CN216084914U

CN216084914U - Chain oxidation furnace and laser SE battery production line

Info

Publication number: CN216084914U
Application number: CN202122529672.XU
Authority: CN
Inventors: 熊勇
Original assignee: Tongwei Solar Meishan Co Ltd
Current assignee: Tongwei Solar Meishan Co Ltd
Priority date: 2021-10-20
Filing date: 2021-10-20
Publication date: 2022-03-18
Anticipated expiration: 2031-10-20

Abstract

The application provides a chain type oxidation furnace and a laser SE battery production line, and relates to the field of silicon battery preparation. The chain type oxidation furnace comprises a preheating section, an oxidation section and a cooling section which are sequentially arranged. The oxidation section is provided with a plurality of oxidation cavities which are arranged in parallel, each oxidation cavity is provided with a first feeding end and a first discharging end which are oppositely arranged in the conveying direction, the first feeding end is communicated with the preheating section, and the first discharging end is communicated with the cooling section. The first conveying mechanism, the first heating mechanism and the oxygen conveying mechanism are arranged in each oxidation cavity and are respectively and independently controlled, the first heating mechanism heats the oxidation cavity, and the oxygen conveying mechanism supplies oxygen to the oxidation cavity. The improvement of the chain type oxidation furnace structure is utilized to reduce the oxygen consumption cost in the oxidation treatment and the energy consumption generated by heating, thereby reducing the manufacturing cost.

Description

Chain oxidation furnace and laser SE battery production line

Technical Field

The application relates to the field of silicon battery preparation, in particular to a chain type oxidation furnace and a laser SE battery production line.

Background

The chain oxidation process is extremely important in the whole silicon cell preparation field. The time of the chain oxygen process is very short for about 1.5 minutes, and all laser areas prepared in the SE laser process in the front of the silicon cell are oxidized into a layer of compact silicon dioxide protective film in the chain oxygen process.

The existing chain type oxidation furnace is designed into a preheating section, an oxidation section and a cooling section, and each section realizes different functions. The preheating section mainly serves to heat the silicon cell, and the preheating temperature is usually between 300-500 ℃. In the oxidation stage, the main function is to oxidize the heavily doped region to form an oxide film to protect the region from being polished, and at the same time, oxygen is introduced into the oxidation furnace cavity in the pipeline for oxidation. The temperature of the oxidation section can reach 500-700 ℃. And finally, a cooling section, which is used for rapidly cooling the battery piece mainly in an air cooling and water cooling mode, wherein in the area, the temperature of the battery piece is reduced from the highest 700 ℃ to about 40 ℃.

In the actual use process, the existing chain type oxidation furnace easily causes oxygen waste, the power consumption is large, and meanwhile, the oxygen flow of a plurality of roller ways is different.

SUMMERY OF THE UTILITY MODEL

An object of the embodiment of the application is to provide a chain oxidation furnace and laser SE battery production line, it can improve current chain oxidation furnace and cause oxygen extravagant easily, and there is the technical problem of difference in the oxygen flow of a plurality of roll tables simultaneously.

In a first aspect, an embodiment of the present application provides a chain oxidation furnace, which includes a preheating section, an oxidation section, and a cooling section that are arranged in sequence.

The oxidation section is provided with a plurality of oxidation cavities, each oxidation cavity is provided with a first feeding end and a first discharging end which are oppositely arranged in the conveying direction, the first feeding end is communicated with the preheating section, and the first discharging end is communicated with the cooling section.

Every be equipped with first transport mechanism of independent control, first heating mechanism of independent control and independent control's oxygen conveying mechanism in the oxidation chamber, first transport mechanism is used for carrying target object to first discharge end from first feed end, and first heating mechanism is used for heating the oxidation chamber, and oxygen conveying mechanism is used for carrying oxidizing gas in to the oxidation chamber.

This application utilizes every oxidation intracavity to be equipped with first transport mechanism of independent control, the first heating mechanism of independent control and the oxygen conveying mechanism of independent control, consequently can realize the heating temperature in every oxidation intracavity and the oxygen flow in the oxidation intracavity to energy consumption when reducing oxygen consumption and heating, and then reduction in production cost. Secondly, a plurality of oxidation cavities are independently formed by a plurality of roller ways, and in addition, compared with the mode that the existing oxygen conveying mechanism conveys the oxidation gas to a plurality of roller ways (equivalent to the conveying mechanism), the oxygen supply mode of each oxidation cavity by utilizing the independent oxygen conveying mechanism can reduce the conveying path, and further improve the difference of the oxygen flow of the oxidation cavities to a certain degree.

