CN2577239Y - Potable laser collimator - Google Patents

Potable laser collimator Download PDF

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CN2577239Y
CN2577239Y CN 02285917 CN02285917U CN2577239Y CN 2577239 Y CN2577239 Y CN 2577239Y CN 02285917 CN02285917 CN 02285917 CN 02285917 U CN02285917 U CN 02285917U CN 2577239 Y CN2577239 Y CN 2577239Y
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laser
tuning mechanism
receiving head
target mirror
photoelectric receiver
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冯其波
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Beijing Jiaotong University
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Abstract

一种便携式激光准直测量仪,该激光准直仪由激光发射接收头(1)、靶镜(2)以及信号处理单元(3)三部分组成。激光发射接收头(1)由一体化半导体光纤激光器(4)、准直透镜(5)、光电接收器(6)以及机械微调机构(7)组成,一体化半导体激光器(4)和准直透镜(5)、光电接收器(6)分别通过支架(8、9、10、11)固定在机械微调机构(7)上。靶镜(2)中的角锥棱镜(13)通过棱镜坐(14)固定在微调机构(15)上。信号处理单元完成对测量信号的采集、处理与输出等功能。该测量装置具有体积小、测量方便、测量稳定性高等优点。

Figure 02285917

A portable laser collimation measuring instrument is composed of three parts: a laser emitting and receiving head (1), a target mirror (2) and a signal processing unit (3). The laser transmitting and receiving head (1) is composed of an integrated semiconductor fiber laser (4), collimating lens (5), photoelectric receiver (6) and mechanical fine-tuning mechanism (7). The integrated semiconductor laser (4) and collimating lens (5), the photoelectric receiver (6) is respectively fixed on the mechanical fine-tuning mechanism (7) through the brackets (8, 9, 10, 11). The corner cube prism (13) in the target mirror (2) is fixed on the fine-tuning mechanism (15) by the prism seat (14). The signal processing unit completes the collection, processing and output of measurement signals. The measuring device has the advantages of small size, convenient measurement, high measurement stability and the like.

Figure 02285917

Description

一种便携式激光准直仪A portable laser collimator

(一)技术领域(1) Technical field

本实用新型涉及一种激光测量仪器,特别适用于对大型工件的形状位置误差(如直线度、同轴度等)进行测量。The utility model relates to a laser measuring instrument, which is particularly suitable for measuring the shape and position errors (such as straightness, coaxiality, etc.) of large workpieces.

(二)背景技术(2) Background technology

目前国内外测量大型工件直线度、同轴度、平行度等形状位置误差仍主要采用拉钢丝、放假轴等方法,这些方法普遍存在测量效率低、测量精度差等缺点。20世纪70年代后期,国内外出现了各种各样的激光准直方法和装置,由于这些激光准直方法普遍存在测量靶镜带有跟随光电接收器的电缆,激光准直头由于采用He-Ne激光器而体积大,没有解决好激光发射器自身的漂移使得准直精度不高等问题,没有得到普遍使用。一种采用单模光纤和He-Ne激光器的准直装置,由于采用单模光纤减少激光器本身的漂移,从而提高激光准直精度,但该装置采用分离元件来耦合激光器和光纤,造成出射光强的不稳定,同时该装置仍采用带电缆的靶镜,给现场快速测量带来一定的困难[冯其波等,自动读出的光纤激光准直系统,《仪器仪表学报》,1994,15(4):363]。专利97250676.4“激光准直测量仪”提出的采用半导体激光器和位置探测器构成的激光准直测量装置,该专利虽然采用半导体激光器,可减少准直头的体积,但由于没有采用有效措施来减少半导体激光器的漂移,使得测量精度不高,同时由于探测器固定在测量靶镜上,造成移动靶镜时电缆也需要一起移动,给测量带来不便。At present, the methods of measuring the shape and position errors of large-scale workpieces such as straightness, coaxiality, and parallelism at home and abroad are still mainly used to draw steel wires and place fake shafts. These methods generally have the disadvantages of low measurement efficiency and poor measurement accuracy. In the late 1970s, various laser alignment methods and devices appeared at home and abroad. Due to the ubiquity of these laser alignment methods, the measurement target mirror has a cable following the photoelectric receiver, and the laser alignment head uses He- The Ne laser has a large volume and has not solved the problem of low alignment accuracy caused by the drift of the laser transmitter itself, and has not been widely used. A collimation device using a single-mode fiber and a He-Ne laser, because the single-mode fiber is used to reduce the drift of the laser itself, thereby improving the laser alignment accuracy, but the device uses separate components to couple the laser and the fiber, resulting in the output light intensity At the same time, the device still uses a target mirror with a cable, which brings certain difficulties to the rapid measurement on the spot [Feng Qibo et al., Automatic Readout Fiber Laser Alignment System, "Journal of Instrumentation", 1994, 15 (4) :363]. Patent 97250676.4 "Laser Alignment Measuring Instrument" proposes a laser alignment measurement device composed of a semiconductor laser and a position detector. Although this patent uses a semiconductor laser to reduce the volume of the collimation head, it does not take effective measures to reduce the size of the semiconductor laser. The drift of the laser makes the measurement accuracy not high. At the same time, because the detector is fixed on the measurement target mirror, the cable needs to move together when the target mirror is moved, which brings inconvenience to the measurement.

