CN110434417B - High-precision eutectic welding equipment capable of keeping pressing force constant - Google Patents
High-precision eutectic welding equipment capable of keeping pressing force constant Download PDFInfo
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- CN110434417B CN110434417B CN201910802417.2A CN201910802417A CN110434417B CN 110434417 B CN110434417 B CN 110434417B CN 201910802417 A CN201910802417 A CN 201910802417A CN 110434417 B CN110434417 B CN 110434417B
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- 238000003466 welding Methods 0.000 title claims abstract description 86
- 230000005496 eutectics Effects 0.000 title claims abstract description 76
- 238000003825 pressing Methods 0.000 title claims abstract description 60
- 238000001816 cooling Methods 0.000 claims description 26
- 238000003860 storage Methods 0.000 claims description 21
- 239000000919 ceramic Substances 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 20
- 238000001179 sorption measurement Methods 0.000 claims description 20
- 230000000007 visual effect Effects 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 claims description 15
- 238000007599 discharging Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 11
- 238000007664 blowing Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000005476 soldering Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000003181 co-melting Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
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- 229910052757 nitrogen Inorganic materials 0.000 description 1
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- 230000001681 protective effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
- B23K3/085—Cooling, heat sink or heat shielding means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Die Bonding (AREA)
Abstract
The invention discloses high-precision eutectic welding equipment capable of keeping a pressing force constant, which comprises a eutectic welding table for supporting and fixing a workpiece A, an XY axis driving unit for driving the eutectic welding table to move in a horizontal plane, a Z axis driving unit for driving the eutectic welding table to finely adjust on a Z axis, a pressing head assembly rotatably arranged on a first support and pressing the workpiece B, a pressure sensor assembly rotatably arranged on a second support and applying pressure to the pressing head assembly, and a servo driving piece for driving the pressure sensor assembly to rotate, wherein the pressure sensor assembly and the Z axis driving unit are in closed-loop control, and when pressure data of the pressure sensor assembly is smaller than a set value, the Z axis driving unit drives the eutectic welding table to move upwards until data acquired by the pressure sensor assembly are positioned in a set range. The invention can effectively ensure constant pressing force between eutectic welding chips and improve welding quality.
Description
[ field of technology ]
The invention belongs to the technical field of eutectic welding, and particularly relates to high-precision eutectic welding equipment capable of keeping a pressing force constant.
[ background Art ]
Eutectic welding, also known as low melting point alloy welding, has the basic feature that two different metals can be alloyed in a weight ratio at temperatures well below the respective melting points. Such as gold-silicon eutectic solder, is most common. Gold has a melting point of 1063 degrees celsius and silicon has a melting point of 1414 degrees celsius. If combined in a ratio of 2.85% and 97.15% silicon to gold, a eutectic alloy body with a melting point of 363 degrees celsius can be formed. This is the theoretical basis for gold silicon eutectic bonding. Gold silicon eutectic bonding is commonly used for bonding circuit boards. Many electronic components are sensitive to temperature, and with the gradual miniaturization design of electronic chips, the precision requirements for eutectic soldering are also becoming more and more stringent.
In the welding process, the volume of the welding layer on the surface layer of the bottom sheet is changed along with the change of temperature, the solid state is changed into the liquid state, and in the process, slight dislocation is needed to occur between the two chips, and if the dislocation is not corrected or avoided in the welding process, the final welding quality is seriously affected, and the defects are generated.
In eutectic soldering, two chips are required to be attached, and because of a plurality of circuit designs in the chips, the requirement on the position accuracy of the attached chips is very high, and in the prior art, for example, CN201210179151.9 discloses an eutectic soldering device for an LED wafer, which cannot guarantee the stability of the positions of two elements to be soldered in the soldering process.
Accordingly, there is a need to provide a new high precision eutectic welding apparatus capable of maintaining a constant pressing force to solve the above-mentioned problems.
[ invention ]
The invention mainly aims to provide high-precision eutectic welding equipment capable of keeping the pressing force constant, which can effectively ensure the constant pressing force between eutectic welding chips and improve the welding quality.
The invention realizes the aim through the following technical scheme: the utility model provides a can keep constant high accuracy eutectic welding equipment of clamp force, its includes the eutectic welding platform of supporting and fixed work piece A, drive the XY axle drive unit that the eutectic welding platform removed in the horizontal plane, drive the eutectic welding platform carries out the Z axle drive unit of fine setting on the Z axle, rotatable setting is on first support and compress tightly work piece B compress tightly the first subassembly, rotatable setting is on the second support and to the pressure sensor subassembly of applying pressure, and drive the rotatory servo drive piece of pressure sensor subassembly, pressure sensor subassembly with Z axle drive unit closed loop control, when pressure sensor subassembly's pressure data is less than the setting, Z axle drive unit drive the eutectic welding platform upward movement until pressure sensor subassembly gathers the data and is located the settlement scope.
