CN115752239A - Device and method for measuring synchronism of movement mechanism - Google Patents

Device and method for measuring synchronism of movement mechanism Download PDF

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Publication number
CN115752239A
CN115752239A CN202211497498.8A CN202211497498A CN115752239A CN 115752239 A CN115752239 A CN 115752239A CN 202211497498 A CN202211497498 A CN 202211497498A CN 115752239 A CN115752239 A CN 115752239A
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laser beam
pentaprism
psd sensor
shaft
workbench
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CN202211497498.8A
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CN115752239B (en
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沈斌
王廷
罗一钧
谢非凡
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Hangzhou Laizhi Measurement Technology Co ltd
Hangzhou Guangchi Technology Co ltd
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Hangzhou Laizhi Measurement Technology Co ltd
Hangzhou Guangchi Technology Co ltd
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Abstract

The invention relates to the high-precision measurement field of bilateral or multilateral synchronism of a linear motion mechanism. When the synchronous measurement is carried out, one guide rail is taken as a reference shaft, a laser emitter frame is fixed, a laser beam is adjusted to be parallel to the reference shaft, then the laser beam is deflected by 90 degrees through a pentaprism arranged on one side of the reference shaft and is refracted to a measured shaft on the other side, a double-shaft PSD sensor used for receiving the laser beam is arranged on the position, when a workbench or a portal frame moves, the positions of the laser beam irradiating on the PSD sensor can be changed due to asynchronization of two sides, the change can be accurately measured by the PSD sensor, the data is processed and analyzed, and therefore the synchronous error can be further compensated. The method is characterized in that the synchronism error is obtained by measuring the relative variable quantity of two sides or multiple sides instead of the absolute movement quantity, and compared with the traditional measuring method, the method has the advantages of high precision, simplicity in operation, strong applicability and the like.