In one possible embodiment, the first feeding end is provided with a sensor for sensing whether the first conveyor mechanism has the target object thereon.

In the implementation process, whether the target object is arranged on the first conveying mechanism capable of automatically identifying and corresponding to the arrangement of the inductor, the running state of the first heating mechanism and the oxygen conveying mechanism is controlled according to the identification result, the use is more convenient and the operation is quicker, the production efficiency is effectively improved, for example, when a certain oxidation cavity or a plurality of oxidation cavities in the back sense a battery piece to enter the cavity, the oxygen flow of the oxidation cavity which does not sense the target object can be reduced or closed, and therefore the effect of reducing oxygen consumption is achieved.

In one possible embodiment, the oxygen delivery mechanism is configured to: if the sensor of the corresponding oxidation cavity does not sense the target substance for 1-3min, the oxygen conveying mechanism stops working or reduces the oxygen supply amount to the oxidation cavity.

In the implementation process, the oxygen supply amount can be automatically stopped or reduced after the target substance is not sensed in the time period by utilizing the matching of the oxidation mechanism and the sensor, so that the oxygen consumption is effectively reduced on the premise of not influencing production.

In one possible embodiment, the first heating mechanism is configured to: and if the oxygen conveying mechanism of the corresponding oxidation cavity stops supplying oxygen, reducing the temperature rise rate of the first heating mechanism.

In the above-mentioned realization process, utilize the cooperation of first heating mechanism and oxidation mechanism, after oxygen conveying mechanism stops the oxygen suppliment, the rate of rise of temperature of first heating mechanism can reduce automatically, oxidation intracavity portion will be in the heat preservation state to reached the effect that reduces the energy consumption, simultaneously after opening oxygen conveying mechanism, because oxidation intracavity portion will be in the heat preservation state before, consequently compare in the mode that stops directly stopping heating after stopping the oxygen suppliment, but rapid heating to target temperature improves production efficiency.

In a possible embodiment, the oxygen delivery mechanism comprises a plurality of air inlet pipes positioned in the oxidation chamber, the plurality of air inlet pipes are arranged in the oxidation chamber at intervals along the delivery direction, and each air inlet pipe is provided with a plurality of air holes.

In the above-mentioned realization process, because a plurality of admission pipes are arranged at the oxidation intracavity along the direction of delivery interval, consequently can shorten the length of every intake pipe, be convenient for adjust the content of the oxygen that every intake pipe carried to improve the homogeneity of oxygen distribution, but a plurality of intake pipes independent control oxygen transmission volume simultaneously, with the regulation etc. of the oxygen concentration that realizes the different positions in oxidation chamber, satisfy the demand of actual work.

In a possible embodiment, the axis of the inlet pipe is different from the conveying direction.

In the implementation process, the axis of the air inlet pipe is different from the conveying direction, for example, the axis of the air inlet pipe is basically vertical to the conveying direction, so that the uniformity of oxygen distribution can be further improved.

In one possible embodiment, the number of the first heating means is plural, and the plural first heating means are arranged at intervals in the oxidation chamber along the conveying direction.

In the implementation process, the uniformity of heating temperature is realized by using the arrangement mode that a plurality of first heating mechanisms are arranged in the oxidation cavity at intervals along the conveying direction, and meanwhile, the temperature of each first heating mechanism can be independently adjusted so as to realize that the temperatures of different positions of each oxidation cavity in the conveying direction are different.

In a possible embodiment, the preheating section is provided with preheating chambers corresponding to the oxidation chambers one to one, and the preheating chambers have a second feeding end and a second discharging end which are arranged oppositely in the conveying direction, and the second discharging end is communicated with the first feeding end.

The preheating cavity is internally provided with a second conveying mechanism and a second heating mechanism, the second conveying mechanism is used for conveying the target object from the second feeding end to the second discharging end, and the second heating mechanism is used for heating the preheating cavity.

In the implementation process, compared with a mode that one preheating cavity is communicated with a plurality of oxidation cavities, the preheating cavity and the oxidation cavities are in one-to-one correspondence, and the volume of the preheating cavity is reduced, so that the oxygen consumption cost can be reduced, the energy consumption generated by heating is reduced, and the manufacturing cost is reduced.

In a possible embodiment, the number of the second heating means is plural, and the plural second heating means are arranged at intervals in the preheating chamber in the conveying direction.

