CN210268551U - Displacement table for scanning optical surface shape of optical element - Google Patents
Displacement table for scanning optical surface shape of optical element Download PDFInfo
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- CN210268551U CN210268551U CN201921212988.2U CN201921212988U CN210268551U CN 210268551 U CN210268551 U CN 210268551U CN 201921212988 U CN201921212988 U CN 201921212988U CN 210268551 U CN210268551 U CN 210268551U
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- 230000003287 optical effect Effects 0.000 title claims abstract description 70
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 55
- 230000007246 mechanism Effects 0.000 claims description 14
- 238000002955 isolation Methods 0.000 claims description 8
- 239000000872 buffer Substances 0.000 claims description 7
- 230000007704 transition Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 230000004044 response Effects 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 description 4
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Abstract
The utility model discloses a displacement table for scanning the optical surface profile of an optical element, which comprises a base, wherein the left and right ends of the base are vertically and fixedly provided with upright posts, and the tops of the two upright posts are vertically and fixedly provided with a cross beam; the upper surface of the base is provided with a platform; a first direction scale grating is arranged at the bottom of the platform, and a first grating reading head is fixedly arranged on the base; a first sliding table and a second sliding table are arranged on the front end face of the cross beam; a second direction scale grating is arranged on the front end face of the cross beam, and a second grating reading head is fixedly arranged on the first sliding table; and a second grating reading head is fixedly arranged on the second sliding table. The utility model discloses well platform, first slip table, second slip table slide by linear electric motor control, and linear electric motor's transmission precision is high, dynamic response is fast, stability is high, simultaneously under each corresponding grating chi displacement sensor's cooperation, can wait to detect optical element's relevant position through displacement feedback play, and positioning accuracy is higher.
Description
Technical Field
The utility model belongs to the technical field of optical element shape of face scanning, concretely relates to optical element optical surface shape of face scanning is with displacement platform.
Background
With the development of optical technology, the application of optical elements is becoming more widespread, and therefore, more strict requirements are put on the quality detection of the optical elements. The detection of the optical surface shape of the optical element is an important part of the quality detection of the optical element, and the detection of the optical surface shape of the optical element is realized by scanning the optical surface of the optical element through a laser interferometer and a microscope interferometer at present. When the surface shape is detected, the laser interferometer or the microscope interferometer needs to stably scan the whole optical surface of the optical element to be detected, so that a displacement table for mounting the laser interferometer or the microscope interferometer needs to be capable of controlling the laser interferometer or the microscope interferometer to accurately move, the whole optical surface of the optical element is scanned, and the scanned image can be in one-to-one correspondence with the positions of all parts of the optical element.
However, the conventional displacement stage for mounting a laser interferometer or a microscope interferometer has low stability and low positioning accuracy, and thus has low accuracy in detecting the optical surface shape of the optical element.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to overcome the above-mentioned deficiencies of the prior art, and provides a displacement table for scanning optical surface profile of an optical element.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a displacement table for scanning the optical surface profile of an optical element comprises a base, wherein upright columns are vertically and fixedly arranged at the left end and the right end of the base, and a cross beam is vertically and fixedly arranged at the tops of the two upright columns;
the upper surface of the base is provided with a platform which is controlled by a linear motor and slides along the upper surface of the base in the front-back direction; a first direction scale grating distributed along the front-back direction is arranged in the middle of the bottom of the platform, and a first grating reading head matched with the first direction scale grating for use is fixedly arranged on the base;
the front end surface of the cross beam is provided with a first sliding table and a second sliding table which are controlled by a linear motor and slide along the left and right directions of the front end surface of the cross beam; the front end face of the cross beam is provided with second direction scale gratings distributed along the left and right directions, and a second grating reading head matched with the second direction scale gratings for use is fixedly arranged on the first sliding table; a third grating reading head matched with the second direction scale grating for use is fixedly arranged on the second sliding table;
preferably, the upper surface of the base is provided with two first sliding rails extending along the front-back direction; and a platform sliding block which is in sliding fit with the first sliding rail is arranged on the bottom end face of the platform.
