CN217360428U - Focusing device - Google Patents
Focusing device Download PDFInfo
- Publication number
- CN217360428U CN217360428U CN202220753321.9U CN202220753321U CN217360428U CN 217360428 U CN217360428 U CN 217360428U CN 202220753321 U CN202220753321 U CN 202220753321U CN 217360428 U CN217360428 U CN 217360428U
- Authority
- CN
- China
- Prior art keywords
- prism
- adjusting
- supporting seat
- plate
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The utility model provides a focusing device, includes first prism, second prism, first prism supporting seat and second prism supporting seat, first prism install in first prism supporting seat, the second prism install in second prism supporting seat, first prism and second prism are wedge prism, first prism supporting seat with second prism supporting seat all include the support, with leg joint's mounting and with the prism installed part that the mounting is connected, the regulating part is installed to the mounting, the regulating part supports and leans on the prism installed part is adjusted the altitude mixture control of regulating part the position and/or the angle of prism installed part, first prism supporting seat and/or second prism supporting seat include actuating mechanism, leg joint the drive structure. By utilizing the prism mounting seat, the prisms can be adjusted in multiple dimensions in the mounting process, the upper plane of the first prism, the lower plane of the second prism and the bottom plate are convenient to adjust and are parallel to each other, and the mounting precision is high.
Description
Technical Field
The invention relates to a focusing device, in particular to a focusing device applied to the field of laser direct writing.
Background
In the conventional laser direct writing imaging exposure system, one or more groups of lenses are used for exposure on a substrate, and in order to ensure that exposure lines or images of the plurality of groups of lenses have high resolution and consistency, the focal plane of each lens needs to be manually adjusted, so that the one or more groups of lenses are all in the best focal plane position. The operation mode is complicated, the focal plane precision is difficult to guarantee, and the resolution of the exposure system is directly limited. Especially for a high-precision photoetching lens, the focal depth is small, the flatness of the substrate cannot meet the high-precision photoetching condition, and the calibration of the focal plane needs to be realized by focusing the lens.
The existing lens focusing mode is that a focusing device is arranged below a lens, an upper wedge prism and a lower wedge prism are adopted to form a parallel flat plate, the distance in the vertical direction (Z direction) of the parallel flat plate is changed by moving one of the wedge prisms to move left and right relative to the other wedge prism, or the distance in the vertical direction (Z direction) of the parallel flat plate is changed by moving both the two wedge prisms to move left and right. Chinese patent CN103488062B discloses a bidirectional sliding wedge prism focusing device, which comprises a prism and a power mechanism, wherein the prism comprises a wedge upper prism and a wedge lower prism, an inclined plane of the upper prism contacts with an inclined plane of the lower prism, the power mechanism is connected with the upper prism and the lower prism to drive the upper prism and the lower prism to synchronously and relatively slide along the inclined plane direction, the power mechanism comprises a stepping motor and a left-right rotating lead screw, the stepping motor is connected with the left-right rotating lead screw through a coupler, and the left-right rotating lead screw is fixed on a lead screw mounting bottom plate through a lead screw fixing end and a lead screw supporting end; the upper prism is fixedly connected with the lower end of the upper prism mounting plate through an upper prism mounting frame, the lower prism is fixedly connected with the lower end of the lower prism mounting plate through a lower prism mounting frame, the upper end of the upper prism mounting plate is slidably connected with the upper prism crossed roller slide rail, and the upper end of the lower prism mounting plate is slidably connected with the lower prism crossed roller slide rail; and a screw nut is arranged on the left-handed screw, and the upper prism mounting plate and the lower prism mounting plate are fixedly connected with the screw nut respectively. The upper end of the upper prism mounting plate is connected with the upper prism crossed roller slide rail in a sliding manner, and the upper end of the lower prism mounting plate is connected with the lower prism crossed roller slide rail in a sliding manner; and a screw nut is arranged on the left-handed screw, the upper prism mounting plate and the lower prism mounting plate are fixedly connected with the screw nut respectively, and the inclination angles of the upper prism crossed roller slide rail, the lower prism crossed roller slide rail and the screw rod need to be adjusted respectively, so that the mounting precision of the focusing device is reduced.
