CN215148056U

CN215148056U - Silicon rod transfer device and silicon rod grinding machine

Info

Publication number: CN215148056U
Application number: CN202023098416.1U
Authority: CN
Inventors: 李鑫; 钱春军; 曹奇峰; 梁文; 朱勤超
Original assignee: Tiantong Rijin Precision Technology Co ltd
Current assignee: Tiantong Rijin Precision Technology Co ltd
Priority date: 2020-08-28
Filing date: 2020-12-21
Publication date: 2021-12-14
Anticipated expiration: 2030-12-21
Also published as: CN114102376B; CN114102376A; CN214186720U

Abstract

The application discloses silicon rod transfer device and silicon rod grinding machine, wherein, silicon rod transfer device includes silicon rod material loading bearing structure, centering adjustment mechanism and feeds actuating mechanism, can realize the centering operation of silicon rod in the loading work of the at least one processing position that the silicon rod that will treat the material loading is transferred to at least one silicon rod processing equipment and corresponds by the loading position for the axial lead of silicon rod and the central line of corresponding at least one silicon rod processing equipment are on same straight line, in order to do benefit to subsequent silicon rod processing operation, for correlation technique, have simple structure, the operation is convenient, advantages such as centering is accurate and high-efficient.

Description

Silicon rod transfer device and silicon rod grinding machine

Technical Field

The application relates to the technical field of silicon workpiece processing, in particular to a silicon rod transfer device and a silicon rod grinding machine.

Background

At present, with the importance and the openness of the society on the utilization of green renewable energy sources, the field of photovoltaic solar power generation is more and more valued and developed. In the field of photovoltaic power generation, conventional crystalline silicon solar cells are fabricated on high quality silicon wafers that are cut and subsequently processed by multi-wire saw from a pulled or cast silicon ingot.

In the conventional silicon wafer manufacturing process, taking a single crystal silicon product as an example, the general working procedures may include: firstly, a silicon rod cutting machine is used for cutting the original long silicon rod to form a plurality of sections of short silicon rods; after the truncation is finished, performing the operation of squaring the truncated short silicon rod by using a silicon rod squaring machine to form a single crystal silicon rod; then, processing operations such as surface grinding, chamfering and the like are carried out on each silicon rod, so that the surface of each silicon rod is shaped to meet the corresponding requirements on flatness and dimensional tolerance; and subsequently, slicing the silicon rod to obtain a silicon wafer.

When the silicon rod processing device is used to perform a corresponding processing operation (e.g., a grinding operation) on the silicon rod, a position calibration of the silicon rod to be loaded is first performed, which may be, for example, a calibration of the axis of the silicon rod. In the related art, a special silicon rod axis calibration device is not provided or the existing silicon rod axis calibration device has a complex structure, and the problems of complex operation, low efficiency and the like exist in the silicon rod position calibration.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned disadvantages of the related art, an object of the present invention is to disclose a silicon rod transfer device and a silicon rod grinding machine for solving the problems of complicated operation and low efficiency in the silicon rod position calibration in the prior art.

In order to achieve the above and other related objects, the present application discloses in a first aspect a silicon rod transfer device for use in a silicon rod processing apparatus including at least one silicon rod processing device, the silicon rod transfer device including:

the silicon rod loading and bearing structure is used for bearing a silicon rod to be loaded;

a centering adjustment mechanism for adjusting the position of the silicon rod so that the axis of the silicon rod corresponds to a predetermined center line; and

and the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and the silicon rod borne by the silicon rod feeding bearing structure to move from the loading zone to at least one processing zone corresponding to the at least one silicon rod processing device along the feeding direction.

The application discloses silicon rod transfer device, including silicon rod material loading bearing structure, centering adjustment mechanism, and feed actuating mechanism, can realize the centering operation of silicon rod in the loading work that the silicon rod that will treat the material loading is transferred to at least one processing position that at least one silicon rod processing equipment corresponds by the loading position, make the axial lead of silicon rod and the central line of corresponding at least one silicon rod processing equipment on same straight line, in order to do benefit to subsequent silicon rod processing operation, for relevant art, have simple structure, the operation is convenient, advantages such as centering is accurate and high-efficient.

In certain embodiments of the first aspect of the present application, the centering adjustment mechanism comprises a vertical lifting mechanism for driving the silicon rod loading support structure and the silicon rod supported thereby to perform a vertical lifting motion so that the axis of the silicon rod is aligned with a predetermined center line in the direction of the plumb line, the predetermined center line corresponding to the clamping center line of the first silicon rod clamp.

In certain embodiments of the first aspect of the present application, the vertical lift mechanism comprises:

the vertical lifting guide rod is used for arranging the silicon rod feeding and bearing structure; and

and the vertical lifting driving unit is used for driving the silicon rod feeding bearing structure to move up and down along the vertical lifting guide rod.

In certain embodiments of the first aspect of the present application, the vertical lift drive unit comprises: the driving motor and the vertical screw rod assembly are arranged and driven by the driving motor, or the driving motor and the vertical gear rack transmission assembly are arranged and driven by the driving motor.

In certain embodiments of the first aspect of the present application, the vertical lift drive unit further comprises an auxiliary lift assembly comprising a cylinder and a lift ram connected to the cylinder.

In certain embodiments of the first aspect of the present application, the centering adjustment mechanism further comprises a height detector for detecting a silicon rod to obtain position information of an axis line of the silicon rod in a direction of a plumb line.

In certain embodiments of the first aspect of the present application, the height detector is a contact sensor or a distance measuring sensor.

In certain embodiments of the first aspect of the present application, the feed drive mechanism comprises:

the feeding guide rods are distributed along the feeding direction and are used for arranging the silicon rod feeding bearing structure; and

and the feeding driving unit is used for driving the silicon rod feeding bearing structure to transversely move along the feeding guide rod.

In certain embodiments of the first aspect of the present application, the feed drive unit comprises: the device comprises a driving motor and a screw rod assembly which is arranged along the feeding direction and driven by the driving motor, or the driving motor and a gear rack transmission assembly which is arranged along the feeding direction and driven by the driving motor.

In certain embodiments of the first aspect of the present application, the silicon rod loading carrying structure comprises a carrying base and a first loading part and a second loading part arranged opposite to each other in the feeding direction.

In certain embodiments of the first aspect of the present application, the silicon rod transfer device further comprises a first centering adjustment mechanism for changing a position of a silicon rod in a feeding direction by adjusting the first loading part and the second loading part such that an axis line of the silicon rod corresponds to a center line of the silicon rod loading bearing structure in the feeding direction.

In certain embodiments of the first aspect of the present application, the first centering adjustment mechanism comprises:

the opening and closing slide rail is arranged on the bearing base along the feeding direction and is used for arranging a first loading part and a second loading part; and

the opening and closing driving unit is used for driving the first loading part and the second loading part to move oppositely along the opening and closing slide rail so as to execute the closing action or move oppositely along the opening and closing slide rail so as to execute the opening action.

In certain embodiments of the first aspect of the present application, the opening and closing drive unit comprises:

the turntable is arranged in the central area of the bearing base through a rotating shaft;

a first drive assembly associated with the load base and the turntable and a second drive assembly associated with the load base and the turntable;

A first push-pull member associated with the turntable and the first loading member and a second push-pull member associated with the turntable and the second loading member;

when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate in the forward direction, the turntable drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move oppositely along the opening and closing slide rail; when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate reversely, the turntable drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move back to back along the opening and closing slide rail.

In certain embodiments of the first aspect of the present application, the first push-pull member is a first link, a first end of the first link is coupled to the turntable, a second end of the first link is coupled to the first loading member, the second push-pull member is a second link, a first end of the second link is coupled to the turntable, and a second end of the second link is coupled to the second loading member.

In certain embodiments of the first aspect of the present application, the first transmission assembly comprises a first cylinder, a cylinder of the first cylinder is connected with the carrying base, a piston rod of the first cylinder is connected with the turntable, the second transmission assembly comprises a second cylinder, a cylinder of the second cylinder is connected with the carrying base, and a piston rod of the second cylinder is connected with the turntable.

the bidirectional screw rod is arranged along the feeding direction and is in threaded connection with the first loading part and the second loading part at two ends; and

and the driving source is used for driving the bidirectional screw rod to rotate so as to enable the first loading part and the second loading part to move towards or away from each other along the feeding direction.

the first rack and the second rack are arranged along the feeding direction, the first rack is connected with the first loading part, and the second rack is connected with the second loading part;

the driving gear is positioned between the first rack and the second rack and meshed with the first rack and the second rack;

And the driving source is used for driving the driving gear to rotate so as to drive the first loading part connected with the first rack and the second loading part connected with the second rack to move in opposite directions or move back to back in the feeding direction.

In certain embodiments of the first aspect of the present application, the silicon rod transfer device further comprises a second centering adjustment mechanism for positioning the silicon rod in a centering region of the silicon rod loading bearing structure in the first direction by adjusting a position of the silicon rod carried by the silicon rod loading bearing structure in the first direction, wherein the first direction is perpendicular to the feeding direction.

In certain embodiments of the first aspect of the present application, the second centering adjustment mechanism comprises:

the support is arranged on the silicon rod processing platform;

the sliding rail is arranged on the bracket along a first direction;

the two ejection pieces are arranged on the sliding rail and are respectively and oppositely arranged at two sides of the bracket;

and the ejection driving unit is used for driving the two ejection pieces to move oppositely or back to back along the slide rail.

In certain embodiments of the first aspect of the present application, the ejector drive unit comprises:

the two-way screw rod is arranged along the first direction, and two ends of the two-way screw rod are respectively in threaded connection with the two ejection pieces; and

And the driving source is used for driving the bidirectional screw rod to rotate so as to enable the two pushing pieces to move in the first direction in the opposite direction or in the opposite direction.

In certain embodiments of the first aspect of the present application, the silicon rod transfer device further comprises: and the silicon rod blanking bearing structure is used for bearing the silicon rod to be blanked.

In certain embodiments of the first aspect of the present application, the silicon rod blanking carrying structure comprises an unloading part provided at the carrying base or at one of the first loading part and the second loading part.

In certain embodiments of the first aspect of the present application, the silicon rod transfer device further comprises: and the reversing mechanism is used for driving the silicon rod feeding bearing structure and the silicon rod blanking bearing structure to interchange positions.

In certain embodiments of the first aspect of the present application, the reversing mechanism includes a reversing rotary shaft disposed in a direction of the plumb line, and the reversing rotary shaft is driven to rotate by a preset angle so that the silicon rod loading bearing structure and the silicon rod unloading bearing structure interchange positions.

In certain embodiments of the first aspect of the present application, the reversing mechanism further comprises a reversing drive unit for driving the reversing shaft to rotate, the reversing drive unit comprising:

The driving gear is coupled to the driving source; and

and the driven gear is meshed with the driving gear and is connected to the reversing rotating shaft.

The present application discloses in a second aspect a silicon rod grinding machine comprising: the base is provided with a silicon rod processing platform; a processing region is arranged on the silicon rod processing platform; the silicon rod clamp is arranged at the processing position and used for clamping a silicon rod and driving the clamped silicon rod to move along a first direction; wherein the axis of the silicon rod is parallel to the first direction; the grinding device is arranged on the base and is used for grinding the silicon rod; the silicon rod transfer device as described above.

In certain embodiments of the second aspect of the present application, the silicon rod processing platform is provided with a first processing location and a second processing location, the silicon rod clamp comprises a first silicon rod clamp arranged in the first processing location and a second silicon rod clamp arranged in the second processing location, the grinding device comprises a rough grinding device for performing rough grinding operation on the silicon rod and an accurate grinding device for performing accurate grinding operation on the silicon rod.

In certain embodiments of the second aspect of the present application, the rough grinding apparatus has at least one pair of rough grinding tools and the finish grinding apparatus has at least one pair of finish grinding tools.

The application discloses silicon rod grinds machine, including frame, silicon rod anchor clamps, grinder and silicon rod transfer device, utilize silicon rod transfer device can be in the silicon rod that will treat the material loading by loading the position transfer to the loading work of the processing position that grinder corresponds realize the centering operation of silicon rod for the axial lead of silicon rod and the central line of silicon rod anchor clamps are on same straight line, in order to do benefit to subsequent silicon rod and grind the operation, for correlation technique, have simple structure, the operation is convenient, advantages such as centering accuracy and high efficiency.

Drawings

The specific features of the invention to which this application relates are set forth in the appended claims. The features and advantages of the invention to which this application relates will be better understood by reference to the exemplary embodiments described in detail below and the accompanying drawings. The brief description of the drawings is as follows:

fig. 1 is a schematic view showing the structure of a silicon rod grinder according to an embodiment of the present invention.

Fig. 2 is a top view of fig. 1.

Fig. 3 is a schematic view showing the structure of a silicon rod grinder according to another embodiment of the present invention.

Fig. 4 is a top view of fig. 3.

Fig. 5 is a schematic view showing the structure of a first silicon rod clamp in the silicon rod grinding machine according to the present application.

Fig. 6 is a schematic view illustrating a configuration of a silicon rod transfer device according to an embodiment of the present invention.

Fig. 7 is a top view of fig. 6.

Fig. 8 is a schematic view of fig. 7 with the first and second loading members removed.

Fig. 9 is a schematic view illustrating the silicon rod transfer device according to the present invention after loading a silicon rod in one embodiment.

Fig. 10 is a schematic view illustrating a centering adjustment mechanism of the silicon rod transfer device according to an embodiment of the present invention.

Fig. 11 is a partial enlarged view of fig. 3.

Detailed Description

The following description of the embodiments of the present application is provided for illustrative purposes, and other advantages and capabilities of the present application will become apparent to those skilled in the art from the present disclosure.

In the following description, several embodiments of the present application are described with reference to the accompanying drawings. It is to be understood that other embodiments may be utilized and mechanical composition, structure, and operational changes may be made without departing from the spirit and scope of the present disclosure. The following detailed description is not to be taken in a limiting sense, and the scope of embodiments of the present application is defined only by the claims of the issued patent. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. Spatially relative terms, such as "upper," "lower," "left," "right," "lower," "below," "lower," "above," "upper," and the like, may be used herein to facilitate describing one element or feature's relationship to another element or feature as illustrated in the figures.

Although the terms first, second, etc. may be used herein to describe various elements in some instances, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first silicon rod clamp may be referred to as a second silicon rod clamp, and similarly, a second silicon rod clamp may be referred to as a first silicon rod clamp, without departing from the scope of the various described embodiments. Both the first and the second silicon rod clamp are described in the context of a certain silicon rod clamp, but they are not the same silicon rod clamp unless the context clearly indicates otherwise. Similar considerations apply to the first and second guide structures, the first and second machining locations, the first and second loading members, the first and second transmission assemblies, etc.

Also, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context indicates otherwise. It will be further understood that the terms "comprises," "comprising," "includes" and/or "including," when used in this specification, specify the presence of stated features, steps, operations, elements, components, items, species, and/or groups, but do not preclude the presence, or addition of one or more other features, steps, operations, elements, components, species, and/or groups thereof. The terms "or" and/or "as used herein are to be construed as inclusive or meaning any one or any combination. Thus, "A, B or C" or "A, B and/or C" means "any of the following: a; b; c; a and B; a and C; b and C; A. b and C ". An exception to this definition will occur only when a combination of elements, functions, steps or operations are inherently mutually exclusive in some way.

In the processing of silicon materials, silicon wafers put into industrial production can be obtained through a plurality of processes, the original silicon materials are usually long silicon rods and are in cylindrical structures, and a silicon rod cutting machine is used for cutting the long silicon rods to obtain a plurality of sections of short silicon rods; cutting the cut silicon rod sections by a silicon rod cutting machine to form a single crystal silicon rod, wherein the cross section of the obtained single crystal silicon rod is similar to a rectangle (including a similar square); the surface damage of the obtained silicon single crystal rod needs to be removed, chamfering is carried out on the edge angle to eliminate the internal stress, then, the surface grinding and chamfering are carried out on the silicon single crystal rod, so that the surface shaping of the silicon single crystal rod can meet the requirements of corresponding flatness and dimensional tolerance, and the final slicing can be carried out subsequently.

In the process of grinding the silicon single crystal rod, coarse grinding and then fine grinding are needed, grinding is realized by a corresponding coarse grinding tool and a corresponding fine grinding tool respectively, in the traditional working mode, after the single silicon single crystal rod is subjected to coarse grinding in a coarse grinding working area, the silicon single crystal rod is conveyed to a fine grinding working area for fine grinding, after the fine grinding is completed, the processed silicon single crystal rod is conveyed out of the working area, the process is repeatedly operated in a large amount of grinding works, the grinding sequence of the fine grinding and the coarse grinding ensures that the silicon rod grinding machine inevitably has the grinding tool in a waiting state in the operation, for example, the fine grinding tool is in the waiting state when the coarse grinding tool is subjected to coarse grinding, the coarse grinding tool is in the waiting state when the fine grinding tool is subjected to fine grinding, and the time consumed in the grinding process is long.

In the embodiments provided herein, a three-dimensional space defined by a first direction, a second direction, and a third direction is defined for defining the direction and the operation mode between different structures, and the first direction, the second direction, and the third direction are all linear directions and are perpendicular to each other two by two. A length extending direction of the silicon rod processing apparatus, that is, a length direction when the silicon rod is placed thereon, is defined as a first direction (i.e., a front-rear direction or a transfer direction), a width extending direction of the silicon rod processing apparatus, that is, a left-right direction, is defined as a second direction (i.e., a left-right direction or a feeding direction), and a vertical direction, that is, a plumb line direction, a vertical direction, an up-down direction, or a lifting direction, is defined as a third direction.

In the related art for processing a silicon rod, several steps such as cutting, grinding, chamfering, and the like are involved.

In general, most of conventional silicon rods have a cylindrical structure, and are cut by a silicon rod cutting device so that the silicon rods have a quasi-rectangular (including a quasi-square) cross section after cutting, and the processed silicon rods have a quasi-rectangular (including a quasi-cubic) shape as a whole. Taking a single crystal silicon rod as an example, the single crystal silicon rod is obtained by cutting a raw silicon rod through a silicon rod and thereafter squaring the cut silicon rod through a silicon rod squaring device, and the raw silicon rod is generally a rod-shaped single crystal silicon grown from a melt by a czochralski method or a suspension float-zone method.

Taking a single crystal silicon rod as an example, a process for forming the single crystal silicon rod may include: firstly, a silicon rod cutting machine is used for cutting an original long silicon rod to form a plurality of sections of short silicon rods; and after the cutting is finished, cutting the cut short silicon rod by using a silicon rod cutting machine to form the silicon single crystal rod with the rectangular-like cross section. Among them, patent publications such as CN105856445A, CN105946127A, and CN105196433A are referred to as a specific embodiment of forming a multi-stage short silicon rod by cutting an original long silicon rod with a silicon rod cutting machine, and patent publication such as CN105818285A is referred to as a specific embodiment of forming a single crystal silicon rod having a rectangular-like cross section by cutting a cut short silicon rod with a silicon rod cutting machine. However, the process for forming the single crystal silicon rod is not limited to the foregoing technique, and in alternative examples, the process for forming the single crystal silicon rod may further include: firstly, using a full silicon rod squaring machine to perform squaring operation on an original long silicon rod to form a long monocrystalline silicon rod with a quasi-rectangular cross section; and after the cutting is finished, cutting off the cut long monocrystalline silicon rod by using a silicon rod cutting machine to form a short crystalline silicon rod. Among them, a specific embodiment of the above-described method for forming a long single crystal silicon rod having a substantially rectangular shape by squaring an initial long silicon rod using an all-silicon-rod squarer is disclosed in patent publication CN106003443A, for example.

After the cylindrical silicon single crystal rod is cut into the quasi-rectangular silicon rod by the squaring equipment, the quasi-rectangular silicon rod can be ground, chamfered and the like by the grinding equipment.

The inventors of the present application have found that, in the related art of the grinding operation for silicon rods, each of the grinding operations is a single operation, and only after the single silicon rod is subjected to, for example, a rough grinding operation and a finish grinding operation in sequence, the next silicon rod can be ground, which causes problems of complicated operation, low efficiency, and the like.

Meanwhile, the inventors of the present application have also found that, when performing the corresponding grinding operation on the silicon rod, it is necessary to transfer the silicon rod to be ground to the corresponding processing location and perform position calibration on the silicon rod, and the calibration may be, for example, to calibrate the axis line of the silicon rod. In the related art, a special silicon rod axis calibration device is not provided or the existing silicon rod axis calibration device has a complex structure, and the problems of complex operation, low efficiency and the like exist in the silicon rod position calibration.

In view of the above, the present application discloses a silicon rod transfer device and a silicon rod grinding machine, wherein the silicon rod transfer device is capable of completing a loading operation of transferring a silicon rod to be loaded from a loading location to at least one processing location corresponding to at least one silicon rod processing device, and realizing a centering operation of the silicon rod, so that an axis line of the silicon rod and a center line of the corresponding at least one silicon rod processing device are on the same straight line, thereby facilitating a subsequent silicon rod processing operation.

