WO2021043324A1

WO2021043324A1 - Conveying roller and application thereof

Info

Publication number: WO2021043324A1
Application number: PCT/CN2020/121208
Authority: WO
Inventors: 任常瑞; 王敏; 程阳; 李一强; 谈壁璇
Original assignee: 常州时创能源股份有限公司
Priority date: 2019-09-05
Filing date: 2020-10-15
Publication date: 2021-03-11
Also published as: CN110451200A; WO2021043324A8

Abstract

The present invention provides a conveying roller, comprising a roller bar used for conveying products, a connecting shaft detachably connected to one end of the roller bar, and a connecting pin used for locking the roller bar and the connecting shaft together. The connecting pin can be broken when the roller bar is blocked. The present invention further provides a roller way and a chain-type furnace applying the conveying roller. The conveying roller is mainly composed of the roller bar, the connecting shaft and the connecting pin, so that the conveying roller is not of an integrated structure, the roller bar and the connecting shaft can be made of different materials, for example, the roller bar is made of non-metal materials, the connecting shaft is made of metal materials, and the machining difficulty of the conveying roller can be lowered. Moreover, the connecting pin can be broken when the roller bar is blocked, the connecting pin is replaced only when the conveying roller is maintained, and it is not needed to replace the whole conveying roller, or scrap the whole conveying roller, so that the conveying roller is easy to maintain and low in maintenance cost.

Description

A conveying roller and its application

Technical field

The invention relates to a conveying roller, and a roller table and a chain furnace using the conveying roller.

Background technique

Chain furnaces can use roller conveyors to convey products. The roller conveyors include multiple conveyor rollers, and the conveyor rollers are driven by a chain (one end of the conveyor roller is equipped with a sprocket matched with the chain).

The existing conveying rollers are all integrated structures, that is, the conveying rollers are made of one material, and the ends of the conveying rollers often adopt a special-shaped structure. Chain furnaces often use high-temperature processes, which requires the conveyor roller to be made of high-temperature resistant materials, and some chain furnaces have further requirements on the material of the conveyor rollers, such as the chain furnace used in the production of solar cells, which needs to be transported. The rollers are made of non-metallic materials, and it is difficult to process the integrated structure of the conveyor rollers made of special materials.

In addition, the chain furnace has higher requirements for the straightness of the conveying roller, otherwise the conveying roller is likely to be broken due to blocking, and the integral structure of the conveying roller will be scrapped once it is broken, and the replacement cost is high.

Technical solutions

In order to solve the defects of the prior art, the present invention provides a conveying roller, comprising: a roller for conveying products, a connecting shaft detachably connected to one end of the roller, and a connecting pin for locking the roller and the connecting shaft together ；

The roller and the connecting shaft are located on the same straight line, the roller is provided with a first connecting head at its end facing the connecting shaft, and the connecting shaft is provided with a second connecting head at its end facing the roller; the first connecting head and the second connecting head The male and female connectors are matched, one of the connectors is a male connector, and the other is a female connector; the male connector is inserted into the female connector, and the above-mentioned connecting pin penetrates the male connector and the female connector, and the male connector and the female connector The connecting heads are respectively provided with through holes through which the connecting pins can penetrate; the connecting shaft is provided with a sprocket at its end away from the roller, and the sprocket is coaxial with the connecting shaft;

The connecting pin can be broken when the roller is blocked.

The conveying roller of the present invention is mainly composed of a roller rod, a connecting shaft and a connecting pin. Therefore, the conveying roller of the present invention is not a one-piece structure. The roller and the connecting shaft can be made of different materials. For example, the roller is made of non-metallic material, and the connecting shaft is made of metal. , It can reduce the processing difficulty of the conveying roller. In addition, the connecting pin can be broken when the roller is locked, and only the connecting pin is needed to repair the conveying roller, the entire conveying roller does not need to be replaced, and the entire conveying roller does not need to be scrapped. Therefore, the conveying roller of the present invention is convenient to maintain and has low maintenance cost.

Preferably, the roller is a non-metal roller.