Disclosure of Invention
The invention aims to provide a high-precision focusing device.
In order to solve the problem, the utility model provides a focusing device, it includes first prism, second prism, first prism supporting seat and second prism supporting seat, first prism install in first prism supporting seat, the second prism install in the second prism supporting seat, first prism and second prism are wedge prism, first prism supporting seat with second prism supporting seat all include the support, with leg joint's mounting and with the prism installed part that the mounting is connected, the regulating part is installed to the mounting, the regulating part supports and leans on the prism installed part, adjusts the height control of regulating part the position and/or the angle of prism installed part, first prism supporting seat and/or second prism supporting seat include actuating mechanism, leg joint drive structure.
Further, the mounting is the L type, including connecting the vertical board of support and the horizontal plate of the vertical board of perpendicular to, prism installed part install in the inboard of mounting.
Further, the prism installed part includes the mount pad, the mount pad with the mounting is the same to be the L type, arranges in the mounting is inboard, the mount pad include with vertical board support by fixed back plate, with the horizontal plate supports by fixed top backup plate, the back plate with top backup plate is perpendicular each other.
Further, the adjusting piece is arranged on the horizontal plate, and the adjusting piece abuts against the abutting plate.
Furthermore, the number of the adjusting pieces is two, and the position and the angle of the prism mounting piece are adjusted by adjusting the two adjusting pieces at equal distances or unequal distances.
Further, the adjusting piece is arranged on the vertical plate, and the adjusting piece abuts against the backrest plate.
Furthermore, the number of the adjusting pieces is four, the connecting lines of the four adjusting pieces form a rectangle, two adjusting pieces in a straight line in the horizontal direction form an adjusting piece group, the four adjusting pieces form two horizontal direction adjusting piece groups, two adjusting pieces in a straight line in the vertical direction form an adjusting piece group, the four adjusting pieces form two vertical direction adjusting piece groups, the heights of the two adjusting pieces in the adjusting piece groups are adjusted at equal intervals, the heights of the adjusting piece groups in the horizontal direction or the vertical direction are adjusted at equal intervals or at unequal intervals respectively, and the positions and angles of the prism installation pieces are adjusted.
Furthermore, first prism supporting seat and/or second prism supporting seat include the brace table, the brace table includes the slope mesa, actuating mechanism is fixed in through adjusting bolt the slope mesa, adjusting bolt is located the relative four corners of slope mesa.
Furthermore, the first prism supporting seat and the second prism supporting seat are installed on the bottom plate through adjusting bolts, and the bottom plate is installed on the lens base.
Further, the adjusting piece is an adjusting screw.
Compared with the prior art, the technical scheme of the utility model utilize the prism mount pad can be right at a plurality of dimensions in the installation the prism is adjusted, is convenient for adjust the last plane of first prism with the lower plane and the bottom plate of second prism are parallel to each other. The whole processing breadth is positioned at the same focal plane, the mounting precision is high, and the exposure quality is prevented from being influenced by the inconsistent focal planes. After the automatic focusing system is adjusted, the consistency is good, and the automatic focusing system is convenient to be matched and debugged with different lenses quickly in the later period.
Drawings
Fig. 1 is a schematic view of a focusing apparatus mounted to a lens mount.
Fig. 2 is a perspective view of the focusing apparatus.
FIG. 3 is a schematic plan view of a focusing apparatus.
FIG. 4 is a schematic view of the fixture, mounting block, and stopper disassembled.
Fig. 5 is a schematic exploded view of a prism mount.
Fig. 6 is a schematic view of a mount.
Fig. 7 is a partially cut-away schematic view of a prism support base.
Figure 8 is a schematic plan view of the support table and drive mechanism.
FIG. 9 is a schematic diagram of a photosensor of the focusing apparatus.
Detailed Description
In order that the objects, aspects and advantages of the invention will become more apparent, the invention will be described by way of example only, and in connection with the accompanying drawings.
