CN110434417A - It is a kind of to be able to maintain the constant high-precision eutectic welding equipment of pressing force - Google Patents
It is a kind of to be able to maintain the constant high-precision eutectic welding equipment of pressing force Download PDFInfo
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- CN110434417A CN110434417A CN201910802417.2A CN201910802417A CN110434417A CN 110434417 A CN110434417 A CN 110434417A CN 201910802417 A CN201910802417 A CN 201910802417A CN 110434417 A CN110434417 A CN 110434417A
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- eutectic welding
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- pressing force
- pressure sensor
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- 238000003466 welding Methods 0.000 title claims abstract description 89
- 230000005496 eutectics Effects 0.000 title claims abstract description 77
- 238000003825 pressing Methods 0.000 title claims abstract description 30
- 230000006835 compression Effects 0.000 claims abstract description 27
- 238000007906 compression Methods 0.000 claims abstract description 27
- 239000000919 ceramic Substances 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 20
- 230000007246 mechanism Effects 0.000 claims description 14
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- 238000001816 cooling Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003181 co-melting Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 229910000743 fusible alloy Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
- B23K3/085—Cooling, heat sink or heat shielding means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Die Bonding (AREA)
Abstract
The constant high-precision eutectic welding equipment of pressing force is able to maintain the invention discloses a kind of, it includes the eutectic welding stage for supporting and fixing workpiece A, the XY axis driving unit for driving the eutectic welding stage to move in horizontal plane, the Z axis driving unit for driving the eutectic welding stage to be finely adjusted on Z axis, it is rotatably arranged on the first support and the compression head assembly of workpiece pressing B, it is rotatably arranged on the second support and stressed pressure sensor assembly is applied to the compression head assembly, and the servo-drive part of the driving pressure sensor assembly rotation, the pressure sensor assembly and the Z axis driving unit closed-loop control, when the pressure data of the pressure sensor assembly is less than setting value, the eutectic welding stage is driven to move upwards for the Z axis driving unit until the number that the pressure sensor assembly acquires According in setting range.The present invention can effectively ensure that the pressing force between eutectic core wire piece is constant, improve welding quality.
Description
[technical field]
The invention belongs to eutectic welding technology fields, weld more particularly to a kind of constant high-precision eutectic of pressing force that is able to maintain
Connect equipment.
[background technique]
Eutectic weldering is also known as low-melting alloy welding, and fundamental characteristics is that two different metals can be far below respective
Melting temperature under in constant weight ratio formed alloy.The most common such as gold-silicon eutectic welds.The fusing point of gold is 1063 Celsius
Degree, and the fusing point of silicon is 1414 degrees Celsius.If the silicon gold ratio in 2.85% and 97.15% combines, can form fusing point is
363 degrees Celsius of eutectic alloy body.Here it is the theoretical basis of gold silicon eutectic weldering.Gold silicon eutectic weldering is commonly used in the weldering of circuit board
It connects.Many electronic components are more sensitive to temperature, and with the gradually Miniaturization Design of electronic chip, to the essence of its eutectic welding
Degree requires also to be increasingly stringenter.
In the welding process, since with the variation of temperature volume change can occur for the plating layer on bottom sheet surface layer, by
Solid-state becomes liquid and melts state, in the process, slight dislocation must can occur between two chips, if not rectifying in the welding process
Just this misplaces or is avoided this dislocation to occur, then can seriously affect final welding quality, generates bad.
In eutectic weldering, need for two chips to be affixed, due to there is many routes to design in chip, the position essence being affixed
Degree requires to be very high, and in the prior art, sets as CN201210179151.9 discloses a kind of LED wafer eutectic welding
It is standby, it can not ensure the stabilization of the position of two elements to be welded in the welding process.
Accordingly, it is desirable to provide a kind of new is able to maintain the constant high-precision eutectic welding equipment of pressing force to solve above-mentioned ask
Topic.
[summary of the invention]
It is able to maintain the constant high-precision eutectic welding equipment of pressing force the main purpose of the present invention is to provide a kind of, it can be with
It is effective to ensure that the pressing force between eutectic core wire piece is constant, improve welding quality.
The present invention is achieved through the following technical solutions above-mentioned purpose: a kind of to be able to maintain the constant high-precision eutectic weldering of pressing force
Connect equipment comprising support and fix the eutectic welding stage of workpiece A, the XY axis that the driving eutectic welding stage moves in horizontal plane
Driving unit, is rotatably arranged on the first support at the Z axis driving unit for driving the eutectic welding stage to be finely adjusted on Z axis
Upper and the compressions head assembly of workpiece pressing B, be rotatably arranged on the second support and application to the compression head assembly
The pressure sensor assembly of pressure and the servo-drive part of the driving pressure sensor assembly rotation, the pressure sensing
Device assembly and the Z axis driving unit closed-loop control, when the pressure data of the pressure sensor assembly is less than setting value, institute
Stating Z axis driving unit drives the eutectic welding stage to move upwards until the data of pressure sensor assembly acquisition are located at setting
In range.
