CN215885467U - Loading and unloading device for chip detection - Google Patents

Loading and unloading device for chip detection Download PDF

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Publication number
CN215885467U
CN215885467U CN202121417317.7U CN202121417317U CN215885467U CN 215885467 U CN215885467 U CN 215885467U CN 202121417317 U CN202121417317 U CN 202121417317U CN 215885467 U CN215885467 U CN 215885467U
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axis
assembly
cylinder
clamping
chip
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CN202121417317.7U
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王珲荣
晁阳升
梁永鑫
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Hunan Aochuangpu Technology Co ltd
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Hunan Aochuangpu Technology Co ltd
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Abstract

The utility model relates to a loading and unloading device for chip detection, which comprises a base, a bin mechanism, a cross beam, a conveying mechanism and a clamping manipulator. The crossbeam is installed on the base through two stands, and feed bin mechanism is used for depositing the chip. The conveying mechanism is arranged on the cross beam and can realize x-axis and z-axis movement. The clamping mechanical arm is arranged on the conveying mechanism, and the clamping mechanical arm clamps the chip with the material box from the material bin mechanism and places the chip on the detection station. The discharging process after the detection is the reverse operation of the feeding process, and the detected chips are placed back into the material box again. The feeding and discharging device for chip detection can be used in cooperation with chip detection equipment, so that the beat of the detection equipment is effectively accelerated, and the working efficiency of chip detection is improved. The whole feeding and discharging process does not need manual participation, and the automation degree of feeding and discharging is improved, so that the working efficiency is improved. The chip is prevented from being damaged in the feeding and discharging process, and the defective rate of the chip is reduced.