In the implementation process, the plurality of second heating mechanisms are arranged in the preheating cavity at intervals along the conveying direction, so that the uniformity of heating temperature is realized, and meanwhile, the temperature of each second heating mechanism can be independently adjusted, so that the adjustment of the temperature of different parts of each preheating cavity in the conveying direction can be adjusted.

In a second aspect, an embodiment of the present application provides a laser SE battery production line, which includes a laser doping machine and the chain oxidation furnace provided in the first aspect of the present application, where the chain oxidation furnace is configured to receive and oxidize a silicon wafer doped by the laser doping machine.

In the implementation process, the chain type oxidation furnace is introduced into a laser SE battery production line, and the improvement of the structure of the chain type oxidation furnace is utilized to reduce the oxygen consumption cost in oxidation treatment and the energy consumption caused by heating, so that the manufacturing cost is reduced.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

FIG. 1 is a schematic view of a chain oxidation furnace;

FIG. 2 is a schematic view of a first cross-section of an oxidation zone perpendicular to the transport direction;

FIG. 3 is a second schematic cross-sectional view of the oxidation zone perpendicular to the transport direction.

Icon: 10-chain oxidation furnace; 100-an oxidation stage; 110-an oxidation chamber; 111-a first feed end; 113-a first discharge end; 120-a first transport mechanism; 130-a first heating mechanism; 141-an air inlet pipe; 1411-air holes; 150-a sensor; 200-preheating section; 210-a preset cavity; 211-a second feed end; 213-second discharge end; 220-a second heating mechanism; 230-a second transport mechanism; 300-cooling section.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

The terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

In the description of the present application, it is also to be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, e.g., as being either fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

A preheating section, an oxidation section and a cooling section of the existing chain type oxidation process are sequentially communicated along a conveying direction to form a conveying channel, wherein a plurality of roller ways which are arranged side by side are arranged in the conveying channel, each roller way extends from the preheating section to the cooling section, each roller way is used for outputting target objects such as silicon cells or silicon wafers after being sequentially subjected to preheating treatment, oxidation treatment and cooling treatment, a pipeline which spans across a plurality of roller ways is arranged in the conveying channel to simultaneously supply oxygen to the plurality of roller ways, a heating mechanism which spans across the plurality of roller ways is used for simultaneously heating the plurality of roller ways, whether the corresponding roller ways have the target objects or not is judged, if one roller way has the target object, oxygen and heat are continuously introduced into the whole conveying channel, so that the oxygen consumption and the energy consumption are higher, and because one oxygen supply pipeline needs to convey oxidizing gas to the plurality of roller ways, and the distance between each roller way and an air inlet of the oxygen supply pipeline is different, there is a problem in that the supply of oxygen is not uniform.

In view of this, the present application is hereby presented.

This application utilizes heating temperature and oxygen flow in the oxidation intracavity that every single roller of independent control says to energy consumption when reducing oxygen consumption and heating, and then reduction in production cost. Utilize a plurality of roll tables independently to form a plurality of oxidation chambeies to adopt the mode of utilizing independent oxygen conveying mechanism oxygen suppliment in every oxidation intracavity, compare in the mode that a current oxygen conveying mechanism transported oxidation gas to a plurality of roll tables, reducible route of carrying, and then improve a plurality of oxidation intracavity oxygen uneven distribution's problem to a certain extent.

The application provides a laser SE battery production line, which comprises a laser doping machine and a chain type oxidation furnace, wherein the chain type oxidation furnace is used for receiving and oxidizing a target product after doping treatment by the laser doping machine, and in the embodiment, the target product is a silicon wafer. The laser doping machine can be purchased directly in the market, and besides the laser doping machine and the chained oxidation furnace, the laser SE battery production line can be provided with, for example, an etching machine according to actual requirements, which is not described herein.

Referring to fig. 1, the chain oxidation furnace 10 includes a preheating section 200, an oxidation section 100, and a cooling section 300, wherein the preheating section 200, the oxidation section 100, and the cooling section 300 are sequentially arranged along a conveying direction, which is indicated by an arrow in fig. 1, and the conveying direction refers to a conveying direction of a target object.

Referring to fig. 1 and 2, the oxidation section 100 is provided with a plurality of oxidation cavities 110, the oxidation cavities 110 are arranged in parallel and at intervals, each oxidation cavity 110 has a first feeding end 111 and a first discharging end 113 which are oppositely arranged in the conveying direction, the first feeding end 111 is communicated with the preheating section 200, and the first discharging end 113 is communicated with the cooling section 300.