As shown in fig. 1 to 9, the focusing apparatus 1 is integrally mounted on the lens base 2, and includes a base plate 10, a first prism 11, a second prism 12, a first prism support base 13, and a second prism support base 14. The first prism support seat 13 and the second prism support seat 14 are installed on the bottom plate 10, the first prism 11 is installed on the first prism support seat 13, the second prism 12 is installed on the second prism support seat 14, the first prism 11 and the second prism 12 are wedge-shaped prisms and are provided with an inclined surface 110, the inclined surfaces of the first prism 11 and the second prism 12 are parallel and opposite to each other and are provided with a gap, and the rest planes of the first prism 11 and the second prism 12 are parallel to each other.
The first prism support base 13 includes a first bracket 130 connected to the base plate 10, a first fixing member 131 connected to the first bracket 130, and a first prism mounting member 132 connected to the first fixing member 131. The first fixing member 131 is L-shaped, and includes a vertical plate 1310 connected to the first bracket 130, and a horizontal plate 1311 perpendicular to the vertical plate 1310, the vertical plate 1310 being perpendicular to the bottom plate 10, and the horizontal plate 1311 being parallel to the bottom plate 10.
The second prism support base 14 includes a support base 140, a driving mechanism 141, a second bracket 142, a second fixing member 143, and a second prism mounting member 144, wherein one end of the support base 140 is connected to the bottom plate 10, the other end is connected to the driving mechanism 141, the second bracket 142 is connected to the driving mechanism 141 and the second fixing member 143, and the second fixing member 143 is connected to the second prism mounting member 144. Like the first fixing member 131, the second fixing member 143 is also L-shaped, and includes a vertical plate 1420 coupled to the second bracket 142 and a horizontal plate 1421 coupled perpendicular to the vertical plate 1420, the vertical plate 1310 being perpendicular to the bottom plate 10, the horizontal plate being parallel to the bottom plate 10.
The first prism mounting member 132 and the second prism mounting member 144 have the same structure, and include a mounting base 200, a side stopper 201, and a bottom stopper 202, the mounting base 200 is L-shaped like the first fixing member 131 and the second fixing member 143, is disposed inside the first fixing member 131 or the second fixing member 143, includes a backrest plate 2000 fixed to the vertical plate (1310, 1420) in an abutting manner, and a top-rest plate 2001 fixed to the horizontal plate (1311, 1421) in an abutting manner, the backrest plate 2000 and the top-rest plate 2001 are perpendicular to each other, and the mounting base 200 may be integrally formed. The lower side of the backrest plate 2000, which is far away from the top rest plate 2001, is provided with a groove 2002, and the bottom stopper 202 is mounted in the groove 2002, so as to fix the prism with the top rest plate 2001 and the bottom stopper 202 in the up-down direction (Z direction). The side stoppers 201 are installed on two sides of the backrest plate 2000, the side stoppers 201 are used for fixing the prisms on the left and right sides, and the left and right direction is the Y direction; preferably, the backrest plate 2000 has a recess 2003, the side stoppers 201 are mounted in the recess 2003, and the side stoppers 201 and the backrest plate 2001 fix the prism in the up-down direction (Z direction). The back-up plate 2000 and the top-up plate 2001 each have a plurality of grooves 2004, and optical cement is added through the grooves 2004, flows in the grooves 2004, and the prisms are further fixed by the optical cement.
The horizontal plates (1311, 1421) are provided with two adjusting members abutting against the top backup plate 2001, preferably, the number of the adjusting members is two, the two adjusting members are respectively a first adjusting member 300 and a second adjusting member 301, the heights of the first adjusting member 300 and the second adjusting member 301 are adjustable, and the positions and angles of the top backup plate 2001 are changed by adjusting the heights of the first adjusting member 300 and the second adjusting member 301, so that the positions and angles of the prisms are adjusted. When the height of the first adjusting member 300 and the height of the second adjusting member 301 are adjusted in an equidistant manner, the Z-direction displacement of the prism is adjusted, and when the height of the first adjusting member 300 and the height of the second adjusting member 301 are adjusted in a non-equidistant manner, the prism is adjusted to rotate around the X-axis.