Description

Device and method for measuring synchronism of movement mechanism
Technical Field
The invention relates to the technical field of high-precision measurement of synchronization errors of linear motion mechanisms, in particular to a synchronization error measuring device based on a PSD sensor.
Background
Large gantry machines, three-coordinate measuring machines and other devices with a gantry (bridge) moving function or devices with a moving platform arranged on parallel guide rails on two sides; due to the factors of parallelism error of the two guide rails, asynchronism of motors on two sides and the like, the movement mechanism can generate torsion during movement, and further, synchronization errors on two sides are generated; the larger the span of the two-side guide rails is, the larger the generated synchronization error is.
The traditional methods for measuring the synchronization error mainly comprise a meter drawing method, an interferometer method and the like. The method is more suitable for a small-span movement mechanism, and the movement speed is lower or the static measurement condition is adopted; the method has low cost and high measurement efficiency, but the measurement precision and the applicability are not ideal.
The interferometer method is divided into a double interferometer method and a light splitting method, the double interferometer method generally uses two single-frequency laser interferometers to measure the synchronism error, and the double-frequency laser interferometer can measure by the light splitting method; the interferometer method has high measurement precision, but has low measurement efficiency and high equipment price cost.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a motion mechanism synchronism measuring device based on a PSD sensor, which has the advantages of high precision, simplicity in operation, strong applicability and the like, and solves the problems of low measuring efficiency, high cost and the like of the traditional measuring method.
(II) technical scheme
In order to solve the technical problems, the invention provides the following technical scheme:
a device for measuring the synchronism of a motion mechanism comprises a laser transmitter, a pentaprism, a PSD sensor and a data processing terminal; the laser transmitter is fixedly arranged at one end of the reference shaft and can adjust the laser beam to be parallel to the reference shaft, and the laser beam is a reference standard for measurement; the pentaprism is arranged on the movable workbench or the movable portal frame, and the installation position of the pentaprism is as close as possible to the reference shaft and is used for transmitting the reference datum; the PSD sensor is arranged on the movable workbench or the movable portal frame, is close to the measured shaft, and is used for receiving the laser beam and outputting data of relative displacement variation.
A measuring method of a measuring device for the synchronism of a motion mechanism comprises the following steps: s1, erecting a laser transmitter on a lathe bed or an external tripod at one end of a reference shaft, setting two measurement reference points at the moving near end and far end of the reference shaft, and adjusting an adjusting knob of the laser transmitter to enable data of a PSD sensor at the two reference points to tend to be consistent so as to realize that laser is parallel to the reference shaft; after the step is finished, a reference datum for measurement is determined, and a laser transmitter needs to be kept fixed; s2, installing a pentaprism at a position, close to the reference shaft, of the portal frame or the workbench, so that the laser beam deflects by 90 degrees and is emitted to the measured shaft; during measurement, the pentaprism moves along with the portal frame or the workbench; s3, mounting the PSD sensor on a portal frame or a workbench at a position close to a measured shaft, and adjusting the position of the PSD sensor to enable a laser beam to enter the approximate center position of the PSD sensor; at the moment, the PSD sensor can measure the accurate position of the laser beam on the sensor and transmit data to the data processing terminal through wireless Bluetooth; zeroing the position data while measuring the first position; s4, moving the portal frame or the workbench, and recording the generated position data; s5, inputting the acquired data to a data processing end, and adjusting relevant parameters of a motor control system for driving the portal frame or the workbench according to a calculation result to correct the synchronization error; and S6, repeating S4-S5 until the measured synchronism error is smaller than a set threshold value.
Preferably, the following components: in the scheme, the direction of a reference axis is X1; the direction of the measured shaft is X2; the direction of the laser beam reflected by the pentaprism is Y; the X1 direction is perpendicular to the Y direction through the guarantee of a pentaprism; the structure and the principle of the pentaprism ensure that the perpendicularity between the emergent laser beam and the incident laser beam is hardly influenced by the change of the incident angle of the laser beam caused by the change of the posture of the pentaprism; meanwhile, a small circular reflecting mirror for indicating and adjusting the position and the angle of the incident laser beam is designed in front of the incidence surface of the pentaprism.
Preferably: when the portal frame or the workbench twists on the guide rail, the Y direction is still vertical to the measured axis X2, but the measured axis side of the portal frame or the workbench and the reference axis side generate front and back position deviation in the movement direction, the deviation is synchronization error of the two sides, and the reading reflected on the PSD sensor is delta X.
Preferably: when the number of the guide rails is larger than two, after one shaft is selected as a reference shaft, the multi-guide-rail synchronization error measurement is completed by adding a pentaprism, a PSD sensor and other measurement units.
(III) advantageous effects
Compared with the prior art, the invention provides a synchronization error measuring method based on a PSD sensor, which has the following beneficial effects:
according to the method for measuring the synchronism errors, a laser beam parallel to a reference axis is refracted to form another measured axis through a pentaprism, and the function of the method is to transmit the position of the reference axis to a PSD sensor of the measured axis. When a synchronization error occurs, the position of the reference axis recorded on the PSD sensor is changed, the corresponding error is transmitted by the PSD sensor in real time and is calculated and analyzed by the data processing terminal.
Drawings
Fig. 1 is a schematic structural diagram of a device for measuring synchronism of a moving mechanism.
Fig. 2 is a schematic structural diagram of a device for measuring the synchronism of a moving mechanism.
Fig. 3 is a schematic view of the measurement development of a device for measuring the synchronism of a moving mechanism.
In the figure: 1. a laser transmitter; 2. a reference shaft guide rail; 3. a first guide rail of the measured shaft; 4. a gantry; 5. a pentaprism; 6. a PSD sensor; 7. and a second guide rail of the measured shaft.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Referring to fig. 1, a high-precision measurement device for a transmission device includes a laser transmitter 1, a pentaprism 5, a PSD sensor 6, and a data processing terminal; the laser transmitter 1 is fixedly arranged at one end of the reference shaft and can adjust the laser beam to be parallel to the reference shaft, and the laser beam is a reference standard for measurement; the pentaprism 5 is arranged on the movable workbench or the movable portal frame, and the installation position of the pentaprism is as close to the reference axis as possible, and is used for transmitting a reference datum (namely a laser beam); the PSD sensor 6 is arranged on a movable workbench or a movable portal frame, is close to the measured shaft, and is used for receiving the laser beam and outputting data of relative displacement variation.
Fig. 2-3 show a synchronization measurement scheme of a gantry mobile machine tool, wherein the gantry whole frame of the machine tool is assembled, two parallel guide rails are arranged, the gantry is fixed on the guide rails through a bottom upright post, and the movement on the guide rails is realized through double-drive motors on two sides.
In order to enable the gantry mobile machine tool to meet the use requirements, the bilateral synchronism measurement of the gantry in the embodiment adopts the following steps:
s1, erecting a laser transmitter on a lathe bed or an external tripod at one end of a reference shaft, setting two measurement reference points at the moving near end and far end of the reference shaft, and adjusting an adjusting knob of the laser transmitter to enable data of a PSD sensor at the two reference points to tend to be consistent so as to realize that a laser beam is parallel to the reference shaft; after the step is finished, a reference standard for measurement is determined, and a laser transmitter needs to be kept fixed;
s2, installing a pentaprism at a position of the portal frame close to the reference shaft, and enabling the laser beam to deflect 90 degrees and emit to the measured shaft; during measurement, the pentaprism moves along with the portal frame;
s3, mounting the PSD sensor on a position, close to a measured shaft, of the portal frame, and adjusting the position of the PSD sensor to enable the laser beam to enter the approximate center position of the PSD sensor; at the moment, the PSD sensor can measure the accurate position of the laser beam on the sensor and transmit data to the data processing terminal through wireless Bluetooth; zeroing the position data while measuring the first position;
and S4, moving the portal frame or the workbench, and recording the generated position data.
And S5, inputting the acquired data to a data processing end, and adjusting related parameters of a machine tool control system according to a calculation result to correct the synchronism error.
And S6, repeating S4-S5 until the measured synchronization error is smaller than a set threshold value.
In the scheme, the movement direction of the reference shaft is X1; the motion direction of the measured shaft is X2; the direction of the laser beam reflected by the pentaprism is Y; the Y direction is ensured to be vertical to the X1 direction through a pentaprism; the structure and the principle of the pentaprism ensure that the perpendicularity between the emergent laser beam and the incident laser beam is hardly influenced by the change of the incident angle of the laser beam caused by the change of the posture of the pentaprism; a small circular reflecting mirror for indicating and adjusting the position and the angle of the incident laser beam is designed in front of the incidence surface of the pentaprism, so that the micro verticality deviation caused by the surface shape error of the pentaprism is further reduced.
When the guide rails on the two sides of the gantry structure generate torsion due to asynchronism, the laser beams reflected to the Y direction through the pentaprism on the reference shaft change (relative to an initial measuring point or other reference measuring points) when being reflected to the PSD sensor; that is, when the gantry or the workbench twists on the guide rail, the Y direction is still perpendicular to the measured axis X2, but a front-back position deviation is generated between one side of the measured axis of the gantry or the workbench and one side of the reference axis in the movement direction of the gantry or the workbench, the deviation is a synchronization error between the two sides, the reading on the PSD sensor is Δ X, and the reading Δ X of the PSD sensor is a synchronization error of the measurement point.
When the number of the guide rails is larger than two, after one shaft is selected as a reference shaft, multi-shaft synchronism error measurement is completed by adding a pentaprism, a PSD sensor and other measurement units.
In summary, the synchronization measurement scheme of the door-moving machine tool in this embodiment is suitable for most of machines with a table-moving type, a gantry-moving type, or a similar structure, and can implement long-distance and long-span guide rail synchronization measurement and error compensation, and the operation steps are simple, and error data can be directly expressed by position conversion of the PSD sensor, so that the synchronization measurement scheme is clear at a glance.
Compared with the traditional method for drawing the table, the method has higher precision and simpler operation, and compared with a double-interferometer method, the method is easier to operate and has a certain improvement on precision; meanwhile, after the reference shaft is determined, the measuring scheme can realize the synchronous measurement of three or more guide rails by only adding a measuring unit.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.

