CN210757006U - Silicon rod grinding machine tool for rough and fine grinding processing coincidence - Google Patents
Silicon rod grinding machine tool for rough and fine grinding processing coincidence Download PDFInfo
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- CN210757006U CN210757006U CN201921458625.7U CN201921458625U CN210757006U CN 210757006 U CN210757006 U CN 210757006U CN 201921458625 U CN201921458625 U CN 201921458625U CN 210757006 U CN210757006 U CN 210757006U
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Abstract
The utility model discloses a silicon rod grinding machine tool for coarse and fine grinding processing coincidence, which comprises a base, wherein a feeding guide rail is arranged on the base, a conveying device is arranged on the feeding guide rail, a coarse grinding station and at least one fine grinding station are arranged above the base, and the extension directions of the fine grinding station and the coarse grinding station are parallel and vertical to the extension direction of the feeding guide rail; the rough grinding station comprises a rough grinding head group, a rough grinding clamp device and a rough grinding clamp driving device, and the fine grinding station comprises a fine grinding head group, a fine grinding clamp device and a fine grinding clamp driving device. The utility model discloses a silicon rod grinding lathe of thick finish grinding processing coincidence can make the corase grind go on with the correct grinding in step, and save time has improved work efficiency.
Description
Technical Field
The utility model relates to a silicon rod grinding machine, specifically speaking are silicon rod grinding machine of thick finish grinding processing coincidence.
Background
In the current silicon rod grinding machine tool, when a silicon rod is conveyed to a station through a conveying device, a silicon rod is clamped to a coarse grinding station by a clamping device, the silicon rod is detected by a detection device, after the grinding amount is determined, the clamping driving device drives the clamping device to clamp the silicon rod to reciprocate between two coarse grinding heads, the coarse grinding heads perform coarse grinding on the silicon rod, the silicon rod is detected by the detection device after the coarse grinding is completed, fine grinding is performed after the grinding amount is determined, the conveying device is returned after the machining is completed, the material loading and unloading station is finally returned, and the material unloading is completed by one-time work cycle. The grinding machine tool does not overlap the rough grinding time and the finish grinding time during machining, the finish grinding station does not work during rough grinding, and the rough grinding station does not work during finish grinding, so that the efficiency is low.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned technical problems, a silicon rod grinding machine for rough and finish grinding of coincidences is provided. The utility model discloses a technical means as follows:
a silicon rod grinding machine tool for rough and fine grinding machining coincidence comprises a base, wherein a feeding guide rail is arranged on the base, a conveying device which is matched with the feeding guide rail and used for conveying a silicon rod is arranged on the feeding guide rail, and a conveying driving screw rod for driving the conveying device to move along the direction of the feeding guide rail and a conveying servo motor for driving the conveying driving screw rod to move are fixed on the base; a rough grinding station and at least one accurate grinding station are arranged above the base, and because the rough grinding time is short and the accurate grinding time is long, a plurality of accurate grinding stations can be configured according to requirements, and the extending directions of the accurate grinding station and the rough grinding station are parallel and vertical to the extending direction of the feeding guide rail;
the rough grinding station is provided with a rough grinding head group used for grinding a silicon rod at one side of the feeding guide rail, the rough grinding head group comprises two rough grinding heads, the two rough grinding heads are oppositely arranged, the rough grinding heads are fixedly connected with the top of a rough grinding sliding table through a vertically arranged rough grinding upright post, the bottom of the rough grinding sliding table is slidably connected with a rough grinding head sliding rail fixed on the base, the extending direction of the rough grinding head sliding rail is parallel to the extending direction of the feeding guide rail, and a rough grinding sliding table lead screw driving the rough grinding upright post to move along the rough grinding head sliding rail direction and a rough grinding servo motor driving the rough grinding sliding table lead screw to move are fixed on the base; a rough grinding head driving motor for driving the rough grinding head to rotate is arranged on the rough grinding upright post; the fine grinding station is arranged on one side of the feeding guide rail and provided with a fine grinding head group for grinding a silicon rod, the fine grinding head group comprises two fine grinding heads, the two fine grinding heads are arranged oppositely, the fine grinding heads are fixedly connected with the top of the fine grinding sliding table through a fine grinding stand column which is vertically arranged, the bottom of the fine grinding sliding table is connected with a fine grinding head sliding rail which is fixed on the base in a sliding manner, the extending direction of the fine grinding head sliding rail is parallel to the extending direction of the feeding guide