CN210115756U - Semiconductor rounding slotting and cone grinding all-in-one machine - Google Patents

Semiconductor rounding slotting and cone grinding all-in-one machine Download PDF

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Publication number
CN210115756U
CN210115756U CN201920945082.5U CN201920945082U CN210115756U CN 210115756 U CN210115756 U CN 210115756U CN 201920945082 U CN201920945082 U CN 201920945082U CN 210115756 U CN210115756 U CN 210115756U
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assembly
rounding
feeding
slotting
grinding
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解培玉
徐公志
尹美玲
王宝超
于秀升
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Qingdao Gaoce Technology Co Ltd
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Qingdao Gaoce Technology Co Ltd
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Abstract

The utility model discloses a semiconductor rounding slotting and grinding cone integrated machine, the equipment comprises a machine base and an upper and lower feeding mechanical arm, a headstock assembly with the lower end fixedly connected on the machine base, a tailstock assembly which is arranged opposite to the headstock assembly and feeds along the length direction of the machine base, a grinding cone assembly and a rounding slotting mechanism which are arranged on one side of the headstock assembly and the tailstock assembly and can feed along the length direction and the width direction of the machine base, the upper and lower feeding mechanical arm can be arranged on the side surface of the machine base close to the headstock assembly and the tailstock assembly in a 180-degree turnover manner and can feed along the length direction and the width direction of the machine base, and an upper and lower feeding workbench is arranged beside the upper and lower feeding mechanical; the rounding and grooving mechanism comprises a rounding component and a grooving component which is arranged above the rounding component and can feed up and down. The processing integration level and the machining precision of this equipment are higher, possess automatic feeding, automatic centering, automatic size detection function, and it can carry out the rounding excircle, fluting and cone grinding to the bar.

Description

Semiconductor rounding slotting and cone grinding all-in-one machine
Technical Field
The utility model relates to a silicon rod processing equipment technical field especially relates to a semiconductor rounding fluting burr all-in-one.
Background
Single crystal silicon is a good semiconductor material, and is drawn from high-purity polycrystalline silicon in a single crystal furnace, and is in a round bar shape after being drawn and grown, whereas a solar cell requires a silicon wafer, and therefore, machining is required after the growth of the single crystal silicon is completed. Single crystal silicon requires different machining procedures for different devices. For single crystal silicon used for large scale integrated circuits, a series of processes such as cutting, rounding, slicing, chamfering, lapping, chemical etching and polishing are generally required to be carried out on a single crystal silicon rod, and chemical cleaning in different processes is also required to be carried out to different degrees. On the other hand, the demand for silicon wafers is low for single crystal silicon for solar cells, and the first several processes, that is, cutting, rounding, slicing, chamfering, lapping, chemical etching, etc., are generally applied. At present, each domestic manufacturer can use three devices of a double-end-face flour milling machine, a chamfering machine and a rounding machine to respectively perform flour milling, chamfering and rounding processing, but the grinding processing procedures of the three devices are more, bar transfer and a relatively large number of operators are needed to complete the three devices, the labor intensity is high, and therefore the production cost and the economic benefit of enterprises are directly influenced.
To the above-mentioned problem, put forward the utility model discloses specially.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a semiconductor rounding fluting cone mill all-in-one, the processing integrated level and the machining precision of this equipment are higher, possess automatic feeding, automatic centering, automatic size detection function, and it can carry out the rounding excircle, fluting and cone mill to the bar.
In order to achieve the above object, the utility model provides a following technical scheme:
a semiconductor rounding, slotting and grinding integrated machine comprises a machine base and a feeding and discharging mechanical arm, wherein a headstock assembly, a tailstock assembly, a grinding cone assembly and a rounding and slotting mechanism are arranged on the machine base, the lower end of the headstock assembly is fixedly connected to the machine base, the tailstock assembly is arranged opposite to the headstock assembly and feeds along the length direction of the machine base, the grinding cone assembly and the rounding and slotting mechanism are arranged on one side of the headstock assembly and the tailstock assembly and can feed along the length direction and the width direction of the machine base, the feeding and discharging mechanical arm can be arranged on the side, close to the headstock assembly and the tailstock assembly, of the machine base in a 180-degree turnover mode and can feed along the length direction and the width direction;
the rounding and grooving mechanism comprises a rounding component and a grooving component which is arranged above the rounding component and can feed up and down.