Further, further include bracket, setting on the bracket and horizontally movable vision positioning system, setting exist
The rotary drive mechanism to move up and down, the eutectic welding stage are driven on the Z axis driving unit by the Z axis driving unit
The round end of the rotary drive mechanism is set and is rotated by rotary drive mechanism driving, the XY axis drives
The position picture of workpiece A and workpiece B that moving cell, the rotary drive mechanism are got according to the vision positioning system drive
The eutectic welding stage, which is realized, adjusts the position of workpiece A.
Further, first support and second support are coaxially disposed and are respectively positioned on the vision positioning system
Lower section;
The round end of the servo-drive part is provided with one first mounting base, and first mounting base is rotatable to be erected at
On second support, the pressure sensor assembly is arranged in first mounting base;
It is rotatable on first support to be provided with a shaft, one second mounting base is fixedly installed in the shaft,
The compression head assembly is arranged in second mounting base, is provided between first mounting base and second mounting base
One return springs.
Further, the compression head assembly includes compression bar, and the bottom of the compression bar is provided with the absorption for adsorbing workpiece B
Hole.
It further, further include limiting the compression head assembly to overturn to the first angle limit fine tuning list of horizontal position
Member, the restriction head assembly that compresses are overturn to the second angle limit fine-adjusting unit of vertical position.
Further, the vision positioning system includes linear motor, is driven progress horizontal linear by the linear motor
The movable plate of movement is fixed on the camera arrangement taken pictures on the movable plate to workpiece A and workpiece B.
Further, the eutectic welding stage includes bottom plate, the support plate that the bottom plate two sides are arranged in, is erected at two institutes
It states the lateral supporting plate between support plate, the braced frame being suspended below the lateral supporting plate, embedded be fixed at the cross
Storage case into supporting plate, the support base for being arranged in the braced frame and stretching in the storage case, setting exist
On the support base and make somebody a mere figurehead the cooler bin block in the storage case, the ceramic heat on the cooler bin block
Plate, the cover board for covering above the storage case and offering welding window.
It further, further include running through the cooler bin block and the ceramic heating plate and the absorption for adsorbing workpiece A
Hole.
Further, the lateral supporting plate two sides are located between two support plates and are additionally provided with flank supporting plate, left side
The flank supporting plate on be provided with the first carrier for loading several workpiece A and load the second carrier of several workpiece B, right side
The third carrier for loading the finished goods mounted is provided on the flank supporting plate.
Further, further include realize workpiece A feeding and workpiece A after being welded and workpiece B Whole blanking upper
Blanking absorbing unit, the loading and unloading absorbing unit include the first cylinder, by first cylinder driving move up and down
Second cylinder is driven the suction nozzle to move up and down by second cylinder.
Compared with prior art, a kind of beneficial effect for being able to maintain the constant high-precision eutectic welding equipment of pressing force of the present invention
Fruit is: being monitored in real time by pressure sensor assembly and compresses head assembly to the clamping force of workpiece B, and cooperated and pass with pressure
The Z axis driving unit of sensor component closure control realizes pressure compensation, ensures that workpiece A and the pressure of workpiece B are constant, thus significantly
Improve eutectic welding precision and welding quality.