Preferably, the front end and the rear end of the upper surface of the base are both provided with a first anti-collision buffer; and a first anti-collision block matched with the first anti-collision buffer on the corresponding side is arranged on the bottom end surface of the platform.
Preferably, two second slide rails extending in the left-right direction are arranged on the front end face of the cross beam; a first sliding block in sliding fit with the second sliding rail is arranged on the rear end face of the first sliding table; and a second sliding block in sliding fit with the second sliding rail is arranged on the rear end face of the second sliding table.
Preferably, the left end and the right end of the front end surface of the cross beam are respectively provided with a second anti-collision buffer; the rear end faces of the first sliding table and the second sliding table are provided with first anti-collision blocks matched with the second anti-collision buffers on the corresponding sides.
Preferably, four right angles of the base are provided with vibration isolation mechanisms for eliminating vibration interference of the external world on the displacement table; the vibration isolation mechanism comprises a cushion block and an air spring arranged on the upper portion of the cushion block, a first connecting plate is arranged on the upper portion of the air spring, a second connecting plate is vertically and downwardly connected to the rear end of the first connecting plate, a third connecting plate is vertically and rearwardly connected to the bottom end of the second connecting plate, and the third connecting plate is fixedly connected with the bottom of the base.
Preferably, the first sliding table and the second sliding table are both provided with adjusting mechanisms for adjusting the height of the scanning instrument; the adjusting mechanism comprises a base, and the base is fixedly connected with the front end face of the first sliding table or the second sliding table through a transition connecting plate; an adjusting cylinder is arranged at the upper part of the base, a piston rod of the adjusting cylinder is downwards fixedly connected with a sliding seat, and the sliding seat is in sliding connection with the front end face of the base; and the front end surface of the sliding seat is provided with an instrument seat for mounting a scanning instrument.
The utility model has the advantages that:
the utility model discloses displacement platform is used in scanning of optical element optical surface shape of face is at the during operation, and corresponding grating chi displacement sensor can detect the slip displacement of each part, because different slip displacements represent the different positions of waiting to detect optical element, consequently can carry out the one-to-one with each image of scanning and optical element's position; simultaneously because platform, first slip table, second slip table in this application are slided by linear electric motor control, linear electric motor's transmission precision is high, dynamic response is fast, stability is high, simultaneously under each corresponding grating chi displacement sensor's cooperation, can wait to detect optical element's relevant position through displacement feedback play, and adopt grating chi displacement sensor to wait to detect optical element's each position and carry out the positioning accuracy of fixing a position higher.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application.
FIG. 1 is a first schematic perspective view of a displacement table for scanning optical surface profiles of optical elements according to the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1;
FIG. 3 is a schematic left side view of the displacement table for scanning the optical surface profile of the optical element according to the present invention;
FIG. 4 is a partial enlarged view of B in FIG. 3;
FIG. 5 is an enlarged view of a portion C of FIG. 3;
FIG. 6 is a schematic perspective view of a second displacement stage for scanning the optical surface profile of the optical element according to the present invention;
FIG. 7 is an enlarged view of a portion D of FIG. 6;
fig. 8 is a first schematic perspective view of a second slide table according to the present invention;
fig. 9 is a schematic perspective view of a second slide table according to the present invention;
wherein,
1-base, 101-first slide rail, 102-first crash cushion, 2-column, 3-beam, 301-second slide rail, 302-second crash cushion, 4-platform, 401-platform slide block, 402-first crash block, 5-first direction scale grating, 6-first grating reading head, 7-first sliding table, 701-first slide block, 8-second sliding table, 801-second slide block, 802-second crash block, 9-second direction scale grating, 10-second grating reading head, 11-third grating reading head, 12-vibration isolation mechanism, 1201-cushion block, 1202-air spring, 1203-first connecting plate, 1204-second connecting plate, 1205-third connecting plate, 13-adjusting mechanism, 1301-base, 1302-adjusting cylinder, 1303-slide seat, 1304-transition connecting plate, 1305-instrument seat.
Detailed Description
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
In the present invention, the terms such as "bottom", "front", "back", "left", "right", etc. indicate the position or positional relationship based on the position or positional relationship shown in the drawings, and the terms are only the terms determined for convenience of describing the structural relationship of the components or elements of the present invention, and are not specific to any component or element of the present invention, and are not to be construed as limiting the present invention.