Preferably, be provided with the first longitudinal feed subassembly and the second longitudinal feed subassembly that are parallel to each other along its length direction on the up end of frame, sliding connection has the longitudinal feed slip table on the first longitudinal feed subassembly, the first transverse feed subassembly of both ends fixedly connected with and the second transverse feed subassembly of frame length direction on the longitudinal feed slip table, the connection that the width direction of frame can be followed to the burr subassembly feed in on the first transverse feed subassembly, the rounding slotting mechanism can follow the width direction of frame feed connect in on the second transverse feed subassembly, tailstock subassembly sliding connection is in the second longitudinal feed subassembly one end, headstock subassembly fixed connection is on the frame in the second longitudinal feed subassembly other end outside.
Preferably, all sliding connections have the cross feed slip table on first cross feed subassembly and the second cross feed subassembly, cone grinding subassembly and round as a ball fluting mechanism link firmly respectively on the cross feed slip table on first cross feed subassembly and the second cross feed subassembly.
Preferably, a third longitudinal feeding assembly is arranged on the side face, close to the second longitudinal feeding assembly, of the machine base along the length direction of the second longitudinal feeding assembly, a third transverse feeding assembly is connected to the third longitudinal feeding assembly in a sliding mode, and the feeding and discharging manipulator can be connected to the third transverse feeding assembly in a feeding mode along the width direction of the machine base.
Preferably, the rounding slotting mechanism further comprises a slotting and feeding assembly, the slotting and feeding assembly is arranged above the rounding assembly, the slotting and feeding assembly is connected with a slotting and feeding sliding table capable of feeding up and down, and the slotting assembly is fixedly connected to the slotting and feeding sliding table.
Preferably, the first longitudinal feeding assembly, the second longitudinal feeding assembly, the first transverse feeding assembly, the second transverse feeding assembly, the third transverse feeding assembly and the slotting feeding assembly all comprise a motor, a guide rail, a lead screw and a slide block, and the third longitudinal feeding assembly comprises a motor, a guide rail, a gear, a rack and a slide block.
Preferably, a size detection assembly for measuring the diameter of the bar stock and the amount to be processed is arranged on the side surface of the rounding grooving mechanism.
Preferably, the tailstock subassembly includes the tight frock in top and hollow structure's three-jaw chuck, the tight frock detachable in top is arranged in the three-jaw chuck, three jack catch of three-jaw chuck is used for pressing from both sides to be provided with the cushion of avoiding pressing from both sides the wounded bar in the one side of pressing from both sides tight bar.
Preferably, two rows of supporting cushion blocks are arranged on the upper end face of the feeding and discharging workbench in parallel.
Preferably, the machine base is provided with a protective cover with an opening at one side, and the opening of the protective cover faces the feeding and discharging workbench.
Preferably, the grinding cone assembly comprises a motor and a grinding cone grinding wheel connected with the motor, the rounding assembly comprises a motor and a rounding grinding wheel connected with the motor, and the slotting assembly comprises a motor and a slotting grinding wheel connected with the motor.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. this application will be rolled round, fluting, the integration of cone grinding process is processed on the all-in-one, to bar rolling round, fluting, cone grinding one shot forming, greatly reduced in the past to bar abrasive machining's process and operating personnel, reduced intensity of labour.
2. The equipment can change the groove shape of grinding processing by changing the shapes of the grinding wheels at three positions of the rounding grinding wheel, the slotting grinding wheel and the grinding cone grinding wheel, and has wide application range.
3. The equipment has higher processing integration level and processing precision and has the functions of automatic feeding, automatic centering and automatic size detection.
4. The equipment is high in economy, integrates the procedures of rounding, slotting and grinding into a whole machine for processing, can greatly reduce the purchasing cost of customers, and can save the workshop layout of the customers.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings described below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is the structure schematic diagram of the semiconductor rounding, slotting and grinding integrated machine of the utility model.
Fig. 2 is the utility model discloses a top view of semiconductor rounding fluting cone grinding all-in-one.
Fig. 3 is the structure diagram of the semiconductor rounding, slotting and grinding integrated machine for grinding the bar into the grinding cone state.
In the figure: the device comprises a base 1, a base 11, a first longitudinal feeding assembly, a second longitudinal feeding assembly, a third longitudinal feeding assembly 13, a headstock assembly 14, a tailstock assembly 15, a three-jaw chuck 151, a first transverse feeding assembly 16, a second transverse feeding assembly 17, a third transverse feeding assembly 18, a longitudinal feeding sliding table 19, a grinding cone assembly 21, a grinding cone grinding wheel 3, a rounding slotting mechanism 31, a rounding assembly 32, a slotting feeding assembly 321, a slotting assembly 322, a slotting feeding sliding table 33, a size detection assembly 4, a jacking tool 5, a loading and unloading workbench 51, a supporting cushion block, a 6 loading and unloading manipulator and a 7 bar stock.