[Detailed description of the invention]
Fig. 1 is the structural schematic diagram of the embodiment of the present invention;
Fig. 2 is that the structure of compression head assembly, pressure sensor assembly and vision positioning system in the embodiment of the present invention is shown
It is intended to;
Fig. 3 is the structure that head assembly, pressure sensor assembly and the cooperation of servo-drive part are compressed in the embodiment of the present invention
Schematic diagram;
Fig. 4 is the structural schematic diagram that head assembly and pressure sensor assembly cooperation are compressed in the embodiment of the present invention;
Fig. 5 is the structural schematic diagram that second angle limits fine-adjusting unit in the embodiment of the present invention;
Fig. 6 is the structural schematic diagram of vision positioning system in the embodiment of the present invention;
Fig. 7 is the structural schematic diagram of camera arrangement in the embodiment of the present invention;
Fig. 8 is the structural schematic diagram of loading and unloading absorbing unit in the embodiment of the present invention;
Fig. 9 is the structural schematic diagram of eutectic welding stage in the embodiment of the present invention;
Figure 10 is one of the partial structure diagram of eutectic welding stage in the embodiment of the present invention;
Figure 11 is two of the partial structure diagram of eutectic welding stage in the embodiment of the present invention;
Figure 12 is three of the partial structure diagram of eutectic welding stage in the embodiment of the present invention;
Digital representation in figure:
100 are able to maintain the constant high-precision eutectic welding equipment of pressing force;
1 eutectic welding stage, 11 bottom plates, 12 support plates, 13 lateral supporting plates, 14 braced frames, 15 storage cases, 16 support bases,
17 cooler bin blocks, 171 cooling tubes, 18 ceramic heating plates, 19 welding windows, 116 cover boards, 117 cavitys, 118 protective gas are blown
Device, 1181 fixed blocks, 1182 gas blow pipes, 119 adsorption holes, 120 flank supporting plates, 121 first carriers, 122 second carriers, 123
Third carrier;
2XY axis driving unit;
3Z axis driving unit;
4 first supports, 41 shafts, 42 second mounting bases, 43 return springs, 44 trimming assemblies, 45 support idler wheel;
5 compression head assemblies, 51 compression bars, 52 first angles limit fine-adjusting unit, 521 supports, 522 limit struts, 53 second
Angle limit fine-adjusting unit, 531 fixing seats, 532 storage blocks, 533 jacking blocks, 534 adjusting screw rods, ball is held on 535 tops;
6 second supports;7 pressure sensor assemblies;8 servo-drive parts, 81 first mounting bases;9 brackets;
10 vision positioning systems, 101 linear motors, 102 movable plates, 103 camera arrangements, 104 mounting blocks, 105 first mirrors
Cylinder, 106 second lens barrels, 107 first cameras, 108 second cameras, 109 first light sources, 110 second light sources, 111 first beam splitters,
112 reflecting mirrors, 113 second beam splitters, 114 third beam splitters, 115 the 4th beam splitters;
20 loading and unloading absorbing units, 201 first cylinders, 202 second cylinders, 203 suction nozzles;
30 rotary drive mechanisms.
[specific embodiment]
Embodiment:
Fig. 1-Figure 12 is please referred to, the present embodiment is to be able to maintain the constant high-precision eutectic welding equipment 100 of pressing force, packet
It includes the eutectic welding stage 1 of support and fixed workpiece A, the XY axis driving unit 2 that driving eutectic welding stage 1 moves in horizontal plane, drive
Z axis driving unit 3 that dynamic eutectic welding stage 1 is finely adjusted on Z axis is rotatably arranged on the first support 4 and workpiece pressing B
Compression head assembly 5, be rotatably arranged on the second support 6 and apply stressed pressure sensing to head assembly 5 is compressed
The servo-drive part 8 that device assembly 7 and driving pressure sensor module 7 rotate, the pressure sensor assembly 7 and the Z axis
3 closed-loop control of driving unit, when the pressure data of pressure sensor assembly 7 is less than setting value, the Z axis driving unit 3 is driven
The dynamic upward fine motion of eutectic welding stage 1 is until the data that pressure sensor assembly 7 acquires are located in setting range.
The present embodiment compresses head assembly 5 to the clamping force of workpiece B by the real time monitoring of pressure sensor assembly 7, and
The Z axis driving unit 3 of cooperation and the closure control of pressure sensor assembly 7 realizes pressure compensation, ensures the pressure of workpiece A and workpiece B
Power is constant, to substantially increase eutectic welding precision and welding quality.
The present embodiment further includes bracket 9, is arranged on bracket 9 and horizontally movable vision positioning system 10 and loading and unloading
Absorbing unit 20.
The present embodiment further includes being arranged on Z axis driving unit 3 to be driven the rotation to move up and down by Z axis driving unit 3
Turn driving mechanism 30, eutectic welding stage 1, which is arranged in the round end of rotary drive mechanism 30 and is driven for rotation the driving of mechanism 30, to carry out
Rotary motion.