Description

Loading and unloading device for chip detection
Technical Field
The utility model relates to the technical field of chip detection, in particular to a loading and unloading device for chip detection.
Background
After the integrated circuit chip finished product is produced, in order to avoid the pollution of the environment to the chip surface, the chip is directly packaged in the material box. Finished chips in the material box can be packaged and put in storage after detection is carried out to ensure that the finished chips are qualified, the detection content comprises physical defect detection, magnetic induction detection and the like, and chips which are not qualified are recovered.
When the chip is detected, manual carrying and feeding are adopted, the automation degree of the feeding process is low, and the labor cost is high. Artifical material loading inefficiency, unable and high-efficient check out test set cooperation, artifical material loading still can cause the chip to damage, improves the defective rate of product.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
In view of the above disadvantages and shortcomings of the prior art, the present invention provides a loading and unloading apparatus for chip detection, which solves the technical problem of low automation degree of chip loading in the chip detection process.
(II) technical scheme
In order to achieve the above object, the loading and unloading device for chip detection of the present invention comprises:
a base seat, a plurality of fixing holes and a plurality of fixing holes,
the bin mechanism is arranged on the base and used for storing the chips to be detected and detected;
the cross beam is arranged on the base;
the conveying mechanism is arranged on the cross beam in a sliding mode and can move in the x-axis direction and the z-axis direction, and the x-axis direction and the z-axis direction are perpendicular to each other;
and the clamping manipulator is arranged on the conveying mechanism and can clamp the chip.
Optionally, the transport mechanism comprises an x-axis transport assembly and a z-axis transport assembly;
the x-axis conveying assembly is arranged on the cross beam in a sliding mode through a first guide rail, and the moving direction of the x-axis conveying assembly is horizontal;
the z-axis conveying assembly is arranged on the x-axis conveying assembly in a sliding mode through a second guide rail, and the moving direction of the z-axis conveying assembly is vertical.
Optionally, the x-axis transport assembly comprises an x-axis drive unit, an x-axis lead screw assembly, and an x-axis transport base plate;
the x-axis driving unit and the x-axis lead screw component are both arranged on the cross beam, the x-axis driving unit can drive the lead screw of the x-axis lead screw component to rotate, and the lead screw of the x-axis lead screw component is horizontally arranged;
the x-axis conveying bottom plate is connected with the first guide rail in a sliding mode, and the x-axis conveying bottom plate is connected with a sliding block of the x-axis lead screw component; a second guide rail is arranged on the x-axis conveying bottom plate and is vertically arranged;
optionally, the z-axis transport assembly comprises a z-axis drive unit, a z-axis screw assembly, and a z-axis transport base plate;
the z-axis driving unit and the z-axis screw rod assembly are both arranged on the x-axis conveying bottom plate, the z-axis driving unit can drive a screw rod of the z-axis screw rod assembly to rotate, and the screw rod of the z-axis screw rod assembly is vertically arranged;
the z-axis conveying bottom plate is connected with the second guide rail in a sliding mode, and the z-axis conveying bottom plate is connected with the sliding block of the z-axis lead screw assembly.
Optionally, the clamping robot comprises a clamping cylinder and a clamping assembly;
the cylinder body of the clamping cylinder is arranged on the conveying mechanism, and the piston rod of the clamping cylinder is vertically arranged;
a cylinder guide rail is arranged on the cylinder body of the clamping cylinder along the vertical direction;
the clamping assembly is connected with a piston rod of the clamping cylinder, the clamping assembly is connected with the cylinder guide rail in a sliding mode, and the clamping assembly is used for clamping the chip.
Optionally, the clamping assembly comprises a cylinder mounting plate and a clamping finger cylinder;
the cylinder mounting plate is connected with the cylinder guide rail in a sliding manner and is connected with a piston rod of the clamping cylinder;
the cylinder body of centre gripping finger cylinder set up in on the cylinder mounting panel, the cylinder body level of centre gripping finger cylinder sets up, the gas claw orientation of centre gripping finger cylinder the feed bin mechanism.