The vertical plates (1310, 1420) are provided with adjusting members abutting against the backrest plate 2000, preferably, the number of the adjusting members is four, and the adjusting members are respectively a third adjusting member 302, a fourth adjusting member 303, a fifth adjusting member 304 and a sixth adjusting member 305, and the position and the angle of the backrest plate 200 are adjusted by adjusting the four adjusting members abutting against the backrest plate 2000, so as to adjust the position and the angle of the prism. When the third adjuster 302, the fourth adjuster 303, the fifth adjuster 304, and the sixth adjuster 305 perform the equidistant front-rear height adjustment, the X-direction displacement of the prism is adjusted. The third adjusting part 302 and the fourth adjusting part 303 are one adjusting part group, the fifth adjusting part 304 and the sixth adjusting part 305 are another adjusting part group, the adjusting parts forming the adjusting part group are adjusted in the front-back height at equal intervals, different adjusting part groups are adjusted in the front-back height at non-equal intervals, and the prism is adjusted to rotate around the Y axis. When the prism is adjusted to rotate around the Z axis, the third adjusting part 302 and the fifth adjusting part 304 are one adjusting group, the fourth adjusting part 303 and the sixth adjusting part 305 are another adjusting group, the adjusting parts forming the adjusting group perform equidistant front-back height adjustment, and different adjusting groups perform non-equidistant front-back height adjustment. The adjusting piece can adopt an adjusting screw.
After the adjustment of multidimension degree is accomplished, the prism installed part with the mounting carries out fixed operation, can adopt fastening screw to fix. The above-mentioned
The prism mounting base can adjust the prism in multiple dimensions in the mounting process, so that the upper plane 120 of the first prism 11, the lower plane 130 of the second prism 12 and the bottom plate are convenient to adjust to be parallel to each other. In actual operation, one of the prisms may be adjusted in multiple dimensions, and then the other prism may be adjusted, for example, the first prism 11 is adjusted first, so that the upper surface 120 of the first prism 11 is parallel to the bottom plate, and then the second prism 12 is adjusted based on the adjustment of the first prism 11, so that the lower surface 130 of the second prism 12 is parallel to the upper surface 120 of the first prism 11, so that the whole processing format is at the same focal plane position, and the exposure quality is prevented from being affected by the inconsistency of the focal planes. After the automatic focusing system is adjusted, the consistency is good, and the automatic focusing system is convenient to be matched and debugged with different lenses quickly in the later period.
The support platform 140 includes an inclined platform 1400, the inclined platform 1400 is connected to the driving mechanism 141 through a first adjusting bolt 1401, and the angle of the driving mechanism 141 relative to the base plate 10 is adjusted through the first adjusting bolt 1401, so that the inclination angles of the driving mechanism 141 and the second prism slope are consistent. Preferably, the first adjusting bolts 1401 are located at the opposite four corners of the inclined table top. The support table 140 is connected to the base plate 10 by a second adjusting bolt 1402, and the gap distance between the inclined surfaces of the first prism 11 and the second prism 12 is adjusted by the second adjusting bolt 1402. The first adjusting bolt 1401 and the second adjusting bolt 1402 can be bolts or jackscrews, preferably, optical bolts are selected, and the adjusting precision is high. The first adjusting bolt and the second adjusting bolt can select the same type of elements and can also select different types of elements.
The linear driving module selected by the driving mechanism 141 preferably includes a sliding portion 1410 and a driving portion 1411, the driving portion 1411 drives the sliding portion 1410 to move linearly, the sliding portion 1410 is connected to the second frame 141, and the driving portion 1411 is connected to the inclined table 1400.
