 3, No. 16, Longtan Road, Cangqian street, Yuhang District, Hangzhou City, Zhejiang Province Patentee after: Zhejiang Jinxin Microelectronics Technology Co.,Ltd. Address before: 300000 room 3103, TEDA SME development center, No. 12, Taihua Road, Fifth Street, TEDA Patentee before: TIANJIN JINXIN MICROELECTRONIC TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address |