Further, the device also comprises a support, a visual positioning system which is arranged on the support and can horizontally move, and a rotary driving mechanism which is arranged on the Z-axis driving unit and driven by the Z-axis driving unit to move up and down, wherein the eutectic welding table is arranged at the rotary end of the rotary driving mechanism and driven by the rotary driving mechanism to move in a rotary mode, and the XY-axis driving unit and the rotary driving mechanism drive the eutectic welding table to realize the position adjustment of the workpiece A according to the position pictures of the workpiece A and the workpiece B which are acquired by the visual positioning system.
Further, the first support and the second support are coaxially arranged and are all positioned below the visual positioning system;
the rotating end of the servo driving piece is provided with a first mounting seat, the first mounting seat is rotatably erected on the second support, and the pressure sensor assembly is arranged on the first mounting seat;
the rotatable frame of first support is equipped with a pivot, fixedly be provided with a second mount pad in the pivot, the clamp head subassembly sets up on the second mount pad, first mount pad with be provided with a reset elastic component between the second mount pad.
Further, the compressing head assembly comprises a compression bar, and an adsorption hole for adsorbing the workpiece B is formed in the bottom of the compression bar.
Further, the device also comprises a first angle limiting fine adjustment unit limiting the pressing head assembly to be turned to a horizontal position and a second angle limiting fine adjustment unit limiting the pressing head assembly to be turned to a vertical position.
Further, the visual positioning system comprises a linear motor, a movable plate driven by the linear motor to perform horizontal linear motion, and a photographing device fixed on the movable plate for photographing the workpiece A and the workpiece B.
Further, the eutectic welding table comprises a bottom plate, support plates arranged on two sides of the bottom plate, a transverse support plate arranged between the two support plates, a support frame hung below the transverse support plate, a storage shell fixedly arranged in the transverse support plate in an embedded manner, a support seat arranged on the support frame and extending into the storage shell, a cooling box block arranged on the support seat and overhead and positioned in the storage shell, a ceramic heating plate arranged on the cooling box block, and a cover plate covering the storage shell and provided with a welding window.
Further, the device also comprises an adsorption hole which penetrates through the cooling box block and the ceramic heating plate and is used for adsorbing the workpiece A.
Further, a side wing support plate is further arranged between the two support plates and located on two sides of the transverse support plate, a first carrier for loading a plurality of workpieces A and a second carrier for loading a plurality of workpieces B are arranged on the left side of the side wing support plate, and a third carrier for loading mounted finished products is arranged on the right side of the side wing support plate.
Further, the automatic feeding and discharging device further comprises an feeding and discharging adsorption unit for realizing feeding of the workpiece A and integrally discharging of the welded workpiece A and the workpiece B, wherein the feeding and discharging adsorption unit comprises a first cylinder, a second cylinder driven by the first cylinder to move up and down, and a suction nozzle driven by the second cylinder to move up and down.
Compared with the prior art, the high-precision eutectic welding equipment capable of keeping the pressing force constant has the beneficial effects that: the pressing force of the pressing head assembly on the workpiece B is monitored in real time through the pressure sensor assembly, and the Z-axis driving unit which is in closed control with the pressure sensor assembly is matched to realize pressure compensation, so that the constant pressure of the workpiece A and the workpiece B is ensured, and the eutectic welding precision and the welding quality are greatly improved.