Detailed Description
The core of the utility model lies in providing a semiconductor rounding fluting cone mill all-in-one, the processing integrated level and the machining precision of this equipment are higher, possess automatic feeding, automatic centering, automatic size detection function, and it can carry out the rounding excircle, fluting and cone mill to the bar.
In order to make the technical solution of the present invention better understood by those skilled in the art, the following description is given with reference to the accompanying drawings of the present invention for clear and complete description of the technical solution of the present invention. Based on the embodiments in the present application, other similar embodiments obtained by persons of ordinary skill in the art without any creative effort shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustration and not for limitation of the present invention.
As shown in fig. 1 and 2, the semiconductor rounding, slotting and grinding integrated machine provided in this embodiment includes a machine base 1, a grinding cone assembly 2, a rounding and slotting mechanism 3, a loading and unloading robot 6, a headstock assembly 14, a tailstock assembly 15 disposed opposite to the headstock assembly 14, and a loading and unloading worktable 5 disposed beside the machine base 1. The upper end surface of the machine base 1 is provided with a first longitudinal feeding assembly 11 and a second longitudinal feeding assembly 12 which are parallel to each other along the length direction of the upper end surface, the first longitudinal feeding assembly 11 and the second longitudinal feeding assembly 12 both comprise motors, guide rails, lead screws and sliding blocks, the side surface of the machine base 1 close to the second longitudinal feeding assembly 12 is provided with a third longitudinal feeding assembly 13 along the length direction of the side surface, and the third longitudinal feeding assembly 13 comprises a motor, a guide rail, a gear, a rack and a sliding block.
The first longitudinal feeding assembly 11 is slidably connected with a longitudinal feeding sliding table 19, the longitudinal feeding sliding table 19 is slidably connected to the first longitudinal feeding assembly 11 through a guide rail, a lead screw and a sliding block, and the longitudinal feeding sliding table 19 is driven by a motor to realize longitudinal feeding (in the length direction of the machine base 1) on the guide rail and the lead screw of the first longitudinal feeding assembly 11.
The two ends of the longitudinal feeding sliding table 19 in the length direction of the base 1 are fixedly connected with a first transverse feeding assembly 16 and a second transverse feeding assembly 17, the first transverse feeding assembly 16 and the second transverse feeding assembly 17 both comprise motors, guide rails, lead screws and sliders, and the arrangement directions of the guide rails and the lead screws of the first transverse feeding assembly 16 and the second transverse feeding assembly 17 are perpendicular to the arrangement directions of the guide rails and the lead screws of the first longitudinal feeding assembly 11. The first transverse feeding assembly 16 and the second transverse feeding assembly 17 are both connected with transverse feeding sliding tables in a sliding mode, and the transverse feeding sliding tables of the first transverse feeding assembly 16 and the second transverse feeding assembly 17 are respectively connected to the first transverse feeding assembly 16 and the second transverse feeding assembly 17 in a sliding mode through guide rails, lead screws and sliding blocks.
The grinding cone assembly 2 and the rounding slotting mechanism 3 are respectively fixedly connected to the transverse feeding sliding tables of the first transverse feeding assembly 16 and the second transverse feeding assembly 17. Under the drive of the motor, the grinding cone assembly 2 realizes transverse feeding (in the width direction of the machine base 1) on the guide rail and the lead screw of the first transverse feeding assembly 16 along with the transverse feeding sliding table at the lower end of the grinding cone assembly, and the rounding slotting mechanism 3 realizes transverse feeding on the guide rail and the lead screw of the second transverse feeding assembly 17 along with the transverse feeding sliding table at the lower end of the rounding slotting mechanism. Thereby, the burr component 2 and the rounding notching mechanism 3 achieve both transverse feeding and longitudinal feeding.