The application discloses silicon rod transfer device is applied to silicon rod processing equipment, silicon rod processing equipment includes an at least silicon rod processingequipment, silicon rod transfer device includes: the silicon rod loading and bearing structure is used for bearing a silicon rod to be loaded; a centering adjustment mechanism for adjusting the position of the silicon rod so that the axis of the silicon rod corresponds to a predetermined center line; and the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and the silicon rod borne by the silicon rod feeding bearing structure to move from the loading zone to at least one processing zone corresponding to the at least one silicon rod processing device along the feeding direction.

In certain embodiments of the present application, the centering adjustment mechanism includes a vertical lifting mechanism for driving the silicon rod loading and carrying structure and the silicon rod carried thereby to perform a vertical lifting motion so that an axis of the silicon rod is aligned with a predetermined center line in a direction of a plumb line, the predetermined center line corresponding to a clamping center line of the first silicon rod clamp.

In certain embodiments of the present application, the vertical lift mechanism comprises: the vertical lifting guide rod is used for arranging the silicon rod feeding and bearing structure; and the vertical lifting driving unit is used for driving the silicon rod feeding bearing structure to move up and down along the vertical lifting guide rod.

In certain embodiments of the present application, the vertical lift drive unit comprises: the driving motor and the vertical screw rod assembly are arranged and driven by the driving motor, or the driving motor and the vertical gear rack transmission assembly are arranged and driven by the driving motor.

In some embodiments of the present application, the vertical lift driving unit further comprises an auxiliary lift assembly, the auxiliary lift assembly comprising a cylinder and a lift pin connected to the cylinder.

In certain embodiments of the present application, the feed drive mechanism comprises: the feeding guide rods are distributed along the feeding direction and are used for arranging the silicon rod feeding bearing structure; and the feeding driving unit is used for driving the silicon rod feeding bearing structure to transversely move along the feeding guide rod.

In certain embodiments of the present application, the feed drive unit comprises: the device comprises a driving motor and a screw rod assembly which is arranged along the feeding direction and driven by the driving motor, or the driving motor and a gear rack transmission assembly which is arranged along the feeding direction and driven by the driving motor.

In certain embodiments of the present application, the silicon rod loading carrying structure comprises a carrying base and a first loading part and a second loading part which are oppositely arranged in the feeding direction.

In certain embodiments of the present application, the silicon rod transfer device further comprises a first centering adjustment mechanism for changing a position of a silicon rod in a feeding direction by adjusting the first loading part and the second loading part such that an axis line of the silicon rod corresponds to a center line of the silicon rod loading bearing structure in the feeding direction.

In certain embodiments of the present application, the first centering adjustment mechanism comprises: the opening and closing slide rail is arranged on the bearing base along the feeding direction and is used for arranging a first loading part and a second loading part; the opening and closing driving unit is used for driving the first loading part and the second loading part to move oppositely along the opening and closing slide rail so as to execute the closing action or move oppositely along the opening and closing slide rail so as to execute the opening action.

In some embodiments of the present application, the opening and closing driving unit includes: the turntable is arranged in the central area of the bearing base through a rotating shaft; a first drive assembly associated with the load base and the turntable and a second drive assembly associated with the load base and the turntable; a first push-pull member associated with the turntable and the first loading member and a second push-pull member associated with the turntable and the second loading member; when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate in the forward direction, the turntable drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move oppositely along the opening and closing slide rail; when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate reversely, the turntable drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move back to back along the opening and closing slide rail.

In some embodiments of the present application, the first push-pull member is a first link, a first end of the first link is coupled to the turntable, a second end of the first link is coupled to the first loading member, the second push-pull member is a second link, a first end of the second link is coupled to the turntable, and a second end of the second link is coupled to the second loading member.

In certain embodiments of the present application, the first transmission assembly comprises a first cylinder, a cylinder of the first cylinder is connected with the carrying base, a piston rod of the first cylinder is connected with the turntable, the second transmission assembly comprises a second cylinder, a cylinder of the second cylinder is connected with the carrying base, and a piston rod of the second cylinder is connected with the turntable.

In some embodiments of the present application, the opening and closing driving unit includes: the bidirectional screw rod is arranged along the feeding direction and is in threaded connection with the first loading part and the second loading part at two ends; and the driving source is used for driving the bidirectional screw rod to rotate so as to enable the first loading part and the second loading part to move towards or away from each other along the feeding direction.

In some embodiments of the present application, the opening and closing driving unit includes: the first rack and the second rack are arranged along the feeding direction, the first rack is connected with the first loading part, and the second rack is connected with the second loading part; the driving gear is positioned between the first rack and the second rack and meshed with the first rack and the second rack; and the driving source is used for driving the driving gear to rotate so as to drive the first loading part connected with the first rack and the second loading part connected with the second rack to move in opposite directions or move back to back in the feeding direction.

In certain embodiments of the present application, the silicon rod transfer device further comprises a second centering adjustment mechanism for positioning the silicon rod in a centering region of the silicon rod loading bearing structure in a first direction by adjusting the position of the silicon rod carried by the silicon rod loading bearing structure in the first direction, wherein the first direction is perpendicular to the feeding direction.

In certain embodiments of the first aspect of the present application, the second centering adjustment mechanism comprises: the support is arranged on the silicon rod processing platform; the sliding rail is arranged on the bracket along a first direction; the two ejection pieces are arranged on the sliding rail and are respectively and oppositely arranged at two sides of the bracket; and the ejection driving unit is used for driving the two ejection pieces to move oppositely or back to back along the slide rail.

In certain embodiments of the present application, the ejector drive unit includes: the two-way screw rod is arranged along the first direction, and two ends of the two-way screw rod are respectively in threaded connection with the two ejection pieces; and the driving source is used for driving the bidirectional screw rod to rotate so as to enable the two pushing pieces to move in the first direction in the opposite direction or in the opposite direction.

In certain embodiments of the present application, the silicon rod transfer device further comprises: and the silicon rod blanking bearing structure is used for bearing the silicon rod to be blanked.

In certain embodiments of the present application, the silicon rod unloading carrying structure comprises an unloading part provided at the carrying base or at one of the first loading part and the second loading part.

In certain embodiments of the present application, the silicon rod transfer device further comprises: and the reversing mechanism is used for driving the silicon rod feeding bearing structure and the silicon rod blanking bearing structure to interchange positions.

In certain embodiments of the present application, the reversing mechanism includes a reversing rotary shaft disposed in a direction of the plumb line, and the reversing rotary shaft is driven to rotate by a preset angle so that the silicon rod loading bearing structure and the silicon rod unloading bearing structure interchange positions.

In some embodiments of the present application, the reversing mechanism further includes a reversing drive unit for driving the reversing rotary shaft to rotate, the reversing drive unit including: the driving gear is coupled to the driving source; and the driven gear is meshed with the driving gear and is connected to the reversing rotating shaft.

The application discloses silicon rod grinds machine in addition, including frame, silicon rod anchor clamps, grinder and silicon rod transfer device, utilize silicon rod transfer device can realize the centering operation of silicon rod in the loading work of the processing position that silicon rod that will treat the material loading is transferred to grinder and is corresponded by the loading position for the axial lead of silicon rod and the central line of silicon rod anchor clamps are on same straight line, in order to do benefit to subsequent silicon rod and grind the operation, for correlation technique, have simple structure, convenient operation, advantages such as centering accuracy and high efficiency.

In certain embodiments of the present application, the silicon rod processing platform is provided with a first processing location and a second processing location, the silicon rod clamp includes a first silicon rod clamp located in the first processing location and a second silicon rod clamp located in the second processing location, the grinding device includes a coarse grinding device for performing a coarse grinding operation on the silicon rod and a fine grinding device for performing a fine grinding operation on the silicon rod.

In certain embodiments of the present application, the rough grinding apparatus has at least one pair of rough grinding tools and the finish grinding apparatus has at least one pair of finish grinding tools.

Referring to fig. 1 and 2, fig. 1 is a schematic structural view of a silicon rod grinding machine according to an embodiment of the present invention, and fig. 2 is a top view of fig. 1. As shown in fig. 1 and 2, the silicon rod grinding machine includes a base 1, a first silicon rod clamp 2, a second silicon rod clamp 3, a rough grinding device 4, a finish grinding device 5, and a transposition mechanism 6.

The silicon rod grinding machine is used for grinding silicon rods with rectangular-like (including square-like) sections.

The base 1 is provided with a silicon rod processing platform, and the silicon rod processing platform is provided with a first processing area and a second processing area. The silicon rod processing platform is arranged on the upper side face of the base 1, in an implementation manner of the embodiment, the processing platform is designed to be rectangular along the shape of the base 1, as shown in fig. 1 and fig. 2, the first processing region and the second processing region are arranged along the front-back direction (namely, the first direction) of the silicon rod processing platform, the first processing region and the second processing region are symmetrically arranged on the left side and the right side (namely, the second direction) of the silicon rod processing platform, and the silicon rod processing platform can process the corresponding loaded single crystal silicon rod on the first processing region and the second processing region respectively and independently.

The first silicon rod clamp 2 and the second silicon rod clamp 3 are respectively and correspondingly arranged at the first processing position and the second processing position, and in an embodiment of the present application, as shown in fig. 2, the first silicon rod clamp 2 and the second silicon rod clamp 3 are arranged at the left and right sides of the silicon rod processing platform in parallel. The first silicon rod clamp 2 is arranged at a first processing position and used for clamping a silicon rod and driving the clamped silicon rod to move along a first direction (namely, the X-axis direction in fig. 2), the second silicon rod clamp 3 is arranged at a second processing position and used for clamping the silicon rod and driving the clamped silicon rod to move along the first direction, and the axis line of the silicon rod is parallel to the first direction.

In certain embodiments, the first and second silicon rod clamps 2, 3 are identical in their structure and their working principle. In certain embodiments, the first and second silicon rod clamps 2, 3 may also differ in their structure or principle of operation.

In the following description, the first silicon rod clamp 2 is now taken as an example for explanation, assuming that the configuration of the first silicon rod clamp 2 and the second silicon rod clamp 3 and the working principle thereof are the same.

Fig. 5 is a schematic view showing a first silicon rod clamp of the silicon rod grinding machine according to the present application. Taking a first silicon rod clamp as an example, the first silicon rod clamp is arranged at the first processing location through a first guide structure, wherein the first guide structure is a transfer guide rail and/or a guide pillar arranged along a first direction. In the embodiment shown in fig. 1 and 5, the first silicon rod clamp 2 is arranged in the first processing position by means of a transfer rail arranged in a first direction, such that the first silicon rod clamp 2 can be moved along the transfer rail with the clamped silicon rod.

Specifically, the first silicon rod clamp 2 includes a clamp arm mount 21, a moving mechanism, a pair of clamp arms 23, and a clamp arm driving mechanism 25.

The clamping arm mounting seat 21 is disposed on a corresponding first guiding structure, wherein the first guiding structure may be, for example, a transfer guide rail, a guide pillar, or a combination of the transfer guide rail and the guide pillar. In the embodiment shown in fig. 1, the first guide structure is a transfer rail, and the transfer rail as the first guide structure is referred to as a first transfer rail, and therefore, the clamp arm mount is provided on the first transfer rail. In an implementation manner of this embodiment, the bottom of the clamp arm mounting seat is provided with a guide groove structure or a guide block structure matched with a first transfer guide rail, the first transfer guide rail is arranged along a first direction, and a length range of the first transfer guide rail in the first direction can cover a complete length of the silicon rod processing platform in the first direction.

The moving mechanism is used for driving the clamping arm mounting seat to move along the corresponding first guide structure. In the embodiment shown in fig. 1, the moving mechanism is used for driving the clamping arm mounting seats to move along the corresponding first transfer guide rails.

In certain implementations, the moving mechanism may include: a moving rack, a drive gear, and a drive source. The movable rack is arranged along a first direction, has a length similar to that of the first transfer guide rail, and can cover the complete length of the silicon rod processing platform in the first direction. The driving gear is arranged on the clamping arm mounting seat and meshed with the movable rack. The drive source is used to drive the drive gear, and may be, for example, a drive motor. In practical application, the driving gear is driven by the driving source to rotate in a forward direction, and the driving gear and the clamping arm mounting seat move forward along the first transfer guide rail through the meshing of the driving gear and the moving rack; on the contrary, the driving gear is driven by the driving source to rotate reversely, and the driving gear and the clamping arm mounting seat move backwards along the first transfer guide rail through the meshing of the driving gear and the moving gear rail.

In certain implementations, the moving mechanism may include: a movable screw rod and a driving source. As shown in fig. 5, the moving mechanism may include a moving screw 221 and a driving source 223, the moving screw 221 is disposed in a first direction and is associated with the clamp arm mounting seat 21, and the moving screw 221 has a length similar to the first transfer rail and may cover a full length of the silicon rod processing platform in the first direction. The driving source 223 is associated with the moving screw 221 for driving the moving screw to rotate so as to move the associated clamp arm mounting seat in the first direction, and the driving source 223 may be, for example, a servo motor. In practical applications, the driving source 223 is used to drive the moving screw rod 221 to rotate in a forward direction, and the moving screw rod 221 rotating in the forward direction enables the clamping arm mounting seat 21 on the moving screw rod 221 to move forward along the first transfer guide rail; on the contrary, the driving source 223 drives the moving screw 221 to rotate in the opposite direction, and the moving screw 221 rotating in the opposite direction makes the clamp arm mounting base 21 on the moving screw 221 move in the backward direction along the first transfer guide.

The pair of clamping arms 23 are oppositely arranged along the first direction and used for clamping two end surfaces of the silicon rod 101. The silicon rod is a slender structure which is cut, the length direction of the silicon rod is placed along the first direction, and the end faces are sections of two ends in the length direction. In the embodiment shown in fig. 1 and 5, two gripper arms 23 of the pair of gripper arms extend from the gripper arm mount 21 in a second direction (i.e. the Y axis) towards the silicon rod processing platform intermediate region. Wherein either one of the pair of clamp arms 23 is provided with a clamp portion 231, i.e., in the embodiment shown in fig. 5, each clamp arm 23 is provided with a clamp portion 231.

The clamping arm driving mechanism is used for driving at least one clamping arm in a pair of clamping arms to move along a first direction so as to adjust the clamping distance between the pair of clamping arms. In the embodiment shown in fig. 5, two clamping arms 23 of the pair of clamping arms are oppositely arranged along a first direction, and the clamping arm driving mechanism 24 can drive at least one clamping arm 23 of the pair of clamping arms to move along the first direction so as to adjust the clamping distance between the pair of oppositely arranged clamping arms.

In certain embodiments, the gripper arm drive mechanism may drive a first gripper arm of the pair of gripper arms closer toward a second gripper arm in a first direction, decreasing a gripping spacing between the two gripper arms, thereby clamping a silicon rod positioned between the two gripper arms. Correspondingly, the clamping arm driving mechanism can drive a first clamping arm in the pair of clamping arms to move away from a second clamping arm in the first direction, and the clamping distance between the two clamping arms is increased, so that the clamped silicon rod is released.

Assuming that a first one of the pair of clamp arms is driven by the clamp arm driving mechanism to move along a first direction and a second one of the pair of clamp arms is fixedly arranged on the clamp arm mounting seat, in one embodiment, the clamp arm driving mechanism further includes: the driving source is associated with the lead screw and is used for driving the lead screw to rotate so as to enable the associated first clamping arm to move along the first direction. For example, the driving source drives the screw rod to rotate forward, so as to drive the associated first clamping arm to approach towards the second clamping arm along the first direction, and reduce the clamping distance between the two clamping arms, or the driving source drives the screw rod to rotate reversely, so as to drive the associated first clamping arm to move away from the second clamping arm along the first direction, and increase the clamping distance between the two clamping arms. The drive source may be, for example, a servo motor. Of course, the clamp arm driving mechanism may adopt other structures, for example, in another embodiment, the clamp arm driving mechanism may include: rack, drive gear and driving motor, wherein, the rack along first direction setting and with first arm lock in a pair of arm lock is relevant, drive gear is controlled by driving motor and with the rack toothing, so, driving motor drives drive gear and rotates, drives rack and the first arm lock of relevance move along first direction. For example, when the driving source drives the driving gear to rotate forward, the first clamping arm associated with the rack is driven to approach towards the second clamping arm along the first direction, so that the clamping distance between the two clamping arms is reduced, or when the driving source drives the driving gear to rotate reversely, the first clamping arm associated with the rack is driven to move away from the second clamping arm along the first direction, so that the clamping distance between the two clamping arms is increased.

In certain embodiments, the gripper arm drive mechanism may drive two gripper arms of the pair of gripper arms to move toward each other, decreasing the gripping distance between the two gripper arms, thereby clamping the silicon rod between the two gripper arms. Correspondingly, the clamping arm driving mechanism can drive two clamping arms in the pair of clamping arms to move back and forth, so that the clamping distance between the two clamping arms is increased, and the clamped silicon rod is released.

Assuming that both of the pair of clamp arms are driven by the clamp arm driving mechanism to move along the first direction, in one embodiment, in the embodiment shown in fig. 5, the clamp arm driving mechanism further includes: the bidirectional screw rod is arranged along a first direction, the bidirectional screw rod is a left-handed screw rod and a right-handed screw rod, two sections of threads are distributed on the rod body, the rotation directions of the two sections of threads are opposite, namely one section of thread is a left-handed thread, the other section of thread is a right-handed thread, the left-handed thread can be associated with one clamping arm of the pair of clamping arms, the right-handed thread can be associated with the other clamping arm of the pair of clamping arms, and the driving source is associated with the bidirectional screw rod and used for driving the bidirectional screw rod to rotate so that the associated first clamping arm and the associated second clamping arm move in the opposite direction or move back to back along the first direction. For example, when the driving source drives the bidirectional screw rod to rotate in a forward direction, the associated first clamp arm and second clamp arm are driven to move in a first direction towards each other (i.e., to approach each other) to reduce the clamping distance between the two clamp arms, or when the driving source drives the screw rod to rotate in a reverse direction, the associated first clamp arm and second clamp arm are driven to move in a first direction towards each other (i.e., to move away from each other) to increase the clamping distance between the two clamp arms. The driving source can be a servo motor, for example, and is located in the middle section of the bidirectional screw rod. Of course, the clamp arm driving mechanism may adopt other structures, for example, in another embodiment, the clamp arm driving mechanism may include: the driving gear is positioned between the pair of racks to be meshed with the pair of racks and controlled by the driving motor, so that the driving motor drives the driving gear to rotate to drive the pair of racks and the associated first clamping arm and second clamping arm to move in the first direction in a face-to-face mode or in a back-to-back mode. For example, when the driving source drives the driving gear to rotate in a forward direction, the first clamping arm and the second clamping arm associated with the pair of racks are driven to move in a first direction towards each other (i.e., approach each other), so as to reduce the clamping distance between the two clamping arms, or when the driving source drives the driving gear to rotate in a reverse direction, the first clamping arm and the second clamping arm associated with the pair of racks are driven to move in a second direction towards each other (i.e., move away from each other), so as to increase the clamping distance between the two clamping arms.

In an embodiment of the present application, the clamping portions of the clamping arms are of a rotary design, as shown in fig. 5, in which either of the first and second silicon rod clamps 2, 3 further comprises a clamping portion rotating mechanism for driving the clamping portions of the clamping arms in the silicon rod clamps to rotate. In an implementation manner of this embodiment, the first silicon rod clamp 2 or the second silicon rod clamp 3 is driven by the provided clamping portion rotating mechanism to rotate the clamping portion of the clamping arm around the first direction, which is the longitudinal direction of the silicon rod, as an axis, and the clamped silicon rod correspondingly rotates around the first direction as an axis. In the actual grinding, the grinding face that the silicon rod needs to go on and the edge of chamfer at juncture between four faces and four faces of length direction, by the arm lock that this application provided, can realize the selection and the control to the different grinding faces of silicon rod and different edges.

In certain embodiments, the clamping portion has a multi-point contact type clamping head, it being understood that the contact manner between the multi-point contact type clamping head and the end surface of the silicon rod is not limited to point contact, and the clamping portion has, for example, a plurality of protrusions to contact the end surface of the silicon rod, wherein each protrusion may be in surface contact with the end surface of the silicon rod. In one embodiment, the projection of the clamping portion may be further connected to the clamping arm by a spring in the first direction, whereby a multi-point floating contact may be formed, so that the silicon rod clamp may adapt to the flatness of the end surface of the silicon rod when clamping the end surface of the silicon rod to clamp the silicon rod. In some examples, the clamping end of the clamping portion for contacting the end face of the silicon rod may also be connected to the clamping arm by a universal mechanism, such as a universal ball, the clamping portion thereby being adaptable to clamping end faces of silicon rods having different inclinations.

In some embodiments, the portion of the silicon rod clamp for contacting the silicon rod is provided as a rigid structure to prevent the clamped silicon rod from being disturbed during the cutting operation and the grinding operation to affect the processing accuracy.

In practical applications, the clamping portion rotating mechanism may include a structure that is rotatably disposed on two clamping portions of the pair of clamping arms, and a driving source for driving at least one of the two rotatable structures to rotate. In certain implementations, the abrasive surface is disposed on a rotatable platform, which may be configured with a custom regular or irregular cross-section. Thus, the clamping part rotating mechanism can be used for driving the platform and the grinding surface on the platform to rotate.

In an embodiment of the present application, the rotatable platform may be provided as a whole hinged with a hinge device having a locking function, and may be rotatable along an axis in the first direction. The axis of the rotating shaft is connected to the clamping part rotating mechanism.

