CN210877975U - High-precision eutectic welding equipment capable of keeping pressing force constant - Google Patents

Abstract

The utility model discloses a high-precision eutectic welding device capable of keeping constant pressing force, which comprises an eutectic welding table for supporting and fixing a workpiece A, an XY-axis driving unit for driving the eutectic welding table to move in a horizontal plane, a Z-axis driving unit for driving the eutectic welding table to finely adjust on a Z axis, a pressing head component which is rotatably arranged on a first support and presses a workpiece B, a pressure sensor component which is rotatably arranged on a second support and applies pressure to the pressing head component, and a servo driving piece for driving the pressure sensor component to rotate, wherein the pressure sensor component and the Z-axis driving unit are in closed-loop control, when the pressure data of the pressure sensor assembly is smaller than a set value, the Z-axis driving unit drives the eutectic welding table to move upwards until the data collected by the pressure sensor assembly is within a set range. The utility model discloses packing force that can be effectual between the guarantee eutectic bonding chip is invariable, improves welding quality.

Description

High-precision eutectic welding equipment capable of keeping pressing force constant

[ technical field ] A method for producing a semiconductor device

The utility model belongs to the technical field of the eutectic bonding, especially, relate to a can keep invariable high accuracy eutectic bonding equipment of packing force.

[ background of the invention ]

Eutectic welding, also known as low melting point alloy welding, has the essential characteristic that two different metals can be alloyed in a certain weight ratio at temperatures well below their respective melting points. Most commonly such as gold-silicon eutectic bonding. The melting point of gold is 1063 degrees c and the melting point of silicon is 1414 degrees c. If combined in proportions of 2.85% and 97.15% si/au, a eutectic alloy body with a melting point of 363 c is formed. This is the theoretical basis for eutectic bonding of gold and silicon. Gold silicon eutectic soldering is commonly used for soldering of circuit boards. Many electronic components are sensitive to temperature, and with the increasingly miniaturized design of electronic chips, the precision requirements for eutectic soldering are also increasingly strict.

In the welding process, because the volume change can take place along with the change of temperature in the plating layer on bottom sheet surface layer, becomes liquid melt from solid-state, at this in-process, must take place slight dislocation between two chips, if correct this dislocation or avoid this dislocation emergence in welding process, then can seriously influence final welding quality, produce badly.

In eutectic bonding, two chips need to be attached, and due to many circuit designs in the chips, the requirement on the accuracy of the positions where the two chips are attached is very high, whereas in the prior art, for example, CN201210179151.9 discloses an LED chip eutectic bonding device, which cannot ensure the stability of the positions of two components to be bonded in the bonding process.

Therefore, it is necessary to provide a new high-precision eutectic bonding apparatus capable of keeping the pressing force constant to solve the above-mentioned problems.

[ Utility model ] content

The utility model discloses a main aim at provides a can keep the invariable high accuracy eutectic welding equipment of packing force, packing force that can effectual guarantee eutectic welding between the chip is invariable, improves welding quality.

The utility model discloses a following technical scheme realizes above-mentioned purpose: a high-precision eutectic welding device capable of keeping constant pressing force comprises a eutectic welding table for supporting and fixing a workpiece A, an XY-axis driving unit for driving the eutectic welding table to move in a horizontal plane, a Z-axis driving unit for driving the eutectic welding table to perform fine adjustment on a Z axis, a pressing head assembly rotatably arranged on a first support and used for pressing a workpiece B, a pressure sensor assembly rotatably arranged on a second support and used for applying pressure to the pressing head assembly, and a servo driving piece for driving the pressure sensor assembly to rotate, wherein the pressure sensor assembly and the Z-axis driving unit are controlled in a closed loop manner, when the pressure data of the pressure sensor assembly is smaller than a set value, the Z-axis driving unit drives the eutectic welding table to move upwards until the data collected by the pressure sensor assembly is within a set range.

The device further comprises a support, a visual positioning system which is arranged on the support and can move horizontally, and a rotary driving mechanism which is arranged on the Z-axis driving unit and is driven by the Z-axis driving unit to move up and down, wherein the eutectic welding table is arranged at the rotating end of the rotary driving mechanism and is driven by the rotary driving mechanism to rotate, and the XY-axis driving unit and the rotary driving mechanism drive the eutectic welding table to realize the position adjustment of the workpiece A according to the position pictures of the workpiece A and the workpiece B acquired by the visual positioning system.