Claims (5)

1. A device for measuring the synchronism of a movement mechanism comprises a laser transmitter, a pentaprism, a PSD sensor and a data processing terminal; the device is characterized in that the laser transmitter is fixedly arranged at one end of the reference shaft and can adjust the laser beam to be parallel to the reference shaft, and the laser beam is a reference standard for measurement; the pentaprism is arranged on the movable workbench or the movable portal frame, and the installation position of the pentaprism is as close as possible to the reference shaft and is used for transmitting the reference datum; the PSD sensor is arranged on the movable workbench or the movable portal frame, is close to the measured shaft, and is used for receiving the laser beam and outputting data of relative displacement variation.
2. The measuring method of a kinematic mechanism synchronism measuring device according to claim 1, characterized by comprising the steps of:
s1, erecting a laser transmitter on a lathe bed or an external tripod at one end of a reference shaft, setting two measurement reference points at the moving near end and far end of the reference shaft, and adjusting an adjusting knob of the laser transmitter to enable data of a PSD sensor at the two reference points to tend to be consistent so as to realize that laser is parallel to the reference shaft; after the step is finished, a reference datum for measurement is determined, and a laser transmitter needs to be kept fixed;
s2, installing a pentaprism at a position, close to the reference axis, of the workbench or the portal frame, and enabling the laser beam to deflect 90 degrees and shoot towards the measured axis; during measurement, the pentaprism moves along with the workbench or the portal frame;
s3, mounting the PSD sensor on a position, close to a measured shaft, on the workbench or the portal frame, and adjusting the position of the PSD sensor to enable a laser beam to enter the approximate center position of the PSD sensor; at the moment, the PSD sensor can measure the accurate position of the laser beam on the sensor and transmit data to the data processing terminal through wireless Bluetooth; zeroing the position data while measuring the first position;
s4, moving the portal frame or the workbench, and recording the generated position data;
s5, inputting the acquired data to a data processing end, and adjusting relevant parameters of a motor control system for driving the workbench or the portal frame according to a calculation result to correct the synchronization error;
and S6, repeating S4-S5 until the measured synchronism error is smaller than a set threshold value.
3. The measuring method of a device for measuring the synchronism of a moving mechanism according to claim 2, wherein the moving direction of the reference axis is X1; the motion direction of the measured shaft is X2; the direction of the laser beam reflected by the pentaprism is Y; the Y direction is ensured to be vertical to the X1 direction through a pentaprism; a small circular reflecting mirror for indicating and adjusting the position and the angle of the incident laser beam is designed in front of the incidence surface of the pentaprism.
4. The method as claimed in claim 2, wherein when the gantry structure is not synchronized at the two side rails, the laser beam refracted to the Y direction by the pentaprism on the reference axis changes its position on the PSD sensor; at this time, the reading Δ x of the PSD sensor is the synchronization error of the measurement point.
5. The method as claimed in claim 2, wherein when the number of the guide rails is larger than two, the multi-axis synchronization error measurement is performed by adding a pentaprism and a PSD sensor after selecting one axis as a reference axis.
CN202211497498.8A 2022-11-25 2022-11-25 Motion mechanism synchronism measuring device and measuring method thereof Active CN115752239B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116276815A (en) * 2023-05-17 2023-06-23 成都飞机工业(集团)有限责任公司 Tool and method for adjusting parallelism and seam of guide rail
CN117782543A (en) * 2024-02-27 2024-03-29 杭州光尺科技有限公司 Beam reference transmission device and method thereof

