WO2022073296A1

WO2022073296A1 - Electronic furnace having uniform gas supply function

Info

Publication number: WO2022073296A1
Application number: PCT/CN2020/134799
Authority: WO
Inventors: 吕华博; 朱从健; 金磊; 钱虞清
Original assignee: 苏州汇科机电设备有限公司
Priority date: 2020-10-10
Filing date: 2020-12-09
Publication date: 2022-04-14
Also published as: CN213841722U

Abstract

An electronic furnace having a uniform gas supply function, comprising a furnace body; an upper heating device at the upper part of the furnace body; a lower heating device at the lower part of the furnace body; a saggar transport roller supported on the outer wall of the furnace body; a saggar transport roller drive mechanism connected to the saggar transport roller; and a hearth gas supply mechanism. The features are: the hearth gas supply mechanism comprises a gas supply machine, a bleed manifold, a side gas supply branch pipe, an upper hearth gas supply device, a lower hearth gas supply device, and a left and right hearth gas supply device; one end of the bleed manifold is connected to a gas outlet of the gas supply machine, and the other end is closed; a gas inlet of the gas supply machine is connected to a gas storage source pipeline; the lower end of the side gas supply branch pipe is provided with a side gas supply branch pipe valve and a series-connected flow meter; the side gas supply branch pipe valve is located below the flow meter; the upper end of the side gas supply branch pipe is connected to the left and right hearth gas supply device; the left and right hearth gas supply device is connected to the left and right sides of the furnace body; the upper hearth gas supply device is connected to the side gas supply branch pipe; the lower hearth gas supply device is connected to the side gas supply branch pipe. The temperature in a hearth is uniform, and the sintering quality is good.

Description

Electronic kiln with uniform gas supply

technical field

The utility model belongs to the technical field of electronic kilns, in particular to an electronic kiln with a function of uniform gas supply.

Background technique

The use of the above electronic kilns involves a wide range of sintered products. Specifically, it can be used for many materials such as electronic powder, electronic components, silicon nitride, aluminum nitride, lithium battery cathode materials, polysilicon, monocrystalline The sintering of ceramic materials, phosphors, rare earth materials, ferrite and its powder materials is an indispensable equipment for the production of various medium and high-end electronic products.

As is known in the industry, in order to improve the output per unit time and save energy accordingly, for example, when sintering the above-mentioned lithium battery cathode material (for new energy power) and electronic components, the material is made of ceramic, graphite or stainless steel. The saggar (take the size of 330×330×100mm as an example) is loaded with the aforementioned materials and is introduced from the feed port of the furnace body and drawn out from the discharge port of the furnace body in a stacking state, so there is no doubt that the above-mentioned high-yield, purpose of energy saving. However, since the current kiln usually supplies air to the furnace from the lower part of the furnace, when sintering the products in the saggar in the stacking state, it is impossible to meet the process requirements only by air intake at the bottom. It is still difficult to meet the process requirements if the air intake is also realized at the top. In view of the above, the gas is supplied to the furnace in an all-round way of supplying gas from the top, bottom, left, and right, so there is no doubt that the process requirements can be met. However, the Chinese and foreign patents and non-patent documents disclosed so far have not found any enlightenment to solve the above-mentioned technical problems, and the technical solutions to be introduced below are generated under this background.

SUMMARY OF THE INVENTION

The task of the present utility model is to provide an electronic kiln with a uniform gas supply function that is helpful for supplying process gas to the furnace in an all-round gas supply mode, so as to ensure the uniformity of the furnace atmosphere and ensure the sintering quality of products. .

The task of the present utility model is accomplished as follows: an electronic kiln with a uniform gas supply function, comprising a furnace body; an upper heating device located at the upper part of the furnace body in the height direction and distributed at intervals along the length direction of the furnace body, Both ends of the upper heating device are supported on the corresponding furnace walls of the furnace body, and the middle part is located in the furnace chamber of the furnace body; the lower heating devices located at the lower part of the height direction of the furnace body and also spaced along the length direction of the furnace body, The two ends of the lower heating device are supported on the corresponding furnace walls of the furnace body, and the middle part is located in the furnace chamber of the furnace body; the saggar conveying roller, the saggar conveying roller is at a position corresponding to the upper part of the lower heating device along the furnace body The two ends of the saggar conveying roller extend outside the furnace body and are rotatably supported on the outer wall of the furnace body, while the middle part is also located in the furnace; the saggar conveying roller drive mechanism, the saggar conveying roller drive mechanism Corresponding to one side of the furnace body and connected with the saggar conveying roller in a driving manner; a furnace gas supply mechanism for supplying gas to the furnace, characterized in that the furnace gas supply mechanism includes an air supply machine, an air bleed main pipe, a side supply The gas branch pipe, the gas supply device above the furnace, the gas supply device under the furnace, and the left and right gas supply devices of the furnace, the gas supply machine is supported on the floor along with one side of the furnace body, and one end of the air bleed main pipe is connected to the supply of the gas supply machine. The air outlet of the air machine is connected, and the other end is closed. The air inlet of the air supply machine is connected to the air storage source pipeline. The lower end of the side air supply branch pipe is connected to the middle of the air bleed main pipe, and air is supplied on this side. The lower end of the branch pipe is provided with a side gas supply branch pipe valve and a flowmeter connected in series, the side gas supply branch pipe valve is located below the flowmeter, and the upper end of the side gas supply branch pipe is connected with the left and right gas supply devices of the furnace, and the left and right gas supply devices of the furnace are connected with the furnace chamber. The left and right sides of the furnace body are connected and communicated with the furnace chamber, the gas supply device on the furnace chamber is connected with the side gas supply branch pipe and corresponds to the upper part of the furnace chamber, and the gas supply device under the furnace chamber is at a position corresponding to the upper part of the flowmeter and The side gas supply branch pipes are connected and correspond to the lower part of the furnace.