First support 4 and the coaxial arrangement of the second support 6 and the lower section for being respectively positioned on vision positioning system 10.Servo-drive part 8
It is fixed on bracket 9, the round end of servo-drive part 8 is provided with one first mounting base 81, the rotatable frame of the first mounting base 81
It is located on the second support 6, pressure sensor assembly 7 is arranged in the first mounting base 81.It is rotatable on first support 4 to be provided with
One shaft 41 is fixedly installed one second mounting base 42 in shaft 41, compresses head assembly 5 and is arranged in the second mounting base 42, the
A return springs 43 are provided between one mounting base 81 and the second mounting base 42.Return springs 43 are mainly used for driving when servo
When moving part 8 drives the second support 6 rotation to vertical state, the first support 4 quickly can be returned to vertical state.Second peace
Dress seat 42, which faces to be provided on the surface of the first mounting base 81, supports idler wheel 45, and pressure sensor assembly 7 is while supporting
45。
It is provided in second mounting base 42 to the trimming assembly 44 for compressing the progress high fine-tuning of head assembly 5.Compress head assembly 5
Including compression bar 51, the bottom of compression bar 51 is provided with the adsorption hole (not identifying in figure) for adsorbing workpiece B.The present embodiment further includes limit
The tight overturning of head assembly 5 of level pressure to the first angle limit fine-adjusting unit 52 of horizontal position, restriction compresses head assembly 5 and overturns to vertical
The second angle of position limits fine-adjusting unit 53.First angle limit fine-adjusting unit 52 includes support 521, is connected through a screw thread and sets
Set the limit strut 522 that on support 521 and can be moved up and down.Second angle limits fine-adjusting unit 53 and includes fixing seat 531, consolidates
The fixed storage block 532 being arranged in fixing seat 531, passes through spiral shell at the jacking block 533 movable up and down being arranged in storage block 532
In fixing seat 531 and horizontally disposed adjusting screw rod 534 is arranged in line connection, and the top of jacking block 533 is provided with top and holds ball
535, lower part is provided with inclined-plane (not identifying in figure).The other end of adjusting screw rod 534 supports the inclined-plane, passes through adjusting screw rod
The fine tuning campaign up and down of jacking block 533 is realized in 534 horizontal movement.Limiting fine-adjusting unit 52 by first angle can effectively protect
Barrier compresses head assembly 5 and keeps horizontality, and compression head assembly 5 can effectively be ensured by limiting fine-adjusting unit 53 by second angle
Vertical state is kept, the active force holding that product is on the one hand compressed to compress head assembly 5 vertically provides safeguard, improves
Act on the precision and the uniformity of forced direction;On the other hand, it can be ensured in the accurate of vertical position after adsorbing workpiece B
Degree provides position precision guarantee for the positioning of taking pictures of vision of the vision positioning system 10 to it, and is the subsequent position for workpiece A
It sets adjustment and correctly provides antecedent basis.
Vision positioning system 10 includes linear motor 101, is driven the activity for carrying out horizontal rectilinear motion by linear motor 101
Plate 102, the camera arrangement 103 being fixed on movable plate 102.Camera arrangement 103 is on movable plate 102 and internal including being fixed on
Hollow mounting blocks 104, the first lens barrel 105 for being fixed on mounting blocks 104 and being vertically arranged, be fixed on mounting blocks 104 and
Horizontally disposed second lens barrel 106, be fixed on mounting blocks 104 and with the first lens barrel 105 coaxial arrangement first camera 107,
Be fixed on mounting blocks 104 and with the second camera 108 disposed in parallel of first camera 107,105 top of the first lens barrel is set
First light source 109, the second light source 110 and several optical mirror slips that close mounting blocks 104 on the second lens barrel 106 are set, institute
State optical mirror slip include positioned at the lower section of first camera 107 the first beam splitter 111, be located at 108 lower section of second camera and with first
The horizontal reflecting mirror 112 being collinearly arranged of beam splitter 111 is located at 111 lower section of the first beam splitter and the first beam splitter 111 is vertical conllinear
The second beam splitter 113 for being arranged, with the second beam splitter 113 horizontal conllinear setting and with second light source 110 is horizontal is collinearly arranged
Third beam splitter 114, be located at the lower section of the second beam splitter 113 and with the vertical conllinear setting of the second beam splitter 113 and and first light source
109 horizontal the 4th beam splitters 115 being collinearly arranged.
The center of second beam splitter 113 is located at the axis intersection of the first lens barrel 105 and the second lens barrel 106.
The overturning path of the axis of first lens barrel 105, the axis of the second lens barrel 106 and compression bar 51 is located at same perpendicular
In straight plane, ensured that workpiece A, workpiece B obtain the accuracy of picture, also ensured draw workpiece B, workpiece pressing B it is accurate
Degree, to realize that precision welding provides condition and guarantee basis.
By opening first light source 109, first camera 107 with second camera 108 is available is located at the first lens barrel 105
The position picture of the workpiece A of lower section;By opening second light source 110, first camera 107 is located at the first lens barrel with also available
The position picture of workpiece B on 105 axis directions, thus, it, can by switching the unlatching of first light source 109 and second light source 110
To realize acquisition of the same camera to workpiece A and workpiece B location picture, to adjust workpiece location A on the basis of workpiece B location
Provide realization adjustment foundation.Specifically, the light of first light source 109 passes through the 4th beam splitter after opening first light source 109
115 reflex to the surface workpiece A, and workpiece A is imaged after being illuminated, by the 4th beam splitter 115, the second beam splitter 113, the first beam splitting
Mirror 111 and reflecting mirror 112 are obtained by second camera 108 to be imaged;Closing first light source 109, unlatching second light source 110, second
The light of light source 109 reflexes to workpiece B surface by third beam splitter 114, and workpiece B is imaged after being illuminated, by third beam splitting
Mirror 114, the second beam splitter 113, the first beam splitter 111 and reflecting mirror 112 are obtained by second camera 108 and are imaged.