Optionally, the clamping assembly further comprises a plurality of suction claws, the suction claws are connected with the pneumatic claws of the clamping finger cylinder in a one-to-one correspondence manner, and a plurality of suckers are arranged on the suction claws.
Optionally, the bin mechanism comprises a bin guide rail, a bin assembly and a bin driving assembly;
the bin guide rail is arranged on the base along the y-axis direction, the x-axis direction and the z-axis direction are both vertical to the y-axis direction, the bin assembly is connected with the bin guide rail in a sliding mode, and the bin assembly is used for storing the chips;
the bin drive assembly is disposed on the base and is capable of driving the bin assembly to move along the bin guide rail.
Optionally, the bin assembly comprises a rack and a moving platform;
the moving platform is connected with the stock bin guide rail in a sliding manner;
the material rack is detachably arranged on the moving platform, a plurality of storage units are arranged on the material rack, and material boxes are wrapped outside the chips and are placed in the storage units.
Optionally, a plurality of magnetic parts and a plurality of positioning pins are arranged on the mobile platform, and the magnetic parts and the positioning pins are detachably connected with the material rack.
(III) advantageous effects
The feeding and discharging device for chip detection can be used in cooperation with chip detection equipment, so that the beat of the detection equipment is effectively accelerated, and the working efficiency of chip detection is improved. The whole feeding and discharging process does not need manual participation, and the automation degree of feeding and discharging is improved, so that the working efficiency is improved. The chip is prevented from being damaged in the feeding and discharging process, and the defective rate of the chip is reduced.
Drawings
FIG. 1 is a schematic view of an installation structure of a loading and unloading device for chip detection according to the present invention;
FIG. 2 is a schematic structural diagram of a conveying mechanism of a loading and unloading device for chip detection according to the present invention;
FIG. 3 is a schematic structural view of a clamping manipulator of the loading and unloading device for chip detection according to the present invention;
FIG. 4 is a schematic structural diagram of a bin mechanism of a loading and unloading device for chip detection according to the present invention;
fig. 5 is a schematic structural view of a moving platform of the loading and unloading device for chip detection according to the present invention.
[ description of reference ]
1000: a base; 101: a magazine;
11: a conveyance mechanism; 111: a cross beam;
1121: an x-axis drive unit; 1122: an x-axis screw assembly; 1123: an x-axis transport floor;
1131: a z-axis drive unit; 1132: a z-axis screw assembly; 1133: a z-axis transport base plate;
12: clamping the manipulator; 121: a clamping cylinder; 122: a cylinder mounting plate; 123: a finger clamping cylinder; 124: a cylinder guide rail; 125: a suction claw;
6: a stock bin mechanism; 61: a material rack; 62: a mobile platform; 63: positioning pins; 64: a magnetic member;
81: a first guide rail; 87: feed bin guide rail.
Detailed Description
For the purpose of better explaining the present invention and to facilitate understanding, the present invention will be described in detail by way of specific embodiments with reference to the accompanying drawings. In which the terms "upper", "lower", etc. are used herein with reference to the orientation of fig. 1.
For a better understanding of the above-described technical solutions, exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the utility model are shown in the drawings, it should be understood that the utility model can be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.
As shown in fig. 1, the present invention provides a loading and unloading apparatus for chip detection, which includes a base 1000, a bin mechanism 6, a beam 111, a conveying mechanism 11, and a clamping robot 12. The beam 111 is mounted on the base 1000 through two upright posts, and the stock bin mechanism 6 is used for storing chips to be detected and detected. The chips placed in the stock bin mechanism 6 are all packaged with independent material boxes 101, and are packaged in the material boxes 101 in the chip feeding process, and only the material boxes 101 can be opened in the detection process. The transport mechanism 11 is mounted on the beam 111, and the transport mechanism 11 is capable of moving in the x-axis direction and the z-axis direction, the x-axis direction being horizontal and the z-axis direction being vertical. The clamping mechanical arm 12 is installed on the conveying mechanism 11, the clamping mechanical arm 12 completes the movement of the x axis and the z axis along with the conveying of the conveying mechanism 11, and the clamping mechanical arm 12 picks up the chip with the material box 101 from the bin mechanism 6 and places the chip on the detection station. The discharging process after the detection is the reverse operation of the feeding process, and the detected chips are put back into the magazine 101. The feeding and discharging device for chip detection can be used in cooperation with chip detection equipment, so that the beat of the detection equipment is effectively accelerated, and the working efficiency of chip detection is improved. The whole feeding and discharging process does not need manual participation, and the automation degree of feeding and discharging is improved, so that the working efficiency is improved. The chip is prevented from being damaged in the feeding and discharging process, and the defective rate of the chip is reduced.
