CN2120322U - Laser high degree of accuracy measurement big diameter apparatus - Google Patents

Laser high degree of accuracy measurement big diameter apparatus Download PDF

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Publication number
CN2120322U
CN2120322U CN 92222069 CN92222069U CN2120322U CN 2120322 U CN2120322 U CN 2120322U CN 92222069 CN92222069 CN 92222069 CN 92222069 U CN92222069 U CN 92222069U CN 2120322 U CN2120322 U CN 2120322U
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China
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measuring head
laser
guide rail
measuring
fixed
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Granted
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CN 92222069
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Chinese (zh)
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冯其波
梁晋文
田芊
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Tsinghua University
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Tsinghua University
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Priority to CN 92222069 priority Critical patent/CN2120322U/en
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Abstract

The utility model relates to a big diameter measuring apparatus comprising a laser, a length measuring unit which is composed of a length meter and a guide rail, a laser collimation and auto-collimation unit which is composed of a monomode fiber, optical fiber couplers which are fixed at the two ends of the monomode fiber and an optical fiber exit head which is provided with an optical receiving target, a measuring head which is composed of a pentagonal prism which is coated with a semi-permeable and semi-reflecting film and a photoelectric receiver which is fixed with the pentagonal prism and a collimating and positioning unit which is composed of the measuring head which is supported by the guide rail, magnetic positioning blocks which are absorbed at the both sides of a measured work piece and the photoelectric receiver which is fixed on the measuring head, etc. The utility model can achieve the real-time measurement to the diameters and lengths of large size work pieces, and the big diameter measuring apparatus has the advantages of high accuracy and big measuring range.