In a specific embodiment of the present invention, the gas supply machine is a fan or a compressor, and the gas storage source is a nitrogen storage tank, a hydrogen storage tank, a nitrogen-hydrogen mixed gas storage tank, and an inert gas storage tank or oxygen storage tanks.

In another specific embodiment of the present invention, an upper left air inlet port and a lower left air inlet port are provided on the left side of the furnace body, and an upper right air inlet port and a lower right air intake port are provided on the right side of the furnace body An interface, corresponding to the furnace upper air supply device provided on the upper part of the furnace body and connected with the side air supply branch pipe is simultaneously connected with the upper left air inlet interface and the upper right air inlet interface or simultaneously with the lower left air inlet interface and the right air inlet interface. Connect the lower intake port.

In another specific embodiment of the present invention, the gas supply device on the furnace includes a gas feed pipe, a three-way connector, a left branch pipe, a right branch pipe and an air inlet pipe on the furnace hearth, and one end of the gas feed pipe is connected to the side supply pipe. The middle part of the gas branch pipe is connected, and the other end of the gas feed pipe is connected with the three-way connector, one end of the left branch pipe is connected with the upper left air inlet port or the lower left air inlet port, and the other end extends upward to the top of the furnace body And connected with the tee connector, one end of the right shunt pipe is connected to the upper right air inlet port or the lower right air inlet port, while the other end extends upward to the top of the furnace body and is connected to the tee connector, the upper air inlet pipe of the furnace. It is connected between the upper left air inlet port and the upper right air inlet port or between the lower left air inlet port and the lower right air inlet port in the furnace chamber, and the upper air inlet pipe faces the lower side of the furnace chamber and is located on the side corresponding to the furnace chamber. The areas are spaced with air outlet holes of the air inlet pipe on the furnace.

In yet another specific embodiment of the present invention, a left shunt hose is connected in series on the pipeline of the left shunt, and a right shunt hose is connected in series on the pipeline of the right shunt.

In another specific embodiment of the present invention, the gas supply device under the furnace includes a lower gas feed pipe and a lower gas inlet pipe, and one end of the lower gas feed pipe is connected to the side intake branch pipe and is connected to the side intake pipe The branch pipes are connected, the other end of the lower gas feed pipe is connected with one end of the transition hose of the lower gas feed pipe, and the other end of the transition hose of the lower gas feed pipe is connected with one end of the lower gas inlet pipe of the furnace, and the other end of the lower gas inlet pipe in the furnace is upward A plurality of branch pipes of the lower gas inlet pipe of the furnace are connected at intervals, and the branch pipes of the lower gas inlet pipe of the furnace penetrate into the furnace bottom lining of the furnace and communicate with the furnace.

In a more specific embodiment of the present invention, the left and right gas supply devices in the furnace include a shunt gas supply three-way joint, a left shunt gas supply pipe and a right shunt gas supply pipe, and the upper end of the side gas supply branch pipe extends to The top of the furnace body is connected with the gas supply tee joint of the shunt pipe, the upper end of the left shunt gas supply pipe extends to the top of the furnace body and is connected with the gas supply tee joint of the shunt pipe, and the lower end is matched with the left air inlet port of the furnace body, and The left air inlet port is disposed on the left side of the furnace body at a position corresponding to the position between the left ends of the upper heating device and the lower heating device and communicates with the furnace chamber, and the upper end of the right split air supply pipe extends to the upper end of the furnace body. The top is connected with the air supply tee joint of the shunt pipe, and the lower end is matched with the right air inlet interface of the furnace body, and the right air inlet interface of the furnace body is arranged in the position corresponding to the right end between the upper heating device and the lower heating device. The right side of the furnace body communicates with the furnace.

In a further specific embodiment of the present invention, a left shunt air supply pipe regulating valve is provided on the pipeline of the left shunt air supply pipe, and a left shunt air supply pipe hose is also connected in series, and the left shunt air supply pipe regulating valve is located in The position on the left shunt air supply pipe is located between the left air inlet interface of the furnace body and the left shunt air supply pipe hose; a right shunt air supply pipe regulating valve is arranged on the pipeline of the right shunt air supply pipe and a right shunt air supply pipe is also connected in series. The shunt air supply pipe hose, the position of the right shunt air supply pipe regulating valve on the right shunt air supply pipe is located between the right air inlet interface of the furnace body and the right shunt air supply pipe hose; the left air inlet interface of the furnace body is fixed on the The left air inlet interface of the furnace body on the left side of the furnace body is matched and communicated with the air cavity cover, and the left air cavity cover air outlet of the air cavity cover of the left air inlet interface of the furnace body is communicated with the furnace; the The right air inlet interface of the furnace body is matched with and communicated with the air cavity cover of the right air inlet interface of the furnace body fixed on the right side of the furnace body, and the right air cavity cover of the air cavity cover of the right air inlet interface of the furnace body exits. The gas port communicates with the furnace.