In the present embodiment, the focal length of first camera 107 is less than the focal length of second camera 108, for example, first camera 107 is 1
Times focal length, second camera 108 are 3 times of focal lengths.First camera 107 is mainly used for the position of single workpiece in grabbing workpiece carrier disk
It sets, corresponding workpiece to be captured is moved to by loading and unloading absorbing unit 20 or hold-down head group by movement convenient for eutectic welding stage 1
Realize the absorption of workpiece in the underface of part 5.Second camera 108 is mainly used for obtaining the workpiece A being located on eutectic welding stage 1 and being located at
The global position picture for compressing the workpiece B in head assembly 5, instructs XY by the overlapping of Pictures location, characteristic point comparing calculation
The driving of axis driving unit 2, Z axis driving unit 3, rotary drive mechanism 30, so that the position adjustment of workpiece A is realized, to guarantee
Workpiece A can be accurately bonded with workpiece B.
By the way that vision positioning system 10 is arranged, cooperation eutectic welding stage 1 adsorbs workpiece A and keeps horizontality and compress
Head assembly 5 adsorbs workpiece B and keeps plumbness, and passes through the same high power second camera 108, vertically disposed two lens barrels
It realizes that the location drawing picture of workpiece A and workpiece B obtains with two light sources, without mobile camera, effectively avoids camera and be moved through
Due to the inaccuracy that the kinematic error that actuator back clearance generates causes image to obtain in journey, in the process, workpiece B is motionless,
Travelling workpiece A is only needed, the accuracy of fine tuning is substantially increased.
Eutectic welding stage 1 include bottom plate 11,11 two sides of bottom plate are set support plate 12, be erected between two support plates 12
Lateral supporting plate 13, the braced frame 14, the embedded receipts being fixed in lateral supporting plate 13 that are suspended on 13 lower section of lateral supporting plate
Receive shell 15, be arranged in braced frame 14 and stretch to support base 16 in storage case 15, be arranged on support base 16 and
The aerial cooler bin block 17 in the storage case 15, is covered and is being stored the ceramic heating plate 18 on cooler bin block 17
15 top of shell and the cover board 116 for offering welding window 19.Support base 16 includes providing four support posts of supporting plane,
It is contacted by support post surface and support force is provided, substantially reduced contact area, reduce heat transfer.
Cover board 116 and storage case 15 form a cavity 117, and cooler bin block 17 and ceramic heating plate 18 are located at the cavity
In 117.The present embodiment further includes the protective gas blowning installation 118 that protective gas is blown into the cavity 117, through cooling
Case block 17 and ceramic heating plate 18 and the adsorption hole 119 for being used to adsorb workpiece.
There are gap between cover board 116 and ceramic heating plate 18, the heat for avoiding ceramic heating plate 18 is directly conducted to
On cover board 116.
Protective gas blowning installation 118 is provided with two groups of two sides for being located at ceramic heating plate 18, and exists including setting
Fixed block 1181 in braced frame 14 is arranged on fixed block 1181 and stretches to the gas blow pipe 1182 in the cavity 117,
Gas blow pipe 1182 connects a Nitrogen source gases.By being blown into nitrogen protection gas into the surrounding enviroment of workpiece A and workpiece B welding,
It effectively prevents H or O in metal and air in welding process from reacting to form oxide influence welding quality, improves
Welding quality.
Cooler bin block 17 is hollow structure and is internally provided with several cooling fins, improves radiating efficiency.Cooler bin block 17
Both ends are horn structure and are connected with cooling tube 171, and cooling tube 171 connects a gas source, by being blown into compressed air to ceramics
Heating plate 18 is quickly cooled.By the way that loudspeaker open type structure is arranged, avoids inside cooler bin block 17 and occur extremely
Angle, it is thus also avoided that occurring vortex phenomenon inside cooler bin block 17 influences cooling effect.
The surface of cooler bin block 17 is provided with heat conducting coating or is pasted with thermally conductive paster, improves heat dissipation effect.
It is located at 13 two sides of lateral supporting plate between two support plates 12 and is additionally provided with flank supporting plate 120, the flank supporting plate in left side
The first carrier 121 for loading several workpiece A and the second carrier 122 for loading several workpiece B, the flank on right side are provided on 120
The third carrier 123 for loading the finished goods mounted is provided on supporting plate 120.