Description

Laser high degree of accuracy measurement big diameter apparatus
The utility model belongs to the accurate laser measurement technical field, particularly to the large-scale workpiece diameter measuring device.
The high-acruracy survey of large-scale workpiece diameter is generally to propose to be badly in need of again the common technology problems of measurement that will solve in the many major technologies and equipment manufacturings of large and medium-sized enterprise, also is all to fail the measurement difficult problem of fine solution both at home and abroad.
Measure at present large diameter device following a few class is arranged substantially: 1, traditional mechanical hook-up, as large-scale milscale, π chi etc.The measuring accuracy of these devices is very low, can only measure the part of 7,8 class precisions, is in the state that can't check for the high accessory size of many accuracy requirements; 2, the machining precision to the large-scale workpiece diameter is to guarantee by the precision of making regular check on lathe, so the dimensional accuracy of large-scale workpiece depends on the precision of lathe itself; 3, adopt the device of laser measuring technique.A kind of laser diameter measurement device of prior art as shown in Figure 1.The laser beam that laser instrument (1) sends is via being separately fixed at two mechanical arms (2), two groups of prism squares (3) among (2 '), (3 '), five angle mirrors (4), (4 ') back forms the measuring beam A of pair of parallel, B, raising clothes motors (5) by direct current moves by ring like steel wire (6) drive two mechanical arms, gradually near workpiece for measurement, up to the energy of every bundle light 50% by workpiece (7) when blocking, just think and aimed at workpiece, distance between two measuring beams is the diameter of workpiece, directly measure this distance by magnetic railings ruler G and just can measure the measured piece diameter, the measurement range of this device is 20mm-280mm, measuring accuracy is ± 10 μ m, the major defect of this device is: owing to there are two mechanical arms on the structure, measurement range is restricted, in-site measurement inconvenience, the foozle of laser drift and pentagonal prism make its measuring accuracy lower.
The purpose of the utility model is to improve above-mentioned laser measuring device for measuring.Overcome its weak point, propose a kind of new laser measuring device for measuring, have the raising measuring accuracy, enlarge measurement range and measurement function, the simplified measurement device also can be realized advantages such as on-the-spot on-position measure simultaneously.
The utility model proposes a kind of laser high-precision and measure the major diameter device, this device comprises laser instrument, and aiming, positioning unit, by the long unit of survey that length meter and guide rail constitute is characterized in that also comprising laser alignment, autocollimation unit.Said aiming, positioning unit are adsorbed on the magnetic locating piece of workpiece for measurement diameter both sides respectively by single measuring head, adjustable bed, two and optoelectronic receiver fixed thereon constitutes; Said measuring head is made up of a photelectric receiver that is coated with the pentagonal prism of semi-transparent semi-reflecting rete and is fixed together with it, and this measuring head is installed on the adjustable bed, and adjustable bed is placed on the slide block of said guide rail; Said laser alignment, autocollimation unit are made of microcobjective, single-mode fiber and optical fiber adjusting bracket thereof, telephotolens, optical fiber outgoing head and adjusting bracket thereof, the light-receiving target that is fixed on this outgoing upper surface; One end of said single-mode fiber links to each other with said microcobjective and together is fixed on this optical fiber adjusting bracket and is used for receiving laser beam, and the other end links to each other with said telephotolens and together is fixed on this optical fiber outgoing head and is used for launching light beam.
Measuring method of the present utility model is summarized as follows: the light by laser emitting is coupled into single-mode fiber through microcobjective, the light that adjusting optical fiber adjusting bracket sends this optical fiber and this laser instrument is in the optimum coupling state, light is through parallel outgoing behind the telescope, the outgoing head is fixed on again on its adjusting bracket, be used for adjusting the direction of emergent ray, be divided into two parts behind the pentagonal prism of this light in single measuring head, the optoelectronic receiver that a part direct directive of transmitted light and pentagonal prism are fixed together, be used to regulate the position of this measuring head, measuring head position with respect to collimated ray in measuring process is remained unchanged, thereby make the precision of guide rail and position not have influence measurement result; Another part reflection ray becomes an angle of 90 degrees with incident ray after this pentagonal prism reflection; Measuring head is fixed on the bidimensional adjustable bed, this bidimensional worktable by manual shift or step motor control can along with the direction of this guide rail and the directional trim vertical with the guide rail direction, the bidimensional worktable is fixed on again on the slide block of guide rail, whole measuring head and the bidimensional worktable that is attached thereto and guide rail slide block by motor by cog belt drive can be on guide rail back and forth movement; Measuring head aims at photelectric receiver on first and second the magnetic patch locating piece successively along guide rail movement, adjust two positions of magnetic locating piece on workpiece respectively and the light that incides locating piece and its reflection ray are overlapped guarantee that two locating pieces are positioned at correct measuring position, incident ray is guaranteed by the light-receiving target in the laser auto-collimation unit with overlapping of its reflection ray.After above-mentioned adjustment work is finished, just can begin to measure, measuring head aims at the photelectric receiver on the magnetic locating piece earlier during measurement, surveying long unit begins to measure, measuring head moves up to the photelectric receiver that aims on another magnetic locating piece along guide rail, surveys long unit and stops to measure, and can obtain the distance between two photelectric receivers, because the distance of measured workpiece edge and photelectric receiver is certain, then can accurately obtain the measured workpiece diameter dimension.
In the above-mentioned measurement mechanism that the utility model proposes, the adjusting of measuring head and collimated ray, measuring head moving on guide rail, collimated ray can be adopted artificial adjustment mode to the aiming of photelectric receiver etc., also the robotization mode be can adopt, step motor and computer control promptly are equipped with.