In the present invention, terms such as "connected" and "connected" should be understood in a broad sense, and may be either fixedly connected or integrally connected or detachably connected; may be directly connected or indirectly connected through an intermediate. The meaning of the above terms in the present invention can be determined according to specific situations by persons skilled in the art, and should not be construed as limiting the present invention.
The present invention will be further explained with reference to the drawings and examples.
As shown in fig. 1, a displacement table for scanning an optical surface profile of an optical element comprises a base 1, wherein vertical columns 2 are vertically and fixedly arranged at the left end and the right end of the base 1, and a cross beam 3 is vertically and fixedly arranged at the tops of the two vertical columns 2;
the upper surface of the base 1 is provided with a platform 4 which is controlled by a linear motor and slides along the upper surface of the base 1 in the front-back direction, wherein the platform 4 is used for installing an optical element to be detected; as shown in fig. 6-7, a first direction scale grating 5 distributed along the front-back direction is disposed at the middle position of the bottom of the platform 4, and a first grating reading head 6 used in cooperation with the first direction scale grating 5 is fixedly disposed on the base 1;
a first sliding table 7 and a second sliding table 8 which are controlled by a linear motor and slide along the left and right directions of the front end surface of the cross beam 3 are arranged on the front end surface of the cross beam 3, wherein the first sliding table 7 is used for installing a laser interferometer, and the second sliding table 8 is used for installing a microscope interferometer; as shown in fig. 3-4, a second direction scale grating 9 distributed along the left-right direction is arranged on the front end surface of the cross beam 3, and a second grating reading head 10 used in cooperation with the second direction scale grating 9 is fixedly arranged on the first sliding table 7; as shown in fig. 8-9, a third grating reading head 11 used in cooperation with the second direction scale grating 9 is fixedly arranged on the second sliding table 8;
wherein the first direction scale grating 5 and the first grating reading head 6 form a grating scale displacement sensor capable of measuring the forward and backward movement displacement of the platform 4; the second direction scale grating 9 and the second grating reading head 10 form a grating scale displacement sensor capable of measuring the left and right direction movement displacement of the first sliding table 7; the second direction scale grating 9 and the third grating reading head 11 form a grating scale displacement sensor capable of measuring the left and right direction movement displacement of the second sliding table 8;
the platform 4 can move back and forth, so that the front and back directions of the optical element to be detected can be moved; the first sliding table 7 and the second sliding table 8 can move left and right, so that the laser interferometer or the microscope interferometer can move left and right, and the laser interferometer or the microscope interferometer can scan the whole optical surface of the optical element; during scanning, the corresponding grating ruler displacement sensors can detect the sliding displacement of the components, and because different sliding displacements represent different positions of the optical element to be detected, the scanned images can be in one-to-one correspondence with the positions of the optical elements;
simultaneously because platform 4, first slip table 7, second slip table 8 in this application are slided by linear electric motor control, linear electric motor's transmission precision is high, dynamic response is fast, stability is high, simultaneously under each corresponding grating chi displacement sensor's cooperation, can wait to detect optical element's relevant position through displacement feedback, and adopt grating chi displacement sensor to wait to detect optical element's each position and carry out the positioning accuracy of fixing a position higher.
Preferably, as shown in fig. 6 to 7, the upper surface of the base 1 is provided with two first sliding rails 101 extending in the front-back direction; and a platform sliding block 401 which is in sliding fit with the first sliding rail 101 is arranged on the bottom end surface of the platform 4.
Preferably, as shown in fig. 6-7, the front and rear ends of the upper surface of the base 1 are provided with first crash cushions 102; the bottom end face of the platform 4 is provided with a first crash block 402 which is matched with the first crash cushion 102 on the corresponding side.
Preferably, two second slide rails 301 extending in the left-right direction are arranged on the front end surface of the cross beam 3; as shown in fig. 3-4, a first sliding block 701 in sliding fit with the second sliding rail 301 is arranged on the rear end surface of the first sliding table 7; as shown in fig. 2 and fig. 8 to 9, a second slider 801 slidably engaged with the second slide rail 301 is disposed on a rear end surface of the second slide table 8.