Further, the first support and the second support are coaxially arranged and are both positioned below the visual positioning system;

a first mounting seat is arranged at the rotating end of the servo driving piece, the first mounting seat is rotatably erected on the second support, and the pressure sensor assembly is arranged on the first mounting seat;

the rotary shaft is rotatably erected on the first support, a second mounting seat is fixedly arranged on the rotary shaft, the pressing head assembly is arranged on the second mounting seat, and a reset elastic piece is arranged between the first mounting seat and the second mounting seat.

Furthermore, the compressing head assembly comprises a pressing rod, and an adsorption hole for adsorbing the workpiece B is formed in the bottom of the pressing rod.

Furthermore, the device also comprises a first angle limiting and fine-adjusting unit for limiting the pressing head assembly to turn to a horizontal position and a second angle limiting and fine-adjusting unit for limiting the pressing head assembly to turn to a vertical position.

Furthermore, the vision positioning system comprises a linear motor, a movable plate driven by the linear motor to perform horizontal linear motion, and a photographing device fixed on the movable plate to photograph the workpiece A and the workpiece B.

Further, the eutectic welding platform comprises a bottom plate, supporting plates arranged on two sides of the bottom plate, transverse supporting plates erected between the two supporting plates, a supporting frame hung below the transverse supporting plates, a containing shell embedded and fixedly arranged in the transverse supporting plates, a supporting seat arranged on the supporting frame and extending into the containing shell, a cooling box block arranged on the supporting seat and located in the containing shell in an overhead mode, a ceramic heating plate arranged on the cooling box block, and a cover plate covering the containing shell and provided with a welding window.

Furthermore, the ceramic heating plate is provided with an adsorption hole which penetrates through the cooling box block and the ceramic heating plate and is used for adsorbing a workpiece A.

Furthermore, side wing supporting plates are further arranged between the two supporting plates and located on two sides of the transverse supporting plate, a first carrier for loading a plurality of workpieces A and a second carrier for loading a plurality of workpieces B are arranged on the side wing supporting plate on the left side, and a third carrier for loading a mounted finished product is arranged on the side wing supporting plate on the right side.

The welding machine further comprises a feeding and discharging adsorption unit for feeding the workpiece A and integrally discharging the welded workpiece A and the welded workpiece B, wherein the feeding and discharging adsorption unit comprises a first air cylinder, a second air cylinder driven by the first air cylinder to move up and down and a suction nozzle driven by the second air cylinder to move up and down.

Compared with the prior art, the utility model relates to a can keep invariable high accuracy eutectic welding equipment of packing force's beneficial effect lies in: the pressing acting force of the pressing head assembly on the workpiece B is monitored in real time through the pressure sensor assembly, pressure compensation is achieved by matching with a Z-axis driving unit controlled by closing of the pressure sensor assembly, the constant pressure of the workpiece A and the workpiece B is guaranteed, and therefore the eutectic welding precision and the welding quality are greatly improved.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a hold-down head assembly, a pressure sensor assembly and a vision positioning system according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of the assembly of the pressing head, the assembly of the pressure sensor and the servo driving member according to the embodiment of the present invention;

fig. 4 is a schematic structural view of the pressing head assembly and the pressure sensor assembly according to the embodiment of the present invention;

fig. 5 is a schematic structural view of a second angle limiting fine adjustment unit in the embodiment of the present invention;

fig. 6 is a schematic structural diagram of a visual positioning system according to an embodiment of the present invention;

fig. 7 is a schematic structural view of a photographing device according to an embodiment of the present invention;

fig. 8 is a schematic structural view of a loading and unloading adsorption unit in an embodiment of the present invention;

FIG. 9 is a schematic structural view of a eutectic soldering station in an embodiment of the present invention;

FIG. 10 is a schematic view of a partial structure of a eutectic soldering station according to an embodiment of the present invention;

fig. 11 is a second schematic view of a partial structure of a eutectic soldering station according to an embodiment of the present invention;

fig. 12 is a third schematic view of a partial structure of a eutectic soldering station according to an embodiment of the present invention;

the figures in the drawings represent:

100 high-precision eutectic welding equipment capable of keeping the pressing force constant;