In an embodiment of the application, the clamping portion of the clamping arm may be configured as a rotatable circular truncated cone, and a circular plane of the circular truncated cone contacts with the end surface of the silicon rod and keeps relatively stationary with the end surface of the silicon rod after clinging to the end surface of the silicon rod. The silicon rod clamping part further comprises a locking structure, and the clamping arm clamping part is in a locking state when a selected plane is ground. In the switching of different grinding surfaces, the silicon rod clamping part is driven by the clamping part rotating mechanism to rotate along the circle center of the circular truncated cone.

With continued reference to fig. 2, the clamping portion of the clamping arm includes a rotatable circular table and a series of protruding contacts disposed on the circular table, each of the contacts having a contact plane. The round platform is rotatory under the drive of clamping part slewing mechanism, and in the implementation of this embodiment, the protruding length of contact is adjustable in the position of first direction promptly for to the in-process of centre gripping silicon rod, to the lower silicon rod of terminal surface roughness, can be according to the protruding length of silicon rod terminal surface adjustment contact, make each abrasive surface and silicon rod terminal surface be in the state of hugging closely. The protruding length is a length in a first direction from a circular plane of the circular truncated cone to a contact plane of the contact.

In an embodiment of the present application, the clamping portion of the silicon rod clamp is provided with a pressure sensor to adjust a protruding length of the contact based on the detected pressure state. Generally, in the process of clamping a silicon rod, a pair of clamping arms of the first silicon rod clamp are driven by a clamping arm driving mechanism to approach each other along a first direction until a grinding surface of the clamping part contacts with an end surface of the silicon rod to be clamped, and when the clamping part is provided with a plurality of contact points and a pressure value of partial contact points contacting with the end surface of the contacted silicon rod is detected to be less than a set value or a set area, the clamping degree can be changed by adjusting the protruding length of the contact points (generally towards the approaching direction of the end surface of the silicon rod); or each clamping portion of the pair of clamping arms of the first silicon rod clamp is provided with a grinding surface, in the process of clamping the silicon rod, the clamping arm driving mechanism drives the end surfaces, facing the two ends of the silicon rod, of the pair of clamping arms to approach each other so as to realize the purpose, after the clamping portions contact the end surfaces of the silicon rod, the clamping degree of the silicon rod is detected by the pressure sensor, and when the set pressure range is reached, the clamping arm driving mechanism controls and stops the opposite movement of the pair of clamping arms.

The clamping part rotating mechanism can be arranged on one clamping arm of the pair of clamping arms so as to drive the clamping parts of the pair of clamping arms and the clamped silicon rod to rotate; or the clamping part rotating mechanism is arranged on each clamping arm of the pair of clamping arms and controls the two clamping parts of the pair of clamping arms to rotate in the same angle and direction in a coordinated motion mode. In some implementations, the drive source in the grip-rotating mechanism may be provided as a drive motor.

Thus, in the embodiment of the present application, the first silicon rod clamp 2 can clamp a silicon rod and drive the clamped silicon rod to move along the first direction in the first processing region, and the second silicon rod clamp 3 can clamp a silicon rod and drive the clamped silicon rod to move along the first direction in the first processing region, wherein the axis direction of the silicon rod is parallel to the first direction.

This application silicon rod grinds machine still includes corase grind device, accurate grinding device and transposition mechanism, wherein, corase grind device with accurate grinding device all locates on the transposition mechanism, through transposition mechanism can drive corase grind device and accurate grinding device transposition position between first processing position and second processing position. In one embodiment of the present application, in a certain state, the rough grinding device is located in a first location for rough grinding operation of the silicon rod at the first location, and at the same time, the fine grinding device is located in a second location for fine grinding operation of the silicon rod at the second location; and driving the position switching of the rough grinding device and the fine grinding device by using the transposition mechanism, so that the rough grinding device is switched from the original first position to the second position for rough grinding operation of the silicon rod at the second position and the fine grinding device is switched from the original second position to the first position for fine grinding operation of the silicon rod at the first position. Or, in a certain state, the rough grinding device is positioned in a second area for rough grinding operation of the silicon rod at the second area, and at the moment, the fine grinding device is positioned in a first area for fine grinding operation of the silicon rod at the first area; and driving the position switching of the rough grinding device and the fine grinding device by using the transposition mechanism, so that the rough grinding device is switched from the original second position to the first position for rough grinding operation of the silicon rod at the first position and the fine grinding device is switched from the original first position to the second position for fine grinding operation of the silicon rod at the second position.

In the embodiment shown in fig. 1, the indexing mechanism comprises an indexing shaft, so that driving the indexing shaft to rotate by a predetermined angle causes the rough grinding device 4 and the finish grinding device 5 to switch positions between the first machining position and the second machining position. In some embodiments, the transposition shaft is arranged in the direction of the plumb line, the first and second processing locations are arranged on opposite sides of the transposition shaft in the second direction, and the rough grinding device 4 and the finish grinding device 5 are respectively arranged on opposite sides of the transposition shaft, in the embodiment shown in fig. 2, the rough grinding device 4 and the finish grinding device 5 are arranged on opposite sides of the transposition shaft in a back-to-back manner, i.e., the rough grinding device 4 and the finish grinding device 5 can be separated by 180 °, so that the rough grinding device 4 and the finish grinding device 5 can be switched between the first processing location and the second processing location after driving the transposition shaft to rotate by a predetermined angle of 180 °.

As described above, the index rotary shaft is controlled to rotate by a predetermined angle so that the rough grinding device 4 and the finish grinding device 5 are shifted between the first processing position and the second processing position. Therefore, the machine changing mechanism further comprises a transposition driving unit for driving the transposition rotating shaft to rotate. In some embodiments, the index driving unit may include: the gear comprises a driving gear, a driving source and a driven gear, wherein the driving gear is in shaft connection with the driving source, and the driven gear is meshed with the driving gear and is connected to the transposition rotating shaft. The driven gear is meshed with the driving gear and is connected to the transposition rotating shaft. In some embodiments, the index drive unit may include a drive source directly associated with the index shaft. Wherein the power source can be, for example, a clothes motor.

In practical application, the driving gear is driven to rotate in a forward direction by the driving source, the driven gear and the associated transposition rotating shaft thereof are driven to rotate in a first rotation direction by a preset angle through the meshing of the driving gear and the driven rack, so that the rough grinding device 4 and the fine grinding device 5 are switched between the first processing area and the second processing area, and subsequently, the driving gear is driven to rotate in a reverse direction by the driving source, and the driven gear and the associated transposition rotating shaft thereof are driven to rotate in a second rotation direction by a preset angle through the meshing of the driving gear and the driven rack, so that the rough grinding device 4 and the fine grinding device 5 are switched between the first processing area and the second processing area. Taking the rough grinding device 4 and the finish grinding device 5 as an example, which are disposed on opposite sides of the transposition rotating shaft with a 180 ° difference, assuming that, in an initial state, the rough grinding device 4 is located at a first processing position and the finish grinding device 5 is located at a second processing position, the driving gear is driven to rotate counterclockwise by the driving source, the driven gear and the associated transposition rotating shaft are driven to rotate 180 ° clockwise by the engagement of the driving gear and the driven rack, so that the rough grinding device 4 is switched from the first processing position to the second processing position and the finish grinding device 5 is switched from the second processing position to the first processing position, and subsequently, the driving gear is driven to rotate clockwise by the driving source, the driven gear and the associated transposition rotating shaft are driven to rotate 180 ° counterclockwise by the engagement of the driving gear and the driven rack (or, the driving gear is driven to rotate counterclockwise by the driving source, the driven gear and its associated transposition shaft are driven by the meshing of the driving gear with the driven rack to rotate 180 ° clockwise) so that the rough grinding device 4 is switched from the second machining zone to the first machining zone and the finish grinding device 5 is switched from the first machining zone to the second machining zone.

The rough grinding device is used for conducting rough grinding operation on the silicon rod on the first machining area or the second machining area of the silicon rod machining platform. In the embodiment shown in fig. 1, the rough grinding apparatus 4 includes at least one pair of rough grinding tool and rough grinding tool advancing and retreating mechanism.

The at least one pair of rough grinding tools is disposed on one side of the transposition rotating shaft in the transposition mechanism 6, and specifically, the at least one pair of rough grinding tools is disposed on the first mounting side of the transposition rotating shaft in a direction opposite to the direction of the plumb line, so that the grinding surfaces of the at least one pair of rough grinding tools are located in opposite horizontal planes, that is, the grinding surfaces of two of the at least one pair of rough grinding tools are located in a first horizontal plane and a second horizontal plane, respectively, wherein the first horizontal plane and the second horizontal plane are parallel to each other and perpendicular to the plumb line.

With respect to the rough grinding tool, in certain implementations, the rough grinding tool includes a rough grinding wheel and a rotary motor coupled to the rough grinding wheel. The rough grinding wheels have certain granularity and roughness, two opposite rough grinding wheels in the at least one pair of rough grinding tools are respectively provided for two symmetrical grinding surfaces of the clamped silicon rod, and in certain embodiments, the rough grinding wheels are circular and have a hollow middle. The rough grinding wheel is formed by consolidating abrasive particles and a bonding agent, and the surface with the abrasive particle part is formed to be in contact rotation with the surface of the silicon rod to be ground. The rough grinding wheel has certain abrasive particle size and abrasive particle density, and meanwhile, the rough grinding wheel is provided with air holes. The abrasive of the rough grinding wheel can be set into abrasive grains with hardness higher than that of silicon materials, such as aluminum oxide, silicon carbide, diamond, cubic boron nitride and the like according to the requirement of grinding the silicon rod. The rotating motor is connected with the rough grinding wheel through a rotating shaft and used for driving the rough grinding wheel to rotate at a preset rotating speed.

The rough grinding tool advancing and retreating mechanism is used for driving at least one rough grinding tool in the at least one pair of rough grinding tools to move up and down along the direction of a plumb line, and the direction of the plumb line is vertical to the horizontal plane. The rough grinding tool advancing and retreating mechanism controls at least one rough grinding tool in the at least one pair of rough grinding tools to move up and down along the direction of the plumb line, so that the relative distance between two rough grinding tools in the at least one pair of rough grinding tools in the direction of the plumb line is adjusted, and the feeding amount in the grinding process is controlled, namely the grinding amount is determined. In addition, when the first silicon rod clamp and/or the second silicon rod clamp the silicon rod and drive the clamped silicon rod to move along the first direction, the at least one pair of rough grinding tools move up and down along the direction of the plumb line under the control of the advancing and retreating mechanism of the rough grinding tool to form a path for safely moving the silicon rod, namely, the first silicon rod clamp and/or the second silicon rod clamp and the silicon rod clamped by the first silicon rod clamp and/or the second silicon rod clamp do not collide with the rough grinding tool in the moving process.

In some implementations, each pair of rough grinding tools is provided with a rough grinding tool advancing and retreating mechanism, the rough grinding tool advancing and retreating mechanism comprises an advancing and retreating guide rail and an advancing and retreating driving unit (not shown in the figure), wherein the advancing and retreating guide rail is arranged along the direction of the plumb line and is arranged at the first mounting side of the transposition rotating shaft, the bottom of the rough grinding tool is provided with a guide groove structure or a guide block structure in the direction of the plumb line matched with the advancing and retreating guide rail, and the advancing and retreating driving unit can further comprise a ball screw and a driving motor, the ball screw is arranged along the advancing and retreating guide rail, and the ball screw is associated with the corresponding rough grinding tool and is in shaft connection with the driving motor.

In an embodiment of the present application, one of the at least one pair of rough grinding tools is configured with a ball screw disposed in the direction of the plumb line and associated with the one rough grinding tool, and the ball screw is driven by the driving motor such that the one rough grinding tool associated with the ball screw is moved along the advance and retreat guide toward the other rough grinding tool disposed oppositely to reduce the grinding interval (or adjust the feed amount of grinding) between the two rough grinding tools or moved away from the other rough grinding tool disposed oppositely to increase the grinding interval between the two rough grinding tools.

In an embodiment of the present application, each of the at least one pair of rough grinding tools is configured with a ball screw disposed in the direction of the plumb line and associated with the rough grinding tool and a drive motor for each rough grinding tool, the ball screw being driven by the drive motor such that the one rough grinding tool associated with the ball screw is moved along the advance and retreat guide toward the other rough grinding tool disposed opposite to each other to reduce the grinding interval (or adjust the feed amount of grinding) between the two rough grinding tools or moved away from the other rough grinding tool disposed opposite to each other to increase the grinding interval between the two rough grinding tools.

In an embodiment of the present application, two rough grinding tools of the at least one pair of rough grinding tools share a ball screw and a driving motor, the ball screw may be, for example, a bidirectional screw, the bidirectional screw is disposed along the direction of the plumb line, two threads with opposite turning directions are disposed on a shaft of the bidirectional screw, the two threads are respectively associated with the two rough grinding tools, and the driving motor is associated with the bidirectional screw, and drives the bidirectional screw to rotate by using the driving motor, so that the two rough grinding tools associated with the bidirectional screw move toward or away from each other along the advance and retreat guide rail based on a certain synergistic relationship. For example, the driving motor drives the bidirectional screw rod to rotate forward, so as to drive the two associated rough grinding tools to move towards each other along the first direction (i.e. to approach each other), so as to reduce the grinding distance between the two rough grinding tools (or to adjust the feeding amount of grinding), or the driving motor drives the screw rod to rotate reversely, so as to drive the two associated rough grinding tools to move back from each other along the first direction (i.e. to move away from each other), so as to increase the grinding distance between the two rough grinding tools.

In an embodiment of the present application, the rough grinding device 4 may further include a cooling device to cool the at least one pair of rough grinding tools, so as to reduce damage to a surface layer of the silicon rod during grinding, and improve grinding efficiency and service life of the rough grinding wheel. In one implementation manner of this embodiment, the cooling device includes a cooling water pipe, a diversion trench, and a diversion hole. In some embodiments, the outer circumference of the rough grinding wheel is provided with a protective cover for placing cooling water into the rotating motor of the rough grinding wheel. One end of the cooling water pipe is connected with a cooling water source, the other end of the cooling water pipe is connected to the surface of a protective cover of the rough grinding wheel, the diversion groove is arranged on the protective cover and serves as a contact point of the protective cover and the cooling water pipe, and the diversion hole is formed in the cooling groove. The cooling device coolant can be common cooling water, the cooling water pipe is connected with a cooling water source, the cooling water pumped by the cooling water pipe is guided to the guide groove and the guide hole on the surface of the rough grinding wheel and is guided to the direct rough grinding wheel and the grinding surface of the ground silicon rod for cooling, and the cooling water in the guide hole rotated by the rough grinding wheel enters the rough grinding wheel for sufficient cooling through the centrifugal action during the grinding of the rough grinding wheel.

The at least one pair of rough grinding tools correspond to the first silicon rod clamp or the second silicon rod clamp, the silicon rod is clamped by the first silicon rod clamp or the second silicon rod clamp and the clamped silicon rod is driven to move along the first direction in the grinding process, the sequence of grinding and chamfering the side face and the edge angle of the silicon rod is controlled, the silicon rod can be fully ground in the length direction of the silicon rod through reciprocating movement along the first direction, and the pair of rough grinding tools which are oppositely arranged move in the direction of the plumb line, so that the feeding amount of the rough grinding tools and the grinding surface of the silicon rod is determined.

In the embodiment shown in fig. 1, at least one pair of rough grinding tools of the rough grinding tools are arranged oppositely along the direction of the plumb line, the grinding surfaces of the at least one pair of rough grinding tools are positioned in opposite horizontal planes, wherein the horizontal planes are perpendicular to the plumb line, and when the silicon rod is ground, at least one rough grinding tool of the at least one pair of rough grinding tools is driven by a rough grinding tool advancing and retreating mechanism to move up and down along the direction of the plumb line so as to adjust the feeding amount, so that the upper side surface and the lower side surface of the silicon rod along the direction of the plumb line are ground. However, the rough grinding apparatus may be modified, for example, in some embodiments, at least one pair of rough grinding tools of the rough grinding tools are disposed opposite to each other along the second direction, and the grinding surfaces of the at least one pair of rough grinding tools are located in opposite vertical surfaces, wherein the vertical surfaces are perpendicular to the second direction, and when the silicon rod is ground, the feeding amount is adjusted by driving at least one rough grinding tool of the at least one pair of rough grinding tools to move along the second direction by the rough grinding tool advancing and retracting mechanism, so as to grind the left side surface and the right side surface of the silicon rod along the second direction.

The fine grinding device is used for performing fine grinding operation on the silicon rod on the first processing position or the second processing position of the silicon rod processing platform. In the embodiment shown in fig. 1, the finish grinding apparatus 5 includes at least one pair of a finish grinding stone and a finish grinding stone advancing and retreating mechanism.

The at least one pair of finish grinding tools is disposed on one side of the transposition rotating shaft in the transposition mechanism 6, and specifically, the at least one pair of finish grinding tools is disposed opposite to the second mounting side of the transposition rotating shaft in the direction of the plumb line, so that the grinding surfaces of the at least one pair of finish grinding tools are located in opposite horizontal planes, that is, the grinding surfaces of two finish grinding tools of the at least one pair of finish grinding tools are located in a first horizontal plane and a second horizontal plane, respectively, wherein the first horizontal plane and the second horizontal plane are parallel to each other and perpendicular to the plumb line; however, the lapping device may be modified, for example, in some embodiments, at least one pair of the lapping tools is disposed to face each other in a second direction, and the lapping surfaces of the at least one pair of the lapping tools are disposed in opposite drooping surfaces perpendicular to the second direction, and when the silicon rod is lapped, the feeding amount is adjusted by moving at least one of the at least one pair of the lapping tools in the second direction by the lapping tool advancing and retreating mechanism, so as to lap the left and right side surfaces of the silicon rod in the second direction.

With respect to the finish grinding tool, in certain implementations, the finish grinding tool includes a finish grinding wheel and a rotating motor coupled to the finish grinding wheel. The lapping grinding wheels have a granularity and a roughness, two lapping grinding wheels oppositely arranged in the at least one pair of lapping grinding tools are respectively provided for two grinding surfaces which are symmetrical to the clamped silicon rod, and in certain embodiments, the lapping grinding wheels are circular and have a hollow middle. The fine grinding wheel is formed by consolidating abrasive particles and a bonding agent, and a surface with an abrasive particle part is formed to rotate in a contact manner with the surface of the silicon rod to be ground. The fine grinding wheel has certain abrasive particle size and abrasive particle density, and meanwhile, the fine grinding wheel is provided with air holes. The abrasive of the fine grinding wheel can be set into abrasive grains with hardness higher than that of silicon materials, such as aluminum oxide, silicon carbide, diamond, cubic boron nitride and the like according to the requirement of grinding a silicon rod. The rotating motor is connected with the fine grinding wheel through a rotating shaft and is used for driving the fine grinding wheel to rotate at a preset rotating speed.

The finish grinding tool advancing and retreating mechanism is used for driving at least one finish grinding tool in the at least one pair of finish grinding tools to move up and down along the direction of a plumb line, and the direction of the plumb line is perpendicular to the horizontal plane. The fine grinding tool advancing and retreating mechanism controls at least one fine grinding tool in the at least one pair of fine grinding tools to move up and down along the direction of the plumb line, so that the relative distance between two fine grinding tools in the at least one pair of fine grinding tools in the direction of the plumb line is adjusted, and the feeding amount in the grinding process is controlled, namely the grinding amount is determined. In addition, when the first silicon rod clamp and/or the second silicon rod clamp the silicon rod and drive the clamped silicon rod to move along the first direction, the at least one pair of finish grinding tools do lifting movement along the direction of the plumb line under the control of the finish grinding tool advancing and retreating mechanism to form a path for the silicon rod to safely move, namely, the first silicon rod clamp and/or the second silicon rod clamp and the silicon rod clamped by the first silicon rod clamp and/or the second silicon rod clamp do not collide with the finish grinding tool in the moving process.

In some implementations, each pair of grinders is provided with a grindstone advancing and retreating mechanism including an advancing and retreating guide rail provided along the direction of the plumb line and disposed on the first mounting side of the index rotary shaft, and an advancing and retreating driving unit (not shown) provided at the bottom of the grindstone with a guide groove structure or a guide block structure in the direction of the plumb line cooperating with the advancing and retreating guide rail, and the advancing and retreating driving unit may further include, for example, a ball screw provided along the advancing and retreating guide rail, the ball screw being associated with the corresponding grindstone and being coupled to the driving motor.

In an embodiment of the present application, one of the at least one pair of grinders is provided with a ball screw provided in the direction of the plumb line and associated with the one grinder, and the ball screw is driven by the drive motor such that the one grinder associated with the ball screw is moved toward the other grinder disposed oppositely along the advance and retreat guide rail to reduce the grinding interval (or adjust the feed amount of grinding) between the two grinders or moved away from the other grinder disposed oppositely to increase the grinding interval between the two grinders.

In an embodiment of the present application, each of the at least one pair of grinders is provided with a ball screw provided in the direction of the plumb line and associated with each of the grinders, and the ball screw is driven by a drive motor such that the one grinders associated with the ball screw is moved toward the other grinders disposed oppositely along the advancing and retreating guide rail to reduce the grinding pitch (or adjust the feed amount of grinding) between the two grinders or the other grinders disposed oppositely away from each other to increase the grinding pitch between the two grinders.