Preferably, as shown in fig. 4, the left end and the right end of the front end surface of the cross beam 3 are respectively provided with a second crash cushion 302; the rear end faces of the first sliding table 7 and the second sliding table 8 are provided with first anti-collision blocks 802 matched with the second anti-collision buffers 302 on the corresponding sides, as shown in fig. 9.
Preferably, vibration isolation mechanisms 12 for eliminating vibration interference of the displacement table from the outside are arranged at four right angles of the base 1; as shown in fig. 5, the vibration isolation mechanism 12 includes a cushion block 1201 and an air spring 1202 arranged on the upper portion of the cushion block 1201, a first connecting plate 1203 is arranged on the upper portion of the air spring 1202, a second connecting plate 1204 is vertically connected to the rear end of the first connecting plate 1203 downwards, a third connecting plate 1205 is vertically connected to the bottom end of the second connecting plate 1204 backwards, and the third connecting plate 1205 is fixedly connected to the bottom of the base 1; the vibration isolation mechanism 12 is placed on the ground through the cushion block 1201, and the entire displacement table is floated by the third connecting plate 1206 connected to the base 1, so that the vibration interference of the outside on the displacement table can be eliminated.
Preferably, the first sliding table 7 and the second sliding table 8 are both provided with an adjusting mechanism 13 for adjusting the height of the scanning instrument; as shown in fig. 8, the adjusting mechanism 13 includes a base 1301, and the base 1301 is fixedly connected to the front end surface of the first sliding table 7 or the second sliding table 8 through a transition connecting plate 1304; an adjusting cylinder 1302 is arranged at the upper part of the base 1301, a piston rod of the adjusting cylinder 1302 is downwards fixedly connected with a sliding seat 1303, and the sliding seat 1303 is in sliding connection with the front end surface of the base 1301; the front face of the slide 1303 is provided with an instrument holder 1305 for mounting a scanning instrument.
A displacement table for scanning the optical surface profile of an optical element is disclosed, which comprises the following specific embodiments:
(1) mounting an optical element to be detected on a platform 4, mounting a laser interferometer on a first sliding table 7, and mounting a microscope interferometer on a second sliding table 8;
(2) the platform 4 is controlled by a linear motor to slide along the front and back directions of the base 1 from an initial position so as to reach a test starting point, and the sliding displacement of the platform 4 is detected by a first direction scale grating 5 and a grating scale displacement sensor of a first grating reading head 6;
(3) the first sliding table 7 is controlled to slide from left to right along the cross beam 3 through a linear motor, the laser interferometer scans the optical surface of the optical element in the process, and meanwhile, a grating scale displacement sensor consisting of a second direction scale grating 9 and a second grating reading head 10 can detect the sliding displacement of the first sliding table 7; then the first sliding table 7 is controlled to return to the original position;
(4) the platform 4 is controlled by the linear motor to slide along the front and back directions of the base 1 to reach the next test point, and meanwhile, a grating ruler displacement sensor consisting of a first direction scale grating 5 and a first grating reading head 6 detects the sliding displacement of the platform 4, so that the position of the test point relative to a test starting point can be obtained;
(5) repeating the steps (3) and (4) until the laser interferometer scans the whole optical element; and (5) scanning the whole optical element by adopting the same method and a microscope interferometer.
When the displacement table works, the corresponding grating ruler displacement sensors can detect the sliding displacement of the components, and because different sliding displacements represent different positions of the optical element to be detected, scanned images can be in one-to-one correspondence with the positions of the optical element; simultaneously because platform 4, first slip table 7, second slip table 8 in this application are slided by linear electric motor control, linear electric motor's transmission precision is high, dynamic response is fast, stability is high, simultaneously under each corresponding grating chi displacement sensor's cooperation, can wait to detect optical element's relevant position through displacement feedback, and adopt grating chi displacement sensor to wait to detect optical element's each position and carry out the positioning accuracy of fixing a position higher.