1 eutectic welding table, 11 bottom plates, 12 supporting plates, 13 transverse supporting plates, 14 supporting frames, 15 containing shells, 16 supporting seats, 17 cooling box blocks, 171 cooling pipes, 18 ceramic heating plates, 19 welding windows, 116 cover plates, 117 cavities, 118 protective gas blowing devices, 1181 fixing blocks, 1182 blowing pipes, 119 adsorption holes, 120 side wing supporting plates, 121 first carriers, 122 second carriers and 123 third carriers;

a 2XY axis drive unit;

a 3Z-axis drive unit;

4, a first support, a 41 rotating shaft, a 42 second mounting seat, a 43 resetting elastic piece, a 44 fine adjustment component and a 45 abutting against the roller;

5, a pressing head assembly, a 51 pressing rod, a 52 first angle limiting fine adjustment unit, a 521 support, a 522 limiting support rod, a 53 second angle limiting fine adjustment unit, a 531 fixing seat, a 532 accommodating block, a 533 jacking block, a 534 adjusting screw rod and a 535 jacking ball;

6 a second support; 7 a pressure sensor assembly; 8 servo drive, 81 first mount; 9, a bracket;

10 visual positioning system, 101 linear motor, 102 movable plate, 103 photographing device, 104 mounting block, 105 first lens barrel, 106 second lens barrel, 107 first camera, 108 second camera, 109 first light source, 110 second light source, 111 first beam splitter, 112 reflector, 113 second beam splitter, 114 third beam splitter, 115 fourth beam splitter;

20 feeding and discharging adsorption units, 201 a first cylinder, 202 a second cylinder and 203 suction nozzles;

30 rotating the drive mechanism.

[ detailed description ] embodiments

Example (b):

referring to fig. 1-12, the present embodiment is a high precision eutectic bonding apparatus 100 capable of maintaining a constant clamping force, the device comprises a eutectic welding table 1 for supporting and fixing a workpiece A, an XY axis driving unit 2 for driving the eutectic welding table 1 to move in a horizontal plane, a Z axis driving unit 3 for driving the eutectic welding table 1 to perform fine adjustment on a Z axis, a pressing head component 5 which is rotatably arranged on a first support 4 and presses the workpiece B, a pressure sensor component 7 which is rotatably arranged on a second support 6 and applies pressure to the pressing head component 5, and a servo driving piece 8 for driving the pressure sensor component 7 to rotate, wherein the pressure sensor component 7 and the Z axis driving unit 3 are controlled in a closed loop manner, when the pressure data of the pressure sensor assembly 7 is smaller than a set value, the Z-axis driving unit 3 drives the eutectic welding table 1 to slightly move upwards until the data collected by the pressure sensor assembly 7 is within a set range.

The embodiment monitors the pressing acting force of the pressing head assembly 5 on the workpiece B in real time through the pressure sensor assembly 7, and the Z-axis driving unit 3 controlled by closing the pressure sensor assembly 7 is matched to realize pressure compensation, so that the pressure constancy of the workpiece A and the workpiece B is guaranteed, and the eutectic welding precision and the welding quality are greatly improved.

The embodiment further includes a bracket 9, a vision positioning system 10 disposed on the bracket 9 and capable of moving horizontally, and a loading/unloading adsorption unit 20.

The eutectic soldering station further comprises a rotary driving mechanism 30 which is arranged on the Z-axis driving unit 3 and driven by the Z-axis driving unit 3 to move up and down, and the eutectic soldering station 1 is arranged at the rotating end of the rotary driving mechanism 30 and driven by the rotary driving mechanism 30 to rotate.

The first support 4 and the second support 6 are coaxially arranged and are both located below the visual positioning system 10. The servo driving part 8 is fixed on the support 9, a first mounting seat 81 is arranged at the rotating end of the servo driving part 8, the first mounting seat 81 is rotatably erected on the second support 6, and the pressure sensor assembly 7 is arranged on the first mounting seat 81. A rotating shaft 41 is rotatably erected on the first support 4, a second mounting seat 42 is fixedly arranged on the rotating shaft 41, the pressing head assembly 5 is arranged on the second mounting seat 42, and a reset elastic part 43 is arranged between the first mounting seat 81 and the second mounting seat 42. The return elastic element 43 is mainly used for rapidly pulling the first support 4 back to the vertical state when the servo driving element 8 drives the second support 6 to rotate to the vertical state. The surface of the second mounting seat 42 facing the first mounting seat 81 is provided with a supporting roller 45, and the pressure sensor assembly 7 supports the supporting roller 45.