In an embodiment of the present application, two finish grinders of the at least one pair of finish grinders share a ball screw and a driving motor, the ball screw may be, for example, a bidirectional screw, the bidirectional screw is disposed along a direction of a plumb line, two sections of threads with opposite turning directions are disposed on a rod body of the bidirectional screw, the two sections of threads are respectively associated with the two finish grinders, and the driving motor is associated with the bidirectional screw, and the bidirectional screw is driven by the driving motor to rotate, so that the two finish grinders associated with the bidirectional screw move in opposite directions or back to back along the advance and retreat guide rail based on a certain synergistic relationship. For example, a drive motor drives a bidirectional screw rod to rotate forward, and drives the two associated lapping tools to move toward each other in a first direction (i.e., to approach each other) to decrease the grinding gap between the two lapping tools (or to adjust the feed amount of grinding), or the drive motor drives the screw rod to rotate in a reverse direction, and drives the two associated lapping tools to move away from each other in the first direction (i.e., to move away from each other) to increase the grinding gap between the two lapping tools.

In an embodiment of the present application, the finish grinding device 5 may further include a cooling device to cool the at least one pair of finish grinding tools, so as to reduce damage to the surface layer of the silicon rod during grinding, and improve grinding efficiency and service life of the finish grinding wheel. In one implementation manner of this embodiment, the cooling device includes a cooling water pipe, a diversion trench, and a diversion hole. In some embodiments, the outer circumferential edge of the refiner wheel is provided with a protective shield for a rotating motor that places cooling water into the refiner wheel. One end of the cooling water pipe is connected with a cooling water source, the other end of the cooling water pipe is connected to the surface of a protective cover of the fine grinding wheel, the diversion groove is arranged on the protective cover and serves as a contact point of the protective cover and the cooling water pipe, and the diversion hole is formed in the cooling groove. The coolant of the cooling device can be common cooling water, the cooling water pipe is connected with a cooling water source, the cooling water pumped by the cooling water pipe reaches the diversion groove and the diversion hole on the surface of the fine grinding wheel and is guided to the grinding surface of the fine grinding wheel and the ground silicon rod for cooling, and the cooling water which rotates the diversion hole by the fine grinding wheel enters the fine grinding wheel for sufficient cooling under the centrifugal action during the grinding of the fine grinding wheel.

The at least one pair of finish grinding tools correspond to the first silicon rod clamp or the second silicon rod clamp, in the grinding process, the first silicon rod clamp or the second silicon rod clamp clamps the silicon rod and drives the clamped silicon rod to move along the first direction so as to control the sequence of grinding and chamfering the side surface and the edge angle of the silicon rod, the silicon rod can be fully ground in the length direction of the silicon rod through reciprocating movement along the first direction, and the pair of finish grinding tools which are oppositely arranged move in the direction of the plumb line so as to determine the feeding amount of the finish grinding tools and the grinding surface of the silicon rod.

In one implementation, the abrasive repair device includes a mounting body and at least one thinning. As shown in fig. 5, a grinding repair device including a mounting body 811 and at least one thinning portion 813 is further disposed on the first silicon rod jig. The mounting body 811 may be disposed on the first silicon rod clamp or the second silicon rod clamp, and the at least one grinding portion 813 is disposed on the mounting body 811 for grinding the corresponding at least one grinding tool. For example, a grinding portion is provided on each of opposite sides of the mounting body, and is used for grinding at least one pair of grinding tools disposed opposite to each other. Taking the grinding repair device for grinding the finish grinding tools in the finish grinding device as an example, the finish grinding device includes a pair of finish grinding tools arranged oppositely, the pair of finish grinding tools arranged oppositely is moved to the outer side of the grinding portion, the first silicon rod clamp (or the second silicon rod clamp) is driven to move along the first direction so as to make the two grinding portions 813 at two sides of the mounting body 811 reciprocate along the first direction, and in this state, the pair of finish grinding tools in the finish grinding device can be made to approach each other (for example, move along the plumb line direction or the second direction) to contact the grinding portion to the surface of the grinding portion so as to realize grinding.

The thinning may be, for example, an oilstone. Here, the oilstone is, for example, diamond oilstone, boron carbide oilstone, fine-ground oilstone, general oilstone, or the like. The oilstone may effect a modification of the surface of the grinding tool contacted by the oilstone by virtue of the particle size of the surface. In the coping process, the surface of the oilstone contacts the grinding tool, the surface of the grinding tool is trimmed to be uniform granularity, and the flatness and the verticality of the plane of the grinding tool are improved.

In some embodiments, the grinding repair device further comprises a sensing device arranged on the base and used for detecting the grinding tool of the silicon rod cutting and grinding all-in-one machine. In the embodiment shown in fig. 5, the grinding repair device further includes a sensing device 815 disposed adjacent to the thinning portion 813.

The sensing device can be used to determine the dimensional specification (primarily thickness) of the abrasive article after the abrasive repair is complete. The sensor device can determine the size of the grinding wheel after grinding by determining the distance between the sensor and the grinding surface of the grinding wheel or the distance between two grinding surfaces of a pair of oppositely arranged grinding wheels.

As shown in fig. 5, the sensing device is a touch sensor having a probe head for contacting the abrading surface.

In the case of the grinding and repairing apparatus having two opposite thinning portions 813, the contact sensor 815 may be provided with two detecting heads at two ends thereof, respectively, for contacting two opposite grinding surfaces of a pair of grinding tools. The touch sensor 815 may be disposed on the mounting body 811, and a line connecting the probe heads at both ends of the touch sensor 815 is parallel to the second direction. In the measuring process, the servo motor can drive the grinding tool to approach the detecting heads, the contact sensor 815 can acquire and record the distance between the detecting heads at two ends, the grinding tool stops moving when contacting the detecting heads and records the position data of the servo motor, the size of the grinding tool after grinding repair can be determined again based on the position data of the servo motor and the detecting head data of the contact sensor 815, and the silicon rod grinding machine can take the measured size of the grinding tool as input data in the control system.

By utilizing the grinding and repairing device, the grinding abrasive tool of the silicon rod grinding machine is close to and contacts with the grinding part of the grinding and repairing device so as to grind the grinding abrasive tool, at the moment, the reciprocating motion of the grinding part along the preset direction and the rotation of the grinding abrasive tool correspondingly contacted with the grinding part can be controlled so as to improve the grinding efficiency, and after the grinding is finished, the grinding and repairing device can also measure the grinding abrasive tool through a sensing device so as to determine the size of the ground grinding abrasive tool after the grinding, so that the subsequent surface grinding operation of the silicon rod grinding machine on the silicon rod is facilitated.

Here, the silicon rod grinding machine disclosed in the application comprises a base, a first silicon rod clamp, a second silicon rod clamp, a coarse grinding device and a fine grinding device, wherein the base is provided with a silicon rod processing platform, a first processing position and a second processing position are arranged on the silicon rod processing platform, the first silicon rod clamp and the second silicon rod clamp are respectively corresponding to the first processing position and the second processing position, the coarse grinding device and the fine grinding device are arranged on a transposition mechanism, and the first silicon rod clamp, the second silicon rod clamp, the coarse grinding device and the fine grinding device are coordinately controlled to enable the coarse grinding device and the fine grinding device in the silicon rod grinding machine to be in a working state at the same time, and the position of the silicon rod clamped by the first silicon rod clamp or the second silicon rod clamp in the first processing position or the second processing position is switched between the first processing position and the second processing position through controlling the transposition mechanism to drive the coarse grinding device and the fine grinding device, so that the silicon rod clamped by the first silicon rod clamp or the second silicon rod clamp in the first processing position or the second processing position is correspondingly processed Can accomplish coarse grinding operation and accurate grinding operation in the position, need not to the silicon rod conversion processing position, can improve silicon rod grinding efficiency and shorten and grind the operation consuming time, and promote economic efficiency.

The application also discloses a silicon rod grinding method which can be applied to the silicon rod grinding machine, the silicon rod grinding machine comprises a base with a silicon rod processing platform, and the silicon rod processing platform is provided with a first processing area and a second processing area; the silicon rod grinding machine further comprises a first silicon rod clamp, a second silicon rod clamp, a rough grinding device and a fine grinding device.

The first silicon rod clamp is arranged at the first processing position and used for clamping a silicon rod and driving the clamped silicon rod to move along a first direction. The second silicon rod clamp is arranged at the second processing area and used for clamping the silicon rod and driving the clamped silicon rod to move along the first direction.

The rough grinding device and the accurate grinding device are arranged on a transposition mechanism, and the transposition mechanism is used for driving the rough grinding device and the accurate grinding device to switch positions between a first machining position and a second machining position.

The rough grinding device comprises at least one pair of rough grinding tools, and can simultaneously grind two opposite sides of the silicon rod. The fine grinding device comprises at least one pair of fine grinding tools, and can simultaneously grind two opposite sides of the silicon rod. In certain implementations, at least one of the pair of rough grinding wheels of the rough grinding apparatus has a degree of freedom of movement in the direction of the plumb line (or the second direction), and at least one of the pair of finish grinding wheels of the finish grinding apparatus has a degree of freedom of movement in the direction of the plumb line (or the second direction). For the silicon rod clamped by the first silicon rod clamp or the second silicon rod clamp, the rough grinding device can move to two side surfaces of the silicon rod along the direction of the plumb line (or the second direction) to perform rough grinding operation, and the grinding amount of the ground silicon rod is controlled in the rough grinding operation; for the silicon rod clamped by the first silicon rod clamp or the second silicon rod clamp, the fine grinding device can move to two side surfaces of the silicon rod along the direction of the plumb line (or the second direction) to carry out fine grinding operation, and the grinding amount of the ground silicon rod is controlled in the fine grinding operation.

The first direction and the second direction are perpendicular to each other, in the embodiment provided in the present application, the first direction is along the length direction of the base, and the second direction is the width direction of the base.

In certain embodiments, the silicon rod grinding method may be applied in a silicon rod grinding machine as previously shown in fig. 1 to 5.

Referring to fig. 1 to 5, a silicon rod grinding method according to an embodiment of the present application includes the following steps:

in an initial state, the first silicon rod clamp 2 is arranged in a first processing area, the second silicon rod clamp 3 is arranged in a second processing area, and the coarse grinding device 4 and the accurate grinding device 5 are arranged on two opposite sides of the transposition mechanism 6, wherein the coarse grinding device 4 corresponds to the first processing area, and the accurate grinding device 5 corresponds to the second processing area.

And then, clamping the loaded first silicon rod by a first silicon rod clamp arranged at the first processing position and driving the clamped first silicon rod to move along the first direction, and performing coarse grinding operation on the first silicon rod by a coarse grinding device positioned at the first processing position. The first silicon rod clamp 2 clamps the two opposite ends of the loaded first silicon rod, so that the axis of the first silicon rod is parallel to the first direction, and then the first silicon rod clamp 2 drives the clamped first silicon rod to move along the first direction, so that the rough grinding device 4 positioned at the first processing position performs rough grinding operation on the first silicon rod moving along the first direction. In the present embodiment, the rough grinding device 4 includes at least one pair of rough grinding tools arranged along the direction of the plumb line, and the grinding surfaces of the at least one pair of rough grinding tools are located in opposite horizontal planes.

In the process of carrying out coarse grinding operation on the first silicon rod, the pair of oppositely arranged coarse grinding tools move in the direction of the plumb line to determine the grinding feed amount of the coarse grinding tools and the grinding surface of the silicon rod, so as to grind the upper side surface and the lower side surface of the first silicon rod in the direction of the plumb line, at the moment, the first silicon rod clamp 2 drives the clamped first silicon rod to move in the first direction, so that the grinding surfaces of two coarse grinding tools in the pair of coarse grinding tools start to grind from the front end of the first silicon rod to the rear end of the first silicon rod in the first direction, namely, the grinding of the opposite upper side surface and the lower side surface of the first silicon rod is completed; or, the first silicon rod clamp 2 drives the clamped first silicon rod to move in a roundabout manner in the first direction, so that the grinding surfaces of at least one pair of rough grinding tools in the first silicon rod and rough grinding device 4 fully cover the first silicon rod during grinding.

The first silicon rod clamp 2 comprises at least one pair of clamping arms, each clamping arm is provided with a rotatable clamping part, and the first silicon rods clamped by the clamping arms can be driven to rotate along the axial lead in the first direction by driving the clamping parts to rotate, so that the switching and chamfering of grinding of different sides of the first silicon rods are realized.

The first silicon rod clamped by the first silicon rod clamp 2 is driven to move along a first direction until the first silicon rod passes through the rough grinding device 4, so that at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on the upper side surface and the lower side surface of the first silicon rod; then, the clamping portion in the first silicon rod clamp 2 is driven to rotate by a preset angle (for example, 90 °), and the first silicon rod clamped by the first silicon rod clamp 2 is driven to rotate by the preset angle (for example, 90 °) so that the original left side and right side in the first silicon rod are changed into an upper side and a lower side (or a lower side and an upper side) through rotation, and thus, rough grinding operation can be continuously performed on the new upper side and lower side after the change in the first silicon rod through at least one pair of rough grinding tools in the rough grinding device 4, and rough grinding operation of each side in the first silicon rod is completed.

The rough grinding operation is performed on the new upper side and the new lower side of the first silicon rod after the transformation by using the rough grinding device 4, and various implementation modes can be adopted. For example, after the first silicon rod clamp 2 drives the clamped first silicon rod to move from the first side of the first processing location to the second side of the first processing location along the first direction so that the at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on the first pair of side surfaces of the first silicon rod, at this time, the first silicon rod clamp 2 and the clamped first silicon rod thereof have moved to the second side of the first processing location. In one implementation mode, a pair of oppositely arranged rough grinding tools are controlled to move in the direction of the plumb line so as to determine the feeding amount of the rough grinding tools for grinding the grinding surface of the first silicon rod, at the same time, the clamping portion in the first silicon rod clamp 2 is driven to rotate by a predetermined angle (e.g., 90 °), and the first silicon rod clamped by the first silicon rod clamp 2 is driven to rotate by a predetermined angle (e.g., 90 °) so that the original left and right sides in the first silicon rod are changed into upper and lower sides (or lower and upper sides) by rotation, and then, the first silicon rod clamp 2 is driven, the first silicon rod clamped by the first silicon rod clamp 2 is driven to move from the second side of the first processing position to the first side of the first processing position along the first direction, so that at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on a new second opposite side surface of the first silicon rod after rotation. In another implementation, a pair of opposing rough grinding tools are controlled to move in the direction of the plumb line (e.g., back to an initial position) to increase the spacing between the pair of rough grinding tools; driving the first silicon rod clamp 2 to drive the clamped first silicon rod to move from the second side of the first processing position to the first side of the first processing position along the first direction; driving the clamping part in the first silicon rod clamp 2 to rotate by a preset angle (e.g., 90 °), and driving the first silicon rod clamped by the first silicon rod clamp 2 to rotate by a preset angle (e.g., 90 °) so that the original left and right sides in the first silicon rod are changed into upper and lower sides (or lower and upper sides) through rotation; the feeding amount of the grinding surfaces of the rough grinding tool and the first silicon rod is determined by controlling the pair of rough grinding tools which are oppositely arranged to move in the direction of the plumb line, and meanwhile, the first silicon rod clamp 2 is driven to drive the clamped first silicon rod to move from the first side of the first processing position to the second side of the first processing position along the first direction, so that at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on a new second opposite side surface of the first silicon rod after rotation.

In the embodiment of the present application, after the rough grinding operation is performed on each side surface of the first silicon rod by at least one pair of rough grinding tools in the rough grinding device 4, the first silicon rod clamp 2 is driven to drive the clamped first silicon rod to move from the second side of the first processing location to the first side of the first processing location along the first direction.

Then, the position of the rough grinding device and the position of the fine grinding device are switched by the transposition mechanism, so that the rough grinding device is switched from the first processing position to the second processing position and the fine grinding device is switched from the second processing position to the first processing position. The movable transposition rotating shaft rotates by a preset angle, so that the coarse grinding device 4 and the fine grinding device 5 can switch positions between the first machining position and the second machining position, namely, the coarse grinding device 4 is transposed from the original first machining position to the second machining position, and the fine grinding device 5 is transposed from the original second machining position to the first machining position. In some embodiments, the transposition shaft is disposed in the direction of the plumb line, the first processing location and the second processing location are disposed on opposite sides of the transposition shaft along the second direction, and the rough grinding device 4 and the finish grinding device 5 are disposed on opposite sides of the transposition shaft, respectively, for example, the rough grinding device 4 and the finish grinding device 5 are disposed on opposite sides of the transposition shaft in a back-to-back manner, i.e., the rough grinding device 4 and the finish grinding device 5 may be separated by 180 °, such that driving the transposition shaft to rotate by a predetermined angle of 180 ° causes the rough grinding device 4 and the finish grinding device 5 to shift positions between the first processing location and the second processing location.

Then, driving the clamped first silicon rod to move along a first direction by a first silicon rod clamp arranged at the first processing position, so that the fine grinding device positioned at the first processing position carries out fine grinding operation on the first silicon rod; at this stage, the second silicon rod clamp arranged at the second processing position clamps the loaded second silicon rod and drives the clamped second silicon rod to move along the first direction, so that the rough grinding device positioned at the second processing position performs rough grinding operation on the second silicon rod. Aiming at the first processing position, the first silicon rod clamp 2 drives the clamped first silicon rod to move along the first direction, and the fine grinding device 5 positioned at the first processing position carries out fine grinding operation on the first silicon rod moving along the first direction; and aiming at the second processing position, the second silicon rod clamp 3 clamps the two opposite ends of the loaded second silicon rod, so that the axis line of the second silicon rod is parallel to the first direction, and then the second silicon rod clamp 3 drives the clamped second silicon rod to move along the first direction, so that the rough grinding device 4 positioned at the second processing position performs rough grinding operation on the second silicon rod moving along the first direction. In this embodiment, the lapping device 5 includes at least one pair of lapping abrasive tools disposed in the direction of the plumb line, the abrasive surfaces of which lie in opposing horizontal planes.

In the process of carrying out fine grinding operation on the first silicon rod, the pair of fine grinding tools which are oppositely arranged move in the direction of the plumb line so as to determine the feeding amount of the fine grinding tools and the grinding surface of the silicon rod for grinding the upper side surface and the lower side surface of the first silicon rod in the direction of the plumb line, at the moment, the first silicon rod clamp 2 drives the clamped first silicon rod to move in the first direction, so that the grinding surfaces of two fine grinding tools in the pair of fine grinding tools are ground from the front end of the first silicon rod in the first direction until reaching the rear end of the first silicon rod, namely, the grinding of the opposite upper side surface and the lower side surface of the first silicon rod is completed; or, the first silicon rod clamp 2 drives the clamped first silicon rod to move in a circuitous way in the first direction, so that the grinding surfaces of at least one pair of fine grinding tools in the first silicon rod and the fine grinding device 5 fully cover the first silicon rod during grinding.

The first silicon rod clamp 2 is used for driving the clamped first silicon rod to move along a first direction until the first silicon rod passes through the fine grinding device 5, so that at least one pair of fine grinding tools in the fine grinding device 5 perform fine grinding operation on the upper side surface and the lower side surface of the first silicon rod; then, the clamping portion in the first silicon rod clamp 2 is driven to rotate by a preset angle (for example, 90 °), and the first silicon rod clamped by the first silicon rod clamp 2 is driven to rotate by the preset angle (for example, 90 °) so that the original left side surface and right side surface in the first silicon rod are changed into an upper side surface and a lower side surface (or a lower side surface and an upper side surface) through rotation, and thus, new upper side surface and new lower side surface after the change in the first silicon rod can be continuously ground through at least one pair of grinding tools in the grinding device 5, and thus, the grinding operation of each side surface in the first silicon rod is completed.

Wherein, the new upper side and the lower side after transformation in the first silicon rod are finely ground by the fine grinding device 5, and various realization modes can be adopted. For example, after the first silicon rod clamp 2 moves the clamped first silicon rod from the first side of the first processing location to the second side of the first processing location along the first direction so that the at least one pair of lapping tools in the lapping device 5 perform lapping operation on the first pair of side surfaces of the first silicon rod, at this time, the first silicon rod clamp 2 and the clamped first silicon rod thereof have moved to the second side of the first processing location. In one implementation, a pair of finish grinding tools oppositely arranged is controlled to move in the direction of the plumb line to determine the feeding amount of the finish grinding tool grinding with the grinding surface of the first silicon rod, at the same time, the clamping portion in the first silicon rod clamp 2 is driven to rotate by a predetermined angle (e.g., 90 °), and the first silicon rod clamped by the first silicon rod clamp 2 is driven to rotate by a predetermined angle (e.g., 90 °) so that the original left and right sides in the first silicon rod are changed into upper and lower sides (or lower and upper sides) by rotation, and then, and driving the first silicon rod clamp 2, and driving the clamped first silicon rod to move from the second side of the first processing position to the first side of the first processing position along the first direction by the first silicon rod clamp 2 so that at least one pair of fine grinding tools in the fine grinding device 5 performs fine grinding operation on a new second pair of side surfaces of the first silicon rod after rotation. In another implementation, a pair of opposing lapping abrasive tools are controlled to move (e.g., back to an initial position) in the direction of the plumb line to increase the spacing between the pair of lapping abrasive tools; driving the first silicon rod clamp 2 to drive the clamped first silicon rod to move from the second side of the first processing position to the first side of the first processing position along the first direction; driving the clamping part in the first silicon rod clamp 2 to rotate by a preset angle (e.g., 90 °), and driving the first silicon rod clamped by the first silicon rod clamp 2 to rotate by a preset angle (e.g., 90 °) so that the original left and right sides in the first silicon rod are changed into upper and lower sides (or lower and upper sides) through rotation; and controlling the pair of finish grinding tools which are oppositely arranged to move in the direction of the plumb line so as to determine the feeding amount of the finish grinding tool for grinding the grinding surface of the first silicon rod, and simultaneously driving the first silicon rod clamp 2 to drive the clamped first silicon rod to move from the first side of the first processing position to the second side of the first processing position along the first direction so that at least one pair of finish grinding tools in the finish grinding device 5 carries out finish grinding operation on a new second pair of side surfaces of the first silicon rod after rotation.