As shown in fig. 2, the transport mechanism 11 includes an x-axis transport assembly and a z-axis transport assembly. The cross beam 111 is provided with a first guide rail 81, and the first guide rail 81 is horizontally arranged. The x-axis transport assembly includes an x-axis drive unit 1121, an x-axis lead screw assembly 1122, and an x-axis transport base plate 1123. The x-axis driving unit 1121 and the x-axis lead screw assembly 1122 are both fixedly mounted on the cross beam 111, the x-axis driving unit 1121 and the x-axis lead screw assembly 1122 are in driving connection to drive a lead screw of the x-axis lead screw assembly 1122 to rotate, and the x-axis lead screw assembly 1122 is horizontally arranged. The x-axis driving unit 1121 is preferably a servo motor, and achieves precise operation and positioning. The x-axis transport base plate 1123 is slidably connected to the first guide rail 81, and is restricted by the first guide rail 81, and the x-axis transport base plate 1123 is caught on the first guide rail 81 without falling. The x-axis conveying bottom plate 1123 is connected with a slider of the x-axis lead screw assembly 1122, the x-axis driving unit 1121 drives a lead screw of the x-axis lead screw assembly 1122 to rotate, and the x-axis conveying bottom plate 1123 moves along the first guide rail 81, so that movement in the x-axis direction is realized. Likewise, the z-axis transport assembly includes a z-axis drive unit 1131, a z-axis wire rod assembly 1132, and a z-axis transport base plate 1133. The x-axis transport base plate 1123 is provided with a second guide rail, which is vertically disposed. The z-axis driving unit 1131 and the z-axis lead screw assembly 1132 are both installed on the x-axis conveying base plate 1123, the z-axis driving unit 1131 is in driving connection with the z-axis lead screw assembly 1132 to drive the lead screw of the z-axis lead screw assembly 1132 to rotate, and the z-axis lead screw assembly 1132 is vertically arranged. The z-axis drive unit 1131 is preferably a servo motor to achieve precise operation and positioning. The z-axis transport base 1133 is slidably coupled to the second rail, and the z-axis transport base 1133 is coupled to the slider of the z-axis wire assembly 1132. The z-axis transport base 1133 moves along the second guide rail by the z-axis drive unit 1131, thereby realizing the movement in the z-axis direction. The Z-axis conveying assembly needs to overcome self gravity when moving along the Z-axis direction, so that the Z-axis conveying assembly adopts a reverse screw rod guide rail assembly, the space is saved, meanwhile, the rigidity is better, and the long-term stable operation of the Z-axis conveying assembly is facilitated. The two driving motors are used for driving the movement in two directions, the structure is simple, the occupied space is small, and the stability is strong.
As shown in fig. 3, the clamp robot 12 includes a clamp cylinder 121, a cylinder mounting plate 122, and a clamp finger cylinder 123. The cylinder body of the clamping cylinder 121 is mounted on the Z-axis conveying bottom plate 1133, and the piston rod of the clamping cylinder 121 is vertically arranged downwards, so that the stroke of the clamping manipulator 12 in the Z direction is prolonged, and the manipulator can take each magazine 101 in the stock bin mechanism 6. The cylinder body of the clamping cylinder 121 is provided with a cylinder guide rail 124, and the cylinder guide rail 124 is vertically arranged. The cylinder mounting plate 122 is slidably connected to the cylinder guide rail 124, the cylinder mounting plate 122 is connected to the piston rod of the clamping cylinder 121, and the cylinder mounting plate 122 moves along the cylinder guide rail 124 under the pushing of the clamping cylinder 121. The cylinder body of centre gripping finger cylinder 123 is installed on cylinder mounting panel 122, the cylinder body level of centre gripping finger cylinder 123 sets up, when transport mechanism 11 moves the position of feed bin mechanism 6 and carries out the material loading, the gas claw of centre gripping finger cylinder 123 is towards feed bin mechanism 6, install on the relative face of two gas claws and inhale claw 125, install the sucking disc on the relative face of two inhale claw 125, be used for adsorbing box 101's box body and lid respectively, thereby press from both sides the magazine 101 that needs the detection from feed bin mechanism 6 through the gas claw of centre gripping finger cylinder 123. When the two air jaws are disengaged, the body and lid of magazine 101 separate, exposing the chip.