The second mounting seat 42 is provided with a fine adjustment assembly 44 for fine adjustment of the height of the compression head assembly 5. The pressing head assembly 5 comprises a pressing rod 51, and the bottom of the pressing rod 51 is provided with an adsorption hole (not marked in the figure) for adsorbing the workpiece B. The embodiment further comprises a first angle limit fine-adjustment unit 52 for limiting the overturning of the compaction head assembly 5 to the horizontal position, and a second angle limit fine-adjustment unit 53 for limiting the overturning of the compaction head assembly 5 to the vertical position. The first angle limiting fine adjustment unit 52 comprises a support 521 and a limiting strut 522 which is arranged on the support 521 through a threaded connection and can move up and down. The second angle limiting fine adjustment unit 53 includes a fixing base 531, a receiving block 532 fixedly disposed on the fixing base 531, a top block 533 disposed in the receiving block 532 and capable of moving up and down, and an adjusting screw 534 disposed on the fixing base 531 and horizontally through a threaded connection, wherein a top holding ball 535 is disposed on an upper portion of the top block 533, and an inclined surface (not shown) is disposed on a lower portion of the top block 533. The other end of the adjusting screw 534 abuts against the inclined surface, and the vertical fine adjustment movement of the top block 533 is realized by the horizontal movement of the adjusting screw 534. The first angle limiting and fine-tuning unit 52 can effectively ensure that the pressing head assembly 5 keeps a horizontal state, and the second angle limiting and fine-tuning unit 53 can effectively ensure that the pressing head assembly 5 keeps a vertical state, so that on one hand, a guarantee measure is provided for keeping the acting force of the pressing head assembly 5 for pressing a product to be vertical, and the precision and the uniformity of the acting force are improved; on the other hand, the accuracy of the workpiece B in the vertical position can be guaranteed after the workpiece B is adsorbed, the position accuracy guarantee is provided for the visual positioning system 10 to perform visual photographing and positioning, and a precondition basis is provided for the subsequent correct position adjustment of the workpiece a.

The visual positioning system 10 includes a linear motor 101, a movable plate 102 driven by the linear motor 101 to perform a horizontal linear motion, and a photographing device 103 fixed on the movable plate 102. The photographing device 103 includes a mounting block 104 fixed on the movable plate 102 and having a hollow interior, a first barrel 105 fixed on the mounting block 104 and vertically disposed, a second barrel 106 fixed on the mounting block 104 and horizontally disposed, a first camera 107 fixed on the mounting block 104 and coaxially disposed with the first barrel 105, a second camera 108 fixed on the mounting block 104 and parallel disposed with the first camera 107, a first light source 109 disposed on an upper portion of the first barrel 105, a second light source 110 disposed on the second barrel 106 and close to the mounting block 104, and a plurality of optical lenses, wherein the optical lenses include a first beam splitter 111 located below the first camera 107, a reflecting mirror 112 located below the second camera 108 and horizontally collinear with the first beam splitter 111, a second beam splitter 113 located below the first beam splitter 111 and vertically collinear with the first beam splitter 111, a third beam splitter 114 horizontally disposed with the second beam splitter 113 and horizontally collinear with the second light source 110, A fourth beam splitter 115 located below the second beam splitter 113 and disposed vertically in line with the second beam splitter 113 and horizontally in line with the first light source 109.

The center of the second beam splitter 113 is located at the intersection of the axes of the first barrel 105 and the second barrel 106.

The axis of the first lens barrel 105, the axis of the second lens barrel 106 and the turning track route of the pressure rod 51 are located in the same vertical plane, so that the accuracy of acquiring pictures of the workpieces A and B is guaranteed, the accuracy of sucking the workpieces B and pressing the workpieces B is also guaranteed, and conditions and guarantee bases are provided for realizing high-precision welding.