The driving mechanism 141 is integrally fixed on the inclined table 1400 of the supporting table 140, so that the angle of the driving mechanism 141 can be integrally adjusted, the mounting accuracy is improved, the driving mechanism and the second prism are connected through the second support 142, the second fixing piece 143 and the second prism mounting piece 144, the mounting angle of the driving mechanism 141 is adjusted, the inclination angle of the second prism 12 can be adjusted, the inclined planes of the first prism 11 and the second prism 12 are parallel, and the direction of the driving mechanism driving the wedge-shaped prism to move is parallel to the inclined plane of the wedge-shaped prism. The driving mechanism 141 is integrally fixed on the inclined table top of the supporting table through the first adjusting bolt 1401, and the mounting angle of the driving mechanism is adjusted by the first adjusting bolt, so that the mounting angle of the driving mechanism 141 can be adjusted more conveniently and accurately to be consistent with the inclined angle of the wedge prism. The distance between the first prism 11 and the second prism 12 is conveniently adjusted by the second adjusting bolt 1402. And the relation between each part is adjusted by the overall design of the focusing device so that the first prism and the second prism reach a specified interval, and the moving direction of the second prism is parallel to the inclined planes of the first prism and the second prism. And after the installation is finished, if displacement occurs among all the parts in the using process, the adjustment is also convenient.
As shown in fig. 9, the focusing apparatus further includes a photosensor 15, and the photosensor 15 is mounted to the base plate 10. The photoelectric sensor may also be directly mounted on the base of the lens, the photoelectric sensor 15 detects height information of a light facet, and transmits the height information to the driving mechanism 141, and the driving mechanism 141 drives the second prism 12 to move forward or backward along the slope direction according to the height information, so as to change a distance between the lower surface of the first prism 11 and the upper surface of the second prism 12, thereby compensating a focal plane of the lens.
In the above embodiment, the driving mechanism is provided only on the second prism side to drive the second prism to move. The first prism can also be provided with a driving mechanism in the same way, and the driving mechanism is utilized to drive the first prism to move along the inclined plane direction of the second prism.
The first prism 11, the second prism 12, the first prism support 13 and the second prism support 14 are assembled to the lens base 2 after the bottom plate 10 is assembled and debugged, so that the parts of the focusing device can be debugged conveniently, the bottom plate 10 is integrally mounted on the lens base through a third adjusting bolt, so that the focusing device can be integrally adjusted conveniently, and the third adjusting bolt, the first adjusting bolt and the second adjusting bolt select the same type of elements or can select different types of elements.
Claims (10)
1. A focusing apparatus, characterized by: it includes first prism, second prism, first prism supporting seat and second prism supporting seat, first prism install in first prism supporting seat, the second prism install in second prism supporting seat, first prism and second prism are wedge prism, first prism supporting seat with second prism supporting seat all include the support, with leg joint's mounting and with the prism installed part that the mounting is connected, the regulating part is installed to the mounting, the regulating part supports and leans on the prism installed part, adjusts the altitude mixture control of regulating part the position and/or the angle of prism installed part, first prism supporting seat and/or second prism supporting seat include actuating mechanism, leg joint actuating mechanism.
2. The focusing apparatus of claim 1, wherein: the fixing piece is L-shaped and comprises a vertical plate connected with the support and a horizontal plate perpendicular to the vertical plate, and the prism mounting piece is mounted on the inner side of the fixing piece.
3. The focusing apparatus of claim 2, wherein: the prism installed part includes the mount pad, the mount pad with the mounting is the same to be the L type, arranges in the mounting is inboard, the mount pad include with vertical board support by fixed back plate, with the horizontal plate supports by fixed top backup plate, the back plate with top backup plate is perpendicular each other.
4. The focusing apparatus of claim 3, wherein: the adjusting piece is arranged on the horizontal plate, and the adjusting piece abuts against the top backup plate.
5. The focusing apparatus of claim 4, wherein: the quantity of regulating part is two, through equidistant or two regulating parts of equidistance's adjustment, adjusts the position and the angle of prism installed part.
6. The focusing apparatus of any of claims 3-5, wherein: the adjusting piece is arranged on the vertical plate, and the adjusting piece is abutted against the backrest plate.