In the embodiment of the present application, after the finish grinding operation is performed on each side surface of the first silicon rod by at least one pair of finish grinding tools in the finish grinding device 5, the first silicon rod clamp 2 is driven to drive the clamped first silicon rod to move from the second side of the first processing location to the first side of the first processing location along the first direction.

In the process of carrying out coarse grinding operation on the second silicon rod, the pair of oppositely arranged coarse grinding tools move in the direction of the plumb line to determine the grinding feed amount of the coarse grinding tools and the grinding surface of the silicon rod, and the grinding feed amount is used for grinding the upper side surface and the lower side surface of the second silicon rod in the direction of the plumb line, at the moment, the second silicon rod clamp 3 drives the clamped second silicon rod to move in the first direction, so that the grinding surfaces of two of the pair of coarse grinding tools start to grind from the front end of the second silicon rod to the rear end of the second silicon rod in the first direction, namely, the grinding of the opposite upper side surface and the lower side surface of the second silicon rod is completed; or, the second silicon rod clamp 3 drives the clamped second silicon rod to move in a roundabout manner in the first direction, so that the grinding surfaces of at least one pair of rough grinding tools in the second silicon rod and rough grinding device 4 fully cover the second silicon rod during grinding.

The second silicon rod clamp 3 comprises at least one pair of clamping arms, each clamping arm is provided with a rotatable clamping part, and the second silicon rods clamped by the clamping arms can be driven to rotate along the axial lead in the first direction by driving the clamping parts to rotate, so that the switching and chamfering of grinding of different sides of the second silicon rods are realized.

The second silicon rod clamp 3 is used for driving the clamped second silicon rod to move along the first direction until the second silicon rod passes through the rough grinding device 4, so that at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on the upper side surface and the lower side surface of the second silicon rod; then, the clamping portion in the second silicon rod clamp 3 is driven to rotate by a preset angle (for example, 90 °), and the second silicon rod clamped by the second silicon rod clamp 3 is driven to rotate by the preset angle (for example, 90 °) so that the original left side and right side in the second silicon rod are changed into an upper side and a lower side (or a lower side and an upper side) through rotation, and thus, rough grinding operation can be continuously performed on the new upper side and lower side after the change in the second silicon rod through at least one pair of rough grinding tools in the rough grinding device 4, and rough grinding operation of each side in the second silicon rod is completed.

The rough grinding operation is performed on the new upper side and the new lower side of the second silicon rod after the conversion by using the rough grinding device 4, and various implementation modes can be adopted. For example, after the second silicon rod clamp 3 drives the clamped second silicon rod to move from the first side of the second processing location to the second side of the second processing location along the first direction so that the at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on the first pair of side surfaces of the second silicon rod, at this time, the second silicon rod clamp 3 and the clamped second silicon rod thereof have moved to the second side of the second processing location. In one implementation mode, a pair of oppositely arranged rough grinding tools is controlled to move in the direction of the plumb line so as to determine the feeding amount of the rough grinding tools for grinding the grinding surface of the second silicon rod, at the same time, the holding portion in the second silicon rod clamp 3 is driven to rotate by a predetermined angle (e.g., 90 °), and the second silicon rod held by the second silicon rod clamp 3 is driven to rotate by a predetermined angle (e.g., 90 °) so that the original left and right sides in the second silicon rod are changed into upper and lower sides (or lower and upper sides) by rotation, and then, and driving the second silicon rod clamp 3, and driving the clamped second silicon rod to move from the second side of the second processing position to the first side of the second processing position along the first direction by the second silicon rod clamp 3 so that at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on a new second opposite side surface of the second silicon rod after rotation. In another implementation, a pair of opposing rough grinding tools are controlled to move in the direction of the plumb line (e.g., back to an initial position) to increase the spacing between the pair of rough grinding tools; driving a second silicon rod clamp 3 to drive the clamped second silicon rod to move from the second side of the second processing position to the first side of the second processing position along the first direction; driving the clamping part in the second silicon rod clamp 3 to rotate by a preset angle (e.g., 90 °), and driving the second silicon rod clamped by the second silicon rod clamp 3 to rotate by a preset angle (e.g., 90 °) so that the original left and right sides in the second silicon rod are changed into upper and lower sides (or lower and upper sides) through rotation; and controlling the pair of rough grinding tools which are oppositely arranged to move in the direction of the plumb line to determine the feeding amount of the grinding surfaces of the rough grinding tools and the second silicon rod, and simultaneously driving the second silicon rod clamp 3 to drive the clamped second silicon rod to move from the first side of the second machining position to the second side of the second machining position along the first direction so as to enable at least one pair of rough grinding tools in the rough grinding device 4 to perform rough grinding operation on a new second opposite side surface of the second silicon rod after rotation.

In the embodiment of the present application, after the rough grinding operation is performed on each side surface of the second silicon rod by at least one pair of rough grinding tools in the rough grinding device 4, the second silicon rod clamp 3 is driven to drive the clamped second silicon rod to move from the second side of the second processing location to the first side of the second processing location along the first direction.

Then, unloading the first silicon rod and loading a third silicon rod; the transposition mechanism drives the coarse grinding device and the fine grinding device to switch positions, so that the coarse grinding device is switched from the second machining position to the first machining position and the fine grinding device is switched from the first machining position to the second machining position. The first silicon rod, which has completed the grinding operation, is unloaded from the first processing station and a new third silicon rod is loaded, the unloading and loading of the silicon rods being carried out manually or by means of corresponding mechanical devices. In addition, the position of the rough grinding device 4 and the finish grinding device 5 can be switched between the first processing position and the second processing position by driving the transposition rotating shaft to rotate by a preset angle, that is, the rough grinding device 4 is transposed from the original second processing position to the first processing position and the finish grinding device 5 is transposed from the original first processing position to the second processing position, that is, in an embodiment of the present application, after the transposition rotating shaft is driven to rotate by a preset angle of 180 °, the position of the rough grinding device 4 and the position of the finish grinding device 5 can be switched between the first processing position and the second processing position.

Then, a second silicon rod clamp arranged at a second processing position clamps the loaded second silicon rod and drives the clamped second silicon rod to move along the first direction, so that the fine grinding device positioned at the second processing position carries out fine grinding operation on the second silicon rod; at this stage, the first silicon rod clamp arranged at the first processing location drives the clamped third silicon rod to move along the first direction, so that the rough grinding device positioned at the first processing location performs rough grinding operation on the first silicon rod.

Aiming at the second processing position, the second silicon rod clamp 3 drives the clamped second silicon rod to move along the first direction, and the fine grinding device 5 positioned at the second processing position carries out fine grinding operation on the second silicon rod moving along the first direction; aiming at the first processing position, the first silicon rod clamp 2 clamps two opposite ends of the third silicon rod, so that the axis of the third silicon rod is parallel to the first direction, and then the first silicon rod clamp 2 drives the clamped third silicon rod to move along the first direction, so that the rough grinding device 4 positioned at the first processing position performs rough grinding operation on the third silicon rod moving along the first direction.

In the process of carrying out fine grinding operation on the second silicon rod, the pair of fine grinding tools which are oppositely arranged move in the direction of the plumb line so as to determine the feeding amount of the grinding of the fine grinding tools and the grinding surface of the silicon rod, and the feeding amount is used for grinding the upper side surface and the lower side surface of the second silicon rod along the direction of the plumb line, at the moment, the second silicon rod clamp 3 drives the clamped second silicon rod to move along the first direction, so that the grinding surfaces of two fine grinding tools in the pair of fine grinding tools start to be ground from the front end of the second silicon rod along the first direction until reaching the rear end of the second silicon rod, namely, the grinding of the opposite upper side surface and the lower side surface of the second silicon rod is completed; or, the second silicon rod clamp 3 drives the clamped second silicon rod to move in a roundabout manner in the first direction, so that the grinding surfaces of at least one pair of fine grinding tools in the second silicon rod and the fine grinding device 5 fully cover the second silicon rod during grinding.

The second silicon rod clamp 3 is utilized to drive the clamped second silicon rod to move along the first direction until the second silicon rod passes through the fine grinding device 5, so that at least one pair of fine grinding tools in the fine grinding device 5 perform fine grinding operation on the upper side surface and the lower side surface of the second silicon rod; then, the clamping portion of the second silicon rod clamp 3 is driven to rotate by a preset angle (for example, 90 °), and the second silicon rod clamped by the second silicon rod clamp 3 is driven to rotate by a preset angle (for example, 90 °) so that the original left side surface and right side surface of the second silicon rod are changed into an upper side surface and a lower side surface (or a lower side surface and an upper side surface) through rotation, and thus, new upper side surface and new lower side surface after the change in the second silicon rod can be continuously ground through at least one pair of grinding tools in the grinding device 5, and thus, the grinding operation of each side surface in the second silicon rod is completed.

Wherein, the new upper side and the lower side after transformation in the second silicon rod are finely ground by the fine grinding device 5, and various realization modes can be adopted. For example, after the second silicon rod clamp 3 moves the clamped second silicon rod from the first side of the second processing location to the second side of the second processing location along the first direction so that the at least one pair of lapping tools in the lapping device 5 perform lapping operation on the first pair of side surfaces of the second silicon rod, at this time, the second silicon rod clamp 3 and the clamped second silicon rod thereof have moved to the second side of the second processing location. In one implementation, a pair of finish grinding tools oppositely arranged is controlled to move in the direction of the plumb line to determine the feeding amount of the finish grinding tool for grinding with the grinding surface of the second silicon rod, at the same time, the holding portion in the second silicon rod clamp 3 is driven to rotate by a predetermined angle (e.g., 90 °), and the second silicon rod held by the second silicon rod clamp 3 is driven to rotate by a predetermined angle (e.g., 90 °) so that the original left and right sides in the second silicon rod are changed into upper and lower sides (or lower and upper sides) by rotation, and then, and driving a second silicon rod clamp 3, and driving the clamped second silicon rod to move from the second side of the second processing position to the first side of the second processing position along the first direction by the second silicon rod clamp 3 so as to enable at least one pair of fine grinding tools in the fine grinding device 5 to perform fine grinding operation on a new second pair of side surfaces of the second silicon rod after rotation. In another implementation, a pair of opposing lapping abrasive tools are controlled to move (e.g., back to an initial position) in the direction of the plumb line to increase the spacing between the pair of lapping abrasive tools; driving a second silicon rod clamp 3 to drive the clamped second silicon rod to move from the second side of the second processing position to the first side of the second processing position along the first direction; driving the clamping part in the second silicon rod clamp 3 to rotate by a preset angle (e.g., 90 °), and driving the second silicon rod clamped by the second silicon rod clamp 3 to rotate by a preset angle (e.g., 90 °) so that the original left and right sides in the second silicon rod are changed into upper and lower sides (or lower and upper sides) through rotation; and controlling the pair of finish grinding tools which are oppositely arranged to move in the direction of the plumb line so as to determine the feeding amount of the finish grinding tool and the grinding surface of the second silicon rod, and simultaneously driving the second silicon rod clamp 3 to drive the clamped second silicon rod to move from the first side of the second machining position to the second side of the second machining position along the first direction so that at least one pair of finish grinding tools in the finish grinding device 5 carries out finish grinding operation on a new second pair of side surfaces of the second silicon rod after rotation.

In the embodiment of the present application, after the finish grinding operation is performed on each side surface of the second silicon rod by at least one pair of finish grinding tools in the finish grinding device 5, the second silicon rod clamp 3 is driven to drive the clamped second silicon rod to move from the second side of the second processing region to the first side of the second processing region along the first direction.

In the process of carrying out coarse grinding operation on the third silicon rod, the pair of oppositely arranged coarse grinding tools move in the direction of the plumb line to determine the feeding amount of grinding of the coarse grinding tools and the silicon rod grinding surface, so as to grind the upper side surface and the lower side surface of the third silicon rod in the direction of the plumb line, at the moment, the first silicon rod clamp 2 drives the clamped third silicon rod to move in the first direction, so that the grinding surfaces of two of the pair of coarse grinding tools start to grind from the front end of the third silicon rod in the first direction until reaching the rear end of the third silicon rod, namely, the grinding of the opposite upper side surface and the lower side surface of the third silicon rod is completed; or, the first silicon rod clamp 2 drives the clamped third silicon rod to move in a roundabout manner in the first direction, so that the grinding surfaces of at least one pair of rough grinding tools in the third silicon rod and the rough grinding device 4 fully cover the third silicon rod during grinding.

The first silicon rod clamp 2 comprises at least one pair of clamping arms, each clamping arm is provided with a rotatable clamping part, and the third silicon rod clamped by the clamping arms can be driven to rotate along the axis of the first direction by driving the clamping parts to rotate, so that the switching and chamfering of grinding of different sides of the third silicon rod are realized.

The first silicon rod clamp 2 is used for driving the clamped third silicon rod to move along the first direction until the third silicon rod passes through the rough grinding device 4, so that at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on the upper side surface and the lower side surface of the third silicon rod; then, the clamping portion in the first silicon rod clamp 2 is driven to rotate by a preset angle (for example, 90 °), and the third silicon rod clamped by the first silicon rod clamp 2 is driven to rotate by a preset angle (for example, 90 °) so that the original left side and right side of the third silicon rod are changed into an upper side and a lower side (or a lower side and an upper side) through rotation, and thus, rough grinding operation can be continuously performed on the new upper side and lower side after changing in the third silicon rod through at least one pair of rough grinding tools in the rough grinding device 4, and rough grinding operation of each side in the third silicon rod can be completed.

The rough grinding operation is performed on the new upper side and the new lower side of the third silicon rod after the conversion by using the rough grinding device 4, and various implementation modes can be adopted. For example, after the first silicon rod clamp 2 drives the clamped third silicon rod to move from the first side of the first processing location to the second side of the first processing location along the first direction so that the at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on the first pair of side surfaces of the third silicon rod, at this time, the first silicon rod clamp 2 and the clamped third silicon rod thereof have moved to the second side of the first processing location. In one implementation mode, a pair of oppositely arranged rough grinding tools is controlled to move in the direction of the plumb line so as to determine the grinding feed amount of the rough grinding tools and the grinding surface of the third silicon rod, at the same time, the clamping portion in the first silicon rod clamp 2 is driven to rotate by a predetermined angle (e.g., 90 °), and the third silicon rod clamped by the first silicon rod clamp 2 is driven to rotate by a predetermined angle (e.g., 90 °) so that the original left and right sides in the third silicon rod are changed into upper and lower sides (or lower and upper sides) by rotation, and then, and driving the first silicon rod clamp 2, and driving the clamped third silicon rod to move from the second side of the first processing position to the first side of the first processing position along the first direction by the first silicon rod clamp 2 so that at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on a new second opposite side surface of the third silicon rod after rotation. In another implementation, a pair of opposing rough grinding tools are controlled to move in the direction of the plumb line (e.g., back to an initial position) to increase the spacing between the pair of rough grinding tools; driving the first silicon rod clamp 2 to drive the clamped third silicon rod to move from the second side of the first processing position to the first side of the first processing position along the first direction; driving the clamping part in the first silicon rod clamp 2 to rotate by a preset angle (e.g., 90 °), and driving the third silicon rod clamped by the first silicon rod clamp 2 to rotate by a preset angle (e.g., 90 °) so that the original left and right sides in the third silicon rod are changed into upper and lower sides (or lower and upper sides) through rotation; and controlling the pair of rough grinding tools which are oppositely arranged to move in the direction of the plumb line to determine the feeding amount of the grinding surfaces of the rough grinding tools and the third silicon rod, and simultaneously driving the first silicon rod clamp 2 to drive the clamped third silicon rod to move from the first side of the first processing position to the second side of the first processing position along the first direction so that at least one pair of rough grinding tools in the rough grinding device 4 performs rough grinding operation on a new second opposite side surface of the third silicon rod after rotation.

In the embodiment of the present application, after the rough grinding operation is performed on each side surface of the third silicon rod by at least one pair of rough grinding tools in the rough grinding device 4, the first silicon rod clamp 2 is driven to drive the clamped third silicon rod to move from the second side of the first processing location to the first side of the first processing location along the first direction.

The application discloses silicon rod grinding method is applied to among the aforementioned silicon rod grinding machine, silicon rod grinding machine is including the frame that has silicon rod processing platform, silicon rod processing platform is equipped with first processing position and second processing position, silicon rod grinding machine still includes first silicon rod anchor clamps, second silicon rod anchor clamps, corase grind device and correct grinding device. According to the silicon rod grinding method, the first silicon rod clamp, the second silicon rod clamp, the coarse grinding device and the accurate grinding device are controlled in a coordinated mode, the coarse grinding device and the accurate grinding device in the silicon rod grinding machine are in working states at the same moment, the transposition mechanism is controlled to drive the coarse grinding device and the accurate grinding device to switch positions between the first machining position and the second machining position, so that a silicon rod clamped by the first silicon rod clamp or the second silicon rod clamp in the first machining position or the second machining position can finish coarse grinding operation and accurate grinding operation on the corresponding machining position, the silicon rod does not need to be switched to the machining position, the silicon rod grinding efficiency can be improved, the time consumed by grinding operation can be shortened, and the economic efficiency can be improved.

Referring to fig. 3 and 4, fig. 3 is a schematic structural view of a silicon rod grinding machine according to another embodiment of the present application, and fig. 4 is a top view of fig. 3. As shown in fig. 3 and 4, the silicon rod grinding machine includes a base 1, a first silicon rod clamp 2, a second silicon rod clamp 3, a rough grinding device 4, a finish grinding device 5, a transposition mechanism 6, and a silicon rod transfer device 7.

The silicon rod grinding machine of the present application is used for grinding silicon rods having a quasi-rectangular (including quasi-square) cross section, wherein a plurality of silicon rods may be, for example, single crystal silicon rods or polycrystalline silicon rods, taking single crystal silicon rods as an example, which are obtained by cutting a starting silicon rod through a silicon rod and thereafter squaring the cut silicon rod through a silicon rod squaring device, the starting silicon rod being generally rod-shaped silicon crystal grown from a melt by a czochralski method or a suspension zone melting method.

The base 1 is provided with a silicon rod processing platform, and the silicon rod processing platform is provided with a first processing area and a second processing area. The silicon rod processing platform is arranged on the upper side face of the base 1, in an implementation manner of the embodiment, the processing platform is designed to be rectangular along the shape of the base 1, as shown in fig. 3 and 4, the first processing region and the second processing region are arranged along the front-back direction (namely, the first direction) of the silicon rod processing platform, the first processing region and the second processing region are symmetrically arranged on the left side and the right side (namely, the second direction) of the silicon rod processing platform, and the silicon rod processing platform can process the corresponding loaded single crystal silicon rod on the first processing region and the second processing region respectively and independently.

The first silicon rod clamp 2 and the second silicon rod clamp 3 are respectively and correspondingly arranged at the first processing position and the second processing position, and in an embodiment of the present application, as shown in fig. 3, the first silicon rod clamp 2 and the second silicon rod clamp 3 are arranged at the left and right sides of the silicon rod processing platform in parallel. The first silicon rod clamp 2 is arranged at a first processing position and used for clamping a silicon rod and driving the clamped silicon rod to move along a first direction (namely, the X-axis direction in fig. 3), the second silicon rod clamp 3 is arranged at a second processing position and used for clamping the silicon rod and driving the clamped silicon rod to move along the first direction, and the axis line of the silicon rod is parallel to the first direction.

The first silicon rod clamp is arranged at the first processing position through a first guide structure, wherein the first guide structure is a transfer guide rail and/or a guide pillar arranged along a first direction. In the embodiment shown in fig. 3, the first silicon rod clamp 2 is arranged in the first processing position by means of a transfer rail arranged in a first direction, such that the first silicon rod clamp 2 can be moved with the clamped silicon rod along the transfer rail.

Specifically, the first silicon rod clamp 2 includes a clamp arm mounting seat, a moving mechanism, a pair of clamp arms, and a clamp arm driving mechanism.