By turning on the first light source 109, the first camera 107 and the second camera 108 can both obtain a picture of the position of the workpiece a located under the first lens barrel 105; by turning on the second light source 110, the first camera 107 and the second camera can also acquire the position picture of the workpiece B located in the axial direction of the first lens barrel 105, so that by switching the turning on of the first light source 109 and the second light source 110, the acquisition of the position pictures of the workpiece a and the workpiece B by the same camera can be realized, and a realization adjustment basis is provided for adjusting the position of the workpiece a by taking the position of the workpiece B as a reference. Specifically, after the first light source 109 is turned on, light of the first light source 109 is reflected to the surface of the workpiece a through the fourth beam splitter 115, the workpiece a is illuminated and imaged, and the image is acquired by the second camera 108 through the fourth beam splitter 115, the second beam splitter 113, the first beam splitter 111 and the reflector 112; the first light source 109 is turned off, the second light source 110 is turned on, light of the second light source 109 is reflected to the surface of the workpiece B through the third beam splitter 114, the workpiece B is illuminated and imaged, and the image is acquired by the second camera 108 through the third beam splitter 114, the second beam splitter 113, the first beam splitter 111 and the reflector 112.

In this embodiment, the focal length of the first camera 107 is smaller than that of the second camera 108, for example, the focal length of the first camera 107 is 1 times, and the focal length of the second camera 108 is 3 times. The first camera 107 is mainly used for grabbing the position of a single workpiece in the workpiece carrier tray, so that the eutectic soldering station 1 can move the corresponding workpiece to be grabbed to the upper blanking adsorption unit 20 or the right below the pressing head assembly 5 through movement to realize the adsorption of the workpiece. The second camera 108 is mainly used for acquiring global position pictures of a workpiece a on the eutectic welding table 1 and a workpiece B on the pressing head assembly 5, and guiding the driving of the XY-axis driving unit 2, the Z-axis driving unit 3 and the rotary driving mechanism 30 through the overlapping of picture positions and the comparison and calculation of characteristic points, so that the position adjustment of the workpiece a is realized, and the workpiece a and the workpiece B can be accurately attached.

Through setting up vision positioning system 10, cooperation eutectic welding platform 1 adsorbs work piece A keeps the horizontality, and hold down the head subassembly 5 and adsorb work piece B and keep the vertical state, and through same high power second camera 108, the position image that work piece A and work piece B were realized to two lens barrels and two light sources that set up perpendicularly acquires, need not to remove the camera, the effectual camera that has avoided removes the in-process because the kinematic error that driving piece back clearance produced leads to the inaccuracy that the image acquireed, at this in-process, work piece B is motionless, only need remove work piece A, the degree of accuracy of fine setting has been improved greatly.

The eutectic welding table 1 comprises a bottom plate 11, support plates 12 arranged on two sides of the bottom plate 11, a transverse support plate 13 erected between the two support plates 12, a support frame 14 hung below the transverse support plate 13, a storage shell 15 embedded and fixedly arranged in the transverse support plate 13, a support seat 16 arranged on the support frame 14 and extending into the storage shell 15, a cooling box block 17 arranged on the support seat 16 and located in the storage shell 15 in an overhead mode, a ceramic heating plate 18 located on the cooling box block 17, and a cover plate 116 covering the storage shell 15 and provided with a welding window 19. The support base 16 comprises four support columns providing support planes, and support force is provided by surface contact of the support columns, so that the contact area is greatly reduced, and heat transfer is reduced.

The cover 116 and the receiving housing 15 form a cavity 117, and the cooling box 17 and the ceramic heating plate 18 are located in the cavity 117. The present embodiment further includes a shielding gas blowing device 118 for blowing shielding gas into the cavity 117, and an adsorption hole 119 for adsorbing a workpiece, which penetrates the cooling block 17 and the ceramic heating plate 18.

A gap is left between the cover plate 116 and the ceramic heating plate 18, so that heat of the ceramic heating plate 18 is prevented from being directly conducted to the cover plate 116.

The protective gas blowing device 118 is provided with two groups of gas blowing devices which are respectively positioned at two sides of the ceramic heating plate 18 and comprise a fixing block 1181 arranged on the supporting frame 14 and a gas blowing pipe 1182 arranged on the fixing block 1181 and extending into the cavity 117, wherein the gas blowing pipe 1182 is connected with a nitrogen gas source. By blowing the nitrogen protective gas into the peripheral environment of the welding of the workpiece A and the workpiece B, the phenomenon that the welding quality is affected by oxide formed by the reaction of metal and H or O in the air in the welding process is effectively prevented, and the welding quality is improved.