[ description of the drawings ]
FIG. 1 is a schematic diagram of an embodiment of the present invention;
FIG. 2 is a schematic diagram of a pressure head assembly, a pressure sensor assembly, and a visual positioning system according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a configuration of a clamping head assembly, a pressure sensor assembly, and a servo driver according to an embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating the configuration of a clamp head assembly mated with a pressure sensor assembly according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a second angle limiting and fine tuning unit according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a visual positioning system according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a photographing apparatus according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of the structure of the feeding and discharging adsorption unit in the embodiment of the present invention;
FIG. 9 is a schematic diagram of a eutectic bonding station according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of a portion of a eutectic bonding station according to an embodiment of the present invention;
FIG. 11 is a second schematic diagram of a portion of a eutectic bonding station according to an embodiment of the present invention;
FIG. 12 is a third schematic view of a portion of a eutectic bonding station according to an embodiment of the present invention;
the figures represent the numbers:
100 can keep the constant high-precision eutectic welding equipment of the pressing force;
the device comprises a eutectic welding table 1, a bottom plate 11, a supporting plate 12, a transverse supporting plate 13, a supporting frame 14, a 15 storage shell, a 16 supporting seat, a 17 cooling box block, a 171 cooling pipe, a 18 ceramic heating plate 19, a 19 welding window 116, a cover plate 117, a 118 protection gas blowing device 118, a 1181 fixing block 1182 blowing pipe 119 adsorption holes 120 flank supporting plates 121, a first carrier 122, a second carrier 123 and a third carrier;
a 2XY axis driving unit;
a 3Z-axis driving unit;
4 a first support, 41 a rotating shaft, 42 a second mounting seat, 43 a reset elastic piece, 44 a fine adjustment component and 45 a supporting roller;
the clamping head assembly 5, the compression rod 51, the first angle limiting and fine-tuning unit 52, the support 521, the limiting support rod 522, the second angle limiting and fine-tuning unit 53, the fixed seat 531, the storage block 532, the jacking block 533, the adjusting screw 534 and the jacking ball 535;
6, a second support; a pressure sensor assembly; 8 servo driving part, 81 first mounting seat; 9, a bracket;
the system comprises a visual positioning system, a linear motor, a movable plate 102, a photographing device 103, a 104 mounting block, a 105 first lens barrel, a 106 second lens barrel, a 107 first camera, a 108 second camera, a 109 first light source, a 110 second light source, a 111 first beam splitter, a 112 reflector, a 113 second beam splitter, a 114 third beam splitter and a 115 fourth beam splitter;
20 feeding and discharging adsorption units, a first cylinder 201, a second cylinder 202 and a suction nozzle 203;
30 a rotary drive mechanism.
[ detailed description ] of the invention
Examples:
referring to fig. 1-12, the present embodiment is a high precision eutectic welding apparatus 100 capable of maintaining a constant pressing force, which includes a eutectic welding table 1 for supporting and fixing a workpiece a, an XY axis driving unit 2 for driving the eutectic welding table 1 to move in a horizontal plane, a Z axis driving unit 3 for driving the eutectic welding table 1 to fine tune on a Z axis, a pressing head assembly 5 rotatably disposed on a first support 4 and pressing the workpiece B, a pressure sensor assembly 7 rotatably disposed on a second support 6 and applying pressure to the pressing head assembly 5, and a servo driving member 8 for driving the pressure sensor assembly 7 to rotate, wherein the pressure sensor assembly 7 and the Z axis driving unit 3 are in closed loop control, and when pressure data of the pressure sensor assembly 7 is smaller than a set value, the Z axis driving unit 3 drives the eutectic welding table 1 to fine tune upwards until data collected by the pressure sensor assembly 7 is within a set range.
In the embodiment, the pressing force of the pressing head assembly 5 on the workpiece B is monitored in real time through the pressure sensor assembly 7, and the Z-axis driving unit 3 which is in closed control with the pressure sensor assembly 7 is matched to realize pressure compensation, so that the constant pressure of the workpiece A and the workpiece B is ensured, and the eutectic welding precision and the welding quality are greatly improved.
The embodiment also comprises a bracket 9, a visual positioning system 10 which is arranged on the bracket 9 and can horizontally move, and an upper and lower material adsorption unit 20.
The embodiment further comprises a rotary driving mechanism 30 arranged on the Z-axis driving unit 3 and driven by the Z-axis driving unit 3 to move up and down, and the eutectic bonding stage 1 is arranged at the rotary end of the rotary driving mechanism 30 and driven by the rotary driving mechanism 30 to move in a rotary mode.
The first support 4 is arranged coaxially with the second support 6 and is located below the visual positioning system 10. The servo driving member 8 is fixed on the bracket 9, the rotating end of the servo driving member 8 is provided with a first mounting seat 81, the first mounting seat 81 is rotatably erected on the second support 6, and the pressure sensor assembly 7 is arranged on the first mounting seat 81. The rotatable frame of first support 4 is equipped with a pivot 41, fixedly is provided with a second mount pad 42 on the pivot 41, compresses tightly first subassembly 5 and sets up on second mount pad 42, is provided with a reset elastic component 43 between first mount pad 81 and the second mount pad 42. The reset elastic member 43 is mainly used for quickly pulling the first support 4 back to the vertical state when the servo driving member 8 drives the second support 6 to rotate to the vertical state. The surface of the second mounting seat 42 facing the first mounting seat 81 is provided with an abutment roller 45, and the pressure sensor assembly 7 abuts against the abutment roller 45.