rail, and a fine grinding sliding table screw rod which moves along the direction of the fine grinding head sliding rail and a fine grinding servo motor which drives the fine grinding sliding table screw rod to move are fixed on the base; a fine grinding head driving motor for driving the fine grinding head to rotate is arranged on the fine grinding upright post; the rough grinding station is provided with a rough grinding clamping device and a rough grinding clamping driving device, the rough grinding clamping driving device is used for moving the rough grinding clamping device from the conveying device to the rough grinding station or moving the rough grinding clamping device from the rough grinding station to the conveying device, and the rough grinding clamping driving device is also used for driving the silicon rod clamped by the rough grinding clamping device to reciprocate between the two rough grinding heads;
the fine grinding station is provided with a fine grinding clamping device and a fine grinding clamping driving device, the fine grinding clamping driving device is used for moving the fine grinding clamping device from the conveying device to the fine grinding station or moving the fine grinding clamping device from the fine grinding station to the conveying device, and the fine grinding clamping driving device is also used for driving the silicon rod clamped by the fine grinding clamping device to reciprocate between the two fine grinding heads.
A vertically arranged coarse grinding detection device fixing support is fixed on one side, close to the feeding guide rail, of the coarse grinding sliding table, a coarse grinding detection guide rail is arranged on the coarse grinding detection device fixing support, the extending direction of the coarse grinding detection guide rail is parallel to the extending direction of the feeding guide rail, a coarse grinding detection sliding table matched with the coarse grinding detection guide rail is arranged on the coarse grinding detection guide rail, a coarse grinding detection device used for detecting the size of a silicon rod is fixed on the coarse grinding detection sliding table, and a coarse grinding driving cylinder used for driving the coarse grinding detection sliding table to move along the coarse grinding detection guide rail is fixed on the coarse grinding detection device fixing support;
the fine grinding slip table is close to one side of feed guide is fixed with the fine grinding detection device fixed bolster of vertical setting, just be equipped with the fine grinding on the fine grinding detection device fixed bolster and detect the guide rail, the extending direction that the fine grinding detected the guide rail is on a parallel with feed guide's extension is reverse, just be equipped with on the fine grinding detects the guide rail with the fine grinding detects guide rail matched with fine grinding and detects the slip table, the fine grinding detects and is fixed with the fine grinding detection device who is used for detecting the silicon rod size on the slip table, be fixed with the drive on the fine grinding detection device fixed bolster the fine grinding detects the slip table edge the fine grinding that the guide rail moved drives.
The rough grinding clamping driving device comprises a rough grinding clamping driving screw rod and a rough grinding servo motor for driving the rough grinding clamping driving screw rod; the rough grinding clamping driving screw rod and the rough grinding servo motor are fixed to the top of a rough grinding support, the rough grinding support is arranged above the rough grinding head group, and the rough grinding support is fixedly connected with the base;
the fine grinding clamping driving device comprises a fine grinding clamping driving screw rod and a fine grinding servo motor for driving the fine grinding clamping driving screw rod; the fine grinding clamp is used for clamping the driving screw rod and the fine grinding servo motor is fixed to the top of the fine grinding support, the fine grinding support is arranged above the fine grinding head group, and the fine grinding support is fixedly connected with the base.
In the use state: the silicon rod to be ground is placed on the conveying device, the conveying servo motor drives the conveying driving screw rod to move so as to drive the conveying device to move to the coarse grinding station, at the moment, the silicon rod which is coarsely ground at the coarse grinding station is placed on the conveying device under the driving of the coarse grinding clamping driving screw rod, and the rough grinding clamping device clamps the silicon rod which is not roughly ground and returns to the rough grinding station again, the driving cylinder drives the detection sliding table to move, the detection device is contacted with the silicon rod which is not subjected to rough grinding, the grinding amount of the silicon rod which is subjected to rough grinding is determined, then the air cylinder is driven to drive the detection device to reset, the rough grinding head rotates to roughly grind the silicon rod which is not roughly ground, the silicon rod reciprocates between the rough grinding heads during rough grinding, the rough grinding head moves towards the silicon rod under the drive of the lead screw of the rough grinding sliding table, and grinding is carried out according to the grinding amount; at the moment, the silicon rod placed on the conveying device after rough grinding moves to the accurate grinding station, and the accurate grinding head carries out accurate grinding on the silicon rod after rough grinding, so that synchronous operation of rough grinding and accurate grinding is realized, a large amount of time is saved, and the working efficiency is improved.