The cooling box block 17 is of a hollow structure, and a plurality of radiating fins are arranged inside the cooling box block, so that the radiating efficiency is improved. The both ends of cooling box block 17 are loudspeaker formula structure and are connected with cooling tube 171, and cooling tube 171 connects an air supply, carries out quick cooling to ceramic heating plate 18 through blowing in compressed air. Through setting up loudspeaker open type structure, avoided the inside dead angle that appears of cooling tank block 17, still avoided appearing the vortex phenomenon in cooling tank block 17 inside and influenced the cooling effect.

The surface of the cooling box block 17 is provided with a heat-conducting coating or pasted with a heat-conducting sticker, so that the heat dissipation effect is improved.

Lateral wing support plates 120 are further arranged between the two support plates 12 and located on two sides of the transverse support plate 13, a first carrier 121 for loading a plurality of workpieces A and a second carrier 122 for loading a plurality of workpieces B are arranged on the lateral wing support plate 120 on the left side, and a third carrier 123 for loading mounted finished products is arranged on the lateral wing support plate 120 on the right side.

In the eutectic welding table 1 provided by the embodiment, the ceramic heating plate 18 is rapidly cooled by the cooling box block 17, so that the welding efficiency is greatly improved; and the cooling box block 17 and the ceramic heating plate 18 are integrally suspended from other structures, so that direct contact is not generated, and the problem that the precision is influenced due to the fact that the supporting structure is deformed because heat generated by the ceramic heating plate 18 is transferred to the peripheral supporting structure is effectively avoided. Specifically, in this embodiment, ceramic heating plate 18 and cooling box block 17 are unsettled and set up in storage shell 15, do not have direct contact with storage shell 15, consequently, the heat can not directly transmit to storage shell 15 in, also can not transmit to bottom plate 11, has realized fine thermal-insulated effect to support structure's stability has been ensured, workpiece A adjustment driven precision has been ensured.

The Z-axis driving unit 3 may be a driving structure capable of realizing Z-axis movement in the prior art. Preferably, the Z-axis driving unit 3 in this embodiment includes a servo motor, a wedge driven by the servo motor to move horizontally, a moving block matching with the wedge to move up and down, and a moving plate disposed on the moving block, and the rotation driving mechanism 30 is disposed on the moving plate to move up and down.

The loading and unloading adsorption unit 20 includes a first cylinder 201 fixed to the support 9, a second cylinder 202 driven by the first cylinder 201 to move up and down, and a suction nozzle 203 driven by the second cylinder 202 to move up and down. Through setting up two and drive actuating cylinder from top to bottom, realize work piece A material loading, the holistic unloading of work piece A and work piece B that the welding is good respectively.

The working principle of the high-precision eutectic welding equipment 100 capable of keeping the pressing force constant in the embodiment is as follows:

1) the XY-axis driving unit 2 drives the eutectic welding table 1 to enable a workpiece A to be grabbed in the first carrier 121 to be located below the first lens barrel 105, the first light source 109 is turned on, the first camera 107 shoots to obtain the position of the workpiece A, and then the XY-axis driving unit 2 is guided to drive the eutectic welding table 1 to move to enable the workpiece A to move below the upper blanking adsorption unit 20;

2) the suction nozzle 203 is driven by the first cylinder 201 to descend and suck the workpiece A and then ascend, then the XY axis driving unit 2 drives the eutectic welding table 1 to enable the adsorption hole 119 in the ceramic heating plate 18 on the eutectic welding table 1 to be aligned with the workpiece A, the first cylinder 201 is driven to descend, and the workpiece A is placed on the ceramic heating plate 18 and adsorbed by the adsorption hole 119;

3) the XY-axis driving unit 2 drives the eutectic soldering station 1, so that a workpiece B to be grabbed in the first carrier 121 is located below the first lens barrel 105, the first light source 109 is turned on, the first camera 107 shoots to obtain the position of the workpiece B, and then the XY-axis driving unit 2 is guided to drive the eutectic soldering station 1 to move, so that the workpiece B moves to the position of the pressing head assembly 5, and at the moment, in order to provide a space for the overturning motion of the pressing head assembly 5, the vision positioning system 10 moves horizontally under the driving of the linear motor 101 to realize abdicating; the servo driving piece 8 drives the pressure sensor assembly 7 to turn over, meanwhile, the compression head assembly 5 is pushed to turn over downwards, the vertical position is turned over to the horizontal position, and the workpiece B is adsorbed through the compression bar 51;