Although the present invention has been described with reference to the accompanying drawings, it is not intended to limit the present invention, and those skilled in the art should understand that, based on the technical solution of the present invention, various modifications or variations that can be made by those skilled in the art without inventive labor are still within the scope of the present invention.
Claims (7)
1. A displacement table for scanning the optical surface profile of an optical element is characterized by comprising a base, wherein vertical columns are vertically and fixedly arranged at the left end and the right end of the base, and a cross beam is vertically and fixedly arranged at the tops of the two vertical columns;
the upper surface of the base is provided with a platform which is controlled by a linear motor and slides along the upper surface of the base in the front-back direction; a first direction scale grating distributed along the front-back direction is arranged in the middle of the bottom of the platform, and a first grating reading head matched with the first direction scale grating for use is fixedly arranged on the base;
the front end surface of the cross beam is provided with a first sliding table and a second sliding table which are controlled by a linear motor and slide along the left and right directions of the front end surface of the cross beam; the front end face of the cross beam is provided with second direction scale gratings distributed along the left and right directions, and a second grating reading head matched with the second direction scale gratings for use is fixedly arranged on the first sliding table; and a third grating reading head matched with the second direction scale grating for use is fixedly arranged on the second sliding table.
2. The stage according to claim 1, wherein the base has two first rails extending in a front-rear direction on an upper surface thereof; and a platform sliding block which is in sliding fit with the first sliding rail is arranged on the bottom end face of the platform.
3. The displacement stage for scanning the optical surface profile of an optical element according to claim 1, wherein first anti-collision bumpers are disposed at both the front and rear ends of the upper surface of the base; and a first anti-collision block matched with the first anti-collision buffer on the corresponding side is arranged on the bottom end surface of the platform.
4. The stage according to claim 1, wherein two second slide rails extending in the left-right direction are provided on the front end surface of the beam; a first sliding block in sliding fit with the second sliding rail is arranged on the rear end face of the first sliding table; and a second sliding block in sliding fit with the second sliding rail is arranged on the rear end face of the second sliding table.
5. The stage according to claim 1, wherein the beam has a front end surface provided with a first bumper at each of left and right ends thereof; the rear end faces of the first sliding table and the second sliding table are provided with first anti-collision blocks matched with the second anti-collision buffers on the corresponding sides.
6. The stage according to claim 1, wherein vibration isolation means for eliminating vibration interference of the displacement stage from the outside are provided at four corners of the base; the vibration isolation mechanism comprises a cushion block and an air spring arranged on the upper portion of the cushion block, a first connecting plate is arranged on the upper portion of the air spring, a second connecting plate is vertically and downwardly connected to the rear end of the first connecting plate, a third connecting plate is vertically and rearwardly connected to the bottom end of the second connecting plate, and the third connecting plate is fixedly connected with the bottom of the base.
7. The displacement stage for optical surface profile scanning of an optical element according to claim 1, wherein said first and second slide stages are each provided with an adjustment mechanism for adjusting the height of the scanning instrument; the adjusting mechanism comprises a base, and the base is fixedly connected with the front end face of the first sliding table or the second sliding table through a transition connecting plate; an adjusting cylinder is arranged at the upper part of the base, a piston rod of the adjusting cylinder is downwards fixedly connected with a sliding seat, and the sliding seat is in sliding connection with the front end face of the base; and the front end surface of the sliding seat is provided with an instrument seat for mounting a scanning instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921212988.2U CN210268551U (en) | 2019-07-30 | 2019-07-30 | Displacement table for scanning optical surface shape of optical element |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921212988.2U CN210268551U (en) | 2019-07-30 | 2019-07-30 | Displacement table for scanning optical surface shape of optical element |
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| CN210268551U true CN210268551U (en) | 2020-04-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117075022A (en) * | 2023-10-16 | 2023-11-17 | 深圳市道格特科技有限公司 | Multi-performance test universal equipment for probe card |
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2019
- 2019-07-30 CN CN201921212988.2U patent/CN210268551U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117075022A (en) * | 2023-10-16 | 2023-11-17 | 深圳市道格特科技有限公司 | Multi-performance test universal equipment for probe card |
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