Preferably, the non-metallic roller is a ceramic roller or a quartz roller.

Preferably, the connecting shaft is a metal connecting shaft.

Preferably, the metal connecting shaft is a stainless steel connecting shaft.

Preferably, the connecting pin is a shear pin.

The present invention also provides a roller table, which includes a plurality of the above-mentioned conveying rollers driven by a chain, and the chain drives the connecting shaft and the roller bar to rotate through a sprocket.

Preferably, the roller is also equipped with a rotation speed detecting device for detecting its rotation speed.

Preferably, the rotation speed detection device is close to the connecting pin, the rotation speed detection device includes a sensor that can be triggered by one or both ends of the connection pin, and the rotation speed detection device detects the rotation speed of the roller bar by sensing one or both ends of the connection pin.

The rotation speed detection device can detect the rotation speed of the roller. When the roller is blocked, it can be detected at the first time.

The present invention also provides a chain furnace, which includes the roller table described above.

Preferably, the chain furnace is a chain oxidation furnace.

Preferably, the roller table of the chain oxidation furnace is used to transport silicon wafers, and the chain oxidation furnace can oxidize the silicon wafers transported on the roller table. When transferring silicon wafers, the rollers of the roller table are preferably non-metallic rollers, which can avoid metal contamination of the silicon wafers due to the use of metal rollers.

Preferably, the chain-type oxidation furnace is provided with an oxidation chamber penetrated by the roller table; the oxidation chamber is externally provided with: an air supply device that can deliver oxidizing gas to the oxidation chamber; and inside the oxidation chamber is provided: a first heating device for heating silicon wafers. Heating device; and the oxidizing gas can oxidize the heated silicon wafer.

Preferably, the gas supply device is provided with a gas transmission pipeline for conveying oxidizing gas, and a water vapor generating device is provided on the gas transmission pipeline, and the water vapor generating device supplies water vapor to the gas transmission pipe so that the oxidizing gas carries water vapor.

Preferably, the water vapor generating device includes: a liquid storage container for internal liquid storage, a second heating device for heating the liquid in the liquid storage container, and a liquid level detection device for detecting the liquid level in the liquid storage container to provide The replenishment pipe for replenishing the liquid in the container, and the inlet pipe and the outlet pipe connected to the gas pipeline respectively;

The gas inlet pipe extends into the liquid storage container, and the gas inlet pipe extends below the liquid surface of the liquid storage container; the gas transmission pipeline transports the oxidizing gas to the liquid storage container through the gas inlet pipe;

The gas outlet pipe is in communication with the inner cavity of the liquid storage container, and the gas outlet pipe is located above the liquid level of the liquid storage container; the liquid storage container transports oxidizing gas carrying water vapor to the gas pipeline through the gas outlet pipe.

The arrangement of the water vapor generating device enables the chain oxidation furnace to realize the wet oxygen process, and the silicon wafers can be oxidized by the wet oxygen process.

Description of the drawings

Figure 1 is a schematic diagram of a transfer roller;

Figure 2 is a schematic diagram of a water vapor generating device.

The best mode of the present invention

The specific implementation of the present invention will be further described below in conjunction with the drawings and embodiments. The following embodiments are only used to illustrate the technical solutions of the present invention more clearly, and cannot be used to limit the protection scope of the present invention.

Example 1

The present invention provides a conveying roller, comprising: a roller 1 for conveying products, a connecting shaft 2 detachably connected to one end of the roller 1, and a connecting pin 3 that locks the roller 1 and the connecting shaft 2 together;

The roller 1 and the connecting shaft 2 are located on the same straight line, the roller 1 is provided with a first connecting head at its end facing the connecting shaft 2, and the connecting shaft 2 is provided with a second connecting head at its end facing the roller 1; One connector and the second connector are male and female, one of the connectors is a male connector, and the other is a female connector; the male connector is inserted into the female connector, and the above-mentioned connecting pin 3 penetrates the male connector and the female connector The head, the male connector and the female connector are respectively provided with through holes through which the connecting pin 3 can penetrate; the connecting shaft 2 is provided with a sprocket 4 at its end away from the roller 1, and the sprocket 4 is coaxial with the connecting shaft 2 ；

The connecting pin 3 can be broken when the roller 1 is blocked.