In a more specific embodiment of the present invention, on the left side of the furnace body and at a position corresponding to the drive mechanism of the saggar conveying roller drive connected to the saggar conveying roller, there is a motor support, a drive The wheel bracket and the saggar conveying roller drive the bracket, the motor bracket is fixed with the left side of the furnace body supporting chassis at the bottom of the furnace body, the transmission wheel bracket is fixed on the left side of the furnace body and corresponds to the upper part of the motor bracket, the saggar conveying roller The driving bracket is also fixed on the left side of the furnace body and corresponds to the upper part of the transmission wheel bracket; the saggar conveying roller driving mechanism is distributed on the motor bracket, the transmission wheel bracket and the saggar conveying roller driving bracket.

In a further specific embodiment of the present invention, the saggar conveying roller drive mechanism includes a motor, a motor-driven sprocket, a transition drive sprocket shaft seat, a transition drive sprocket, a reduction box, and a reduction box power input chain wheel, gear box power output sprocket, saggar conveying roller drive sprocket, first drive chain I, second drive chain II and third drive chain III, the motor is arranged on the motor bracket, and the motor drive sprocket is fixed on the On the motor power output shaft of the motor, the transition drive sprocket shaft seat is set on the transmission wheel bracket in a paired state, and the transition drive sprocket is a double row sprocket and is fixed on the transition drive sprocket shaft, and the transition drive sprocket shaft. It is rotatably supported on the transition drive sprocket shaft seat, the reduction box is fixed on the drive bracket of the saggar conveying roller, the reduction box power input sprocket is fixed on the reduction box power input shaft of the reduction box, and the reduction box power output sprocket is fixed. On the reduction box power output shaft of the reduction box, the saggar conveying roller drive sprocket is a double row sprocket and is fixed at the left end of the saggar conveying roller, between the saggar conveying roller drive sprockets on the adjacent saggar conveying rollers Driven and connected by the transition chain, the lower end of the first transmission chain I is sleeved on the motor drive sprocket, the upper end is sleeved on the transitional transmission sprocket, the lower end of the second transmission chain II is sleeved on the transitional transmission sprocket, and the upper end is sleeved on the transitional transmission sprocket. Set on the power input sprocket of the reduction box, the upper end of the third transmission chain III is sleeved on the power output sprocket of the reduction box, and the lower end is sleeved on the drive sprocket of the saggar conveying roller.

The technical effect of the technical scheme provided by the utility model is that: since the required process gas is introduced into the upper part of the furnace by the gas supply device on the furnace, the required process gas is introduced into the furnace from the bottom of the furnace by the gas supply device under the furnace, and the required process gas is introduced into the furnace from the bottom of the furnace. The left and right gas supply device introduces the required process gas into the furnace chamber from the left and right sides of the furnace body, so it helps to supply process gas to the furnace chamber in an all-round way of up, down, left and right, so as to ensure the uniformity of the furnace chamber atmosphere, so that the air flow and the products The area of contact is increased, the heat transfer in the furnace is balanced and the uniformity of the temperature in the furnace can be significantly improved and the sintering quality of the product can be improved.

Description of drawings

Fig. 1 is the schematic diagram of the utility model.

FIG. 2 is a schematic diagram of the right side of FIG. 1 .

Detailed ways

In order to be able to understand the technical essence and beneficial effects of the present invention more clearly, the applicant will give a detailed description by way of examples below, but the description of the examples is not a limitation to the scheme of the present invention, any idea based on the present invention Equivalent transformations made only in form rather than substantive should be regarded as the scope of technical solutions of the present invention.

In the following description, all the concepts related to the directionality or orientation of up, down, left, right, front and rear are taken as an example in the position state of FIG. Specific limitations of the technical solutions provided.

Please refer to FIG. 1 and in conjunction with FIG. 2 , the furnace body 1 is shown. According to professional knowledge and the schematic diagram of FIG. 2 , since the furnace body 1 usually consists of a preheating section, a heating section, a constant temperature section, a cooling section and a cooling section, etc., Therefore, the length is relatively long, and the electronic powder materials and electronic components to be sintered are carried by a sagger made of ceramic, graphite or stainless steel from the feeding port of the preheating section into the furnace, and slowly pass through the aforementioned heating section and constant temperature section. And after the cooling section, it goes out from the discharge port at the end of the cooling section to complete the sintering process; it shows the upper heating device 2 located at the upper part of the height direction of the furnace body 1 and distributed along the length direction of the furnace body 1 at intervals. Both ends of the upper heating device 2 are supported on the left and right walls of the corresponding furnace wall of the furnace body 1 in the position shown in FIG. The lower heating device 3 is also distributed at intervals along the length direction of the furnace body 1. Both ends of the lower heating device 3 are supported on the left and right walls of the corresponding furnace wall of the furnace body 1 in the position shown in FIG. 1. , and the middle part is located in the furnace chamber of the furnace body 1; the saggar conveying rollers 4 are shown, and the saggar conveying rollers 4 are spaced along the length direction of the furnace body 1 at a position corresponding to the upper part of the lower heating device 3. Both ends of the sagger conveying roller 4 extend out of the furnace body 1 and are rotatably supported on the outer wall of the furnace body 1, while the middle part is also located in the furnace; the saggar conveying roller drive mechanism 5 is shown, the saggar conveying roller drive mechanism 5 corresponds to the left side of the furnace body 1 as shown in FIG. 1 and is connected with the sagger conveying roller 4 in a driving connection; the furnace gas supply mechanism 6 for supplying gas to the aforementioned furnace is shown.