7. The focusing apparatus of claim 6, wherein: the prism installation piece comprises four adjusting pieces, the connecting lines of the four adjusting pieces form a rectangle, two adjusting pieces in a straight line in the horizontal direction form an adjusting piece group, the four adjusting pieces form two horizontal direction adjusting piece groups, two adjusting pieces in a straight line in the vertical direction form an adjusting piece group, the four adjusting pieces form two vertical direction adjusting piece groups, the heights of the two adjusting pieces in the adjusting piece groups are adjusted at equal intervals, the heights of the adjusting piece groups in the horizontal direction or the vertical direction are adjusted at equal intervals or at unequal intervals respectively, and the position and the angle of the prism installation piece are adjusted.
8. The focusing apparatus of claim 1, wherein: first prism supporting seat and/or second prism supporting seat include the brace table, the brace table includes the slope mesa, actuating mechanism is fixed in through adjusting bolt the slope mesa, adjusting bolt is located the relative four corners of slope mesa.
9. The focusing apparatus of claim 1, wherein: the first prism supporting seat and the second prism supporting seat are mounted on the bottom plate through adjusting bolts, and the bottom plate is mounted on the lens base.
10. The focusing apparatus of claim 1, wherein: the adjusting piece is an adjusting screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220753321.9U CN217360428U (en) | 2022-04-02 | 2022-04-02 | Focusing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220753321.9U CN217360428U (en) | 2022-04-02 | 2022-04-02 | Focusing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217360428U true CN217360428U (en) | 2022-09-02 |
Family
ID=83053653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220753321.9U Active CN217360428U (en) | 2022-04-02 | 2022-04-02 | Focusing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217360428U (en) |
-
2022
- 2022-04-02 CN CN202220753321.9U patent/CN217360428U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103235419B (en) | Accurate off-line shaft fixing device and method of wedge-shaped lens disassembly and assembly unit | |
| WO1993006514A1 (en) | Adjustable mount for cylindrical lens | |
| CN110726429B (en) | Integrated device and method for adjusting and manufacturing parallelism of optical axes of airborne photoelectric multi-sensor | |
| CN113917669B (en) | Off-axis reflection type telescopic system and installation and adjustment detection device and method thereof | |
| CN217360428U (en) | Focusing device | |
| CN216351470U (en) | Focusing device | |
| CN211518505U (en) | High accuracy 3D printer | |
| CN210119623U (en) | Mirror frame adjusting structure for large-caliber optical element | |
| US6888654B2 (en) | Laser scanning unit and method and apparatus for calibrating a post-scan assembly in a laser scanning unit | |
| CN116430542A (en) | Bonding device and bonding method for 45-degree angle bonding of plane reflecting mirror | |
| CN110196155A (en) | Testboard bay for telecentric lens test | |
| CN210268551U (en) | Displacement table for scanning optical surface shape of optical element | |
| US20210232051A1 (en) | Method for adusting a first element of a lithography apparatus towards a second element of a lithography apparatus by a tunable spacer | |
| CN111055495B (en) | High accuracy 3D printer | |
| CN211454120U (en) | Imaging objective lens equipped with beam splitter prism | |
| CN110561540B (en) | Adjusting device for optical centering instrument | |
| US11106139B2 (en) | Optical path compensation device | |
| CN218675428U (en) | Four-dimensional adjusting mechanism device for double-light-path center deviation measuring instrument | |
| CN218020180U (en) | Novel high-precision automatic hot bed leveling mechanism suitable for FDM 3D printer | |
| CN217560576U (en) | Optical lens thickness measuring device | |
| CN217717556U (en) | Optical-mechanical system integrating rechecking detection and layered detection | |
| CN108120587B (en) | Test bed for detecting performance of optical element and test bed mounting method | |
| CN113296286B (en) | Camera module lens assembly correction jig and use method thereof | |
| CN116558456A (en) | Precision mechanism alignment device | |
| CN219417830U (en) | Leveling device for light source layer and optical system layer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215026 Room 102, building C5, No. 192, Tinglan lane, Suzhou Industrial Park, Jiangsu Province Patentee after: Yuanzhuo Micro Nano Technology (Suzhou) Co.,Ltd. Address before: 215026 Room 102, building C5, No. 192, Tinglan lane, Suzhou Industrial Park, Jiangsu Province Patentee before: ADVANCED MICRO OPTICS.INC |
|
| CP01 | Change in the name or title of a patent holder |