The utility model has the advantages of it is following:
1. the coarse grinding and the fine grinding are carried out synchronously, so that the time is saved, and the working efficiency is improved.
2. The structure occupies small area, and can be better suitable for fields.
Based on the reason, the utility model discloses can extensively promote in fields such as grinding lathe.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.
Fig. 1 is a top view of a silicon rod grinding machine for rough and finish grinding in accordance with embodiment 1 of the present invention.
Fig. 2 is a front view of a silicon rod grinding machine for rough and finish grinding in accordance with embodiment 1 of the present invention.
Fig. 3 is an enlarged view of a portion a in fig. 2.
Fig. 4 is an enlarged view of a portion B in fig. 2.
Fig. 5 is a back view of a silicon rod grinding machine for rough and finish grinding in accordance with embodiment 1 of the present invention.
Fig. 6 is an enlarged view of the portion C in fig. 5.
Fig. 7 is a side view of a silicon rod grinding machine for rough and finish grinding in accordance with embodiment 1 of the present invention.
Fig. 8 is a view from direction K in fig. 2.
Fig. 9 is a schematic structural view of a rough grinding clamping device in embodiment 1 of the present invention.
Fig. 10 is a top view of a silicon rod grinding machine according to embodiment 2 of the present invention, in which rough and finish grinding processes are performed in a superposition.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Example 1
As shown in fig. 1 to 9, a silicon rod grinding machine for rough and finish grinding processing superposition comprises a base 1, wherein a feeding guide rail 11 is arranged on the base 1, a conveying device 12 which is matched with the feeding guide rail 11 and used for conveying a silicon rod 2 is arranged on the feeding guide rail 11, and a conveying driving screw 13 for driving the conveying device 12 to move along the direction of the feeding guide rail 11 and a conveying servo motor 14 for driving the conveying driving screw 13 to move are fixed on the base 1; a fine grinding station 3 and a rough grinding station 4 are arranged above the base 1, and the extension directions of the fine grinding station 3 and the rough grinding station 4 are parallel and vertical to the extension direction of the feeding guide rail 11;
the rough grinding station 4 is provided with a rough grinding head group for grinding the silicon rod 2 at one side of the feeding guide rail 11, the rough grinding head group comprises two rough grinding heads 41, the two rough grinding heads 41 are oppositely arranged, the rough grinding heads 41 are fixedly connected with the top of a rough grinding sliding table 43 through a rough grinding upright post 42 which is vertically arranged, the bottom of the rough grinding sliding table 43 is slidably connected with a rough grinding head sliding rail 44 which is fixed on the base 1, the extending direction of the rough grinding head sliding rail 44 is parallel to the extending direction of the feeding guide rail 11, and a rough grinding sliding table screw 45 for driving the rough grinding upright post 42 to move along the rough grinding head sliding rail 44 direction and a rough grinding servo motor 46 for driving the rough grinding sliding table screw 45 to move are fixed on the base 1; a rough grinding head driving motor 47 for driving the rough grinding head 41 to rotate is arranged on the rough grinding upright post 42;
the fine grinding station 3 is arranged on one side of the feeding guide rail 11 and is provided with a fine grinding head group for grinding the silicon rod 2, the fine grinding head group comprises two fine grinding heads 31, the two fine grinding heads 31 are oppositely arranged, the fine grinding heads 31 are fixedly connected with the top of a fine grinding sliding table 33 through a fine grinding upright post 32 which is vertically arranged, the bottom of the fine grinding sliding table 33 is in sliding connection with a fine grinding head sliding rail 34 which is fixed on the base 1, the extending direction of the fine grinding head sliding rail 34 is parallel to the extending direction of the feeding guide rail 11, and a fine grinding sliding table screw 35 which drives the fine grinding upright post 32 to move along the direction of the fine grinding head sliding rail 34 and a fine grinding servo motor 36 which drives the fine grinding sliding table screw 35 to move are fixed on the base 1; a fine grinding head driving motor 37 for driving the fine grinding head 31 to rotate is arranged on the fine grinding upright column 32;