The clamping arm mounting seat is arranged on the corresponding first guide structure, wherein the first guide structure can be, for example, a transfer guide rail, a guide pillar, or a combination of the transfer guide rail and the guide pillar. In the embodiment shown in fig. 3, the first guide structure is a transfer rail, and the transfer rail as the first guide structure is referred to as a first transfer rail, and therefore, the clamp arm mount is provided on the first transfer rail. In one implementation manner of this embodiment, the bottom of the clamp arm mounting seat is provided with a guide groove structure or a guide block structure matched with the first transfer guide rail, the first transfer guide rail is arranged along the first direction, and the length range of the first transfer guide rail 22 in the first direction can cover the complete length of the silicon rod processing platform in the first direction.

The moving mechanism is used for driving the clamping arm mounting seat to move along the corresponding first guide structure. In the embodiment shown in fig. 3, the moving mechanism is used for driving the clamping arm mounting seats to move along the corresponding first transfer guide rails.

In certain implementations, the moving mechanism may include: a movable screw rod and a driving source. The movable lead screw is arranged along a first direction and is associated with the clamping arm mounting seat, the length of the movable lead screw is similar to that of the first transfer guide rail, and the movable lead screw can cover the complete length of the silicon rod processing platform in the first direction. The driving source is associated with the moving screw for driving the moving screw to rotate so as to move the associated clamp arm mounting seat in the first direction, and the driving source may be a servo motor, for example. In practical application, the driving source is used for driving the moving screw rod to rotate in a forward direction, and the moving screw rod rotating in the forward direction enables the clamping arm mounting seat on the moving screw rod to move forwards along the first transfer guide rail; on the contrary, the driving source is used for driving the movable screw rod to rotate reversely, and the movable screw rod rotating reversely enables the clamping arm mounting seat on the movable screw rod to move backwards along the first transfer guide rail.

The pair of clamping arms are arranged oppositely along the first direction and used for clamping two end faces of the silicon rod. The silicon rod is a slender structure which is cut, the length direction of the silicon rod is placed along the first direction, and the end faces are sections of two ends in the length direction. In the embodiment shown in fig. 3, both gripper arms of the pair of gripper arms extend from the gripper arm mount in a second direction (i.e. the Y axis) towards a middle region of the silicon rod processing platform. Wherein either one of the pair of clamp arms is provided with a clamp, i.e. in the embodiment shown in fig. 4, each clamp arm is provided with a clamp.

The clamping arm driving mechanism is used for driving at least one clamping arm in a pair of clamping arms to move along a first direction so as to adjust the clamping distance between the pair of clamping arms. In the embodiment shown in fig. 3, two of the pair of clamping arms are oppositely arranged along a first direction, and the clamping arm driving mechanism can drive at least one of the pair of clamping arms to move along the first direction so as to adjust the clamping distance between the pair of oppositely arranged clamping arms.

Assuming that both of the pair of clamp arms are driven by the clamp arm driving mechanism to move along the first direction, in one embodiment, the clamp arm driving mechanism further includes: the bidirectional screw rod is arranged along a first direction, the bidirectional screw rod is a left-handed screw rod and a right-handed screw rod, two sections of threads are distributed on the rod body, the rotation directions of the two sections of threads are opposite, namely one section of thread is a left-handed thread, the other section of thread is a right-handed thread, the left-handed thread can be associated with one clamping arm of the pair of clamping arms, the right-handed thread can be associated with the other clamping arm of the pair of clamping arms, and the driving source is associated with the bidirectional screw rod and used for driving the bidirectional screw rod to rotate so that the associated first clamping arm and the associated second clamping arm move in the opposite direction or move back to back along the first direction. For example, when the driving source drives the bidirectional screw rod to rotate in a forward direction, the associated first clamp arm and second clamp arm are driven to move in a first direction towards each other (i.e., to approach each other) to reduce the clamping distance between the two clamp arms, or when the driving source drives the screw rod to rotate in a reverse direction, the associated first clamp arm and second clamp arm are driven to move in a first direction towards each other (i.e., to move away from each other) to increase the clamping distance between the two clamp arms. The driving source can be a servo motor, for example, and is located in the middle section of the bidirectional screw rod. Of course, the clamp arm driving mechanism may adopt other structures, for example, in another embodiment, the clamp arm driving mechanism may include: the driving gear is positioned between the pair of racks to be meshed with the pair of racks and controlled by the driving motor, so that the driving motor drives the driving gear to rotate to drive the pair of racks and the associated first clamping arm and second clamping arm to move in the first direction in a face-to-face mode or in a back-to-back mode. For example, when the driving source drives the driving gear to rotate in a forward direction, the first clamping arm and the second clamping arm associated with the pair of racks are driven to move in a first direction towards each other (i.e., approach each other), so as to reduce the clamping distance between the two clamping arms, or when the driving source drives the driving gear to rotate in a reverse direction, the first clamping arm and the second clamping arm associated with the pair of racks are driven to move in a second direction towards each other (i.e., move away from each other), so as to increase the clamping distance between the two clamping arms.

In an embodiment of the present application, the clamping portions of the clamping arms are of a rotary design, as shown in fig. 4, each of the first and second silicon rod clamps 2 and 3 further comprises a clamping portion rotating mechanism for driving the clamping portions of the clamping arms of the silicon rod clamps to rotate. In an implementation manner of this embodiment, the first silicon rod clamp 2 or the second silicon rod clamp 3 is driven by the provided clamping portion rotating mechanism to rotate the clamping portion of the clamping arm around the first direction, which is the longitudinal direction of the silicon rod, as an axis, and the clamped silicon rod correspondingly rotates around the first direction as an axis. In the actual grinding, the grinding face that the silicon rod needs to go on and the edge of chamfer at juncture between four faces and four faces of length direction, by the arm lock that this application provided, can realize the selection and the control to the different grinding faces of silicon rod and different edges.

In some embodiments, a pair of clamping portions of the silicon rod clamp are provided as rigid structures for contacting the silicon rod portion, so as to prevent the clamped silicon rod from being disturbed during the cutting operation and the grinding operation to affect the processing precision.

With continued reference to fig. 4, the clamping portion of the clamping arm includes a rotatable circular table and a series of protruding contacts disposed on the circular table, each of the contacts having a contact plane. The round platform is rotatory under the drive of clamping part slewing mechanism, and in the implementation of this embodiment, the protruding length of contact is adjustable in the position of first direction promptly for to the in-process of centre gripping silicon rod, to the lower silicon rod of terminal surface roughness, can be according to the protruding length of silicon rod terminal surface adjustment contact, make each abrasive surface and silicon rod terminal surface be in the state of hugging closely. The protruding length is a length in a first direction from a circular plane of the circular truncated cone to a contact plane of the contact.

The silicon rod transfer device is arranged at the loading position of the silicon rod processing platform and used for moving the silicon rod to be loaded to at least one processing position of at least one corresponding silicon rod processing device. Taking a silicon rod grinder as an example, the silicon rod grinder has a rough grinding device located at the first processing location and a finish grinding device located at the second processing location, and thus, the silicon rod transfer device is used to load the silicon rod from the loading location to the first processing location or the second processing location. The application discloses a silicon rod grinding machine is equipped with the loading position on silicon rod processing platform, load the position and dispose silicon rod transfer device for with treat that the silicon rod of grinding loads to first processing position or second processing position. As shown in fig. 3, in an embodiment of the present application, a loading location is provided at one end of the silicon rod processing platform, and the loading location may be located, for example, in a region between the first processing location and the second processing location, and a silicon rod transfer device 7 is provided at the loading location. In this way, the silicon rod can be conveniently loaded to the first and second processing locations on both sides thereof by the silicon rod transfer device 7. For example, a silicon rod is loaded to the first processing location by means of the silicon rod transfer device 7 so that the first silicon rod clamp 2 clamps the silicon rod, or a silicon rod is loaded to the second processing location by means of the silicon rod transfer device 7 so that the second silicon rod clamp 3 clamps the silicon rod,

In an embodiment of the present disclosure, the silicon rod transfer device 7 may be used to load the silicon rod to the first processing region or the second processing region, and may also be used to perform a centering operation on the silicon rod loaded to the first processing region or the second processing region before the silicon rod is ground. The centering operation is specifically to enable the axis of the silicon rod to be on the same straight line with the clamping center line of the first silicon rod clamp or the second silicon rod clamp.

Referring to fig. 6 to 9, a schematic configuration of the silicon rod transfer device according to an embodiment of the present invention is shown, wherein fig. 6 is a schematic configuration of the silicon rod transfer device according to an embodiment of the present invention, and fig. 7 is a top view of fig. 6. As described above, in the present application, the silicon rod transfer device 7 may move the silicon rod to be ground (see the silicon rod 101 in fig. 1 or fig. 2) from the loading section to the first processing section or the second processing section and may enable the silicon rod 101 to complete the centering operation before the grinding operation is performed. As shown in fig. 6 to 9, the silicon rod transfer device 7 includes: silicon rod material loading bearing structure, centering adjustment mechanism and feed actuating mechanism.

The silicon rod loading bearing structure is used for bearing a silicon rod to be loaded. In an embodiment of the present application, the silicon rod loading carrying structure is used for carrying a silicon rod 101 to be loaded. The silicon rod loading and carrying structure comprises a carrying base 712 and a first loading part 711 and a second loading part 713 which are oppositely arranged along a second direction, wherein the first loading part 711 and the second loading part 713 are matched for carrying the silicon rod 101 to be loaded, and the first loading part 711 and the second loading part 713 can relatively move relative to the carrying base 712, so that the first loading part 711 and the second loading part 713 and the silicon rod 101 carried by the first loading part 711 and the second loading part 713 can relatively move relative to the carrying base 712. In other embodiments, the silicon rod loading support structure may be a plate-shaped structure, for example, a rectangular support plate, on which pillow strips may be disposed, and in order to protect the supported silicon rods, the pillow strips may be made of a flexible material, which may be rubber, acrylic, plastic, or the like, for example.

With respect to the first loading part 711 and the second loading part 713, the silicon rod 101 to be processed is loaded. In some embodiments, the loading portions of the first and

second loading parts

711 and 713 for loading the silicon rods 101 are substantially plate-shaped structures, and the first and

second loading parts

711 and 713 further include stopper plates (bars) protruding from the plate-shaped structures, on which pillow bars may be disposed, and the pillow bars may be made of a flexible material, such as rubber, acrylic, plastic, etc., in order to protect the loaded silicon rods 101.

According to the silicon rod transfer device disclosed by the application, through the centering adjustment structure, the position of the silicon rod carried by the silicon rod loading and carrying structure can be adjusted, so that the axis of the silicon rod corresponds to the preset central line.

As mentioned above, the centering operation specifically refers to that the axis of the silicon rod is aligned with the clamping center line of the first or second silicon rod clamp, that is, the axis of the silicon rod coincides with the clamping center line of the first or second silicon rod clamp. In one implementation, the first and second silicon rod clamps are identical, such that the clamping center line of the first silicon rod clamp coincides with the clamping center line of the second silicon rod clamp in the direction of the plumb line. In another implementation, the first and second silicon rod clamps may be different, and the clamping center line of the first silicon rod clamp and the clamping center line of the second silicon rod clamp are not coincident in the direction of the plumb line.

In practical applications, taking the first silicon rod clamp 2 as an example, the clamping center line of the first silicon rod clamp 2 (or the clamping center line of the second silicon rod clamp 3) may be predetermined, and the predetermined center line may be determined based on the clamping center line of the first silicon rod clamp 2 (or the clamping center line of the second silicon rod clamp 3), wherein the predetermined center line is the same as (i.e., the height of) the clamping center line of the first silicon rod clamp 2 (or the clamping center line of the second silicon rod clamp 3) in the direction of the plumb line. Therefore, the centering adjustment mechanism for adjusting the position of the silicon rod to be loaded such that the axis line thereof corresponds to the predetermined center line is for adjusting the position of the silicon rod to be loaded 101 in the direction of the plumb line such that the axis line thereof coincides with the predetermined center line in the direction of the plumb line.

Regarding the centering adjustment mechanism, in an embodiment of the present application, the centering adjustment mechanism includes a vertical lifting mechanism for driving the silicon rod loading bearing structure and the silicon rod carried thereby to perform a vertical lifting motion so that the axis of the silicon rod is aligned with the predetermined center line in the direction of the plumb line. Fig. 10 is a schematic structural view of a centering adjustment mechanism in the silicon rod transfer device according to the present application. As shown in fig. 10, the vertical lifting as the centering adjustment mechanism further includes: a vertical elevating guide 721 and a vertical elevating driving unit 723.

The vertical elevating guide 721 may be disposed on the supporting base 712 of the silicon rod loading supporting structure along the direction of the plumb line, and specifically, in an embodiment of the present application, the silicon rod transferring device further includes a mounting structure 720, and the vertical elevating guide 721 is disposed on the mounting structure 720 and passes through the supporting base 712 of the silicon rod loading supporting structure. In order to ensure the stability of the silicon rod loading structure along the vertical elevating guide 721, the number of the vertical elevating guide 721 may be plural, for example, in the embodiment shown in fig. 10, four vertical elevating guide 721 are provided, which correspond to four corners of the loading base 712 (in the embodiment, the loading base 712 is rectangular) in the silicon rod loading structure. Of course, the vertical lifting guide rods may be in other numbers, for example, three, five, six, or more, taking three as an example, three vertical lifting guide rods may be arranged in an isosceles triangle manner, taking five as an example, five vertical lifting guide rods may be additionally provided in the central region on the basis of the layout of the four vertical lifting guide rods, and the like.

The vertical lifting driving unit 723 is used for driving the silicon rod loading bearing structure to move up and down along the vertical lifting guide rod. In the above-mentioned vertical elevating driving unit 723, the driving motor 7231 and the screw rod assembly 7233 driven by the driving motor 7231 may be disposed on the mounting structure 720, and the screw rod assembly 7233 is connected to the driving motor 7231 and the bearing base 712 in the silicon rod loading bearing structure. When the vertical lifting driving unit 723 is used, the driving motor drives the connected screw rod assembly 7233 to rotate in the forward direction, so as to drive the silicon rod loading bearing structure to move up along the vertical lifting guide rod 721, or the driving motor drives the connected screw rod assembly 7233 to rotate in the reverse direction, so as to drive the silicon rod loading bearing structure to move down along the vertical lifting guide rod 721.

Of course, the vertical lifting driving unit is not limited to the structure shown in fig. 10, and in other embodiments, the vertical lifting driving unit may still be changed in other ways, for example, in an embodiment, the vertical lifting driving unit may also include a driving motor and a rack-and-pinion transmission assembly driven by the driving motor, wherein the rack-and-pinion transmission assembly may include a driving gear and a lifting rack, the driving motor may be disposed on the mounting structure, the lifting rack is disposed along the direction of the plumb line and connected to the bearing base 712 of the silicon rod loading bearing structure, and the driving gear is engaged with the lifting rack and controlled by the driving motor. When the vertical lifting driving unit is used, the driving motor drives the driving gear to rotate forward, and then drives the lifting rack and the silicon rod loading bearing structure connected with the lifting rack to move up along the vertical lifting guide rod 721, or the driving motor drives the driving gear to rotate reversely, and then drives the lifting rack and the silicon rod loading bearing structure connected with the lifting rack to move down along the vertical lifting guide rod 721.

In addition, in the embodiment shown in fig. 10, the vertical lifting driving unit 723 may further include an auxiliary lifting assembly, which further includes a cylinder and a lifting rod connected to the cylinder, wherein the cylinder may be disposed on the mounting structure 720, and the lifting rod is connected to the cylinder and is associated with the supporting base 712 in the silicon rod loading supporting structure. The association of the lifting rams with the bearing base 712 in the silicon rod loading bearing arrangement may take a variety of implementations, for example, in one implementation the lifting rams are connected with the bearing base 712, and in another implementation the lifting rams are in contact with the bearing base 712. Thus, when the vertical elevating driving unit 723 is used, the adjusted auxiliary elevating component can assist the supporting base 712 to move up and down along the vertical elevating guide rod 721, so as to ensure the stability of the lifting operation of the supporting base 712.

In the application, by using the vertical lifting mechanism as the centering adjusting mechanism, the silicon rod loaded by the silicon rod loading and bearing structure is driven to do vertical lifting movement, the axis line of the silicon rod 101 may be aligned with a predetermined center line in the direction of the plumb line, wherein the predetermined centre line may be obtained in accordance with the centre of clamping of the first silicon rod clamp 2 or the centre of clamping of the second silicon rod clamp 3, generally, since the clamping center of the first silicon rod clamp 2 or the clamping center of the second silicon rod clamp 3 is determined, the predetermined center line is also determined (if the clamping center line of the first silicon rod clamp does not coincide with the clamping center line of the second silicon rod clamp in the direction of the plumb line, a first predetermined center line corresponding to the clamping center line of the first silicon rod clamp and a second predetermined center line corresponding to the clamping center line of the second silicon rod clamp may be included). In this way, when the vertical lifting mechanism is used, in order to ensure a lifting value of the silicon rod carried by the driving silicon rod loading bearing structure to lift in the direction of the plumb line, a dimension of the silicon rod 101 in the direction of the plumb line or a height difference of the silicon rod 101 and the clamping center of the first silicon rod clamp 2 or the clamping center of the second silicon rod clamp 3 in the direction of the plumb line needs to be determined. Therefore, in an embodiment of the present application, the centering adjustment mechanism further includes a height detector for detecting position information of an axis of the silicon rod carried by the silicon rod loading and carrying structure in the direction of the plumb line.

The silicon rod transfer device further includes a first centering adjustment mechanism for changing a position of the silicon rod in the second direction by adjusting the first loading part and the second loading part such that an axis line of the silicon rod corresponds to a center line of the silicon rod loading bearing structure in the second direction.

In an embodiment of the present application, the first centering adjustment mechanism includes: the folding device comprises an opening and closing slide rail and an opening and closing driving unit, wherein the opening and closing driving unit can be used for driving a first loading part and a second loading part to move oppositely along the opening and closing slide rail so as to execute an opening action or move oppositely along the opening and closing slide rail so as to execute an opening action.

Referring to fig. 8, a schematic view of the first loading unit and the second loading unit of fig. 7 is shown. As shown in fig. 8, the carrying base 712 is provided with two opening/closing slide rails 730, wherein the number of the opening/closing slide rails 730 may be two, for example, the two opening/closing slide rails 730 are arranged in parallel, that is, the two opening/closing slide rails 730 are arranged along the second direction and are respectively arranged at two opposite ends of the carrying base 712 along the first direction, and correspondingly, the bottoms of the first loading component 711 and the second loading component 713 are respectively provided with a guide groove structure or a guide block structure matched with the opening/closing slide rails 730.

The opening and closing driving unit is used for driving the first loading part and the second loading part to move oppositely along the opening and closing slide rail so as to execute the closing action or move oppositely along the opening and closing slide rail so as to execute the opening action. As shown in fig. 8, the opening and closing driving unit includes: a rotation plate 731, a first transmission assembly 733, a second transmission assembly 735, a first push-pull member 737, and a second push-pull member 739.

The rotary disc is arranged on the bearing base through a rotary shaft. In the embodiment shown in fig. 8, the rotation axis 731 is disposed in the central region of the supporting base 712 through a rotation axis, for example, the rotation axis of the rotation axis 731 is located at the geometric center of the supporting base 712. The shape of the rotation plate 731 is designed to be a circle, but not limited to this, the shape of the rotation plate 731 can also be designed to be a square, a regular polygon, or other customized shapes.

The first transmission assembly is associated with the carrying base and the turntable, and the second transmission assembly is associated with the carrying base and the turntable. In the embodiment shown in fig. 8, the first transmission assembly 733 and the second transmission assembly 735 are disposed in a central symmetry manner with respect to the rotation plate 731, wherein the first transmission assembly 733 is associated with the carrying base 712 and the rotation plate 731, and the second transmission assembly 735 is associated with the carrying base 712 and the rotation plate 731.

Regarding the first transmission assembly, in an implementation manner, the first transmission assembly further includes a first cylinder, a cylinder body of the first cylinder is connected to the bearing base, and a piston rod of the first cylinder is connected to the turntable. As shown in fig. 8, the first transmission assembly 733 includes a first cylinder, a cylinder side of the first cylinder is connected to the supporting base 712 via a mounting member, wherein the mounting member is fixed to the supporting base 712 via a bolt, for example, the first cylinder is coupled to the mounting member via a shaft to obtain a certain degree of freedom of rotation, and a piston rod of the first cylinder is coupled to the rotating plate 731 via a shaft.

Similarly, regarding the second transmission assembly, in an implementation manner, the second transmission assembly further includes a second cylinder, a cylinder of the second cylinder is connected with the bearing base, and a piston rod of the second cylinder is connected to the turntable. As shown in fig. 8, the second transmission assembly 735 includes a second cylinder, the cylinder side of which is connected to the supporting base 712 through a mounting member, wherein the mounting member can be fixed on the supporting base 712 through a bolt, for example, the second cylinder is coupled to the mounting member to obtain a certain degree of freedom of rotation, and the piston rod of the second cylinder is coupled to the rotating plate 731.

The first push-pull member is associated with the turntable and the first loading member, and the second push-pull member is associated with the turntable and the second loading member.

In the embodiment shown in fig. 8, the first pushing and pulling member 737 and the second pushing and pulling member 739 are arranged to be symmetrical with respect to the rotation plate 731, wherein the first pushing and pulling member 737 is associated with the rotation plate 731 and the first loading member 711, and the second pushing and pulling member 739 is associated with the rotation plate 731 and the second loading member 713.