Preferably, the roller 1 is a non-metal roller, such as a ceramic roller or a quartz roller.

Preferably, the connecting shaft 2 is a metal connecting shaft, a stainless steel connecting shaft.

Preferably, the connecting pin 3 is a shear pin.

The conveying roller of the present invention is mainly composed of a roller rod 1, a connecting shaft 2 and a connecting pin 3. Therefore, the conveying roller of the present invention is not an integrated structure. The roller rod 1 and the connecting shaft 2 can be made of different materials, for example, the roller rod 1 is made of non-metallic materials. , The connecting shaft 2 is made of metal material, which can reduce the processing difficulty of the conveying roller. In addition, the connecting pin 3 can be broken when the roller rod 1 is locked, and only the connecting pin 3 needs to be replaced to repair the conveying roller, the entire conveying roller does not need to be replaced, and the entire conveying roller does not need to be scrapped. Therefore, the conveying roller of the present invention is convenient to maintain and costly. low.

Example 2

The present invention also provides a roller table, which includes a plurality of the above-mentioned conveying rollers driven by a chain, and the chain drives the connecting shaft 2 and the roller 1 through a sprocket 4 to rotate.

The transfer roller can be supported by a pair of bearings 51 and 52, one of which is assembled with the connecting shaft 2 and the other bearing 52 is assembled with the end of the roller rod 1 away from the connecting shaft 2.

Preferably, the roller 1 is also equipped with a rotation speed detecting device for detecting its rotation speed.

More preferably, the rotation speed detection device is close to the connecting pin 3, the rotation speed detection device includes a sensor that can be triggered by one or both ends of the connection pin 3, and the rotation speed detection device detects the roller by sensing one or both ends of the connection pin 3 1 speed.

The rotation speed detection device can detect the rotation speed of the roller 1, when the roller 1 is blocked, it can be detected at the first time.

Example 3

The present invention also provides a chain oxidation furnace, which includes the above-mentioned roller table, the rollers of the roller table are ceramic rollers or quartz rollers, the roller table is used for conveying silicon wafers, and the chain oxidation furnace can oxidize on the roller table. Silicon wafers sent.

When conveying silicon wafers, the rollers of the roller table adopt non-metallic rollers, which can avoid metal contamination of the silicon wafers due to the use of metal rollers.

More specifically, the chain oxidation furnace is provided with an oxidation chamber penetrated by the roller table; the oxidation chamber is externally provided with: a gas supply device that can deliver oxidation gas to the oxidation chamber; and inside the oxidation chamber is provided with: a second heating silicon wafer A heating device; and the oxidizing gas can oxidize the heated silicon wafer.

Example 4

On the basis of Example 3, the difference lies in:

The gas supply device is provided with a gas pipeline for conveying oxidizing gas, and a water vapor generating device is arranged on the gas pipeline, and the water vapor generating device supplies water vapor to the gas transmission pipe so that the oxidizing gas carries water vapor.

Example 5

On the basis of Example 4, the difference lies in:

As shown in FIG. 2, the water vapor generating device includes: a liquid storage container 61 for storing liquid inside, a second heating device 62 for heating the liquid in the liquid storage container 61, and a second heating device 62 for detecting the liquid level in the liquid storage container 61 Position detection device 63, a liquid supplement pipe 64 for replenishing liquid to the liquid storage container 61, and an air inlet pipe 65 and an air outlet pipe 66 respectively connected to the gas pipeline;

The gas inlet pipe 65 extends into the liquid storage container 61, and the gas inlet pipe 65 extends below the liquid surface of the liquid storage container 61; the gas pipeline transports oxidizing gas to the liquid storage container 61 through the gas inlet pipe 65;

The gas outlet pipe 66 communicates with the inner cavity of the liquid storage container 61, and the gas outlet pipe 66 is located above the liquid level of the liquid storage container 61; the liquid storage container 61 transports the oxidizing gas carrying water vapor to the gas pipeline through the gas outlet pipe 66.