the rough grinding station 4 is provided with a rough grinding clamping device 5 and a rough grinding clamping driving device 51, the rough grinding clamping driving device 51 is used for moving the rough grinding clamping device 5 from the conveying device 12 to the rough grinding station 4 or moving the rough grinding clamping device 5 from the rough grinding station 4 to the conveying device 12, and the rough grinding clamping device 51 is also used for driving the silicon rod 2 clamped by the rough grinding clamping device 5 to reciprocate between the two rough grinding heads 41;
the fine grinding station 3 is provided with a fine grinding clamping device 6 for clamping the silicon rod 2 and a fine grinding clamping driving device 61, the fine grinding clamping driving device 61 is used for moving the fine grinding clamping device 6 from the conveying device 12 to the fine grinding station 3 or moving the fine grinding clamping device 6 from the fine grinding station 3 to the conveying device 12, and the fine grinding clamping driving device 61 is also used for driving the silicon rod 2 clamped by the fine grinding clamping device 6 to reciprocate between the two fine grinding heads 31.
A vertically arranged rough grinding detection device fixing support 7 is fixed on one side, close to the feeding guide rail 11, of the rough grinding sliding table 43, a rough grinding detection guide rail 71 is arranged on the rough grinding detection device fixing support 7, the extending direction of the rough grinding detection guide rail 71 is parallel to the extending direction of the feeding guide rail 11 and is opposite, a rough grinding detection sliding table 72 matched with the rough grinding detection guide rail 71 is arranged on the rough grinding detection guide rail 71, a rough grinding detection device 73 used for detecting the size of the silicon rod 2 is fixed on the rough grinding detection sliding table 72, and a rough grinding driving cylinder 74 used for driving the rough grinding detection sliding table 72 to move along the rough grinding detection guide rail 71 is fixed on the rough grinding detection device fixing support 7;
accurate grinding slip table 33 is close to one side of feed guide 11 is fixed with the accurate grinding detection device fixed bolster 8 of vertical setting, just be equipped with the accurate grinding on the accurate grinding detection device fixed bolster 8 and detect guide rail 81, the extending direction that the accurate grinding detected guide rail 81 is on a parallel with the extension of feed guide 11 is reverse, just be equipped with on the accurate grinding detects guide rail 81 with the accurate grinding detects slip table 82 of guide rail 81 matched with, the accurate grinding detects and is fixed with the accurate grinding detection device 83 that is used for detecting 2 sizes of silicon rod on the slip table 82, be fixed with the drive on the accurate grinding detection device fixed bolster 8 the accurate grinding detects slip table 82 and follows the accurate grinding that the accurate grinding detected guide rail 81 motion drives actuating cylinder 84.
The rough grinding gripping drive device 51 includes a rough grinding gripping drive screw 52 and a rough grinding servo motor 53 that drives the rough grinding gripping drive screw 52; the rough grinding clamping driving screw 52 and the rough grinding servo motor 53 are fixed at the top of a rough grinding bracket 54, the rough grinding bracket 54 is arranged above the rough grinding head group, and the rough grinding bracket 54 is fixedly connected with the base 1;
the fine grinding clamping driving device 61 comprises a fine grinding clamping driving screw rod 62 and a fine grinding servo motor 63 for driving the fine grinding clamping driving screw rod 62; the fine grinding clamping driving screw rod 62 and the fine grinding servo motor 63 are fixed on the top of a fine grinding support 64, the fine grinding support 64 is arranged above the fine grinding head group, and the fine grinding support 64 is fixedly connected with the base 1.