4) the servo driving piece 8 drives the pressure sensor assembly 7 to rotate, so that the pressure sensor assembly 7 is turned to a vertical position, meanwhile, the pressing head assembly 5 is pulled to turn to the vertical position, and at the moment, the workpiece B is adsorbed to the photographing area of the second lens barrel 106;

5) the XY-axis drive unit 2 drives the eutectic bonding stage 1 so that the workpiece a is positioned below the first barrel 105;

6) starting the second light source 110, and acquiring an image of the workpiece B at the vertical position through the second lens barrel 106 by the second camera 108; turning off the second light source 110, starting the first light source 109, and acquiring an image of the workpiece a at the horizontal position through the first lens barrel 105 by the second camera 108;

7) the two images are compared through software processing, and the rotation driving mechanism 30 is guided to drive the eutectic welding table 1 to enable the placing angle of the workpiece A to be consistent with that of the workpiece B; then, the XY-axis driving unit 2 is guided to drive the eutectic welding table 1 to perform fine adjustment in the X-axis and Y-axis directions, so that the workpiece B can be completely and accurately attached to the workpiece A after being turned into a horizontal state, in the process, the second camera 108 can dynamically acquire a position image of the workpiece A, and the fine adjustment of the position of the workpiece A is stopped until the superposition of the two images meets a set error range;

8) after the position of the workpiece A is adjusted, the servo driving piece 8 drives the pressure sensor assembly 7 to press downwards, at the moment, the pressure rod 51 adsorbs the workpiece B to be pressed with the workpiece A and tightly presses the workpiece B, and the pressure on the workpiece B is monitored in real time through the pressure sensor assembly 7;

9) the ceramic heating plate 18 is started to heat, the plating layer on the surface of the workpiece A is welded with the workpiece B after being melted, at the moment, compressed air is introduced into the cooling box block 17 to rapidly cool the ceramic heating plate 18, and the co-melting solidification efficiency shown by the welding of the workpiece A and the workpiece B is accelerated, so that the speed of co-melting welding is improved; in the process, the melting of the plating layer can cause slight sinking of the workpiece B, the pressure value monitored by the pressure sensor assembly 7 can be reduced, at the moment, the pressure sensor assembly 7 uploads the data to the controller, the controller drives the eutectic welding table 1 to slightly ascend by controlling the Z-axis driving unit 3, and the eutectic welding table is controlled in a closed loop mode until the data collected by the pressure sensor assembly 7 reaches a set range; in the embodiment, the servo driving part 8 is not used for driving the pressure sensor assembly 7 to push the pressure rod 51 to press downwards slightly, which is mainly used for ensuring that the pressure of the pressure rod 51 on the workpiece B is always kept in the vertical direction, so that the stability and uniformity of the pressure applied to the workpiece B are ensured, and the angle dislocation between the workpiece A and the workpiece B is also effectively avoided;

10) after welding, the XY-axis driving unit 2 drives the eutectic soldering station 1 to move, so that the welded product is located below the feeding and discharging adsorption unit 20, the product is adsorbed by the feeding and discharging adsorption unit 20, the eutectic soldering station 1 moves, and the third carrier 123 moves to the position below the feeding and discharging adsorption unit 20 and places the product on the third carrier 123 to complete discharging.

What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.

Claims (10)

1. The utility model provides a can keep invariable high accuracy eutectic welding equipment of packing force which characterized in that: the device comprises a eutectic welding table for supporting and fixing a workpiece A, an XY-axis driving unit for driving the eutectic welding table to move in a horizontal plane, a Z-axis driving unit for driving the eutectic welding table to perform fine adjustment on a Z axis, a pressing head assembly which is rotatably arranged on a first support and presses a workpiece B, a pressure sensor assembly which is rotatably arranged on a second support and applies pressure to the pressing head assembly, and a servo driving piece for driving the pressure sensor assembly to rotate, wherein the pressure sensor assembly and the Z-axis driving unit are controlled in a closed loop mode, and when pressure data of the pressure sensor assembly is smaller than a set value, the Z-axis driving unit drives the eutectic welding table to move upwards until the data acquired by the pressure sensor assembly is within a set range.