As shown in fig. 4, the magazine mechanism 6 includes a rack 61, a moving platform 62, a magazine driving assembly, and a magazine guide 87. The bin guide rail 87 and the bin driving assembly are both mounted on the base 1000, the bin driving assembly is preferably an air cylinder, a piston rod of the air cylinder and the bin guide rail 87 are both parallel to the y-axis direction, and the x-axis direction and the z-axis direction are both perpendicular to the y-axis direction. The moving platform 62 is slidably mounted on the bin guide rail 87, and a piston rod of the bin driving assembly is connected to the moving platform 62, so that the moving platform 62 is driven to move along the bin guide rail 87 by the bin driving assembly. The material rack 61 is detachably mounted on the moving platform 62 and used for storing chips to be detected and detected, and a material box 101 is wrapped outside the chips. The detection chip is placed in the material box 101 formed by the box body and the box cover, the material box 101 is placed in the material rack 61, and the material rack 61 can contain a plurality of material boxes 101. After the stacks 61 are filled, the stacks 61 with the magazines 101 are mounted on the movable platform 62. As shown in fig. 5, a plurality of positioning pins 63 and a plurality of magnetic attracting elements 64 are mounted on the moving platform 62. Preferably, there are two locating pins, one 63 being a cylindrical pin and the other 63 being a wedge pin. The magnetically attractive element is preferably two electromagnets spaced apart on the fixed platform 62. After the material rack 61 is positioned, two electromagnets arranged in the moving platform 62 are electrified to adsorb and fix the material rack 61.
The feeding process comprises the following steps: the x-axis conveying assembly operates to drive the x-axis conveying bottom plate 1123 and the assemblies mounted on the x-axis conveying bottom plate to move right above the position of the material box 101 to be grabbed, the clamping cylinder 121 extends out to drive the clamping finger cylinder 123 to move downwards, the z-axis conveying assembly operates to drive the clamping finger cylinder 123 to move downwards to the horizontal setting position of the material box 101 to be grabbed, meanwhile, the clamping finger cylinder 123 acts to drive the air claws to open, the material bin driving assembly acts to move forwards to drive the material rack 61 positioned and fixed on the material rack to move, meanwhile, the material box 101 to be grabbed moves between the two air claws, the clamping finger cylinder 123 acts again to close the air claws, the material box 101 is clamped, the material bin driving assembly acts again to move backwards and return to the original position, and therefore, one material box 101 is taken out of the material rack 61. After the material box 101 is taken out, the x-axis conveying assembly operates to drive the taken-out material box 101 to move to the detection station. The unloading process is the reverse operation of material loading process, and whole unloading process all need not artifical the participation, has improved the degree of automation of unloading to work efficiency has been improved. The chip is prevented from being damaged in the feeding and discharging process, and the defective rate of the chip is reduced.
In the description of the present invention, it is to be understood that the terms "first", "second" and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium; either as communication within the two elements or as an interactive relationship of the two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, a first feature may be "on" or "under" a second feature, and the first and second features may be in direct contact, or the first and second features may be in indirect contact via an intermediate. Also, a first feature "on," "above," and "over" a second feature may be directly or obliquely above the second feature, or simply mean that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lower level than the second feature.
In the description herein, the description of the terms "one embodiment," "some embodiments," "an embodiment," "an example," "a specific example" or "some examples" or the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it should be understood that the above embodiments are illustrative and not restrictive, and that those skilled in the art may make changes, modifications, substitutions and alterations to the above embodiments without departing from the scope of the present invention.