The eutectic welding stage 1 of the present embodiment setting carries out fast cooling to ceramic heating plate 18 by setting cooler bin block 17,
Substantially increase welding efficiency;And by the way that cooler bin block 17 and whole use with other structures of ceramic heating plate 18 are vacantly set
Meter, does not generate direct contact, and the support construction for effectively avoiding heat transfer to the periphery of the generation of ceramic heating plate 18 causes
Support construction deforms and influences precision.Specifically, ceramic heating plate 18 and cooler bin block 17 are that hanging setting exists in the present embodiment
In storage case 15, do not contacted directly with storage case 15, therefore, heat is not directly transferred in storage case 15,
It will not be transferred in bottom plate 11, realize good heat insulation, to ensure the stability of support construction, ensure workpiece
The precision of A adjustment driving.
Z axis driving unit 3, which can be selected in the prior art, can be realized the mobile driving structure of Z axis.Preferential, this implementation
Z axis driving unit 3 includes servo motor, is driven the voussoir being horizontally moved and voussoir cooperation by servo motor in example
Realize that the moving mass to move up and down, the movable plate being arranged on moving mass, rotary drive mechanism 30 are arranged on the movable plate
It realizes and moves up and down.
Loading and unloading absorbing unit 20 includes the first cylinder 201 being fixed on bracket 9, by the driving progress of the first cylinder 201
The second cylinder 202 to move up and down, the suction nozzle 203 to be moved up and down by the driving of the second cylinder 202.Pass through setting about two
Cylinder is driven, realizes the blanking of workpiece A feeding, the workpiece A being welded and workpiece B entirety respectively.
The present embodiment is the working principle for being able to maintain the constant high-precision eutectic welding equipment 100 of pressing force are as follows:
1) XY axis driving unit 2 drives eutectic welding stage 1, so that workpiece A to be captured is located at the first mirror in the first carrier 121
The lower section of cylinder 105, first light source 109 are opened, and first camera 107, which is taken pictures, obtains the position of workpiece A, then instruct the driving of XY axis single
Member 2 drives eutectic welding stage 1 mobile, so that workpiece A is moved to the lower section of loading and unloading absorbing unit 20;
2) above lift after workpiece A is sucked by the driving decline of the first cylinder 201 in suction nozzle 203, and then XY axis driving unit 2 drives altogether
Brilliant welding stage 1, so that the 119 alignment pieces A of adsorption hole on eutectic welding stage 1 on ceramic heating plate 18, under the driving of the first cylinder 201
Drop, workpiece A is placed on ceramic heating plate 18 and is adsorbed hole 119 adsorbs;
3) XY axis driving unit 2 drives eutectic welding stage 1, so that workpiece B to be captured is located at the first mirror in the first carrier 121
The lower section of cylinder 105, first light source 109 are opened, and first camera 107, which is taken pictures, obtains the position of workpiece B, then instruct the driving of XY axis single
Member 2 drives eutectic welding stage 1 mobile, so that workpiece B, which is moved to, compresses 5 position of head assembly, at this point, compressing head assembly 5 to give
Flip-flop movement provide space, vision positioning system 10 moved horizontally under the driving of linear motor 101 realization step down;Servo is driven
The overturning of 8 driving pressure sensor module 7 of moving part, while compression head assembly 5 being pushed to downwardly turn over, it is overturn by vertical position to level
Position, and workpiece B is adsorbed by compression bar 51;
4) 8 driving pressure sensor module 7 of servo-drive part turns round, so that pressure sensor assembly 7 is overturn to vertical position
It sets, while pulling and compressing the overturning of head assembly 5 to vertical position, at this point, workpiece B is adsorbed to taking pictures positioned at the second lens barrel 106
In region;
5) XY axis driving unit 2 drives eutectic welding stage 1, so that workpiece A is located at the lower section of the first lens barrel 105;
6) start second light source 110, obtain the figure of upright position workpiece B through the second lens barrel 106 by second camera 108
Picture;Second light source 110 is closed, first light source 109 is started, horizontal position is obtained through the first lens barrel 105 by second camera 108
The image of workpiece A;
7) it is handled by software and compares above-mentioned two image, first instruct rotary drive mechanism 30 that eutectic welding stage 1 is driven to make
The placement angle of workpiece A is consistent with workpiece B;Then instruct XY axis driving unit 2 that eutectic welding stage 1 is driven to carry out X-axis and Y-axis
The fine tuning in direction is so that workpiece B can be precisely bonded completely after being turned into horizontality with workpiece A, in the process, the second phase
The location drawing picture of the meeting of machine 108 dynamic acquisition workpiece A, until the overlapping of two images stops when meeting setting error range to workpiece
The fine tuning of location A;
8) after the completion of the position adjustment of workpiece A, 8 driving pressure sensor module 7 of servo-drive part is pressed downward, at this point, pressure
Bar 51 adsorbs workpiece B and workpiece A pressing and workpiece pressing B, by 7 real-time monitoring of pressure sensor assembly to the pressure of workpiece B
Size;