In one embodiment, the first push-pull member 737 is a first link, a first end of the first link 737 is coupled to the rotation plate 731, and a second end of the first link 737 is coupled to the first loading member 711, and for example, a shaft joint may be provided at the second end of the first link 737, and a shaft coupling hole corresponding to the shaft joint may be provided at the bottom of the first loading member 711.

In one embodiment, the second push-pull member 739 is a second link, a first end of the second link 739 is coupled to the rotation plate 731, and a second end of the second link 739 is coupled to the second loading member 713, and for example, a coupling may be provided at the second end of the second link 739, and a coupling hole corresponding to the coupling may be provided at the bottom of the second loading member 713.

Thus, when the opening and closing driving unit disclosed in the foregoing embodiment is used, when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate in the forward direction, the turntable drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move in opposite directions along the opening and closing slide rail; when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate reversely, the turntable drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move back to back along the opening and closing slide rail.

As shown in fig. 8, when the opening and closing driving unit disclosed in the foregoing embodiment is used, one of the driving components may be designed as a driving type, the first driving component 733 is taken as an example, the first cylinder in the first driving component 733 is designed as a control cylinder, the first cylinder is taken as an example of a control cylinder, after the first cylinder is controlled, the piston rod of the first cylinder is ejected, the driving dial 731 rotates clockwise, the clockwise rotating dial 731 drives the piston rod of the second cylinder to extend, the clockwise rotating dial 731 drives the first connecting rod 737 and the second connecting rod 739 thereon to rotate clockwise (the first connecting rod 737 is coupled to the shaft contact of the dial 731, and the shaft contact of the second connecting rod 739 is coupled to the dial 731, and when the shaft contact is twisted clockwise, the first connecting rod 737 and the second connecting rod 739 drive the corresponding first loading part 711 and second loading part 713 respectively to open and close to the central line of the silicon rod loading bearing structure along the second direction), and the first connecting rod 737 and the second loading part 713 are driven by the first connecting rod 737 and the second connecting rod 739 respectively to open and close to the sliding part along the central line along the sliding direction of the central line of the sliding structure along the central line of the silicon rod loading structure The rails 730 are moved toward each other to perform the folding operation, and the state shown in fig. 9 is formed (fig. 9 is a schematic view of the silicon rod transfer device after the silicon rod is loaded). Correspondingly, after the first air cylinder is controlled, the piston rod of the first air cylinder retracts, the driving rotary table 731 rotates counterclockwise, the rotary table 731 rotating counterclockwise drives the piston rod of the second air cylinder to retract, in addition, the rotary table 731 rotating counterclockwise drives the first connecting rod 737 and the second connecting rod 739 thereon to perform counterclockwise twisting (the shaft joint of the first connecting rod 737 and the shaft joint of the second connecting rod 739 on the rotary table 731 are away from the center line in the second direction in the silicon rod loading bearing structure and correspond to each other when rotating clockwise), and the first connecting rod 737 and the second connecting rod 739 respectively drive the corresponding first loading part 711 and second loading part 713 to move back and forth along the opening and closing slide rail 730 to perform an opening action.

In the embodiment shown in fig. 8, the opening and closing driving unit in the first centering adjustment mechanism includes: the rotating plate 731, the first transmission assembly 733, the second transmission assembly 735, the first push-pull member 737, and the second push-pull member 739, but not limited thereto, in other embodiments, the opening/closing driving unit in the first centering adjustment mechanism can be modified.

For example, in some embodiments, the opening and closing driving unit includes: the bidirectional screw rod is arranged along the second direction, two ends of the bidirectional screw rod are in threaded connection with the first loading part and the second loading part respectively, and the driving source is connected with the bidirectional screw rod and used for driving the bidirectional screw rod to rotate so that the first loading part and the second loading part move in opposite directions or move back to back along the second direction. When the opening and closing driving unit disclosed in the embodiment is used, the driving source is made to drive the bidirectional screw rod to rotate in the forward direction, so that the first loading part and the second loading part move in the opposite direction along the opening and closing slide rail (the opening and closing slide rail is arranged in the second direction) to perform the closing action, or the driving source is made to drive the bidirectional screw rod to rotate in the reverse direction, so that the first loading part and the second loading part move in the opposite direction along the opening and closing slide rail (the opening and closing slide rail is arranged in the second direction) to perform the opening action.

For example, in some embodiments, the opening and closing driving unit includes: the first rack and the second rack are arranged along a second direction, the first rack is connected with the first loading part, and the second rack is connected with the second loading part; the driving gear is positioned between the first rack and the second rack and meshed with the first rack and the second rack; and the driving source is used for driving the driving gear to rotate so as to drive the first loading part connected with the first rack and the second loading part connected with the second rack to move in opposite directions or move back to back in the second direction. When the opening and closing drive unit disclosed in the embodiment is used, the drive source is made to drive the drive gear to rotate in the forward direction, and the first loading part connected with the first rack and the second loading part connected with the second rack move in the opposite direction along the opening and closing slide rail (the opening and closing slide rail is arranged along the second direction) through the engagement of the drive gear and the first rack and the second rack so as to perform the closing action, or the drive source is made to drive the drive gear to rotate in the reverse direction, and the first loading part connected with the first rack and the second loading part connected with the second rack move in the opposite direction along the opening and closing slide rail (the opening and closing slide rail is arranged along the second direction) through the engagement of the drive gear and the first rack and the second rack so as to perform the opening action.

From the above, with the first centering adjustment unit, the position of the carried silicon rod in the second direction is changed by adjusting the first loading part and the second loading part such that the axis of the silicon rod corresponds to the center line of the silicon rod loading and carrying structure in the second direction.

Still other variations of the silicon rod transfer device of the present application are possible. For example, in certain embodiments, the silicon rod transfer device may further include a second centering adjustment mechanism for positioning the silicon rod in a centering region of the silicon rod loading bearing structure in the first direction by adjusting a position of the silicon rod carried by the silicon rod loading bearing structure in the first direction, wherein the first direction is perpendicular to the feeding direction.

Please refer to fig. 11, which is a partial enlarged view of fig. 3. Referring to fig. 3 and 11, the silicon rod transfer device may further include a second centering adjustment mechanism, and the second centering adjustment mechanism may include: the device comprises a support 741, a sliding rail 743 arranged on the support 741, two pushing pieces 745 which are arranged on two sides of the support 741 relatively and can move on the sliding rail 743 relatively, and a pushing driving unit, wherein the sliding rail 743 is arranged along a first direction, the two pushing pieces 745 are arranged on the sliding rail 743 and are respectively arranged on two sides of the support 741 relatively, the pushing driving unit further comprises a bidirectional screw rod and a driving source, the bidirectional screw rod is arranged along the first direction, two pushing pieces are respectively in threaded connection at two ends of the bidirectional screw rod, and the driving source is connected with the bidirectional screw rod and is used for driving the bidirectional screw rod to rotate so that the two pushing pieces move in opposite directions or back to back along the first direction. In using the second centering adjustment mechanism disclosed in the embodiment, the driving source is made to drive the bidirectional screw to rotate forward, so that the two ejectors 745 move towards each other along the sliding rail 743 (the sliding rail 743 is arranged in the first direction) to perform the closing action, or the driving source is made to drive the bidirectional screw to rotate reversely, so that the two ejectors 745 move away from each other along the sliding rail 743 (the sliding rail 743 is arranged in the first direction) to perform the opening action. The control source may be, for example, a servo motor.

As can be seen from the above, with the second centering adjustment unit, the position of the silicon rod 101 carried on the silicon rod loading support in the first direction is pushed by the two pushing members 745, so that the silicon rod 101 is adjusted to the centered area of the silicon rod loading support.

As mentioned above, the centering adjustment mechanism further includes a height detector for detecting position information of the axis of the silicon rod carried by the silicon rod loading and carrying structure in the direction of the plumb line. Referring to fig. 3 and 11, in the embodiment of the present application, the centering adjustment mechanism includes a height detector 725, the height detector 725 is disposed on the second centering adjustment unit, as shown in fig. 11, the height detector 725 is disposed on a slide rail 743 of the second centering adjustment unit, and can be controlled by a control source (e.g., a servo motor) to perform the movement along the plumb line direction and the first direction and/or the second direction. In one implementation, the height detector 725 may be, for example, a contact sensor or a range sensor. For example, a contact sensor having a probe head for contacting a side surface of silicon rod 101 (e.g., the top surface of silicon rod 101). In some embodiments, the probe of the contact sensor may further include a retractable spring, and when the probe contacts the silicon rod 101, the retractable spring may retract under the driving of the retractable spring, so as to protect the probe and prevent the probe from being damaged by hard touch or pressing.

When using the height detector, taking the height detector 725 moving in the first direction (along the slide 743) and the height detector as a touch sensor as an example: moving the silicon rod feeding and bearing structure and the silicon rod borne by the silicon rod feeding and bearing structure to the position below the sliding rail 743 in the second centering adjusting unit along the second direction, and driving the height detector 725 to descend along the plumb line direction until the height detector touches the top surface of the silicon rod 101, so as to finish the detection of a detection point; the driving height detector 725 ascends along the plumb line to retract, the driving height detector 725 moves for a preset length along a first direction, the driving height detector 725 descends along the plumb line until the driving height detector touches the top surface of the silicon rod 101, and detection of a next detection point is completed, wherein the next detection point and a previous detection point are in the same first direction; thus, the detection of a plurality of detection points on the same straight line (one row) can be completed by continuing the steps. Of course, the silicon rod 101 may also be tested at a plurality of detection points, for example, after the testing at a row of the plurality of detection points is completed, the silicon rod loading and carrying structure and the silicon rod carried thereby are moved by a preset offset distance along the second direction, and the testing at the next row of the plurality of detection points is completed according to the above manner.

As can be seen from the above, with the height detector, the height of the silicon rod 101 can be obtained by performing multi-point detection on the top surface of the silicon rod 101, and then the position information of the axis of the silicon rod 101 in the direction of the plumb line is obtained, so that the centering adjustment mechanism can be subsequently utilized to adjust accordingly.

The feeding driving mechanism is used for driving the silicon rod feeding bearing structure and the silicon rod borne by the silicon rod feeding bearing structure to move from the loading zone to the first processing zone or the second processing zone along the second direction.

In the embodiment shown in fig. 3 and 10, the feeding driving mechanism is disposed below the silicon rod loading and carrying mechanism, and comprises: a feeding guide rod 751 and a feeding driving unit 753, wherein the feeding guide rod 751 is arranged along the second direction and is used for arranging the silicon rod loading bearing structure, as shown in fig. 10, the feeding guide rod 751 spans the machine base and penetrates through the mounting structure 720 along the second direction, so that the mounting structure 720 and the silicon rod loading structure thereon are arranged on the feeding guide rod 751. The feeding driving unit is used for driving the silicon rod loading bearing structure to move transversely along the feeding guide rod, and in one implementation manner, as shown in an embodiment shown in fig. 10, the feeding driving unit comprises: the screw rod assembly 7533 comprises a driving motor 7531 and a screw rod assembly 7533 which is arranged along the second direction and driven by the driving motor, wherein the driving motor can be arranged at one end of the screw rod assembly 7533, and the screw rod assembly 7533 is controlled by the driving motor 7531 and is in threaded connection with the mounting structure 720. So, when using when feeding actuating mechanism, remove lead screw subassembly 7533 forward rotation by driving motor 7531, then drive the silicon rod material loading bearing structure who is connected with lead screw subassembly 7533 and remove towards first processing position (or second processing position) along feeding guide arm 751 (along the second direction), perhaps, remove lead screw subassembly 7533 counter rotation by driving motor 7531, then drive the silicon rod material loading bearing structure who is connected with lead screw subassembly 7533 and remove towards second processing position (or first processing position) along feeding guide arm 751 (along the second direction) with feeding guide arm 751, thereby transfer the silicon rod 101 that silicon rod material loading bearing structure bore to first processing position or second processing position.

In practical applications, when the silicon rod transfer device is used, the specific operation process may substantially include: the silicon rod loading bearing structure is positioned at the initial position of the loading position, and the silicon rod to be loaded is placed on the first loading part and the second loading part of the silicon rod loading bearing structure; driving the first loading part and the second loading part to move oppositely along the second direction by using the first centering adjusting mechanism, so that the axis of the silicon rod is aligned with the center line of the silicon rod loading bearing structure along the second direction; the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and the silicon rod borne by the silicon rod feeding bearing structure to move to a second centering adjusting mechanism along a second direction; adjusting the position of the silicon rod in the first direction by using a second centering adjusting mechanism to enable the silicon rod to be positioned in a centering area of the silicon rod feeding bearing structure in the first direction, and in addition, carrying out multi-point detection on the silicon rod by using a height detector to obtain position information of the axis of the silicon rod in the direction of the plumb line; the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and the silicon rods borne by the silicon rod feeding bearing structure to move along a second direction so as to retreat to an initial position; determining the difference value of the two according to the position information of the axis of the silicon rod in the direction of the plumb line and the position information of the clamping center line of the first silicon rod clamp at the first processing position to be moved or the clamping center line of the second silicon rod clamp at the second processing position, and driving the silicon rod loading and bearing structure and the silicon rod borne by the silicon rod loading and bearing structure to perform lifting action along the direction of the plumb line by using the vertical lifting mechanism, so that the clamping center line of the first silicon rod clamp at the first processing position of the axis of the silicon rod or the clamping center line of the second silicon rod clamp at the second processing position is aligned in the direction of the plumb line; and driving the silicon rod feeding bearing structure and the silicon rod borne by the silicon rod feeding bearing structure to move to the first processing position or the second processing position along the second direction by using the feeding driving mechanism so as to enable the first silicon rod clamp at the first processing position or the second silicon rod clamp at the second processing position to clamp the silicon rod.

Here, the silicon rod transfer device disclosed in the present application includes a silicon rod loading bearing structure, a centering adjustment mechanism, and a feeding driving mechanism, and can realize centering operation of a silicon rod during loading work of transferring the silicon rod to be loaded from a loading location to at least one processing location corresponding to at least one silicon rod processing device, so that an axis of the silicon rod and a center line of the corresponding at least one silicon rod processing device are on the same straight line Convenient operation, accurate centering, high efficiency and the like.

The silicon rod transfer device disclosed herein may still be subject to other variations, for example, in some embodiments, the silicon rod transfer device may further include a silicon rod blanking support structure for supporting a silicon rod to be blanked. The silicon rod blanking bearing structure comprises an unloading part, and the unloading part is arranged on the bearing base or one of the first loading part and the second loading part. In the embodiment shown in fig. 6, the carrying portion of the unloading means 76 for carrying the silicon rod 101 is substantially a plate-like structure, on which a pillow bar can be arranged, which can be made of a flexible material, such as rubber, acrylic, plastic, etc., in order to protect the carried silicon rod 101.

In the embodiment shown in fig. 6, the unloading unit 76, the number of which is one, is fixedly provided on the first loading unit 711 or the second loading unit 713 of the silicon rod loading support structure, in this way, when the silicon rod transfer device is used to load the silicon rods, the one loading member to which the unloading member 76 is not fixed (the second loading member 713 corresponds to the first processing section or the second processing section to be loaded if the unloading member 76 is fixed to the first loading member 711; the first loading member 711 corresponds to the first processing section or the second processing section to be loaded if the unloading member 76 is fixed to the second loading member 713) corresponds to the first processing section or the second processing section to be loaded, in order to avoid interference of the unloading member 76 with the first silicon rod clamp in the first processing location or with the second silicon rod clamp in the second processing location. On the other hand, when the silicon rod transfer device is used to discharge the silicon rod, the loading unit to which the unloading unit 76 is fixed (the first loading unit 711 corresponds to the first processing area or the second processing area to be charged if the unloading unit 76 is fixed to the first loading unit 711, and the second loading unit 713 corresponds to the first processing area or the second processing area to be charged if the unloading unit 76 is fixed to the second loading unit 713) corresponds to the first processing area or the second processing area to be discharged.

In view of this, when the unloading unit 76 is one and is fixedly mounted on the first loading unit 711 or the second loading unit 713 of the silicon rod loading bearing structure, the silicon rod transfer device further includes a reversing mechanism for driving the silicon rod loading bearing structure and the silicon rod unloading bearing structure to exchange positions. In the embodiment shown in fig. 3, the reversing mechanism comprises a reversing rotating shaft arranged in the direction of the plumb line, and the reversing rotating shaft is driven to rotate by a preset angle (the preset angle is 180 degrees, for example) so that the silicon rod loading bearing structure and the silicon rod unloading bearing structure exchange positions. In one implementation, the reversing mechanism further includes a reversing drive unit for driving the reversing rotating shaft to rotate, and the reversing drive unit includes: the driving gear is coupled to the driving source; and the driven gear is meshed with the driving gear and is connected to the reversing rotating shaft.

In the embodiment shown in fig. 3, the indexing mechanism comprises an indexing shaft, so that driving the indexing shaft to rotate by a predetermined angle causes the rough grinding device 4 and the finish grinding device 5 to switch positions between the first machining position and the second machining position. In some embodiments, the transposition shaft is arranged in the direction of the plumb line, the first and second processing locations are arranged on opposite sides of the transposition shaft in the second direction, and the rough grinding device 4 and the finish grinding device 5 are respectively arranged on opposite sides of the transposition shaft, in the embodiment shown in fig. 2, the rough grinding device 4 and the finish grinding device 5 are arranged on opposite sides of the transposition shaft in a back-to-back manner, i.e., the rough grinding device 4 and the finish grinding device 5 can be separated by 180 °, so that the rough grinding device 4 and the finish grinding device 5 can be switched between the first processing location and the second processing location after driving the transposition shaft to rotate by a predetermined angle of 180 °.

As described above, the index rotary shaft is controlled to rotate by a predetermined angle so that the rough grinding device 4 and the finish grinding device 5 are shifted between the first processing position and the second processing position. Therefore, the machine changing mechanism further comprises a transposition driving unit for driving the transposition rotating shaft to rotate. In some embodiments, the index driving unit may include: the gear comprises a driving gear, a driving source and a driven gear, wherein the driving gear is in shaft connection with the driving source, and the driven gear is meshed with the driving gear and is connected to the transposition rotating shaft.

The rough grinding device is used for conducting rough grinding operation on the silicon rod on the first machining area or the second machining area of the silicon rod machining platform. In the embodiment shown in fig. 3, the rough grinding apparatus 4 includes at least one pair of rough grinding tool and rough grinding tool advancing and retreating mechanism.

In the embodiment as shown in fig. 3, at least one pair of rough grinding tools of the rough grinding tools are arranged oppositely along the direction of the plumb line, the grinding surfaces of the at least one pair of rough grinding tools are positioned in opposite horizontal planes, wherein the horizontal planes are perpendicular to the plumb line, and when the silicon rod is ground, at least one rough grinding tool of the at least one pair of rough grinding tools is driven by the rough grinding tool advancing and retreating mechanism to move up and down along the direction of the plumb line so as to adjust the feeding amount, so that the upper side surface and the lower side surface of the silicon rod along the direction of the plumb line are ground. However, the rough grinding apparatus may be modified, for example, in some embodiments, at least one pair of rough grinding tools of the rough grinding tools are disposed opposite to each other along the second direction, and the grinding surfaces of the at least one pair of rough grinding tools are located in opposite vertical surfaces, wherein the vertical surfaces are perpendicular to the second direction, and when the silicon rod is ground, the feeding amount is adjusted by driving at least one rough grinding tool of the at least one pair of rough grinding tools to move along the second direction by the rough grinding tool advancing and retracting mechanism, so as to grind the left side surface and the right side surface of the silicon rod along the second direction.

The fine grinding device is used for performing fine grinding operation on the silicon rod on the first processing position or the second processing position of the silicon rod processing platform. In the embodiment shown in fig. 3, the finish grinding apparatus 5 includes at least one pair of a finish grinding stone and a finish grinding stone advancing and retreating mechanism.

In an embodiment of the present application, at least one of the first and second silicon rod clamps is further provided with a grinding repair device for grinding the corresponding grinding tool, i.e., grinding the rough grinding tool in the corresponding rough grinding device, grinding the finish grinding tool in the corresponding finish grinding device, or grinding the rough grinding tool in the corresponding rough grinding device and the finish grinding tool in the finish grinding device. By utilizing the grinding repair device, the grinding tool is ground and repaired, so that the grinding tool can achieve required precision after being used for grinding the silicon rod.

In one implementation, the grinding repair device includes an installation body and at least one grinding portion, the installation body may be disposed on the first silicon rod clamp or the second silicon rod clamp, and the at least one grinding portion is disposed on the installation body and configured to grind the corresponding at least one grinding tool. For example, a thinning portion is provided on each of opposite sides of the mounting body. Taking the grinding repair device for grinding the finish grinding tools in the finish grinding device as an example, the finish grinding device comprises a pair of finish grinding tools, the pair of finish grinding tools arranged oppositely is moved to the outer side of the grinding portion, the silicon rod clamp (the first silicon rod clamp or the second silicon rod clamp) is driven to move along the first direction so as to enable the two grinding portions on the two sides of the mounting body to reciprocate along the first direction, and in this state, the pair of finish grinding tools in the finish grinding device can be made to approach towards (for example, move along the direction of the plumb line or the second direction) the grinding portion to contact the surface of the grinding portion so as to realize grinding.