Claims (10)

1. The utility model provides a last unloader that chip detected, its characterized in that, last unloader that chip detected includes:
a base seat, a plurality of fixing holes and a plurality of fixing holes,
the bin mechanism is arranged on the base and used for storing the chips to be detected and detected;
the cross beam is arranged on the base;
the conveying mechanism is arranged on the cross beam in a sliding mode and can move in the x-axis direction and the z-axis direction, and the x-axis direction and the z-axis direction are perpendicular to each other;
and the clamping manipulator is arranged on the conveying mechanism and can clamp the chip.
2. The loading and unloading apparatus for chip detection as claimed in claim 1, wherein the transport mechanism comprises an x-axis transport assembly and a z-axis transport assembly;
the x-axis conveying assembly is arranged on the cross beam in a sliding mode through a first guide rail, and the moving direction of the x-axis conveying assembly is horizontal;
the z-axis conveying assembly is arranged on the x-axis conveying assembly in a sliding mode through a second guide rail, and the moving direction of the z-axis conveying assembly is vertical.
3. The loading and unloading apparatus for chip detection as claimed in claim 2, wherein the x-axis conveying assembly comprises an x-axis driving unit, an x-axis lead screw assembly and an x-axis conveying base plate;
the x-axis driving unit and the x-axis lead screw component are both arranged on the cross beam, the x-axis driving unit can drive the lead screw of the x-axis lead screw component to rotate, and the lead screw of the x-axis lead screw component is horizontally arranged;
the x-axis conveying bottom plate is connected with the first guide rail in a sliding mode, and the x-axis conveying bottom plate is connected with a sliding block of the x-axis lead screw component; and a second guide rail is arranged on the x-axis conveying bottom plate and is vertically arranged.
4. The loading and unloading apparatus for chip inspection according to claim 3, wherein the z-axis conveying assembly comprises a z-axis driving unit, a z-axis lead screw assembly and a z-axis conveying base plate;
the z-axis driving unit and the z-axis screw rod assembly are both arranged on the x-axis conveying bottom plate, the z-axis driving unit can drive a screw rod of the z-axis screw rod assembly to rotate, and the screw rod of the z-axis screw rod assembly is vertically arranged;
the z-axis conveying bottom plate is connected with the second guide rail in a sliding mode, and the z-axis conveying bottom plate is connected with the sliding block of the z-axis lead screw assembly.
5. The loading and unloading device for chip detection according to any one of claims 1-4, wherein the clamping robot comprises a clamping cylinder and a clamping assembly;
the cylinder body of the clamping cylinder is arranged on the conveying mechanism, and the piston rod of the clamping cylinder is vertically arranged;
a cylinder guide rail is arranged on the cylinder body of the clamping cylinder along the vertical direction;
the clamping assembly is connected with a piston rod of the clamping cylinder, the clamping assembly is connected with the cylinder guide rail in a sliding mode, and the clamping assembly is used for clamping the chip.
6. The loading and unloading device for chip detection as recited in claim 5, wherein the clamping assembly comprises a cylinder mounting plate and a clamping finger cylinder;
the cylinder mounting plate is connected with the cylinder guide rail in a sliding manner and is connected with a piston rod of the clamping cylinder;
the cylinder body of centre gripping finger cylinder set up in on the cylinder mounting panel, the cylinder body level of centre gripping finger cylinder sets up, the gas claw orientation of centre gripping finger cylinder the feed bin mechanism.
7. The loading and unloading device for chip detection as recited in claim 6, wherein the clamping assembly further comprises a plurality of suction claws, the plurality of suction claws are connected with the pneumatic claws of the finger clamping cylinder in a one-to-one correspondence, and a plurality of suction cups are disposed on the suction claws.
8. The loading and unloading device for chip detection according to any one of claims 1-4, wherein the bin mechanism comprises a bin guide rail, a bin assembly and a bin driving assembly;
the bin guide rail is arranged on the base along the y-axis direction, the x-axis direction and the z-axis direction are both vertical to the y-axis direction, the bin assembly is connected with the bin guide rail in a sliding mode, and the bin assembly is used for storing the chips;
the bin drive assembly is disposed on the base and is capable of driving the bin assembly to move along the bin guide rail.
9. The loading and unloading device for chip detection according to claim 8, wherein the bin assembly comprises a rack and a moving platform;
the moving platform is connected with the stock bin guide rail in a sliding manner;
the material rack is detachably arranged on the moving platform, a plurality of storage units are arranged on the material rack, and material boxes are wrapped outside the chips and are placed in the storage units.
10. The loading and unloading device for chip detection as claimed in claim 9, wherein the moving platform is provided with a plurality of magnetic attracting parts and a plurality of positioning pins, and the magnetic attracting parts and the positioning pins are detachably connected to the rack.
CN202121417317.7U 2021-06-24 2021-06-24 Loading and unloading device for chip detection Active CN215885467U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121417317.7U CN215885467U (en) 2021-06-24 2021-06-24 Loading and unloading device for chip detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121417317.7U CN215885467U (en) 2021-06-24 2021-06-24 Loading and unloading device for chip detection

Publications (1)

Publication Number Publication Date
CN215885467U true CN215885467U (en) 2022-02-22

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Application Number Title Priority Date Filing Date
CN202121417317.7U Active CN215885467U (en) 2021-06-24 2021-06-24 Loading and unloading device for chip detection

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114408577A (en) * 2022-02-25 2022-04-29 江苏京创先进电子科技有限公司 Wafer loading method and wafer loading device
CN116727258A (en) * 2023-08-12 2023-09-12 启翊创智能科技(苏州)有限公司 Chip outward appearance check out test set

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114408577A (en) * 2022-02-25 2022-04-29 江苏京创先进电子科技有限公司 Wafer loading method and wafer loading device
CN116727258A (en) * 2023-08-12 2023-09-12 启翊创智能科技(苏州)有限公司 Chip outward appearance check out test set
CN116727258B (en) * 2023-08-12 2023-11-17 启翊创智能科技(苏州)有限公司 Chip outward appearance check out test set

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