(三)发明内容(3) Contents of the invention

本实用新型所要解决的技术问题是提供一种便携式激光准直测量仪。由于光电接收器固定在激光发射头上,测量靶镜上无光电接收器和电缆连接;激光准直头由于采用一体化半导体激光器件,因而使得测量装置具有体积小、测量方便、测量稳定性高等优点。The technical problem to be solved by the utility model is to provide a portable laser alignment measuring instrument. Since the photoelectric receiver is fixed on the laser emitting head, there is no photoelectric receiver and cable connection on the measuring target mirror; the laser collimation head uses an integrated semiconductor laser device, which makes the measuring device small in size, convenient in measurement, and high in measurement stability. advantage.

本实用新型采用的技术方案是:该激光准直仪由激光发射接收头、靶镜以及信号处理单元三部分组成。其特征是:所说激光发射接收头由激光发射器、准直透镜、光电接收器以及机械微调机构组成,所述的激光发射器和准直透镜分别通过支架固定在机械微调机构上,激光发射器出射的光经过准直透镜后成为光斑大小合适的平行光,所述的光电接收器通过支架固定在机械微调机构上,并接收从靶镜上反射的光,所述的机械微调机构主要用来调节出射激光发射接收头出射激光的光线,所述的激光发射器采用一体化半导体光纤激光器,此一体化半导体光纤激光器主要是将半导体激光器与单模光纤直接通过硬性连接(如胶接或焊接)的方式固定在一起。The technical scheme adopted by the utility model is: the laser collimator is composed of three parts: a laser emitting and receiving head, a target mirror and a signal processing unit. It is characterized in that: the laser emitting and receiving head is composed of a laser emitter, a collimating lens, a photoelectric receiver and a mechanical fine-tuning mechanism, and the laser emitter and the collimating lens are respectively fixed on the mechanical fine-tuning mechanism The light emitted by the device becomes parallel light with a suitable spot size after passing through the collimator lens. The photoelectric receiver is fixed on the mechanical fine-tuning mechanism through a bracket, and receives the light reflected from the target mirror. The mechanical fine-tuning mechanism mainly uses To adjust the laser light emitted by the outgoing laser emitting and receiving head, the laser emitter adopts an integrated semiconductor fiber laser, and this integrated semiconductor fiber laser mainly directly connects the semiconductor laser and the single-mode optical fiber through a hard connection (such as gluing or welding) ) are fixed together.

所述的靶镜包括一角锥棱镜和机械微调机构,角锥棱镜通过棱镜坐固定在此微调机构上,接收激光发射接收头出射的光线,并将该光线反射到激光发射接收头上的光电接收器上,机械微调机构主要用来调节反射光线的位置,并使反射光线打到光电接收器上;所述的信号处理单元完成对光电接收器探测到的信号进行采集、处理与输出等功能。The target mirror includes a corner cube prism and a mechanical fine-tuning mechanism. The corner cube prism is fixed on the fine-tuning mechanism through a prism, receives the light emitted by the laser emitting and receiving head, and reflects the light to the photoelectric receiving device on the laser emitting and receiving head. On the device, the mechanical fine-tuning mechanism is mainly used to adjust the position of the reflected light and make the reflected light hit the photoelectric receiver; the signal processing unit completes the functions of collecting, processing and outputting the signal detected by the photoelectric receiver.