Example 2
As shown in fig. 10, the present embodiment differs from embodiment 1 in that the present embodiment has two refining stations 3, and the two refining stations 3 are symmetrically arranged.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (4)
1. A silicon rod grinding machine tool for rough and fine grinding machining superposition is characterized by comprising a base, wherein a feeding guide rail is arranged on the base, a conveying device which is matched with the feeding guide rail and used for conveying a silicon rod is arranged on the feeding guide rail, and a conveying driving screw rod for driving the conveying device to move along the direction of the feeding guide rail and a conveying servo motor for driving the conveying driving screw rod to move are fixed on the base; a rough grinding station and at least one accurate grinding station are arranged above the base, and the extending directions of the accurate grinding station and the rough grinding station are parallel and vertical to the extending direction of the feeding guide rail;
the rough grinding station comprises a rough grinding head group which is arranged on one side of the feeding guide rail and used for grinding a silicon rod, the rough grinding head group comprises two rough grinding heads, the two rough grinding heads are oppositely arranged, the rough grinding heads are fixedly connected with the top of a rough grinding sliding table through a vertically arranged rough grinding upright post, the bottom of the rough grinding sliding table is slidably connected with a rough grinding head sliding rail fixed on the base, the extending direction of the rough grinding head sliding rail is parallel to the extending direction of the feeding guide rail, and a rough grinding sliding table screw rod for driving the rough grinding upright post to move along the rough grinding head sliding rail direction and a rough grinding servo motor for driving the rough grinding sliding table screw rod to move are fixed on the base; a rough grinding head driving motor for driving the rough grinding head to rotate is arranged on the rough grinding upright post; the fine grinding station comprises a fine grinding head group which is arranged on one side of the feeding guide rail and used for grinding a silicon rod, the fine grinding head group comprises two fine grinding heads, the two fine grinding heads are arranged oppositely, the fine grinding heads are fixedly connected with the top of a fine grinding sliding table through a fine grinding stand column which is vertically arranged, the bottom of the fine grinding sliding table is connected with a fine grinding head sliding rail which is fixed on the base in a sliding manner, the extending direction of the fine grinding head sliding rail is parallel to the extending direction of the feeding guide rail, and a fine grinding sliding table screw rod which drives the fine grinding stand column to move along the direction of the fine grinding head sliding rail and a fine grinding servo motor which drives the fine grinding sliding table screw rod to move are fixed on the base; a fine grinding head driving motor for driving the fine grinding head to rotate is arranged on the fine grinding upright post; the rough grinding station is provided with a rough grinding clamping device and a rough grinding clamping driving device, the rough grinding clamping driving device is used for moving the rough grinding clamping device from the conveying device to the rough grinding station or moving the rough grinding clamping device from the rough grinding station to the conveying device, and the rough grinding clamping driving device is also used for driving the silicon rod clamped by the rough grinding clamping device to reciprocate between the two rough grinding heads;
the fine grinding station is provided with a fine grinding clamping device and a fine grinding clamping driving device, the fine grinding clamping driving device is used for moving the fine grinding clamping device from the conveying device to the fine grinding station or moving the fine grinding clamping device from the fine grinding station to the conveying device, and the fine grinding clamping driving device is also used for driving the silicon rod clamped by the fine grinding clamping device to reciprocate between the two fine grinding heads.
2. The silicon rod grinding machine for rough finish grinding machining of lapping according to claim 1, wherein: a vertically arranged coarse grinding detection device fixing support is fixed on one side, close to the feeding guide rail, of the coarse grinding sliding table, a coarse grinding detection guide rail is arranged on the coarse grinding detection device fixing support, the extending direction of the coarse grinding detection guide rail is parallel to the extending direction of the feeding guide rail, a coarse grinding detection sliding table matched with the coarse grinding detection guide rail is arranged on the coarse grinding detection guide rail, a coarse grinding detection device used for detecting the size of a silicon rod is fixed on the coarse grinding detection sliding table, and a coarse grinding driving cylinder used for driving the coarse grinding detection sliding table to move along the coarse grinding detection guide rail is fixed on the coarse grinding detection device fixing support;
the fine grinding slip table is close to one side of feed guide is fixed with the fine grinding detection device fixed bolster of vertical setting, just be equipped with the fine grinding on the fine grinding detection device fixed bolster and detect the guide rail, the extending direction that the fine grinding detected the guide rail is on a parallel with feed guide's extension is reverse, just be equipped with on the fine grinding detects the guide rail with the fine grinding detects guide rail matched with fine grinding and detects the slip table, the fine grinding detects and is fixed with the fine grinding detection device who is used for detecting the silicon rod size on the slip table, be fixed with the drive on the fine grinding detection device fixed bolster the fine grinding detects the slip table edge the fine grinding that the guide rail moved drives.