Since the above-mentioned upper and

lower heating devices

2, 3 and saggar conveying rollers 4 are set up and the mechanism of action belongs to the known technology, for example, refer to the following patents which are not limited to examples: CN208059547U (roller furnace for sintering lithium battery materials) , CN210802019U (a kind of kiln), CN111351347A (a kind of double-layer roller furnace) and CN209639527U (a new type of flat-top roller furnace lining structure and roller furnace), etc., so the applicant will not explain in detail.

As the technical point of the technical solution provided by the present utility model: the aforementioned furnace air supply mechanism 6 includes an air supply machine 61, an air bleed main pipe 62, a side air supply branch pipe 63, an upper furnace air supply device 64, a furnace lower air supply device 65 and a furnace chamber The left and right air supply devices 66, the air supply machine 61 is supported on the floor along with one side of the furnace body 1, for example, the left side in the position shown in FIG. The air outlet of the machine is connected, and the other end is closed. The air inlet of the air supply machine 61 is connected with the gas storage source pipeline. The gas storage source mentioned here is such as nitrogen storage tank, hydrogen storage cylinder, nitrogen and hydrogen mixed gas Storage tanks, inert gas storage tanks or oxygen storage tanks, etc., use corresponding gases according to different products and different processes. The lower end of the side gas supply branch pipe 63 is connected to the middle of the air bleed main pipe 62, and the side gas supply branch pipe The lower end of 63 is provided with a side air supply branch valve 631 and a flow meter 632 connected in series, and the side air supply branch valve 631 is located below the flow meter 632, that is, the side air supply branch valve 631 is located at one end of the air inlet of the flow meter 632 ( The upper end of the side air supply branch pipe 63 is connected to the left and right air supply device 66 of the furnace chamber, and the left and right air supply device 66 of the furnace chamber is connected to the left and right sides of the aforementioned furnace body 1 and communicated with the aforementioned furnace chamber, and the furnace chamber is supplied with gas. The device 64 is connected to the side gas supply branch pipe 63 and corresponds to the upper part of the furnace chamber, and the lower furnace chamber gas supply device 65 is at a position corresponding to the upper part of the aforementioned flowmeter 632, that is, the position corresponding to the gas outlet of the flowmeter 632 and the side gas supply branch pipe 63 Connected and corresponds to the lower part of the furnace.

In this embodiment, the aforementioned air supply machine is a fan, but a compressor can also be used. Since the aforementioned gas storage source has been mentioned above, it will not be repeated here.

As shown in FIG. 1 , an upper left air inlet port 11a and a lower left air inlet port 11b are provided on the left side of the aforementioned furnace body 1, and an upper right air inlet port 11c and a lower right air inlet port 11d are provided on the right side of the furnace body 1, Corresponding to the aforementioned furnace upper gas supply device 64 provided on the upper part of the aforementioned furnace body 1 and connected to the aforementioned side gas supply branch pipe 63 is simultaneously connected to the upper left inlet port 11a and the upper right inlet port 11c or is simultaneously connected to the lower left inlet port 11b and the upper right inlet port 11c. The lower right intake port 11d is connected.

Continuing with Fig. 1, the aforementioned gas supply device 64 on the furnace includes a gas feed pipe 641, a tee connector 642, a left branch pipe 643, a right branch pipe 644 and an air inlet pipe 645 on the furnace chamber. One end of the gas feed pipe 641 is connected to the aforementioned side gas supply branch pipe 63. The other end of the gas feed pipe 641 is connected to the tee connector 642, one end of the left branch pipe 643 is connected to the aforementioned upper left inlet port 11a or lower left inlet port 11b, and the other end extends upward to the aforementioned furnace body 1 The top of the right shunt pipe 644 is connected to the upper right air inlet port 11c or the lower right air inlet port 11d, and the other end extends upward to the top of the aforementioned furnace body 1 and is connected to the tee connection head. 642 is connected, and the upper air inlet pipe 645 in the furnace is connected between the upper left air inlet port 11a and the upper right air inlet port 11c or between the lower left air inlet port 11b and the lower right air inlet port 11d in the aforementioned furnace chamber. Facing the downward side and at intervals corresponding to the furnace chamber, there are air outlet holes 6451 on the upper air intake pipe of the furnace chamber.

Since the stacking height of the saggars, that is, the stacking height, will change as required, specifically, when the stacking height, that is, the stacking height, is high, that is, when the number of layers of saggers is large, then one end of the left shunt pipe 643 and the right shunt pipe 644 One end is respectively connected with the upper left air inlet port 11a and the upper right air inlet port 11c, and the upper furnace chamber air inlet pipe 645 is connected between the left and right upper air inlet ports 11a, 11c, and vice versa.

A left shunt hose 6431 is connected in series on the pipeline of the aforementioned left shunt 643 , and a right shunt hose 6441 is connected in series on the pipeline of the aforementioned right shunt 644 . Because the aforementioned left and right

shunt pipe hoses

6431, 6441 are used to satisfy the adaptation between one end of the left and

right shunt pipes

643, 644 and the left and right upper air inlet ports 11a, 11c or with the left and right lower

air inlet ports

11b, 11d Sexually changing mating requirements. When the matching form is the former, then the upper air inlet pipe 645 in the furnace is connected between the left and right upper air inlet ports 11a, 11c in the furnace, and when the matching form is the latter, then the upper air inlet pipe 645 in the furnace is connected in the furnace Between the left and right

lower intake ports

11b, 11d.