The rounding and grooving mechanism 3 comprises a rounding component 31, a grooving component 321, a grooving feeding component 32 and a size detection component 33, the grooving feeding component 32 is arranged above the rounding component 31, the grooving feeding component 32 comprises a motor, a guide rail, a lead screw and a sliding block, the grooving feeding sliding table 322 is connected onto the grooving feeding component 32 through the lead screw and the guide rail in a sliding manner, the grooving component 321 is fixedly connected onto the grooving feeding sliding table 322, the grooving component 321 is vertically fed along with the vertical sliding of the grooving feeding sliding table 322, and the grooving processing of the bar 7 is realized. The size detection component 33 is arranged on the side surface of the rounding slotting mechanism 3 and is used for measuring the diameter of the bar 7 and the amount to be processed.
The rounding component 31 comprises a motor and a rounding grinding wheel connected with the motor, the slotting component 321 comprises a motor and a slotting grinding wheel connected with the motor, the grinding cone component 2 comprises a motor and a grinding cone grinding wheel connected with the motor, and in the specific embodiment, the slotting component 321 is a rectangular groove grinding component for making a rectangular groove for the bar 7. Furthermore, the equipment can change the groove shape of grinding processing by changing the shapes of the grinding wheels at three positions of the rounding grinding wheel, the slotting grinding wheel and the grinding cone grinding wheel, and has wide application range.
The second longitudinal feeding assembly 12 is slidably connected with a sliding table, the sliding table is slidably connected to the second longitudinal feeding assembly 12 through a guide rail, a lead screw and a slider of the second longitudinal feeding assembly 12, the tailstock assembly 15 is fixed on the sliding table, the initial positions of the tailstock assembly 15 and the sliding table are arranged at one end of the second longitudinal feeding assembly 12, and the headstock assembly 14 is fixedly connected to the base 1 at the outer side of the other end of the second longitudinal feeding assembly 12 and is arranged opposite to the tailstock assembly 15. Under the drive of the motor, the tail frame assembly 15 can realize longitudinal feeding on the second longitudinal feeding assembly 12 along with the sliding table at the lower end of the tail frame assembly 15, so that the tail frame assembly 15 and the head frame assembly 14 are matched to clamp the bar stock 7, and the longitudinal feeding of the tail frame assembly 15 realizes the processing of the bar stock 7 with different lengths by the device.
The headstock assembly 14 comprises a chuck at the front end, a speed reducer and a motor at the rear end, the chuck can be set as a floating chuck, and the chuck is driven by the motor to rotate so as to rotate the bar 7. Tailstock subassembly 15 is including the tight frock in top 4, hollow structure's three-jaw chuck 151 and motor, and three chucks 151 realize pressing from both sides the bar 7 of pressing from both sides tight different diameters, and three jack catch of three chucks 151 is used for pressing from both sides the one side of pressing from both sides tight bar 7 and is provided with the cushion of avoiding pressing from both sides hindering bar 7, and the tight frock in top 4 detachable arranges three-jaw chuck 151 in.
The third longitudinal feeding assembly 13 is slidably connected with a third transverse feeding assembly 18, the side surface of the third transverse feeding assembly 18 is connected to the third longitudinal feeding assembly 13 through a guide rail, a gear, a rack and a slider, the third transverse feeding assembly 18 can slide left and right, the third transverse feeding assembly 18 comprises a motor, a guide rail, a lead screw and a slider, and the arrangement direction of the guide rail and the lead screw of the third transverse feeding assembly 18 is perpendicular to the arrangement direction of the guide rail and the rack of the third longitudinal feeding assembly 13. The third transverse feeding assembly 18 is connected with a transverse feeding sliding table in a sliding mode, the feeding and discharging manipulator 6 is fixedly connected to the upper end of the transverse feeding sliding table on the third transverse feeding assembly 18, and the feeding and discharging manipulator 6 can turn 180 degrees to achieve feeding and discharging.
The feeding and discharging workbench 5 is arranged beside the feeding and discharging manipulator 6, two rows of supporting cushion blocks 51 are arranged on the upper end face of the feeding and discharging workbench 5 in parallel, the bar 7 to be processed is arranged on the supporting cushion blocks 51, and the supporting cushion blocks 51 play a role in auxiliary supporting for the bar 7. Be provided with one side open-ended protection casing on the frame 1, the opening of protection casing is towards going up unloading workstation 5, and the protection casing can avoid each part on the frame 1 to fall into dust etc. prolongs the life of equipment.
The processing process of the equipment is as follows:
1. the bar 7 is firstly placed on the feeding and discharging workbench 5, the feeding and discharging manipulator 6 clamps the bar 7 on the feeding and discharging workbench 5 and then rotates 180 degrees to place the bar 7 between the headstock assembly 14 and the tailstock assembly 15.