The second mounting base 42 is provided with a fine adjustment assembly 44 for fine adjustment of the height of the packing head assembly 5. The pressing head assembly 5 includes a pressing rod 51, and an adsorption hole (not shown) for adsorbing the workpiece B is provided at the bottom of the pressing rod 51. The present embodiment further includes a first angular limit trimming unit 52 that defines the tilting of the packing head assembly 5 to the horizontal position, and a second angular limit trimming unit 53 that defines the tilting of the packing head assembly 5 to the vertical position. The first angle limit fine adjustment unit 52 includes a support 521, and a limit strut 522 disposed on the support 521 by a threaded connection and capable of moving up and down. The second angle limiting fine adjustment unit 53 includes a fixed base 531, a storage block 532 fixedly disposed on the fixed base 531, a jack block 533 movably disposed in the storage block 532 up and down, and an adjusting screw 534 disposed on the fixed base 531 and horizontally disposed through threaded connection, wherein a supporting ball 535 is disposed on an upper portion of the jack block 533, and an inclined surface (not shown) is disposed on a lower portion of the jack block 533. The other end of the adjusting screw 534 abuts against the inclined surface, and the up-and-down fine adjustment movement of the jack 533 is achieved by the horizontal movement of the adjusting screw 534. The first angle limiting and fine adjusting unit 52 can effectively ensure that the pressing head assembly 5 is kept in a horizontal state, the second angle limiting and fine adjusting unit 53 can effectively ensure that the pressing head assembly 5 is kept in a vertical state, on one hand, a guarantee measure is provided for keeping the acting force of the pressing head assembly 5 for pressing a product vertical, and the precision and uniformity of the acting direction of the acting force are improved; on the other hand, the accuracy of the workpiece B in the vertical position can be guaranteed after the workpiece B is adsorbed, position accuracy guarantee is provided for visual photographing and positioning of the workpiece B by the visual positioning system 10, and a precondition is provided for the follow-up correct position adjustment of the workpiece A.
The vision positioning system 10 includes a linear motor 101, a movable plate 102 driven by the linear motor 101 to perform horizontal linear motion, and a photographing device 103 fixed on the movable plate 102. The photographing device 103 comprises a mounting block 104 fixed on the movable plate 102 and hollow in the interior, a first lens barrel 105 fixed on the mounting block 104 and arranged vertically, a second lens barrel 106 fixed on the mounting block 104 and arranged horizontally, a first camera 107 fixed on the mounting block 104 and arranged coaxially with the first lens barrel 105, a second camera 108 fixed on the mounting block 104 and arranged parallel with the first camera 107, a first light source 109 arranged on the upper part of the first lens barrel 105, a second light source 110 arranged on the second lens barrel 106 and close to the mounting block 104, and a plurality of optical lenses, wherein each optical lens comprises a first beam splitter 111 positioned below the first camera 107, a reflecting mirror 112 positioned below the second lens splitter 108 and arranged horizontally in line with the first beam splitter 111, a second beam splitter 113 positioned below the first beam splitter 111 and arranged vertically in line with the first beam splitter 111, a third beam splitter 114 positioned horizontally in line with the second beam splitter 113 and arranged horizontally in line with the second light source 110, and a second beam splitter 113 positioned below the second beam splitter 113 and arranged horizontally in line with the first beam splitter 115.
The center of the second beam splitter 113 is located at the intersection of the axes of the first barrel 105 and the second barrel 106.
The axes of the first lens barrel 105, the axes of the second lens barrel 106 and the turning track route of the pressing rod 51 are positioned in the same vertical plane, so that the accuracy of obtaining pictures of the workpiece A and the workpiece B is ensured, the accuracy of sucking the workpiece B and pressing the workpiece B is also ensured, and conditions and a guarantee basis are provided for realizing high-precision welding.
By turning on the first light source 109, the first camera 107 and the second camera 108 can both acquire a position picture of the workpiece a located below the first barrel 105; by turning on the second light source 110, the first camera 107 can also obtain the position picture of the workpiece B located in the axial direction of the first lens barrel 105, so that by switching on the first light source 109 and the second light source 110, the same camera can obtain the position pictures of the workpiece a and the workpiece B, and an adjustment basis is provided for adjusting the position of the workpiece a by taking the position of the workpiece B as a reference. Specifically, after the first light source 109 is turned on, the light of the first light source 109 is reflected to the surface of the workpiece a by the fourth beam splitter 115, the workpiece a is illuminated and imaged, and the imaging is obtained by the second camera 108 through the fourth beam splitter 115, the second beam splitter 113, the first beam splitter 111 and the reflecting mirror 112; the first light source 109 is turned off, the second light source 110 is turned on, the light of the second light source 109 is reflected to the surface of the workpiece B by the third beam splitter 114, the workpiece B is illuminated and imaged, and the imaging is acquired by the second camera 108 through the third beam splitter 114, the second beam splitter 113, the first beam splitter 111 and the reflecting mirror 112.