It should be noted that the oxidation chamber 110 may be directly formed by integral molding, or a partition plate may be disposed in the existing oxidation section 100, and the two adjacent roller ways are separated by the partition plate, so as to form the independent oxidation chamber 110.

It should be noted that any two adjacent oxidation chambers 110 may be completely sealed to realize complete independence of the two oxidation chambers 110, and besides, a certain gap may also be left between any two adjacent oxidation chambers 110 to communicate the two oxidation chambers, which is particularly suitable for the above-mentioned situation of using the manner of setting the partition plate to partition two adjacent roller ways.

Referring to fig. 2, an independently controlled first conveying mechanism 120, an independently controlled first heating mechanism 130 and an independently controlled oxygen conveying mechanism are disposed in each oxidation chamber 110, and the heating temperature in each oxidation chamber 110 and the oxygen flow rate in the oxidation chamber are independently controlled by the arrangement manner that the first conveying mechanism 120, the first heating mechanism 130 and the oxygen conveying mechanism are independently controlled.

The first conveying mechanism 120 is used for conveying the target object from the first feeding end 111 to the first discharging end 113.

The first conveying mechanism 120 may be a conveying belt, and in this embodiment, the first conveying mechanism 120 is a roller table.

The first heating mechanism 130 is used to heat the oxidation chamber 110.

Wherein the first heating mechanism 130 is, for example, an electric heating wire, a heating plate, etc., and optionally, the first heating mechanism 130 is a heating lamp in order to ensure safety and uniformity of heating temperature.

The first heating mechanism 130 is located above the first conveying mechanism 120, and the first heating mechanism 130 is disposed on the top of the top wall and/or the side wall of the oxidation chamber 110, wherein the first heating mechanism 130 may completely cover the top wall of the oxidation chamber 110, or the length of the first heating mechanism 130 is the same as the length of the oxidation chamber 110 in the conveying direction, and the width of the first heating mechanism 130 is smaller than the width of the top wall of the oxidation chamber 110, or the first heating mechanism 130 only covers part of the top wall of the oxidation chamber 110, etc.

In this embodiment, the number of the first heating mechanisms 130 is plural, for example, two, three, five, seven, ten, and the like, and the plural first heating mechanisms 130 are arranged at intervals in the oxidation chamber 110 along the conveying direction. With the above arrangement, uniformity of the heating temperature is achieved, while each of the first heating mechanisms 130 can independently adjust the temperature to achieve a difference in temperature at different positions of each of the oxidation chambers 110 in the conveying direction.

Referring to fig. 1 and 2, optionally, a plurality of first heating mechanisms 130 are disposed in the oxidation chamber 110 at equal intervals along the conveying direction.

The oxygen delivery mechanism is used for delivering an oxidizing gas into the oxidation chamber 110, wherein the oxidizing gas is oxygen, ozone or a mixed gas of nitrogen and oxygen.

The oxygen supply mechanism includes a gas supply device (not shown) capable of supplying the oxidizing gas to the oxidation chamber 110, and a plurality of gas inlet pipes 141 located in the oxidation chamber 110 and communicating with the gas supply device.

In some optional examples, the axial length of each air inlet pipe 141 is the same as the axial length in the oxidation chamber 110, and the axial directions of the plurality of air inlet pipes 141 are parallel to the axial direction in the oxidation chamber 110.

In another alternative embodiment, a plurality of air inlet pipes 141 are arranged in the oxidation chamber 110 at intervals along the conveying direction, each air inlet pipe 141 is provided with a plurality of air holes 1411, for example, the plurality of air holes 1411 are arranged in the circumferential direction of the air inlet pipe 141.

At this time, the axial direction of each intake pipe 141 may be the same direction or different from the conveying direction.

In order to shorten the axial length of the air inlet pipe 141 and simultaneously ensure the uniformity of oxygen delivery of the air inlet pipe 141, optionally, the axis of each air inlet pipe 141 is different from the conveying direction, for example, the included angle between the axis of the air inlet pipe 141 and the conveying direction is 60-120 degrees, and in this embodiment, the included angle between the axis of the air inlet pipe 141 and the conveying direction is 90 degrees, which is not only convenient for setting, but also effectively improves the uniformity of oxygen delivery.