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006245174A (en) * 2005-03-02 2006-09-14 Dainippon Printing Co Ltd Positioning stage, pattern forming equipment, inspection device, position correction method, substrate supporting part
CN102661700A (en) * 2012-03-22 2012-09-12 江苏扬力数控机床有限公司 Detection apparatus of long stroke leading screw installation precision and application method thereof
CN205262397U (en) * 2015-11-23 2016-05-25 东莞市龙天仪器设备有限公司 Planer -type automatic measure machine
CN105987674A (en) * 2016-06-28 2016-10-05 天津大学 Method and device for Z-axis perpendicularity error measurement based on image measurement
CN110230999A (en) * 2019-05-27 2019-09-13 西安交通大学 A kind of linear motion system five degree of freedom error synchronous measuring apparatus and method
CN110253308A (en) * 2019-07-23 2019-09-20 广东工业大学 A kind of double lathes and method for driving movement warp in compensation gantry
CN114473631A (en) * 2022-01-19 2022-05-13 成都飞机工业(集团)有限责任公司 Gantry synchronous adjustment method for double-drive system
CN216543301U (en) * 2021-12-16 2022-05-17 萨驰智能装备股份有限公司 Movable double-cross-beam mechanism and gantry robot
CN115268373A (en) * 2022-07-08 2022-11-01 珠海格力电器股份有限公司 Double-shaft synchronous control method, control device and synchronous motion device
CN217780562U (en) * 2022-08-02 2022-11-11 南通通海港口有限公司 Walking positioning device of container gantry crane

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006245174A (en) * 2005-03-02 2006-09-14 Dainippon Printing Co Ltd Positioning stage, pattern forming equipment, inspection device, position correction method, substrate supporting part
CN102661700A (en) * 2012-03-22 2012-09-12 江苏扬力数控机床有限公司 Detection apparatus of long stroke leading screw installation precision and application method thereof
CN205262397U (en) * 2015-11-23 2016-05-25 东莞市龙天仪器设备有限公司 Planer -type automatic measure machine
CN105987674A (en) * 2016-06-28 2016-10-05 天津大学 Method and device for Z-axis perpendicularity error measurement based on image measurement
CN110230999A (en) * 2019-05-27 2019-09-13 西安交通大学 A kind of linear motion system five degree of freedom error synchronous measuring apparatus and method
CN110253308A (en) * 2019-07-23 2019-09-20 广东工业大学 A kind of double lathes and method for driving movement warp in compensation gantry
CN216543301U (en) * 2021-12-16 2022-05-17 萨驰智能装备股份有限公司 Movable double-cross-beam mechanism and gantry robot
CN114473631A (en) * 2022-01-19 2022-05-13 成都飞机工业(集团)有限责任公司 Gantry synchronous adjustment method for double-drive system
CN115268373A (en) * 2022-07-08 2022-11-01 珠海格力电器股份有限公司 Double-shaft synchronous control method, control device and synchronous motion device
CN217780562U (en) * 2022-08-02 2022-11-11 南通通海港口有限公司 Walking positioning device of container gantry crane

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116276815A (en) * 2023-05-17 2023-06-23 成都飞机工业(集团)有限责任公司 Tool and method for adjusting parallelism and seam of guide rail
CN116276815B (en) * 2023-05-17 2023-09-29 成都飞机工业(集团)有限责任公司 Tool and method for adjusting parallelism and seam of guide rail
CN117782543A (en) * 2024-02-27 2024-03-29 杭州光尺科技有限公司 Beam reference transmission device and method thereof
CN117782543B (en) * 2024-02-27 2024-05-14 杭州光尺科技有限公司 Beam reference transmission device and method thereof

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