The application discloses silicon rod grinds machine, including frame, first silicon rod anchor clamps, second silicon rod anchor clamps, corase grind device, correct grinding device and silicon rod transfer device, wherein, the frame has silicon rod processing platform, be equipped with first processing position and second processing position on the silicon rod processing platform, first silicon rod anchor clamps and second silicon rod anchor clamps are corresponding to first processing position and second processing position respectively, silicon rod transfer device can be transferred to first processing position or second processing position with the silicon rod of treating the material loading, and through centering regulation, can make the axial lead of the silicon rod of transferring can be in same straight line with the centre gripping central line of first processing position department first silicon rod anchor clamps or the centre gripping central line of first processing position department second silicon rod anchor clamps, corase grind device and correct grinding device locate a transposition mechanism, through the first silicon rod anchor clamps of coordinated control, Second silicon rod anchor clamps and corase grind device, accurate grinding device for at the same moment corase grind device and accurate grinding device in the silicon rod grinds machine all are in operating condition, and through control transposition mechanism with drive corase grind device and accurate grinding device switching position between first processing position and second processing position, make the silicon rod that is located the centre gripping of first silicon rod anchor clamps or second silicon rod anchor clamps in first processing position or second processing position can accomplish corase grind operation and accurate grinding operation in the processing position that corresponds, need not to silicon rod switching processing position, can improve silicon rod grinding efficiency and shorten and grind the operation consuming time, and promote economic efficiency.

The application also discloses a silicon rod grinding method which can be applied to the silicon rod grinding machine, the silicon rod grinding machine comprises a base with a silicon rod processing platform, and the silicon rod processing platform is provided with a first processing area and a second processing area; the silicon rod grinding machine further comprises a first silicon rod clamp, a second silicon rod clamp, a rough grinding device, a fine grinding device and a silicon rod transfer device.

The silicon rod transfer device is arranged at a loading position of the silicon rod processing platform and used for moving the silicon rod to be loaded to the first processing position or the second processing position.

In certain embodiments, the silicon rod grinding machine to which the silicon rod grinding method may be applied comprises a silicon rod grinding machine of any one of the embodiments as shown in fig. 3 to 11.

The silicon rod grinding method in one embodiment of the application comprises the following steps:

referring to fig. 3 to 11, schematic views of a silicon rod grinding machine according to the present application are shown in a state where each step of the silicon rod grinding method is performed.

In an initial state, the silicon rod loading bearing structure is located at an initial position of the loading zone, the first silicon rod clamp 2 is arranged at the first processing zone, the second silicon rod clamp 3 is arranged at the second processing zone, and the coarse grinding device 4 and the fine grinding device 5 are arranged at two opposite sides of the transposition mechanism 6, wherein the coarse grinding device 4 corresponds to the first processing zone and the fine grinding device 5 corresponds to the second processing zone.

First, a first silicon rod to be loaded is placed on the silicon rod transfer device. In the state shown in the drawing, the first silicon rod may be manually placed on the first loading part and the second loading part of the silicon rod transfer device 7 or by means of a corresponding mechanical device.

And then, the first silicon rod to be loaded is moved to a first processing position by using the silicon rod transfer device. In the state shown in the drawing, the specific steps of moving the first silicon rod to be loaded to the first processing location by using the silicon rod transfer device may include: driving the first loading part and the second loading part to move oppositely along the second direction by using the first centering adjusting mechanism, so that the axis of the first silicon rod is aligned with the center line of the first silicon rod loading and carrying structure along the second direction; the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and the first silicon rod carried by the silicon rod feeding bearing structure to move to the second centering adjusting mechanism along the second direction; adjusting the position of the first silicon rod in the first direction by using a second centering adjusting mechanism to enable the first silicon rod to be positioned in a centering area of the silicon rod feeding bearing structure in the first direction, and in addition, carrying out multi-point detection on the first silicon rod by using a height detector to obtain position information of the axis of the first silicon rod in the direction of the plumb line; the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and the first silicon rod carried by the silicon rod feeding bearing structure to move along the second direction so as to retreat to the initial position; determining the difference value of the position information of the axis of the first silicon rod in the direction of the plumb line and the position information of the clamping center line of the first silicon rod clamp 2 at the first processing position to be moved in the direction of the plumb line, and driving the silicon rod loading bearing structure and the first silicon rod carried by the silicon rod loading bearing structure to perform lifting action along the direction of the plumb line by using the vertical lifting mechanism so that the clamping center lines of the first silicon rod clamp 2 at the first processing position of the axis of the first silicon rod are aligned in the direction of the plumb line; the feeding driving mechanism is utilized to drive the silicon rod feeding bearing structure and the first silicon rod borne by the silicon rod feeding bearing structure to move to the first processing position along the second direction, so that the first silicon rod clamp 2 at the first processing position clamps the first silicon rod.

And then, clamping the loaded first silicon rod by a first silicon rod clamp arranged at the first processing position and driving the clamped first silicon rod to move along the first direction, and performing coarse grinding operation on the first silicon rod by a coarse grinding device positioned at the first processing position. In the state shown in the drawing, the first silicon rod clamp 2 clamps the two opposite ends of the loaded first silicon rod, so that the axis of the first silicon rod is parallel to the first direction, and then the first silicon rod clamp 2 drives the clamped first silicon rod to move along the first direction, so that the rough grinding device 4 located at the first processing position performs rough grinding operation on the first silicon rod moving along the first direction. In the present embodiment, the rough grinding device 4 includes at least one pair of rough grinding tools arranged along the direction of the plumb line, and the grinding surfaces of the at least one pair of rough grinding tools are located in opposite horizontal planes.

At this stage, the second silicon rod is placed in the silicon rod transfer device, and the first silicon rod to be loaded is moved to the second processing location by the silicon rod transfer device.

The specific steps of moving the first silicon rod to be loaded to the first processing location by using the silicon rod transfer device may include: driving the first loading part and the second loading part to move oppositely along the second direction by using the first centering adjusting mechanism, so that the axis of the second silicon rod is aligned with the center line of the first silicon rod loading bearing structure along the second direction; the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and a second silicon rod carried by the silicon rod feeding bearing structure to move to a second centering adjusting mechanism along a second direction; adjusting the position of a second silicon rod in the first direction by using a second centering adjusting mechanism to enable the second silicon rod to be positioned in a centering area of the silicon rod feeding bearing structure in the first direction, and in addition, carrying out multi-point detection on the second silicon rod by using a height detector to obtain position information of the axis of the second silicon rod in the direction of the plumb line; the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and a second silicon rod carried by the silicon rod feeding bearing structure to move along a second direction so as to retreat to an initial position; determining the difference value of the position information of the axis of the second silicon rod in the direction of the plumb line and the position information of the clamping center line of the second silicon rod clamp in the direction of the plumb line at the second processing position to be moved, and driving the silicon rod loading and bearing structure and the second silicon rod carried by the silicon rod loading and bearing structure to perform lifting action in the direction of the plumb line by using the vertical lifting mechanism, so that the clamping center lines of the second silicon rod clamp 3 at the second processing position of the axis of the second silicon rod are aligned in the direction of the plumb line; and the feeding driving mechanism is utilized to drive the silicon rod feeding bearing structure and the second silicon rod borne by the silicon rod feeding bearing structure to move to the second processing position along the second direction, so that the second silicon rod clamp 3 at the second processing position clamps the second silicon rod.

Then, the position of the rough grinding device and the position of the fine grinding device are switched by the transposition mechanism, so that the rough grinding device is switched from the first processing position to the second processing position and the fine grinding device is switched from the second processing position to the first processing position. In the state shown in the drawing, the position of the rough grinding device 4 and the finish grinding device 5 can be switched between the first processing position and the second processing position by driving the transposition rotating shaft to rotate by a preset angle, that is, the rough grinding device 4 is transposed from the original first processing position to the second processing position and the finish grinding device 5 is transposed from the original second processing position to the first processing position. In some embodiments, the transposition shaft is disposed in the direction of the plumb line, the first processing location and the second processing location are disposed on opposite sides of the transposition shaft along the second direction, and the rough grinding device 4 and the finish grinding device 5 are disposed on opposite sides of the transposition shaft, respectively, for example, the rough grinding device 4 and the finish grinding device 5 are disposed on opposite sides of the transposition shaft in a back-to-back manner, i.e., the rough grinding device 4 and the finish grinding device 5 may be separated by 180 °, such that driving the transposition shaft to rotate by a predetermined angle of 180 ° causes the rough grinding device 4 and the finish grinding device 5 to shift positions between the first processing location and the second processing location.

Then, driving the clamped first silicon rod to move along a first direction by a first silicon rod clamp arranged at the first processing position, so that the fine grinding device positioned at the first processing position carries out fine grinding operation on the first silicon rod; at this stage, the second silicon rod clamp arranged at the second processing position clamps the loaded second silicon rod and drives the clamped second silicon rod to move along the first direction, so that the rough grinding device positioned at the second processing position performs rough grinding operation on the second silicon rod. In the state shown in the drawing, for a first processing position, the first silicon rod clamp 2 drives the clamped first silicon rod to move along a first direction, so that the fine grinding device 5 located at the first processing position carries out fine grinding operation on the first silicon rod moving along the first direction; and aiming at the second processing position, the second silicon rod clamp 3 clamps the two opposite ends of the loaded second silicon rod, so that the axis line of the second silicon rod is parallel to the first direction, and then the second silicon rod clamp 3 drives the clamped second silicon rod to move along the first direction, so that the rough grinding device 4 positioned at the second processing position performs rough grinding operation on the second silicon rod moving along the first direction. In this embodiment, the lapping device 5 includes at least one pair of lapping abrasive tools disposed in the direction of the plumb line, the abrasive surfaces of which lie in opposing horizontal planes.

Then, unloading the first silicon rod and loading a third silicon rod; the transposition mechanism drives the coarse grinding device and the fine grinding device to switch positions, so that the coarse grinding device is switched from the second machining position to the first machining position and the fine grinding device is switched from the first machining position to the second machining position.

In the state shown in the drawing, the first silicon rod having completed the grinding operation is unloaded from the first processing section by the silicon rod transfer device 7 and a new third silicon rod is loaded.

The specific steps of unloading the first silicon rod having completed the grinding operation from the first processing location and loading a new third silicon rod using the silicon rod transfer device 7 may include: corresponding the unloading means 76 of the silicon rod transfer device 7 to the first processing location, driving the silicon rod transfer device 7 to move to the first processing location in the second direction, carrying the first silicon rod to be discharged by the unloading means 76 of the silicon rod transfer device, driving the silicon rod transfer device 7 to retreat to the initial position in the second direction, unloading the first silicon rod and placing the third silicon rod to be charged on the first loading means 711 and the second loading means 713 of the silicon rod transfer device 7; rotating a preset angle (the preset angle is, for example, 180 °) by using a reversing mechanism of the silicon rod transfer device 7, so that the silicon rod loading bearing structure and the silicon rod unloading bearing structure exchange positions; driving the first loading part and the second loading part to move oppositely along the second direction by using the first centering adjusting mechanism, so that the axis of the third silicon rod is aligned with the center line of the first silicon rod loading and carrying structure along the second direction; the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and a third silicon rod borne by the silicon rod feeding bearing structure to move to a second centering adjusting mechanism along a second direction; adjusting the position of a third silicon rod in the first direction by using a second centering adjusting mechanism to enable the third silicon rod to be positioned in a centering area of the silicon rod feeding bearing structure in the first direction, and in addition, carrying out multi-point detection on the third silicon rod by using a height detector to obtain position information of the axis of the third silicon rod in the direction of the plumb line; the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and a third silicon rod carried by the silicon rod feeding bearing structure to move along a second direction so as to retreat to an initial position; determining the difference value of the position information of the axis of the third silicon rod in the direction of the plumb line and the position information of the clamping center line of the first silicon rod clamp 2 at the first processing position to be moved in the direction of the plumb line, and driving the silicon rod loading bearing structure and the third silicon rod carried by the silicon rod loading bearing structure to perform lifting action along the direction of the plumb line by using the vertical lifting mechanism so that the clamping center line of the first silicon rod clamp 2 at the first processing position of the axis of the third silicon rod is aligned in the direction of the plumb line; and the feeding driving mechanism is utilized to drive the silicon rod feeding bearing structure and the third silicon rod borne by the silicon rod feeding bearing structure to move to the first processing position along the second direction, so that the first silicon rod clamp 2 at the first processing position clamps the third silicon rod.

In addition, in the state shown in the drawings, the rotation of the transposition rotating shaft by a preset angle can cause the position of the rough grinding device 4 and the fine grinding device 5 to be switched between the first processing position and the second processing position, that is, the rough grinding device 4 is switched from the original second processing position to the first processing position and the fine grinding device 5 is switched from the original first processing position to the second processing position, that is, in an embodiment of the present application, after the transposition rotating shaft is driven by a preset angle of 180 °, the position of the rough grinding device 4 and the fine grinding device 5 can be switched between the first processing position and the second processing position.

In the state shown in the drawing, for the second processing location, the second silicon rod clamp 3 drives the clamped second silicon rod to move along the first direction, so that the fine grinding device 5 located at the second processing location performs fine grinding operation on the second silicon rod moving along the first direction; aiming at the first processing position, the first silicon rod clamp 2 clamps two opposite ends of the third silicon rod, so that the axis of the third silicon rod is parallel to the first direction, and then the first silicon rod clamp 2 drives the clamped third silicon rod to move along the first direction, so that the rough grinding device 4 positioned at the first processing position performs rough grinding operation on the third silicon rod moving along the first direction.

The application discloses silicon rod grinding method is applied to in aforementioned silicon rod grinding machine, silicon rod grinding machine is including the frame that has silicon rod processing platform, silicon rod processing platform is equipped with first processing position and second processing position, silicon rod grinding machine still includes first silicon rod anchor clamps, second silicon rod anchor clamps, corase grind device, correct grinding device and silicon rod transfer device. According to the silicon rod grinding method, the silicon rod to be fed can be transferred to a first processing position or a second processing position through the silicon rod transfer device, the axis line of the transferred silicon rod can be in the same straight line with the clamping center line of a first silicon rod clamp at the first processing position or the clamping center line of a second silicon rod clamp at the first processing position through centering adjustment, the first silicon rod clamp, the second silicon rod clamp, the rough grinding device and the accurate grinding device are coordinately controlled, the rough grinding device and the accurate grinding device in the silicon rod grinding machine are in a working state at the same time, the position of the rough grinding device and the accurate grinding device is switched between the first processing position and the second processing position through controlling the transposition mechanism, and the silicon rod clamped by the first silicon rod clamp or the second silicon rod clamp at the first processing position or the second processing position can finish rough grinding operation and accurate grinding operation at the corresponding processing position, the silicon rod conversion processing area is not needed, the silicon rod grinding efficiency can be improved, the time consumption of grinding operation can be shortened, and the economic efficiency can be improved.

The above embodiments are merely illustrative of the principles and utilities of the present application and are not intended to limit the application. Any person skilled in the art can modify or change the above-described embodiments without departing from the spirit and scope of the present application. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical concepts disclosed in the present application shall be covered by the claims of the present application.

Claims

1. A silicon rod transfer device, which is applied to a silicon rod processing apparatus including at least one silicon rod processing device, the silicon rod transfer device comprising:

2. The silicon rod transfer device as recited in claim 1, wherein the centering adjustment mechanism comprises a vertical elevation mechanism for driving the silicon rod loading support structure and the silicon rod supported thereby to vertically elevate so that an axis of the silicon rod is aligned with a predetermined center line in a direction of a plumb line, the predetermined center line corresponding to a holding center line of the first silicon rod clamp.

3. The silicon rod transfer device as set forth in claim 2, wherein the vertical elevating mechanism comprises:

4. The silicon rod transfer device as set forth in claim 3, wherein the vertical elevation driving unit comprises: the driving motor and the vertical screw rod assembly are arranged and driven by the driving motor, or the driving motor and the vertical gear rack transmission assembly are arranged and driven by the driving motor.

5. The silicon rod transfer device as set forth in claim 4, wherein the vertical lifting driving unit further comprises an auxiliary lifting assembly including a cylinder and a lifting pin connected to the cylinder.

6. The silicon rod transfer device as set forth in claim 2, wherein the centering adjustment mechanism further comprises a height detector for detecting a silicon rod to obtain position information of an axis line of the silicon rod in the direction of the plumb line.

7. The silicon rod transfer device as set forth in claim 6, wherein the height detector is a contact sensor or a distance measuring sensor.

8. The silicon rod transfer device as set forth in claim 2, wherein the feed driving mechanism comprises:

9. The silicon rod transfer device as set forth in claim 8, wherein the feed drive unit comprises: the device comprises a driving motor and a screw rod assembly which is arranged along the feeding direction and driven by the driving motor, or the driving motor and a gear rack transmission assembly which is arranged along the feeding direction and driven by the driving motor.

10. The silicon rod transfer device as recited in claim 2, wherein the silicon rod loading support structure comprises a support base and first and second loading parts disposed opposite to each other in a feeding direction.

11. The silicon rod transfer device as recited in claim 10, further comprising a first centering adjustment mechanism for changing a position of the silicon rod in the feeding direction by adjusting the first loading part and the second loading part such that an axial center line of the silicon rod corresponds to a center line of the silicon rod loading bearing structure in the feeding direction.

12. The silicon rod take-off device as set forth in claim 11, wherein the first centering adjustment mechanism comprises:

13. The silicon rod transfer device as set forth in claim 12, wherein the opening and closing drive unit comprises:

a first drive assembly associated with the load base and the turntable and a second drive assembly associated with the load base and the turntable; and

14. The silicon rod transfer device as set forth in claim 13, wherein the first push-pull member is a first link, a first end of the first link is coupled to the turntable, a second end of the first link is coupled to the first loading member, the second push-pull member is a second link, a first end of the second link is coupled to the turntable, and a second end of the second link is coupled to the second loading member.

15. The silicon rod transfer device as recited in claim 13, wherein the first transmission assembly comprises a first cylinder, a cylinder of the first cylinder is connected to the carrying base, a piston rod of the first cylinder is coupled to the turntable, and the second transmission assembly comprises a second cylinder, a cylinder of the second cylinder is connected to the carrying base, and a piston rod of the second cylinder is coupled to the turntable.

16. The silicon rod transfer device as set forth in claim 12, wherein the opening and closing drive unit comprises:

17. The silicon rod transfer device as set forth in claim 12, wherein the opening and closing drive unit comprises:

the driving gear is positioned between the first rack and the second rack and meshed with the first rack and the second rack; and

18. The silicon rod take-off device as recited in claim 2, further comprising a second centering adjustment mechanism for positioning the silicon rod in a centering region of the silicon rod loading bearing structure in the first direction by adjusting a position of the silicon rod carried by the silicon rod loading bearing structure in the first direction, wherein the first direction is perpendicular to the feeding direction.

19. The silicon rod take-off device as set forth in claim 18, wherein the second centering adjustment mechanism comprises:

the support is arranged on the silicon rod processing platform;

The sliding rail is arranged on the bracket along a first direction;

the two ejection pieces are arranged on the sliding rail and are respectively and oppositely arranged at two sides of the bracket; and

20. The silicon rod transfer device as set forth in claim 19, wherein the ejector driving unit comprises:

21. The silicon rod transfer device as set forth in claim 10, further comprising: and the silicon rod blanking bearing structure is used for bearing the silicon rod to be blanked.

22. The silicon rod transfer device as set forth in claim 21, wherein the silicon rod unloading carrying structure comprises an unloading part provided at the carrying base or at one of the first loading part and the second loading part.

23. The silicon rod transfer device as set forth in claim 22, further comprising: and the reversing mechanism is used for driving the silicon rod feeding bearing structure and the silicon rod blanking bearing structure to interchange positions.

24. The silicon rod transfer device as claimed in claim 23, wherein the reversing mechanism includes a reversing rotary shaft provided in a direction of a plumb line, and the reversing rotary shaft is driven to rotate by a predetermined angle so that the silicon rod loading bearing structure and the silicon rod unloading bearing structure exchange positions.

25. The silicon rod transfer device as set forth in claim 24, wherein the reversing mechanism further comprises a reversing drive unit for driving a reversing rotary shaft to rotate, the reversing drive unit comprising:

the driving gear is coupled to the driving source; and

26. A silicon rod grinding machine characterized by comprising:

the base is provided with a silicon rod processing platform; a processing region is arranged on the silicon rod processing platform;

the silicon rod clamp is arranged at the processing position and used for clamping a silicon rod and driving the clamped silicon rod to move along a first direction;

wherein the axis of the silicon rod is parallel to the first direction;

the grinding device is arranged on the base and is used for grinding the silicon rod; and

the silicon rod transfer device according to any one of claims 1 to 25.

27. The silicon rod grinding machine as claimed in claim 26, wherein the silicon rod processing platform is provided with a first processing location and a second processing location, the silicon rod clamps comprise a first silicon rod clamp provided at the first processing location and a second silicon rod clamp provided at the second processing location, and the grinding device comprises a rough grinding device for rough grinding the silicon rod and a fine grinding device for fine grinding the silicon rod.

28. The silicon rod grinding machine of claim 27, wherein the rough grinding device has at least one pair of rough grinding tools and the finish grinding device has at least one pair of finish grinding tools.