所述的光电接收器可采用四象限光电接收器、PSD位敏器件和CCD光电器件;所述的激光发射接收头上的机械微调机构可采用两维方向调节机构或四维调节机构(两维方向与两维位移),靶镜上的微调机构则需要采用两维位移调节机构。Described photoelectric receiver can adopt four-quadrant photoelectric receiver, PSD position-sensitive device and CCD photoelectric device; The mechanical fine-tuning mechanism on the described laser transmitting and receiving head can adopt two-dimensional direction adjustment mechanism or four-dimensional adjustment mechanism (two-dimensional direction and two-dimensional displacement), the fine-tuning mechanism on the target mirror needs to adopt a two-dimensional displacement adjustment mechanism.

本实用新型与背景技术相比所具有的优点:其一,在靶镜上采用角锥棱镜将入射光反射到激光发射接收头上的光电接收器上,实现了靶镜无光电接收器和无电缆连接,给测量带来了极大的方便;其二,用一体化的半导体光纤激光器代替传统的He-Ne激光器或半导体激光器,极大提高了出射光线的空间和时间稳定性,提高激光准直精度,也使得激光发射接收头的体积大大减少。Compared with the background technology, the utility model has the following advantages: firstly, a corner cone prism is used on the target mirror to reflect the incident light to the photoelectric receiver on the laser emitting and receiving head, realizing the target mirror without photoelectric receiver and without The cable connection brings great convenience to the measurement; secondly, the traditional He-Ne laser or semiconductor laser is replaced by an integrated semiconductor fiber laser, which greatly improves the space and time stability of the outgoing light and improves the accuracy of the laser. The straight precision also greatly reduces the volume of the laser transmitting and receiving head.

(四)附图说明(4) Description of drawings

图1  便携式激光准直仪主视图Figure 1 Front view of portable laser collimator

图2  便携式激光准直仪俯视图Figure 2 Top view of portable laser collimator

图中:1为激光发射接收头、2为靶镜、3为信号处理单元、4为一体化半导体光纤激光器、5为准直透镜、6为光电接收器、7为机械微调机构、8、9、10、11、为支架,12盒子,13为角锥棱镜、14为棱镜坐,15为机械微调机构。In the figure: 1 is the laser transmitting and receiving head, 2 is the target mirror, 3 is the signal processing unit, 4 is the integrated semiconductor fiber laser, 5 is the collimating lens, 6 is the photoelectric receiver, 7 is the mechanical fine-tuning mechanism, 8, 9 .

(五)具体实施方式(5) Specific implementation methods

对照附图,说明实现本实用新型的优选方式:该激光准直仪(图1、图2)由激光发射接收头1、靶镜2以及信号处理单元3三部分组成。其特征是:所说激光发射接收头1由一体化半导体光纤激光器4(激光发射器)、准直透镜5、光电接收器6以及机械微调机构7组成,所述的一体化半导体激光器4和准直透镜5分别通过支架8、9和10固定在机械微调机构7上,一体化半导体激光器4出射的光经过准直透镜5后成为光斑大小合适的平行光,所述的光电接收器6通过支架11固定在机械微调机构7上,接收从靶镜2上反射的光,所述的机械微调机构7主要用来调节出射激光发射接收头1出射激光光线的方向,整个激光发射接收头用一个盒子12盖上;所述的靶镜2由一角锥棱镜13和机械微调机构15组成,角锥棱镜13通过棱镜坐14固定在微调机构15上,接收激光发射接收头1出射的光线,并将该光线反射到激光发射接收头1上的光电接收器6上,机械微调机构15主要用来调节反射光线的位置,并使反射光线打到光电接收器6上;所述的信号处理单元3完成对光电接收器6探测到的信号进行采集、处理与输出等功能。Referring to the accompanying drawings, the preferred way to realize the utility model is illustrated: the laser collimator (Fig. 1, Fig. 2) is composed of a laser emitting and receiving head 1, a target mirror 2 and a signal processing unit 3. It is characterized in that: the laser emitting and receiving head 1 is composed of an integrated semiconductor fiber laser 4 (laser transmitter), a collimating lens 5, a photoelectric receiver 6 and a mechanical fine-tuning mechanism 7, and the integrated semiconductor laser 4 and the collimator The straight lens 5 is respectively fixed on the mechanical fine-tuning mechanism 7 through brackets 8, 9 and 10. The light emitted by the integrated semiconductor laser 4 becomes parallel light with a suitable spot size after passing through the collimator lens 5. The photoelectric receiver 6 passes through the bracket 11 is fixed on the mechanical fine-tuning mechanism 7 to receive the light reflected from the target mirror 2. The mechanical fine-tuning mechanism 7 is mainly used to adjust the direction of the outgoing laser light from the laser emitting and receiving head 1. The entire laser emitting and receiving head uses a box 12 covers; Described target lens 2 is made up of a corner cube prism 13 and mechanical fine-tuning mechanism 15, and corner cube prism 13 is fixed on the fine-tuning mechanism 15 by prism seat 14, receives the light that laser emitting and receiving head 1 exits, and this The light is reflected on the photoelectric receiver 6 on the laser emitting and receiving head 1, and the mechanical fine-tuning mechanism 15 is mainly used to adjust the position of the reflected light, and makes the reflected light hit the photoelectric receiver 6; The signals detected by the photoelectric receiver 6 are collected, processed and output.