Continuing with FIG. 1 , the aforementioned gas supply device 65 under the furnace includes a lower gas feed pipe 651 and a lower gas inlet pipe 652. One end of the lower gas feed pipe 651 is connected to the aforementioned side intake branch pipe 63 at a position corresponding to the upper part of the aforementioned flow meter 632 And it communicates with the side air intake branch pipe 63, the other end of the lower gas feed pipe 651 is connected with one end of the lower gas feed pipe transition hose 6511, and the other end of the lower gas feed pipe transition hose 6511 is connected with one end of the lower gas inlet pipe 652 in the furnace, The other end of the lower furnace air inlet pipe 652 is connected with a plurality of lower furnace lower air inlet pipe branch pipes 6521 at an upward interval. The furnace lower air inlet pipe branch pipes 6521 penetrate into the furnace bottom lining of the furnace and communicate with the furnace.

Continuing with FIG. 1 , the aforementioned left and right gas supply device 66 in the furnace includes a shunt gas supply tee joint 661, a left split gas supply pipe 662 and a right split gas supply pipe 663. The upper end of the aforementioned side gas supply branch pipe 63 extends to the top of the aforementioned furnace body 1 Connected with the shunt pipe gas supply tee joint 661, the upper end of the left shunt gas supply pipe 662 extends to the top of the furnace body 1 and is connected with the shunt pipe gas supply tee joint 661, and the lower end is matched with the left air inlet port 12 of the furnace body. The left air inlet port 12 is arranged on the left side of the aforementioned furnace body 1 at a position corresponding to the position between the left ends of the aforementioned upper heating device 2 and the lower heating device 3 and communicates with the aforementioned furnace chamber, and the upper end of the right split air supply pipe 663 extends to the furnace body. The top of 1 is connected with the air supply tee joint 661 of the shunt pipe, and the lower end is matched with the right air inlet port 13 of the furnace body, and the right air inlet port 13 of the furnace body is corresponding to the right end of the upper heating device 2 and the lower heating device 3. The space between them is set on the right side of the aforementioned furnace body 1 and communicates with the aforementioned furnace chamber.

As shown in FIG. 1, a left shunt air supply pipe regulating valve 6621 is provided on the pipeline of the aforementioned left shunt air supply pipe 662, and a left shunt air supply pipe hose 6622 is also connected in series. The position on the 662 is located between the left air inlet port 12 of the aforementioned furnace body and the left shunt gas supply pipe hose 6622; a right shunt gas supply pipe regulating valve 6631 is arranged on the pipeline of the aforementioned right shunt gas supply pipe 663 and a right shunt gas supply pipe is also connected in series. The gas supply pipe hose 6632, the position of the right split gas supply pipe regulating valve 6631 on the right split gas supply pipe 663 is located between the aforementioned right inlet port 13 of the furnace body and the right split gas supply pipe hose 6632; the aforementioned left inlet port 12 of the furnace body The left air cavity cover 121 of the left air inlet interface of the furnace body is matched with and communicated with the air cavity cover 121 of the left air inlet interface of the furnace body, which is fixed on the left side of the furnace body 1. The furnace hearth is connected; the aforesaid right air inlet port 13 of the furnace body is matched with and communicated with the air chamber cover 131 of the furnace body right air inlet port fixed on the right side of the foregoing furnace body 1, and the air chamber cover 131 of the right air inlet port of the furnace body is connected with each other. The air outlet 1311 of the right air chamber cover communicates with the aforementioned furnace.

Please refer to FIG. 2 and in conjunction with FIG. 1 , in FIG. 2 , a lower smoke exhaust duct 7 is shown, a flap valve 71 is provided on the lower smoke exhaust duct 7 , and the lower smoke exhaust duct 7 is connected to the bottom lining of the furnace. The lower exhaust flue 19 communicates with the furnace chamber formed on the bottom lining of the furnace through the lower exhaust opening 191 . An upper smoke exhaust port 18 is provided on the top of the furnace body 1 and at positions corresponding to each temperature zone, an upper exhaust chimney 181 is attached to the upper exhaust port 18, and an upper exhaust chimney 181 is provided with an upper exhaust port 18. The smoke pipe 1811 and the upper smoke exhaust pipe 1811 are connected to the flue gas discharge main pipe 8 , and the aforementioned lower smoke discharge pipe 7 extends upward and is matched with the flue gas discharge main pipe 8 .

Please focus on Fig. 1, on the left side of the aforementioned furnace body 1 and at the position corresponding to the aforementioned sagg delivery roller drive mechanism 5 to which the aforementioned saggar delivery roller 4 is drivingly connected, there is a motor support 14, a transmission wheel support 15 and a saggar delivery The roller drive bracket 16, the motor bracket 14 are fixed to the left side of the furnace body supporting chassis 17 at the bottom of the furnace body 1, and the transmission wheel bracket 15 is fixed to the left side of the furnace body 1 and corresponds to the top of the motor bracket 14, and the saggar is conveyed The roller drive bracket 16 is also fixed on the left side of the furnace body 1 and corresponds to the upper part of the transmission wheel bracket 15; the aforementioned saggar conveying roller drive mechanism 5 is distributed and arranged on the motor bracket 14, the transmission wheel bracket 15 and the saggar conveying roller drive bracket 16 superior.