In practice, to facilitate identification of the target object on the first conveying mechanism 120, the oxidation section 100 may be provided with a transparent viewing window corresponding to each oxidation chamber 110.

Referring to fig. 1 and 3, in the embodiment, the first feeding end 111 of each oxidation cavity 110 is provided with a sensor 150, and the sensor 150 is used for sensing whether the corresponding first conveying mechanism 120 has the target object, and the determination result is obtained quickly and accurately by the arrangement of the sensor 150, so that the processing efficiency is effectively improved.

The sensor 150 includes, but is not limited to, one of a mechanical sensor 150, a photoelectric sensor 150, an ultrasonic sensor 150, and a capacitive sensor 150, wherein the sensor 150 is connected to an inner wall of the oxidation chamber 110 and suspended above the first conveying mechanism 120.

In order to effectively reduce oxygen consumption without affecting production, optionally, the oxygen delivery mechanism is configured to: if the sensor 150 of the corresponding oxidation chamber 110 does not sense the target substance for 1-3min, the oxygen delivery mechanism stops working or reduces the amount of oxygen supplied to the oxidation chamber 110. By using the cooperation of the oxidation mechanism and the sensor 150, the oxygen supply amount can be automatically stopped or reduced after the target substance is not sensed in the above time period, thereby effectively reducing the oxygen consumption amount without influencing the production.

Optionally, the first heating mechanism 130 is configured to: if the oxygen supply mechanism of the corresponding oxidation chamber 110 stops supplying oxygen, the temperature increase rate of the first heating mechanism 130 is reduced. Utilize the cooperation of first heating mechanism 130 and oxidation mechanism, after oxygen conveying mechanism stops the oxygen suppliment, the rate of rise of temperature of first heating mechanism 130 can reduce automatically, and oxidation chamber 110 is inside will be in the heat preservation state to reached the effect that reduces the energy consumption, simultaneously after opening oxygen conveying mechanism, because oxidation chamber 110 is inside before will be in the heat preservation state, consequently compare in the mode that directly stops the heating after stopping the oxygen suppliment, but rapid heating to target temperature improves production efficiency.

The configuration of the first heating mechanism 130 and the oxygen mechanism may be implemented by, for example, a PLC control system, for example, the PLC control system is connected to the oxygen delivery mechanism to control the operation state of the oxygen delivery mechanism, the PLC control system is connected to the first heating mechanism 130 and controls the operation state of the first heating mechanism 130, and the like.

Referring to fig. 1, the preheating section 200 is provided with a predetermined chamber 210, and a second heating mechanism 220 and a second conveying mechanism 230 are disposed in the preheating chamber.

Wherein the preheating chamber has a second feed end 211 and a second discharge end 213 arranged opposite to each other in the conveying direction, the second discharge end 213 being in communication with the first feed end 111.

In some optional embodiments, the number of the preheating cavities is one, and the preheating cavities are communicated with the first feeding end 111 of each oxidation cavity 110, at this time, the number of the second heating mechanisms 220 in the preheating cavities is at least one, the number of the second conveying mechanisms 230 is multiple, and the multiple second conveying mechanisms 230 correspond to the first conveying mechanisms 120 one by one and are matched with each other, so as to realize the conveying of the preheated target objects on the second conveying mechanisms 230 onto the second conveying mechanisms 230.

In this embodiment, the number of the preheating chambers is plural, and the plural preheating chambers correspond to the oxidation chambers 110 one by one. At this time, the number of the second heating mechanisms 220 arranged in each preheating chamber is at least one, and the number of the second conveying mechanisms 230 is one and is matched with the corresponding first conveying mechanism 120, so as to convey the preheated target articles on the second conveying mechanisms 230 to the second conveying mechanisms 230.

Alternatively, the number of the second heating mechanisms 220 is plural, for example, two, five, seven, and the like, and the plural second heating mechanisms 220 are arranged at intervals in the preheating chamber along the conveying direction.

Wherein the second heating mechanism 220 is, for example, an electric heating wire, a heating plate, etc., and optionally, the second heating mechanism 220 is a heating lamp in order to ensure safety and uniformity of heating temperature.

In order to ensure the heating efficiency, the second heating mechanism 220 is located above the second conveying mechanism 230, for example, the second heating mechanism 220 is disposed on the top wall of the preheating chamber.