In this embodiment, the focal length of the first camera 107 is smaller than the focal length of the second camera 108, for example, the first camera 107 is 1 time focal length and the second camera 108 is 3 times focal length. The first camera 107 is mainly used for grabbing the position of a single workpiece in the workpiece carrier disc, so that the eutectic welding table 1 can move the corresponding workpiece to be grabbed to the upper and lower material adsorption units 20 or the right lower part of the compaction head assembly 5 to realize the adsorption of the workpiece. The second camera 108 is mainly used for acquiring global position pictures of the workpiece a located on the eutectic welding table 1 and the workpiece B located on the pressing head assembly 5, and guiding driving of the XY axis driving unit 2, the Z axis driving unit 3 and the rotation driving mechanism 30 through overlapping of picture positions and characteristic point contrast calculation, so that position adjustment of the workpiece a is realized, and accurate attachment of the workpiece a and the workpiece B is ensured.
Through setting up vision positioning system 10, work piece A is adsorbed to cooperation eutectic welding bench 1 keeps the horizontality, and work piece B is adsorbed to compressing tightly first subassembly 5 keeps the vertical state, and through same high-power second camera 108, two lens cone and two light sources that set up perpendicularly realize work piece A and work piece B's position image acquisition, need not to remove the camera, the effectual inaccuracy that leads to image acquisition because the motion error that the driving piece back clearance produced that has avoided the camera in-process of removing, in this process, work piece B is motionless, only need remove work piece A, fine setting's degree of accuracy has been improved greatly.
The eutectic welding table 1 comprises a bottom plate 11, support plates 12 arranged on two sides of the bottom plate 11, a transverse support plate 13 erected between the two support plates 12, a support frame 14 hung below the transverse support plate 13, a storage shell 15 embedded and fixedly arranged in the transverse support plate 13, a support seat 16 arranged on the support frame 14 and extending into the storage shell 15, a cooling box block 17 arranged on the support seat 16 and overhead in the storage shell 15, a ceramic heating plate 18 arranged on the cooling box block 17, and a cover plate 116 covered above the storage shell 15 and provided with a welding window 19. The support base 16 includes four support posts that provide a support plane, and provides a support force through support post surface contact, greatly reducing contact area and reducing heat transfer.
The cover plate 116 and the housing 15 form a cavity 117, and the cooling block 17 and the ceramic heating plate 18 are located in the cavity 117. The present embodiment further includes a shielding gas blowing device 118 for blowing shielding gas into the cavity 117, and an adsorption hole 119 penetrating the cooling box block 17 and the ceramic heating plate 18 for adsorbing the workpiece.
A gap is left between the cover plate 116 and the ceramic heating plate 18, so that heat of the ceramic heating plate 18 is prevented from being directly conducted to the cover plate 116.
The protective gas blowing device 118 is provided with two groups of gas blowing pipes 1182 which are respectively positioned at two sides of the ceramic heating plate 18 and comprise a fixed block 1181 arranged on the supporting frame 14 and a gas blowing pipe 1182 which is arranged on the fixed block 1181 and stretches into the cavity 117, wherein the gas blowing pipe 1182 is connected with a nitrogen gas source. By blowing nitrogen protection gas into the surrounding environment where the workpiece A and the workpiece B are welded, the effect that the welding quality is influenced by the reaction of metal in the welding process and H or O in the air to form oxides is effectively prevented, and the welding quality is improved.
The cooling box block 17 is of a hollow structure and is internally provided with a plurality of cooling fins, so that the cooling efficiency is improved. The cooling box block 17 has a horn-shaped structure at both ends and is connected with a cooling tube 171, the cooling tube 171 is connected with an air source, and the ceramic heating plate 18 is rapidly cooled by blowing compressed air. Through setting up loudspeaker open-type structure, avoided cooling box piece 17 inside dead angle to appear, still avoided appearing the vortex phenomenon in cooling box piece 17 inside and influence the cooling effect.
The surface of the cooling box block 17 is provided with a heat conducting coating or is stuck with a heat conducting sticker, so that the heat dissipation effect is improved.