2. When the equipment carries out rounding processing and grooving processing on the bar 7, the three-jaw chuck 151 of the tailstock assembly 15 clamps the jacking tool 4 to feed leftwards, the headstock assembly 14 and the tailstock assembly 15 are matched to clamp the bar 7, and the clamping jaws of the feeding and discharging manipulator 6 are loosened and returned to the initial position, as shown in figure 1.
3. The size detection assembly 33 in the rounding slotting mechanism 3 transversely feeds along with a transverse feeding sliding table at the lower end of the rounding slotting mechanism 3, a probe of the size detection assembly 33 contacts the surface of the bar 7 to measure the diameter and the amount to be processed of the bar 7, and the bar returns to an original position after measurement is completed.
4. The motor at the rear end of the headstock assembly 14 drives the headstock chuck to rotate, so as to drive the bar 7 to rotate, the rounding slotting mechanism 3 moves forwards to a processing position along with the transverse feeding sliding table at the lower end of the rounding slotting mechanism, then carries out rounding processing action along with the longitudinal feeding of the second transverse feeding assembly 17, and the processing is finished and retreats to the initial position.
5. After rounding, the grooving assembly 321 moves downwards along with the grooving feed sliding table 322 at the rear end of the grooving assembly 321, so that the grooving grinding wheel of the grooving assembly 321 contacts the bar 7 and the rounding grinding wheel of the rounding assembly 31 does not contact the bar 7, the grooving assembly 321 performs grooving processing on the rounding grooving mechanism 3 along with longitudinal feeding of the rounding assembly 321, and the grooving assembly retreats to the initial position after finishing the grooving.
6. After the grooving is completed, the feeding and discharging manipulator 6 acts to clamp the bar 7 again, then the headstock assembly 14 and the tailstock assembly 15 loosen 7, as shown in fig. 3, the jacking tool 4 in the three-jaw chuck 151 is removed, the tailstock assembly 15 moves leftwards to enable the bar 7 to penetrate through the hollow area of the three-jaw chuck 151, the jaws of the three-jaw chuck 151 clamp the tail of the bar 7 exposed out of the bar 7, the motor of the tailstock assembly 15 drives the three-jaw chuck 151 to drive the bar 7 to rotate, the grinding cone assembly 2 moves forwards to a machining position along with the transverse feeding slide block at the lower end of the grinding cone assembly, then the grinding cone assembly longitudinally feeds along with the first transverse feeding assembly 16 to perform grinding cone machining, and the machining is completed and returns to the initial position after.
7. After rounding, grooving and cone grinding of the bar 7, the bar is clamped by the feeding and discharging mechanical arm 6, the three-jaw chuck 151 loosens the bar 7 and returns to the initial position, and the feeding and discharging mechanical arm 6 clamps the bar 7 and turns 180 degrees to return the bar 7 to the feeding and discharging workbench 5.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (10)

1. A semiconductor rounding, slotting and cone-grinding all-in-one machine is characterized by comprising a machine base (1) and a feeding and discharging manipulator (6), a headstock assembly (14) with the lower end fixedly connected with the machine base (1), a tailstock assembly (15) which is arranged opposite to the headstock assembly (14) and feeds along the length direction of the machine base (1), a grinding cone assembly (2) and a rounding slotting mechanism (3) which are arranged at one side of the headstock assembly (14) and the tailstock assembly (15) and can feed along the length direction and the width direction of the machine base (1) are arranged on the machine base (1), the feeding and discharging manipulator (6) can be arranged on the side surface of the base (1) close to the headstock assembly (14) and the tailstock assembly (15) in a 180-degree turnover manner and can feed along the length direction and the width direction of the base (1), a feeding and discharging workbench (5) is arranged beside the feeding and discharging manipulator (6);
the rounding slotting mechanism (3) comprises a rounding component (31) and a slotting component (321) which is arranged above the rounding component (31) and can feed up and down.
2. The semiconductor rounding slotting and grinding all-in-one machine as claimed in claim 1, wherein a first longitudinal feeding component (11) and a second longitudinal feeding component (12) which are parallel to each other are arranged on the upper end surface of the machine base (1) along the length direction of the upper end surface of the machine base, a longitudinal feeding sliding table (19) is connected on the first longitudinal feeding component (11) in a sliding manner, a first transverse feeding component (16) and a second transverse feeding component (17) are fixedly connected on the longitudinal feeding sliding table (19) along the length direction of the machine base (1), the grinding cone component (2) can be connected on the first transverse feeding component (16) along the width direction of the machine base (1), the rounding slotting mechanism (3) can be connected on the second transverse feeding component (17) along the width direction of the machine base (1), the tail stock component (15) is connected on one end of the second longitudinal feeding component (12) in a sliding manner, the headstock assembly (14) is fixedly connected to the base (1) on the outer side of the other end of the second longitudinal feeding assembly (12).