The aforementioned saggar conveying roller drive mechanism 5 includes a motor 51, a motor drive sprocket 52, a transition drive sprocket shaft seat 53, a transition drive sprocket 54, a reduction box 55, a reduction box power input sprocket 56, and a reduction box power output sprocket. 57. Saggar conveying roller drive sprocket 58, first drive chain I 59a, second drive chain II 59b and third drive chain III 59c, the motor 51 is arranged on the aforementioned motor bracket 14, and the motor drive sprocket 52 is fixed to the motor of the motor 51 On the power output shaft 511, the transition drive sprocket shaft seat 53 is arranged on the drive wheel bracket 15 in a paired state, and the transition drive sprocket 54 is a double row sprocket and is fixed on the transition drive sprocket shaft 541. The sprocket shaft 541 is rotatably supported on the transition drive sprocket shaft seat 53, the reduction box 55 is fixed on the aforementioned saggar conveying roller drive bracket 16, the reduction box power input sprocket 56 is fixed on the reduction box power input shaft of the reduction box 55, The gear box power take-off sprocket 57 is fixed on the gear box power take-off shaft of the gear box 55, and the sagg conveying roller driving sprocket 58 is a double row sprocket and is fixed on the left end of the saggar conveying roller 4, adjacent to the saggar conveying roller. The drive sprockets 58 of the saggar conveying rollers on The lower end of the chain II 59b is sleeved on the transition drive sprocket 54, the upper end is sleeved on the reduction box power input sprocket 56, the upper end of the third transmission chain III 59c is sleeved on the reduction box power output sprocket 57, and the lower end is sleeved on the reduction box power output sprocket 57. Saggar conveying roller drive sprocket 58. As a preferred solution, a chain tensioning sprocket 59d can also be rotatably provided on the saggar conveying roller drive bracket 16 and at a position corresponding to the middle of the third transmission chain III 59c.

The motor 51 works, the motor power output shaft 511 drives the motor drive sprocket 52, the motor drive sprocket 52 drives the transition transmission sprocket 54 (double row sprocket) through the first transmission chain I59a, and then the transition transmission sprocket 54 The power input sprocket 56 of the reduction box is driven by the second transmission chain II 59b, the power output sprocket 57 of the reduction box fixed on it is driven by the power output shaft of the reduction box 55, and the saggar conveying roller is driven by the third transmission chain III 59c. The sprocket 58 is driven by the saggar conveying roller drive sprocket 58 to drive the saggar conveying shaft 4. Since the saggar conveying roller drive sprocket 58 is a double row sprocket, and because the saggar conveying rollers 4 are adjacent to each other, the The drive sprockets 58 of the bowl conveying rollers are connected by a transition chain, so that all the saggar conveying rollers 4 can move simultaneously and synchronously to drive the saggars from the feeding port, that is, the feeding port to the discharging port.

In the above process, both the upper and

lower heating devices

2 and 3 are in the heating state, and the aforementioned furnace gas supply mechanism 6 is also in the working state, and the aforementioned side gas supply branch pipe valve 631 on the side gas supply branch pipe 63 is in the open state. , the process gas supplied by the air supply machine 61 in the air bleed main pipe 62 is divided into three paths: one is the upper air inlet, that is, the upper air supply device 64 is supplied to the furnace. The left shunt pipe 643 and the right shunt pipe 644 are respectively supplied by the three-way connector 642, and the upper air inlet pipe 645 of the furnace is jointly supplied by the left shunt pipe 643 and the right shunt pipe 644, until the upper air inlet pipe 6451 of the upper air inlet pipe 645 in the furnace is ejected into the furnace chamber. The upper part of the furnace; the other way is the lower air intake, that is, the gas supply device 65 under the furnace is supplied, and specifically, the process gas passes through the lower gas feed pipe 6511, the lower gas feed pipe transition hose 6511 and the lower gas inlet pipe 652 in turn, until the lower gas feed pipe 652 is passed through the furnace chamber. The branch pipe 6521 of the air inlet pipe is introduced into the lower part of the furnace; there is another way for the side air intake of the furnace, specifically, the upper end of the side gas supply branch pipe 63 leads the process gas to the left and right air supply mechanism 66 of the furnace chamber. The joint 661 is divided into the left split gas supply pipe 662 and the right split gas supply pipe 663 by the split air supply pipe three-way joint 661, and the gas is supplied respectively when the left and right split gas supply

pipe regulating valves

6621 and 6631 are opened and the degree of opening is adjusted. The left and right sides of the furnace body are connected to the

air ports

12 and 13, and then respectively supplied to the left and right air inlet ports of the furnace body to the

air chamber casings

121 and 131. Spray into the furnace from the left and right sides of the furnace body. Undoubtedly, the aforesaid air supply from upper, lower, left, right, and four sides can reflect the technical effect described by the applicant in the above technical effect column.

In this embodiment, since the sintered products are aluminum nitride devices and powders, the aforementioned protective gas is nitrogen or nitrogen-hydrogen mixed gas. According to professional knowledge, according to different products and different process requirements, the protective gas can be used Hydrogen, inert gas such as argon. Even oxygen can be used as a reactive gas instead of a protective gas, such as sintered lithium battery cathode materials, oxygen can be used as a reactive gas to promote chemical reactions during sintering; conventional electronic powders and electronic devices usually use nitrogen as a protective gas to protect The gas is hydrogen (reduction), which is usually used for metallization sintering of products, alumina, and sintering of electronic components.

To sum up, the technical solution provided by the present invention makes up for the shortcomings in the prior art, successfully completes the invention task, and faithfully fulfills the technical effect stated by the applicant in the above technical effect column.