The number of the second heating mechanisms 220 is plural, for example, two, three, five, seven, ten, etc., and the plural second heating mechanisms 220 are arranged at intervals in the preheating chamber in the conveying direction. With the above arrangement, uniformity of heating temperature is achieved, and simultaneously, the temperature of each second heating mechanism 220 can be independently adjusted to achieve that the temperatures of different portions of each preheating chamber in the conveying direction have different temperatures.

The cooling section 300 has a cooling chamber (not shown) in which a third transfer mechanism (not shown) and a cooling mechanism (not shown) are disposed, the cooling mechanism being used for cooling the cooling chamber.

The number of the cooling cavities is one or more, and when the number of the cooling cavities is one, the cooling cavities are communicated with the first discharge end 113 of each oxidation cavity 110. When the number of the cooling cavities is multiple, the multiple cooling cavities correspond to the oxidation cavities 110 one to one, and each cooling cavity is communicated with the corresponding oxidation cavity 110, which can be selected by a person skilled in the art according to actual requirements, and is not limited herein.

Optionally, in order to ensure the smoothness of transportation, the first conveying mechanism 120, the second conveying mechanism 230, and the third conveying mechanism are connected in sequence, for example, the first conveying mechanism 120, the second conveying mechanism 230, and the third conveying mechanism are roller beds connected in sequence.

In conclusion, the improved chain type oxidation furnace structure is utilized, oxygen consumption cost during oxidation treatment and energy consumption generated by heating can be reduced, manufacturing cost is reduced, and meanwhile, the chain type oxidation furnace is introduced into a laser SE battery production line, and the manufacturing cost of the laser SE battery can be reduced.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A chain type oxidation furnace comprises a preheating section, an oxidation section and a cooling section which are sequentially arranged, and is characterized in that the oxidation section is provided with a plurality of oxidation cavities which are arranged in parallel, each oxidation cavity is provided with a first feeding end and a first discharging end which are oppositely arranged in the conveying direction, the first feeding end is communicated with the preheating section, and the first discharging end is communicated with the cooling section;

each oxidation cavity is internally provided with an independently controlled first conveying mechanism, an independently controlled first heating mechanism and an independently controlled oxygen conveying mechanism;

the first conveying mechanism is used for conveying target objects from a first feeding end to a first discharging end, the first heating mechanism is used for heating the oxidation cavity, and the oxygen conveying mechanism is used for conveying oxidizing gas into the oxidation cavity.

2. The chain oxidation oven of claim 1, wherein the first feed end is provided with a sensor for sensing whether the target item is on the first conveyor.

3. The chain oxidation oven as set forth in claim 2, wherein the oxygen delivery mechanism is configured to: if the target article is not sensed by the corresponding sensor of the oxidation cavity for 1-3min, stopping the oxygen conveying mechanism or reducing the oxygen supply amount to the oxidation cavity by the oxygen conveying mechanism.

4. The chain oxidation oven of claim 3, wherein the first heating mechanism is configured to: and if the oxygen conveying mechanism of the corresponding oxidation cavity stops supplying oxygen, reducing the temperature rise rate of the first heating mechanism.

5. The chain type oxidation furnace according to any one of claims 1 to 4, wherein the oxygen delivery mechanism comprises a plurality of air inlet pipes positioned in the oxidation chamber, the plurality of air inlet pipes are arranged in the oxidation chamber at intervals along the delivery direction, and each air inlet pipe is provided with a plurality of air holes.

6. The chain oxidation oven as set forth in claim 5, wherein each of the intake pipes has an axis different from the conveying direction.

7. The chain type oxidation furnace according to any one of claims 1 to 4, wherein the number of the first heating means is plural, and the plural first heating means are arranged at intervals in the oxidation chamber along the conveying direction.

8. The chain oxidation furnace according to any one of claims 1 to 4, wherein the preheating section is provided with preheating cavities corresponding to the oxidation cavities one to one, the preheating cavities having a second feeding end and a second discharging end arranged oppositely in the conveying direction, the second discharging end being communicated with the first feeding end;

and a second conveying mechanism and a second heating mechanism are arranged in the preheating cavity, the second conveying mechanism is used for conveying the target object from the second feeding end to the second discharging end, and the second heating mechanism is used for heating the preheating cavity.

9. The chain oxidation furnace according to claim 8, wherein the number of the second heating means is plural, and the plural second heating means are arranged at intervals in the preheating chamber in the conveying direction.

10. A laser SE cell production line comprising a laser doping machine and a chain oxidation furnace according to any one of claims 1 to 9 for receiving and oxidizing silicon wafers doped by the laser doping machine.