Advantage of the present utility model is: one, adopt laser alignment and autocollimator parts, and realization is to the measurement point aiming and locate two kinds of functions, and the single-mode fiber alignment method has reduced the influence of laser drift, has improved pointing accuracy; Its two, with magnetic locating piece location, replaced mechanical long-armed location to the large part inside and outside diameter measurement point, increased the measurement range of diameter greatly, enlarge measurement function, can measure internal diameter, external diameter, length etc. simultaneously, and to not having specific (special) requirements in the measuring position of measured piece; They are three years old, adopt single pentagonal prism gauge head to aim at two measurement points successively, make the foozle of pentagonal prism only produce the secondary measuring error (two pentagonal prisms aim at simultaneously two measurement points then the inconsistency error of the manufacturing of two pentagonal prisms then produce the one-shot measurement error), improved aiming bearing accuracy and measuring accuracy greatly; Its four, in measuring head, adopted compensation method, not only make the precision of guide rail and the position measurement result is not had influence, float influence but also significantly reduced the laser angle to measuring accuracy; Its five, replace directing pointing the edge of work with light aiming photelectric receiver, improved the sensitivity of aiming, reduced the influence of workpiece surface quality to aiming.
Brief Description Of Drawings:
Fig. 1 is the laser measuring device for measuring synoptic diagram of prior art
Fig. 2 is a kind of embodiment device synoptic diagram of the present invention
Fig. 3 single-mode fiber laser alignment, autocollimation cellular construction synoptic diagram
The structural representation of Fig. 4 measuring head
The utility model provides a kind of laser high-precision to measure the embodiment of major diameter device, its general structure synoptic diagram such as Fig. 2~shown in Figure 4, entire measuring device is by laser instrument (1), single-mode fiber laser alignment and autocollimation unit (8), location, aiming unit (9), by the long unit of survey that two-frequency laser interferometer (10) and linear rolling track (21) constitute, and computer controlled automatic and data processing unit (11) etc. are partly formed.Single-mode fiber laser alignment, the structural representation of autocollimation unit as shown in Figure 3, it comprises microcobjective (12), optical fiber adjusting bracket (13), single-mode fiber (14), telephotolens (15), optical fiber outgoing head (16), four-dimensional adjusting bracket (17) and the light-receiving target (18) that is fixed on the outgoing head constitute, the light that laser instrument (1) sends enters an end of single-mode fiber (14) after microcobjective (12) coupling, the light that adjusting optical fiber adjusting bracket (13) sends optical fiber and laser instrument is in the optimum coupling state, the other end of optical fiber and telephotolens (15) link, and be fixed on the optical fiber outgoing head (16), light is through parallel outgoing behind the telescope, the outgoing head is fixed on four-dimensional the adjusting on (17) frame again, is used for adjusting the direction of emergent ray; The structural representation of aiming, positioning unit as shown in Figure 2, it comprises single measuring head (19), a bidimensional Precision trimming worktable (20), two flute profile magnetic locating pieces (22), (22 ') and the four-quadrant photocell (23), (23 ') that are attached thereto; The structural representation of measuring head as shown in Figure 4, it is formed by a pentagonal prism (24) with a compensating glass (25) and a four-quadrant photocell (26) glued together and that be coated with semi-transparent semi-reflecting film, the three is connected one by a base (27), measuring head is fixed on the bidimensional worktable, the bidimensional worktable can be realized the accurate aiming of measuring head to the four-quadrant photocell center along the fine motion of guide rail direction, the bidimensional worktable also can be realized the adjusting of measuring head position along the direction fine motion vertical with the guide rail direction, thereby guarantee that measuring head position with respect to collimated ray in measuring process remains unchanged, the bidimensional stationary table is on the slide block (30) of guide rail, by step motor (28) by cog belt (29) drive can be on guide rail back and forth movement, thereby two four-quadrant photocells are aimed at; The part of laser beam is directly injected four-quadrant photocell (26) by pentagonal prism and compensating glass, regulate the position of measuring head by fine setting bidimensional worktable, another part light becomes the four-quadrant photocell of an angle of 90 degrees directive suction on the magnetic locating piece of measured workpiece diameter both sides with incident ray through pentagonal prism reflection back, adjust that two magnetic locating pieces make the light that incides on the four-quadrant photocell in the position on the workpiece and by reflecting coincidence on it, promptly this moment, reflection ray dropped on the pinwheel of the light-receiving target on the optical fiber outgoing head.Adjust two-frequency laser, make its emergent ray overlap with collimated ray or parallel, direction of measurement is just consistent with the direction of measured diameter and perpendicular to two sighted directions like this.Measuring head aims at two four-quadrant photocell centers on the magnetic locating piece successively, and the dual-frequency laser length measurement systematic survey goes out two distances between the four-quadrant photocell center, can directly obtain measured workpiece diameter D by calculating.
When adjustment two magnetic locating pieces make it to be in correct measuring position, just can measure automatically, computing machine is in correct measuring position by the step motor control measuring head earlier, four-quadrant photocell center of automatic aiming then, and measure the deviation value of light with respect to the four-quadrant photocell center, double-frequency laser began to measure to drive until stepper motor and stopped when measuring head moves to another four-quadrant photocell center of aiming this moment, measure the deviation value of light equally with respect to the four-quadrant photocell center, automatically calculate diameters by data processing, dual-frequency laser length measurement technology and computer controlled automatic and data processing all adopt mature technology, do not do detailed description at this.
The relative accuracy of this measurement device is better than 5 * 10 -6, measurement range is 500 millimeters-5 meters.
The utility model also can have different embodiments, for example, and 1, adopt other photoelectric device (as CCD, PSD etc.) to replace four-quadrant photocell may obtain same effect.2, be placed on the magnetic locating piece with catoptron, the edge of work of directing pointing can reach effect preferably equally, but measurement range, range of application are subjected to certain limitation, and measuring accuracy decreases.3, need guide rail to survey long means (as grating, magnetic grid, inductosyn etc.) with other, be equipped with location of the present utility model and point technique and can reach certain effect within the specific limits, but its measurement range is less, measuring accuracy reduces.4, adopt artificial adjustment and measurement can realize high-acruracy survey equally, just efficiency of measurement reduces.5, with other laser collimator or directly replace the single-mode fiber laser collimator also may obtain effect preferably with laser instrument.