A lateral support plate 120 is further arranged between the two support plates 12 and located on two sides of the transverse support plate 13, a first carrier 121 for loading a plurality of workpieces A and a second carrier 122 for loading a plurality of workpieces B are arranged on the lateral support plate 120 on the left side, and a third carrier 123 for loading a mounted finished product is arranged on the lateral support plate 120 on the right side.
The eutectic welding table 1 provided by the embodiment has the advantages that the cooling box block 17 is arranged to quickly cool the ceramic heating plate 18, so that the welding efficiency is greatly improved; and through adopting unsettled design with cooling box piece 17 and ceramic heating plate 18 whole and other structures, do not produce direct contact, effectually avoided the heat transfer that ceramic heating plate 18 produced to peripheral bearing structure to lead to bearing structure to warp and influence the precision. Specifically, in this embodiment, ceramic heating plate 18 and cooling box 17 are unsettled setting in storage case 15, do not have direct contact with storage case 15, therefore, the heat can not directly transfer to storage case 15 in, also can not transfer to bottom plate 11 in, realized fine thermal-insulated effect to support structure's stability has been ensured, work piece A adjustment driven precision has been ensured.
The Z-axis driving unit 3 may be a driving structure capable of realizing Z-axis movement in the prior art. Preferably, the Z-axis driving unit 3 in this embodiment includes a servo motor, a wedge driven by the servo motor to move horizontally, a moving block cooperating with the wedge to move up and down, and a movable plate disposed on the moving block, and the rotation driving mechanism 30 is disposed on the movable plate to move up and down.
The loading and unloading adsorption unit 20 comprises a first air cylinder 201 fixed on the bracket 9, a second air cylinder 202 driven by the first air cylinder 201 to move up and down, and a suction nozzle 203 driven by the second air cylinder 202 to move up and down. By arranging two up-down driving cylinders, workpiece A feeding, welded workpiece A and workpiece B overall discharging are respectively realized.
The working principle of the high-precision eutectic welding apparatus 100 capable of keeping the pressing force constant in this embodiment is as follows:
1) The XY-axis driving unit 2 drives the eutectic welding table 1, so that a workpiece A to be grabbed in the first carrier 121 is located below the first lens barrel 105, the first light source 109 is started, the first camera 107 shoots to obtain the position of the workpiece A, and then the XY-axis driving unit 2 is guided to drive the eutectic welding table 1 to move, so that the workpiece A moves below the upper and lower material adsorption unit 20;
2) The suction nozzle 203 is lifted after being driven to descend by the first cylinder 201 to suck the workpiece A, then the XY-axis driving unit 2 drives the eutectic welding table 1, so that the suction holes 119 on the ceramic heating plate 18 on the eutectic welding table 1 are aligned with the workpiece A, and the first cylinder 201 is driven to descend to place the workpiece A on the ceramic heating plate 18 and is sucked by the suction holes 119;
3) The XY axis driving unit 2 drives the eutectic welding table 1, so that a workpiece B to be grabbed in the first carrier 121 is located below the first lens barrel 105, the first light source 109 is started, the first camera 107 shoots to obtain the position of the workpiece B, then the XY axis driving unit 2 is guided to drive the eutectic welding table 1 to move, so that the workpiece B moves to the position of the pressing head assembly 5, at the moment, in order to provide space for overturning movement of the pressing head assembly 5, the visual positioning system 10 horizontally moves under the driving of the linear motor 101 to achieve abdication; the servo driving piece 8 drives the pressure sensor assembly 7 to turn over, simultaneously pushes the pressing head assembly 5 to turn down, turns over from a vertical position to a horizontal position, and adsorbs the workpiece B through the pressing rod 51;
4) The servo driving piece 8 drives the pressure sensor assembly 7 to rotate, so that the pressure sensor assembly 7 is turned to the vertical position, and meanwhile the pressing head assembly 5 is pulled to be turned to the vertical position, and at the moment, the workpiece B is adsorbed to a photographing area located in the second lens barrel 106;
5) The XY axis driving unit 2 drives the eutectic bonding stage 1 so that the work a is located below the first barrel 105;
6) Activating the second light source 110 to acquire an image of the work B at the vertical position through the second lens barrel 106 by the second camera 108; turning off the second light source 110, starting the first light source 109, and acquiring an image of the workpiece a at the horizontal position through the first lens barrel 105 by the second camera 108;
7) Comparing the two images through software processing, guiding the rotary driving mechanism 30 to drive the eutectic welding table 1 so that the placing angle of the workpiece A is consistent with that of the workpiece B; then, the XY axis driving unit 2 is guided to drive the eutectic welding table 1 to conduct fine adjustment in the X axis and Y axis directions, so that the workpiece B can be completely and accurately attached to the workpiece A after being turned to a horizontal state, in the process, the second camera 108 can dynamically acquire a position image of the workpiece A until the superposition of the two images accords with a set error range, and fine adjustment on the position of the workpiece A is stopped;