Claims

An electronic kiln with a uniform gas supply function, comprising a furnace body (1); an upper heating device (2) located at an upper part of the furnace body (1) in the height direction and distributed at intervals along the length direction of the furnace body (1) , the two ends of the upper heating device (2) are supported on the corresponding furnace walls of the furnace body (1), and the middle part is located in the furnace chamber of the furnace body (1); it is located at the lower part of the height direction of the furnace body (1) and also along the The lower heating devices (3) are distributed at intervals along the length direction of the furnace body (1), the two ends of the lower heating device (3) are supported on the corresponding furnace walls of the furnace body (1), and the middle part is located in the furnace body (1) Inside the furnace chamber; the saggar conveying rollers (4) are spaced along the length direction of the furnace body (1) at the position corresponding to the upper part of the lower heating device (3), and the saggar conveying Both ends of the roller (4) extend out of the furnace body (1) and are rotatably supported on the outer wall of the furnace body (1), while the middle part is also located in the furnace; the saggar conveying roller drive mechanism (5), the sagger conveys A roller drive mechanism (5) is provided corresponding to one side of the furnace body (1) and is connected to the saggar conveying roller (4) in a driving manner; a furnace chamber gas supply mechanism (6) for supplying gas to the furnace chamber is characterized in that the The furnace air supply mechanism (6) comprises an air supply machine (61), an air bleed main pipe (62), a side air supply branch pipe (63), an upper furnace air supply device (64), a lower furnace air supply device (65) and a furnace chamber Left and right air supply devices (66), the air supply machine (61) is supported on the floor along with one side of the furnace body (1), one end of the air bleed main pipe (62) and the air supply of the air supply machine (61) The air outlet of the air supply machine (61) is connected to the air outlet of the air supply machine, and the other end is closed. connected, and a side gas supply branch valve (631) and a flowmeter (632) are connected in series at the lower end of the side gas supply branch pipe (63), and the side gas supply branch pipe valve (631) is located below the flowmeter (632) , and the upper end of the side gas supply branch pipe (63) is connected with the left and right gas supply device (66) of the furnace chamber, and the left and right gas supply device (66) of the furnace chamber is connected with the left and right sides of the furnace body (1) and communicated with the furnace chamber, The gas supply device (64) above the furnace is connected to the side gas supply branch pipe (63) and corresponds to the upper part of the furnace, and the gas supply device (65) under the furnace is connected to the side gas supply at a position corresponding to the upper part of the flow meter (632). The branch pipes (63) are connected and correspond to the lower part of the furnace.
The electronic kiln with uniform gas supply function according to claim 1, wherein the gas supply machine is a fan or a compressor, and the gas storage source is a nitrogen storage tank, a hydrogen storage tank, a nitrogen-hydrogen mixture Gas storage tanks, inert gas storage tanks or oxygen storage tanks.
The electronic kiln with uniform gas supply function according to claim 1, characterized in that an upper left air inlet port (11a) and a lower left air inlet port (11b) are provided on the left side of the furnace body (1), The right side of the furnace body (1) is provided with an upper right air inlet port (11c) and a lower right air inlet port (11d), which correspond to those provided on the upper part of the furnace body (1) and are connected with the side air supply branch pipe (63). ) connected to the gas supply device (64) on the furnace chamber at the same time with the upper left inlet port (11a) and the upper right inlet port (11c) or with the lower left inlet port (11b) and the lower right inlet port (11d) at the same time connect.
The electronic kiln with uniform gas supply function according to claim 3, characterized in that the gas supply device (64) on the furnace chamber comprises a gas feed pipe (641), a three-way connector (642), a left branch pipe (643) ), the right shunt pipe (644) and the gas inlet pipe (645) on the furnace, one end of the gas feed pipe (641) is connected with the middle of the side gas supply branch pipe (63), and the other end of the gas feed pipe (641) is connected with the tee The head (642) is connected, one end of the left shunt pipe (643) is connected with the upper left air inlet port (11a) or the lower left air inlet port (11b), and the other end extends upward to the top of the furnace body (1) and Connected with the tee connector (642), one end of the right shunt pipe (644) is connected to the upper right air inlet port (11c) or the lower right air inlet port (11d), while the other end extends upward to the furnace body (1). ) and connected with the tee connector (642), the upper air inlet pipe (645) of the furnace is connected between the upper left air inlet port (11a) and the upper right air inlet port (11c) in the furnace chamber or connected to the lower left air inlet Between the interface (11b) and the lower right air inlet interface (11d), the upper furnace air intake pipe (645) faces the lower side and is spaced apart from the furnace upper air intake pipe outlet hole (6451) in the area corresponding to the furnace.
The electronic kiln with uniform gas supply function according to claim 4, characterized in that a left shunt hose (6431) is connected in series on the pipeline of the left shunt pipe (643), and the right shunt pipe is connected in series A right shunt hose (6441) is connected in series on the pipeline of (644).
The electronic kiln with uniform gas supply function according to claim 1, characterized in that the lower gas supply device (65) in the furnace comprises a lower gas feed pipe (651) and a lower gas inlet pipe (652) in the furnace, and the lower gas feed pipe One end of (651) is connected to the side air intake branch pipe (63) and communicated with the side air intake branch pipe (63), and the other end of the lower air feed pipe (651) is connected to one end of the lower air feed pipe transition hose (6511), The other end of the lower gas feed pipe transition hose (6511) is connected to one end of the lower gas inlet pipe (652) in the furnace, and the other end of the lower gas inlet pipe (652) in the furnace is connected upwardly with a plurality of branch pipes of the lower gas inlet pipe in the furnace (6521), the branch pipe (6521) of the lower gas inlet pipe of the furnace reaches into the furnace bottom lining of the furnace and communicates with the furnace.