Claims (5)

1, a kind of laser high-precision is measured the major diameter device, comprise laser instrument, aiming, positioning unit, the long unit of survey that constitutes by length meter and guide rail, it is characterized in that also comprising laser alignment, autocollimation unit, said aiming, positioning unit are adsorbed on magnetic locating piece that workpiece for measurement diameter two surveys respectively by single measuring head, adjustable bed, two and optoelectronic receiver fixed thereon constitutes; Said measuring head is made up of a photelectric receiver that is coated with the pentagonal prism of semi-transparent semi-reflecting rete and is fixed together with it, and this measuring head is installed on the adjustable bed, and adjustable bed is placed on the slide block of said guide rail.
2, device as claimed in claim 1 is characterized in that said laser alignment, autocollimation unit are made of microcobjective, single-mode fiber and optical fiber adjusting bracket thereof, telephotolens, optical fiber outgoing head and adjusting bracket thereof, the light-receiving target that is fixed on this outgoing upper surface; One end of said single-mode fiber links to each other with said microcobjective and together is fixed on this optical fiber adjusting bracket and is used for receiving laser beam, and the other end links to each other with said telephotolens and together is fixed on this optical fiber outgoing head and is used for launching light beam; Said photelectric receiver adopts four-quadrant photocell; Said magnetic locating piece is a flute profile; Have compensating glass on the said pentagonal prism; The long unit of said survey adopts two-frequency laser interferometer.
3, device as claimed in claim 1 is characterized in that the photelectric receiver on the said magnetic locating piece replaces with catoptron.
4, device as claimed in claim 1, it is characterized in that also comprising computer controlled automatic and data processing unit, said measuring head, guide rail all are equipped with stepper motor, and automatic control unit control step motor realizes that adjustment, measuring head to the measuring head position is to the aiming and the back and forth movement of measuring head on guide rail at four-quadrant photocell center on the magnetic locating piece.
5, device as claimed in claim 1 is characterized in that the linear rolling track that said guide rail adopts.
CN 92222069 1992-05-21 1992-05-21 Laser high degree of accuracy measurement big diameter apparatus Granted CN2120322U (en)

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Application Number Priority Date Filing Date Title
CN 92222069 CN2120322U (en) 1992-05-21 1992-05-21 Laser high degree of accuracy measurement big diameter apparatus

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Application Number Priority Date Filing Date Title
CN 92222069 CN2120322U (en) 1992-05-21 1992-05-21 Laser high degree of accuracy measurement big diameter apparatus

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CN2120322U true CN2120322U (en) 1992-10-28

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CN 92222069 Granted CN2120322U (en) 1992-05-21 1992-05-21 Laser high degree of accuracy measurement big diameter apparatus

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1330927C (en) * 2005-10-26 2007-08-08 武汉理工大学 Optical projection measurer for external diameter of large wheel diameter
CN101319881B (en) * 2008-05-27 2010-06-02 江苏技术师范学院 Device and method for measuring maximum diameter of non-cylinder
CN102004027B (en) * 2009-09-15 2012-05-30 中国计量科学研究院 Laser two-coordinate device
CN103424079A (en) * 2012-05-14 2013-12-04 中国测试技术研究院力学研究所 Large workpiece diameter laser measuring system and method
CN106643535A (en) * 2016-11-29 2017-05-10 深圳市赛亿科技开发有限公司 Device for measuring diameter of cylindrical part and use method thereof
CN108627109A (en) * 2018-06-29 2018-10-09 上海共久电气有限公司 A kind of measuring device that more specification pipe outside diameters can be achieved
CN111307036A (en) * 2020-03-11 2020-06-19 伊莱特能源装备股份有限公司 Method for detecting size of thermal-state large ring piece

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1330927C (en) * 2005-10-26 2007-08-08 武汉理工大学 Optical projection measurer for external diameter of large wheel diameter
CN101319881B (en) * 2008-05-27 2010-06-02 江苏技术师范学院 Device and method for measuring maximum diameter of non-cylinder
CN102004027B (en) * 2009-09-15 2012-05-30 中国计量科学研究院 Laser two-coordinate device
CN103424079A (en) * 2012-05-14 2013-12-04 中国测试技术研究院力学研究所 Large workpiece diameter laser measuring system and method
CN106643535A (en) * 2016-11-29 2017-05-10 深圳市赛亿科技开发有限公司 Device for measuring diameter of cylindrical part and use method thereof
CN108627109A (en) * 2018-06-29 2018-10-09 上海共久电气有限公司 A kind of measuring device that more specification pipe outside diameters can be achieved
CN111307036A (en) * 2020-03-11 2020-06-19 伊莱特能源装备股份有限公司 Method for detecting size of thermal-state large ring piece

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