2. A high precision eutectic bonding apparatus capable of maintaining a constant pressing force according to claim 1, wherein: the device comprises a Z-axis driving unit, a eutectic welding table, an XY-axis driving unit, a rotary driving mechanism and a visual positioning system, wherein the visual positioning system is arranged on the support and can move horizontally, the rotary driving mechanism is arranged on the Z-axis driving unit and is driven by the Z-axis driving unit to move up and down, the eutectic welding table is arranged at the rotating end of the rotary driving mechanism and is driven by the rotary driving mechanism to rotate, and the XY-axis driving unit and the rotary driving mechanism drive the eutectic welding table to realize position adjustment of a workpiece A according to position pictures of the workpiece A and the workpiece B acquired by the visual positioning system.

3. A high precision eutectic bonding apparatus capable of maintaining a constant pressing force according to claim 2, wherein: the first support and the second support are coaxially arranged and are both positioned below the visual positioning system;

a first mounting seat is arranged at the rotating end of the servo driving piece, the first mounting seat is rotatably erected on the second support, and the pressure sensor assembly is arranged on the first mounting seat;

the rotary shaft is rotatably erected on the first support, a second mounting seat is fixedly arranged on the rotary shaft, the pressing head assembly is arranged on the second mounting seat, and a reset elastic piece is arranged between the first mounting seat and the second mounting seat.

4. A high precision eutectic bonding apparatus capable of maintaining a constant pressing force according to claim 1, wherein: the compressing head assembly comprises a pressing rod, and an adsorption hole for adsorbing the workpiece B is formed in the bottom of the pressing rod.

5. A high precision eutectic bonding apparatus capable of maintaining a constant pressing force according to claim 1, wherein: the device also comprises a first angle limiting and fine-adjusting unit for limiting the pressing head assembly to turn to a horizontal position and a second angle limiting and fine-adjusting unit for limiting the pressing head assembly to turn to a vertical position.

6. A high precision eutectic bonding apparatus capable of maintaining a constant pressing force according to claim 2, wherein: the visual positioning system comprises a linear motor, a movable plate driven by the linear motor to perform horizontal linear motion, and a photographing device fixed on the movable plate and used for photographing a workpiece A and a workpiece B.

7. A high precision eutectic bonding apparatus capable of maintaining a constant pressing force according to claim 1, wherein: eutectic welding platform includes the bottom plate, sets up the backup pad of bottom plate both sides, erects two horizontal extension board between the backup pad, hang in braced frame, embedded fixed setting of horizontal extension board below are in accomodate the casing in the horizontal extension board, set up be in on the braced frame and stretch into to accomodate supporting seat in the casing, set up and put somebody's air on the supporting seat and be located accomodate the cooling box piece in the casing, be located ceramic heater board on the cooling box piece, lid are in accomodate casing top and seted up welding window's apron.

8. The high precision eutectic bonding apparatus capable of maintaining a constant pressing force according to claim 7, wherein: the ceramic heating plate is characterized by further comprising an adsorption hole which penetrates through the cooling box block and the ceramic heating plate and is used for adsorbing a workpiece A.

9. The high precision eutectic bonding apparatus capable of maintaining a constant pressing force according to claim 8, wherein: and side wing supporting plates are arranged between the two supporting plates and positioned on two sides of the transverse supporting plate, a first carrier for loading a plurality of workpieces A and a second carrier for loading a plurality of workpieces B are arranged on the side wing supporting plate on the left side, and a third carrier for loading a mounted finished product is arranged on the side wing supporting plate on the right side.

10. A high precision eutectic bonding apparatus capable of maintaining a constant pressing force according to claim 1, wherein: the automatic welding machine is characterized by further comprising a feeding and discharging adsorption unit for feeding the workpiece A and integrally discharging the welded workpiece A and the welded workpiece B, wherein the feeding and discharging adsorption unit comprises a first air cylinder, a second air cylinder driven by the first air cylinder to move up and down and a suction nozzle driven by the second air cylinder to move up and down.

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