8) After the position of the workpiece A is adjusted, the servo driving piece 8 drives the pressure sensor assembly 7 to downwards press, at the moment, the pressing rod 51 adsorbs the workpiece B to be pressed with the workpiece A and tightly presses the workpiece B, and the pressure of the workpiece B is monitored in real time through the pressure sensor assembly 7;
9) The ceramic heating plate 18 is started to heat, the welding layer on the surface of the workpiece A is melted and then welded with the workpiece B, at the moment, compressed air is introduced into the cooling box block 17 to rapidly cool the ceramic heating plate 18, and the co-melting solidification efficiency of the welding of the workpiece A and the workpiece B is accelerated, so that the speed of eutectic welding is improved; in the process, the melting of the welding layer can cause slight sinking of the workpiece B, so that the pressure value monitored by the pressure sensor assembly 7 can be reduced, at the moment, the pressure sensor assembly 7 uploads data of the pressure sensor assembly to the controller, and the controller drives the eutectic welding table 1 to slightly ascend by controlling the Z-axis driving unit 3 and controls the eutectic welding table until the data acquired by the pressure sensor assembly 7 reach a set range; in the embodiment, the servo driving piece 8 is not adopted to drive the pressure sensor assembly 7 to push the pressing rod 51 to slightly downwards press down, so that the pressure of the pressing rod 51 to the workpiece B is always kept in the vertical direction, the stability and uniformity of the pressure of the workpiece B are ensured, and the angular dislocation of the workpiece A and the workpiece B is also effectively avoided;
10 After welding, the XY axis driving unit 2 drives the eutectic welding table 1 to move, so that the welded product is positioned below the upper and lower material adsorption unit 20, then the product is adsorbed by the upper and lower material adsorption unit 20, and then the eutectic welding table 1 moves, so that the third carrier 123 moves below the upper and lower material adsorption unit 20, and the product is placed on the third carrier 123 to finish discharging.
What has been described above is merely some embodiments of the present invention. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit of the invention.
Claims (6)
1. High accuracy eutectic welding equipment that can keep constant of clamp force, its characterized in that: the device comprises a eutectic welding table for supporting and fixing a workpiece A, an XY axis driving unit for driving the eutectic welding table to move in a horizontal plane, a Z axis driving unit for driving the eutectic welding table to finely adjust on a Z axis, a pressing head assembly rotatably arranged on a first support and used for pressing the workpiece B, a pressure sensor assembly rotatably arranged on a second support and used for applying pressure to the pressing head assembly, and a servo driving piece for driving the pressure sensor assembly to rotate, wherein the pressure sensor assembly and the Z axis driving unit are in closed loop control, and when pressure data of the pressure sensor assembly is smaller than a set value, the Z axis driving unit drives the eutectic welding table to move upwards until data acquired by the pressure sensor assembly are positioned in a set range;
the device also comprises a bracket, a visual positioning system and an upper and lower feeding adsorption unit which are arranged on the bracket and can move horizontally, a rotary driving mechanism which is arranged on the Z-axis driving unit and is driven by the Z-axis driving unit to move up and down, a first angle limit fine adjustment unit which limits the overturning of the pressing head assembly to a horizontal position, and a second angle limit fine adjustment unit which limits the overturning of the pressing head assembly to a vertical position;
the eutectic welding table is arranged at the rotating end of the rotary driving mechanism and driven by the rotary driving mechanism to perform rotary motion, and the XY axis driving unit and the rotary driving mechanism drive the eutectic welding table to realize the position adjustment of the workpiece A according to the position pictures of the workpiece A and the workpiece B obtained by the visual positioning system;
the first support and the second support are coaxially arranged and are all positioned below the visual positioning system;
the rotating end of the servo driving piece is provided with a first mounting seat, the first mounting seat is rotatably erected on the second support, and the pressure sensor assembly is arranged on the first mounting seat;
a rotating shaft is rotatably arranged on the first support, a second mounting seat is fixedly arranged on the rotating shaft, the pressing head assembly is arranged on the second mounting seat, and a reset elastic piece is arranged between the first mounting seat and the second mounting seat;
the pressing head assembly comprises a pressing rod, and an adsorption hole for adsorbing the workpiece B is formed in the bottom of the pressing rod;
the first angle limiting fine-tuning unit comprises a support and a limiting support rod which is arranged on the support in a threaded connection manner and can move up and down; the second angle limiting fine adjustment unit comprises a fixed seat, a storage block fixedly arranged on the fixed seat, a jacking block which can be arranged in the storage block in a vertically movable mode, and an adjusting screw rod which is arranged on the fixed seat in a threaded connection mode and is horizontally arranged, wherein a jacking ball is arranged at the upper portion of the jacking block, and an inclined plane is arranged at the lower portion of the jacking block; the other end of the adjusting screw rod is propped against the inclined plane, and the up-and-down fine adjustment movement of the top block is realized through the horizontal movement of the adjusting screw rod.