3. The all-in-one semiconductor rounding, grooving and grinding machine according to claim 2, wherein each of the first transverse feeding assembly (16) and the second transverse feeding assembly (17) is slidably connected with a transverse feeding sliding table, and the grinding cone assembly (2) and the rounding grooving mechanism (3) are fixedly connected to the transverse feeding sliding tables of the first transverse feeding assembly (16) and the second transverse feeding assembly (17), respectively.
4. The all-in-one machine for rounding, slotting and grinding the semiconductor according to claim 3, wherein a third longitudinal feeding assembly (13) is arranged on the side face, close to the second longitudinal feeding assembly (12), of the machine base (1) along the length direction of the machine base, a third transverse feeding assembly (18) is connected onto the third longitudinal feeding assembly (13) in a sliding mode, and the feeding and discharging manipulator (6) can be connected onto the third transverse feeding assembly (18) in a feeding mode along the width direction of the machine base (1).
5. The semiconductor rounding, slotting and grinding integrated machine according to claim 4, wherein the rounding and slotting mechanism (3) further comprises a slotting and feeding assembly (32), the slotting and feeding assembly (32) is arranged above the rounding assembly (31), a slotting and feeding sliding table (322) capable of feeding up and down is connected to the slotting and feeding assembly (32), and the slotting assembly (321) is fixedly connected to the slotting and feeding sliding table (322).
6. The all-in-one machine for rounding, slotting and grinding semiconductor wafers as claimed in claim 5, wherein the first longitudinal feeding assembly (11), the second longitudinal feeding assembly (12), the first transverse feeding assembly (16), the second transverse feeding assembly (17), the third transverse feeding assembly (18) and the slotting feeding assembly (32) respectively comprise a motor, a guide rail, a lead screw and a slide block, and the third longitudinal feeding assembly (13) comprises a motor, a guide rail, a gear, a rack and a slide block.
7. The all-in-one machine for semiconductor rounding, grooving and grinding is characterized in that a size detection assembly (33) for measuring the diameter and the amount to be processed of the bar stock (7) is arranged on the side face of the rounding, grooving and grinding mechanism (3).
8. The all-in-one machine for rounding, slotting and grinding the semiconductor according to claim 7, wherein the tailstock assembly (15) comprises a jacking tool (4) and a three-jaw chuck (151) with a hollow structure, the jacking tool (4) is detachably arranged in the three-jaw chuck (151), and one surface of three jaws of the three-jaw chuck (151) for clamping the bar (7) is provided with a cushion block for avoiding clamping the bar (7).
9. The all-in-one machine for rounding, slotting and grinding cones of a semiconductor as claimed in claim 8, wherein two rows of supporting cushion blocks (51) are arranged in parallel on the upper end surface of the loading and unloading workbench (5).
10. The all-in-one machine for rounding, slotting and grinding cones of the semiconductor as claimed in claim 9, wherein the machine base (1) is provided with a protective cover with an opening at one side, and the opening of the protective cover faces the loading and unloading workbench (5).
CN201920945082.5U 2019-06-21 2019-06-21 Semiconductor rounding slotting and cone grinding all-in-one machine Active CN210115756U (en)

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CN201920945082.5U CN210115756U (en) 2019-06-21 2019-06-21 Semiconductor rounding slotting and cone grinding all-in-one machine

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Application Number Priority Date Filing Date Title
CN201920945082.5U CN210115756U (en) 2019-06-21 2019-06-21 Semiconductor rounding slotting and cone grinding all-in-one machine

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110153812A (en) * 2019-06-21 2019-08-23 青岛高测科技股份有限公司 A kind of round as a ball fluting grinding core all-in-one machine of semiconductor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110153812A (en) * 2019-06-21 2019-08-23 青岛高测科技股份有限公司 A kind of round as a ball fluting grinding core all-in-one machine of semiconductor
CN110153812B (en) * 2019-06-21 2024-05-31 青岛高测科技股份有限公司 Semiconductor rounding, slotting and cone grinding integrated machine

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