所述的光电接收器6采用四象限光电接收器;所述的激光发射接收头1上的机械微调机构7可采用两维方向调节机构,靶镜上的微调机构9则需要采用两维位移调节机构。The photoelectric receiver 6 adopts a four-quadrant photoelectric receiver; the mechanical fine-tuning mechanism 7 on the laser transmitting and receiving head 1 can adopt a two-dimensional direction adjustment mechanism, and the fine-tuning mechanism 9 on the target mirror needs to adopt a two-dimensional displacement adjustment mechanism.

采用其它类型的激光器(如He-Ne激光器、普通半导体激光器等)替代一体化半导体激光器,可以得到类似的效果,但准直精度会降低;采用其他类型的光电接收器(如PSD位敏器件和CCD光电器件)替代四象限光电接收器可起到同样的效果。Using other types of lasers (such as He-Ne lasers, ordinary semiconductor lasers, etc.) CCD photoelectric device) instead of a four-quadrant photoelectric receiver can have the same effect.

本实用新型的测量原理简述如下:将激光发射接收头1连同靶镜2固定在被测工件上,靶镜2固定在活动台(如导轨的滑块)上,调整激光发射接收头1上的方向微调机构和靶镜上的位移微调机构,使得出射光线与被测工件基本平行,并使得从靶镜上反射的光线尽量在光电接收器6的中心位置。调整完后,移动活动台,如果工件存在直线度偏差,则靶镜必然在垂直于发射光线的两个方向上移动,从而改变入射光线在角锥棱镜上的位置,由角锥棱镜的特性可知,由角锥棱镜反射出的光线位置也发生改变,其变化量与角锥棱镜的位置量完全相同,这样反射的光线打到光电接收器上的位置会发生相同的变化,由此得到工件相对于光线中心的偏移,通过处理得到工件的直线度。类似使用此装置还可以得到工件其他类型的形状位置误差。The measurement principle of the utility model is briefly described as follows: the laser emitting and receiving head 1 and the target mirror 2 are fixed on the workpiece to be measured, the target mirror 2 is fixed on the movable platform (such as a slide block of the guide rail), and the laser emitting and receiving head 1 is adjusted. The direction fine-tuning mechanism and the displacement fine-tuning mechanism on the target mirror make the outgoing light basically parallel to the measured workpiece, and make the light reflected from the target mirror at the center of the photoelectric receiver 6 as much as possible. After the adjustment, move the movable table. If there is a straightness deviation in the workpiece, the target mirror must move in two directions perpendicular to the emitted light, thereby changing the position of the incident light on the corner cube. It can be known from the characteristics of the corner cube , the position of the light reflected by the corner-cube prism also changes. The deviation from the center of the light beam can be processed to obtain the straightness of the workpiece. Similar use of this device can also obtain other types of shape position errors of the workpiece.

本装置测量靶镜位置变化的灵敏度为0.0005mm,准直距离大于10m,测量误差小于(0.002+2L)mm(L为准直距离,单位为m),适用于对大型工件各种形状位置误差的静态与动态测量。The sensitivity of the device to measure the position change of the target mirror is 0.0005mm, the collimation distance is greater than 10m, and the measurement error is less than (0.002+2L)mm (L is the collimation distance, the unit is m), which is suitable for measuring the position errors of various shapes of large workpieces static and dynamic measurements.