The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the technical principles of the present invention, several improvements and modifications can be made. These improvements and modifications It should also be regarded as the protection scope of the present invention.

Claims

A conveying roller, characterized by comprising: a roller for conveying products, a connecting shaft detachably connected to one end of the roller, and a connecting pin for locking the roller and the connecting shaft together;

The roller and the connecting shaft are located on the same straight line, the roller is provided with a first connecting head at its end facing the connecting shaft, and the connecting shaft is provided with a second connecting head at its end facing the roller; the first connecting head and the second connecting head The male and female connectors are matched, one of the connectors is a male connector, and the other is a female connector; the male connector is inserted into the female connector, and the above-mentioned connecting pin penetrates the male connector and the female connector, and the male connector and the female connector The connecting heads are respectively provided with through holes through which the connecting pins can penetrate; the connecting shaft is provided with a sprocket at its end away from the roller, and the sprocket is coaxial with the connecting shaft;

The connecting pin can be broken when the roller is blocked.
The transfer roller according to claim 1, wherein the roller is a non-metal roller.
The transfer roller according to claim 2, wherein the non-metallic roller is a ceramic roller or a quartz roller.
The transfer roller according to claim 1, wherein the connecting shaft is a metal connecting shaft.
The transfer roller according to claim 4, wherein the metal connecting shaft is a stainless steel connecting shaft.
The transfer roller according to claim 1, wherein the connecting pin is a shear pin.
A roller table comprising a plurality of conveying rollers, and the conveying rollers are driven to run by a chain; characterized in that, the conveying rollers are the conveying rollers according to any one of claims 1 to 6, and the chain drives the connecting shaft through a sprocket And the roller rotates.
The roller table according to claim 7, wherein the roller bar is also equipped with a rotation speed detecting device for detecting its rotation speed.
The roller table according to claim 8, wherein the rotation speed detection device is close to the connecting pin, the rotation speed detection device includes a sensor that can be triggered by one or both ends of the connection pin, and the rotation speed detection device senses one end of the connection pin. Or both ends to detect the rotation speed of the roller.
A chain furnace comprising a roller table, characterized in that the roller table is the roller table according to any one of claims 7 to 9.
The chain furnace according to claim 10, wherein the chain furnace is a chain oxidation furnace.
The chain furnace according to claim 11, wherein the roller table of the chain oxidation furnace is used to transport silicon wafers, and the chain oxidation furnace can oxidize the silicon wafers transported on the roller table.
The chain furnace according to claim 12, characterized in that the chain oxidation furnace is provided with an oxidation chamber penetrated by the roller table; the oxidation chamber is externally provided with: a gas supply device capable of delivering oxidation gas to the oxidation chamber; and the oxidation chamber The interior is provided with: a first heating device for heating the silicon wafer; and the oxidizing gas can oxidize the heated silicon wafer.
The chain furnace according to claim 13, wherein the gas supply device is provided with a gas pipeline for transporting oxidizing gas, and the gas pipeline is provided with a water vapor generating device that supplies water vapor to the gas pipeline , So that the oxidizing gas carries water vapor.
The chain furnace according to claim 14, characterized in that the water vapor generating device comprises: a liquid storage container for internal liquid storage, a second heating device for heating the liquid in the liquid storage container, and for detecting the liquid storage container The liquid level detection device of the middle liquid level, the liquid supplement pipe for replenishing liquid to the liquid storage container, and the air inlet pipe and the air outlet pipe respectively connected with the gas pipeline;

The gas inlet pipe extends into the liquid storage container, and the gas inlet pipe extends below the liquid surface of the liquid storage container; the gas transmission pipeline transports the oxidizing gas to the liquid storage container through the gas inlet pipe;

The gas outlet pipe is in communication with the inner cavity of the liquid storage container, and the gas outlet pipe is located above the liquid level of the liquid storage container; the liquid storage container transports oxidizing gas carrying water vapor to the gas pipeline through the gas outlet pipe.