The electronic kiln with uniform gas supply function according to claim 1, characterized in that the left and right gas supply devices (66) in the furnace chamber comprise a shunt gas supply tee joint (661), a left shunt gas supply pipe (662) and The right shunt gas supply pipe (663), the upper end of the side gas supply branch pipe (63) extends to the top of the furnace body (1) and is connected with the shunt pipe gas supply tee joint (661), and the left shunt gas supply pipe (662) The upper end extends to the top of the furnace body (1) and is connected with the shunt pipe gas supply tee joint (661), and the lower end is matched with the left air inlet port (12) of the furnace body, and the left air inlet port (12) is corresponding to The position between the upper heating device (2) and the left end of the lower heating device (3) is arranged on the left side of the furnace body (1) and communicates with the furnace chamber, and the upper end of the right shunt gas supply pipe (663) extends The top of the furnace body (1) is connected with the air supply tee joint (661) of the shunt pipe, and the lower end is matched with the right air inlet port (13) of the furnace body, and the right air inlet port (13) of the furnace body is corresponding to the upper part. The position between the heating device (2) and the right end of the lower heating device (3) is arranged on the right side of the furnace body (1) and communicates with the furnace chamber.
The electronic kiln with uniform gas supply function according to claim 7, characterized in that a left branch gas supply pipe regulating valve (6621) is provided on the pipeline of the left branch gas supply pipe (662) and a left side gas supply pipe is also connected in series The split air supply pipe hose (6622), the position of the left split gas supply pipe regulating valve (6621) on the left split gas supply pipe (662) is located at the left air inlet port (12) of the furnace body and the left split gas supply pipe hose (6622) ); a right shunt air supply pipe regulating valve (6631) is provided on the pipeline of the right shunt air supply pipe (663) and a right shunt air supply pipe hose (6632) is also connected in series, and the right shunt air supply pipe regulating valve (6632) is connected in series. 6631) The position on the right shunt air supply pipe (663) is located between the furnace body right air inlet port (13) and the right shunt air supply pipe hose (6632); the furnace body left air inlet port (12) and The furnace body left air inlet interface air cavity cover (121) fixed on the left side of the furnace body (1) is matched and communicated, and the left air cavity cover of the furnace body left air inlet interface air cavity cover (121) The shell air outlet (1211) communicates with the furnace chamber; the furnace body right air inlet interface (13) is connected to the furnace body right air inlet interface air cavity cover (131) fixed on the right side of the furnace body (1). The right air cavity cover air outlet (1311) of the right air inlet port air cavity cover (131) of the furnace body communicates with the furnace chamber.
The electronic kiln with a uniform gas supply function according to claim 1, characterized in that it is on the left side of the furnace body (1) and in the saggar corresponding to the saggar conveying roller (4) drivingly connected The position of the bowl conveying roller drive mechanism (5) has a motor support (14), a transmission wheel support (15) and a saggar conveying roller drive support (16), the motor support (14) and the furnace body at the bottom of the furnace body (1). The left side of the supporting chassis (17) is fixed, the transmission wheel bracket (15) is fixed on the left side of the furnace body (1) and corresponds to the top of the motor bracket (14), and the saggar conveying roller drive bracket (16) is also fixed on the The left side of the furnace body (1) corresponds to the upper part of the transmission wheel bracket (15); the saggar conveying roller drive mechanism (5) is distributed on the motor bracket (14), the transmission wheel bracket (15) and the saggar conveying on the roller drive bracket (16).
The electronic kiln with uniform gas supply function according to claim 9, characterized in that the saggar conveying roller drive mechanism (5) comprises a motor (51), a motor drive sprocket (52), a transition drive sprocket shaft seat (53), transition drive sprocket (54), reduction box (55), reduction box power input sprocket (56), reduction box power output sprocket (57), saggar conveying roller drive sprocket (58), The first transmission chain I (59a), the second transmission chain II (59b) and the third transmission chain III (59c), the motor (51) is arranged on the motor bracket (14), and the motor drive sprocket (52) is fixed On the motor power output shaft (511) of the motor (51), the transition drive sprocket shaft seat (53) is arranged on the drive wheel bracket (15) in a paired state, and the transition drive sprocket (54) is a double row chain and fixed on the transition drive sprocket shaft (541), and the transition drive sprocket shaft (541) is rotatably supported on the transition drive sprocket shaft seat (53), and the reduction box (55) is fixed on the saggar conveying roller drive On the bracket (16), the reduction box power input sprocket (56) is fixed on the reduction box power input shaft of the reduction box (55), and the reduction box power output sprocket (57) is fixed on the reduction box power of the reduction box (55). On the output shaft, the drive sprocket (58) for the saggar conveying roller is a double row sprocket and is fixed to the left end of the saggar conveying roller (4), and the saggar conveying roller drives the sprocket on the adjacent saggar conveying roller (4). (58) are connected by a transition chain, the lower end of the first transmission chain I (59a) is sleeved on the motor drive sprocket (52), the upper end is sleeved on the transition transmission sprocket (54), and the second transmission chain The lower end of II (59b) is sleeved on the transition drive sprocket (54), the upper end is sleeved on the reduction box power input sprocket (56), and the upper end of the third transmission chain III (59c) is sleeved on the reduction box power output. The lower end of the sprocket (57) is sleeved on the drive sprocket (58) of the saggar conveying roller.