CN215481247U - 一种纳米真空镀膜设备用工件自动上料机构 - Google Patents
一种纳米真空镀膜设备用工件自动上料机构 Download PDFInfo
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- CN215481247U CN215481247U CN202122142154.2U CN202122142154U CN215481247U CN 215481247 U CN215481247 U CN 215481247U CN 202122142154 U CN202122142154 U CN 202122142154U CN 215481247 U CN215481247 U CN 215481247U
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 26
- 230000007246 mechanism Effects 0.000 title claims abstract description 14
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- 238000000576 coating method Methods 0.000 description 7
- 230000001360 synchronised effect Effects 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 241000251468 Actinopterygii Species 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
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Effective date of registration: 20240204 Address after: Room 5408, Building 5, No. 568 Jinyang Road, Luoxing Street, Jiashan County, Jiaxing City, Zhejiang Province, 314100 (Residence Declaration) Patentee after: JIAXING HAOYU PLASMA TECHNOLOGY Co.,Ltd. Country or region after: China Address before: 314100 floor 3, building 2, No. 38, zhuangchi Middle Road, ganyao Town, Jiashan County, Jiaxing City, Zhejiang Province Patentee before: Zhejiang Yiyuan Nano Technology Co.,Ltd. Country or region before: China |
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