9) starting of ceramic heating plate 18 heating, the plating layer on the surface workpiece A weld together after melting with workpiece B, at this point,
It is passed through compressed air in cooler bin block 17, ceramic heating plate 18 is rapidly cooled, workpiece A and workpiece B welding is accelerated to show
Co-melting curing efficiency, thus improve eutectic weldering speed;In the process, the thawing for plating layer will lead to the pico- of workpiece B
Sink, then the pressure value that pressure sensor assembly 7 monitors can become smaller, at this point, its data is uploaded to by pressure sensor assembly 7
Controller, controller drive eutectic welding stage 1 to rise slightly by control Z axis driving unit 3, and by closed-loop control until pressure
Until the data that sensor module 7 acquires reach setting range;Without being passed using 8 driving pressure of servo-drive part in the present embodiment
Sensor component 7 pushes compression bar 51 is pico- downwards to push, and is mainly to protect compression bar 51 and remains vertical to the pressure of workpiece B
Histogram is to also effectively avoiding workpiece A and workpiece B and occur to ensure the stability and uniformity that workpiece B is under pressure
Angular misalignment;
10) after welding, it is mobile that XY axis driving unit 2 drives eutectic welding stage 1, so that the product after being welded is positioned at upper
20 lower section of blanking absorbing unit, then adsorbs product by loading and unloading absorbing unit 20, and then eutectic welding stage 1 is mobile, so that
Third carrier 123, which moves to below loading and unloading absorbing unit 20 for product to be placed on third carrier 123, completes blanking.
Above-described is only some embodiments of the present invention.For those of ordinary skill in the art, not
Under the premise of being detached from the invention design, various modifications and improvements can be made, these belong to protection model of the invention
It encloses.
Claims (10)
1. a kind of be able to maintain the constant high-precision eutectic welding equipment of pressing force, it is characterised in that: it includes support and regular worker
XY axis driving unit, the driving eutectic welding stage that eutectic welding stage, the driving eutectic welding stage of part A moves in horizontal plane
The Z axis driving unit that is finely adjusted on Z axis, be rotatably arranged on the first support and the compression head assembly of workpiece pressing B,
It is rotatably arranged on the second support and stressed pressure sensor assembly and drive is applied to the compression head assembly
Move the servo-drive part of the pressure sensor assembly rotation, the pressure sensor assembly and the Z axis driving unit closed loop
Control, when the pressure data of the pressure sensor assembly is less than setting value, the Z axis driving unit drives the eutectic weldering
Platform moves upwards until the data of pressure sensor assembly acquisition are located in setting range.
2. being able to maintain the constant high-precision eutectic welding equipment of pressing force as described in claim 1, it is characterised in that: further include
Bracket, setting on the bracket and horizontally movable vision positioning system, be arranged on the Z axis driving unit by described
Z axis driving unit drives the rotary drive mechanism to move up and down, and the eutectic welding stage is arranged in the rotary drive mechanism
Round end and by the rotary drive mechanism driving be rotated, the XY axis driving unit, the rotary driving machine
The position picture of workpiece A and workpiece B that structure is got according to the vision positioning system drive the eutectic welding stage to realize to work
The position of part A adjusts.
3. being able to maintain the constant high-precision eutectic welding equipment of pressing force as claimed in claim 2, it is characterised in that: described the
One support and second support are coaxially disposed and are respectively positioned on the lower section of the vision positioning system;
The round end of the servo-drive part is provided with one first mounting base, first mounting base is rotatable be erected at it is described
On second support, the pressure sensor assembly is arranged in first mounting base;
It is rotatable on first support to be provided with a shaft, one second mounting base is fixedly installed in the shaft, it is described
It compresses head assembly to be arranged in second mounting base, it is multiple that one is provided between first mounting base and second mounting base
Position elastic component.
4. being able to maintain the constant high-precision eutectic welding equipment of pressing force as described in claim 1, it is characterised in that: the pressure
Tight head assembly includes compression bar, and the bottom of the compression bar is provided with the adsorption hole for adsorbing workpiece B.
5. being able to maintain the constant high-precision eutectic welding equipment of pressing force as described in claim 1, it is characterised in that: further include
The compression head assembly is limited to overturn to the first angle limit fine-adjusting unit of horizontal position, limit the compression head assembly overturning
Second angle to vertical position limits fine-adjusting unit.
6. being able to maintain the constant high-precision eutectic welding equipment of pressing force as claimed in claim 2, it is characterised in that: the view
Feel positioning system include linear motor, driven by the linear motor movable plate for carrying out horizontal rectilinear motion, be fixed on it is described
The camera arrangement taken pictures on movable plate to workpiece A and workpiece B.