2. The high-precision eutectic welding apparatus capable of keeping a pressing force constant as claimed in claim 1, wherein: the visual positioning system comprises a linear motor, a movable plate driven by the linear motor to perform horizontal linear motion, and a photographing device fixed on the movable plate for photographing the workpiece A and the workpiece B.
3. The high-precision eutectic welding apparatus capable of keeping a pressing force constant as claimed in claim 1, wherein: the eutectic welding table comprises a bottom plate, support plates arranged on two sides of the bottom plate, transverse support plates arranged between the two support plates, a support frame hung below the transverse support plates, a storage shell fixedly arranged in the transverse support plates in a built-in mode, a support seat arranged on the support frame and extending into the storage shell, a cooling box block arranged on the support seat and overhead and positioned in the storage shell, a ceramic heating plate arranged on the cooling box block, and a cover plate covering the storage shell and provided with a welding window.
4. A high precision eutectic welding apparatus capable of maintaining a constant pressing force as claimed in claim 3, wherein: the adsorption hole penetrates through the cooling box block and the ceramic heating plate and is used for adsorbing the workpiece A.
5. The high-precision eutectic welding apparatus capable of keeping a pressing force constant according to claim 4, wherein: a side wing support plate is further arranged between the two support plates and located on two sides of the transverse support plate, a first carrier for loading a plurality of workpieces A and a second carrier for loading a plurality of workpieces B are arranged on the left side of the side wing support plate, and a third carrier for loading a mounted finished product is arranged on the right side of the side wing support plate.
6. The high-precision eutectic welding apparatus capable of keeping a pressing force constant as claimed in claim 1, wherein: the automatic feeding and discharging device comprises a workpiece A feeding unit, a workpiece B feeding unit, a workpiece A discharging unit, a workpiece B feeding unit and a discharging unit.
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| CN201910802417.2A CN110434417B (en) | 2019-08-28 | 2019-08-28 | High-precision eutectic welding equipment capable of keeping pressing force constant |
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| CN112536781B (en) * | 2020-11-25 | 2022-06-10 | 南京航空航天大学 | Static rotor bending-proof support with adjustable supporting force |
| CN113891575B (en) * | 2021-12-08 | 2022-03-08 | 泰姆瑞（北京）精密技术有限公司 | Eutectic pastes dress equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204954097U (en) * | 2015-09-23 | 2016-01-13 | 广州硅能照明有限公司 | Vacuum reaction force welding set |
| CN107123927A (en) * | 2017-06-02 | 2017-09-01 | 广东瑞谷光网通信股份有限公司 | LD chip eutectic welding systems |
| WO2018218849A1 (en) * | 2017-06-02 | 2018-12-06 | 广东瑞谷光网通信股份有限公司 | Rotational eutectic soldering station for chips |
| CN210877975U (en) * | 2019-08-28 | 2020-06-30 | 苏州猎奇智能设备有限公司 | High-precision eutectic welding equipment capable of keeping pressing force constant |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7296727B2 (en) * | 2001-06-27 | 2007-11-20 | Matsushita Electric Industrial Co., Ltd. | Apparatus and method for mounting electronic components |
-
2019
- 2019-08-28 CN CN201910802417.2A patent/CN110434417B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204954097U (en) * | 2015-09-23 | 2016-01-13 | 广州硅能照明有限公司 | Vacuum reaction force welding set |
| CN107123927A (en) * | 2017-06-02 | 2017-09-01 | 广东瑞谷光网通信股份有限公司 | LD chip eutectic welding systems |
| WO2018218849A1 (en) * | 2017-06-02 | 2018-12-06 | 广东瑞谷光网通信股份有限公司 | Rotational eutectic soldering station for chips |
| CN210877975U (en) * | 2019-08-28 | 2020-06-30 | 苏州猎奇智能设备有限公司 | High-precision eutectic welding equipment capable of keeping pressing force constant |
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