3. The silicon rod grinding machine for rough finish grinding machining of lapping according to claim 1, wherein:
the rough grinding clamping driving device comprises a rough grinding clamping driving screw rod and a rough grinding servo motor for driving the rough grinding clamping driving screw rod; the rough grinding clamping driving screw rod and the rough grinding servo motor are fixed to the top of a rough grinding support, the rough grinding support is arranged above the rough grinding head group, and the rough grinding support is fixedly connected with the base;
the fine grinding clamping driving device comprises a fine grinding clamping driving screw rod and a fine grinding servo motor for driving the fine grinding clamping driving screw rod; the fine grinding clamp is used for clamping the driving screw rod and the fine grinding servo motor is fixed to the top of the fine grinding support, the fine grinding support is arranged above the fine grinding head group, and the fine grinding support is fixedly connected with the base.
4. The silicon rod grinding machine for rough finish grinding machining of lapping according to claim 1, wherein: the device comprises two accurate grinding stations, wherein the two accurate grinding stations are symmetrically arranged on two sides of the feeding guide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921458625.7U CN210757006U (en) | 2019-09-03 | 2019-09-03 | Silicon rod grinding machine tool for rough and fine grinding processing coincidence |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921458625.7U CN210757006U (en) | 2019-09-03 | 2019-09-03 | Silicon rod grinding machine tool for rough and fine grinding processing coincidence |
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| CN210757006U true CN210757006U (en) | 2020-06-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921458625.7U Active CN210757006U (en) | 2019-09-03 | 2019-09-03 | Silicon rod grinding machine tool for rough and fine grinding processing coincidence |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111906663A (en) * | 2020-08-24 | 2020-11-10 | 连城凯克斯科技有限公司 | Semiconductor silicon rod automatic grinding machine |
| CN113370005A (en) * | 2021-07-21 | 2021-09-10 | 大连连城数控机器股份有限公司 | Semiconductor crystal bar tumbling mill |
| CN114102376A (en) * | 2020-08-28 | 2022-03-01 | 天通日进精密技术有限公司 | Silicon rod grinding machine and silicon rod grinding method |
| CN115179163A (en) * | 2021-11-25 | 2022-10-14 | 浙江傅氏机械科技有限公司 | Grinding and polishing integrated machine tool |
| CN118417965A (en) * | 2024-07-05 | 2024-08-02 | 洛阳普瑞森精密轴承有限公司 | Bearing inner ring grinding device and method |
-
2019
- 2019-09-03 CN CN201921458625.7U patent/CN210757006U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111906663A (en) * | 2020-08-24 | 2020-11-10 | 连城凯克斯科技有限公司 | Semiconductor silicon rod automatic grinding machine |
| CN114102376A (en) * | 2020-08-28 | 2022-03-01 | 天通日进精密技术有限公司 | Silicon rod grinding machine and silicon rod grinding method |
| CN114102376B (en) * | 2020-08-28 | 2024-03-01 | 天通日进精密技术有限公司 | Silicon rod grinding machine and silicon rod grinding method |
| CN113370005A (en) * | 2021-07-21 | 2021-09-10 | 大连连城数控机器股份有限公司 | Semiconductor crystal bar tumbling mill |
| CN115179163A (en) * | 2021-11-25 | 2022-10-14 | 浙江傅氏机械科技有限公司 | Grinding and polishing integrated machine tool |
| CN115179163B (en) * | 2021-11-25 | 2023-09-15 | 浙江傅氏机械科技有限公司 | Grinding and polishing integrated machine tool |
| CN118417965A (en) * | 2024-07-05 | 2024-08-02 | 洛阳普瑞森精密轴承有限公司 | Bearing inner ring grinding device and method |
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