Claims (2)

1.一种便携式激光准直测量仪,由激光发射接收头(1)、靶镜(2)以及信号处理单元(3)三部分组成,所说激光发射接收头(1)包括激光发射器(4)、准直透镜(5)以及机械微调机构(7),所述的激光发射器(4)和准直透镜(5)通过支架(8)、(9)固定在机械微调机构(7)上,其特征是:所述的激光发射接收头(1)中的激光发射器(4)为一体化半导体光纤激光器;所述的靶镜(2)为包括一角锥棱镜(13),该角锥棱镜(13)通过一固定座(14)固定在机械微调机构(15)上。1. A portable laser alignment measuring instrument is made up of three parts of a laser emitting and receiving head (1), a target mirror (2) and a signal processing unit (3), and said laser emitting and receiving head (1) includes a laser emitter ( 4), collimating lens (5) and mechanical fine-tuning mechanism (7), described laser emitter (4) and collimating lens (5) are fixed on mechanical fine-tuning mechanism (7) by bracket (8), (9) On, it is characterized in that: the laser transmitter (4) in the laser transmitting and receiving head (1) is an integrated semiconductor fiber laser; the target mirror (2) includes a corner cube prism (13), the angle The axicon prism (13) is fixed on the mechanical fine-tuning mechanism (15) through a fixing seat (14). 2.根据权利要求1所述的一种便携式激光准直测量仪,其特征是:激光发射接收头(1)还包括光电接收器(6),所述的光电接收器(6)通过支架(11)固定在机械微调机构(7)上。2. A portable laser alignment measuring instrument according to claim 1, characterized in that: the laser emitting and receiving head (1) also includes a photoelectric receiver (6), and the photoelectric receiver (6) passes through the support ( 11) It is fixed on the mechanical fine-tuning mechanism (7).
CN 02285917 2002-11-12 2002-11-12 Potable laser collimator Expired - Fee Related CN2577239Y (en)

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CN102322825A (en) * 2011-06-02 2012-01-18 南京航空航天大学 Optical measuring system and method for coaxiality of extra-long-hole part
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CN103673933A (en) * 2013-11-29 2014-03-26 中国科学院上海光学精密机械研究所 Long rail straightness measuring device
CN104034354A (en) * 2014-06-24 2014-09-10 中国船舶重工集团公司第七一七研究所 Alignment process for IMU (Inertial Measurement Unit) position and azimuth determining system
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CN100460811C (en) * 2006-07-24 2009-02-11 北京交通大学 A method and device for improving the sensitivity of straightness measurement
CN100460255C (en) * 2006-09-21 2009-02-11 北京交通大学 Device, system and method for automatically monitoring rail parameters using laser
CN102322825A (en) * 2011-06-02 2012-01-18 南京航空航天大学 Optical measuring system and method for coaxiality of extra-long-hole part
CN102322825B (en) * 2011-06-02 2013-02-20 南京航空航天大学 Optical measuring system and method for coaxiality of extra-long-hole part
CN102589448A (en) * 2012-03-13 2012-07-18 北京信息科技大学 High-precision six-freedom degree pose monitoring device
CN103673933A (en) * 2013-11-29 2014-03-26 中国科学院上海光学精密机械研究所 Long rail straightness measuring device
CN104034354A (en) * 2014-06-24 2014-09-10 中国船舶重工集团公司第七一七研究所 Alignment process for IMU (Inertial Measurement Unit) position and azimuth determining system
CN104034354B (en) * 2014-06-24 2017-01-18 中国船舶重工集团公司第七一七研究所 Alignment process for IMU (Inertial Measurement Unit) position and azimuth determining system
WO2018103268A1 (en) * 2016-12-09 2018-06-14 北京交通大学 Laser measurement system for measuring geometric error in six degrees of freedom of rotating shaft, and method therefor
CN110641513A (en) * 2019-09-25 2020-01-03 北京交通大学 Detection system and method for wheel-rail acting force and tread fault
CN110641513B (en) * 2019-09-25 2021-07-30 北京交通大学 Detection system and method for wheel-rail force and tread fault

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