7. being able to maintain the constant high-precision eutectic welding equipment of pressing force as described in claim 1, it is characterised in that: described total
Brilliant welding stage include bottom plate, the support plate that the bottom plate two sides are set, the lateral supporting plate being erected between two support plates,
It is suspended on the braced frame below the lateral supporting plate, the embedded storage case being fixed in the lateral supporting plate, setting
In the braced frame and the support base in the storage case is stretched to, is arranged on the support base and is maked somebody a mere figurehead positioned at institute
State the cooler bin block in storage case, the ceramic heating plate on the cooler bin block, cover above the storage case and
Offer the cover board of welding window.
8. being able to maintain the constant high-precision eutectic welding equipment of pressing force as claimed in claim 7, it is characterised in that: further include
Adsorption hole through the cooler bin block and the ceramic heating plate and for adsorbing workpiece A.
9. being able to maintain the constant high-precision eutectic welding equipment of pressing force as claimed in claim 8, it is characterised in that: two institutes
It states and is additionally provided with flank supporting plate positioned at the lateral supporting plate two sides between support plate, be provided with dress on the flank supporting plate in left side
It carries the first carrier of several workpiece A and loads the second carrier of several workpiece B, be provided with loading on the flank supporting plate on right side
The third carrier of the finished goods mounted.
10. being able to maintain the constant high-precision eutectic welding equipment of pressing force as described in claim 1, it is characterised in that: also wrap
The loading and unloading absorbing unit of workpiece A and workpiece B Whole blanking after realizing workpiece A feeding and being welded are included, it is described upper and lower
Material absorbing unit include the first cylinder, by first cylinder driving move up and down the second cylinder, by second gas
Cylinder drives the suction nozzle to move up and down.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112536781A (en) * | 2020-11-25 | 2021-03-23 | 南京航空航天大学 | Static rotor bending-proof support with adjustable supporting force |
CN113891575A (en) * | 2021-12-08 | 2022-01-04 | 泰姆瑞(北京)精密技术有限公司 | Eutectic pastes dress equipment |
CN117798567A (en) * | 2024-02-29 | 2024-04-02 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Eutectic welding table capable of rapidly increasing and decreasing temperature |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050098610A1 (en) * | 2001-06-27 | 2005-05-12 | Shunji Onobori | Apparatus and method for mounting electronic components |
CN204954097U (en) * | 2015-09-23 | 2016-01-13 | 广州硅能照明有限公司 | Vacuum reaction force welding set |
CN107123927A (en) * | 2017-06-02 | 2017-09-01 | 广东瑞谷光网通信股份有限公司 | LD chip eutectic welding systems |
WO2018218849A1 (en) * | 2017-06-02 | 2018-12-06 | 广东瑞谷光网通信股份有限公司 | Rotational eutectic soldering station for chips |
CN210877975U (en) * | 2019-08-28 | 2020-06-30 | 苏州猎奇智能设备有限公司 | High-precision eutectic welding equipment capable of keeping pressing force constant |
-
2019
- 2019-08-28 CN CN201910802417.2A patent/CN110434417B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050098610A1 (en) * | 2001-06-27 | 2005-05-12 | Shunji Onobori | Apparatus and method for mounting electronic components |
CN204954097U (en) * | 2015-09-23 | 2016-01-13 | 广州硅能照明有限公司 | Vacuum reaction force welding set |
CN107123927A (en) * | 2017-06-02 | 2017-09-01 | 广东瑞谷光网通信股份有限公司 | LD chip eutectic welding systems |
WO2018218849A1 (en) * | 2017-06-02 | 2018-12-06 | 广东瑞谷光网通信股份有限公司 | Rotational eutectic soldering station for chips |
CN210877975U (en) * | 2019-08-28 | 2020-06-30 | 苏州猎奇智能设备有限公司 | High-precision eutectic welding equipment capable of keeping pressing force constant |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112536781A (en) * | 2020-11-25 | 2021-03-23 | 南京航空航天大学 | Static rotor bending-proof support with adjustable supporting force |
CN112536781B (en) * | 2020-11-25 | 2022-06-10 | 南京航空航天大学 | Static rotor bending-proof support with adjustable supporting force |
CN113891575A (en) * | 2021-12-08 | 2022-01-04 | 泰姆瑞(北京)精密技术有限公司 | Eutectic pastes dress equipment |
CN113891575B (en) * | 2021-12-08 | 2022-03-08 | 泰姆瑞(北京)精密技术有限公司 | Eutectic pastes dress equipment |
CN117798567A (en) * | 2024-02-29 | 2024-04-02 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Eutectic welding table capable of rapidly increasing and decreasing temperature |
CN117798567B (en) * | 2024-02-29 | 2024-06-04 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Eutectic welding table capable of rapidly increasing and decreasing temperature |
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